A separator for separating silicon wafers

By using a paper separator slitting machine that covers silicon wafers with paper before sorting, the problem of surface scratches during silicon wafer sorting is solved, and the yield of silicon wafers is improved.

CN114843217BActive Publication Date: 2025-11-25CHANGZHOU FOLUNGWIN INTELLIGENT TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202210497561.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-05-09
Publication Date
2025-11-25
Estimated Expiration
2042-05-09

AI Technical Summary

Technical Problem

In the silicon wafer sorting process, existing technologies lack protective measures, which makes the silicon wafer surface easily scratched and reduces the yield.

Method used

A paper-separating PCB sorting machine was designed. By covering the surface of silicon wafers with paper before sorting, and utilizing the cooperation of a plastic sheet conveyor belt, a silicon wafer feeding guide rail, a rotary material handling component, a paper box lifting component, and a suction component, the machine achieves automatic protection of the silicon wafer surface.

Benefits of technology

This effectively avoids scratches and damage to the silicon wafer surface, improving the yield rate.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application discloses a separator paper separating machine for silicon wafer sorting, which comprises a rack, a plastic sheet conveying belt arranged on the rack, a silicon wafer feeding guide rail, a silicon wafer feeding guide rail, a silicon wafer rotating material taking assembly, a paper box lifting assembly, a paper box, a separator paper feeding walking arm module, a separator paper suction assembly, a material box locking assembly, a material box, a paper-covered silicon wafer discharging walking arm module, a paper-covered silicon wafer suction assembly and a material box feeding and discharging mechanism. The application uses a plastic sheet conveying belt to replace a traditional belt conveying belt to convey silicon wafers through structural improvement, and utilizes cooperation of the above-mentioned assemblies, so that automatic feeding, transferring, sorting and material collecting of the silicon wafers are realized, and an automatic separator paper process is added before the silicon wafer sorting and material collecting, a layer of separator paper can be smoothly covered on the surface of each silicon wafer, so that the silicon wafer surface is well protected, the silicon wafer surface can be effectively prevented from being scratched and damaged, and the yield is increased.
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Description

TECHNICAL FIELD

[0001] The present application belongs to the field of photovoltaic solar cell silicon wafer automation equipment, and relates to a paper separator wafer separating machine for silicon wafer sorting. BACKGROUND

[0002] After the silicon wafer is tested, it needs to be sorted. In the prior art, there is almost no protective measure for the silicon wafer during sorting, which inevitably causes scratches on the surface of the tested silicon wafer, thereby causing defects or damage of the silicon wafer and reducing the actual yield. SUMMARY

[0003] In view of the problems in the prior art, the present application provides a paper separator wafer separating machine for silicon wafer sorting, which covers a layer of paper on the surface of the silicon wafer before sorting and collecting the silicon wafer, so as to protect the surface of the silicon wafer from scratches and increase the yield.

[0004] To solve the above technical problems and achieve the above technical effects, the present application realizes the following technical scheme:

[0005] A paper separator wafer separating machine for silicon wafer sorting, comprising a rack, a plastic sheet conveying belt with equal distance conveying function is arranged on the middle layer of the rack along the X direction, the initial end of the travel of the plastic sheet conveying belt is arranged as a silicon wafer feeding station, a silicon wafer feeding guide rail, a silicon wafer rotating material taking assembly and a silicon wafer feeding guide rail are arranged around the silicon wafer feeding station, the initial end of the travel of the silicon wafer feeding guide rail is connected to the upstream silicon wafer feeding machine through the silicon wafer feeding guide rail, and the terminal end of the travel of the silicon wafer feeding guide rail is connected to the silicon wafer feeding station through the silicon wafer rotating material taking assembly; the silicon wafer feeding guide rail is responsible for connecting the silicon wafer from the conveying belt of the upstream silicon wafer feeding machine to the silicon wafer feeding guide rail, and the silicon wafer rotating material taking assembly is responsible for transferring the silicon wafer on the silicon wafer feeding guide rail to the plastic sheet conveying belt;

[0006] At least one paper covering station is arranged at the initial end of the travel of the plastic sheet conveying belt, a paper box lifting assembly is arranged on the left and right sides of each paper covering station, a paper box for stacking paper is arranged on each paper box lifting assembly, a paper feeding walking arm module is arranged above each paper covering station, a paper suction assembly is hung on each paper feeding walking arm module, each paper suction assembly is responsible for moving between the corresponding paper covering station and the two paper boxes on the left and right sides thereof through the paper feeding walking arm module to which the paper suction assembly belongs, and the paper suction assembly is responsible for sucking and covering the paper in the paper box to the surface of the silicon wafer on the plastic sheet conveying belt;

[0007] The rear section of the plastic sheet conveying belt stroke is provided with a plurality of silicon wafer sorting stations, and each silicon wafer sorting station is provided with two rows of material boxes for stacking the silicon wafers covered with paper on the left and right sides through the corresponding material box locking assemblies, each silicon wafer sorting station is provided with a paper-covered silicon wafer unloading walking arm module above, each paper-covered silicon wafer unloading walking arm module is provided with a paper-covered silicon wafer suction assembly, each paper-covered silicon wafer suction assembly is movable between the corresponding silicon wafer sorting station and the two rows of material boxes on the left and right sides through the corresponding paper-covered silicon wafer unloading walking arm module, and is responsible for transferring the paper-covered silicon wafers on the plastic sheet conveying belt to the corresponding material boxes.

[0008] The lower layer of the rack is provided with a material box feeding and discharging mechanism, the activity range of the material box feeding and discharging mechanism covers the area directly below all the material boxes, and the material boxes are connected with the downstream silicon wafer collecting mechanism through the material box feeding and discharging mechanism, which is responsible for the removal of the full material boxes on the silicon wafer sorting station and the replacement of the empty material boxes.

[0009] Further, the silicon wafer feeding guide rail and the silicon wafer rotating material taking assembly are arranged side by side on the left side of the silicon wafer feeding station, and the silicon wafer rotating material taking assembly is located between the end of the travel of the silicon wafer feeding guide rail and the silicon wafer feeding station, the silicon wafer feeding guide rail is arranged in front of the beginning of the travel of the silicon wafer feeding guide rail, and the end of the travel of the silicon wafer feeding guide rail is linearly connected with the beginning of the travel of the silicon wafer feeding guide rail, and the beginning of the travel of the silicon wafer feeding guide rail is exposed to the front side of the rack through the corresponding support plate.

[0010] Further, the plastic sheet conveying belt comprises a plastic sheet conveying track formed by flexible connection of a plurality of plastic sheets, the front and rear ends of the plastic sheet conveying track are respectively arranged on the driving gear roller shaft and the driven gear roller shaft, the driving gear roller shaft and the driven gear roller shaft are fixedly connected with the rack through the front roller shaft mounting seat and the rear roller shaft mounting seat, one end of the driving gear roller shaft is connected with a plastic sheet conveying track motor through a group of transmission wheel belts, and the plastic sheet conveying track motor is fixedly connected with the rack through a corresponding motor support; the middle part of each plastic sheet is provided with a first sensing light via hole, the end part of each plastic sheet is provided with a second sensing light via hole, and the inner side surface of each plastic sheet is provided with a convex strip for engaging with the driving gear roller shaft and the driven gear roller shaft; the silicon wafer feeding station in-place photoelectric sensor, the paper separating and covering station in-place photoelectric sensor, the silicon wafer sorting station in-place photoelectric sensor and the silicon wafer discharging station in-place photoelectric sensor are sequentially arranged below the upper plastic sheet of the plastic sheet conveying belt through corresponding sensor supports, the silicon wafer feeding station in-place photoelectric sensor and the paper separating and covering station in-place photoelectric sensor are respectively located at the silicon wafer feeding station and the paper separating and covering station, and respectively aim upward at the first sensing light via hole, the silicon wafer sorting station in-place photoelectric sensor is located at the silicon wafer sorting station and aims upward at the second sensing light via hole, and the silicon wafer discharging station in-place photoelectric sensor is located at the silicon wafer discharging station and aims upward at the first sensing light via hole.

[0011] Further, each of the material box locking assemblies comprises two material box support strips arranged in parallel along the Y direction, the inner sides of the two material box support strips are respectively provided with clamping blocks for limiting the material box; and the bottom of the outer side wall of the material box is provided with a circular arc clamping groove capable of cooperating with the clamping blocks on the left and right sides, a vertical through groove is arranged on the outer side wall of the material box, and the vertical through groove is located on one side of the circular arc clamping groove; the material box is fixed between the two support strips through cooperation of the clamping blocks and the circular arc clamping groove, and the material box realizes conversion between cooperation of the circular arc clamping groove and the clamping blocks and cooperation of the vertical through groove and the clamping blocks through cooperation of the material box feeding and discharging mechanism.

[0012] Further, the material box feeding and discharging mechanism is composed of a trolley assembly responsible for replacing the material box on the material box locking assembly, a Y-axis direction conveying assembly responsible for driving the trolley assembly to move in the Y-axis direction, and an X-axis direction conveying assembly responsible for driving the trolley assembly and the Y-axis direction conveying assembly to move in the X-axis direction, wherein the X-axis direction conveying assembly, the Y-axis direction conveying assembly and the trolley assembly are all driven by corresponding motors, the X-axis direction conveying assembly is installed at the bottom of the rack, the Y-axis direction conveying assembly is installed on the moving block of the X-axis direction conveying assembly, and the trolley assembly is installed on the moving block of the Y-axis direction conveying assembly.

[0013] Further, the front section of the plastic sheet conveying belt is provided with three paper cover workstations, and each of the left and right sides of each paper cover workstation is provided with a paper box lifting assembly, and each paper box lifting assembly is provided with one paper box, and a total of six paper boxes are used to place the paper.

[0014] Further, the middle and rear sections of the plastic sheet conveying belt are provided with up to 24 silicon wafer sorting workstations, and each silicon wafer sorting workstation is provided with three material boxes arranged in the Y direction on the left side through the corresponding material box locking assembly, and each silicon wafer sorting workstation is provided with two material boxes arranged in the Y direction on the right side through the corresponding material box locking assembly, and a total of up to 120 material boxes are used for sorting paper-covered silicon wafers.

[0015] Further, the end of the plastic sheet conveying belt is provided as a silicon wafer discharging workstation, the silicon wafer discharging workstation is provided with a discharging plate for discharging damaged silicon wafers, the discharging plate is fixedly connected with the rack, the upper end of the discharging plate is connected with the end of the plastic sheet conveying belt, and the lower end of the discharging plate is exposed to the rear end surface of the rack.

[0016] Further, the front, rear, left, right and top surfaces of the rack are covered with outer cover sheet metals, movable cabinet doors for observation and maintenance are arranged on the left and right outer cover sheet metals, a silicon wafer feeding port is formed in the front outer cover sheet metal, and a damaged silicon wafer discharging port and a material box feeding and discharging port are formed in the rear outer cover sheet metal.

[0017] Further, the outer cover sheet metal on the front surface of the rack is provided with a control panel for facilitating the operation of the staff.

[0018] Further, the top of the rack is provided with a working state indicating lamp.

[0019] Further, the bottom of the rack is provided with height-adjustable supporting feet.

[0020] The beneficial effects of the present application are:

[0021] The application uses a plastic sheet conveying belt to replace the traditional belt conveying belt to convey the silicon wafer, and cooperates the silicon wafer loading guide rail, the silicon wafer entering plate guide rail, the silicon wafer rotating taking material assembly, the paper box lifting assembly, the paper box, the paper separating loading walking arm module, the paper separating suction assembly, the paper covering silicon wafer unloading walking arm module, the paper covering silicon wafer suction assembly and the material box loading and unloading mechanism, so that the automatic plate loading, transferring, sorting and material collecting of the silicon wafer are realized, and the automatic paper separating process is added before the silicon wafer sorting and material collecting, a layer of paper separating is successfully covered on the surface of each silicon wafer, so that the silicon wafer surface is well protected, the silicon wafer surface scratch and damage are effectively avoided, and the yield is increased.

[0022] The above description is only a summary of the technical scheme of the application, in order to more clearly understand the technical means of the application, and the content of the specification can be implemented, the following is a preferred embodiment of the application and the detailed description of the drawings. The specific embodiment of the application is given in detail by the following examples and drawings. BRIEF DESCRIPTION OF DRAWINGS

[0023] The drawings described herein are used to provide further understanding of the application, and form a part of the application. The schematic embodiments of the application and the description thereof are used to explain the application, and do not constitute an improper limitation on the application. In the drawings:

[0024] Figure 1 It is the isometric view of the application after removing part of the outer cover sheet metal;

[0025] Figure 2 It is the front view of the overall structure of the application;

[0026] Figure 3 It is the left view of the overall structure of the application;

[0027] Figure 4 It is the right view of the overall structure of the application;

[0028] Figure 5 It is the top view of the overall structure of the application;

[0029] Figure 6 It is the plane layout schematic diagram of the paper box and the material box of the application;

[0030] Figure 7 It is the position relationship schematic diagram of the silicon wafer rotating taking material assembly, the silicon wafer loading guide rail and the silicon wafer entering plate guide rail of the application;

[0031] Figure 8 It is the position relationship schematic diagram of the paper box lifting assembly, the paper box, the paper separating loading walking arm module and the paper separating suction assembly of the application;

[0032] Figure 9 Position relation schematic view of the material box locking assembly, the material box, the paper-covered silicon wafer unloading walking arm module and the paper-covered silicon wafer suction assembly of the application;

[0033] Figure 10 Top surface structure schematic view of the plastic sheet transmission belt at the silicon wafer feeding station of the application;

[0034] Figure 11 Side surface structure schematic view of the plastic sheet transmission belt at the silicon wafer feeding station of the application;

[0035] Figure 12 Top surface structure schematic view of the plastic sheet transmission belt at the paper covering station of the application;

[0036] Figure 13 Side surface structure schematic view of the plastic sheet transmission belt at the paper covering station of the application;

[0037] Figure 14 Top surface structure schematic view of the plastic sheet transmission belt at the silicon wafer sorting station of the application;

[0038] Figure 15 Top surface structure schematic view of the plastic sheet transmission belt at the silicon wafer discharging station of the application;

[0039] Figure 16 Side surface structure schematic view of the plastic sheet transmission belt at the silicon wafer discharging station of the application;

[0040] Figure 17 Position relation schematic view of the material box locking assembly and the material box of the application;

[0041] Figure 18 Enlarged view of the cooperation relation of the material box locking assembly and the material box of the application;

[0042] Figure 19 Structure schematic view of the material box feeding and discharging mechanism of the application. DETAILED DESCRIPTION

[0043] The application will be described in detail below with reference to the drawings and embodiments. The description here is used to provide further understanding of the application, and forms a part of this application. The illustrative embodiments of the application and their description are used to explain the application, and do not constitute improper limitation of the application.

[0044] Reference is made to Figures 1-9As shown, a paper separator for wafer sorting includes a rack 1, a plastic sheet conveying belt 2 with equal distance conveying function is arranged on the middle layer of the rack 1 along the X direction, the initial end of the stroke of the plastic sheet conveying belt 2 is arranged as a wafer feeding station, the wafer feeding station is surrounded by a wafer feeding guide rail 3, a wafer rotating material taking assembly 4 and a wafer feeding guide rail 5, the initial end of the stroke of the wafer feeding guide rail 3 is connected with the upstream wafer feeding machine through the wafer feeding guide rail 5, and the terminal end of the stroke of the wafer feeding guide rail 3 is connected with the wafer feeding station through the wafer rotating material taking assembly 4; the wafer feeding guide rail 5 is responsible for connecting the wafer from the conveying belt of the upstream wafer feeding machine into the wafer feeding guide rail 3, and the wafer rotating material taking assembly 4 is responsible for transferring the wafer on the wafer feeding guide rail 3 to the plastic sheet conveying belt 2.

[0045] The initial section of the stroke of the plastic sheet conveying belt 2 is provided with at least one paper covering station, the left and right sides of each paper covering station are provided with a paper box lifting assembly 6, each paper box lifting assembly 6 is respectively provided with a paper box 7 for stacking paper, and a paper feeding walking arm module 8 is arranged above each paper covering station, a paper suction assembly 9 is hung on each paper feeding walking arm module 8, each paper suction assembly 9 is moved between the corresponding paper covering station and the left and right two paper boxes 7 through the corresponding paper feeding walking arm module 8, and is responsible for sucking and covering the paper in the paper box to the surface of the wafer on the plastic sheet conveying belt.

[0046] The middle and later section of the stroke of the plastic sheet conveying belt 2 is provided with a plurality of wafer sorting stations, the left and right sides of each wafer sorting station are provided with two rows of material boxes 11 for stacking paper-covered wafers through the corresponding material box locking assembly 10, a paper-covered wafer unloading walking arm module 12 is arranged above each wafer sorting station, a paper-covered wafer suction assembly 13 is hung on each paper-covered wafer unloading walking arm module 12, each paper-covered wafer suction assembly 13 is moved between the corresponding wafer sorting station and the left and right two rows of material boxes 11 through the corresponding paper-covered wafer unloading walking arm module 12, and is responsible for transferring the paper-covered wafer on the plastic sheet conveying belt 2 to the corresponding material box 11.

[0047] The lower layer of the rack 1 is provided with a material box feeding and unloading mechanism 14, the activity range of the material box feeding and unloading mechanism 14 covers the area directly below all the material boxes 11, the material boxes 11 are connected with the downstream wafer receiving mechanism through the material box feeding and unloading mechanism 14, and are responsible for the removal of full material boxes on the wafer sorting station and the replacement of empty material boxes.

[0048] Further, referring to Figure 7As shown, the silicon wafer feeding guide rail 3 and the silicon wafer rotating and taking assembly 4 are arranged side by side on the left side of the silicon wafer feeding station, and the silicon wafer rotating and taking assembly 4 is located between the end of the travel of the silicon wafer feeding guide rail 3 and the silicon wafer feeding station, the silicon wafer feeding guide rail 5 is arranged in series on the front side of the start of the travel of the silicon wafer feeding guide rail 3, and the end of the travel of the silicon wafer feeding guide rail 5 is linearly connected with the start of the travel of the silicon wafer feeding guide rail 3, and the start of the travel of the silicon wafer feeding guide rail 5 is exposed to the front end surface of the rack 1 through the corresponding support plate.

[0049] Further, referring to Figures 10-16 As shown, the plastic sheet conveying belt 2 comprises a plastic sheet conveying track 201 connected by a plurality of plastic sheets, the front and rear ends of the plastic sheet conveying track 201 are respectively arranged on the driving gear roller shaft 202 and the driven gear roller shaft 203, the driving gear roller shaft 202 and the driven gear roller shaft 203 are respectively fixedly connected with the rack 1 through the roller front mounting seat 204 and the roller rear mounting seat 205, one end of the driving gear roller shaft 202 is connected with a plastic sheet conveying track motor 206 through a set of transmission wheel belts, the plastic sheet conveying track motor 206 is fixedly connected with the rack 1 through the corresponding motor support; the middle part of each plastic sheet is provided with a first sensing light hole 207, the end part of each plastic sheet is provided with a second sensing light hole 208, and the inner side surface of each plastic sheet is provided with a convex strip 209 for engaging with the driving gear roller shaft 202 and the driven gear roller shaft 203; the upper plastic sheet of the plastic sheet conveying belt 2 is sequentially provided with a silicon wafer feeding station in-place photoelectric sensor 210, a paper separating and covering station in-place photoelectric sensor 211, a silicon wafer sorting station in-place photoelectric sensor 212 and a silicon wafer discharging station in-place photoelectric sensor 213 through the corresponding sensor support, the silicon wafer feeding station in-place photoelectric sensor 210 and the paper separating and covering station in-place photoelectric sensor 211 are respectively located at the silicon wafer feeding station and the paper separating and covering station, and respectively aim upward at the first sensing light hole 207, the silicon wafer sorting station in-place photoelectric sensor 212 is located at the silicon wafer sorting station and aims upward at the second sensing light hole 208, and the silicon wafer discharging station in-place photoelectric sensor 213 is located at the silicon wafer discharging station and aims upward at the first sensing light hole 207.

[0050] Further, referring to Figures 17-18As shown, each of the material box locking assemblies 10 comprises two material box support strips 1001 arranged in parallel along the Y direction, and the inner sides of the two material box support strips 1001 are respectively provided with clamping blocks 1002 for limiting the material box 11; and the bottom of the outer side wall of the material box 11 is provided with a circular arc clamping groove 1101 capable of cooperating with the clamping blocks 1002 on the left and right sides, and a vertical through groove 1102 is arranged on the outer side wall of the material box 11 for facilitating the passage of the clamping blocks 1002, and the vertical through groove 1102 is located on one side of the circular arc clamping groove 1101; the material box 11 is fixed between the two support strips through the cooperation of the clamping blocks 1002 and the circular arc clamping groove 1101, and the cooperation of the circular arc clamping groove 1101 and the clamping blocks 1002 and the cooperation of the vertical through groove 1102 and the clamping blocks 1002 are switched through the cooperation of the material box feeding and discharging mechanism 14.

[0051] Further, referring to Figure 19 As shown, the material box feeding and discharging mechanism 14 is composed of a trolley assembly 1401 responsible for replacing the material box on the material box locking assembly 10, a Y-axis direction conveying assembly 1402 responsible for driving the trolley assembly 1401 to move in the Y-axis direction, and an X-axis direction conveying assembly 1403 responsible for driving the trolley assembly 1401 and the Y-axis direction conveying assembly 1402 to move in the X-axis direction, the X-axis direction conveying assembly 1403, the Y-axis direction conveying assembly 1402 and the trolley assembly 1401 are all driven by corresponding motors, the X-axis direction conveying assembly 1403 is installed at the bottom of the rack 1, the Y-axis direction conveying assembly 1402 is installed on the moving block of the X-axis direction conveying assembly 1403, and the trolley assembly 1401 is installed on the moving block of the Y-axis direction conveying assembly 1402.

[0052] Further, referring to Figure 6 As shown, the front section of the plastic sheet conveying belt 2 is provided with three paper separation covering stations, and the left and right sides of each paper separation covering station are respectively provided with one paper box lifting assembly 6, and one paper box 7 is arranged on each paper box lifting assembly 6, and a total of six paper boxes 7 are used to put paper separation.

[0053] Further, referring to Figure 6 As shown, the middle and rear sections of the plastic sheet conveying belt 2 are provided with up to 24 silicon wafer sorting stations, and each silicon wafer sorting station is provided with three material boxes 11 arranged in the Y direction through the corresponding material box locking assembly 10 on the left side, and each silicon wafer sorting station is provided with two material boxes 11 arranged in the Y direction through the corresponding material box locking assembly 10 on the right side, and a total of up to 120 material boxes 11 are used for sorting paper-covered silicon wafers.

[0054] Further, referring to Figures 1-5 As shown in the figure, the end of the travel of the plastic sheet conveying belt 2 is provided with a wafer discharge station, the wafer discharge station is provided with a discharge plate 16 for discharging the damaged wafer 15, the discharge plate 16 is fixedly connected with the rack 1, the upper end of the discharge plate 16 is connected with the end of the travel of the plastic sheet conveying belt 2, and the lower end of the discharge plate 16 is exposed to the rear end surface of the rack 1.

[0055] Further, referring to Figures 1-5 As shown in the figure, the front, rear, left, right and top surfaces of the rack 1 are covered with a cover sheet metal 17, movable cabinet doors 18 for observation and maintenance are arranged on the left and right cover sheet metals 17, a wafer feeding port 24 is formed in the front cover sheet metal 17, and a damaged wafer discharge port 19 and a magazine inlet and outlet 20 are formed in the rear cover sheet metal 17.

[0056] Further, the front surface of the rack 1 is provided with a control panel 21 for facilitating the operation of the staff.

[0057] Further, the top of the rack is provided with a working state indicating lamp 22.

[0058] Further, the bottom of the rack is provided with a height-adjustable supporting leg 23.

[0059] Further, the overall size of the paper separator is 9760mm in length, 2100mm in width and 2110mm in height, and the ground clearance of the upper surface of the plastic sheet conveying belt 2 is 960±20mm.

[0060] The working process of the present application is as follows:

[0061] The conveying belt of the upstream wafer feeder sends the tested wafers one by one through the wafer feeding guide rail 5 to the wafer feeding guide rail 3, the wafer rotating and taking component 4 sucks and transfers the wafers on the wafer feeding guide rail 3 to the wafer feeding station of the plastic sheet conveying belt 2, the plastic sheet conveying belt 2 has the equal distance conveying function and can move the distance of one wafer at a time; when the wafer moves to the wafer feeding station of the plastic sheet conveying belt 2, the wafer feeding station in-place photoelectric sensor 210 senses the wafer in place, the plastic sheet conveying belt 2 sends the wafer backward to the separator paper covering station, then the separator paper covering station in-place photoelectric sensor 211 senses the wafer in place, the separator paper sucking component 9 is moved to the above of the paper box 7 under the driving of the separator paper feeding walking arm module 8 and sucks a piece of separator paper, then is moved to the above of the wafer on the plastic sheet conveying belt 2 under the driving of the separator paper feeding walking arm module 8 and covers the separator paper on the surface of the wafer, whenever the separator paper in the paper box 7 is sucked away, the paper box lifting assembly 6 lifts the paper box 7 by one height to ensure that the separator paper sucking component 9 can normally suck the separator paper next time; then the plastic sheet conveying belt 2 sends the wafer with the covered separator paper backward to the wafer sorting station, when the wafer sorting station in-place photoelectric sensor 212 senses the wafer in place, the paper-covered wafer sucking component 13 is moved to the paper-covered wafer on the plastic sheet conveying belt 2 under the driving of the paper-covered wafer feeding walking arm module 12 and sucks the paper-covered wafer through the avoiding hole on the separator paper, then is moved to the above of the corresponding paper box 11 under the driving of the paper-covered wafer feeding walking arm module 12 and puts the paper-covered wafer into the paper box 11; the wafer that cannot cover the separator paper due to damage will not be sorted into any paper box 11 and is continuously transmitted to the wafer discharging station, when the wafer discharging station in-place photoelectric sensor 213 senses the wafer in place, the plastic sheet conveying belt 2 sends the wafer that cannot cover the separator paper from the end of the stroke to the recycling, the above operation is cycled to realize the separator paper sorting of the wafer.

[0062] When a certain hopper 11 is full, the trolley assembly 1401 in the hopper feeding and discharging mechanism 14 moves an empty hopper 11 to the position right below the full hopper 11 under the cooperation of the Y-axis direction conveying assembly 1402 and the X-axis direction conveying assembly 1403. The trolley assembly 1401 first lifts the full hopper 11 a little upwards, so that the arc clamping grooves 1101 on both sides of the hopper 11 are separated from the clamping blocks 1002 on the hopper support strips 1001, and then the full hopper 11 is moved a little distance in the Y direction, so that the vertical through grooves 1102 on both sides of the hopper 11 are aligned with the clamping blocks 1002 on the hopper support strips 1001, thereby completing the unlocking of the full hopper 11. Then the trolley assembly 1401 supports the full hopper 11 to move downwards, and lifts the empty hopper 11 upwards, so that the vertical through grooves 1102 on both sides of the hopper 11 are completely higher than the clamping blocks 1002 on the hopper support strips 1001, and then the full hopper 11 is moved back in the Y direction, so that the arc clamping grooves 1101 on both sides of the hopper 11 are aligned with the clamping blocks 1002 on the hopper support strips 1001, and then the full hopper 11 is moved back downwards, so that the arc clamping grooves 1101 on both sides of the hopper 11 are clamped with the clamping blocks 1002 on the hopper support strips 1001, thereby completing the fixing of the empty hopper 11. Finally, the trolley assembly 1401 sends the full hopper 11 out of the device under the cooperation of the Y-axis direction conveying assembly 1402 and the X-axis direction conveying assembly 1403.

[0063] The above only describes the preferred embodiments of the present application and is not used to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A paper separator and PCB separator for silicon wafer sorting, characterized in that: The system includes a frame (1), and a plastic sheet conveyor belt (2) is provided in the middle layer of the frame (1) along the X direction. The beginning of the travel of the plastic sheet conveyor belt (2) is set as a silicon wafer loading station. The silicon wafer loading station is surrounded by a silicon wafer loading guide rail (3), a silicon wafer rotating pick-up component (4), and a silicon wafer feeding guide rail (5). The beginning of the travel of the silicon wafer loading guide rail (3) is connected to the upstream silicon wafer feeding machine through the silicon wafer feeding guide rail (5), and the end of the travel of the silicon wafer loading guide rail (3) is connected to the silicon wafer loading station through the silicon wafer rotating pick-up component (4). The plastic sheet conveyor belt (2) has at least one paper-covering station at the front of its travel. Each paper-covering station has a paper box lifting assembly (6) on both the left and right sides. Each paper box lifting assembly (6) has a paper box (7) for stacking paper. Each paper-covering station is equipped with a paper feeding walking arm module (8) above it. Each paper feeding walking arm module (8) is equipped with a paper suction assembly (9). Each paper suction assembly (9) moves between the corresponding paper-covering station and the two paper boxes (7) on its left and right sides through its respective paper feeding walking arm module (8). The plastic sheet conveyor belt (2) has several silicon wafer sorting stations in the middle and rear sections. Each silicon wafer sorting station has two rows of material boxes (11) for stacking paper-coated silicon wafers on its left and right sides through corresponding material box locking components (10). Each silicon wafer sorting station is equipped with a paper-coated silicon wafer unloading walking arm module (12). Each paper-coated silicon wafer unloading walking arm module (12) is equipped with a paper-coated silicon wafer suction component (13). Each paper-coated silicon wafer suction component (13) moves between the corresponding silicon wafer sorting station and the two rows of material boxes (11) on its left and right sides through its respective paper-coated silicon wafer unloading walking arm module (12). The lower layer of the frame (1) is provided with a material box loading and unloading mechanism (14). The range of motion of the material box loading and unloading mechanism (14) covers the area directly below all the material boxes (11). The material boxes (11) are connected to the downstream silicon wafer receiving mechanism through the material box loading and unloading mechanism (14). The silicon wafer loading guide rail (3) and the silicon wafer rotary pick-up assembly (4) are arranged side by side on the left side of the silicon wafer loading station. The silicon wafer rotary pick-up assembly (4) is located between the end of the stroke of the silicon wafer loading guide rail (3) and the silicon wafer loading station. The silicon wafer infeed guide rail (5) is arranged in series in front of the beginning of the stroke of the silicon wafer loading guide rail (3). The end of the stroke of the silicon wafer infeed guide rail (5) is directly connected to the beginning of the stroke of the silicon wafer loading guide rail (3). The beginning of the stroke of the silicon wafer infeed guide rail (5) is exposed to the front end face of the frame (1) through the corresponding support plate. The plastic sheet conveyor belt (2) includes a plastic sheet conveyor track (201) flexibly connected from several plastic sheets. The front and rear ends of the plastic sheet conveyor track (201) are respectively wound around the drive gear roller shaft (202) and the driven gear roller shaft (203). The drive gear roller shaft (202) and the driven gear roller shaft (203) are respectively fixedly connected to the frame (1) through the roller shaft front mounting seat (204) and the roller shaft rear mounting seat (205). One end of the drive gear roller shaft (202) is connected to a plastic sheet conveyor track motor (206) through a set of transmission wheel belts. The plastic sheet conveyor track motor (206) is fixedly connected to the frame (1) through a corresponding motor bracket. Each plastic sheet has a first sensing light through hole (207) in the middle and a second sensing light through hole (208) at the end. The inner surface of each plastic sheet is provided with a for connecting with the drive gear roller shaft (207). 202) and the driven gear roller shaft (203) have a convex strip (209) that meshes with it; the upper plastic sheet of the plastic sheet conveyor belt (2) is provided with a silicon wafer loading station position photoelectric sensor (210), a paper covering station position photoelectric sensor (211), a silicon wafer sorting station position photoelectric sensor (212) and a silicon wafer unloading station position photoelectric sensor (213) in sequence through corresponding sensor brackets. The silicon wafer loading station position photoelectric sensor (210) and the paper covering station position photoelectric sensor (211) are located at the silicon wafer loading station and the paper covering station, respectively, and are aimed upward at the first sensing light through hole (207). The silicon wafer sorting station position photoelectric sensor (212) is located at the silicon wafer sorting station and is aimed upward at the second sensing light through hole (208). The silicon wafer unloading station position photoelectric sensor (213) is located at the silicon wafer unloading station and is aimed upward at the first sensing light through hole (207).

2. The paper separator and PCB separator for silicon wafer sorting according to claim 1, characterized in that: Each of the aforementioned cassette locking components (10) includes two cassette support bars (1001) arranged parallel to each other along the Y direction. The inner sides of the two cassette support bars (1001) are respectively provided with locking blocks (1002) for limiting the cassette (11). The bottom of the outer side wall of the cassette (11) is provided with an arc-shaped locking groove (1101) that can cooperate with the locking blocks (1002) on the left and right sides. The outer side wall of the cassette (11) is provided with a vertical through groove (1102) to facilitate the passage of the locking blocks (1002). The vertical through groove (1102) is located on one side of the arc groove (1101); the material box (11) is fixed between the two material box support bars (1001) through the cooperation of the locking block (1002) and the arc groove (1101); the material box (11) realizes the conversion between the cooperation of the arc groove (1101) and the locking block (1002) and the cooperation of the vertical through groove (1102) and the locking block (1002) through the cooperation of the material box loading and unloading mechanism (14).

3. The paper separator and PCB separator for silicon wafer sorting according to claim 1, characterized in that: The material box loading and unloading mechanism (14) consists of a trolley assembly (1401) responsible for replacing the material box on the material box locking assembly (10), a Y-axis transport assembly (1402) responsible for moving the trolley assembly (1401) in the Y-axis direction, and an X-axis transport assembly (1403) responsible for moving the trolley assembly (1401) and the Y-axis transport assembly (1402) in the X-axis direction. The X-axis transport assembly (1403), the Y-axis transport assembly (1402) and the trolley assembly (1401) are all driven by corresponding motors. The X-axis transport assembly (1403) is installed at the bottom of the frame (1), the Y-axis transport assembly (1402) is installed on the moving block of the X-axis transport assembly (1403), and the trolley assembly (1401) is installed on the moving block of the Y-axis transport assembly (1402).

4. The paper separator and PCB separator for silicon wafer sorting according to claim 1, characterized in that: The plastic sheet conveyor belt (2) has three paper-covering stations at the front of its travel. Each paper-covering station has a paper box lifting assembly (6) on its left and right sides. Each paper box lifting assembly (6) has a paper box (7) on it. A total of six paper boxes (7) are used to hold the paper.

5. The paper separator and PCB separator for silicon wafer sorting according to claim 1, characterized in that: The plastic sheet conveyor belt (2) has a maximum of 24 silicon wafer sorting stations in the middle and rear section of its travel. Each silicon wafer sorting station has 3 material boxes (11) arranged in the Y direction on the left side through the corresponding material box locking assembly (10), and 2 material boxes (11) arranged in the Y direction on the right side through the corresponding material box locking assembly (10). A total of up to 120 material boxes (11) are used for sorting paper-coated silicon wafers.

6. The paper separator and PCB separator for silicon wafer sorting according to claim 1, characterized in that: The end of the travel of the plastic sheet conveyor belt (2) is set as a silicon wafer discharge station. The silicon wafer discharge station is provided with a blanking plate (16) for discharging broken silicon wafers (15). The blanking plate (16) is fixedly connected to the frame (1). The upper end of the blanking plate (16) is connected to the end of the travel of the plastic sheet conveyor belt (2). The lower end of the blanking plate (16) protrudes outward from the rear end face of the frame (1).

7. The paper separator and PCB separator for silicon wafer sorting according to claim 1, characterized in that: The front, rear, left, right and top surfaces of the frame (1) are covered with outer sheet metal (17), and movable cabinet doors (18) are provided on the outer sheet metal (17) on the left and right sides for easy observation and maintenance. A silicon wafer inlet (24) is opened on the outer sheet metal (17) on the front side, and a broken silicon wafer outlet (19) and a material box inlet and outlet (20) are opened on the outer sheet metal (17) on the rear side.

8. The paper separator separator for silicon wafer sorting according to claim 7, characterized in that: The frame (1) is provided with a control panel (21) on the outer sheet metal (17) on the front side of the frame (1) for easy operation by the staff.

Citation Information

Patent Citations

  • Partition paper board separator for silicon wafer separation

    CN218004805U