Substrate processing device including door portion having inclined surface

Abstract

According to one embodiment, a substrate processing device may include: a chamber portion having a processing space therein and including a chamber inclined surface, wherein an opening portion is formed on the chamber inclined surface; a door portion including a door inclined surface corresponding to the chamber inclined surface and capable of being combined with the chamber portion; and a door driving portion that drives the door portion so as to open and close the processing space.

Description

Technical Field

[0001] The following embodiments relate to a substrate processing apparatus including a door portion having an inclined surface. Background Art

[0002] Generally, semiconductors are manufactured by repeatedly performing a series of processes such as photolithography, evaporation, and etching. Due to the repeated processes, various particles, metal impurities, organic matter, and other contaminants remain on the surface of the substrate that constitutes these semiconductors. The contaminants remaining on the substrate will reduce the reliability of the manufactured semiconductors, so in order to improve this phenomenon, a process of cleaning the substrate is required in the semiconductor manufacturing process.

[0003] Recently, a process for treating substrates using supercritical fluids has been adopted. In order to meet the conditions of supercritical fluids, this supercritical treatment process must form a high pressure inside the processing space. In order to withstand the high pressure formed inside the processing space, a method of clamping the chamber and the door is used. However, even if the chamber and the door are clamped, there is a problem that the door and the like are pushed open by the high pressure formed inside the processing space, and in the process of pushing open, the door and the like are split due to friction between the components. Therefore, there is a need for a substrate processing device having a structure that can effectively withstand the high pressure formed inside the processing space.

[0004] The above-mentioned background technology is owned or mastered by the inventor in the process of deriving the present invention, and is not necessarily the announced technology disclosed to the general public before the application of the present invention. Summary of the invention

[0005] An object of one embodiment is to provide a substrate processing apparatus that can effectively withstand a high pressure formed inside a processing space.

[0006] An object of one embodiment is to provide a substrate processing apparatus capable of minimizing a split phenomenon caused by friction between components.

[0007] According to one embodiment, a substrate processing device may include: a chamber portion having a processing space inside and including a chamber inclined surface forming an opening portion; a door portion including a door inclined surface corresponding to the chamber inclined surface and capable of being combined with the chamber portion; and a door driving portion that drives the door portion to open and close the processing space.

[0008] The door portion may include a protruding portion protruding upward on the upper surface, and the chamber portion may include a recessed portion formed in a shape corresponding to the protruding portion so as to be inserted into the protruding portion.

[0009] One side of the protruding portion may include at least a portion of the inclined surface of the door.

[0010] The device may further include a clamp portion that surrounds at least a portion of the chamber portion and the door portion when the chamber portion and the door portion are coupled.

[0011] The clamp part may include: a lower clamp body contacting the door part; an upper clamp body spaced apart and arranged on the upper side of the lower clamp body; and a side clamp body connecting both sides of the lower clamp body and the upper clamp body.

[0012] The door portion may include a clamp insertion groove formed in a surface opposite to the chamber portion in a manner recessed inwardly so as to allow the lower clamp body to be inserted therein.

[0013] An upper surface of the jig insertion groove may be formed in a form inclined downward in an entering direction of the jig part.

[0014] The upper surface of the lower clamp body may be formed to be inclined downward in the entry direction of the clamp part in a form corresponding to the upper surface of the clamp insertion groove.

[0015] The clamp portion may include a clamp concave-convex portion formed on a lower surface of the upper clamp body.

[0016] The cavity portion may include a cavity concave-convex portion formed thereon in combination with the jig concave-convex portion.

[0017] The clamp portion may include an inclined connection portion formed as an inclined surface at a portion where the side clamp body is connected to at least one of the lower clamp body and the upper clamp body.

[0018] At least one of the door portion and the chamber portion may include an inclined chamber portion having an inclined surface formed at a corner so as to allow the inclined connection portion to be inserted.

[0019] The invention may further include a sealing portion installed at a contact portion between the door portion and the chamber portion along a periphery of the opening portion.

[0020] The sealing portion may include a U-shaped sealing member, and the U-shaped space may be configured to communicate with the processing space.

[0021] The door driving unit can drive the door unit in the up and down directions.

[0022] A clamp driving portion that drives the clamp portion in a front-rear direction may further be included.

[0023] A pressurizing portion may also be included, which pressurizes the door portion in a certain direction to ensure tight combination of the chamber portion and the door portion.

[0024] According to an embodiment of the present invention, a substrate processing apparatus can effectively withstand a high pressure formed inside a processing space.

[0025] According to a substrate processing apparatus of one embodiment, a split phenomenon caused by friction between components can be minimized.

[0026] The effects of the substrate processing apparatus according to one embodiment are not limited to the above-mentioned contents, and a person skilled in the art can clearly understand other effects not mentioned from the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The following drawings in this specification illustrate a preferred embodiment of the present invention and, together with the detailed description of the invention, serve to further understand the technical concept of the present invention. Therefore, the present invention should not be construed as being limited to the matters recorded in the drawings.

[0028] Figure 1 is an exploded perspective view of a substrate processing apparatus according to one embodiment.

[0029] Figure 2 is a combined three-dimensional diagram of a substrate processing apparatus according to an embodiment.

[0030] Figure 3 is a side cross-sectional view of a substrate processing apparatus according to an embodiment of the present invention.

[0031] Figure 4 is a cross-sectional view of a substrate processing apparatus according to an embodiment.

[0032] Figure 5 FIG. 1 is a front view of a chamber portion and a door portion of a substrate processing apparatus according to an embodiment.

[0033] Figure 6 is a combined front view of a substrate processing apparatus according to one embodiment.

[0034] Figure 7 is a block diagram of a substrate processing apparatus according to one embodiment. DETAILED DESCRIPTION

[0035] The following is a detailed description of the embodiment with reference to the accompanying drawings. When adding reference numerals to the constituent elements of each drawing, it should be noted that the same constituent element should be given the same numeral as much as possible even if it is marked on different drawings. In addition, when describing the present embodiment, if it is considered that the detailed description of the relevant well-known structure or function will hinder the understanding of the embodiment, its detailed description will be omitted.

[0036] In addition, when describing the constituent elements of the embodiments, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only used to distinguish the constituent element from other constituent elements, and the nature, sequence, steps, etc. of the relevant constituent elements are not limited by the terms. When a constituent element is described as being "connected", "combined" or "accessed" to other constituent elements, it should be understood that the constituent element can be directly connected or accessed to other constituent elements, but other constituent elements can also be "connected", "combined" or "accessed" between the constituent elements.

[0037] For the constituent elements included in a certain embodiment and the constituent elements having common functions, the same names are used to describe them in another embodiment. Unless otherwise stated, the description described in any embodiment can also be applied to other embodiments, and the specific description is omitted within the scope of repetition.

[0038] Figure 1 is an exploded perspective view of a substrate processing apparatus according to one embodiment. Figure 2 is a combined three-dimensional diagram of a substrate processing apparatus according to an embodiment.

[0039] Reference Figure 1 and Figure 2 According to one embodiment, the substrate processing apparatus 1 may be an apparatus that forms a high pressure in the processing space S and processes the substrate. For example, the substrate processing apparatus 1 may be an apparatus that processes the substrate using a supercritical fluid. The substrate processing apparatus 1 may be combined with a clamping portion 15 so that the chamber portion 11 and the door portion 12 are not separated due to the high pressure formed in the processing space S.

[0040] Figure 3 is a side cross-sectional view of a substrate processing apparatus according to an embodiment of the present invention. Figure 4 is a cross-sectional view of a substrate processing apparatus according to an embodiment. Figure 5 FIG. 1 is a front view of a chamber portion and a door portion of a substrate processing apparatus according to an embodiment. Figure 6 is a combined front view of a substrate processing apparatus according to one embodiment. Figure 7 is a block diagram of a substrate processing apparatus according to one embodiment.

[0041] Reference Figures 3 to 7 The substrate processing apparatus 1 according to one embodiment may include a chamber portion 11 , a door portion 12 , a door driving portion 13 , a sealing portion 14 , a clamp portion 15 , a clamp driving portion 16 , and a pressurizing portion 17 .

[0042] The chamber portion 11 may be provided with a processing space S inside. In the processing space S, a processing process of a substrate may be performed. A supercritical fluid may be supplied to the processing space S. A mounting portion for mounting a substrate may be provided in the processing space S. The chamber portion 11 may include an opening portion O for moving a substrate into and out of the processing space S. In addition, the chamber portion 11 may include a chamber inclined surface 111 formed in an inclined form on one side. For example, the inclined surface of the chamber inclined surface 111 may be inclined in a direction toward the ground. The opening portion O may be formed on the chamber inclined surface 111.

[0043] The door portion 12 may be combined with the chamber portion 11 in a form that allows the processing space S to be opened and closed. When the door portion 12 is combined with the chamber portion 11, the processing space S and the opening portion O may be closed. The door portion 12 may include a door inclined surface 121 corresponding to the chamber inclined surface 111. That is, the chamber inclined surface 111 and the door inclined surface 121 may be formed at corresponding inclination angles. In a state where the door portion 12 is combined with the chamber portion 11, the door inclined surface 121 may contact the chamber inclined surface 111. In other words, when the door portion 12 is combined with the chamber portion 11, the door inclined surface 121 blocks the chamber inclined surface 111, thereby allowing the opening portion O formed on the chamber inclined surface 111 to be closed.

[0044] The door portion 12 may be driven by a door driving portion 13. The door driving portion 13 may move the door portion 12 in parallel so that the door portion 12 is combined with the chamber portion 11. In other words, the door driving portion 13 may move the door portion 12 in parallel so as to open or close the processing space S. For example, the door driving portion 13 may drive the door portion 12 in an up-and-down direction. The door driving portion 13 may include a piston, a cylinder, a motor, or the like.

[0045] As described above, when the contact portion between the chamber portion 11 and the door portion 12 is formed as an inclined surface, the chamber inclined surface 111 and the door inclined surface 121 can be brought into contact with each other only by the up and down driving of the door driving portion 13, thereby minimizing the splitting phenomenon generated during the contact. Therefore, the particles generated due to the wear of the components can be minimized. In addition, since the chamber inclined surface 111 is inclined in a direction toward the ground, even if particles are generated, they can be prevented from flowing into the processing space S through the opening portion O. On the other hand, the contact between the chamber inclined surface 111 and the door inclined surface 121 can be a concept including direct contact and indirect contact. For example, the door inclined surface 121 can indirectly contact the chamber inclined surface 111 through the sealing portion 14 described later.

[0046] The chamber portion 11 and the door portion 12 may further include a structure for reinforcing the combination. The door portion 12 may include a protrusion 122 protruding upward from the upper side. The chamber portion 11 may include a recessed portion 112 formed in a shape corresponding to the protrusion 122 of the door portion 12 so that the protrusion 122 of the door portion 12 can be inserted. When the door portion 12 enters toward the chamber portion 11 in the up-down direction, the protrusion 122 can be inserted into the recessed portion 112. According to the structure as described above, the door portion 12 can be prevented from being pushed open relative to the chamber portion 11 in the horizontal direction (front-to-back direction) due to the high pressure formed in the processing space S. That is, the protrusion 122 and the recessed portion 112 are combined with each other, and the horizontal direction (front-to-back direction) movement of the door portion 12 can be restricted. On the other hand, one side of the protrusion 122 may include at least a portion of the door inclined surface 121. That is, the protrusion 122 may be formed on an extended surface of the door inclined surface 121. The other surface of the protruding portion 122 may have an inclination in the opposite direction to the door inclined surface 121. Alternatively, the other surface of the protruding portion 122 may also be formed in a vertical direction.

[0047] The sealing portion 14 can maintain the airtightness of the chamber portion 11 and the door portion 12. The sealing portion 14 can be installed at the contact portion of the chamber portion 11 and the door portion 12 along the periphery of the opening portion O. For example, the sealing portion 14 can be installed on the door inclined surface 121 of the door portion 12. The sealing portion 14 can also be installed on the chamber inclined surface 111 of the chamber portion 11. When the chamber portion 11 and the door portion 12 are combined with each other, the sealing portion 14 can achieve sealing around the opening portion O. For example, the sealing portion 14 may include a U-shaped sealing component. The U-shaped sealing component can be configured in the form of a U-shaped space connected to the processing space S. According to the structure as described above, while the supercritical fluid flowing into the processing space S flows into the U-shaped space of the U-shaped sealing component, the U-shaped sealing component expands to both sides to enhance the sealing force. The sealing portion 14 may also include an O-ring.

[0048] The clamping part 15 can clamp the chamber part 11 and the door part 12 when the chamber part 11 and the door part 12 are combined. The clamping part 15 can be formed in a frame shape having a cavity inside. The clamping part 15 can surround at least a part of the chamber part 11 and the door part 12. In other words, by inserting at least a part of the chamber part 11 and the door part 12 into the cavity of the clamping part 15, the chamber part 11 and the door part 12 can be prevented from being separated from each other.

[0049] The clamp portion 15 may include a lower clamp body 151, an upper clamp body 152, and a side clamp body 153. The lower clamp body 151 may be in contact with the door portion 12. For example, Figure 3 and Figure 4As shown, the lower clamp body 151 can be inserted into the clamp insertion groove 123 formed in the door portion 12. Alternatively, the lower clamp body 151 can also contact the bottom of the door portion 12 to support the door portion 12 from the lower side. The upper clamp body 152 can be arranged on the upper side of the lower clamp body 151 in a separated form. For example, the upper clamp body 152 contacts the top of the chamber portion 11, so that the chamber portion 11 can be supported from the upper side. The side clamp bodies 153 can connect the lower clamp body 151 and the upper clamp body 152 on both sides, respectively. According to the structure as described above, the clamp portion 15 can be formed into a frame shape having a hollow inside.

[0050] The clamp portion 15 may be driven by a clamp driving portion 16. The clamp driving portion 16 may move the clamp portion 15 in parallel so that the clamp portion 15 is combined with the chamber portion 11 and the door portion 12. For example, the clamp driving portion 16 may drive the clamp portion 15 in the front-rear direction. The clamp portion 15 may enter in a direction gradually approaching the chamber portion 11 and the door portion 12 by the clamp driving portion 16, and at least a portion of the chamber portion 11 and the door portion 12 may be inserted into the internal cavity of the clamp portion 15. The clamp driving portion 16 may include a piston, a cylinder, a motor, or the like.

[0051] As described above, when the chamber portion 11 and the door portion 12 are combined, the clamp portion 15 surrounds at least a portion of the chamber portion 11 and the door portion 12, so that even if a high pressure is formed in the processing space S, the chamber portion 11 and the door portion 12 can be prevented from being separated in the vertical direction. In other words, the door portion 12 can be prevented from being pushed open in the vertical direction (vertical direction) relative to the chamber portion 11 by the high pressure formed in the processing space S. Therefore, the vertical (vertical) movement of the door portion 12 can be restricted.

[0052] The door portion 12 may further include a fixture insertion groove 123. The fixture insertion groove 123 may be a space for inserting the lower fixture body 151. The fixture insertion groove 123 may be formed by being recessed inwardly on the surface of the door portion 12 that faces the chamber portion 11. The surface that faces the chamber portion 11 may refer to a surface that does not contact the chamber portion 11. For example, the fixture insertion groove 123 may be formed in front of the door portion 12. As described above, if the fixture insertion groove 123 is formed in the door portion 12, the size of the fixture portion 15 may be reduced. Specifically, in a structure in which the fixture portion 15 is inserted into the fixture insertion groove 123 formed in the door portion 12, the vertical length of the fixture portion 15 may be shorter, compared to a structure in which the lower fixture body 151 contacts the bottom of the door portion 12. Therefore, as the size of the fixture portion 15 is reduced, costs and power may be reduced, and stability may be ensured.

[0053] The upper surface 123a of the clamp insertion groove 123 may be tilted downward along the entry direction of the clamp portion 15. Here, the entry direction of the clamp portion 15 may refer to the direction in which the clamp portion 15 gradually approaches the door portion 12. In addition, the lower clamp body 151 may be formed to be tilted downward along the entry direction of the clamp portion 15 so that the upper surface 151a corresponds to the upper surface 123a of the clamp insertion groove 123. As described above, when the upper surfaces 151a and 123a of the lower clamp body 151 and the clamp insertion groove 123 are tilted, when the lower clamp body 151 is inserted into the clamp insertion groove 123, even if there is a height difference, it can be inserted without collision. Therefore, the clamp portion 15 can improve the insertion stability.

[0054] Reference Figure 5 and Figure 6 The clamp portion 15 may further include a clamp concave-convex portion 154 formed below the upper clamp body 152. For example, Figure 6 As shown, the clamping concavoconvex part 154 may be formed protrudingly below the upper clamping body 152. The clamping concavoconvex part 154 may also be formed concavely below the upper clamping body 152. A plurality of clamping concavoconvex parts 154 may be formed. The chamber part 11 may include a chamber concavoconvex part 113 formed on the upper surface of the chamber part 11 so as to be combined with the clamping concavoconvex part 154. The chamber concavoconvex part 113 may be formed in a shape and number corresponding to the clamping concavoconvex part 154. For example, as Figure 5 As shown, the chamber concavoconvex part 113 may be formed concavely on the upper surface of the chamber part 11. The chamber concavoconvex part 113 may be formed protrudingly on the upper surface of the chamber part 11. A plurality of chamber concavoconvex parts 113 may be formed. When the clamp part 15 enters the chamber part 11, the clamp concavoconvex part 154 may be inserted into the chamber concavoconvex part 113 and combined. According to the above structure, the chamber part 11 and the door part 12 can be prevented from being pushed open in the left and right directions due to the high pressure formed in the processing space S.

[0055] The clamp portion 15 may further include an inclined connection portion 155. The inclined connection portion 155 may be formed as an inclined surface at a portion where the side clamp body 153 is connected to at least one of the lower clamp body 151 and the upper clamp body 152. In other words, the inclined connection portion 155 may connect the vertical connection portion of the side clamp body 153 and the lower clamp body 151 and the upper clamp body 152 in an inclined manner. At least one of the chamber portion 11 and the door portion 12 may further include an inclined chamber portion 114, 124 whose edges and corners are formed as inclined surfaces so that the inclined connection portion 155 can be inserted. Figure 5 , the chamber portion 11 and the door portion 12 include inclined chamber portions 114, 124 at respective corners. As described above, when the inclined connection portion 155 and the inclined chamber portions 114, 124 are included, it is possible to prevent the corner portions from colliding when the clamp portion 15 enters the chamber portion 11 and the door portion 12. Therefore, the insertion stability of the clamp portion 15 can be improved.

[0056] In order to tightly combine the chamber portion 11 and the door portion 12, the pressurizing portion 17 can pressurize the door portion 12 in a certain direction. The pressurizing portion 17 can be driven when the supercritical treatment process is performed. For example, the pressurizing portion 17 can pressurize the door portion 12 in the front-to-back direction. The pressurizing portion 17 can also pressurize the door portion 12 in the up-and-down direction. The pressurizing portion 17 pressurizes the door portion 12 relative to the chamber portion 11, so that the horizontality or verticality of the door portion 12 can be corrected and the sealing force can be enhanced. On the other hand, the pressurizing portion 17 can also be formed in an integrated form with the door driving portion 13.

[0057] The sensor part 18 can measure the combination state of the door part 12 and the chamber part 11. The sensor part 18 can measure at least one of the spacing distance between the door part 12 and the chamber part 11, the tilt angle, and the pressure acting between the door part 12 and the chamber part 11. For example, the sensor part 18 measures at least one of the spacing distance between the door part 12 and the chamber part 11, the tilt angle, and the pressure acting between the door part 12 and the chamber part 11, so as to measure at least one of the tightness of the door part 12 and the chamber part 11, whether the door part 12 and the chamber part 11 are combined at the correct position, and whether the opening part O is closed. When the measurement result measured by the sensor part 18 determines that the door part 12 and the chamber part 11 are not tightly combined, or that the door part 12 and the chamber part 11 are not combined at the correct position, or that the opening part O is not closed, an alarm can be generated. In particular, when it is determined that the door portion 12 and the chamber portion 11 are not tightly combined, the door portion 12 and the chamber portion 11 can be tightly combined by driving the pressurizing portion 17. When it is determined that the door portion 12 and the chamber portion 11 are not combined at the correct position or it is determined that the opening portion O is not closed, the door portion 12 and the chamber portion 11 can be combined again by driving the driving portion 13 again. The sensor portion 18, for example, may include an infrared sensor, a gyro sensor, a contact sensor, or a pressure sensor. The sensor portion 18 may be located at the contact portion between the door portion 12 and the chamber portion 11. For example, the sensor portion 18 may be located at the door inclined surface 121 of the door portion 12.

[0058] As described above, although the embodiments are described with limited figures, a person with general knowledge in the relevant technical field can make various modifications and variations from the above description. For example, even if the described techniques are performed in a different order from the described method, and / or the described structures, devices and other components are combined or combined in a different form from the described method, or replaced or substituted with other components or equivalents, appropriate results can be obtained.

Claims

1. A substrate processing device, characterized in that: include: a chamber portion having a processing space therein and including a chamber inclined surface having an opening; a door portion including a door inclined surface corresponding to the chamber inclined surface and being combinable with the chamber portion; and A door driving unit that drives the door to open and close the processing space; a clamp portion that surrounds at least a portion of the chamber portion and the door portion when the chamber portion and the door portion are combined; A lower clamping body, which contacts the door portion; An upper clamp body, which is spaced apart and disposed on the upper side of the lower clamp body; as well as The side clamp body connects the lower clamp body and the upper clamp body at both sides.

2. The substrate processing device according to claim 1, characterized in that: include: The door portion includes a protruding portion protruding upward on the upper side, The chamber portion includes a recessed portion formed in a shape corresponding to the protruding portion so as to be inserted into the protruding portion.

3. The substrate processing device according to claim 2, characterized in that: One side of the protruding portion includes at least a portion of the inclined surface of the door.

4. The substrate processing device according to claim 1, characterized in that: The door section includes: The clamp insertion groove is formed in a recessed manner inwardly on the surface facing the cavity portion so as to allow the lower clamp body to be inserted therein.

5. The substrate processing device according to claim 4, characterized in that: The upper surface of the jig insertion groove is formed in a downwardly inclined manner along an entry direction of the jig portion.

6. The substrate processing device according to claim 5, characterized in that: The upper surface of the lower clamp body is formed to be inclined downward in the entry direction of the clamp part in a manner corresponding to the upper surface of the clamp insertion groove.

7. The substrate processing apparatus according to claim 1, wherein: The clamp portion includes a clamp concave-convex portion formed on a lower surface of the upper clamp body.

8. The substrate processing device according to claim 7, characterized in that: The cavity portion includes a cavity concave-convex portion formed on the upper surface in a form combined with the jig concave-convex portion.

9. The substrate processing apparatus according to claim 1, wherein: The fixture department includes: The inclined connection portion is formed as an inclined surface at a portion where the side clamp body is connected to at least one of the lower clamp body and the upper clamp body.

10. The substrate processing apparatus according to claim 9, wherein: At least one of the door portion and the chamber portion includes: The inclined cavity portion is formed with an inclined surface at a corner so as to allow the inclined connecting portion to be inserted.

11. The substrate processing apparatus according to claim 1, wherein: Also includes: The sealing part is installed at the contact position between the door part and the chamber part along the periphery of the opening part.

12. The substrate processing apparatus according to claim 11, characterized in that: The sealing portion includes a U-shaped sealing member, and the U-shaped space is arranged to communicate with the processing space.

13. The substrate processing apparatus according to claim 1, wherein: The door driving portion drives the door portion in the up-down direction.

14. The substrate processing apparatus according to claim 1, wherein: Also includes: The clamp driving portion drives the clamp portion in the front-rear direction.

15. The substrate processing apparatus according to claim 1, wherein: Also includes: The pressurizing part presses the door part in a certain direction in order to tightly combine the chamber part and the door part.

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