Light irradiation device

Abstract

A light irradiation device is provided that can more efficiently cool an excimer lamp. The device comprises: an excimer lamp including a light-emitting tube extending in a first direction and transmissive to ultraviolet light; a pair of electrodes opposing each other across a wall surface of the light-emitting tube, with one of the walls of the light-emitting tube opposing each other in a second direction serving as a light-emitting surface; a pair of sidewalls extending in the first direction and opposing each other across the light-emitting tube in a third direction; an air supply mechanism including a jet nozzle extending in the second direction between the light-emitting tube and one of the sidewalls, the jet nozzle extending in the first direction and spraying cooling gas toward an outer wall surface of the light-emitting tube on a side opposite to the light-emitting surface; an air intake mechanism including an air intake opening extending in the first direction between the light-emitting tube and the sidewall on a side opposite to the air supply mechanism; and a partition plate extending in the first direction and disposed on a side of the light-emitting tube opposite to the light-emitting surface in the second direction, separated from the light-emitting tube, directly or indirectly connecting the pair of sidewalls.

Description

Technical Field

[0001] The present invention relates to a light irradiation device. Background Art

[0002] Conventionally, ultraviolet light has been used in the manufacture of semiconductors and liquid crystal panels, and in the generation of ozone for air cleaning. For example, an excimer lamp described in Patent Document 1 below has been used as a light source for emitting ultraviolet light.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 2015-230838

[0006] Patent Document 2: Japanese Patent No. 5534344 Summary of the Invention

[0007] Problems to be solved by the invention

[0008] In addition to excimer lamps, other UV light sources include low-pressure mercury lamps. The light-emitting tubes that form the light-emitting chambers in these lamps are made of quartz glass, a material that is translucent to UV light. As the temperature rises, the transmissivity of quartz glass to shorter wavelengths gradually decreases. Therefore, to maintain the UV radiation level above a certain level, low-pressure mercury lamps are equipped with cooling mechanisms to prevent the temperature from exceeding a specified level while lit.

[0009] Excimer lamps generate much less heat when lit than low-pressure mercury lamps. Therefore, even without considering cooling mechanisms, conventional excimer lamps rarely encountered the aforementioned issues associated with heat generation.

[0010] In recent years, demands for larger and higher-output excimer lamps have been increasing to meet the needs of larger liquid crystal panels and to shorten UV treatment times. Consequently, excimer lamps are becoming increasingly larger, and the voltage applied to the electrodes is also increasing.

[0011] In excimer lamps, increasing the size of the tube increases its heat capacity. Furthermore, increasing the voltage applied to the electrodes increases the energy of the discharge, increasing the amount of ultraviolet light produced, but also the amount of heat generated by the discharge. Therefore, as demands for larger and higher-output lamps continue, the temperature of the excimer lamp during lighting has become a growing concern.

[0012] Therefore, research has also been conducted on the use of cooling mechanisms in excimer lamps to maintain the UV radiation level above a certain level. For example, Patent Documents 1 and 2 disclose a light irradiation device that sprays cooling gas from the side of the excimer lamp, cooling the entire arc tube and lowering the temperature of the excimer lamp when it is lit.

[0013] However, the inventors have conducted extensive research on increasing the size and output of excimer lamps and have discovered that in order to cool the excimer lamp more efficiently, it is necessary to more reliably discharge the high-temperature gas absorbed from the excimer lamp to the outside of the light irradiation device without leaving it around the lamp.

[0014] In view of the above problems, an object of the present invention is to provide a light irradiation device capable of cooling an excimer lamp more efficiently.

[0015] Means for solving problems

[0016] The light irradiation device of the present invention is characterized by comprising:

[0017] An excimer lamp comprising a light-emitting tube extending in a first direction and having ultraviolet light transmittance, and a pair of electrodes facing each other across a wall of the light-emitting tube, wherein one of the walls of the light-emitting tube facing each other in a second direction perpendicular to the first direction serves as a light emitting surface;

[0018] a pair of side wall plates extending along the first direction and facing each other across the light-emitting tube in a third direction perpendicular to the first direction and the second direction;

[0019] an air supply mechanism having an injection port between the light-emitting tube and one of the side wall plates in the second direction, the injection port being shaped to extend along the first direction and injecting cooling gas toward an outer wall surface of the light-emitting tube on a side opposite to the light-emitting surface;

[0020] an air intake mechanism having an air intake port between the light-emitting tube and the side wall plate on the side opposite to the air supply mechanism in the second direction, the air intake port being shaped to extend along the first direction; and

[0021] A partition plate extends along the first direction, is disposed on a side of the light emitting tube opposite to the light emitting surface and is separated from the light emitting tube in the second direction, and connects the pair of side wall plates directly or indirectly via other components.

[0022] The air supply mechanism ejects the supplied cooling gas toward the excimer lamp. The term "injection port extending in the first direction" encompasses both cases where the opening functioning as the injection port is formed continuously in the first direction and cases where the opening is formed discretely in the first direction. As long as the injection port is formed between the light-emitting tube and one of the sidewalls in the third direction, the entire air supply mechanism need not be located between the light-emitting tube and the sidewall in the third direction.

[0023] The air intake mechanism is formed with an air intake port extending in a first direction and sucking in gas from around the excimer lamp. The term "air intake port extending in the first direction" encompasses both cases where the opening functioning as the air intake port is formed continuously in the first direction and cases where the opening is formed discretely in the first direction. As long as the air intake port is formed between the arc tube and the side wall plate on the side opposite the air supply mechanism's ejection port in the third direction, the entire air intake mechanism need not be located between the arc tube and the side wall plate in the third direction.

[0024] With this structure, cooling gas is widely applied to the outer wall surface of the light-emitting tube extending in the first direction, opposite the light-emitting surface, cooling the entire excimer lamp. Furthermore, cooling gas injected from one sidewall plate toward the outer wall surface of the light-emitting tube opposite the light-emitting surface flows along the outer wall surface of the light-emitting tube opposite the light-emitting surface toward the other sidewall plate, where it is drawn out by the air suction mechanism. Consequently, no high-temperature gas remains around the excimer lamp, allowing it to be cooled by the cooling gas continuously supplied by the air supply mechanism.

[0025] Furthermore, since the cooling gas is ejected toward the outer wall of the arc tube opposite the light exit surface, circulates along that outer wall, and is drawn into the air intake mechanism, it is less likely to circulate toward the light exit surface, minimizing the amount of heat transferred to the irradiated object. Furthermore, to prevent circling toward the light exit surface or to prevent gas from being introduced from the light exit surface, the structure of the present invention is preferably configured so that the flow rate of the cooling gas ejected from the air supply mechanism and the amount of air drawn into the air intake mechanism are approximately equal. "Approximately equal" here means that the flow rate of gas that can be drawn into the air intake mechanism within a specified time period is within a range of ±20% of the flow rate of the cooling gas ejected from the air supply mechanism.

[0026] The light irradiation device may also be configured to include a windshield.

[0027] The wind shield plate protrudes from the side wall plate toward the light emitting tube, and is arranged such that a front end portion is close to or in contact with the light emitting tube.

[0028] By adopting the above configuration, the cooling gas ejected from the air supply mechanism is blocked, and it is possible to further suppress the cooling gas from moving toward the light emitting surface.

[0029] In addition, in the manufacture of semiconductors and liquid crystal panels, ultraviolet light sources that emit ultraviolet light with a shorter wavelength of less than 200 nm are used. In particular, excimer lamps that enclose xenon gas as a light-emitting gas and emit ultraviolet light with a main emission wavelength of 172 nm are used.

[0030] 172nm ultraviolet light is easily absorbed by oxygen in the air. Therefore, in order to fully irradiate the irradiation object with ultraviolet light, it is preferable to keep the oxygen concentration between the light emitting surface and the irradiation object as low as possible. Therefore, in order to maintain the oxygen concentration between the light emitting surface and the irradiation object below a predetermined concentration, for example, an inert gas with a low oxygen concentration, such as nitrogen, is typically controlled to flow at a predetermined flow rate between the light emitting surface and the irradiation object.

[0031] However, if the flow rate and velocity of the cooling gas ejected from the air supply mechanism are increased to improve cooling capacity, the air intake mechanism may not be able to reliably draw out the cooling gas, or turbulent flow may occur. As a result, gases on the side of the arc tube opposite the light exit surface may mix in, or nitrogen may flow into a region separate from the light exit surface and the irradiated object, making it difficult to control the oxygen concentration between the light exit surface and the irradiated object.

[0032] With the above configuration, since the cooling gas toward the light irradiation surface is blocked, the influence on the oxygen concentration between the light emitting surface and the irradiation object can be suppressed, and the flow rate and flow velocity of the cooling gas can be increased compared to conventional methods.

[0033] Furthermore, in the above-mentioned light irradiation device,

[0034] The cooling gas may be air taken in from the outside.

[0035] As described above, by providing a windshield, the effect of the cooling gas on the oxygen concentration between the light-emitting surface and the irradiated object can be suppressed. Therefore, any inert gas can be used as the cooling gas, and various gases can be used. As described above, air can be used, which is inexpensive and can be brought in from the outside.

[0036] In the above-mentioned light irradiation device,

[0037] The air supply mechanism may include a first stagnation portion extending in the first direction and a second stagnation portion extending in the first direction at a position downstream of the first stagnation portion and having a smaller volume than the first stagnation portion.

[0038] With this structure, cooling gas does not flow directly from the first stagnation section into the second stagnation section, but instead gradually fills the entire first stagnation section. Subsequently, as cooling gas is continuously supplied from the inlet that introduces cooling gas into the air supply mechanism, the air pressure within the first stagnation section rises, and the cooling gas that fills the first stagnation section is gradually forced out toward the second stagnation section. Therefore, even if cooling gas flows in from a portion of the inlet, it can still be directed to the entire light emitting surface extending along the first direction.

[0039] Furthermore, each stagnation portion refers to a portion of space formed between the inlet and the ejection port through which the cooling gas circulates, and the cooling gas need not necessarily remain continuously within the space. Furthermore, the phrase "second stagnation portion extends along the first direction" encompasses both cases where the second stagnation portion is formed continuously in the first direction and cases where the second stagnation portion is formed discretely in the first direction. Furthermore, when multiple second stagnation portions are formed, the volume of the first stagnation portion is configured to be greater than the total volume of the second stagnation portions.

[0040] In the above-mentioned light irradiation device,

[0041] The air supply mechanism may include a plurality of inlet ports for the cooling gas along the first direction.

[0042] The excimer lamp extending in the first direction has a higher temperature at the center than at the end.

[0043] The light irradiation device may include a plurality of the air supply mechanisms arranged along the first direction.

[0044] With the above configuration, the flow rate and flow speed of the cooling gas flowing into each air supply mechanism can be adjusted.

[0045] Therefore, the flow rate and direction of the cooling gas sprayed onto the light exit surface can be finely adjusted according to each position in the first direction. This allows for more effective cooling of the central portion of the arc tube in the first direction, which is prone to high temperatures, and reduces uneven irradiation of the object with ultraviolet light.

[0046] Effects of the Invention

[0047] According to the present invention, a light irradiation device capable of cooling an excimer lamp more efficiently can be realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] Figure 1 It is a perspective view schematically showing one embodiment of a light irradiation device.

[0049] Figure 2 It is from Figure 1 A perspective view of the light irradiation device with the partition plate removed.

[0050] Figure 3 Observed along the Z direction Figure 1 A cross-sectional view of the light irradiation device.

[0051] Figure 4 This is a cross-sectional view of one embodiment of an excimer lamp as viewed along the Y direction.

[0052] Figure 5 Observed along the Z direction Figure 3 Cross-sectional view of an excimer lamp.

[0053] Figure 6 Observed along the X direction Figure 3 Side view of the excimer lamp.

[0054] Figure 7 This is a diagram showing one embodiment of the air supply mechanism exploded into its components.

[0055] Figure 8 This is a cross-sectional perspective view of one embodiment of the air blowing mechanism when cut along the XY plane.

[0056] Figure 9 This is a diagram showing one embodiment of the air intake mechanism exploded into its components.

[0057] Figure 10 This is a cross-sectional perspective view of one embodiment of the air suction mechanism cut along the XY plane.

[0058] Figure 11 yes Figure 3 An enlarged cross-sectional view of the periphery of an excimer lamp.

[0059] Figure 12 yes Figure 3 An enlarged cross-sectional view of the air supply mechanism and its surroundings.

[0060] Figure 13 This is a diagram showing another embodiment of the air supply mechanism decomposed into components.

[0061] Figure 14 This is a sectional perspective view of another embodiment of the air supply mechanism when cut along the XY plane.

[0062] Figure 15 This is a diagram showing another embodiment of the air supply mechanism decomposed into components.

[0063] Figure 16 It is a perspective view schematically showing another embodiment of the light irradiation device.

[0064] Figure 17It is a perspective view schematically showing another embodiment of the light irradiation device.

[0065] Figure 18 Observed along the Z direction Figure 17 Cross-sectional view of an excimer lamp.

[0066] Figure 19 yes Figure 17 An enlarged cross-sectional view of the periphery of an excimer lamp.

[0067] Figure 20 This is a cross-sectional view of the excimer lamp when viewed along the Z direction. DETAILED DESCRIPTION

[0068] Hereinafter, the light irradiation device of the present invention will be described with reference to the accompanying drawings. Note that the following drawings are schematic illustrations, and the size ratios and numbers in the drawings may not necessarily match the actual size ratios and numbers.

[0069] Figure 1 is a perspective view schematically showing an embodiment of the light irradiation device 1. Figure 2 It is from Figure 1 A perspective view of the light irradiation device 1 with the partition plate 6 removed. Figure 3 Observe along the Z direction Figure 1 A cross-sectional view of the light irradiation device 1. Figures 1 to 3 As shown, the light irradiation device 1 of this embodiment includes an excimer lamp 2, an air supply mechanism 3, an air suction mechanism 4 between each excimer lamp 2, a side wall plate 5 that separates each excimer lamp 2 along the Y direction, a partition plate 6 that separates the space in the X direction, and a wind shield plate 7 that protrudes from the side wall plate 5 toward the excimer lamp 2.

[0070] like Figure 3 As shown, the light irradiation device 1 is equipped with two identical excimer lamps 2 , and irradiates the irradiation object W1 disposed on the light emitting surface 13 side of each excimer lamp 2 with ultraviolet light emitted from the light emitting space 10 c .

[0071] In the following description, Figure 1 As shown, the direction in which the excimer lamp 2 extends (the direction of the tube axis) is set as the Z direction (the first direction), the direction in which the electrodes 11 of the excimer lamp 2 face each other is set as the X direction (the second direction), and the direction perpendicular to the X direction and the Z direction is set as the Y direction (the third direction). Furthermore, when expressing directions, when distinguishing between positive and negative directions, positive and negative signs are added, such as "+Z direction" and "-Z direction". When expressing directions without distinguishing between positive and negative directions, only "Z direction" is recorded. In addition, as Figure 1 As shown, the directions of the air supply mechanism 3 and the air intake mechanism 4 are defined corresponding to the directions determined when the excimer lamp 2 is mounted on the light irradiation device 1 .

[0072] First, the structure of the excimer lamp 2 will be described. Figure 4 2 is a cross-sectional view of an embodiment of the excimer lamp 2 when viewed along the Y direction. Figure 4 As shown, the excimer lamp 2 includes a light-emitting tube 10 , a pair of electrodes 11 , and a reflective film 12 .

[0073] The light emitting tube 10 is made of a material having ultraviolet light transmittance, such as quartz glass. Figure 4 As shown, the arc tube 10 extends in the Z direction. Inside the arc tube 10, a light-emitting space 10c is provided, which encloses a light-emitting gas G1. In this embodiment, the wall surface on the -X side of the arc tube 10 serves as a light-emitting surface 13 for extracting ultraviolet light emitted from the light-emitting space 10c, while the outer wall surface on the +X side of the arc tube 10 serves as a cooled surface 14.

[0074] As described above, the light irradiation device 1 used in the manufacturing process of liquid crystal panels is equipped with a very large excimer lamp 2 having a length in the Z direction of approximately 500 mm to 3000 mm to cope with the increasing size of liquid crystal panels. In this embodiment, the length of the arc tube 10 in the Z direction is 1500 mm.

[0075] In the excimer lamp 2 of this embodiment, the luminescent gas G1 is xenon gas, and emits ultraviolet light with a main emission wavelength of 172 nm. However, a luminescent gas G1 other than xenon gas may be used to emit ultraviolet light with a main emission wavelength other than 172 nm.

[0076] Figure 5 Observed along the Z direction Figure 4 A cross-sectional view of an excimer lamp 2. Figure 4 As shown, the arc tube 10 is formed so that its cross section is rectangular when cut along the XY plane when viewed from the Z direction. However, the cross-sectional shape of the arc tube 10 may be another polygonal shape, such as an oval shape with arc-shaped walls facing each other in the Y direction, a hexagonal shape, an octagonal shape, or the like.

[0077] Figure 6 Observed along the X direction Figure 4 The side view of the excimer lamp 2. Figure 6 As shown, the electrode 11 is formed in a mesh shape on the outer wall surface 10a of the arc tube 10. When a voltage required for light emission is applied to the electrode 11, discharge occurs in the light emission space 10c, and ultraviolet light is emitted.

[0078] The ultraviolet light generated in the light emitting space 10c is emitted to the outside of the light emitting tube 10 through the mesh of the electrode 11 with the wall surface on the -X side as the light emitting surface 13. Figure 6In FIG. 1 , only the electrode 11 on the +X side is shown, and the electrode 11 on the −X side is formed to face the illustrated electrode 11 in the same shape.

[0079] The shapes of the electrodes 11 can also vary. The +X side electrode 11 does not need to allow ultraviolet light to pass through, so it can be formed across the entire surface. Furthermore, the -X side electrode 11 can be any shape that allows light to pass through, such as an electrode 11 with slits.

[0080] In this embodiment, the pair of electrodes 11 are formed by screen-printing the same material onto the outer wall 10a of the arc tube 10 and then firing. However, they can also be formed using different materials and different methods. The materials for forming the electrodes 11 can be, for example, gold, platinum, or alloys containing these.

[0081] like Figure 3 As shown, the reflective film 12 is formed on the inner wall surface 10b of the light emitting tube 10 on the side opposite to the light emitting surface 13 (+X side), and reflects the ultraviolet light generated in the light emitting space 10c and traveling toward the +X side toward the -X side.

[0082] The material forming the reflective film 12 can be formed by applying a suspension containing particulate silicon dioxide (SiO 2 ), aluminum oxide (Al 2 O 3 ), or the like and then firing the suspension.

[0083] The reflective film 12 in this embodiment is formed only on the inner wall surface 10 b on the +X side, but may be formed on the inner wall surface 10 b facing in the Y direction where the electrode 11 is not formed, or may not be formed at all.

[0084] Next, the structure of the air supply mechanism 3 will be described. Figure 1 as well as Figure 2 As shown, the light irradiation device 1 is provided with two air blowing mechanisms 3 arranged in the Z direction for each excimer lamp 2. That is, a total of four air blowing mechanisms 3 are mounted on the light irradiation device 1.

[0085] Figure 7 FIG is a diagram showing the air supply mechanism 3 being decomposed into components. Figure 7 As shown, the air supply mechanism 3 includes a flow pipe 30 , an air supply pipe 31 , a bottom plate 32 , and a flow path restriction plate 33 having a plurality of notches 33 a .

[0086] Figure 8This is a sectional perspective view of an embodiment of the air supply mechanism 3 when cut along the XY plane. A plurality of flow tubes 30 are arranged along the Z direction for one air supply mechanism 3, and a flow path for circulating the cooling gas C1 is formed inside the flow tube 30. Each flow tube 30 is connected to a pipe, a hose, etc., so that the air taken in from the outside of the light irradiation device 1 is sent into the air supply mechanism 3 as the cooling gas C1 through the inlet 34. In addition, in this embodiment, the flow tube 30 is constructed in a manner that penetrates the partition plate 6. Figure 7 as well as Figure 8 In the figure, for the sake of explanation, the partition plate 6 is not shown.

[0087] In addition, one flow pipe 30 may be provided in one air supply mechanism 3. In addition, the cooling gas C1 may be any gas other than air as long as it is an inert gas.

[0088] The air supply pipe 31 forms a first stagnation portion 35 extending in the Z direction and stagnates the cooling gas C1 flowing through the flow pipe 30. The air supply pipe 31 also includes a protrusion 31a that protrudes away from the pipe axis 31c and constitutes a part of the injection port 37.

[0089] The base plate 32 supports the air supply duct 31 and the flow path restricting plate 33. Multiple second stagnation portions 36 extending discretely in the Z direction are formed between the notch 33a of the flow path restricting plate 33 and the base plate 32. Furthermore, when the air supply duct 31 is supported, the base plate 32 forms an air guide portion 32a slightly spaced from and parallel to the protrusion 31a of the air supply duct 31. When the air supply duct 31 is supported on the base plate 32, the gap extending in the Z direction formed between the protrusion 31a of the air supply duct 31 and the air guide portion 32a of the base plate 32 serves as an injection port 37 through which the cooling gas C1 is ejected.

[0090] In the present embodiment, the total volume of the second retention portions 36 is configured to be smaller than the volume of the first retention portion 35 .

[0091] The cooling gas C1 sent from the flow pipe 30 into the air supply mechanism 3 flows through the flow pipe 30 and flows into the first stagnation portion 35 .

[0092] Since the second stagnation portion 36 has a smaller volume than the first stagnation portion 35 , the cooling gas C1 flowing into the first stagnation portion 35 does not flow directly toward the second stagnation portion 36 but spreads in the Z direction and diffuses within the first stagnation portion 35 .

[0093] When the pressure in the first stagnation portion 35 increases due to the inflow of the cooling gas C1 , the cooling gas C1 dispersed in the first stagnation portion 35 is pushed out and gradually flows into each of the second stagnation portions 36 .

[0094] The cooling gas C1 flowing into the second stagnation portion 36 flows from the second stagnation portion 36 toward the injection port 37, and then flows from the injection port 37 toward the cooled surface 14 of the excimer lamp 2 (see FIG. Figure 11 )injection.

[0095] Next, the structure of the air suction mechanism 4 will be described. Figure 1 as well as Figure 2 As shown, two light irradiation devices 1 are arranged between the excimer lamps 2 along the Z direction.

[0096] Figure 9 FIG. 4 is a diagram showing an embodiment of the air suction mechanism 4 decomposed into components. Figure 9 As shown, the air intake mechanism 4 includes an exhaust pipe 40 and an air intake box 41. In the present embodiment, the exhaust pipe 40 is formed integrally with the partition plate 6, but may be formed independently of the partition plate 6.

[0097] Figure 10 This is a sectional perspective view of one embodiment of the air suction mechanism 4 when cut along the XY plane. Figure 10 As shown, the exhaust pipe 40 is formed with an exhaust port 42 , which is connected to a pipe, a hose, or the like, and discharges the sucked cooling gas C1 to the outside of the light irradiation device 1 .

[0098] like Figure 9 As shown, the intake box 41 has intake ports 41a for taking in the cooling gas C1 formed on the surface on the -X side so as to extend discretely in the Z direction. Figure 10 As shown, the partition plate 6 is placed on the +X side of the intake box 41 and is connected to the opening 40a of the exhaust pipe 40.

[0099] like Figure 10 As shown, the air intake box 41 is placed on the side wall plate 5, and the air intake port 41a extending discretely in the Z direction is divided into the air intake port 41a on the -Y side and the air intake port 41a on the +Y side. Figure 3 As shown, the air intake mechanism 4 collectively draws in the cooling gas C1 that has absorbed heat from the excimer lamp 2 disposed on the -Y side and the cooling gas C1 that has absorbed heat from the excimer lamp 2 disposed on the +Y side, and discharges the gas from the exhaust port 42. Alternatively, the air intake mechanism 4 may be provided for each excimer lamp 2.

[0100] Figure 11 yes Figure 2 An enlarged cross-sectional view of the periphery of an excimer lamp 2, Figure 12 yes Figure 11 An enlarged cross-sectional view of the air supply mechanism 3 and its surroundings. Figure 11As shown, the air supply mechanism 3 has an injection port 37 disposed in the Y direction between the light-emitting tube 10 of the excimer lamp 2 and the side wall plate 5 on the -Y side as viewed from the excimer lamp 2, for injecting cooling gas C1 toward the cooled surface 14 of the light-emitting tube 10. Furthermore, the air intake mechanism 4 has an air intake port 41a disposed in the Y direction between the light-emitting tube 10 of the excimer lamp 2 and the side wall plate 5 on the +Y side as viewed from the excimer lamp 2.

[0101] The side wall panels 5 are arranged to separate the excimer lamps 2 mounted on the light irradiation device 1 in the Y direction. For each excimer lamp 2, a pair of side wall panels 5 are arranged to face each other with the light emitting tube 10 interposed therebetween. Furthermore, the side wall panel 5 between the two excimer lamps 2 also functions as a support for the suction box 41 of the suction mechanism 4.

[0102] The partition plate 6 is arranged to face the cooled surface 14 of the arc tube 10 , and is indirectly connected to the side wall plate 5 sandwiched between the two excimer lamps 2 via the air intake mechanism 4 , and is directly connected to the other side wall plates 5 .

[0103] Windshield 7 Figure 2 As shown in the Z direction, and Figure 12 As shown, the side wall plates 5 on the +Y side and the −Y side of the excimer lamp 2 are configured to protrude toward the outer wall surface 10 a of the arc tube 10 of the excimer lamp 2 .

[0104] In addition, while the windshield 7 of this embodiment projects parallel to the Y direction toward the outer wall surface 10a of the arc tube 10, it may also project non-parallel to the Y direction from the side wall plate 5 toward the arc tube 10. Furthermore, while the windshield 7 projects toward the -X end of the arc tube 10, it may also be configured to project toward the +X end or toward the center of the arc tube 10 in the X direction.

[0105] like Figure 12 As shown, the front end 7a of the windshield 7 is arranged in close proximity to the outer wall 10a of the arc tube 10. This structure blocks the cooling gas C1 from flowing toward the light exit surface 13. Furthermore, the term "close" here, as described above, means a separation distance of 3.0 mm or less. In the light irradiation device 1 of this embodiment, specifically, the separation distance d1 between the windshield 7 and the arc tube 10 is 2.0 mm. The separation distance d2 between the air supply pipe 31 at the injection port 37 of the air supply mechanism 3 and the base plate 32 is 1.5 mm. Alternatively, the front end 7a of the windshield 7 and the outer wall 10a of the arc tube 10 may be arranged so as to contact each other.

[0106] By setting the above structure as Figure 11As shown, the cooling gas C1 ejected from the air supply mechanism 3 does not flow toward the light emitting surface 13 side, but absorbs heat along the cooled surface 14 of the arc tube 10 while flowing toward the +Y direction, that is, toward the air intake mechanism 4 side, to cool the entire cooled surface 14.

[0107] Furthermore, due to the windshield 7 , the cooling gas C1 hardly flows into the space between the light emitting surface 13 of the excimer lamp 2 and the irradiation object W1 , so that the excimer lamp 2 can be cooled without affecting the control of the oxygen concentration in the space.

[0108] Moreover, if Figure 2 As shown, the light irradiation device 1 of this embodiment is provided with a plurality of air supply mechanisms 3 arranged along the Z direction. Therefore, the flow rate and flow velocity of the cooling gas C1 can be adjusted individually in each air supply mechanism 3. For example, the flow rate and flow velocity of the cooling gas C1 ejected can be increased at the center portion in the Z direction of the excimer lamp 2, which is more likely to reach a high temperature, compared to the end portions.

[0109] Furthermore, if the flow rate of the cooling gas C1 ejected from the air supply mechanism 3 within a certain period of time is greater than the flow rate sucked by the air intake mechanism 4 within a certain period of time, the air intake mechanism 4 cannot completely suck in the high-temperature cooling gas C1 and cannot efficiently cool the excimer lamp 2 .

[0110] If the flow rate of cooling gas C1 ejected from the air supply mechanism 3 within a given period of time is less than the flow rate sucked in by the air intake mechanism 4 within a given period of time, gases other than the cooling gas C1 may be drawn in through the gap between the excimer lamp 2 and the windshield 7, thereby reducing the cooling effect of the cooling gas C1. Furthermore, this may affect the oxygen concentration between the arc tube 10 and the irradiated object W1.

[0111] In other words, the light irradiation device 1 of the present invention preferably adjusts the flow rate of the cooling gas C1 ejected from the air supply mechanism 3 over a certain period of time to be approximately equal to the flow rate of the cooling gas C1 sucked over a certain period of time by the air intake mechanism 4. Therefore, the flow pipe 30 of the air supply mechanism 3 and the exhaust pipe 40 of the air intake mechanism 4 may each be provided with a stopcock, valve, or the like for adjusting the flow rate.

[0112] Alternatively, the number and flow rate of the flow pipes 30 provided in the air supply mechanism 3 and the exhaust pipes 40 provided in the air intake mechanism 4 may be adjusted so that the cooling gas C1 has little effect on the oxygen concentration between the light emitting surface 13 and the irradiation object W1. In such a case, the light irradiation device 1 may be configured without the windshield 7.

[0113] [Other embodiments]

[0114] Other embodiments are described below.

[0115] 〈1〉 Figure 13This is a diagram showing another embodiment of the air supply mechanism 3 decomposed into components. Figure 14 This is a sectional perspective view of another embodiment of the air supply mechanism 3 when cut along the XY plane. Figure 13 as well as Figure 14 As shown, the air supply mechanism 3 may not include the flow path restriction plate 33 but may be composed of the flow pipe 30, the air supply pipe 31 having the protrusion 31a, and the bottom plate 32 having the groove 32b extending in the Y direction.

[0116] In this configuration, the space formed by the protrusion 31a and the groove 32b of the air supply duct 31 constitutes the second stagnation portion 36. Furthermore, at each end in the ±Y direction, the bottom surface of the groove 32b forms an injection port 37 as the air guide portion 32a so as to discretely extend in the Z direction.

[0117] Figure 15 This figure shows another embodiment of the air supply mechanism 3 broken down into its components. The groove 32b formed in the bottom plate 32 can also be formed to extend continuously in the Z direction. This structure forms a second retention portion 36 and an injection port 37 extending in the Z direction, although not shown.

[0118] 〈2〉 Figure 16 1 is a perspective view schematically showing another embodiment of the light irradiation device 1. Figure 16 As shown, the air supply mechanism 3 may not include the air supply duct 31 and may simply be provided with a through hole 6a in the partition plate 6 and connected to the flow duct 30. Similarly, the air intake mechanism 4 may also be provided with a through hole 6a in the partition plate 6 and connected to the exhaust duct 40.

[0119] 〈3〉 Figure 17 is a perspective view schematically showing another embodiment of the light irradiation device 1. Figure 18 Observed along the Z direction Figure 17 A cross-sectional view of an excimer lamp 2. Figure 18 As shown, the excimer lamp 2 provided in the light irradiation device 1 can also be configured as a structure also called a double tube shape, in which the cross section of the light-emitting tube 10 when cut along the XY plane is composed of an inner tube (called inner tube 10p) and an outer tube (called outer tube 10q).

[0120] A pair of electrodes 11 are formed on the inner wall surface 10d of the inner tube 10p and the outer wall surface 10e of the outer tube 10q so as to face each other with the arc tube (10p, 10q) interposed therebetween. Figure 18 In the excimer lamp 2 shown as having a double-tube-shaped light-emitting tube (10p, 10q), the inner electrode 11 is formed over the entire surface, and the outer electrode 11 is formed in a mesh shape to emit ultraviolet light generated in the light-emitting space 10c.

[0121] Furthermore, the excimer lamp 2 in this embodiment has a reflective film 12 formed on the inner wall surface 10f on the +X side of the outer tube 10q. This allows the ultraviolet light generated between the light-emitting tubes (10p, 10q) to be emitted toward the -X side. Consequently, the -X side of the outer tube 10q's walls, which face each other in the X direction, serves as a light emitting surface 13.

[0122] Figure 19 yes Figure 17 An enlarged cross-sectional view of the periphery of an excimer lamp 2. Figure 19 As shown, the cooling gas C1 ejected from the air supply mechanism 3 does not flow toward the light emitting surface 13. Instead, it absorbs heat from the outer wall surface 10e of the outer tube 10q while flowing in the +Y direction, i.e., toward the air intake mechanism 4, thereby cooling the outer tube 10q. In this way, the heat generated in the excimer lamp 2 is gradually dissipated from the outer tube 10q, thereby cooling the entire excimer lamp 2.

[0123] Figure 20 is observed along the Z direction and Figure 18 is a cross-sectional view of an excimer lamp 2 with different structures. Figure 20 As shown, the excimer lamp 2 may also be configured as a so-called single tube structure in which a pair of electrodes 11 are provided on the outer wall 10a of the light emitting tube 10 and in the light emitting space 10c so as to face each other with the wall of the light emitting tube 10 interposed therebetween.

[0124] <4> Each of the above-mentioned light irradiation devices 1 is provided with two excimer lamps 2 , but only one excimer lamp 2 may be provided, or three or more excimer lamps may be provided.

[0125] In addition, the light irradiation device 1 of this embodiment has two air supply mechanisms 3 arranged along the Z direction for each excimer lamp 2. However, the number may be one, or three or more. Furthermore, the two excimer lamps 2 may share the same air supply mechanism 3. Furthermore, multiple air suction mechanisms 4 may be arranged along the Z direction, or individually for each excimer lamp 2.

[0126] <5> In the present embodiment, the air intake mechanism 4 is configured with excimer lamps 2 arranged in the ±Y directions in the light irradiation device 1. Therefore, air intake ports 41a extending discretely in the Z direction are provided on the +Y and -Y sides, respectively. However, if only one excimer lamp 2 is provided, the air intake port 41a of the air intake mechanism 4 may be provided on only one side. Alternatively, the air intake port 41a may be a single opening formed continuously in the Z direction.

[0127] <6> The second retention portion 36 may be formed so that the total value of the respective volumes is larger than the volume of the first retention portion 35. In addition, the second retention portion 36 may be formed so that the volume is larger than the volume of the first retention portion 35.

[0128] <7> The configuration of the light irradiation device 1 described above is merely an example, and the present invention is not limited to the configurations shown in the drawings.

[0129] Description of Reference Numerals

[0130] 1: Light irradiation device

[0131] 2: Excimer lamp

[0132] 3: Air supply mechanism

[0133] 4: Suction mechanism

[0134] 5: Side wall panels

[0135] 6: Separator

[0136] 6a: Through hole

[0137] 7: Windshield

[0138] 7a: Front end

[0139] 10: LED

[0140] 10a: Outer wall surface

[0141] 10b: Inner wall surface

[0142] 10c: Luminous Space

[0143] 10d: Inner wall surface

[0144] 10e: Outer wall surface

[0145] 10f: Inner wall surface

[0146] 10p: Inner tube

[0147] 10q: external tube

[0148] 11: Electrode

[0149] 12: Reflective film

[0150] 13: Light exit surface

[0151] 14: Cooled surface

[0152] 30: Circulation tube

[0153] 31: Air supply pipe

[0154] 31a: protrusion

[0155] 32: Base plate

[0156] 32a: Air guide

[0157] 32b: slot

[0158] 33: Flow restriction plate

[0159] 33a: Gap

[0160] 34: Inlet

[0161] 35: First detention unit

[0162] 36: Second retention unit

[0163] 37: Jet port

[0164] 40: Exhaust pipe

[0165] 40a: Opening

[0166] 41: Suction box

[0167] 41a: Intake

[0168] 42: Exhaust port

[0169] C1: Cooling gas

[0170] G1: Glowing Gas

[0171] W1: Irradiation object

[0172] d1, d2: separation distance

Claims

1. A light irradiation device, characterized in that have: An excimer lamp comprising a light-emitting tube extending in a first direction and having ultraviolet light transmittance, and a pair of electrodes facing each other across a wall of the light-emitting tube, wherein the excimer lamp uses one of the walls of the light-emitting tube facing each other in a second direction perpendicular to the first direction as a light emitting surface; a pair of side wall plates extending along the first direction and facing each other across the light-emitting tube in a third direction perpendicular to the first direction and the second direction; an air supply mechanism having an injection port between the light-emitting tube and one of the side wall plates in the third direction, the injection port being shaped to extend along the first direction and injecting cooling gas toward an outer wall surface of the light-emitting tube on a side opposite to the light-emitting surface; an air intake mechanism having an air intake port between the light-emitting tube and the side wall plate on the side opposite to the air supply mechanism in the third direction, the air intake port being shaped to extend along the first direction; as well as A partition plate extends along the first direction, is disposed on a side of the light emitting tube opposite to the light emitting surface and is separated from the light emitting tube in the second direction, and connects the pair of side wall plates directly or indirectly via other components.

2. The light irradiation device according to claim 1, wherein The light irradiation device includes a wind shield plate that protrudes from the side wall plate toward the arc tube and is arranged so that a front end portion of the wind shield plate is close to or in contact with the arc tube.

3. The light irradiation device according to claim 2, wherein The cooling gas is air taken in from the outside.

4. The light irradiation device according to any one of claims 1 to 3, wherein The air supply mechanism includes a first stagnation portion extending in the first direction and a second stagnation portion extending in the first direction at a position downstream of the first stagnation portion and having a smaller volume than that of the first stagnation portion.

5. The light irradiation device according to any one of claims 1 to 3, wherein The air supply mechanism has a plurality of inlets for the cooling gas along the first direction.

6. The light irradiation device according to any one of claims 1 to 3, wherein A plurality of the air supply mechanisms are arranged along the first direction.

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