Mask assembly and method for preparing the same

Abstract

The embodiment of the present disclosure provides a mask assembly and a method for preparing the same, wherein the mask assembly comprises a mask plate, a clamping groove is provided at the periphery of the mask plate, a clamping cover, the shape of the clamping cover is adapted to the shape of the clamping groove, and an oxide film is provided on the surface of the mask plate outside the clamping groove and the surface of the clamping cover. The technical solution of the embodiment of the present disclosure can prevent the surface of the clamping groove from reacting with the process gas to rust or corrode, thereby avoiding pollution of the process environment.

Description

Technical Field

[0001] The present disclosure relates to the field of display technology, and in particular to a mask assembly and a preparation method thereof. Background Art

[0002] Masks are often used to form functional patterns on display substrates. In order to prevent the mask from reacting with process gases (such as cleaning gases) in the packaging process, the mask is usually anodized to form an oxide film on the surface of the mask. However, during the anodization process, a clamping mechanism is generally used to clamp the mask at the clamping position on the periphery, resulting in the inability to form an oxide film at the clamping position, which makes it easy for the clamping position to react with the process gas and rust or corrode, thereby polluting the process environment. Summary of the invention

[0003] The embodiments of the present disclosure provide a mask assembly and a method for preparing the same to solve or alleviate one or more technical problems in the prior art.

[0004] As one aspect of an embodiment of the present disclosure, an embodiment of the present disclosure provides a mask assembly, including:

[0005] A mask plate, wherein a clamping groove is arranged on the periphery of the mask plate;

[0006] A clamping cover, the shape of which is adapted to the shape of the clamping groove;

[0007] Wherein, the surface of the mask outside the clamping groove and the surface of the clamping cover are both provided with an oxide film.

[0008] In one embodiment, the clamping groove includes a first groove body, a second groove body and a third groove body which are arranged in sequence, the first groove body is located on the first surface of the mask and extends along the first direction, the second groove body is located on the end surface of the mask and extends along the thickness direction of the mask, the third groove body is located on the second surface of the mask and extends along the first direction, and the first surface and the second surface are opposite;

[0009] The clamping cover comprises a first cover body, a second cover body and a third cover body which are connected in sequence. The first cover body is used to cover the first trough body, the second cover body is used to cover the second trough body, and the third cover body is used to cover the third trough body.

[0010] In one embodiment, a first chute extending along a first direction is provided at the bottom of the first chute body, and a second chute extending along the first direction is provided at the bottom of the third chute body;

[0011] The clamping cover includes a first slide bar adapted to the first slide groove and a second slide bar adapted to the second slide groove. The first slide bar is located on a side of the first cover body facing the third cover body and extends along the width direction of the first cover body. The second slide bar is located on a side of the third cover body facing the first cover body and extends along the width direction of the third cover body.

[0012] In one embodiment, the groove wall of the clamping groove is provided with a stop strip extending along the extension direction of the groove wall; the side wall of the clamping cover is provided with a stop groove extending along the circumference of the clamping cover, and the stop groove is adapted to the stop strip.

[0013] In one embodiment, the portions of the stop strip located at the first slot body and the second slot body are both wedge-shaped strips, and the portions of the stop groove located at the first cover body and the third cover body are both wedge-shaped grooves.

[0014] In one embodiment, a surface of the stop strip facing away from the clamping groove is provided with an oxide film.

[0015] In one embodiment, the depth of the clamping groove is in the range of 2 mm to 4 mm, and the width of the surface of the stop strip facing away from the clamping groove is in the range of 3 mm to 5 mm.

[0016] In one embodiment, the clamping cover is provided with a through hole, and the mask assembly further comprises a screw passing through the through hole and connected to the clamping groove, and an oxide film is provided on the surface of the screw.

[0017] As another aspect of the embodiments of the present disclosure, the embodiments of the present disclosure provide a method for preparing a mask assembly, comprising:

[0018] forming a clamping groove at the periphery of the mask;

[0019] Making a clamping cover that matches the shape of the clamping groove;

[0020] An oxide film is formed on the surface of the mask outside the clamping groove and the surface of the clamping cover respectively.

[0021] In one embodiment, forming a clamping groove on the periphery of the mask plate includes: forming a first groove body extending along a first direction on a first surface of the mask plate, forming a second groove body extending along a thickness direction of the mask plate on an end surface of the mask plate, and forming a third groove body extending along the first direction on the second surface of the mask plate, the first groove body, the second groove body and the third groove body are arranged in sequence, and the first surface is opposite to the second surface;

[0022] The clamping cover adapted to the shape of the clamping groove includes: a first cover body, a second cover body and a third cover body which are vertically connected in sequence, the first cover body is used to cover the first groove body, the second cover body is used to cover the second groove body, and the third cover body is used to cover the third groove body.

[0023] In one embodiment, forming the clamping groove on the periphery of the mask plate further comprises: a first slide groove extending along the first direction is formed at the groove bottom of the first groove body and a second slide groove extending along the first direction is formed at the groove bottom of the third groove body;

[0024] The clamping cover adapted to the shape of the clamping groove includes: a first slide bar extending along the width direction of the first cover body is formed on the side of the first cover body facing the third cover body, and a second slide bar extending along the width direction of the third cover body is formed on the side of the third cover body facing the first cover body, the first slide bar is adapted to the first slide groove, and the second slide bar is adapted to the second slide groove.

[0025] In one embodiment, forming the clamping groove at the periphery of the mask further comprises: thinning the groove wall of the clamping groove along the circumference of the clamping groove to form a stopper strip extending along the circumference of the clamping groove;

[0026] The method of making a clamping cover that matches the shape of the clamping groove includes: thinning the side wall of the clamping cover along the circumference of the clamping cover to form a stop groove extending along the circumference of the clamping cover, and the stop groove matches the stop strip.

[0027] In one embodiment, the preparation method may further include:

[0028] An oxide film is formed on the surface of the stopper strip on the side facing away from the clamping groove.

[0029] In one embodiment, the preparation method may further include:

[0030] A through hole is provided on the clamping cover;

[0031] The screw is passed through the through hole and connected with the clamping groove, and an oxide film is pre-arranged on the surface of the screw.

[0032] The above technical solution of the embodiment of the present disclosure uses a clamping cover to be clamped on the clamping groove of the mask plate, so as to cover the clamping groove, prevent the surface of the clamping groove from contacting with the process gas, and prevent the surface of the clamping groove from reacting with the process gas to rust or corrode, thereby avoiding pollution of the process environment. Furthermore, since the shape of the clamping cover is adapted to the shape of the clamping groove, when the clamping cover is assembled in the clamping groove, it can ensure that the overall shape of the mask assembly is consistent with that of the mask plate in the related art, so that the mask assembly can adapt to the process requirements.

[0033] The above summary is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present disclosure will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the multiple drawings represent the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in accordance with the present disclosure and should not be regarded as limiting the scope of the present disclosure.

[0035] Figure 1A schematic top view of a mask assembly according to an embodiment of the present disclosure is shown.

[0036] Figure 2 Show Figure 1 A local schematic diagram of the area selected by the dashed box.

[0037] Figure 3A Show Figure 2 A front view schematic diagram of .

[0038] Figure 3B Show Figure 3A The second cover is omitted in the schematic diagram.

[0039] Figure 4 Show Figure 2 Schematic diagram of the right side.

[0040] Figure 5 Shown along Figure 2 Schematic diagram of the cross section of the AA cutting line.

[0041] Figure 6 Shown along Figure 2 Schematic diagram of the cross section of the BB cutting line.

[0042] Figure 7 Shown along Figure 3A Schematic diagram of the cross section of the CC cutting line. DETAILED DESCRIPTION

[0043] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the present disclosure. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.

[0044] Figure 1 A schematic top view of a mask assembly according to an embodiment of the present disclosure is shown. Figure 2 Show Figure 1 A local schematic diagram of the area selected by the dashed box. Figure 1 and Figure 2 As shown, the mask assembly 100 may include a mask plate 110 and a clamping cover 120. The periphery of the mask plate 110 is provided with a clamping groove 110A, and the shape of the clamping cover 120 is adapted to the shape of the clamping groove 110A. The surface of the mask plate 110 outside the clamping groove 110A and the surface of the clamping cover 120 are both provided with an oxide film (not shown in the figure).

[0045] Exemplarily, the materials of the mask 110 and the clamping cover 120 can be metals with low expansion coefficients such as Invar alloy. When the clamping cover 120 is assembled in the clamping groove 110A, the clamping cover 120 covers the clamping groove 110A and the periphery of the clamping cover 120 coincides with the periphery of the clamping groove 110A, so that the clamping groove 110A will not be exposed to the process environment, and the oxide film on the surface of the mask 110 and the oxide film on the surface of the clamping cover 120 can completely cover the surface of the mask 110, so that the mask assembly 100 will not react when it contacts the process gas. For example, when the mask assembly 100 is used for chemical vapor deposition (CVD) or the mask assembly 100 is cleaned, since the oxide film can cover the surface of the mask 110, the mask assembly 100 does not react with the CVD process gas or the cleaning gas.

[0046] According to the mask assembly 100 of the embodiment of the present disclosure, the clamping cover 120 is clamped on the clamping groove 110A of the mask plate 110, and the clamping groove 110A can be sealed to prevent the surface of the clamping groove 110A from contacting with the process gas, and to prevent the surface of the clamping groove 110A from reacting with the process gas to rust or corrode, thereby avoiding contamination of the process environment. Furthermore, since the clamping cover 120 is adapted to the shape of the clamping groove 110A, when the clamping cover 120 is assembled in the clamping groove 110A, it can ensure that the overall appearance of the mask assembly 100 is consistent with that of the mask plate 110 in the related art, so that the mask assembly 100 can adapt to the process requirements.

[0047] It should be noted that in the related art, when the mask is placed in the process environment, the clamping position of the mask is prone to react with the process gas and rust or corrode because no oxide film is formed at the clamping position of the mask, and the rust chips fall off and pollute the process environment. When the mask of the related art is used to prepare display devices, the product yield will be reduced; moreover, the falling rust chips can easily cause the process equipment to break down and damage the process equipment. Compared with the related art, since the mask assembly 100 of the embodiment of the present disclosure is not easy to rust or corrode, when the mask assembly 100 of the embodiment of the present disclosure is used to prepare display products, it is more helpful to improve the product yield, and it can also prevent the process equipment from breaking down and avoid damaging the process equipment.

[0048] Optionally, the number of the clamping grooves 110A and the clamping cover 120 is the same and can be one or more. Exemplarily, the number of the clamping grooves 110A and the clamping cover 120 are both multiple, and the multiple clamping grooves 110A are respectively located at two opposite edges of the mask 110 so as to stably clamp the mask 110. For example, the number of the clamping grooves 110A is 4, of which two clamping grooves 110A are located at the first edge of the mask 110, and the other two clamping grooves 110A are located at the second edge of the mask 110 opposite to the first edge, and the two clamping grooves 110A correspond to the other two clamping grooves 110A one-to-one. It can be understood that the first edge and the second edge can be the edges of the long sides arranged oppositely on the mask 110, or the edges of the short sides arranged oppositely on the mask 110.

[0049] In one embodiment, Figures 1 to 4 As shown, the clamping groove 110A includes a first groove body 111, a second groove body 112 and a third groove body 113 which are arranged in sequence. The first groove body 111 is located on the first surface of the mask plate 110 (not marked in the figure) and extends along the first direction, the second groove body 112 is located on the end surface of the mask plate 110 (not marked in the figure) and extends along the thickness direction of the mask plate 110, and the third groove body 113 is located on the second surface of the mask plate 110 (not marked in the figure) and extends along the first direction. The first surface and the second surface are arranged relatively to each other.

[0050] Exemplarily, the first slot body 111 and the third slot body 113 are arranged opposite to each other, the second slot body 112 is located between the first slot body 111 and the second slot body 112, and the second slot body 112 is perpendicular to the first slot body 111 and the third slot body 113. In this way, the clamping groove 110A can be suitable for clamping by the clamping mechanism. Optionally, the first slot body 111, the second slot body 112 and the third slot body 113 can also be connected in sequence.

[0051] Optionally, the first direction may be the length direction of the mask 110 or the width direction of the mask 110. Figure 1 As shown, when the clamping grooves 110A are located at the edges of the opposite short sides of the mask 110 , the first direction is the length direction of the mask 110 .

[0052] like Figures 1 to 4As shown, the clamping cover 120 may include a first cover body 121, a second cover body 122, and a third cover body 123 connected in sequence, the first cover body 121 is used to cover the first trough body 111, the second cover body 122 is used to cover the second trough body 112, and the third cover body 123 is used to cover the third trough body 113. Exemplarily, the first cover body 121 and the third cover body 123 are arranged in parallel and opposite to each other, the second cover body 122 is connected between the first cover body 121 and the third cover body 123, and the second cover body 122 is perpendicular to the first cover body 121 and the third cover body 123.

[0053] In the above embodiment, the clamping groove 110A is formed by the first groove body 111, the second groove body 112 and the third groove body 113 arranged in sequence, so that the shape of the clamping groove 110A is suitable for clamping by the clamping mechanism, and the clamping cover 120 is formed by the first cover body 121, the second cover body 122 and the third cover body 123 connected in sequence, so that the clamping cover 120 is suitable for sealing the clamping groove 110A.

[0054] In one embodiment, please refer to Figures 1 to 5 The bottom of the first slot body 111 is provided with a first slide groove 111A extending along the first direction, and the bottom of the third slot body 113 is provided with a second slide groove 113A extending along the first direction.

[0055] Exemplarily, when the clamping groove 110A is located at the edge of the short side of the mask 110, the first slide groove 111A and the second slide groove 113A extend along the length direction of the mask 110, and the first slide groove 111A and the second slide groove 113A can be arranged opposite to each other or staggered.

[0056] Optionally, the number of the first chute 111A and the second chute 113A may be one or more. Figure 3A As shown, there are two first slide grooves 111A and two second slide grooves 113A, the two first slide grooves 111A are respectively arranged on both sides of the first slot body 111, the two second slide grooves 113A are respectively arranged on both sides of the third slot body 113, and the two first slide grooves 111A correspond one-to-one to the two second slide grooves 113A.

[0057] The clamping cover 120 includes a first slide bar 121A adapted to the first slide groove 111A and a second slide bar 123A adapted to the second slide groove 113A, the first slide bar 121A is located on the side of the first cover body 121 facing the third cover body 123 and extends along the width direction of the first cover body 121, the width direction of the first cover body 121 is the direction from the edge connecting the first cover body 121 and the second cover body 122 to the edge of the first cover body 121 away from the second cover body 122, the second slide bar 123A is located on the side of the third cover body 123 facing the first cover body 121 and extends along the width direction of the third cover body 123. Accordingly, the first slide bar 121A and the second slide bar 123A can be arranged opposite to each other or staggered.

[0058] Exemplarily, the first slide groove 111A and the second slide groove 113A may both be wedge-shaped grooves, and the first slide bar 121A and the second slide bar 123A may both be wedge-shaped bars. For example, the cross-sections of the first slide groove 111A, the second slide groove 113A, the first slide bar 121A and the second slide bar 123A are all wedge-shaped, such as a triangle or an inverted trapezoid.

[0059] In the above embodiment, by assembling the first slide bar 121A into the first slide groove 111A and assembling the second slide bar 123A into the second slide groove 113A, the inner surface of the first cover body 121 can be tightly fitted with the surface of the first groove body 111, the inner surface of the second cover body 122 can be tightly fitted with the surface of the second groove body 112, and the inner surface of the third cover body 123 can be tightly fitted with the inner surface of the third groove body 113, thereby ensuring that the clamping cover 120 is tightly sealed in the clamping groove 110A and preventing the clamping cover 120 from falling off.

[0060] In one embodiment, please refer to Figures 1 to 5 The groove wall (not marked in the figure) of the clamping groove 110A is provided with a stopper strip 114 extending along the extension direction of the groove wall; the side wall (not marked in the figure) of the clamping cover 120 is provided with a stopper groove 124 extending along the circumference of the clamping cover 120, and the shape of the stopper groove 124 is adapted to the shape of the stopper strip 114. When the clamping cover 120 is assembled in the clamping groove 110A, the stopper strip 114 is inserted into the inside of the stopper groove 124 to ensure that the periphery of the clamping cover 120 is closely fitted with the periphery of the clamping groove 110A, and to prevent the periphery of the clamping cover 120 from warping.

[0061] In one embodiment, the portions of the stopper strip 114 located at the first trough body 111 and the third trough body 113 are both wedge-shaped strips, and the portions of the stopper groove 124 located at the first cover body 121 and the third cover body 123 are both wedge-shaped grooves. Exemplarily, the cross-section of the portion of the stopper strip 114 located at the first trough body 111 and the second trough body 112 and the cross-section of the portion of the stopper groove 124 located at the first cover body 121 and the third cover body 123 can both be wedge-shaped, such as a triangle or an inverted trapezoid. When the clamping cover 120 is assembled in the clamping groove 110A, the stopper strip 114 is wedged into the stopper groove 124, which can improve the tightness of the fit between the periphery of the clamping cover 120 and the periphery of the clamping groove 110A, extend the path for the process gas to immerse in the clamping groove 110A, and reduce the risk of the process gas contacting the surface of the clamping groove 110A.

[0062] In one embodiment, Figure 5 As shown, the surface 114A of the stopper bar 114 on the side away from the clamping groove 110A is provided with an oxide film (not shown in the figure). In this way, when the clamping cover 120 is assembled on the clamping groove 110A, the orthographic projection of the oxide film on the surface 114A of the stopper bar 114 on the side away from the clamping groove 110A on the mask plate 110 overlaps with the orthographic projection of the oxide film on the surface of the clamping cover 120 on the mask plate 110, so that the oxide film on the surface 114A of the stopper bar 114 on the side away from the clamping groove 110A and the oxide film on the surface of the clamping cover 120 cross-overlap, thereby cross-covering the periphery of the clamping groove 110A, reducing the risk of process gas contacting the periphery of the surface of the clamping groove 110A.

[0063] In one embodiment, Figure 5 As shown, the depth of the clamping groove 110A ranges from 2 mm to 4 mm. Exemplarily, the depth D of the clamping groove 110A can be any value between 2 mm and 4 mm (including the end values), for example, the depth D of the clamping groove 110A is any value among 2 mm, 3 mm and 4 mm.

[0064] The width of the surface of the stopper strip 114 on the side away from the clamping groove 110A ranges from 3 mm to 5 mm. Exemplarily, the width L of the surface of the stopper strip 114 on the side away from the clamping groove 110A can be any value between 3 mm and 5 mm (including the end values), for example, the width L of the surface of the stopper strip 114 on the side away from the clamping groove 110A is any value among 3 mm, 4 mm and 5 mm.

[0065] In one embodiment, please refer to Figures 1 to 7The clamping cover 120 is provided with a through hole 125, and the mask assembly 100 further includes a screw 130 that is penetrated through the through hole 125 and connected to the clamping groove 110A, and an oxide film (not shown in the figure) is provided on the surface of the screw 130. By using the screw 130 to fix the clamping cover 120 to the clamping groove 110A, the firmness of the clamping cover 120 being assembled to the clamping groove 110A is improved; and because the surface of the screw 130 is provided with an oxide film, it is ensured that the screw 130 will not react with the process gas when it is in the process environment.

[0066] Please refer to Figures 1 to 7 The present disclosure also provides a method for preparing a mask assembly 100, which may include:

[0067] Step S810: forming a clamping groove 110A at the periphery of the mask 110. Exemplarily, the periphery of the mask 110 is thinned to form the clamping groove 110A, and the thinning process may be performed by a thinning process commonly used in the art, such as etching and grinding.

[0068] Step S820: manufacturing a clamping cover 120 that matches the shape of the clamping groove 110A. For example, the clamping cover 120 is formed by a molding process such as casting.

[0069] Step S830, forming an oxide film on the surface of the mask 110 outside the clamping groove 110A and the surface of the clamping cover 120. Exemplarily, step S830 may include: clamping the clamping groove 110A of the mask 110 with a clamping mechanism; anodizing the mask 110 to form an oxide film on the surface of the mask 110 outside the clamping groove 110A. It is understandable that the clamping cover 120 may also be anodized to form an oxide film on the surface of the clamping cover 120.

[0070] The above scheme forms a clamping groove 110A on the periphery of the mask 110, manufactures a clamping cover 120 that matches the shape of the clamping groove 110A, and forms an oxide film on the surface of the mask 110 outside the clamping groove 110A and the surface of the clamping cover 120, respectively, so that when the clamping cover 120 is assembled in the clamping groove 110A, the clamping groove 110A can be sealed to prevent the surface of the clamping groove 110A from contacting the process gas, and to prevent the surface of the clamping groove 110A from reacting with the process gas to rust or corrode, thereby avoiding contamination of the process environment. Furthermore, since the clamping cover 120 matches the shape of the clamping groove 110A, when the clamping cover 120 is assembled in the clamping groove 110A, it can ensure that the overall appearance of the mask assembly 100 is consistent with that of the mask 110 in the related art, so that the mask assembly 100 can adapt to the process requirements. It should be noted that the materials of the mask 110 and the clamping cover 120 and other beneficial effects brought about by assembling the clamping cover 120 in the clamping groove 110A can be referred to the above embodiments and will not be described in detail here.

[0071] In one embodiment, step S810 may include: forming a first groove body 111 extending along a first direction on the first surface of the mask plate 110, forming a second groove body 112 extending along a thickness direction of the mask plate 110 on the end surface of the mask plate 110, and forming a third groove body 113 extending along the first direction on the second surface of the mask plate 110, the first groove body 111, the second groove body 112 and the third groove body 113 are arranged in sequence, and the first surface is opposite to the second surface.

[0072] Exemplarily, the first surface, the end surface, and the second surface of the mask 110 are thinned respectively to form a first slot 111, a second slot 112, and a third slot 113, wherein the first slot 111 and the third slot 113 can be arranged oppositely or staggered, the second slot 112 is vertically arranged between the first slot 111 and the third slot 113, and the first slot 111, the second slot 112, and the third slot 113 can be connected or disconnected in sequence. Optionally, the order of thinning the first surface, the end surface, and the second surface of the mask 110 can be selected according to actual needs, and the embodiment of the present disclosure is not limited to this.

[0073] Exemplarily, the first surface, the end surface, and the second surface of the mask 110 are thinned to a thickness ranging from 2 mm to 4 mm (including the end values), so that a clamping groove 110A with a depth ranging from 2 mm to 4 mm can be formed.

[0074] It should be noted that the setting position of the clamping groove 110A and the extension direction of the first direction can refer to the above embodiments and will not be described in detail here.

[0075] Step S820 may include: forming a first cover 121 , a second cover 122 and a third cover 123 connected in sequence, wherein the first cover 121 is used to cover the first trough 111 , the second cover 122 is used to cover the second trough 112 , and the third cover 123 is used to cover the third trough 113 .

[0076] In one embodiment, step S810 may further include: forming a first slide groove 111A extending along the first direction at the bottom of the first slot body 111 and forming a second slide groove 113A extending along the first direction at the bottom of the third slot body 113. For example, the first slot body 111 and the second slot body 112 may be formed by a groove excavation process commonly used in the art.

[0077] Step S820 may also include: forming a first slide bar 121A extending along the width direction of the first cover body 121 on one side of the first cover body 121 facing the third cover body 123, and forming a second slide bar 123A extending along the width direction of the third cover body 123 on one side of the third cover body 123 facing the first cover body 121, the first slide bar 121A is adapted to the first slide groove 111A, and the second slide bar 123A is adapted to the second slide groove 113A. Exemplarily, the first slide bar 121A and the second slide bar 123A can be formed simultaneously with the clamping cover 120 using a molding process commonly used in the art, which can simplify the preparation process of the clamping cover 120.

[0078] In one embodiment, step S810 may further include: thinning the wall of the clamping groove 110A along the circumference of the clamping groove 110A to form a stopper bar 114 extending along the circumference of the clamping groove 110A. The thinned thickness of the wall of the clamping groove 110A is less than the thinned thickness of the first surface, the end surface, and the second surface of the mask 110.

[0079] Exemplarily, when the groove wall of the clamping groove 110A is thinned along the circumference of the clamping groove 110A, the thinning area extends outward along the circumference of the clamping groove 110A, and the extension width range is 3mm-5mm (including the endpoint values), so that the surface 114A of the stop strip 114 that is away from the clamping groove 110A can be formed.

[0080] Step S820 may further include: thinning the side wall of the clamping cover 120 along the circumference of the clamping cover 120 to form a stop groove 124 extending along the circumference of the clamping cover 120 , wherein the stop groove 124 is adapted to the stop bar 114 .

[0081] In one embodiment, the preparation method may further include: forming an oxide film on a surface 114A of the stopper bar 114 on a side away from the clamping groove 110A. Exemplarily, the surface 114A of the stopper bar 114 on a side away from the clamping groove 110A may be anodized to form an oxide film. The surface 114A of the stopper bar 114 on a side away from the clamping groove 110A and the surface of the mask 110 outside the clamping groove 110A may be anodized at the same time, thereby forming an oxide film at the same time, which facilitates simplifying the preparation process.

[0082] In one embodiment, the preparation method may further include: opening a through hole 125 on the clamping cover 120; passing the screw 130 through the through hole 125 to connect with the clamping groove 110A, and pre-setting an oxide film on the surface of the screw 130. Exemplarily, the pre-setting oxide film on the surface of the screw 130 may also be formed by anodizing. By passing the screw 130 through the through hole 125 on the clamping cover 120 to connect with the clamping groove 110A, the clamping cover 120 can be fixed to the clamping groove 110A, thereby improving the firmness of the clamping cover 120 assembled in the clamping groove 110A.

[0083] Other components of the mask assembly 100 of the above embodiment may be adopted by various technical solutions known to ordinary technicians in this field now and in the future, and will not be described in detail here.

[0084] In the description of this specification, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present disclosure.

[0085] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present disclosure, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0086] In the present disclosure, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0087] In the present disclosure, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being “above”, “above”, and “above” a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0088] The disclosure above provides many different embodiments or examples to realize different structures of the present disclosure. In order to simplify the disclosure of the present disclosure, the components and settings of specific examples are described above. Of course, they are only examples, and the purpose is not to limit the present disclosure. In addition, the present disclosure can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed.

[0089] The above is only a specific implementation of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any technician familiar with the technical field can easily think of various changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

1. A mask assembly, characterized in that: include: A mask, wherein a clamping groove is arranged at the periphery of the mask; A clamping cover, the shape of which is adapted to the shape of the clamping groove; Wherein, the surface of the mask outside the clamping groove and the surface of the clamping cover are both provided with an oxide film.

2. The mask assembly according to claim 1, characterized in that: The clamping groove comprises a first groove body, a second groove body and a third groove body which are arranged in sequence, wherein the first groove body is located on the first surface of the mask and extends along the first direction, the second groove body is located on the end surface of the mask and extends along the thickness direction of the mask, and the third groove body is located on the second surface of the mask and extends along the first direction, and the first surface and the second surface are opposite; The clamping cover comprises a first cover body, a second cover body and a third cover body connected in sequence, wherein the first cover body is used to cover the first trough body, the second cover body is used to cover the second trough body, and the third cover body is used to cover the third trough body.

3. The mask assembly according to claim 2, characterized in that: The first slot body has a first slide groove extending along the first direction at its bottom, and the third slot body has a second slide groove extending along the first direction at its bottom. The clamping cover includes a first slide bar adapted to the first slide groove and a second slide bar adapted to the second slide groove, the first slide bar is located on a side of the first cover body facing the third cover body and extends along the width direction of the first cover body, and the second slide bar is located on a side of the third cover body facing the first cover body and extends along the width direction of the third cover body.

4. The mask assembly according to claim 2, characterized in that: The groove wall of the clamping groove is provided with a stop strip extending along the extension direction of the groove wall; the side wall of the clamping cover is provided with a stop groove extending along the circumference of the clamping cover, and the stop groove is adapted to the stop strip.

5. The mask assembly according to claim 4, characterized in that: An oxide film is provided on a surface of the stop strip that is away from the clamping groove.

6. The mask assembly according to any one of claims 1 to 5, characterized in that: The clamping cover is provided with a through hole, and the mask assembly further comprises a screw which passes through the through hole and is connected to the clamping groove, and an oxide film is provided on the surface of the screw.

7. A method for preparing a mask assembly, characterized in that: include: forming a clamping groove at the periphery of the mask; Making a clamping cover that matches the shape of the clamping groove; An oxide film is formed on the surface of the mask outside the clamping groove and the surface of the clamping cover respectively.

8. The preparation method according to claim 7, characterized in that: Forming a clamping groove on the periphery of the mask plate includes: forming a first groove body extending along a first direction on a first surface of the mask plate, forming a second groove body extending along a thickness direction of the mask plate on an end surface of the mask plate, and forming a third groove body extending along the first direction on the second surface of the mask plate, wherein the first groove body, the second groove body and the third groove body are arranged in sequence, and the first surface is opposite to the second surface; The clamping cover adapted to the shape of the clamping groove includes: a first cover body, a second cover body and a third cover body which are vertically connected in sequence, wherein the first cover body is used to cover the first groove body, the second cover body is used to cover the second groove body, and the third cover body is used to cover the third groove body.

9. The preparation method according to claim 8, characterized in that: Forming the clamping groove on the periphery of the mask plate further comprises: opening a first slide groove extending along the first direction at the groove bottom of the first groove body and opening a second slide groove extending along the first direction at the groove bottom of the third groove body; and / or thinning the groove wall of the clamping groove along the circumference of the clamping groove to form a stopper strip extending along the circumference of the clamping groove, and forming an oxide film on the surface of the stopper strip on the side away from the clamping groove; Making a clamping cover adapted to the shape of the clamping groove includes: forming a first slide bar extending along the width direction of the first cover body on the side of the first cover body facing the third cover body and forming a second slide bar extending along the width direction of the third cover body on the side of the third cover body facing the first cover body, the first slide bar is adapted to the first slide groove, and the second slide bar is adapted to the second slide groove; and / or thinning the side wall of the clamping cover along the circumference of the clamping cover to form a stop groove extending along the circumference of the clamping cover, and the stop groove is adapted to the stop bar.

10. The preparation method according to any one of claims 7 to 9, characterized in that: Also includes: A through hole is provided on the clamping cover; A screw is passed through the through hole and connected to the clamping groove, and an oxide film is pre-arranged on the surface of the screw.

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