Ultra-precision motion table claws

Abstract

The present invention relates to a semiconductor device, and more particularly to a chip claw of an ultra-precision motion stage. The purpose of the present invention is to provide a chip claw of an ultra-precision motion stage capable of improving the motion accuracy of a moving wafer, specifically comprising a bottom plate, a first component, a first shielding plate, a second component and at least three PIN components, each of the PIN components being arranged at intervals, each of the PIN components comprising a PIN base and a PIN rod, the PIN rod being connected to the PIN base, the PIN base being connected to the second component, the second component being connected to the bottom plate, the second component driving the PIN rod to move through the PIN base, the first component being arranged on the PIN base, and the first shielding plate being arranged between the bottom plate and the first component.

Description

Technical Field

[0001] The present invention relates to a semiconductor device, in particular to a claw of an ultra-precision motion table. Background Art

[0002] For the claws of the motion table, the basic functions that usually need to be met are the grabbing and placing of materials, while the claws of the ultra-precision motion table need to achieve high-precision motion positioning and ultra-high information accuracy and structural reliability while meeting the basic functions. Therefore, the claw structure of the ultra-precision motion table needs to be designed to ensure the accurate operation of electronic components and prevent structural changes. In the existing workpiece table products, the claws are installed on the coarse motion module substrate, connected to the coarse motion module and the micro motion module stator through a mechanical interface, and assume the silicon wafer transmission function of the workpiece table. When the silicon wafer is loaded, the claws receive the silicon wafer from the fork-sheet robot and transfer it to the suction cup; when the silicon wafer is unloaded, the claws lift the silicon wafer from the suction cup and transfer it to the fork-sheet robot.

[0003] The existing chip claw structure has inaccurate positioning accuracy due to structural limitations, and the error of moving the chip is relatively large. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a chip claw of an ultra-precision motion table to improve the motion accuracy of a moving chip.

[0005] In order to solve the above technical problems, this application provides the following technical solutions:

[0006] The claw of the ultra-precision motion table of the present invention includes a base plate, a first component, a first shielding plate, a second component and at least three PIN components, the first shielding plate is a magnetic shielding plate, the three PIN components are arranged at intervals, each of the PIN components includes a PIN base and a PIN rod, the PIN rod is connected to the PIN base, the PIN base is connected to the second component, the second component is connected to the base plate, the second component drives the PIN rod to move up and down through the PIN base, the first component includes an electronic device that is interfered by a magnetic field, the first component is used to limit the up and down position of the second component through the electronic device, and the first shielding plate is arranged between the base plate and the first component.

[0007] The claw of the ultra-precision motion table of the present invention, wherein the first shielding plate is a magnetic shielding plate, and the first shielding plate is connected to the upper surface of the bottom plate.

[0008] The claw of the ultra-precision motion table of the present invention is characterized in that the first shielding plate is made of silicon steel material that has been subjected to rust-proof treatment.

[0009] The claw of the ultra-precision motion table of the present invention is characterized in that the first shielding plate is trapezoidal.

[0010] The claw of the ultra-precision motion table of the present invention also includes a measuring component, which includes a grating scale and a grating scale mounting plate. A groove is provided on the mounting plane of the grating scale mounting plate. The shape and size of the groove are adapted to the shape and size of the grating scale. The grating scale is arranged in the groove. The grating scale and the grating scale mounting plate are bonded to each other, and the grating scale mounting plate is connected to the base plate.

[0011] The claw of the ultra-precision motion table of the present invention, wherein the groove is arranged close to two adjacent edges of the grating scale mounting plate, and a right positioning platform and a lower positioning platform are formed between the groove and the mounting plane of the grating scale mounting plate.

[0012] The claw of the ultra-precision motion table of the present invention, wherein the second component includes a motor mover component and a skeleton, the PIN component also includes an upper connecting plate and a lower connecting plate, the motor mover component is suitable for up and down movement, the skeleton is an annular body, the skeleton is connected to the motor mover component and synchronized with the motor mover component, the skeleton is suitable for contactless up and down movement relative to the base plate, one end of the upper connecting plate and the lower connecting plate are connected to the PIN base, and the other ends of the upper connecting plate and the lower connecting plate are connected to the skeleton.

[0013] The claws of the ultra-precision motion table of the present invention, wherein the upper connecting piece and the lower connecting piece are both made of elastic material.

[0014] The claw of the ultra-precision moving table of the present invention, wherein the second component also includes an upper pressure plate and a lower pressure plate, and the upper pressure plate and the lower pressure plate are both annular bodies, and the upper pressure plate and the lower pressure plate are both connected to the frame, the upper pressure plate is located above the frame, and the lower pressure plate is located below the frame, the end of the upper connecting plate connected to the frame is clamped between the upper pressure plate and the frame, and the end of the lower connecting plate connected to the frame is clamped between the lower pressure plate and the frame.

[0015] The claw of the ultra-precision motion table of the present invention, wherein each of the PIN rods is a hollow rod, and the hollow cavity of the hollow rod is connected to a vacuum pumping device.

[0016] Compared with the prior art, the claws of the ultra-precision motion table of the present invention have at least the following beneficial effects:

[0017] Since the claw of the ultra-precision moving stage of the present invention has a first shielding plate between the base plate and the first component, the first shielding plate shields the magnetic field from below the base plate, so that the sensors and other electronic components in the first component are not disturbed by the magnetic field below, and the transmitted signal is more accurate, thereby improving the movement accuracy of the claw of the ultra-precision moving stage of the present invention in moving the chip.

[0018] The claws of the ultra-precision motion table of the present invention will be further described below in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the claws of the ultra-precision motion table of the present invention;

[0020] Figure 2 It is a schematic diagram of the installation structure of the first shielding plate in the claw of the ultra-precision motion table of the present invention;

[0021] Figure 3 It is a schematic structural diagram of the first shielding plate in the claw of the ultra-precision motion table of the present invention;

[0022] Figure 4 It is a schematic diagram of the installation structure of the grating ruler in the claw of the ultra-precision motion table of the present invention;

[0023] Figure 5 It is a schematic diagram of the three-dimensional structure of the grating scale mounting plate in the claw of the ultra-precision motion table of the present invention;

[0024] Figure 6 The figure is a schematic diagram of the bonding structure of the grating scale in the claws of the ultra-precision motion table of the present invention. DETAILED DESCRIPTION

[0025] like Figure 1 , Figure 2 , Figure 3As shown, a claw of an ultra-precision motion table of the present invention comprises a bottom plate 1, a first component 5, a first shielding plate 14, a second component and three PIN components (vacuum adsorption components), each PIN component is arranged at intervals, each PIN component comprises a PIN base (vacuum adsorption base) 13 and a PIN rod (vacuum adsorption rod) 10, the PIN rod 10 is connected to the PIN base 13, the PIN base 13 is connected to the second component, the second component is connected to the bottom plate 1, the second component is driven by the motor stator magnetic steel component on the micro-motion table to move along the Z direction through the electromagnetic force, the second component drives the PIN rod 10 to move along the Z direction through the PIN base 13, the first component The first component 5 is arranged on any PIN base 13. The first component 5 includes a proximity switch sensor, a proximity switch mounting seat and an in-position switch detection block. The in-position switch detection block is connected to the second component and moves synchronously with the second component. When the second component reaches a certain height, the proximity switch sensor is triggered, and the in-position signal that the second component reaches the upper and lower limits is transmitted to the host computer, so that the second component stops moving. The first shielding plate 14 is arranged between the bottom plate 1 and the first component 5. The bottom plate 1 is also provided with a guide air flotation component 7 and an anti-rotation air flotation component 8. The mover and stator of the air flotation component are separated by an air film, and there is no mechanical contact between them, and the friction force can be ignored. The bottom plate 1 is the CDA interface and airway carrier of the two air flotation components, and more than three PIN components can be arranged. The wafer is adsorbed on each PIN rod 10, and the motor on the micro-movement table drives the second component to move. The second component drives the PIN rod 10 to move through the PIN base 13 to achieve the purpose of moving the wafer. Since the first shielding plate 14 is provided between the base plate 1 and the first component 5, the first shielding plate 14 shields the magnetic field from below the base plate 1, so that the sensors and other electronic components in the first component 5 are not disturbed by the magnetic field below, and the transmitted signals are more accurate, thereby improving the movement accuracy of the chip moved by the claw of the ultra-precision moving stage of the present invention.

[0026] Optionally, the first shielding plate 14 is connected to the upper surface of the base plate 1 . Specifically, the first shielding plate 14 is a magnetic shielding plate, and the first shielding plate 14 is connected to the base plate 1 by a plurality of screws.

[0027] Optionally, the first shielding plate 14 is made of silicon steel material that has been treated for rust prevention. Silicon steel has strong magnetism and absorbs the magnetic flux lines of the magnetic field by utilizing its own characteristics of being attracted by the magnetic field, so that the sensors and electronic devices above are not disturbed by the magnetic field, and the magnetic field from the bottom of the bottom plate 1 is better shielded, thereby improving the movement accuracy of the claws of the precision motion table of the present invention. Specifically, the silicon steel material is treated for rust prevention by nickel plating. Since silicon steel is easy to rust, the service life is extended after rust prevention treatment and the cleanliness of the claws is ensured.

[0028] Optionally, the first shielding plate 14 is trapezoidal, which matches the structure of the base plate 1 and is more convenient to be installed on the base plate 1 .

[0029] Alternatively, if Figure 1 , Figure 4 , Figure 5 , Figure 6 As shown, the claw of an ultra-precision motion table of the present invention also includes a measuring component 12, and the measuring component 12 includes a grating scale 121 and a grating scale mounting plate 122. A groove 123 is opened on the mounting plane of the grating scale mounting plate 122. The shape and size of the groove 123 are adapted to the shape and size of the grating scale 121. The grating scale 121 is arranged in the groove 123. The grating scale 121 and the grating scale mounting plate 122 are bonded to each other. The grating scale mounting plate 122 is connected to the base plate 1 by a plurality of screws. The grating scale 121 and the reading head form a grating system to complete the high-precision position measurement and feedback of the claw mover, thereby completing the high-precision closed-loop control of the mover position. Specifically, the grating scale 121 and the grating scale mounting plate 122 are bonded to each other by AB glue. Since a groove 123 is provided on the grating ruler mounting plate 122, the grating ruler 121 is arranged in the groove 123, the edge of the grating ruler 121 is stuck on the positioning platform at the edge of the groove 123, and the grating ruler 121 and the grating ruler mounting plate 122 are bonded to each other, so that the installation position of the grating ruler 121 is more standard, and the grating ruler 121 is prevented from relative slippage or deflection with the grating ruler mounting plate 122 due to vibration or impact during use, which greatly improves the reliability of the measuring component and improves the movement accuracy and stability of the claws of the precision motion table of the present invention.

[0030] Optionally, the groove 123 is arranged near two adjacent edges of the grating scale mounting plate 122, and a right positioning platform and a lower positioning platform are formed between the groove 123 and the mounting plane of the grating scale mounting plate 122, so that the installation of the grating scale 121 is more convenient.

[0031] Optionally, the second component includes a motor mover component 9 and a skeleton 11, and the PIN component also includes an upper connecting piece 4 and a lower connecting piece 3. The motor mover component 9 completes the up and down movement through the electromagnetic force of the coil and the magnetic steel component. The skeleton 11 is an annular body. The skeleton 11 is sleeved on the air floating bearing on the base plate 1. Through the air floating principle, the skeleton 11 can move up and down without contact with the air floating shaft on the base plate 1. The skeleton 11 is connected to the motor mover component 9 and synchronized with the motor mover component 9. One end of the upper connecting piece 4 and the lower connecting piece 3 are connected to the PIN base 13, and the other ends of the upper connecting piece 4 and the lower connecting piece 3 are connected to the skeleton 11. The upper connecting piece 4 and the lower connecting piece 3 are both made of elastic material. The motor mover component 9 drives the skeleton 11 to move, and the skeleton 11 drives the PIN rod 10 to move, so as to achieve the purpose of moving the chip. Since the PIN base 13 is connected to the skeleton 11 through the upper connecting piece 4 and the lower connecting piece 3, and the upper connecting piece 4 and the lower connecting piece 3 are both made of elastic materials, the PIN assembly has a certain elasticity, and multiple PIN rods can contact the wafer at the same time, reducing the coplanarity requirements of the PIN rods, reducing damage to the wafer, and increasing the adsorption force and reliability of the PIN rods. The in-place switch detection block of the first component 5 is connected to the skeleton 11 and moves synchronously with the skeleton 11. When the skeleton 11 reaches a certain height, the proximity switch sensor is triggered, and the in-place signal that the motor mover assembly 9 reaches the upper and lower limits is transmitted to the host computer, so that the motor mover assembly 9 stops moving in time.

[0032] Optionally, the second component also includes an upper pressure plate 6 and a lower pressure plate 2, both of which are annular bodies, and are connected to the skeleton 11. The upper pressure plate 6 is located above the skeleton 11, and the lower pressure plate 2 is located below the skeleton 11. The end of the upper connecting plate 4 connected to the skeleton 11 is clamped between the upper pressure plate 6 and the skeleton 11, and the end of the lower connecting plate 3 connected to the skeleton 11 is clamped between the lower pressure plate 2 and the skeleton 11.

[0033] Optionally, each PIN rod 10 is a hollow rod, and the hollow cavity of the hollow rod is connected to a vacuum pump. Specifically, each PIN base 13 is connected to a hose, and the three hoses are interconnected. A hose interface on one of the PIN bases 13 is connected to a vacuum pump to provide a silicon wafer adsorption vacuum for each PIN rod 10, so that the wafer claw can grab the silicon wafer.

[0034] The embodiments described above are merely descriptions of preferred implementation modes of the present invention and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should all fall within the protection scope determined by the claims of the present invention.

Claims

1. A claw of an ultra-precision motion table, characterized in that: The invention comprises a base plate (1), a first component (5), a first shielding plate (14), a second component and at least three PIN components, wherein the first shielding plate (14) is a magnetic shielding plate, the three PIN components are arranged at intervals, the PIN components each comprise a PIN base (13) and a PIN rod (10), the PIN rod (10) is connected to the PIN base (13), the PIN base (13) is connected to the second component, the second component is connected to the base plate (1), the second component drives the PIN rod (10) to move up and down through the PIN base (13), the first component (5) is arranged on the PIN base (13), the first component (5) comprises an electronic device that is interfered by a magnetic field, the first component (5) is used to limit the up and down position of the second component through the electronic device, and the first shielding plate (14) is arranged between the base plate (1) and the first component (5).

2. The claw of the ultra-precision motion table according to claim 1, characterized in that: The first shielding plate (14) is a magnetic shielding plate, and the first shielding plate (14) is connected to the upper surface of the base plate (1).

3. The claw of the ultra-precision motion table according to claim 2, characterized in that: The first shielding plate (14) is made of silicon steel material that has been subjected to rust-proof treatment.

4. The claw of the ultra-precision motion table according to claim 3, characterized in that: The first shielding plate (14) is trapezoidal.

5. The claw of the ultra-precision motion table according to claim 4, characterized in that: The measuring assembly (12) further comprises a measuring assembly (12), wherein the measuring assembly (12) comprises a grating ruler (121) and a grating ruler mounting plate (122), wherein a groove (123) is provided on a mounting plane of the grating ruler mounting plate (122), wherein the shape and size of the groove (123) are adapted to the shape and size of the grating ruler (121), wherein the grating ruler (121) is arranged in the groove (123), wherein the grating ruler (121) and the grating ruler mounting plate (122) are bonded to each other, and wherein the grating ruler mounting plate (122) is connected to the base plate (1).

6. The claw of the ultra-precision motion table according to claim 5, characterized in that: The groove (123) is arranged close to two adjacent edges of the grating ruler mounting plate (122), and a right positioning platform and a lower positioning platform are formed between the groove (123) and the mounting plane of the grating ruler mounting plate (122).

7. The claw of the ultra-precision motion table according to claim 6, characterized in that: The second component comprises a motor mover component (9) and a skeleton (11); the PIN component further comprises an upper connecting piece (4) and a lower connecting piece (3); the motor mover component (9) is suitable for moving up and down; the skeleton (11) is an annular body; the skeleton (11) is connected to the motor mover component (9) and is synchronized with the motor mover component (9); the skeleton (11) is suitable for moving up and down without contact relative to the base plate (1); one end of the upper connecting piece (4) and the lower connecting piece (3) are both connected to the PIN base (13); and the other ends of the upper connecting piece (4) and the lower connecting piece (3) are both connected to the skeleton (11).

8. The claw of the ultra-precision motion table according to claim 7, characterized in that: The upper connecting piece (4) and the lower connecting piece (3) are both made of elastic material.

9. The claw of the ultra-precision motion table according to claim 8, characterized in that: The second component also includes an upper pressing plate (6) and a lower pressing plate (2), wherein the upper pressing plate (6) and the lower pressing plate (2) are both annular bodies, and are both connected to the frame (11). The upper pressing plate (6) is located above the frame (11), and the lower pressing plate (2) is located below the frame (11). One end of the upper connecting plate (4) connected to the frame (11) is clamped between the upper pressing plate (6) and the frame (11), and one end of the lower connecting plate (3) connected to the frame (11) is clamped between the lower pressing plate (2) and the frame (11).

10. The claw of the ultra-precision motion table according to claim 9, characterized in that: Each of the PIN rods (10) is a hollow rod, and the hollow cavity of the hollow rod is connected to a vacuum pumping device.

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