A test device and an integrated circuit test method

Abstract

The present invention discloses a test device and an integrated circuit test method, which relate to the field of integrated circuit testing, in order to solve how to simply and conveniently manufacture a test device that integrates calibration and test functions. The test chip includes: a test machine and a system calibration probe card electrically connected to the test machine; the test machine is used to provide test information to the system calibration probe card; the system calibration probe card is used to send the test information sequence to the test piece, and receive feedback information sent by the test piece according to the test information, and send feedback information to the test machine; the test machine is also used to determine the calibration value of the test machine according to the test information and the feedback information. The integrated circuit test method includes the above technical solution. The test device and integrated circuit test method provided by the present invention are used to manufacture a simpler and more convenient test device that integrates calibration and test functions.

Description

Technical Field

[0001] The present invention relates to the field of integrated circuit testing, and in particular to a testing device and an integrated circuit testing method. Background Art

[0002] Before using a wafer tester or a test system to test a memory or other chip, the wafer tester or the test system needs to be calibrated.

[0003] The calibration device in the related art is built into a wafer tester or a test system. The wafer tester with a built-in calibration device has a high degree of integration and is technically difficult to manufacture, which makes the development cycle of the wafer tester very long. Summary of the invention

[0004] The object of the present invention is to provide a test device and an integrated circuit test method, so that the test device integrating calibration and test functions can be manufactured more simply and conveniently.

[0005] In a first aspect, the present invention provides a testing device, the testing device comprising a testing machine and a system calibration probe card electrically connected to the testing machine;

[0006] The test machine is used to provide test information to the system calibration probe card;

[0007] The system calibration probe card is used to send the test information sequence to the test piece, and receive feedback information sent by the test piece according to the test information, and send feedback information to the test machine;

[0008] The test machine is also used to determine a calibration value of the test machine according to the test information and the feedback information.

[0009] Compared with the prior art, in the test equipment provided by the present invention, the test machine is electrically connected to the system calibration probe card, so that the test machine provides test information to the system calibration probe card, and the system calibration probe card sends the test information sequence to the test piece. At the same time, the system calibration probe card can receive feedback information sent by the test piece according to the test information, and send feedback information to the test machine. In this process, the system calibration probe card is actually external to the test machine to transmit the test information and feedback information between the test machine and the test piece, and finally the test machine determines the calibration value of the test machine through the test information and feedback information. It can be seen that the test equipment provided by the present invention uses an external system calibration probe card to complete the calibration of the test machine, and the system calibration probe card is no longer integrated inside the test machine, so that the integration of the test machine is reduced, the manufacturing difficulty is reduced, and the development process is shortened.

[0010] In a second aspect, the present invention further provides an integrated circuit testing method, comprising:

[0011] The test machine provides test information to the system calibration probe card;

[0012] The system calibration probe card sends the test information sequence to the test piece, receives feedback information sent by the test piece according to the test information, and sends the feedback information to the test machine;

[0013] The test machine also determines a calibration value of the test machine according to the test information and the feedback information.

[0014] Compared with the prior art, the beneficial effects of the integrated circuit testing method provided by the present invention are the same as the beneficial effects of the testing device of the above technical solution, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0016] Figure 1 A schematic diagram of the structure of a test device provided in an embodiment of the present invention;

[0017] Figure 2 A schematic diagram of the connection relationship between the input and output ports and the drive ports of the test device provided in an embodiment of the present invention;

[0018] Figure 3 A schematic diagram of the structure of a system calibration probe card provided in an embodiment of the present invention;

[0019] Figure 4 A schematic top view of a system calibration probe card provided in an embodiment of the present invention;

[0020] Figure 5 A schematic diagram of a flow chart of an integrated circuit testing method provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0021] In order to clearly describe the technical solutions of the embodiments of the present invention, in the embodiments of the present invention, words such as "first" and "second" are used to distinguish the same items or similar items with basically the same functions and effects. For example, the first threshold and the second threshold are only used to distinguish different thresholds, and their order is not limited. Those skilled in the art can understand that words such as "first" and "second" do not limit the quantity and execution order, and words such as "first" and "second" do not necessarily limit them to be different.

[0022] It should be noted that, in the present invention, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the present invention should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0023] In the present invention, "at least one" means one or more, and "plurality" means two or more. "And / or" describes the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone, where A and B can be singular or plural. The character " / " generally indicates that the associated objects before and after are in an "or" relationship. "At least one of the following" or similar expressions refers to any combination of these items, including any combination of single or plural items. For example, at least one of a, b or c can mean: a, b, c, the combination of a and b, the combination of a and c, the combination of b and c, or the combination of a, b and c, where a, b, c can be single or multiple.

[0024] In the related art, the calibration of the test machine is completed by the test machine itself. The test machine contains a system calibration probe card, which connects the test machine directly to the test piece, sends test information directly from the test machine to the test piece, and the test piece directly returns feedback information to the test machine to obtain the calibration value. The system calibration probe card built into the test machine makes the test machine highly integrated and has great technical difficulty in the manufacturing process.

[0025] In view of the above problems, an embodiment of the present invention provides a testing device which can be applied to the calibration of various testing machines. Figure 1 The structural diagram of the test device provided by the embodiment of the present invention is illustrated. Figure 1 As shown, the test equipment 100 includes a test machine 101 and a system calibration probe card 102 electrically connected to the test machine, and the two are in communication connection.

[0026] The test machine is used to provide test information to the system calibration probe card.

[0027] The system calibration probe card is used to send a test information sequence to the test piece, receive feedback information sent by the test piece according to the test information, and send feedback information to the test machine.

[0028] The test machine is also used to determine a calibration value of the test machine based on the test information and the feedback information.

[0029] In practical applications, since there may be multiple or multiple calibrations for the test machine, multiple test information is required, and the multiple test information constitutes a test information sequence. Feedback information is the information returned after the test information sequence reaches the test piece after passing through different paths and being affected by factors such as temperature. There is a time delay, or time deviation, between the test information and the feedback information. This deviation is within the allowable error range to achieve the calibration of the test machine.

[0030] The above-mentioned test machine may include a controller, multiple comparators, multiple input and output ports and multiple drive ports, the first signal input terminal of each comparator is electrically connected to the controller, the second signal input terminal of each comparator is electrically connected to the corresponding input and output port, and the signal output terminal of each comparator is electrically connected to the controller; each drive port and each input and output port are electrically connected to the system calibration probe card.

[0031] The multiple input and output ports of the above test machine correspond to multiple comparators one by one, and it can be understood that the comparator is a comparator of the input and output ports. The multiple input and output ports can transmit signals with higher precision, and the multiple drive ports can transmit signals with relatively lower precision, and the drive port is a unidirectional port. Figure 2 The following is a schematic diagram illustrating the connection relationship between the input and output ports and the drive ports of the test device provided by the embodiment of the present invention. Figure 2 As shown, the drive port 104 of the test machine can only input information to the test piece, and the input / output port 103 can receive feedback information from the test piece and can also send test information to the test piece.

[0032] In actual applications, if the test piece is a memory element, the memory element is divided into ports that require input and output functions and ports that only require input according to their functions. The multiple input and output ports and multiple drive ports of the test machine communicate with the ports of the memory element's input and output functions and the ports that only require input through the system calibration probe card. Because the production cost of the input and output ports is expensive, the manufacturers of the test machine will adjust the number of input and output ports and drive ports according to a certain ratio, and minimize the number of input and output ports when producing the test machine.

[0033] Figure 3 The structural diagram of the system calibration probe card provided by the embodiment of the present invention is illustrated. Figure 3As shown, the system calibration probe card includes: a test head 201 electrically connected to the test machine, the test head 201 is used to receive test information sent by the test machine, send test information to the probe card component 203, receive feedback information sent by the probe card component 203, and send feedback information to the test machine; and a probe card component 203 electrically connected to the test head 201, the probe card component 203 is used to receive the test information sent by the test head 201, send test information to the test piece, receive feedback information sent by the test piece, and send feedback information to the test head 201.

[0034] In practical applications, such as Figure 3 As shown, the above system calibration probe card also includes: a wafer motherboard 204, and the test head 201 is electrically connected to the probe card assembly 203 through the wafer motherboard 204. Figure 3 As shown, the test head 201 is connected to the wafer motherboard 204, and the probe card assembly 203 is further connected to the wafer motherboard 204. The test head 201 includes multiple test boards 202, each of which has multiple input and output ports and multiple drive ports built in. The multiple test boards 202 gather thousands of input and output ports and drive ports. In order to distinguish the ports of the test machine from the ports in the test board, the ports of the test machine are named the first input and output port and the first drive port, and the ports in the test board are named the second input and output port and the second drive port.

[0035] In terms of categories, the calibration values ​​of the above tester include: comparator calibration values, drive port calibration values ​​and input / output port calibration values. At this time, a probe card assembly can be used in conjunction with the tester to complete the test of these calibration values, or a probe card assembly consisting of a first calibration probe card, a second calibration probe card and a third calibration probe card can be used in conjunction with the tester to complete the test of these calibration values.

[0036] The calibration values ​​of the test machine also include: a first calibration value, a second calibration value and a third calibration value; the first calibration value is the maximum value among multiple comparator calibration values, the second calibration value is the maximum value among multiple drive port calibration values, and the third calibration value is the maximum value among multiple input and output port calibration values.

[0037] In practical applications, the final calibration values ​​of the test machine are the first calibration value, the second calibration value and the third calibration value. The first calibration value is used to correct the success or failure judgment value of the test piece.

[0038] Figure 4 A schematic top view of a system calibration probe card provided by an embodiment of the present invention is shown as follows: Figure 4 As shown, it can be seen that multiple test boards 202 are placed in different positions, and different test boards 202 correspond to different calibration probe cards.

[0039] In practical applications, to obtain three calibration values ​​of the test machine, the test information needs to be divided into first test information and second test signals according to the type, and the feedback information includes the first feedback signal and the second feedback signal.

[0040] The first calibration probe card is used to send the first test signals provided by the plurality of first input and output ports to the test piece, and to send the first feedback signals provided by the test piece to the corresponding first input and output ports;

[0041] Each first input / output port is used to send a first test signal to the system calibration probe card and receive a first feedback signal sent by the system calibration probe card; each comparator is used to determine a comparator calibration value sent to the controller based on the first test signal and the first feedback signal provided by the corresponding first input / output port.

[0042] In actual application, the multiple first input and output ports of the test machine input the first test signal to the fixed second input and output port of the corresponding test board in the test head, and the second input and output port then transmits the first test signal to the first calibration probe card through the wafer motherboard, and the first calibration probe card sends the first test signal to the test piece, and the first test signal generates a first feedback signal through the test piece response, and returns along the original path. In other words, the test piece feeds back the first feedback signal to the first calibration probe card that originally sent the first test signal, and then returns to the second input and output port of the test board in the test head through the first calibration probe card, and finally transmits it to the corresponding comparator of the first input and output port. The comparator compares the first test signal with the first feedback signal to obtain the calibration value of the comparator corresponding to the first input and output port. Since there are multiple first input and output ports, multiple comparator calibration values ​​will be obtained, and the calibration value of the first input and output port comparator that arrives the latest is used as the calibration value of the first input and output port comparator, that is, the first calibration value.

[0043] The second calibration probe card is used to send the second test signals provided by the plurality of first drive ports to the test piece, and to send the second feedback signals provided by the test piece to the corresponding first input / output ports.

[0044] The test information also includes a second test signal, and the feedback information also includes a second feedback signal; the controller is used to determine the priority of the multiple comparators according to the calibration values ​​of each comparator; each first drive port is used to receive the second test signal provided by the controller and provide the second test signal to the corresponding system calibration probe card;

[0045] Each first input / output port is also used to receive a second test signal and provide a second feedback signal to the corresponding comparator according to the priority of multiple comparators; each comparator is also used to send a drive port calibration value to the controller based on the second test signal and the second feedback signal provided by the corresponding first input / output port.

[0046] In practical applications, for example, the first input / output port includes a first input / output port A, a first input / output port B, and a first input / output port C. The first input / output port A first receives the first feedback signal, and the calibration value of the first input / output port is 3.6V. The first input / output port B then receives the first feedback signal, and the calibration value is 3.8V. The first input / output port C receives the first feedback signal last, and the calibration value is 3.9V. Then, 3.9V is used as the calibration value of the first input / output port. Then, the comparators A, B, and C corresponding to each first input / output port are sorted according to the calibration value. A sorted comparator group is obtained.

[0047] According to the above example, the plurality of first drive ports send the second test signal to the test piece through the second calibration probe card, and then the plurality of first input / output ports receive the second feedback signal sent by the second calibration probe card according to the sorted comparator group. The plurality of first drive ports correspond to the plurality of drive port calibration values, and the calibration value of the first input / output port comparator that arrives the latest is used as the first drive port calibration value, that is, the second calibration value.

[0048] The third calibration probe card is used to send the first test signal provided by the odd-bit input and output port to the test piece, and to send the first feedback signal to the comparator of the corresponding even-bit input and output port; it is also used to send the first test signal provided by the even-bit input and output port to the test piece, and to send the first feedback signal to the comparator of the corresponding odd-bit input and output port.

[0049] The plurality of comparators include a plurality of odd-numbered comparators and a plurality of even-numbered comparators in order of priority of the comparators.

[0050] In practical applications, for example, according to the priority order of the comparators, the comparators are sorted as comparator A, comparator B, comparator C, and comparator D, then comparator A and comparator C are odd comparators, and comparator B and comparator D are even comparators. Similarly, the multiple first input and output ports also have odd-numbered first input and output ports and even-numbered first input and output ports.

[0051] Each even comparator is used to receive a first feedback signal corresponding to a corresponding odd-numbered input / output port, and send an odd-numbered input / output port calibration value to the controller according to the first test signal and the first feedback signal corresponding to the corresponding odd-numbered input / output port;

[0052] Each of the odd comparators is used to receive a first feedback signal corresponding to the corresponding even-bit input / output port, and send an even-bit input / output port calibration value to the controller based on the first test signal and the first feedback signal corresponding to the corresponding even-bit input / output port; the above-mentioned controller is also used to determine the input / output port calibration value, i.e., the third calibration value, based on the even-bit input / output port calibration value and the odd-bit input / output port calibration value.

[0053] In practical applications, multiple odd-numbered first input / output ports send a first test signal to the test piece through a third calibration probe card, and the test piece sends a first feedback signal to the even-numbered comparator. Multiple odd-numbered first input / output ports correspond to multiple calibration values, and the calibration value of the even-numbered comparator that arrives the latest is used as the calibration value of the odd-numbered first input / output port. Similarly, multiple even-numbered first input / output ports correspond to multiple calibration values, and the calibration value of the odd-numbered comparator that arrives the latest is used as the calibration value of the even-numbered first input / output port. The average of the calibration values ​​of the odd-numbered first input / output ports and the calibration values ​​of the even-numbered first input / output ports can be used as the calibration value of the first input / output port, but this calculation method is not limited.

[0054] The test equipment provided by the present invention includes a test machine and a system calibration probe card electrically connected to the test machine. The test machine provides test information to the system calibration probe card, and the system calibration probe card sends the test information sequence to the test piece, and receives feedback information sent by the test piece according to the test information, and sends feedback information to the test machine. The system calibration probe card is external to the test machine, and the test information and feedback information are transmitted between the test machine and the test piece. Finally, the test machine determines the calibration value of the test machine through the test information and the feedback information. The test equipment of the present invention uses an external system calibration probe card to complete the calibration of the test machine, and the system calibration probe card is no longer integrated inside the test machine, so that the integration of the test machine is reduced, the manufacturing difficulty is reduced, and the development process is shortened.

[0055] Based on the structure of the above test equipment, Figure 5 A flow chart of an integrated circuit testing method is provided for this embodiment. The integrated circuit testing method comprises the following steps:

[0056] Step 501: The test machine provides test information to the system calibration probe card;

[0057] Step 502: the system calibration probe card sends the test information sequence to the test piece, receives feedback information sent by the test piece according to the test information, and sends the feedback information to the test machine;

[0058] Step 503: The test machine also determines the calibration value of the test machine according to the test information and the feedback information.

[0059] As an implementable method, the calibration value of the test machine includes: a first calibration value, a second calibration value and a third calibration value; the first calibration value is the maximum value among multiple comparator calibration values, the second calibration value is the maximum value among multiple drive port calibration values, and the third calibration value is the maximum value among multiple input and output port calibration values.

[0060] The beneficial effects of the integrated circuit testing method provided by the embodiment of the present invention can be referred to the beneficial effects description of the testing device above, and will not be elaborated here.

Claims

1. A testing device, characterized in that: The test equipment includes a test machine and a system calibration probe card electrically connected to the test machine; The test machine is used to provide test information to the system calibration probe card; The system calibration probe card is used to send a test information sequence to the test piece, and receive feedback information sent by the test piece according to the test information, and send feedback information to the test machine; The test machine is also used to determine a calibration value of the test machine according to the test information and the feedback information; The calibration values ​​of the test machine include: comparator calibration value, drive port calibration value and input and output port calibration value; The test machine includes a controller, a plurality of comparators, a plurality of input and output ports and a plurality of drive ports, wherein the first signal input terminal of each comparator is electrically connected to the controller, the second signal input terminal of each comparator is electrically connected to the corresponding input and output port, and the signal output terminal of each comparator is electrically connected to the controller; each of the drive ports and each of the input and output ports are electrically connected to the system calibration probe card; The calibration values ​​of the test machine also include: a first calibration value, a second calibration value and a third calibration value; the first calibration value is the maximum value among multiple comparator calibration values, the second calibration value is the maximum value among multiple drive port calibration values, and the third calibration value is the maximum value among multiple input and output port calibration values.

2. The test device according to claim 1, characterized in that The test information includes a first test signal, and the feedback information includes a first feedback signal; each of the input and output ports is used to send the first test signal to the system calibration probe card; Each of the input and output ports is used to receive a first feedback signal sent by the system calibration probe card; Each of the comparators is used to determine a comparator calibration value sent to the controller according to the first test signal and a first feedback signal provided by the corresponding input and output port.

3. The testing device according to claim 1, characterized in that The test information further includes a second test signal, and the feedback information further includes a second feedback signal; The controller is used to determine the priority of multiple comparators according to the calibration values ​​of each comparator; Each drive port is used to receive the second test signal provided by the controller and provide the second test signal to the corresponding system calibration probe card; Each of the input and output ports is further used to receive the second test signal and provide a second feedback signal to the corresponding comparator according to the priority of the plurality of comparators; Each of the comparators is used to send a drive port calibration value to the controller according to the second test signal and a second feedback signal provided by the corresponding input / output port.

4. The testing device according to claim 2, characterized in that The controller is used to determine the priority of multiple comparators according to the calibration values ​​of each comparator; the multiple comparators include multiple odd comparators and multiple even comparators; Each of the even comparators is used to receive a first feedback signal corresponding to a corresponding odd-numbered input / output port, and send a calibration value of the odd-numbered input / output port to the controller according to a first test signal and the first feedback signal corresponding to the corresponding odd-numbered input / output port; Each of the odd comparators is used to receive a first feedback signal corresponding to a corresponding even-numbered input / output port, and send a calibration value of the even-numbered input / output port to the controller according to the first test signal and the first feedback signal corresponding to the corresponding even-numbered input / output port; The controller is used to determine the input / output port calibration value according to the even-numbered input / output port calibration value and the odd-numbered input / output port calibration value.

5. The testing device according to claim 1, characterized in that The system calibration probe card includes: A test head electrically connected to the test machine, the test head being used to receive test information sent by the test machine, send the test information to the probe card assembly, receive feedback information sent by the probe card assembly, and send the feedback information to the test machine; and a probe card assembly electrically connected to the plurality of test heads, the probe card assembly being used to receive test information sent by the test heads, send the test information to the test piece, receive feedback information sent by the test piece, and send the feedback information to the test heads.

6. The testing device according to claim 5, characterized in that The test information includes a first test signal and a second test signal, and the feedback information includes a first feedback signal and a second feedback signal; wherein, The probe card assembly comprises: a first calibration probe card electrically connected to the test head, used to send first test signals provided by a plurality of input and output ports to the test piece, and to send first feedback signals provided by the test piece to corresponding input and output ports; a second calibration probe card electrically connected to the test head, used to send second test signals provided by a plurality of drive ports to the test piece, and to send the second feedback signal provided by the test piece to the corresponding input and output ports; A third calibration probe card electrically connected to the test head is used to send the first test signal provided by the odd-bit input and output port to the test piece, and send the first feedback signal to the comparator of the corresponding even-bit input and output port; send the first test signal provided by the even-bit input and output port to the test piece, and send the first feedback signal to the comparator of the corresponding odd-bit input and output port.

7. The testing device according to claim 6, characterized in that The system calibration probe card further includes: a wafer motherboard, and the test head is electrically connected to the probe card assembly through the wafer motherboard.

8. An integrated circuit testing method, characterized in that: Using the test device according to any one of claims 1 to 7, the integrated circuit testing method comprises: The test machine provides test information to the system calibration probe card; The system calibration probe card sends the test information sequence to the test piece, receives feedback information sent by the test piece according to the test information, and sends the feedback information to the test machine; The test machine also determines a calibration value of the test machine according to the test information and the feedback information.

9. The integrated circuit testing method according to claim 8, characterized in that: The calibration values ​​of the test machine include: a first calibration value, a second calibration value and a third calibration value; the first calibration value is the maximum value among multiple comparator calibration values, the second calibration value is the maximum value among multiple drive port calibration values, and the third calibration value is the maximum value among multiple input and output port calibration values.

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