Probe head with guide plate capable of lateral fine adjustment, guide plate assembly, and probe head adjustment method

Abstract

The present invention relates to a probe head and a guide plate group with a guide plate capable of transverse fine adjustment, and a probe head adjustment method, comprising a middle guide plate, an upper and lower guide plate unit, at least one of which comprises inner and outer guide plates that can be detachably fixed to the middle guide plate and detachably fixed to each other, and a plurality of curved probes passing through the upper and lower guide plate units, the outer guide plate having a mounting groove recessed from its inner surface, the inner guide plate having an outer connecting surface connected to the inner surface of the outer guide plate, an inner connecting surface connected to the middle guide plate, and a probe mounting block having a protruding portion protruding from the outer connecting surface and located in the mounting groove and a recessed portion recessed in the inner connecting surface and corresponding in position to the protruding portion, the protruding portion having a transverse distance from the groove side of the mounting groove; thereby, the outer guide plate can be transversely fine-tuned to make the probe position meet the requirements.

Description

Technical Field

[0001] The present invention relates to a probe head of a probe card, and in particular to a probe head and a guide plate assembly having a guide plate capable of lateral fine adjustment, and a probe head adjustment method. Background Art

[0002] See also Figure 1 The probe head 10 of the conventional probe card mainly includes a probe seat 11 and a plurality of probes 12 (there are actually hundreds or even thousands of probes, but only three probes are drawn as a representation). The probe seat 11 usually includes a middle guide plate 13, and upper and lower guide plate units 14 and 15 respectively arranged on the upper and lower surfaces of the middle guide plate 13. Each probe 12 is inserted into the probe seat 11, and the bottom end of each probe 12 protrudes below the lower guide plate unit 15 to touch the conductive contact of the object to be tested (not shown in the figure). The top end of each probe 12 protrudes above the upper guide plate unit 14 and abuts against a conductive contact (not shown in the figure) on the bottom surface of a space transformer 19 arranged between a main circuit board 16 and the probe head 10. Alternatively, there may be no space transformer 19, and the top end of each probe 12 is a conductive contact directly abutting against the bottom surface of the main circuit board 16.

[0003] The upper and lower guide plate units 14 and 15 usually include an inner guide plate 142 and 152 connected to the middle guide plate 13, and an outer guide plate 144 and 154 connected to the inner guide plate 142 and 152, respectively. The inner and outer guide plates of each guide plate unit are usually fixed to each other and to the middle guide plate 13 by bolts 17. In addition, the inner and outer guide plates 142, 152, 144 and 154 of the upper and lower guide plate units 14 and 15 are respectively provided with a plurality of probe holes 18 of very small size for the probe 12 to pass through. When the aforementioned alignment problem occurs, the probe 12 may not be installed on the probe seat 11, or, after the probe 12 is installed, its top and bottom ends need to be flattened, and this step may cause the probe 12 to be slightly displaced locally, thereby making the position of the probe 12 against the hole wall of the probe hole 18 not meet the requirements. Summary of the invention

[0004] In view of the above problems, the main purpose of the present invention is to provide a probe head, the guide plate of which can be fine-tuned laterally after the probe is installed so that the position of the probe meets the requirements.

[0005] To achieve the above-mentioned purpose, the present invention provides a probe head with a guide plate that can be fine-tuned laterally, which can define a transverse axis and a longitudinal axis that are perpendicular to each other, and is characterized in that the probe head includes: a middle guide plate, having an upper surface, a lower surface, and a receiving hole that passes through the upper surface and the lower surface; an upper guide plate unit and a lower guide plate unit, which are respectively arranged on the upper surface and the lower surface of the middle guide plate, at least one of the upper guide plate unit and the lower guide plate unit is an adjustable guide plate unit, and the adjustable guide plate unit includes an inner guide plate and an outer guide plate that can be detachably fixed to the middle guide plate and detachably fixed to each other, the outer guide plate having an inner surface, an outer surface, and a mounting groove recessed from the inner surface, and the inner guide plate has a An outer connecting surface connected to the inner surface of the outer guide plate, an inner connecting surface connected to the middle guide plate, and a probe mounting block, the probe mounting block having a protruding portion protruding from the outer connecting surface and located in the mounting groove of the outer guide plate, and a recessed portion recessed in the inner connecting surface and corresponding to the position of the protruding portion, a lateral distance along the transverse axis between the protruding portion and at least one groove side surface of the mounting groove, the recessed portion and the accommodating hole of the middle guide plate jointly form a probe accommodating space; a plurality of probes, each of the probes having a needle head passing through the lower guide plate unit, a needle tail passing through the upper guide plate unit, and a needle body located in the probe accommodating space, the needle head and needle tail of each of the probes being staggered from each other along the transverse axis so that the needle body is bent.

[0006] In the technical solution of the present invention, the lateral distance is greater than or equal to 0.05 mm and less than or equal to 2 mm.

[0007] There is a longitudinal distance along the longitudinal axis between the protruding portion of the inner layer guide plate and a groove bottom surface of the mounting groove of the outer layer guide plate.

[0008] The longitudinal distance is greater than or equal to 0 mm and less than or equal to 2 mm.

[0009] The outer guide plate has at least one first outer fixing hole and at least one second outer fixing hole that pass through its inner surface and outer surface and are located on the periphery of the mounting groove, and the inner guide plate has at least one first inner fixing hole that passes through its inner connecting surface and outer connecting surface and is connected to the first outer fixing hole and at least one second inner fixing hole that is connected to the second outer fixing hole that is located on the periphery of the probe mounting block; the probe head also includes at least one first bolt that passes through the first outer fixing hole and is inserted into the first inner fixing hole, and at least one second bolt that can be inserted into the second outer fixing hole and the second inner fixing hole for fine-tuning the position of the outer guide plate along the transverse and axial direction, the first bolt is removably fixed to the middle guide plate to fix the inner guide plate to the middle guide plate, and the second bolt is removably fixed to the middle guide plate to fix the outer guide plate to the inner guide plate and the middle guide plate.

[0010] The inner guide plate can define an inner wall thickness, which is the distance between an outer circumferential surface of the protrusion and an inner circumferential surface of the recessed portion along the transverse axis. Each of the first bolts and the second bolt includes a screw rod partially disposed on the middle guide plate. There is a locking distance along the transverse axis between each of the screw rods and the probe accommodating space, and the locking distance is greater than the sum of the transverse distance and the inner wall thickness of the inner guide plate.

[0011] The second external fixing hole is a countersunk hole including a large diameter portion and a small diameter portion. The second bolt includes a bolt head located in the large diameter portion of the second external fixing hole. The diameter of the large diameter portion is larger than the diameter of the bolt head.

[0012] The second bolt includes a screw rod disposed on the outer guide plate, the inner guide plate and the middle guide plate, and the diameter of the portion of the second outer fixing hole through which the screw rod of the second bolt passes is larger than the diameter of the screw rod.

[0013] The outer guide plate can define an outer wall thickness, which is the distance between an outer circumferential surface of the outer guide plate and the side surface of the mounting groove along the transverse axis. The inner guide plate can define an inner wall thickness, which is the distance between an outer circumferential surface of the protrusion and an inner circumferential surface of the recessed portion along the transverse axis. The inner wall thickness is greater than 0.1 mm, and the outer wall thickness is greater than the inner wall thickness.

[0014] To achieve the above-mentioned purpose, the present invention also provides a probe head adjustment method for adjusting the probe head with a guide plate that can be fine-tuned laterally as described above, characterized in that the probe head adjustment method includes the following steps: loosening a second bolt provided on the adjustable guide plate unit; adjusting the position of the outer guide plate of the adjustable guide plate unit along the transverse axis; and locking the second bolt provided on the adjustable guide plate unit.

[0015] To achieve the above-mentioned purpose, the present invention also provides a guide plate group with a guide plate capable of lateral fine-tuning, characterized in that it includes: a fixing unit; an adjustable guide plate unit, including an inner guide plate and an outer guide plate, the outer guide plate having an inner surface, an outer surface, and at least one first outer fixing hole and at least one second outer fixing hole penetrating the inner surface and the outer surface, the inner guide plate having an outer connecting surface connected to the inner surface of the outer guide plate, an inner connecting surface connected to the fixing unit, and at least one first inner fixing hole and at least one second inner fixing hole penetrating the inner connecting surface and the outer connecting surface that are connected to the first outer fixing hole and at least one second inner fixing hole that are connected to the second outer fixing hole; at least one A bolt is passed through the first external fixing hole and the first internal fixing hole and can be removably fixed to the fixing unit to fix the inner guide plate to the fixing unit; at least one second bolt is passed through the second external fixing hole and the second internal fixing hole and can be removably fixed to the fixing unit to fix the outer guide plate to the inner guide plate and the fixing unit; wherein each of the first bolt and the second bolt comprises a bolt head and a screw rod, the bolt head of the first bolt is arranged in at least one of the first external fixing hole and the first internal fixing hole and is separated from the hole wall by a gap, and the part of the second bolt located in the second external fixing hole is separated from the hole wall of the second external fixing hole by a gap.

[0016] In the above technical solution of the guide plate group with guide plates capable of lateral fine adjustment, the inner guide plate and the outer guide plate can respectively define a thickness at the periphery of the guide plate group, and the thickness of the outer guide plate is greater than or equal to the thickness of the inner guide plate.

[0017] The outer surface of the outer guide plate is provided with a receiving groove for receiving a component.

[0018] The inner guide plate and the outer guide plate are respectively provided with a through hole for allowing one of a probe and a positioning pin to pass through, and the through hole of the inner guide plate and the through hole of the outer guide plate are interconnected and non-coaxially corresponding.

[0019] The first bolt and the first external fixing hole can respectively define a central axis, and the central axis of the first bolt deviates from the central axis of the first external fixing hole.

[0020] The fixing unit includes a middle guide plate, the middle guide plate has an upper surface, a lower surface, and a receiving hole passing through the upper surface and the lower surface, the outer guide plate has a mounting groove recessed from the inner surface, the inner guide plate has a probe mounting block, the probe mounting block has a protruding portion protruding from the outer connecting surface and located in the mounting groove of the outer guide plate, and a recessed portion recessed in the inner connecting surface and corresponding to the position of the protruding portion, there is a lateral distance between the protruding portion and at least one groove side surface of the mounting groove, and the recessed portion and the receiving hole of the middle guide plate together form a probe receiving space.

[0021] The outer surface of the outer guide plate can define a probe area for inserting a plurality of probes, and the position of the probe area corresponds to the probe accommodating space.

[0022] The outer surface of the outer layer guide plate can define a probe area for inserting a plurality of probes, and the probe area is located between the at least one first outer fixing hole and the at least one second outer fixing hole.

[0023] By adopting the above technical scheme, the adjustable guide plate unit in the present invention is fixed to the middle guide plate in a detachable fixing manner, and the inner and outer guide plates are also fixed to each other in a detachable fixing manner. In addition, there is a lateral distance between the protrusion of the inner guide plate and the side surface of the mounting groove of the outer guide plate. Therefore, if the position of a part of the probe relative to the adjustable guide plate unit does not meet the requirements due to factors such as the installation or flattening processing of the probe, for example, in the case where the lower guide plate unit is an adjustable guide plate unit, if the position of the needle tip of the probe against the perforated hole wall of the lower guide plate unit for the probe to penetrate does not meet the requirements, the installer can first release the mutual fixing relationship between the inner and outer guide plates, and then fine-tune the position of the outer guide plate laterally to make the probe position meet the requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a cross-sectional schematic diagram of a probe head, a main circuit board and a space converter of a conventional probe card;

[0025] Figure 2 It is a cross-sectional schematic diagram of a probe head with a guide plate capable of lateral fine adjustment, a main circuit board and a space converter provided by a first preferred embodiment of the present invention;

[0026] Figure 3 and Figure 4 yes Figure 2 A partial enlarged view of the probe head in FIG.

[0027] Figure 5 is another cross-sectional schematic diagram of the aforementioned probe head, the aforementioned main circuit board and the aforementioned space converter;

[0028] Figure 6is a top view schematically showing an upper guide plate unit and a plurality of first and second bolts of the aforementioned probe head, but without showing the probe hole;

[0029] Figure 7 is a bottom view schematically showing a lower guide plate unit and a plurality of first and second bolts of the aforementioned probe head, but without showing the probe hole;

[0030] Figure 8 It is a three-dimensional combined view of the upper and lower guide plate units and a middle guide plate of the aforementioned probe head, but the probe hole and the fixing hole are not shown;

[0031] Fig. 9 and Fig.10 It is a three-dimensional exploded view of the upper and lower guide plate units and the middle guide plate of the aforementioned probe head, but the probe hole and the fixing hole are not shown;

[0032] Fig.11 is a partial schematic diagram of the aforementioned probe head;

[0033] Fig.12 is a cross-sectional schematic diagram of a guide plate assembly provided by a second preferred embodiment of the present invention;

[0034] Fig.13 It is a cross-sectional schematic diagram of a guide plate assembly provided by a third preferred embodiment of the present invention. DETAILED DESCRIPTION

[0035] The following embodiments are given in conjunction with the accompanying drawings to illustrate the detailed structure, characteristics, assembly or use of the present invention in detail.

[0036] The applicant first explains that in the embodiments and drawings to be introduced below, the same reference numbers represent the same or similar elements or their structural features. It should be noted that the elements and structures in the drawings are for illustration purposes only and are not drawn according to the actual proportions and quantities, and if it is possible in practice, the features of different embodiments can be applied interchangeably.

[0037] Please read first Figure 2 As shown, the probe head 20 provided in a first preferred embodiment of the present invention mainly includes a middle guide plate 30 , an upper guide plate unit 40A, a lower guide plate unit 40B, a plurality of first bolts 61 , a plurality of second bolts 62 , and a plurality of probes 70 .

[0038] It should be noted that the structure of the present invention is mainly based on Figures 2 to 5 The cross-sectional view is presented in Figure 6 and Figure 7 The plan view of the auxiliary explanation of the relative position relationship between the upper and lower guide plate units 40A, 40B and the first and second bolts 61, 62, in order to simplify the diagram and facilitate the description, Figure 6 and Figure 7The micro-holes (i.e., the inner and outer probe holes which will be described in detail below) of the upper and lower guide plate units 40A and 40B for the probe 70 to pass through are not shown. Figures 8 to 10 The three-dimensional diagram is mainly for more clearly showing the appearance of the middle guide plate 30 and the upper and lower guide plate units 40A, 40B, but does not show the micro hole for the probe 70 to pass through and the fixing holes for the first and second bolts 61, 62 to pass through (i.e., the first, second inner and outer fixing holes to be described in detail below). Furthermore, in order to simplify the diagram and facilitate the description, Figures 2 to 4 Schematically shows a first bolt 61, a second bolt 62, and their corresponding fixing holes, Figure 5 Schematically shows another first bolt 61, another second bolt 62, and their corresponding fixing holes, and Figures 2 to 5 The positions of the first and second bolts 61, 62 and the fixing holes shown do not correspond to Figure 6 and Figure 7 The positions of the first and second bolts 61, 62 and the fixing holes are shown.

[0039] like Figures 8 to 10 As shown in FIG. 1 , the middle guide plate 30 of this embodiment is rectangular, and a rectangular receiving hole 33 is provided in the center thereof, which passes through the upper surface 31 and the lower surface 32 thereof. Figures 2 to 5 As shown, the upper surface 31 of the middle guide plate 30 is provided with a plurality of upper screw holes 34 located at the periphery of the receiving hole 33 , and the lower surface 32 of the middle guide plate 30 is provided with a plurality of lower screw holes 35 located at the periphery of the receiving hole 33 .

[0040] like Figures 8 to 10 As shown, the upper and lower guide plate units 40A, 40B of this embodiment respectively include an inner guide plate 41 and an outer guide plate 42. Each inner and outer guide plate 41, 42 is rectangular and smaller in size than the middle guide plate 30. Each inner guide plate 41 has an outer connecting surface 411, an inner connecting surface 412, and a probe mounting block 413. The probe mounting block 413 has a rectangular protrusion 414 protruding from the outer connecting surface 411, and a rectangular recessed portion 415 recessed from the inner connecting surface 412. The position of the recessed portion 415 corresponds to the protrusion 414 and is smaller in size than the protrusion 414. Each outer guide plate 42 has an inner surface 421, an outer surface 422, and a rectangular mounting groove 423 recessed from the inner surface 421. Figure 2 and Figure 5 As shown, the inner guide plates 41 of the upper and lower guide plate units 40A and 40B are connected to the upper and lower surfaces 31 and 32 of the middle guide plate 30 respectively with their inner connecting surfaces 412, and the outer guide plates 42 of the upper and lower guide plate units 40A and 40B are connected to the outer connecting surface 411 of the inner guide plate 41 with their inner surfaces 421, and the protrusion 414 of the inner guide plate 41 is located in the mounting groove 423 of the outer guide plate 42.

[0041] In addition, the inner guide plate 41 of the upper and lower guide plate units 40A and 40B further has a plurality of inner probe holes 416 located in the recessed portion 415 and penetrating the protruding portion 414, and at least one first inner fixing hole 417 (such as a first inner fixing hole 417) penetrating the inner and outer connecting surfaces 412 and 411 and located at the periphery of the probe mounting block 413. Figure 4 as shown) and at least one second internal fixing hole 418 (as shown Figure 3 In this embodiment, the first inner fixing hole 417 is a countersunk hole with large and small diameter parts, and the second inner fixing hole 418 is a through hole with generally equal diameter. Similarly, the outer layer guide plate 42 of the upper and lower guide plate units 40A and 40B has a plurality of outer probe holes 424 respectively connected to the inner probe hole 416, at least one first outer fixing hole 425 connected to the first inner fixing hole 417 (as shown in FIG. Figure 4 ), and at least one second outer fixing hole 426 (as shown) communicating with the second inner fixing hole 418 Figure 3 As shown in FIG. 1 , each outer probe hole 424 penetrates the outer surface 422 of the outer guide plate 42 and a bottom surface 423a of the mounting groove 423. The first and second outer fixing holes 425 and 426 penetrate the inner and outer surfaces 421 and 422 of the outer guide plate 42 and are located outside the mounting groove 423. The first outer fixing hole 425 of this embodiment is a through hole of generally equal diameter, and the second outer fixing hole 426 is a countersunk hole with large and small diameter parts. For example, the countersunk hole described in the present invention is as follows: Figure 3 The second external fixing hole 426 shown in the figure has a large diameter portion 427 with a larger inner diameter and a small diameter portion 428 with a smaller inner diameter for a bolt (eg Figure 3 The bolt head 622 and the screw rod 624 of the second bolt (shown) are respectively provided at the large diameter portion 427 and the small diameter portion 428.

[0042] like Figure 6 and Figure 7 As shown, the outer guide plates 42 of the upper and lower guide plate units 40A and 40B may be respectively provided with two first outer fixing holes 425 and two second outer fixing holes 426 arranged alternately, that is, the inner guide plates 41 of the upper and lower guide plate units 40A and 40B are also respectively provided with two corresponding first inner fixing holes 417 and two second inner fixing holes 418, the inner and outer fixing holes 425, 426, 417, 418 of the same guide plate unit are at the same distance from the center of the probe head 20 (that is, they are arranged at the same circle diameter), and the positions of the fixing holes of the upper and lower guide plate units 40A and 40B may be staggered, for example Figure 6 The first and second outer fixing holes 425 and 426 of the middle upper guide plate unit 40A are located at the four corners of the outer layer guide plate 42. Figure 7 The first and second outer fixing holes 425 and 426 of the middle and lower guide plate unit 40B are located corresponding to the four sides of the outer layer guide plate 42 .

[0043] The upper and lower guide plate units 40A, 40B and the middle guide plate 30 also have a needle positioning hole 43, 36 (such as Figure 4 As shown in FIG. 1 , when the probe 70 is not installed, the relative positions of the upper and lower guide plate units 40A and 40B are not as shown in FIG. Figure 2 As shown, instead, the implant needle positioning holes 43 and 36 are arranged in a manner that they are interconnected. At this time, a positioning pin 52 (such as Figure 4 As shown in the figure, the positioning pins 52 are inserted into the implant needle positioning holes 43 and 36, and the inner and outer probe holes 416 and 424 of the upper guide plate unit 40A correspond coaxially with the inner and outer probe holes 416 and 424 of the lower guide plate unit 40B. Each probe 70 passes through the inner and outer probe holes 416 and 424 of the upper and lower guide plate units 40A and 40B coaxially from top to bottom along a longitudinal axis (Y axis). After all the probes 70 are inserted, the positioning pins 52 withdraw from the implant needle positioning holes 43 and 36, and the upper and lower guide plate units 40A and 40B are relatively displaced along a transverse axis (X axis). For example, in this embodiment, the upper guide plate unit 40A moves toward the negative direction of the X axis to Figure 2 As shown in the position, the needle positioning hole 43 of the upper guide plate unit 40A is staggered with the needle positioning holes 36 and 43 of the middle guide plate 30 and the lower guide plate unit 40B, and the recessed portions 415 of the inner guide plates 41 of the upper and lower guide plate units 40A and 40B correspond to each other and form a probe accommodating space 22 together with the accommodating hole 33 of the middle guide plate 30. At this time, Figure 2 As shown, each probe 70 can define a needle head 72 passing through the lower guide plate unit 40B, a needle tail 74 passing through the upper guide plate unit 40A, and a needle body 76 located in the probe accommodating space 22. The needle head 72 and the needle tail 74 of each probe 70 are staggered along the transverse axis (X axis) so that the needle body 76 is bent. Moreover, there is a transverse distance d1 along the transverse axis (X axis) between the protrusion 414 of the inner guide plate 41 of the upper and lower guide plate units 40A and 40B and the two groove side surfaces 423b and 423c of the mounting groove 423 of the outer guide plate 42.

[0044] In the aforementioned assembly method in which the upper guide plate unit 40A is moved along the transverse axis (X axis) to produce the dislocation effect, the lower guide plate unit 40B can be fixed to the middle guide plate 30 by the first and second bolts 61 and 62 before the needle is implanted. Figures 2 to 4As shown, the first bolt 61 passes through the first outer fixing hole 425 and is inserted into the first inner fixing hole 417 and is screwed to the lower screw hole 35 of the middle guide plate 30, so that the inner layer guide plate 41 of the lower guide plate unit 40B is fixed to the middle guide plate 30, and the second bolt 62 passes through the second outer fixing hole 426 and the second inner fixing hole 418 and is screwed to the lower screw hole 35 of the middle guide plate 30, so that the outer layer guide plate 42 of the lower guide plate unit 40B is fixed to the inner layer guide plate 41 and the middle guide plate 30. After the above-mentioned needle implantation and misalignment steps are completed, the upper guide plate unit 40A is fixed to the middle guide plate 30 by the first and second bolts 61 and 62, as shown in FIG. Figure 5 As shown, the first bolt 61 passes through the first outer fixing hole 425 and is inserted into the first inner fixing hole 417 and is screwed to the upper screw hole 34 of the middle guide plate 30, so that the inner layer guide plate 41 of the upper guide plate unit 40A is fixed to the middle guide plate 30. The second bolt 62 passes through the second outer fixing hole 426 and the second inner fixing hole 418 and is screwed to the upper screw hole 34 of the middle guide plate 30, so that the outer layer guide plate 42 of the upper guide plate unit 40A is fixed to the inner layer guide plate 41 and the middle guide plate 30. Then, the bottom end of the needle head 72 and the top end of the needle tail 74 of each probe 70 will be flattened. If there is no problem of local displacement of the probe 70, the probe head 20 is assembled, as shown in FIG. Figure 2 As shown, the middle guide plate 30 is fixed to a main circuit board 56 near its outer edge by one or more fixing members 54, and the top end of the needle tail 74 of each probe 70 is against a space transformer 58. In this way, the probe head 20, the main circuit board 56 and the space transformer 58 are assembled into a probe card.

[0045] Through the above-mentioned structure, the upper and lower guide plate units 40A and 40B of the probe head 20 of the present embodiment are both adjustable guide plate units. The inner and outer guide plates 41 and 42 of the same adjustable guide plate unit are detachably fixed to each other and detachably fixed to the middle guide plate 30. When the second bolt 62 is not tightened, the outer guide plate 42 can be finely adjusted relative to the inner guide plate 41 along the horizontal direction (for example, the transverse axis (X axis)). Therefore, if the probe 70 has a local displacement due to factors such as installation or flattening processing, so that the position of the probe 70 relative to the adjustable guide plate unit does not meet the requirements, a probe head adjustment method can be used for fine adjustment. This probe head adjustment method includes the following steps:

[0046] a) Loosen the second bolt 62 provided on the adjustable guide plate unit. For example, if the position of the needle head 72 of the probe 70 against the wall of the outer probe hole 424 of the lower guide plate unit 40B does not meet the requirements, the installer can first loosen the second bolt 62 provided on the lower guide plate unit 40B to release the mutual fixing relationship between the inner and outer guide plates 41, 42 of the lower guide plate unit 40B.

[0047] b) Adjust the position of the outer guide plate 42 of the adjustable guide plate unit along the transverse axis (X axis). As mentioned above, there is a transverse distance d1 between the protrusion 414 of the inner guide plate 41 and the mounting groove 423 of the outer guide plate 42, and Figure 2 and Figure 3 As shown, the diameter of the large diameter portion 427 of the second outer fixing hole 426 is The diameter D1 of the bolt head 622 of the second bolt 62 is slightly larger than that of the small diameter portion 428 of the second external fixing hole 426. The diameter D2 of the screw rod 624 is slightly larger than that of the second bolt 62. Therefore, continuing with the above example, the outer guide plate 42 of the lower guide plate unit 40B can be finely adjusted along the transverse axis (X axis) when not fixed by the second bolt 62, so that the position of the needle tip 72 of the probe 70 against the wall of the outer probe hole 424 of the lower guide plate unit 40B meets the requirements.

[0048] c) Tighten the second bolt 62 provided on the adjustable guide plate unit so that the inner and outer guide plates 41, 42 are fixed to each other.

[0049] It can be known from the above content that, according to different usage requirements, it may only be necessary to adjust the relative position of the needle head 72 or needle tail 74 of the probe 70 and the outer probe hole 424 of the outer guide plate 42, or it may be necessary to adjust both the needle head 72 and the needle tail 74. Therefore, the probe head 20 of the present invention may have upper and lower guide plate units 40A and 40B that are adjustable guide plate units as described above, or only one of the upper and lower guide plate units 40A and 40B is an adjustable guide plate unit. The probe head 20 of the present invention can also allow the user to observe through the outer probe hole 424 or the implant needle positioning hole 43 whether the adjustable guide plate unit has performed lateral fine adjustment of the outer guide plate 42, for example Fig.11 The picture shows the situation when observing from the outer probe hole 424 toward the inner guide plate 41. The shadow produced by the local hole wall of the inner probe hole 416 can be seen from the right side of the outer probe hole 424. If this shadow can be observed in most of the outer probe holes 424 and the shadows appear from the same direction, it means that it is not a single outer probe hole 424 that has a positioning problem, but the outer guide plate 42 has been fine-tuned to the right, causing the outer probe holes 424 to shift to the right in unison.

[0050] In the present invention, the inner guide plate 41 has a protrusion 414 and a recess 415 to be in a hat shape, and the outer guide plate 42 has a mounting groove 423 for accommodating the protrusion 414, so that the span D3 of the outer guide plate 42 (i.e., the width of the mounting groove 423 along the X-axis) can be small and the outer wall thickness W1 of the outer guide plate 42 can be large. Figure 3As shown, the outer wall thickness W1 is the distance between the outer peripheral surface 429 of the outer layer guide plate 42 and the groove side surfaces 423b, 423c of the mounting groove 423 along the transverse axis. The outer layer guide plates 42 of the upper and lower guide plate units 40A and 40B have a small span or a large outer wall thickness W1, so that the probe head 20 has a better structural strength. In addition, the outer surface 422 of the upper guide plate unit 40A needs to be provided with a receiving groove 422a (such as Figure 6 As shown; it may be a groove or a through groove) to accommodate the element (not shown) set on the bottom surface of the space converter 58 above, the outer wall thickness W1 of the upper guide plate unit 40A is large, which can make it more likely that the accommodating groove 422a is set at the thicker part of the outer layer guide plate 42 of the upper guide plate unit 40A (that is, not the corresponding installation groove 423). In addition, the outer layer guide plate 42 of the upper and lower guide plate units 40A and 40B has a small span or a large outer wall thickness W1, which also makes the position of the first and second bolts 61 and 62 closer to the probe accommodating space 22 and can increase the locking range and thus enhance the stability of the probe head 20. More specifically, there is a locking distance d2 along the transverse axis between the screw rods 614 and 624 of each of the first and second bolts 61 and 62 and the probe accommodating space 22, and the locking distance d2 is greater than the sum of the transverse distance d1 and an inner wall thickness W2 of the inner layer guide plate 41. Figure 3 and Figure 4 As shown, the inner wall thickness W2 is the distance between the outer circumference 414a of the protrusion 414 of the inner layer guide plate 41 and the inner circumference 415a of the recessed portion 415 along the transverse axis. As mentioned above, in this embodiment, the inner and outer fixing holes 425, 426, 417, 418 of the same adjustable guide plate unit are at the same distance from the center of the probe head 20, so the screw rods 614, 624 of the first and second bolts 61, 62 of the same adjustable guide plate unit and the probe accommodating space 22 are the same, but the present invention is not limited thereto, and the locking distances d2 of the first and second bolts 61, 62 of the same adjustable guide plate unit may also be different and can be adjusted according to actual design requirements.

[0051] It is worth mentioning that, under the premise that the inner and outer guide plates 41 and 42 have an adjustable lateral distance d1, if the inner guide plate 41 has only the recessed portion 415 but not the protruding portion 414, that is, the inner guide plate 41 does not have an extension portion 419 (i.e., a hat-shaped brim portion; e.g., Figure 2 As shown in FIG. 4 , the inner guide plate 41 cannot be provided between the thicker portion of the outer guide plate 42 and the middle guide plate 30 through the extension portion 419 and be locked by the first and second bolts 61 and 62. In this way, the inner wall thickness W2 of the inner guide plate 41 needs to be designed to be larger for bolt locking, and the span D3 of the outer guide plate 42 must also be increased accordingly. Therefore, the inner guide plate 41 of the present invention has a design of a protruding portion 414 and a recessed portion 415, which can produce a better structural strength under the premise of achieving the function of the outer guide plate 42 being able to be fine-tuned in the horizontal direction.

[0052] Based on the requirement of lateral adjustment of the outer layer guide plate 42 in step b) of the aforementioned probe head adjustment method, the lateral distance d1 between the protrusion 414 of the inner layer guide plate 41 and the mounting groove 423 of the outer layer guide plate 42 is preferably designed to be greater than or equal to 0.05 millimeters (mm) and less than or equal to 2 millimeters. If the lateral distance d1 is less than 0.05 millimeters, the fine adjustment range of the outer layer guide plate 42 is relatively insufficient, and if the lateral distance d1 is greater than 2 millimeters, the span of the outer layer guide plate 42 will be larger and the outer wall thickness W1 will be smaller. Based on the design requirement of making the span of the outer layer guide plate 42 small and the outer wall thickness W1 large, the inner wall thickness W2 of the inner layer guide plate 41 only needs to be greater than 0.1 millimeters, and the outer wall thickness W1 is greater than the inner wall thickness W2. In addition, in order to allow the inner and outer guide plates 41, 42 to have an allowable space for processing accuracy and to be easy to assemble with each other, there may be a longitudinal distance d3 along the longitudinal axis (Y axis) between the protrusion 414 of the inner guide plate 41 and the bottom surface 423a of the mounting groove 423 of the outer guide plate 42. The longitudinal distance d3 is preferably designed to be greater than or equal to 0 mm and less than or equal to 2 mm. If the longitudinal distance d3 is greater than 2 mm, the structural strength of the outer guide plate 42 will be poor.

[0053] In summary, at least one of the upper and lower guide plate units 40A, 40B of the probe head 20 of the present invention can be an adjustable guide plate unit whose outer layer guide plate can be finely adjusted laterally, and the inner and outer layer guide plates 41, 42 are fixed to the middle guide plate 30 in a detachable fixing manner, and are also fixed to each other in a detachable fixing manner, so that the freedom of guide plate adjustment can be improved and the probe position can be made to meet the requirements, and the outer layer guide plate 42 has a small span and a large outer wall thickness W1, so the structural strength is good and more thicker parts can be left to set the accommodating groove 422a for accommodating components. If only the upper guide plate unit 40A can be an adjustable guide plate unit whose outer layer guide plate can be finely adjusted laterally, the lower guide plate unit 40B and the middle guide plate 30 can be made into an integral shape, and vice versa, if only the lower guide plate unit 40B can be an adjustable guide plate unit whose outer layer guide plate can be finely adjusted laterally, the upper guide plate unit 40A and the middle guide plate 30 can be made into an integral shape.

[0054] As mentioned above, the inner guide plate 41 of the present invention has a protrusion 414 and a recessed portion 415 and is in a hat shape, and the outer guide plate 42 has a mounting groove 423 for accommodating the protrusion 414, which is beneficial to the overall structure of the probe head 20. However, the outer guide plate 42 of the adjustable guide plate unit in the present invention can be fine-tuned laterally, which is not necessarily achieved by the aforementioned hat-shaped structure. As mentioned above, only one of the upper and lower guide plate units 40A and 40B in the present invention can be an adjustable guide plate unit. Therefore, the second and third preferred embodiments of the present invention respectively provide a guide plate set 81, 82, such as Fig.12 and Fig.13As shown, each guide plate group 81, 82 includes a fixed unit 90, an adjustable guide plate unit, and first and second bolts 61, 62, wherein the adjustable guide plate unit 40B of the guide plate group 81 is similar to the lower guide plate unit 40B in the aforementioned first preferred embodiment, and the adjustable guide plate unit 40A of the guide plate group 82 is similar to the upper guide plate unit 40A in the aforementioned first preferred embodiment, but the adjustable guide plate units 40B, 40A of the guide plate groups 81, 82 do not have the hat-shaped structure in the aforementioned first preferred embodiment, and the thickness T1 defined by the outer guide plate 42 at the outer periphery of the guide plate group is greater than or equal to the thickness T2 defined by the inner guide plate 41 at the outer periphery of the guide plate group, and the locking method of the bolts is also slightly different, as described below.

[0055] Each of the first bolt 61 and the second bolt 62 includes a bolt head 612, 622 and a screw rod 614, 624. Fig.12 and Fig.13 In the embodiment, the bolt head 612 of the first bolt 61 is disposed in the first external fixing hole 425, and a gap C1 is formed around the bolt head 612 of the first bolt 61 and the hole wall of the first external fixing hole 425, and the screw rod 614 of the first bolt 61 is locked to the inner layer guide plate 41 and the fixing unit. Fig.12 and Fig.13 In the illustrated embodiment, the fixing unit 90 only includes the aforementioned middle guide plate 30, and the screw rod 614 of the first bolt 61 is locked to the middle guide plate 30. However, as mentioned above, the middle guide plate 30 has an adjustable guide plate unit on one side and another adjustable or non-adjustable guide plate unit on the other side. Therefore, the screw rod 614 of the first bolt 61 is not limited to being locked to the middle guide plate 30, that is, the fixing unit 90 is not limited to only including the middle guide plate 30. Fig.13 For example, the adjustable guide plate unit 40A is an upper guide plate unit provided on the upper surface 31 of the middle guide plate 30, and the lower surface 32 of the middle guide plate 30 may be provided with a lower guide plate unit, and the lower guide plate unit may also be an adjustable guide plate unit, or a non-adjustable guide plate unit including a single guide plate or multiple guide plates. In this case, the screw rod 614 of the first bolt 61 may not only be locked to the middle guide plate 30, but may also pass through the middle guide plate 30 and be locked to the single guide plate or one of the multiple guide plates of the lower guide plate unit. Alternatively, there may be no middle guide plate 30 between the upper and lower guide plate units (or the middle guide plate and the lower guide plate unit are formed as one piece). In this case, the inner guide plate 41 of the adjustable guide plate unit 40A is directly fixed to the lower guide plate unit by the first bolt 61, that is, the screw rod 614 of the first bolt 61 is locked to the lower guide plate unit. In other words, the fixing unit 90 may include only the middle guide plate 30, or may include the middle guide plate 30 and the whole or part of another guide plate unit, or may include only the whole or part of the guide plate of the other guide plate unit without including the middle guide plate.

[0056] In addition, the bolt head 622 of the second bolt 62 is disposed on the outer surface 422 of the outer guide plate 42, the screw rod 624 of the second bolt 62 passes through the second outer fixing hole 426 and is locked to the inner guide plate 41 and the fixing unit 90, and the portion of the screw rod 624 of the second bolt 62 located in the second outer fixing hole 426 is separated from the hole wall of the second outer fixing hole 426 by a gap C2. Thus, by loosening the second bolt 62, the position of the outer guide plate 42 can be finely adjusted laterally, and, Fig.12 and Fig.13 The embodiment shown can also avoid the outer guide plate 42 from having too large a span, and still leave enough area on the outer surface 422 of the outer guide plate 42 to set the aforementioned receiving groove 422a for accommodating the element (not shown in the figure), for example Fig.13 The receiving groove 422a shown can be used to accommodate components disposed on the bottom surface of the space transformer above the upper guide plate unit 40A.

[0057] It is worth mentioning that Fig.12 and Fig.13 The bolt locking method shown in the figure can also be applied to the first preferred embodiment described above, and the bolt locking method of the first preferred embodiment can also be applied to Fig.12 and Fig.13 The morphology without the cap-like structure shown. In other words, Fig.12 and Fig.13 The first inner fixing hole 417 in the embodiment may also be as follows Figure 4 The countersunk hole shown in the figure includes large and small diameter parts 417a and 417b, and the large diameter part 417a and the first outer fixing hole 425 together accommodate the bolt head 612 of the first bolt 61, and even the bolt head 612 of the first bolt 61 can be completely located in the large diameter part 417a of the first inner fixing hole 417, and the bolt head 612 of the first bolt 61 is also separated from the hole wall of the large diameter part 417a of the first inner fixing hole 417 by a gap. Similarly, Fig.12 and Fig.13 The second external fixing hole 426 in the embodiment may also be as follows Figure 3 The countersunk hole shown includes large and small diameter portions 427, 428, and the large diameter portion 427 accommodates the bolt head 622 of the second bolt 62. The bolt head 622 and the screw rod 624 of the second bolt 62 located in the second external fixing hole 426 are respectively separated from the hole walls of the large and small diameter portions 427, 428 of the second external fixing hole 426 by a gap.

[0058] Fig.12 and Fig.13 The guide plate groups 81 and 82 are also provided with the following when they are actually used: Figure 2 and Figure 4The implant needle positioning holes 36, 43 and the inner and outer probe holes 416, 424 are provided to insert the probe 70. Therefore, regardless of the first, second or third preferred embodiment, the outer surface 422 of the outer guide plate 42 can define a probe area A for inserting a plurality of probes 70, such as Figure 6 and Figure 7 As shown, the outer guide plate 42 is provided with an outer probe hole 424 (as described above, Figure 6 and Figure 7 The outer probe hole is not shown in the figure, and only the probe area A is indicated by an imaginary line. The probe area A is located between the first and second outer fixing holes 425 and 426, and the position of the probe area A corresponds to the aforementioned probe accommodating space 22. When the adjustable guide plate units 40A and 40B have been subjected to lateral fine adjustment of the outer layer guide plate 42, the user can adjust the outer layer guide plate 42 by the above-mentioned and Fig.11 The method shown in the figure is to observe that through the interconnected perforations of the inner and outer guide plates 41 and 42, the user can observe from the perforations of the outer guide plate 42 (such as the outer probe hole 424) whether there is a shadow produced by the local hole wall of the perforations of the inner guide plate 41 (such as the inner probe hole 416). Fig.11 The situation shown in the figure indicates that the two through-holes are not coaxially corresponding, which means that the outer guide plate 42 has been transversely fine-tuned. In addition, the user can also confirm whether the adjustable guide plate units 40A and 40B have been transversely fine-tuned on the outer guide plate 42 by the relative position of the first bolt 61 and the first external fixing hole 425. In detail, the first bolt 61 and the first external fixing hole 425 can respectively define a central axis L1 and L2. When the outer guide plate 42 has not been transversely fine-tuned, the central axis L1 and L2 are as follows: Fig.12 and Fig.13 As shown, if the user observes that the central axis L1 of the first bolt 61 deviates from the central axis L2 of the first outer fixing hole 425 , it can be known that the outer layer guide plate 42 has been transversely fine-tuned.

[0059] Finally, it must be stated again that the constituent elements disclosed in the aforementioned embodiments of the present invention are for illustrative purposes only and are not intended to limit the scope of patent protection of this case. Replacements or changes to other equivalent elements should also be covered by the scope of patent protection of this case.

Claims

1. A probe head having a guide plate capable of transverse fine adjustment, capable of defining a transverse axis and a longitudinal axis perpendicular to each other, characterized in that The probe head comprises: A middle guide plate having an upper surface, a lower surface, and a receiving hole penetrating the upper surface and the lower surface; An upper guide plate unit and a lower guide plate unit are respectively arranged on the upper surface and the lower surface of the middle guide plate, at least one of the upper guide plate unit and the lower guide plate unit is an adjustable guide plate unit, the adjustable guide plate unit comprises an inner layer guide plate and an outer layer guide plate which can be detachably fixed to the middle guide plate and can be detachably fixed to each other, the outer layer guide plate has an inner surface, an outer surface, and a mounting groove recessed from the inner surface, the inner layer guide plate has an outer connecting surface connected to the inner surface of the outer layer guide plate, an inner connecting surface connected to the middle guide plate, and a probe mounting block, the probe mounting block has a protruding portion protruding from the outer connecting surface and located in the mounting groove of the outer layer guide plate, and a recessed portion recessed in the inner connecting surface and corresponding to the position of the protruding portion, there is a lateral distance between the protruding portion and at least one groove side surface of the mounting groove along the transverse axis, and the recessed portion and the accommodating hole of the middle guide plate together form a probe accommodating space; A plurality of probes are provided, each of which has a needle head passing through the lower guide plate unit, a needle tail passing through the upper guide plate unit, and a needle body located in the probe accommodating space, and the needle head and needle tail of each probe are staggered along the transverse axis so that the needle body is bent.

2. The probe head with a guide plate capable of lateral fine adjustment as claimed in claim 1, characterized in that: The lateral distance is greater than or equal to 0.05 mm and less than or equal to 2 mm.

3. The probe head with a guide plate capable of lateral fine adjustment as claimed in claim 1, characterized in that: There is a longitudinal distance along the longitudinal axis between the protruding portion of the inner layer guide plate and a groove bottom surface of the mounting groove of the outer layer guide plate.

4. The probe head with a guide plate capable of lateral fine adjustment as claimed in claim 3, characterized in that: The longitudinal distance is greater than or equal to 0 mm and less than or equal to 2 mm.

5. The probe head with a guide plate capable of lateral fine adjustment as claimed in claim 1, characterized in that: The outer guide plate has at least one first outer fixing hole and at least one second outer fixing hole that pass through its inner surface and outer surface and are located on the periphery of the mounting groove, and the inner guide plate has at least one first inner fixing hole that passes through its inner connecting surface and outer connecting surface and is connected to the first outer fixing hole and at least one second inner fixing hole that is connected to the second outer fixing hole that is located on the periphery of the probe mounting block; the probe head also includes at least one first bolt that passes through the first outer fixing hole and is inserted into the first inner fixing hole, and at least one second bolt that can be inserted into the second outer fixing hole and the second inner fixing hole for fine-tuning the position of the outer guide plate along the transverse and axial direction, the first bolt is removably fixed to the middle guide plate to fix the inner guide plate to the middle guide plate, and the second bolt is removably fixed to the middle guide plate to fix the outer guide plate to the inner guide plate and the middle guide plate.

6. The probe head with a guide plate capable of lateral fine adjustment as claimed in claim 5, characterized in that: The inner guide plate can define an inner wall thickness, which is the distance between an outer circumferential surface of the protrusion and an inner circumferential surface of the recessed portion along the transverse axis. Each of the first bolts and the second bolt includes a screw rod partially disposed on the middle guide plate. There is a locking distance along the transverse axis between each of the screw rods and the probe accommodating space, and the locking distance is greater than the sum of the transverse distance and the inner wall thickness of the inner guide plate.

7. The probe head with a guide plate capable of lateral fine adjustment as claimed in claim 5, characterized in that: The second external fixing hole is a countersunk hole including a large diameter portion and a small diameter portion. The second bolt includes a bolt head located in the large diameter portion of the second external fixing hole. The diameter of the large diameter portion is larger than the diameter of the bolt head.

8. The probe head with a guide plate capable of lateral fine adjustment as claimed in claim 5, characterized in that: The second bolt includes a screw rod disposed on the outer guide plate, the inner guide plate and the middle guide plate, and the diameter of the portion of the second outer fixing hole through which the screw rod of the second bolt passes is larger than the diameter of the screw rod.

9. The probe head with a guide plate capable of lateral fine adjustment as claimed in claim 1, characterized in that: The outer guide plate can define an outer wall thickness, which is the distance between an outer circumferential surface of the outer guide plate and the side surface of the mounting groove along the transverse axis. The inner guide plate can define an inner wall thickness, which is the distance between an outer circumferential surface of the protrusion and an inner circumferential surface of the recessed portion along the transverse axis. The inner wall thickness is greater than 0.1 mm, and the outer wall thickness is greater than the inner wall thickness.

10. A probe head adjustment method for adjusting the probe head having a guide plate capable of lateral fine adjustment as claimed in claim 5, characterized in that The probe head adjustment method comprises the following steps: Loosen the second bolt provided on the adjustable guide plate unit; Adjusting the position of the outer guide plate of the adjustable guide plate unit along the transverse axis; Lock the second bolt disposed on the adjustable guide plate unit.

11. A guide plate assembly having a guide plate capable of lateral fine adjustment, characterized in that Contains: a fixed unit; An adjustable guide plate unit, comprising an inner guide plate and an outer guide plate, the outer guide plate having an inner surface, an outer surface, and at least one first outer fixing hole and at least one second outer fixing hole penetrating the inner surface and the outer surface, the inner guide plate having an outer connecting surface connected to the inner surface of the outer guide plate, an inner connecting surface connected to the fixing unit, and at least one first inner fixing hole communicating with the first outer fixing hole and at least one second inner fixing hole communicating with the second outer fixing hole penetrating the inner connecting surface and the outer connecting surface; At least one first bolt is inserted into the first inner fixing hole through the first outer fixing hole and is detachably fixed to the fixing unit so as to fix the inner layer guide plate to the fixing unit; at least one second bolt, which is passed through the second outer fixing hole and the second inner fixing hole and is detachably fixed to the fixing unit so that the outer guide plate is fixed to the inner guide plate and the fixing unit; Wherein, each of the first bolt and the second bolt comprises a bolt head and a screw rod, the bolt head of the first bolt is arranged in at least one of the first external fixing hole and the first internal fixing hole and is separated from the hole wall by a gap, and the portion of the second bolt located in the second external fixing hole is separated from the hole wall of the second external fixing hole by a gap.

12. The guide plate assembly having a guide plate capable of lateral fine adjustment according to claim 11, characterized in that: The inner guide plate and the outer guide plate can respectively define a thickness at the outer periphery of the guide plate set, and the thickness of the outer guide plate is greater than or equal to the thickness of the inner guide plate.

13. The guide plate assembly having a guide plate capable of lateral fine adjustment according to claim 11, characterized in that: The outer surface of the outer guide plate is provided with a receiving groove for receiving a component.

14. The guide plate assembly having a guide plate capable of lateral fine adjustment according to claim 11, characterized in that: The inner guide plate and the outer guide plate are respectively provided with a through hole for allowing one of a probe and a positioning pin to pass through, and the through hole of the inner guide plate and the through hole of the outer guide plate are interconnected and non-coaxially corresponding.

15. The guide plate assembly having a guide plate capable of lateral fine adjustment according to claim 11, characterized in that: The first bolt and the first external fixing hole can respectively define a central axis, and the central axis of the first bolt deviates from the central axis of the first external fixing hole.

16. The guide plate assembly having a guide plate capable of lateral fine adjustment according to claim 11, characterized in that: The fixing unit includes a middle guide plate, the middle guide plate has an upper surface, a lower surface, and a receiving hole passing through the upper surface and the lower surface, the outer guide plate has a mounting groove recessed from the inner surface, the inner guide plate has a probe mounting block, the probe mounting block has a protruding portion protruding from the outer connecting surface and located in the mounting groove of the outer guide plate, and a recessed portion recessed in the inner connecting surface and corresponding to the position of the protruding portion, there is a lateral distance between the protruding portion and at least one groove side surface of the mounting groove, and the recessed portion and the receiving hole of the middle guide plate together form a probe receiving space.

17. The guide plate assembly having a guide plate capable of lateral fine adjustment according to claim 16, characterized in that: The outer surface of the outer layer guide plate can define a probe area for inserting a plurality of probes, and the position of the probe area corresponds to the probe accommodating space.

18. The guide plate assembly having a guide plate capable of lateral fine adjustment according to claim 11, characterized in that: The outer surface of the outer layer guide plate can define a probe area for inserting a plurality of probes, and the probe area is located between the at least one first outer fixing hole and the at least one second outer fixing hole.

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