Method for using a sample phase delay measurement system for incident angle scanning

Abstract

The present application relates to a method for using a sample phase delay measurement system for incident angle scanning, and relates to the technical field of incident angle scanning, which includes the following steps: S1: placing the sample on a sample stage; S2: measuring, finding the fast and slow axes of the sample; S3: rotating the fast axis or slow axis direction into the incident plane, setting the polarizing arm and the analyzing arm on the same straight line, and performing transmission measurement on the sample; S4: adjusting the angle between the polarizing arm and the analyzing arm, and performing reflection measurement on the sample; S5: rotating the sample, changing the incident angle, and measuring transmission or reflection. The present application has the effect that the system can perform both transmission and reflection of incident angle scanning for samples of different thicknesses.

Description

Technical Field

[0001] The present application relates to the technical field of incident angle scanning, and in particular to a method for using a sample phase delay measurement system for incident angle scanning. Background Art

[0002] Phase delay is the phase retardation caused by the deflection of light when passing through a diphasic or omnidirectional substance.

[0003] The phase delay measurement system mainly performs phase delay measurement on samples. The phase delay measurement system includes a polarizing arm, an analyzing arm and a sample stage. The sample stage is located between the polarizing arm and the analyzing arm and is used to place the sample. The polarizing arm emits a light beam to the sample, and the analyzing arm is used to detect the polarization state of the light beam. Traditionally, the polarizing arm and the analyzing arm are located on the same straight line, so only transmission measurement can be performed on the sample. However, when the sample has a certain thickness and the sample is not placed perpendicular to the light emitted by the polarizing arm, the light passing through the sample will produce a light offset due to refraction, causing the incident light and the outgoing light to be not on the same straight line.

[0004] With respect to the above-mentioned related technologies, the inventor believes that the existing phase delay measurement system has the defect of not being able to perform both transmission measurement and reflection measurement. Summary of the invention

[0005] In order to improve the technical problem that the existing phase delay measurement system cannot perform both transmission measurement and reflection measurement, the present application provides a method for using a sample phase delay measurement system with incident angle scanning.

[0006] The present application provides a method for using a sample phase delay measurement system for incident angle scanning using the following technical solution:

[0007] S1: Place the sample on the sample stage;

[0008] S2: Measure and find the fast and slow axes of the sample;

[0009] S3: Rotate the fast axis or slow axis to the incident plane, set the polarizing arm and the analyzing arm on the same straight line, and perform transmission measurement on the sample;

[0010] S4: Adjust the angle between the polarizing arm and the analyzing arm to perform reflection measurement on the sample;

[0011] S5: Rotate the sample, change the incident angle, and measure the transmission or reflection.

[0012] By adopting the above technical solution, the sample is first measured by different methods such as Mueller matrix or single C rotation to obtain the positions of the fast axis and slow axis of the sample. When the analyzer arm and the polarizer arm are located on the same light ray, the sample can be measured in transmission. When an angle is generated between the analyzer arm and the polarizer arm by adjusting the sample stage, the sample can be measured in reflection. Through the above, the system can perform both transmission and reflection measurements, saving operation time and improving measurement efficiency. The system can also be used to find the fast axis and slow axis of the sample, thereby improving the applicability of the system.

[0013] Optionally, a bottom rotating table is arranged below the sample table, and the sample table includes an intermediate rotating table and a vertical rotating table arranged in sequence from bottom to top, and the intermediate rotating table and the bottom rotating table are coaxially arranged, and the sample is placed on the vertical rotating table.

[0014] By adopting the above technical solution, the middle rotating table and the bottom rotating table are coaxially arranged, and the vertical rotating table is arranged on the side of the middle rotating table away from the bottom rotating table. The sample is placed on the vertical rotating table, so that the change of the incident angle during transmission measurement can be achieved by rotating the middle rotating table, and the change of the incident angle during reflection measurement can be achieved by rotating the bottom rotating table.

[0015] Optionally, the analyzer arm is fixed on the bottom rotating table, a translation table is arranged between the analyzer arm and the bottom rotating table, and the analyzer arm moves on the translation table.

[0016] By adopting the above technical solution, the setting of the translation stage enables the polarization analyzer arm to compensate for the light deviation caused by the change of the incident angle through translation.

[0017] Optionally, when step S3 is implemented, the vertical rotating stage is rotated to make the fast axis or the slow axis of the sample horizontal, and the intermediate rotating stage is rotated to change the angle between the light beam emitted by the polarizing arm and the sample.

[0018] By adopting the above technical solution, the sample is scanned at the incident angle.

[0019] Optionally, the analyzing arm is operated to move on the translation stage while scanning the incident angle of the sample.

[0020] By adopting the above technical solution, when the thickness of the sample is relatively thick, the light beam emitted by the polarizing arm will be refracted on the sample. After the refraction, the light beam transmitted from the sample will be shifted. At this time, the polarizing arm is operated to shift on the translation stage to compensate for the light deviation caused by the change in the incident angle.

[0021] Optionally, the moving direction of the translation stage is perpendicular to the direction of the light beam emitted by the polarizing arm.

[0022] By adopting the above technical solution, it is ensured that the light beam emitted by the polarizing arm can enter the analyzing arm.

[0023] Optionally, when step S4 is implemented, the bottom rotating stage is rotated to change the angle between the direction of the light beam emitted by the polarizing arm and the analyzing arm.

[0024] By adopting the above technical solution, the angle between the incident light beam emitted by the polarizing arm and the outgoing light beam emitted after passing through the sample changes, thereby realizing incident angle scanning of reflection measurement.

[0025] Optionally, when scanning the sample, the middle rotating stage is rotated first and then the bottom rotating stage.

[0026] By adopting the above technical solution, when the thickness of the sample is relatively thin, the incident angle between the light beam emitted by the polarizing arm and the sample is changed through the middle rotating table. At this time, it is only necessary to rotate the bottom rotating table so that the polarizing arm can receive the light beam passing through the sample.

[0027] Optionally, when scanning the sample, the middle rotating stage is rotated first, then the bottom rotating stage is rotated, and then the polarization analyzing arm is translated on the translation stage.

[0028] By adopting the above technical solution, when the sample is thick, the middle rotating table and the bottom rotating table are rotated and then the polarization analyzing arm is operated to translate on the translation table to receive the light beam passing through the sample.

[0029] In summary, the present application includes at least one of the following beneficial technical effects:

[0030] 1. The system can perform both transmission and reflection scanning of incident angles for samples of different thicknesses, saving operation time and improving measurement efficiency;

[0031] 2. The system can also be used to find the fast axis and slow axis of the sample, improving the applicability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram of the structure of an embodiment of the present application.

[0033] Figure 2 Schematic diagram of the intermediate drive device in the embodiment of the present application.

[0034] Figure 3 Schematic diagram of the bottom driving device in the embodiment of the present application.

[0035] Figure 4 yes Figure 2 Enlarged schematic diagram of part A.

[0036] Explanation of the accompanying drawings: 1. polarizing arm; 2. sample stage; 21. intermediate rotating table; 211. intermediate driving device; 2111. intermediate motor; 2112. intermediate worm gear; 2113. intermediate worm; 22. vertical rotating table; 221. vertical driving device; 3. bottom rotating table; 31. bottom driving device; 4. polarizing arm; 5. alignment part; 6. translation stage; 61. slideway; 611. perforation; 62. slider; 63. driving motor. DETAILED DESCRIPTION

[0037] The following is combined with Figure 1-4 This application is described in further detail.

[0038] The present application embodiment discloses a method for using a sample phase delay measurement system for incident angle scanning. Figure 1 A sample phase delay measurement system for incident angle scanning includes a polarizing arm 1, a sample stage 2, a bottom rotating stage 3, and an analyzing arm 4; the analyzing arm 4 is fixed on the bottom rotating stage 3, the sample stage 2 is coaxially arranged with the bottom rotating stage 3, and is located between the polarizing arm 1 and the analyzing arm 4, the sample stage 2 is used to place a sample to be tested, the polarizing arm 1 emits a light beam to the sample, and the analyzing arm 4 is used to detect the polarization state of the light beam after passing through the sample. The system is also provided with an alignment part 5, through which the sample to be tested can be placed in a suitable position.

[0039] Reference Figure 1 The sample stage 2 includes an intermediate rotating stage 21 and a vertical rotating stage 22 which are arranged in sequence from bottom to top; the intermediate rotating stage 21 is coaxially arranged with the bottom rotating stage 3, the vertical rotating stage 22 is vertically arranged on the intermediate rotating stage 21, and the sample is placed on the vertical rotating stage 22.

[0040] Reference Figure 2 and Figure 3 The intermediate rotating table 21 is provided with an intermediate driving device 211, and the intermediate rotating table 21 is driven to rotate by the intermediate driving device 211. The intermediate driving device 211 includes an intermediate motor 2111, an intermediate worm gear 2112 and an intermediate worm 2113. The intermediate worm gear 2112 is arranged around the outer circumference of the intermediate rotating table 21. The intermediate worm 2113 is adapted to the intermediate worm gear 2112, and the intermediate worm 2113 is connected to the intermediate motor 2111, so that the intermediate rotating table 21 is driven to rotate by the intermediate motor 2111. The intermediate rotating table 21 is also provided with a scale, and the scale is arranged around the circumference of the intermediate rotating table 21, so that the angle of the intermediate rotating table 21 is more accurate when rotating.

[0041] Reference Figure 1 and Figure 2, a vertical driving device 221 is provided on the vertical rotating platform 22, and the vertical rotating platform 22 is driven to rotate by the vertical driving device 221, so that the operation is convenient. The vertical driving device 221 includes a vertical motor (not marked in the figure), a vertical worm wheel (not marked in the figure) and a vertical worm (not marked in the figure). The vertical worm wheel is arranged around the outer peripheral surface of the vertical rotating platform 22. The vertical worm and the vertical worm wheel are adapted, and the vertical worm is connected to the vertical motor, so that the vertical rotating platform 22 is driven to rotate by the vertical motor. And a scale is also provided on the vertical rotating platform 22.

[0042] Reference Figure 2 and Figure 4 A translation stage 6 is provided between the bottom rotating table 3 and the analyzer arm 4. The translation stage 6 includes a slideway 61 fixed on the bottom rotating table 3 and a slider 62 fixed on the analyzer arm 4. The slider 62 and the slideway 61 are adapted to each other, so that the slider 62 can slide on the slideway 61, thereby making the analyzer arm 4 slide on the slideway 61, and the moving direction of the analyzer arm 4 is parallel to the tangential direction of the bottom rotating table 3. A through hole 611 is provided at one end of the slideway 61, and a driving motor 63 is also provided at the end. The shaft of the driving motor 63 passes through the through hole 611 and is fixedly connected to one end of the slider 62, so that the slider 62 can slide on the slideway 61 through the driving motor 63, thereby making it easy to operate the analyzer arm 4 when translating on the translation stage 6.

[0043] Reference Figure 3 The bottom rotating platform 3 is provided with a bottom driving device 31, which includes a bottom motor (not marked in the figure), a bottom worm wheel (not marked in the figure) and a bottom worm (not marked in the figure). The bottom worm wheel is arranged around the outer circumference of the bottom rotating platform 3. The bottom worm and the bottom worm wheel are adapted, and the bottom worm is connected to the bottom motor, so that the bottom rotating platform 3 is driven to rotate by the bottom motor. Similarly, a scale is also provided on the bottom rotating platform 3.

[0044] The method of using this application includes the following steps:

[0045] S1: Reference Figure 1 , first place the sample on the vertical rotating table 22;

[0046] S2: Reference Figure 1 , the sample is rotated with the direction of the light beam emitted by the polarizing arm 1 as the axis, and the sample is measured by different methods such as Mueller matrix or single C rotation to obtain the positions of the fast axis and slow axis of the sample:

[0047] S3: Reference Figure 1When performing transmission measurement on the sample, the fast axis or slow axis is rotated to the incident plane so that the polarizing arm 1 and the analyzing arm 4 are located on the same light ray. The vertical rotating table 22 is rotated to make the fast axis or slow axis of the sample horizontal. The intermediate rotating table 21 is rotated to change the angle between the light beam emitted by the polarizing arm 1 and the sample, and the incident angle of the sample is scanned.

[0048] Reference Figure 2 and Figure 4 When the sample is thick, when the light beam emitted by the polarizing arm 1 shines on the thick sample, the light beam will be refracted on the sample, so that the light will shift when passing through the sample. At this time, the polarizing arm 4 is operated to shift on the translation stage 6 to compensate for the light shift caused by the change of the incident angle.

[0049] S4: Reference Figure 1 When making reflection measurement on a sample, when the thickness of the sample is relatively thin, the incident angle between the light beam emitted by the polarizing arm 1 and the sample is changed by rotating the middle rotating table 21. At this time, the analyzing arm 4 can receive the light beam passing through the sample by simply rotating the bottom rotating table 3.

[0050] Reference Figure 2 and Figure 4 When scanning a thick sample, after rotating the middle rotating stage 21 and the bottom rotating stage 3, it is also necessary to translate the polarization analyzer arm 4 on the translation stage 6 to receive the light beam passing through the sample.

[0051] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A method for using a sample phase delay measurement system for incident angle scanning, characterized in that: The incident angle scanning sample phase delay measurement system comprises a polarizing arm (1), a sample stage (2), a bottom rotating stage (3) and an analyzing arm (4); the analyzing arm (4) is fixedly mounted on the bottom rotating stage (3); the sample stage (2) and the bottom rotating stage (3) are coaxially arranged and located between the polarizing arm (1) and the analyzing arm (4); the sample stage (2) is used to place a sample to be measured; the polarizing arm (1) emits a light beam to the sample; and the analyzing arm (4) is used to detect the polarization state of the light beam after passing through the sample; the sample stage (2) comprises an intermediate rotating stage (21) and a vertical rotating stage (22) which are arranged in sequence from bottom to top; the intermediate rotating stage (21) and the bottom rotating stage (3) are coaxially arranged and located between the polarizing arm (1) and the analyzing arm (4); The rotating table (3) is coaxially arranged, the vertical rotating table (22) is vertically arranged on the middle rotating table (21), and the sample is placed on the vertical rotating table (22); a translation table (6) is arranged between the bottom rotating table (3) and the analysis arm (4), and the translation table (6) comprises a slideway (61) fixed on the bottom rotating table (3) and a slider (62) fixed on the analysis arm (4), the slider (62) and the slideway (61) are adapted to each other, so that the slider (62) can slide on the slideway (61), thereby making the analysis arm (4) slide on the slideway (61), and the moving direction of the analysis arm (4) is parallel to the tangential direction of the bottom rotating table (3); The method of use The following steps are involved: S1: placing the sample on the sample stage (2); S2: Measure and find the fast and slow axes of the sample; S3: Rotate the fast axis or slow axis direction to the incident plane, set the polarizing arm (1) and the analyzing arm (4) on the same straight line, and perform transmission measurement on the sample; S4: adjusting the angle between the polarizing arm (1) and the analyzing arm (4) to perform reflection measurement on the sample; S5: Rotate the sample, change the incident angle, and measure the transmission or reflection.

2. The method for using the incident angle scanning sample phase delay measurement system according to claim 1, characterized in that: When performing transmission measurement on a sample, the fast axis or slow axis is rotated to the incident plane so that the polarizing arm (1) and the analyzing arm (4) are located on the same light beam. The vertical rotating table (22) is rotated to make the fast axis or slow axis of the sample horizontal. The intermediate rotating table (21) is rotated to change the angle between the light beam emitted by the polarizing arm (1) and the sample, and the incident angle of the sample is scanned.

3. The method for using the incident angle scanning sample phase delay measurement system according to claim 1, characterized in that: When performing transmission measurement on a sample, if the sample is thick, the light beam emitted by the polarizing arm (1) will illuminate the thick sample, and the light beam will be refracted on the sample, causing the light to shift when passing through the sample. At this time, the polarizing arm (4) is operated to shift on the translation stage (6) to compensate for the light shift caused by the change in the incident angle.

4. The method for using the incident angle scanning sample phase delay measurement system according to claim 1, characterized in that: When performing reflection measurement on a sample, when the thickness of the sample is relatively thin, the incident angle between the light beam emitted by the polarizing arm (1) and the sample is changed by rotating the middle rotating table (21). At this time, the analyzing arm (4) can receive the light beam transmitted through the sample simply by rotating the bottom rotating table (3).

5. The method for using the incident angle scanning sample phase delay measurement system according to claim 1, characterized in that: When performing reflection measurement on a sample, when scanning a thicker sample, the middle rotating stage (21) and the bottom rotating stage (3) are rotated, and then the polarization analysis arm (4) is translated on the translation stage (6) to receive the light beam passing through the sample.

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