Overlay mark screening method, mask processing method and device, computer device, storage medium and program product

Abstract

This invention relates to the field of photolithography, and particularly to a method for screening overlay markers. The method involves acquiring parameters of multiple sets of overlay markers to be screened; simplifying the overlay markers to be screened based on a preset simplification standard to obtain simplified overlay markers; and screening the simplified overlay markers based on the preset screening standard to obtain screened overlay markers. This invention also provides a mask processing method, apparatus, computer equipment, storage medium, and program product. The overlay marker screening method, mask processing method, apparatus, computer equipment, storage medium, and program product provided by this invention solve the technical problems of large computational load, long running time, and high computational resource requirements in overlay marker simulation and optimization.

Description

[Technical Field]

[0001] This invention relates to the field of photolithography, and particularly to a method for screening overprinted markings, a mask processing method, an apparatus, a computer device, a storage medium, and a program product. [Background Technology]

[0002] In the multilayer chip manufacturing process, multiple photolithography processes are required. How to efficiently design suitable overlay marking patterns for accurate measurement of overlay errors between layers has become an urgent technical problem to be solved.

[0003] The current traditional method for screening overprinted logos requires a lot of calculations and is time-consuming. [Summary of the Invention]

[0004] To address the issues of high computational load and long runtime in overlay identification simulation optimization, this invention provides a method for screening overlay identification, a mask processing method, an apparatus, a computer device, a storage medium, and a program product.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a method for screening overprinted marks, wherein the lines of the overprinted marks are in the same direction and include at least two repeated lines, the screening method comprising the following steps: obtaining parameters of multiple sets of overprinted marks to be screened; simplifying the overprinted marks to be screened based on a preset simplification standard to obtain simplified overprinted marks; and screening the simplified overprinted marks based on the preset screening standard to obtain screened overprinted marks.

[0006] Preferably, the overprinted identifier to be screened is a DBO identifier, and multiple horizontal DBO identifiers and / or vertical DBO identifiers constitute a uDBO identifier. Before inputting the parameters of multiple sets of overprinted identifiers to be screened, the method further includes the following steps: inputting the parameters of the uDBO identifier; removing duplicate DBO identifiers from the uDBO identifier to obtain a simplified uDBO identifier; extracting the horizontal DBO identifiers and / or vertical DBO identifiers from the simplified uDBO identifier, wherein the horizontal DBO identifiers and / or vertical DBO identifiers are the overprinted identifiers to be screened.

[0007] Preferably, after obtaining the horizontal DBO identifier and / or the vertical DBO identifier, the method further includes the following steps: simplifying the horizontal DBO identifier and / or the vertical DBO identifier based on a preset simplification standard to obtain simplified horizontal DBO identifiers and / or vertical DBO identifiers; filtering the simplified horizontal DBO identifiers and / or vertical DBO identifiers based on a preset filtering standard to obtain filtered horizontal DBO identifiers and / or vertical DBO identifiers.

[0008] Preferably, the process of filtering the simplified horizontal DBO identifiers and / or vertical DBO identifiers includes the following steps: generating multiple sets of identifier masks to be filtered based on the horizontal and / or vertical DBO identifiers; filtering the multiple sets of identifier masks to be filtered based on preset standards and methods to obtain filtered identifier masks; and obtaining the filtered DBO identifiers based on the filtered identifier masks.

[0009] Preferably, the parameters of the uDBO identifier to be screened include one or more combinations of the following: the period of the overlay identifier, the critical dimension, the length, the width, the number of periods, the offset, and the segmentation parameters.

[0010] Preferably, the parameters of the DBO identifier include: period, critical dimension, length, width, and segmentation parameters.

[0011] To solve the above-mentioned technical problems, the present invention provides another technical solution as follows: a mask processing method, including the steps of the above method, and after obtaining the filtered overlay marks, outputting overlay marks to optimize the mask based on the filtered overlay marks.

[0012] To solve the above-mentioned technical problems, the present invention provides another technical solution as follows: an apparatus for applying the above method, comprising an input module for multiple sets of overprinted identifier parameters to be screened, a simplification module for simplifying the overprinted identifiers, a screening module for screening the overprinted identifiers, and an output module for outputting the screened overprinted identifiers.

[0013] To solve the above-mentioned technical problems, the present invention provides another technical solution as follows: a computer device, including a memory, a processor, and a computer program stored in the memory, wherein the processor executes the computer program to implement the steps of the above-mentioned method.

[0014] To solve the above-mentioned technical problems, the present invention provides another technical solution as follows: a computer-readable storage medium, wherein the computer program instructions, when executed by a processor, implement the steps of the above-mentioned method.

[0015] To solve the above-mentioned technical problems, the present invention provides another technical solution as follows: a computer program product, comprising a computer program or instructions, wherein the computer program or instructions, when executed by a processor, implement the steps of the above-mentioned method.

[0016] Compared with the prior art, the screening method, mask processing method, apparatus, computer equipment, storage medium, and program product for overlay marking provided by the present invention have the following beneficial effects:

[0017] 1. A method for filtering overprinted identifiers, wherein the overprinted identifiers have consistent line directions and include at least two repeating lines. The filtering method includes the following steps: obtaining parameters of multiple sets of overprinted identifiers to be filtered; simplifying the overprinted identifiers to be filtered based on a preset simplification standard to obtain simplified overprinted identifiers; and filtering the simplified overprinted identifiers based on the preset filtering standard to obtain filtered overprinted identifiers. Simplifying the overprinted identifiers before filtering can solve the problems of large computational load, long running time, and high computational resource requirements in overprinted identifier simulation optimization.

[0018] 2. The overprinted identifiers to be filtered are DBO identifiers. Multiple horizontal and / or vertical DBO identifiers constitute uDBO identifiers. Before inputting the parameters of multiple sets of overprinted identifiers to be filtered, the following steps are included: inputting the parameters of uDBO identifiers; removing duplicate DBO identifiers from the uDBO identifiers to obtain simplified uDBO identifiers; extracting the horizontal and / or vertical DBO identifiers from the simplified uDBO identifiers. The horizontal and / or vertical DBO identifiers are the overprinted identifiers to be filtered. Duplicate DBO identifiers in uDBO identifiers behave exactly the same in the preset filtering criteria. Therefore, removing duplicate DBO identifiers before filtering can reduce the amount of calculation in the filtering process and improve the efficiency of filtering.

[0019] 3. Based on the parameters of the DBO identifiers, multiple sets of identifier masks to be screened are generated through simulation. These masks are then screened using preset standards and methods to obtain the selected identifier masks. The screened DBO identifiers are then obtained from these masks. Masks are created based on the parameters of the horizontal DBO identifiers and / or the vertical DBO identifiers. These masks are then imported into the screening system for analysis and screening. By evaluating the performance of the DBO identifiers on the masks, the DBO identifiers corresponding to the masks are selected, thus improving the reliability of the simulation screening results.

[0020] 4. The manufacturability and matching of the target identifier mask are evaluated based on preset standards and methods. By analyzing the manufacturability and matching of DBO identifiers, the operation process is reduced and the simulation output results are optimized.

[0021] 5. This invention also provides a mask processing method, which has the same beneficial effects as the above-described screening method for overlay markings, and will not be described in detail here.

[0022] 6. The present invention also provides an apparatus that has the same beneficial effects as the above-described screening method for overlay markings, which will not be described in detail here.

[0023] 7. The present invention also provides a computer device that has the same beneficial effects as the above-described optimized logo, which will not be described in detail here.

[0024] 8. The present invention also provides a computer-readable storage medium that has the same beneficial effects as the above-described method for screening overprinted markings, and will not be described in detail here.

[0025] 9. The present invention also provides a computer program product that has the same beneficial effects as the above-described method for screening overprinted marks, and will not be described in detail here. [Attached Image Description]

[0026] Figure 1 This is a diagram illustrating the uDBO and DBO identifiers.

[0027] Figure 2 This is a schematic diagram of the overprinting identification screening method provided in the first embodiment of the present invention.

[0028] Figure 3 This is a flowchart of the overprinting identification screening method provided in the second embodiment of the present invention.

[0029] Figure 4 This is a schematic diagram of the structure of the uDBO identifier provided in the second embodiment of the present invention.

[0030] Figure 5 This is a schematic diagram of the extracted DBO identifier of the uDBO identifier provided in the second embodiment of the present invention.

[0031] Figure 6 This is a flowchart of the DBO identifier filtering process provided in the second embodiment of the present invention.

[0032] Figure 7 This is a schematic diagram of the preset standard and method for uDBO identification provided in the second embodiment of the present invention.

[0033] Figure 8 This is a schematic diagram of the segmentation type of the DBO identifier provided in the second embodiment of the present invention.

[0034] Figure 9A This is a schematic diagram of the uDBO identifier provided in the second embodiment of the present invention.

[0035] Figure 9B This is a schematic diagram of the DBO identifier provided in the second embodiment of the present invention.

[0036] Figure 9C This is a schematic diagram of a mask with the DBO identifier provided in the second embodiment of the present invention.

[0037] Figure 10This is a flowchart of the mask processing method provided in the third embodiment of the present invention.

[0038] Figure 11 This is a schematic diagram of the device provided in the fourth embodiment of the present invention.

[0039] Figure 12 This is a schematic diagram of a computer device provided in the fifth embodiment of the present invention.

[0040] Figure 13 This is a schematic diagram of the structure of a computer-readable storage medium provided in the sixth embodiment of the present invention.

[0041] Figure 14 This is a schematic diagram of the structure of the computer program product provided in the seventh embodiment of the present invention.

[0042] Explanation of reference numerals in the attached diagram:

[0043] 1. Method for screening overprinted markings; 100. Method for screening overprinted markings; 2. Mask processing method; 3. Apparatus; 4. Computer equipment; 5. Computer-readable storage medium; 6. Computer program product;

[0044] 30. Input module; 31. Simplification module; 32. Filtering module; 33. Output module; 40. Memory; 41. Processor; 50. Computer program instructions; 60. Computer program or instructions;

[0045] 400. Computer program.

Detailed Implementation Methods

[0046] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0047] For easier understanding, please refer to Figure 1 Here, we will explain the overlay marking: The pattern on the wafer specifically used to measure overlay error is called the overlay marking. To accurately determine whether the designed overlay marking is suitable, calculations are required. Overlay error measurement in overlay marking primarily consists of dense, periodic lines with a certain linewidth, while uDBO (micro Diffraction Based Overlay) marking consists of multiple micro DBO markings with certain offsets in the horizontal and vertical directions. Directly simulating and optimizing these repetitive overlay markings involves a large amount of computation, increasing the software's computational resource requirements and runtime.

[0048] Please see Figure 2 The first embodiment of the present invention provides a screening method 1 for overprinted marks, wherein the lines of the overprinted marks are in the same direction and include at least two repeated lines. It should be understood that repeated lines here refer to lines whose shape, size, such as length and width, and orientation are consistent.

[0049] Filtering method 1 includes the following steps:

[0050] S1, obtain parameters for multiple sets of overprinted identifiers to be screened;

[0051] S2, Based on the preset simplification standard, the overprint mark to be screened is simplified to obtain the simplified overprint mark;

[0052] S3, based on the preset screening criteria, filters the simplified overprinted marks to obtain the filtered overprinted marks.

[0053] Preferably, the preset simplification criteria can be pre-defined or editable as needed. For example, if the input overprint mark has a period of 10 and a line length of 8μm, after simplification, the period becomes 3 and the line length becomes 5μm. That is, from the original overprint mark with 10 periodic lines and each line length of 8μm, 3 periodic lines are extracted, and each line length is set to 5μm, thus completing the simplification of the overprint mark. Alternatively, the simplification of the overprint mark may also include extracting a portion of the graphic from the extracted 3 periodic lines, each with a length of 5μm. It should be understood that the simplification criteria for overprint marks can be determined according to actual needs, as long as the simplified overprint mark can be filtered through subsequent screening criteria. Understandably, simplifying the overprint mark according to the preset simplification criteria can greatly reduce the computation time during overprint mark screening and avoid unnecessary waste of computer resources.

[0054] Preferably, the overprinted identifier to be screened is a DBO identifier. For example, the following describes the screening method for overprinted identifiers using the DBO identifier as an example.

[0055] Please see Figure 3 The second embodiment of the present invention provides a screening method 100 for overprinted identifiers, which includes the screening method 1 in the first embodiment. In the screening method 100 of the second embodiment, the overprinted identifier to be screened is a DBO identifier, and multiple horizontal DBO identifiers and / or vertical DBO identifiers constitute a uDBO identifier.

[0056] The second embodiment of the screening method 100 further includes the following steps before step S1:

[0057] Step 10: Input multiple sets of parameters for the uDBO identifiers to be optimized;

[0058] Step 11: Remove duplicate DBO identifiers from the uDBO identifier to obtain a simplified uDBO identifier;

[0059] Step 12: Extract the horizontal and / or vertical DBO identifiers from the simplified uDBO identifiers. The horizontal and / or vertical DBO identifiers are the overlay identifiers to be screened. The aforementioned duplicate DBO identifiers are: DBO identifiers in a single uDBO identifier that are completely identical in all parameters such as cycle, key dimensions, length, and width, but differ in their position within the uDBO identifier.

[0060] Understandably, for uDBO identifiers containing DBO identifiers in multiple directions, it is necessary to extract and simplify the horizontal and / or vertical DBO identifiers from the simplified uDBO identifier. Based on a preset simplification standard, the horizontal and / or vertical DBO identifiers are then simplified to obtain the simplified horizontal and / or vertical DBO identifiers. For overlay identifiers containing only one direction, after removing repetitive periodic lines, simplification can be performed directly based on the preset simplification standard.

[0061] After obtaining the horizontal DBO identifier and / or the vertical DBO identifier in step 12 above, the following steps are also included:

[0062] Step 13: Simplify the horizontal DBO identifier and / or the vertical DBO identifier based on the preset simplification standard to obtain the simplified horizontal DBO identifier and / or vertical DBO identifier.

[0063] Step 14: Based on the preset filtering criteria, filter the simplified horizontal DBO identifiers and / or vertical DBO identifiers to obtain the filtered horizontal DBO identifiers and / or vertical DBO identifiers.

[0064] Furthermore, the parameters of the uDBO identifiers to be screened in step 10 include one or more combinations of the following: the period of the overlay identifier, the critical dimension, the length, the width, the number of periods, the offset, and the segmentation parameters.

[0065] In this embodiment of the invention, the parameters of the uDBO identifier to be filtered are first input. These parameters include one or more combinations of the uDBO identifier's period pitch, critical dimension cd, length span, width, number of periods num, and segmentation parameters. Segmentation parameters include: segmentation type and corresponding number of segments, duty cycle SR, and aspect ratio AR.

[0066] Please see Figure 4 For example, this embodiment uses 10μm*10μm uDBO identifiers, the period of the uDBO identifiers to be screened is 800nm, the key linewidth range is 200-500nm, the offset is 100nm, and no segmentation is performed.

[0067] The parameters of the horizontal DBO identifier and / or the vertical DBO identifier include: cycle, critical dimension, length, width, and segmentation parameters.

[0068] Please see Figure 5 For example, based on the original identifier parameters of uDBO, extract the graphic parameters of the DBO identifier in the horizontal direction and / or vertical direction to be screened: period 800nm, key line width range to be screened is 200-400nm, length and width are 4μm, and no segmentation is performed.

[0069] Understandably, removing duplicate DBO identifiers from each group of uDBO identifiers to be screened can avoid repeatedly screening DBOs with the same parameters in subsequent simulation calculations, thus avoiding waste of computer resources and improving the efficiency and speed of simulation.

[0070] Please see Figure 6 Furthermore, the DBO identifier parameters selected in step 14 include the following steps:

[0071] Step 140: Based on the parameters of multiple horizontal DBO markers and / or vertical DBO markers, generate multiple sets of marker masks to be filtered.

[0072] Step 141: Filter multiple sets of identifier masks to be filtered based on preset standards and methods to obtain the filtered identifier mask.

[0073] For example, in step 120 above, based on the parameters of the DBO identifier, the DBO identifier mask of all uDBO identifiers in the horizontal and vertical directions can be drawn using a layout editing tool.

[0074] Please see Figure 7 Furthermore, the preset standards and methods in step 131 include the following steps:

[0075] Step 1410: Based on the DBO identifier parameters on the identifier mask to be screened, calculate the manufacturability information and matching information of the DBO identifier corresponding to each set of masks using a preset photolithography calculation model.

[0076] Step 1411: Compare the manufacturability and matching information of the DBO identifier corresponding to each set of mask with the preset standard to obtain the mask corresponding to the overlay identifier of the matching standard.

[0077] Step 1412: Output the mask corresponding to the overlay mark matching the standard.

[0078] Furthermore, the calculation of the photolithography model in step 1310 above for evaluating the manufacturability and matching of the DBO mark on the mask to be screened specifically includes the following steps:

[0079] 1. Calculate the lithography model to simulate the lithography process and perform simulation calculations to obtain the lithography reference index corresponding to manufacturability and compatibility. Compare the lithography reference index with the preset lithography database to obtain manufacturability information and compatibility information.

[0080] 2. The masks to be screened with DBO identifiers are introduced into the computational lithography model to calculate lithography reference indices. The lithography reference indices include the normalized logarithmic slope and the process window. The normalized logarithmic slope and the process window are compared with a pre-set database to evaluate the manufacturability of the DBO identifiers. The lithography reference indices also include the offset of the overlay identifier and the difference between the overlay identifier offset and the original offset. The overlay identifier offset and the difference between the overlay identifier offset and the original offset are compared with a pre-set database to evaluate the matching of the DBO identifiers. Different DBO identifier parameters correspond to different lithography reference indices. By comparing the calculated lithography reference indices with the corresponding database, overlay identifiers that meet the manufacturability and matching criteria can be obtained, further optimizing the screening results.

[0081] Preferably, after step 111 above, the following step is also included: selecting whether to split the DBO identifier on the identifier mask to be filtered.

[0082] For example, please refer to Figure 8 DBO identifiers can be segmented based on their different sizes. Segmentation types include BasicLS, ParallelST_P(N), VertST_P(N), and 2DST_P(N). Segmenting DBO identifiers allows for a better match between the DBO identifier and the actual manufacturing equipment.

[0083] Preferably, after outputting the DBO identifier of the matching criteria in step 13, the above-mentioned screening method 100 further includes the following steps:

[0084] Step 130: Save the obtained DBO identifier of the matching standard to the overlay identifier database, which can be used as reference experience data for subsequent simulations.

[0085] Understandably, storing the DBO identifiers that match the standard into the overlay identifier database can reduce simulation steps, save simulation time, and even directly output the corresponding simulation results when the same or similar data is input next time.

[0086] For example, from Figure 9AThe parameters for separating and extracting the horizontal and vertical DBO identifiers in the initial uDBO graphic to be filtered, as shown below, are as follows: Figure 9B As shown, further processing of the mask to be screened is performed as follows: Figure 9C As shown, the specific process is as follows:

[0087] 1. From the input parameters of uDBO identifiers to be filtered, remove duplicate DBO identifier parameters that have the same evaluation parameters in the filtering process, and then separate and extract the parameters of DBO identifiers in the horizontal and vertical directions.

[0088] 2. Based on the extracted horizontal and / or vertical DBO identifiers, create a mask to be screened, load and calculate the lithography model to evaluate and analyze the manufacturability and matching of the mask to be screened, and screen it according to the preset criteria to obtain the screened mask.

[0089] 3. Obtain the corresponding optimized uDBO identifier based on the DBO identifier on the filtered mask.

[0090] In summary, by separating the uDBO identifiers horizontally and / or vertically, and removing duplicate DBO identifiers for extraction and filtering, the filtered DBO identifiers correspond to the optimized uDBO identifiers. This method of separating uDBOs before filtering avoids unnecessary and repetitive calculations when filtering duplicate DBO identifiers, and can to some extent solve the problems of large computational load, long running time, and high computational resource requirements in the simulation optimization of overlay identifiers.

[0091] The third embodiment of the present invention provides a mask processing method 2, please refer to [link / reference]. Figure 10 The third embodiment includes the steps of screening method 1 in the first embodiment. The difference between the third and first embodiments is only that, after obtaining the screened overprinted identifiers, it further includes the following steps:

[0092] Step 24: Create a mask based on the selected overprinted markings.

[0093] For example, step 24 can be: based on the parameters of the filtered overprint marks, output a mask with the filtered overprint marks using the layout editing tool L-Edit.

[0094] The fourth embodiment of the present invention also provides an apparatus 3 for performing the above-described screening method. Please refer to [link to relevant documentation]. Figure 11 It includes an input module 30 for inputting multiple sets of overprinted identifiers to be filtered, a simplification module 31 for simplifying the overprinted identifiers, a filtering module 32 for filtering the overprinted identifiers, and an output module 33 for outputting the filtered overprinted identifiers.

[0095] For example, the input module 30 can input uDBO parameters to be filtered, including but not limited to one or more combinations of uDBO identifiers such as period pitch, critical dimension cd, length span, number of periods num, offset d, and segmentation parameters. Among them, the segmentation parameters include: segmentation type and corresponding number of segments, duty cycle SR, and aspect ratio AR.

[0096] The simplification module 31 can remove duplicate DBO identifiers from the uDBO identifiers input by the input module 30, and separate the DBO identifiers from the uDBO identifiers in the horizontal and vertical directions, then extract the separated DBO identifiers, and simplify the parameters of the separated DBO identifiers according to preset standards.

[0097] The filtering module 32 includes the standards and methods preset in step 12 above. The filtering module 32 filters the extracted DBO identifiers to obtain the filtered DBO identifiers and sends them to the output module 33.

[0098] Output module 33 then outputs the corresponding optimized uDBO identifier based on the filtered DBO identifier.

[0099] The fifth embodiment of the present invention provides a computer device 4, please refer to [link / reference]. Figure 12 It includes a memory 40, a processor 41, and a computer program 400 stored on the memory 40. When the processor 41 executes the computer program 400, it implements the method 1 described above step by step.

[0100] The sixth embodiment of the present invention provides a computer-readable storage medium 5, please refer to [link / reference]. Figure 13 The computer program instructions 50 are stored on a readable storage medium. When the computer program instructions 50 are executed, the above method 1 can be implemented step by step.

[0101] The seventh embodiment of the present invention provides a computer program product 6, please refer to [link / reference]. Figure 14 This includes a computer program or instruction 60, which, when executed by a processor, implements the above method 1 step by step.

[0102] In the embodiments provided by this invention, it should be understood that "B corresponding to A" means that B is associated with A, and B can be determined based on A. However, it should also be understood that determining B based on A does not mean determining B solely based on A; B can also be determined based on A and / or other information.

[0103] It should be understood that the phrase "one embodiment" or "an embodiment" throughout the specification means that a specific feature, structure, or characteristic related to the embodiment is included in at least one embodiment of the invention. Therefore, "in one embodiment" or "in an embodiment" appearing throughout the specification does not necessarily refer to the same embodiment. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Those skilled in the art should also recognize that the embodiments described in the specification are optional embodiments, and the actions and modules involved are not necessarily essential to the invention.

[0104] In various embodiments of the present invention, it should be understood that the sequence number of each process does not necessarily imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present invention.

[0105] The flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of systems, methods, and computer program products according to various embodiments of this application. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions indicated in the blocks may occur in a different order than those indicated in the drawings. For example, two consecutively indicated blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It is particularly important to note that each block in the block diagrams and / or flowcharts, and combinations of blocks in the block diagrams and / or flowcharts, can be implemented using a dedicated hardware-based system that performs the specified function or operation, or using a combination of dedicated hardware and computer instructions.

[0106] The above provides a detailed description of a method for screening overprinted marks according to embodiments of the present invention. Specific examples have been used to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. At the same time, for those skilled in the art, there will be changes in specific implementation methods and application scope based on the ideas of the present invention. Therefore, the content of this specification should not be construed as a limitation of the present invention. Any modifications, equivalent substitutions, and improvements made within the principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A method for screening overprinted markings, wherein the overprinted markings have lines in the same direction and include at least two repeated lines, characterized in that: The screening method includes the following steps: Obtain parameters for multiple sets of overprinted identifiers to be selected; The overprinted identifiers to be screened are simplified based on preset simplification criteria to obtain simplified overprinted identifiers; The simplified overprinted marks are filtered based on preset filtering criteria to obtain the filtered overprinted marks; The overprinted identifiers to be screened are DBO identifiers. Multiple horizontal DBO identifiers and / or vertical DBO identifiers constitute a uDBO identifier. Before obtaining the parameters of multiple sets of overprinted identifiers to be screened, the following steps are also included: Input the parameters identified by the uDBO; The simplified uDBO identifier is obtained by removing duplicate DBO identifiers from the uDBO identifier. Extract the horizontal DBO identifier and / or the vertical DBO identifier from the simplified uDBO identifier, and the horizontal DBO identifier and / or the vertical DBO identifier are the overlay identifiers to be screened. Filtering the simplified horizontal DBO identifier and / or vertical DBO identifier includes the following steps: Multiple sets of identifier masks to be filtered are generated based on the horizontal DBO identifiers and / or the vertical DBO identifiers. Multiple sets of the target identifier masks are filtered based on preset standards and methods to obtain the filtered identifier mask; The filtered DBO identifier is obtained based on the filtered identifier mask.

2. The screening method as described in claim 1, characterized in that: The parameters of the uDBO identifiers to be screened include one or more combinations of the following: the period of the overlay identifier, the critical dimension, the length, the width, the number of periods, the offset, and the segmentation parameters.

3. The screening method as described in claim 1, characterized in that: The parameters of the DBO identifier include: period, critical dimension, length, width, and segmentation parameters.

4. A mask processing method, characterized in that: It includes the steps described in claim 1, and after obtaining the filtered overlay identifier, it outputs an overlay identifier optimized mask based on the filtered overlay identifier.

5. An apparatus for applying the method of any one of claims 1-3: comprising an input module for multiple sets of overprinted identifier parameters to be screened, a simplification module for simplifying the overprinted identifiers, a screening module for screening the overprinted identifiers, and an output module for outputting the screened overprinted identifiers.

6. A computer device, characterized in that: It includes a memory, a processor, and a computer program stored in the memory, wherein the processor executes the computer program to implement the steps of the method as described in any one of claims 1-2.

7. A computer-readable storage medium storing computer program instructions thereon, characterized in that: When the computer program instructions are executed by the processor, they implement the steps of the method as described in any one of claims 1-3.

8. A computer program product, characterized in that: It includes a computer program or instructions that, when executed by a processor, implement the steps of the method according to any one of claims 1-3.

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