A flatness detection system, method, device and medium for a carrier

Abstract

The embodiment of the present invention discloses a flatness detection system and method, computer equipment and medium for a bearing part. In a specific example, the flatness detection system includes a detection unit and a control unit. The detection unit includes a substrate and at least one sensor arranged on the substrate. The control unit is used to control the sensor to sense when the substrate is placed on the bearing surface of the bearing part to be tested to output a first sensing signal related to the bearing surface of the bearing part to be tested, and to detect and obtain the flatness of the bearing surface of the bearing part to be tested according to the first sensing signal. This embodiment controls the detection unit to automatically detect the flatness of the bearing part to be tested by the control unit, which can simultaneously improve the accuracy and efficiency of the flatness detection of the bearing part.

Description

Technical Field

[0001] The present invention relates to the field of flatness detection, and more specifically, to a flatness detection system and method, device and medium for a carrier. Background Art

[0002] Load racks are commonly used storage devices for daily necessities, office supplies, industrial molds and other items. In mass production workshops, storage rooms include a large number of load racks for storing products to be shipped or inspected. In order to ensure the safety of the warehouse and the quality of the products on the load racks, it is necessary to regularly inspect the flatness and stability of the load racks. Summary of the invention

[0003] An object of the present invention is to provide a system and method, a device and a medium for detecting the flatness of a carrier, so as to solve at least one of the problems existing in the prior art.

[0004] In order to achieve the above object, the present invention adopts the following technical solutions:

[0005] A first aspect of the present invention provides a flatness detection system for a carrying part, the system comprising a detection unit and a control unit, the detection unit comprising a substrate and at least one sensor arranged on the substrate, the control unit being used to control the sensor to perform sensing when the substrate is placed on the carrying surface of the carrying part to be tested so as to output a first sensing signal related to the carrying surface of the carrying part to be tested, and to detect and obtain the flatness of the carrying surface of the carrying part to be tested based on the first sensing signal.

[0006] Optionally, the sensor is a photoelectric sensor.

[0007] Optionally, wireless communication is adopted between the control unit and the sensor.

[0008] Optionally, the system further comprises a transport mechanism, and the control unit is further used to control the transport mechanism to transport the substrate and place it on the carrying surface of the carrying part to be tested.

[0009] Optionally, the control unit includes a first control unit and a second control unit.

[0010] The second control unit is used to control the transport mechanism to transport the substrate and place it on the carrying surface of the test carrying part according to the transport instruction from the first control unit, and to feed back placement completion information to the first control unit;

[0011] The first control unit is used to control the sensor to perform sensing to output a first sensing signal related to the bearing surface of the bearing part to be tested according to the placement completion information, and detect the flatness of the bearing surface of the bearing part to be tested according to the first sensing signal.

[0012] Optionally, the detection unit includes a plurality of sensors arranged at different positions on the substrate.

[0013] Optionally, at least part of the plurality of sensors are evenly distributed on the substrate.

[0014] Optionally, the shape and size of the base body match the shape and size of the object that the bearing portion to be tested is used to bear.

[0015] Optionally, the object is a mask plate, and the bearing portion to be tested is a mask plate bearing frame.

[0016] Optionally, the detection unit also includes a detection control module arranged on the substrate, and the detection control module is used to control the sensor to perform sensing when the substrate is placed on the carrying surface of the carrying part to be tested in response to the detection instruction issued by the control unit to output a first sensing signal related to the carrying surface of the carrying part to be tested, and send the first sensing signal to the control unit.

[0017] Optionally, the detection unit also includes a battery arranged on the base for powering the detection control module and the sensor. The detection control module is also used to monitor the power information of the battery and send it to the control unit. When the system also includes a conveying mechanism, the control unit is also used to control the conveying mechanism to transport the base and place it in the charging position according to the power information.

[0018] A second aspect of the present invention provides a method for detecting the flatness of a bearing portion, the method comprising:

[0019] The control unit controls the sensor to sense when the substrate is placed on the bearing surface of the bearing part to be tested to output a first sensing signal related to the bearing surface of the bearing part to be tested, and detects the flatness of the bearing surface of the bearing part to be tested based on the first sensing signal.

[0020] Optionally, before the control unit controls the sensor to sense when the substrate is placed on the bearing surface of the bearing portion to be tested to output a sensing signal related to the bearing surface of the bearing portion to be tested, the method further includes:

[0021] The control unit controls the sensor to sense when the substrate is placed on the bearing surface of the reference bearing portion to output a second sensing signal related to the bearing surface of the reference bearing portion, and calibrates the sensor according to the second sensing signal.

[0022] The third aspect of the present invention provides a computer device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein when the processor executes the program, the method for detecting the flatness of the carrier provided in the second aspect of the present invention is implemented.

[0023] A fourth aspect of the present invention provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the method for detecting the flatness of a carrier provided by the second aspect of the present invention.

[0024] The beneficial effects of the present invention are as follows:

[0025] The technical solution of the present invention can improve the accuracy and efficiency of the flatness detection of the load-bearing portion by controlling the detection unit to automatically detect the flatness of the load-bearing portion to be tested, thereby ensuring the quality of the device placed on the load-bearing portion. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The specific implementation modes of the present invention are further described in detail below in conjunction with the accompanying drawings.

[0027] Figure 1 A system architecture diagram of a flatness detection system for a carrier provided by an embodiment of the present invention is shown.

[0028] Figure 2 A schematic diagram showing a flatness detection of a detection unit provided by an embodiment of the present invention.

[0029] Figure 3 A schematic diagram showing a benchmark calibration of a detection unit provided by an embodiment of the present invention.

[0030] Figure 4 A schematic diagram of a main page of a flatness detection system provided by an embodiment of the present invention is shown.

[0031] Figure 5 A schematic diagram of the structure of a computer system provided by an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0032] In order to explain the present invention more clearly, the present invention is further described below in conjunction with embodiments and drawings. Similar components in the drawings are represented by the same reference numerals. It should be understood by those skilled in the art that the content specifically described below is illustrative rather than restrictive, and the protection scope of the present invention should not be limited thereto.

[0033] Load racks are commonly used storage devices for daily necessities, office supplies, industrial molds and other items. In mass production workshops, the storage room includes a large number of load racks for storing products to be shipped or inspected. In order to ensure the safety of the warehouse and the quality of the products on the load racks, it is necessary to regularly test the flatness and stability of the load racks.

[0034] In particular, for the mask plate carrier (Shelf) used to store the mask plate (Mask), in the display panel preparation industry, the mask plate is an important tool for preparing film layers such as the light-emitting layer of the OLED (Organic Light Emitting Diode) display panel, and its flatness requirement is high. Since the mask plate carrier is in direct contact with the mask plate, the flatness deviation of the mask plate carrier will act on the mask plate, causing the flatness of the mask plate to decrease, further affecting the yield of the evaporation process. Therefore, ensuring the flatness of the mask plate carrier is crucial for mask plate storage.

[0035] The inventors have found that the measurement of flatness is currently mainly done manually, with technicians using feeler gauges to measure one by one to determine the flatness of the mask carrier. This method is difficult to work with and inefficient. The total number of carriers storing mask plates in a production line is 5,000-10,000, and the spatial distribution of the carriers is high, which poses a challenge to the difficulty of manual work. In addition, the professional level of personnel has a great impact on the measurement accuracy, and the reliability of the measurement data cannot be ensured. In addition, this manual operation method requires the mask carrier to be shut down during measurement, and it is impossible to meet production needs during the measurement period. In summary, the manual measurement method cannot meet the needs of regular flatness testing of mask carriers.

[0036] In view of this, a first embodiment of the present invention provides a flatness detection system for a carrying part, including a detection unit and a control unit, the detection unit including a substrate and at least one sensor arranged on the substrate, the control unit being used to control the sensor to perform sensing when the substrate is placed on the carrying part to be tested to output a first sensing signal related to the carrying surface of the carrying part to be tested, and obtain the flatness of the carrying surface of the carrying part to be tested based on the first sensing signal.

[0037] This embodiment can improve the accuracy and efficiency of the flatness detection of the carrying part by controlling the detection unit to automatically detect the flatness of the carrying part to be detected, thereby ensuring the quality of items such as mask plates placed on the carrying part.

[0038] In order to facilitate understanding of the technical solution of this embodiment, the above system provided by this embodiment is described below in combination with an actual scenario. In this scenario, Figure 1As shown, the flatness detection system includes a first control unit 40, a second control unit 50, a transport mechanism 60, a wireless transmission system 30 and a detection unit 10; the first control unit 40 is bidirectionally connected to the second control unit 50, and the first control unit 40 executes the load frame flatness detection program to send a transport instruction to the second control unit 50; the second control unit 50 is used to control the transport mechanism 60 to transport the detection unit 10 and place it on the load surface of the load-bearing part to be tested according to the transport instruction from the first control unit 40, and feedback the placement completion information to the first control unit 40; the first control unit 40 is also used to control the detection unit 10 to sense and output a first sensing signal related to the load surface of the load-bearing part to be tested according to the placement completion information, and detect the flatness of the load surface of the load-bearing part to be tested according to the first sensing signal; the wireless transmission system 30 is composed of a wireless access point (wireless AP) and a router, the wireless access point is set inside the warehouse where the load-bearing part is located, and its signal covers all load frame areas to ensure the communication between the detection unit 10 and the first control unit 40, and the routing device is installed on the first control unit side, and the detection unit 10 communicates bidirectionally with the routing device through the wireless access point.

[0039] This solution uses a handling mechanism to replace manual transfer, which improves the system's automation level and the transfer efficiency of the detection unit, saving manpower and material resources; and realizes information interaction through a wireless transmission system, so that control instructions and measurement data can be transmitted in real time. The layout of wireless transmission is not restricted by the environment, reducing the number of wires in the smart warehouse, and is more suitable for the narrow environment in the smart warehouse. It has low overall cost and flexible networking.

[0040] like Figure 2 As shown, the detection unit 10 includes a substrate 100, a sensor 101, a data transceiver module 102 and a detection control module 104.

[0041] The data transceiver module 102 is configured to receive control instructions and send sensing signals; the detection control module 104 is configured to control the sensor 101 to sense the load-bearing part to be detected.

[0042] In one possible implementation, the sensor 101 is a photoelectric sensor, specifically, for example, an infrared ranging sensor; the first sensing signal is the distance information from the sensor 101 to the bearing surface of the bearing part to be measured. For example, if the distance information returned by multiple sensors is consistent or the deviation is less than a preset distance threshold (for example, 0.3 mm), it is determined that the flatness of the current bearing part meets the requirements.

[0043] In a specific embodiment, the detection unit 10 further includes a sensor measuring hole, which is arranged on the contact surface between the substrate 100 and the load-bearing portion 20 to be tested, and the sensors 101 are respectively installed at the corresponding opening positions of the sensor measuring hole of the substrate 100;

[0044] Specifically,

[0045] The sensor measuring hole is, for example, cylindrical. In practical applications, its shape can be adaptively changed according to the shape of the infrared ranging sensor.

[0046] In addition, the sensor 101 can also be a visual sensor, a pressure sensor or other types of sensors, wherein the pressure sensor is embedded in the bottom surface of the substrate that contacts the bearing part to be tested, and if the pressure signals returned by multiple pressure sensors are the same or the difference is less than a preset pressure threshold, it means that the flatness of the bearing part meets the requirements. However, photoelectric sensors are more suitable in terms of cost and other aspects.

[0047] It should be noted that the number of sensors 101 can be set according to actual conditions. The greater the number and the more evenly distributed the sensors 101 are, the higher the reliability of the detection results will be.

[0048] For example, in combination with the length of the mask plate carrier and the size of the mask plate, the present embodiment selects Figure 2 The eight sensors 101 shown are evenly distributed on the contact surface between the substrate 100 and the load-bearing portion 20 to be tested, so that the flatness measurement information obtained based on the sensing data is more accurate and reliable. It can be seen that the multi-point high-precision sensing of the detection unit 10 in this embodiment further improves the detection efficiency and reliability.

[0049] See also Figure 2 After receiving the transport instruction, the transport mechanism 60 places the detection unit 10 on the load-bearing portion 20 to be tested and feeds back the placement completion information; after receiving the placement completion information, the first control unit 40 controls the detection unit 10 to perform sensing to detect the flatness of the load-bearing portion 20 to be tested.

[0050] Specifically, the first control unit 40 sends a control instruction to the data transceiver module 102 of the detection unit 10 through the wireless transmission system 30; after receiving the control instruction, the data transceiver module 102 transmits the control instruction to the detection control module 104, and the detection control module 104 controls the sensor 101 to sense the bearing surface of the bearing part 20 to be tested, and sends a first sensing signal containing sensing information to the wireless transmission system 30 through the data transceiver module 102, and feeds back the first sensing signal to the first control unit 40 through the wireless transmission system 30. Then, the first control unit 40 receives the first sensing signal and analyzes and processes it to determine whether the flatness of the bearing part 20 to be tested is qualified, and then after completing the flatness detection of the bearing surface of the current bearing part to be tested according to the first sensing signal, sends a transport instruction to the second control unit 50 to control the transport mechanism 60 to transport the detection unit 10 to the bearing surface of the next bearing part to be tested to continue the flatness detection.

[0051] According to the above process, the flatness measurement of all the mask carriers in the warehouse can be automatically completed, and periodic detection can be performed according to the setting of the carrier flatness detection program.

[0052] In a specific embodiment, the transport mechanism 60 is, for example, a robotic arm, and the detection unit 10 reaches the load-bearing part to be tested under the transport of the robotic arm. The detection unit includes a substrate 100 and eight photoelectric sensors arranged on the substrate 100. Sensor measuring holes are evenly arranged at the contact positions between the substrate 100 and the load-bearing part 20 to be tested. The eight photoelectric sensors are respectively installed at the opening positions of the sensor measuring holes of the substrate 100. The measuring light spots of the photoelectric sensors measure the contact data between the substrate and the load-bearing part to be tested through the sensor measuring holes to realize the collection of flat data of all contact points.

[0053] In one possible implementation, the detection unit 10 also includes a battery 105 arranged on the base 100 for powering the detection control module 104 and the sensor 101. The detection control module 104 is also used to monitor the power information of the battery 105 and send it to the first control unit 40. The first control unit 40 is also used to send a transport instruction to the second control unit 50 based on the received power information, so that the transport mechanism 60 transports the detection unit 10 and places it in the charging position.

[0054] In one possible implementation, the first control unit 40 is also used to determine the status of the detection unit 10 based on the data transmission status of the detection unit 10. If the detection unit 10 is determined to be abnormal or faulty, a transport instruction is sent to the second control unit 50 so that the transport mechanism 60 transports the detection unit 10 to a fixed maintenance point.

[0055] As described above, while realizing automatic detection of the flatness of the load-bearing part, the detection control module of the detection unit can detect the power of the unit itself to realize automatic monitoring of power and automatic improvement of power. It can also monitor the status of the detection unit to realize timely maintenance of the fault detection unit, thereby further improving the stability of the system.

[0056] In order to improve the reliability of the flatness measurement detection of the carrier and facilitate the data judgment and comparison of the first sensing signal output by the sensor, the detection unit 10 may be calibrated before the detection begins.

[0057] Specifically,

[0058] like Figure 3As shown, first, a detection unit calibration instruction is sent to the first control unit 40. After receiving the calibration instruction, a transport instruction is sent to the second control unit 50 to control the transport mechanism 60 to place the detection unit 10 on the reference calibration platform 70 and return the placement completion information. After receiving the placement completion information, the first control unit 40 sends a control instruction to the detection unit 10 through the wireless transmission system 30, so that it starts the flatness detection and resets the current measurement values ​​of the multiple sensors 101 to zero;

[0059] The first control unit 40 controls the transport mechanism 60 to take out the detection unit 10 and place it on the reference calibration platform 70 again, obtains the measurement values ​​of multiple sensors 101, and ensures that the measurement values ​​of each sensor 101 are a unified reference value of 0, so as to facilitate the observation and statistics of subsequent measurements.

[0060] Those skilled in the art should understand that the unified reference value is not limited to 0, for example, it is 0.2 mm or 0.4 mm.

[0061] This embodiment further improves the accuracy of flatness measurement of the load-bearing portion to be measured by pre-calibrating the detection unit 10 , and sets the reference value to 0, so that the flatness measurement of the load-bearing portion to be measured is more convenient and intuitive, thereby improving the judgment efficiency.

[0062] In a possible implementation manner, the object is a mask plate, and the bearing portion to be tested is a mask plate bearing frame.

[0063] In a possible implementation, the shape and size of the base 100 of the detection unit 10 are set to match the shape and size of the object carried by the carrying portion to ensure the effectiveness of the flatness detection. In addition, the shape and size of the base 100 of the detection unit 10 are set to match the carried object, which can effectively detect the flatness of the contact portion of the carried object placed on the carrying portion, and can also ensure the stability of the transportation, so that the second control unit 50 controls the transportation mechanism 60 to carry out the transportation.

[0064] It should be noted that, based on the inventive concept of this embodiment, the supporting portion may also be a supporting portion for other items, as long as the shape and size of the base are adjusted accordingly.

[0065] In a specific embodiment, the first control unit 40 is, for example, a FMS (Flatness Monitoring System, information interaction processing terminal), and the second control unit 50 is, for example, an MCS (Material Control System, material control system). The mask plates are stored in the STK (Stocker) intelligent storage warehouse of the material control system, which can realize intelligent storage and retrieval of the mask plates, and the whole process is automated without the cooperation of workers, thereby reducing dust caused by personnel entering and exiting.

[0066] That is, the information interaction processing terminal requests the factory's material control system to transport the calibrated detection unit 10 to the position to be measured for flatness, that is, the load-bearing part 20 to be measured. After confirming the transport request, the material control system sends a transport instruction to the STK server. The STK server executes the transport instruction, and transports the detection unit to the load-bearing part 20 to be measured through a transport mechanism or a transmission device to collect flatness information and return the placement completion information; after receiving the placement completion information, the information interaction processing terminal sends a control instruction to the detection unit 10. After receiving the control instruction, the detection control module 104 of the detection unit controls the sensor 101 to sense the load-bearing part, and sends the first sensing signal containing the sensing information to the information interaction processing terminal through the data transceiver module 102.

[0067] like Figure 4 The figure shows the operation main page of the information interaction processing terminal, including: FMS position, FMS control, battery status, equipment working status, system connection status, measurement path, data interaction, real-time display and data display module. Through the operation main page of the information interaction processing terminal, users can intuitively understand the operating status of each component in the flatness detection system, which can simplify employee operations and help improve work efficiency.

[0068] The FMS location module mainly displays the location information and current working status of the detection unit 10;

[0069] The FMS control module is mainly used to display the current status of the detection unit 10 and can switch the operating status;

[0070] in,

[0071] The current state includes manual trigger, manual stop, charging return and manual correction; the operating state includes Auto (automatic) and Manual (manual);

[0072] The battery status module is used to display information about the battery 105 of the current detection unit 10, including power level, temperature, available working time, etc.;

[0073] The device working status module is used to display the working status of the detection unit 10, which is divided into three working states: measuring, idle, and charging;

[0074] The system connection status module is used to display the connection status of the system. The connection status is divided into three modes: Online / Local and Offline. The Online mode is the connection mode between the FMS and the MCS system, Local is the normal connection state between the detection unit and the information interaction processing terminal, and Offline is the disconnection state between the FMS and the detection unit. Therefore, the system must be in the Online mode to enable the automatic monitoring function;

[0075] The measurement path module can set the measurement path and view the current measurement path and measurement execution status;

[0076] The data interaction module mainly displays the communication status between the information interaction processing terminal and the material control system and detection unit. The operator can view the data interaction information and analyze the working status of the equipment through the data interaction module, which is convenient for timely detection of equipment failures to ensure the normal operation of the system.

[0077] The real-time module mainly displays the location distribution of the measurement data. When the operator clicks on the data display page, the real-time display module will output the measurement data of each sensor, which is convenient for the operator to analyze the status of the load-bearing unit;

[0078] The data display module is used to display the measurement data information of the detection unit and the data judgment results. Abnormal data is highlighted by special colors to indicate that the flatness of the load-bearing part corresponding to the detection result is unqualified. The operator can export the data of the query time period into a chart file through data query and data export, which is convenient for personnel to further analyze the equipment status.

[0079] As described above, the detection path can be set and data can be recorded according to the detection requirements, which is convenient for data traceability and further improves the efficiency of the flatness measurement of the carrier.

[0080] A second embodiment of the present invention provides a method for detecting flatness of a bearing portion, comprising:

[0081] The control unit controls the conveying device to place the substrate on the carrying surface of the carrying part to be tested, controls the detection unit to perform sensing when on the carrying surface of the carrying part to be tested to output a first sensing signal related to the carrying surface of the carrying part to be tested, and obtains the flatness of the carrying surface of the carrying part to be tested based on the first sensing signal.

[0082] In a specific embodiment, before the control unit controls the sensor to sense when the substrate is placed on the bearing surface of the bearing portion to be tested to output a sensing signal related to the bearing surface of the bearing portion to be tested, the method further includes:

[0083] The control unit controls the sensor to sense when the substrate is placed on the bearing surface of the reference bearing portion to output a second sensing signal related to the bearing surface of the reference bearing portion, and calibrates the sensor according to the second sensing signal.

[0084] It should be noted that the principle and working process of the flatness detection method of a carrier provided in this embodiment are similar to those of the flatness detection system of the carrier mentioned above. The relevant parts can be referred to the above description and will not be repeated here.

[0085] like Figure 5 As shown, a computer system suitable for implementing the control unit in the flatness detection method provided in the above embodiment includes a central processing module (CPU), which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) or a program loaded from a storage part into a random access memory (RAM). In the RAM, various programs and data required for the operation of the computer system are also stored. The CPU, ROM, and RAM are connected to each other via a bus. An input / output (I / O) interface is also connected to the bus.

[0086] The following components are connected to the I / O interface: an input part including a keyboard, a mouse, etc.; an output part including a liquid crystal display (LCD), etc. and a speaker, etc.; a storage part including a hard disk, etc.; and a communication part including a network interface card such as a LAN card, a modem, etc. The communication part performs communication processing via a network such as the Internet. A drive is also connected to the I / O interface as needed. Removable media, such as a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, etc., are installed on the drive as needed so that the computer program read therefrom is installed into the storage part as needed.

[0087] In particular, according to this embodiment, the process described in the flowchart above can be implemented as a computer software program. For example, this embodiment includes a computer program product, which includes a computer program contained on a computer-readable medium, and the computer program includes a program code for executing the method shown in the flowchart. In such an embodiment, the computer program can be downloaded and installed from a network through a communication part, and / or installed from a removable medium.

[0088] The flow chart and schematic diagram in the accompanying drawings illustrate the possible architecture, function and operation of the system, method and computer program product of the present embodiment. In this regard, each square box in the flow chart or schematic diagram can represent a part of a module, program segment or code, and a part of the above-mentioned module, program segment or code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the square box can also occur in a sequence different from that marked in the accompanying drawings. For example, two square boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each square box in the schematic diagram and / or flow chart, and the combination of the square boxes in the schematic diagram and / or flow chart can be implemented with a dedicated hardware-based system that performs a specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

[0089] The modules involved in the description of this embodiment can be implemented by software or hardware. The modules described can also be set in a processor, for example, it can be described as: a processor, including a material conveying control module, an information interaction control module and a terminal detection control module. Among them, the names of these modules do not constitute a limitation on the modules themselves under certain circumstances. For example, the terminal detection control module can also be described as a "flatness detection control module".

[0090] As another aspect, the present embodiment further provides a non-volatile computer storage medium, which may be the non-volatile computer storage medium included in the above-mentioned device in the above-mentioned embodiment, or may be a non-volatile computer storage medium that exists independently and is not assembled in the terminal. The above-mentioned non-volatile computer storage medium stores one or more programs, and when the above-mentioned one or more programs are executed by a device, the sensor is controlled to sense when the substrate is placed on the bearing surface of the bearing part to be tested to output a first sensing signal related to the bearing surface of the bearing part to be tested, and the flatness of the bearing surface of the bearing part to be tested is detected based on the first sensing signal.

[0091] In the description of the present invention, it should be noted that the terms "upper", "lower", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present invention. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0092] It should also be noted that, in the description of the present invention, relational terms such as first and second, etc., are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprise", "include" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the statement "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0093] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not limitations on the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is impossible to list all the embodiments here. All obvious changes or modifications derived from the technical solution of the present invention are still within the protection scope of the present invention.

Claims

1. A flatness detection system for a carrier, characterized in that: The device comprises a detection unit and a control unit, wherein the detection unit comprises a substrate and at least one sensor arranged on the substrate, and the control unit is used to control the sensor to sense when the substrate is placed on the bearing surface of the bearing part to be tested so as to output a first sensing signal related to the bearing surface of the bearing part to be tested, and to detect and obtain the flatness of the bearing surface of the bearing part to be tested according to the first sensing signal; The shape and size of the base body match the shape and size of the object carried by the carrying part to be tested; The detection unit includes multiple sensors arranged at different positions on the substrate, the sensors are photoelectric sensors, and the first sensing signal is a distance signal. If the distance information returned by the multiple sensors is consistent or the deviation is less than a preset distance threshold, it is determined that the flatness of the load-bearing part to be tested meets the requirements.

2. The system according to claim 1, characterized in that Wireless communication is adopted between the control unit and the sensor.

3. The system according to claim 1, characterized in that The system also includes a transport mechanism, and the control unit is further used to control the transport mechanism to transport the substrate and place it on the carrying surface of the carrying part to be tested.

4. The system according to claim 3, characterized in that The control unit includes a first control unit and a second control unit; The second control unit is used to control the transport mechanism to transport the substrate and place it on the carrying surface of the test carrying part according to the transport instruction from the first control unit, and to feed back placement completion information to the first control unit; The first control unit is used to control the sensor to perform sensing to output a first sensing signal related to the bearing surface of the bearing part to be tested according to the placement completion information, and detect the flatness of the bearing surface of the bearing part to be tested according to the first sensing signal.

5. The system according to claim 1, characterized in that At least some of the plurality of sensors are evenly distributed on the substrate.

6. The system according to claim 1, characterized in that The object is a mask plate, and the bearing part to be tested is a mask plate bearing frame.

7. The system according to any one of claims 1 to 6, characterized in that: The detection unit also includes a detection control module arranged on the substrate, and the detection control module is used to control the sensor to perform sensing when the substrate is placed on the carrying surface of the carrying part to be tested in response to the detection instruction issued by the control unit to output a first sensing signal related to the carrying surface of the carrying part to be tested, and send the first sensing signal to the control unit.

8. The system according to claim 7, characterized in that The detection unit also includes a battery arranged on the base for powering the detection control module and the sensor. The detection control module is also used to monitor the power information of the battery and send it to the control unit. When the system also includes a conveying mechanism, the control unit is also used to control the conveying mechanism to carry the base and place it in the charging position according to the power information.

9. A detection method based on the system according to any one of claims 1 to 8, characterized in that: include: The control unit controls the sensor to sense when the substrate is placed on the bearing surface of the bearing part to be tested to output a first sensing signal related to the bearing surface of the bearing part to be tested, and detects the flatness of the bearing surface of the bearing part to be tested based on the first sensing signal.

10. The method according to claim 9, characterized in that Before the control unit controls the sensor to sense when the substrate is placed on the bearing surface of the bearing portion to be tested to output a first sensing signal related to the bearing surface of the bearing portion to be tested, the method further includes: The control unit controls the sensor to sense when the substrate is placed on the bearing surface of the reference bearing portion to output a second sensing signal related to the bearing surface of the reference bearing portion, and calibrates the sensor according to the second sensing signal.

11. A computer device comprising a memory, a processor and a computer program stored in the memory and executable on the processor, characterized in that: When the processor executes the program, the method according to claim 9 or 10 is implemented.

12. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the program is executed by a processor, the method according to claim 9 or 10 is implemented.

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