Cylinder structure for solid compound supply

Abstract

The present invention discloses a steel cylinder structure for supplying solid compounds, comprising a bottle body and a tray. A containing space is formed in the bottle body, and an air inlet and an air outlet are provided on the bottle body; at least two trays are stacked in the containing space to form a fluid channel, and a sub-fluid channel is formed between adjacent trays, and the fluid channel includes at least one sub-fluid channel, and the two ends of the fluid channel are respectively connected to the air inlet and the air outlet, and the sub-fluid channels are distributed laterally in the containing space. The steel cylinder structure for supplying solid compounds of the present invention has a simple structure, and the airflow moves laterally in a circuitous manner, has high stability, does not generate eddies, improves the vapor pressure and stability of the solid compounds carried by the airflow, and reduces the particle (particle size) problem.

Description

Technical Field

[0001] The present invention relates to the technical field of solid compound supply containers, in particular to a steel bottle structure used for supplying solid compounds. Background Art

[0002] Solid compounds such as MO sources are high-purity metal organic compounds, or compound semiconductor microstructure materials. They are supporting materials for growing semiconductor microstructure materials using advanced metal organic chemical vapor deposition (MOCVD), molecular beam epitaxy (MBE), atomic layer deposition (ALD) and other technologies.

[0003] The devices used to generate solid compound vapor in the prior art are usually equipped with complex pipelines for conveying carrier gas and gas circulation, which has high manufacturing costs. In addition, the pipelines cause the gas in the device to flow vertically from bottom to top or from top to bottom. The vertical flow of the gas makes the gas flow distribution unstable, the load amount varies greatly, and air vortices are easily generated, which carry away small particles in the device and cause particle problems.

[0004] The information disclosed in this background technology section is only intended to enhance the understanding of the overall background of the invention and should not be regarded as an acknowledgment or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the invention

[0005] The object of the present invention is to provide a steel cylinder structure for supplying solid compounds, which has a simple structure, and the airflow moves horizontally, has high stability, does not generate eddy currents, improves the vapor pressure and stability of the solid compounds carried by the airflow, and reduces particle problems.

[0006] To achieve the above object, an embodiment of the present invention provides a steel cylinder structure for supplying solid compounds, comprising:

[0007] A bottle body, wherein a containing space is formed, and an air inlet and an air outlet are provided on the bottle body;

[0008] At least two trays are stacked in the accommodating space to form a fluid channel, and sub-fluid channels are formed between adjacent trays. The fluid channel includes at least one sub-fluid channel, and both ends of the fluid channel are respectively connected to the air inlet and the air outlet, and the sub-fluid channels are distributed laterally in the accommodating space.

[0009] In one or more embodiments of the present invention, the cylinder structure includes two trays, which are stacked to form a sub-fluid channel, and two ends of the sub-fluid channel are respectively connected to the gas inlet and the gas outlet.

[0010] In one or more embodiments of the present invention, the cylinder structure includes at least three trays, and the at least three trays are stacked to form at least two sub-fluid channels connected in series.

[0011] In one or more embodiments of the present invention, a plurality of accommodating spaces are formed in the bottle body, a fluid channel is formed in each of the accommodating spaces, and the plurality of fluid channels are arranged in series, the first fluid channel is connected to the air inlet, and the last fluid channel is connected to the air outlet.

[0012] In one or more embodiments of the present invention, a plurality of the accommodating spaces are formed in parallel in the bottle body in a horizontal direction.

[0013] In one or more embodiments of the present invention, the cylinder structure also includes a collision structure, which has an inlet end and an outlet end, the inlet end is directly or indirectly connected to the fluid channel, the outlet end is connected to the gas outlet, and a curved gas flow channel is formed between the inlet end and the outlet end.

[0014] In one or more embodiments of the present invention, a filter structure is provided at the inlet end of the collision structure.

[0015] In one or more embodiments of the present invention, a plurality of spaced-apart baffles are formed in the gas flow channel, each baffle is provided with a vent, and the vents of adjacent baffles do not overlap or only partially overlap in the carrier gas flow direction.

[0016] In one or more embodiments of the present invention, the collision structure includes a coil having a plurality of bends, and the gas flow channel is formed in the coil in a curved manner.

[0017] In one or more embodiments of the present invention, a plurality of guide members for guiding the flow of gas are formed on all or part of the upper surface and / or the lower surface of the tray.

[0018] In one or more embodiments of the present invention, a plurality of guide members are arrayed and distributed on the surface of the tray, and each of the guide members has a certain molding depth.

[0019] In one or more embodiments of the present invention, the tray includes a bottom plate and a boundary side plate, and an axially symmetrical opening is formed at an upper end of the boundary side plate;

[0020] The bottom plate of each tray covers the boundary side plates of the adjacent tray to enclose and form the sub-fluid channel.

[0021] Compared with the prior art, the steel cylinder structure for supplying solid compounds in the embodiment of the present invention enables the airflow to move in a circuitous manner in the lateral direction through the internal structure setting, thereby improving the stability of the airflow, preventing the generation of eddies, and reducing particle (particle size) problems.

[0022] The steel cylinder structure for supplying solid compounds according to the embodiment of the present invention can increase the length of the fluid channel by dividing the steel cylinder into a plurality of serially connected accommodation spaces, thereby further improving the vapor pressure and stability of the solid compounds carried by the airflow.

[0023] The steel cylinder structure for supplying solid compounds in the embodiment of the present invention, by arranging a collision structure at the gas outlet, can make the gas carrying solid particles of solid compounds generate a certain collision friction after passing through the collision structure, thereby removing the solid particles of solid compounds in the gas and further eliminating the particle (particle size) problem.

[0024] The steel cylinder structure for supplying solid compounds according to the embodiment of the present invention can greatly increase the collision chance and heating time and reduce small particles by setting the collision structure as a curved and extended coil structure with multiple bends. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a schematic diagram of a steel cylinder structure for supplying solid compounds according to Example 1 of the present invention;

[0026] Figure 2 is a schematic diagram of a steel cylinder structure for supplying solid compounds according to Example 2 of the present invention;

[0027] Figure 3 is a schematic diagram of the internal structure of a steel cylinder for supplying solid compounds according to Example 2 of the present invention;

[0028] Figure 4 This is a front view of a tray in a steel cylinder structure for supplying solid compounds according to Example 2 of the present invention;

[0029] Figure 5 yes Figure 4 Middle AA section view.

[0030] Figure 6 is a schematic diagram of the internal structure of a steel cylinder for supplying solid compounds according to Example 3 of the present invention;

[0031] Figure 7 This is a front view of a tray in a steel cylinder structure for supplying solid compounds according to Example 3 of the present invention;

[0032] Figure 8 yes Figure 7 Middle AA section view.

[0033] Fig. 9 is a schematic diagram of the internal structure of a steel cylinder for supplying solid compounds according to Example 4 of the present invention;

[0034] Fig.10 It is a front view of a tray in a steel cylinder structure for supplying solid compounds according to Example 4 of the present invention;

[0035] Fig.11 yes Fig.10 Middle AA section view.

[0036] Fig.12 is a schematic diagram of a collision structure in a steel cylinder structure for supplying solid compounds according to Embodiment 1, 2, 3 or 4 of the present invention;

[0037] Fig.13 is a schematic diagram of a collision structure in a steel cylinder structure for supplying solid compounds according to Example 5 of the present invention;

[0038] Fig.14 is a schematic diagram of a collision structure in a steel cylinder structure for supplying solid compounds according to Example 6 of the present invention;

[0039] Fig.15 It is a detailed internal view of the collision structure in the steel cylinder structure for supplying solid compounds according to Embodiment 1, 2, 3, 4, 5 or 6 of the present invention.

[0040] Fig.16 It is a schematic diagram of the structure of a steel cylinder for supplying solid compounds according to Example 7 of the present invention. DETAILED DESCRIPTION

[0041] The specific implementation modes of the present invention are described in detail below in conjunction with the accompanying drawings, but it should be understood that the protection scope of the present invention is not limited by the specific implementation modes.

[0042] Unless explicitly stated otherwise, throughout the specification and claims, the term “comprise” or variations such as “include” or “comprising”, etc., will be understood to include the stated elements or components but not to exclude other elements or components.

[0043] As mentioned in the background technology, in the existing steel cylinder structure (vaporizer), the flow direction of the carrier gas inside is vertical (the axial direction of the bottle body), which is easy to form vortices, resulting in unstable air flow distribution and large changes in the load amount. Small particles of solid compounds in the tray inside the bottle or other sources are easily carried away by the vortex, causing particle problems.

[0044] In order to solve the above technical problems, the present invention innovatively proposes a steel cylinder structure, which, through the rearrangement of the internal structure, makes the flow direction of the carrier gas in the bottle horizontal flow relative to the tray, the airflow is stable, no vortex is generated, and the particle problem is reduced.

[0045] like Figure 1 and Figure 2 As shown, an embodiment of the present invention provides a steel cylinder structure for supplying solid compounds, including a bottle body 10, a tray 20, a collision structure 30 and various connecting pipes 40. The tray 20, the collision structure 30 and the connecting pipe 40 are all arranged in the bottle body 10, and the trays 20 are stacked and arranged in the bottle body 10 to form a fluid channel, wherein a support structure 60 is arranged between the tray 20 located at the bottom layer and the bottom wall of the bottle body 10, and the support structure 60 can be a support ring pad. Sub-fluid channels 50 are formed between adjacent trays 20, and the fluid channel includes at least one sub-fluid channel 50, and the sub-fluid channels 50 are distributed laterally in the bottle body 10. After passing through the fluid channel, the carrier gas enters the collision structure 30, and continuously collides in the collision structure 30 to intercept or destroy a small amount of small particles mixed in the carrier gas, and then outputs the bottle body 10 to further solve the particle problem.

[0046] The bottle body 10 includes a bottom plate 11 and a limiting side wall 12 that together form a containing space in the bottle. The bottle body 10 can have a containing space 14 of any shape. In one embodiment, the bottle body 10 has a cylindrical shape that is processed to a very close tolerance, and the containing space 14 inside it is also processed into a cylindrical shape. In other embodiments, the bottle body 10 can also be processed into a square column or other cylindrical shape, and the containing space inside it is the same. The bottle body 10 includes a lid 13, on which a carrier gas inlet 131 is formed, and a carrier gas control valve can be installed at the carrier gas inlet 131, and the valve is configured to selectively introduce carrier gas into the sub-fluid channel 50 in the containing space of the bottle body 10 when the valve is opened. A carrier gas outlet 132 is also formed on the lid 13, and a carrier gas control valve can also be installed at the carrier gas outlet 132, and the valve is configured to selectively lead the carrier gas out of the containing space of the bottle body 10 when the valve is opened.

[0047] like Figure 1 As shown, in Example 1, two trays 20 are stacked to form a laterally distributed sub-fluid channel 50, and a carrier gas inlet and a carrier gas outlet are respectively provided at the lateral ends of the sub-fluid channel 50. The carrier gas inlet is connected to the carrier gas inlet 131 of the bottle body 10 through a connecting pipe 40, and the carrier gas outlet is connected to the accommodating space 14.

[0048] like Figures 2 to 5As shown, in Example 2, at least three trays 20 are vertically stacked and arranged in the accommodating space 14, and the stacked trays 20 can be separated from each other and can be taken out of the bottle body 10 for cleaning and refilling. An independent sub-fluid channel 50 is formed between adjacent trays 20, and the sub-fluid channel 50 is defined to have a head end a and a tail end b in the radial direction of the accommodating space 14. The head ends and tail ends of adjacent sub-fluid channels 50 are connected to form a fluid channel that is s-shaped and meanders in the longitudinal direction (the axial direction of the bottle body), and the two ends of the fluid channel are respectively connected to the carrier gas inlet 131 and the carrier gas outlet 132, so that the carrier gas entering from the carrier gas inlet 131 can be discharged from the carrier gas outlet 132 after passing through each sub-fluid channel 50 in turn. Among them, the head end and the tail end of adjacent sub-fluid channels 50 can be connected through a connecting pipe 40, and the two ends of the fluid channel can also be respectively connected to the carrier gas inlet 131 and the carrier gas outlet 132 through the connecting pipe 40, or the fluid channel and the carrier gas outlet 132 can be indirectly connected directly through the accommodating space without setting a connecting pipe 40.

[0049] Specifically, each individual tray 20 has a tray bottom plate 21 and a boundary side plate 22 to form a tray cavity 23 for placing and supporting the solid compound. The shape of the tray 20 can be circular, directional or other shapes, and the tray 20 is preferably made of a non-reactive thermally conductive material, such as silver, silver alloy, copper, copper alloy, aluminum, aluminum alloy, lead, nickel cladding, stainless steel, graphite, silicon carbide coated graphite, boron nitride, ceramic material, and a combination, mixture and composite material of two or more of the above materials.

[0050] The upper end of the boundary side plate 22 of each tray 20 is provided with an axially symmetrical opening 221; the length of the opening 221 in the axial direction needs to be smaller than the length of the boundary side plate 22 in this direction, so as to avoid the influence of the solid compound in the tray cavity 23 when the carrier gas flows. When the trays 20 are stacked, the tray bottom plate 21 of each tray 20 covers the boundary side plate 22 of the adjacent tray 20 to cover the tray cavity 23 to form a sub-fluid channel 50. At the same time, the openings on both sides of the axial direction of the tray 20 are formed at the head end a and the tail end b of the sub-fluid channel 50. It should be understood that in order to ensure the sealing of each sub-fluid channel 50, an O-ring can be used to seal between the top surface of the boundary side plate 22 of each tray 20 and the bottom surface of the previous tray 20. The two openings on the boundary side plate 22 of the tray 20 located in the middle can be connected to the openings on the boundary side plates 22 of the tray 20 located at the upper and lower adjacent positions of the tray 20 through the connecting pipe 40, so as to form a fluid channel that is s-shaped and meanders in the longitudinal direction (the axial direction of the bottle body).

[0051] A guide member 211 for guiding the flow of gas is formed on the tray bottom plate 21 of some trays 20 , and adjacent guide members 211 are arranged without contacting each other; some trays 20 only include the tray bottom plate 21 and the boundary side plate 22 .

[0052] like Figure 4 and Figure 5 As shown, a plurality of drainage members 211 are distributed in an array on the lower surface of the tray bottom plate 21. When the trays 20 are stacked, the tray 20 at the bottom is a tray without drainage members 211, and the trays 20 stacked thereon can all be trays with drainage members 211, and each drainage member 211 has a certain molding depth, which must be at least greater than the depth of the opening on the boundary side plate 22 (such as Figure 3 As shown in the figure, when the trays 20 are stacked, the guide member 211 can guide the carrier gas entering from the opening to make it evenly and slowly distributed throughout the entire sub-fluid channel 50. In a specific embodiment, each guide member 211 has a guide surface arranged in an arc shape, and the guide surface is arranged facing the carrier gas inlet (in the opening, one is the carrier gas inlet and the other is the carrier gas outlet).

[0053] In Example 3, Figures 6 to 8 As shown, a plurality of guide members 211 are distributed in an array on the upper surface of the tray bottom plate 21, and when the trays 20 are stacked, the tray 20 at the top is a tray without a guide member 211, and the trays 20 stacked below can all be trays with guide members 211, and adjacent guide members 211 are arranged without contact. Each guide member 211 also has a certain molding depth, and the molding depth allows the guide member 211 to be infinitely close to or abut against the lower surface of the tray bottom plate 21 at the upper end when the trays 20 are stacked, so that the plurality of guide members 211 can guide the carrier gas entering from the opening, so that it is evenly and slowly distributed throughout the entire sub-fluid channel 50. In a specific embodiment, each guide member 211 also has a guide surface arranged in an arc shape, and the guide surface is arranged facing the carrier gas inlet (in the opening, one is the carrier gas inlet and the other is the carrier gas outlet).

[0054] In Example 4, Figures 9 to 11As shown, a plurality of flow guides 211 are arranged in an array on both the upper surface and the lower surface of the tray bottom plate 21 (for ease of description and distinction, the plurality of flow guides 211 located on the upper surface of the tray bottom plate 21 are referred to as first flow guides, and the plurality of flow guides 211 located on the lower surface of the tray bottom plate 21 are referred to as second flow guides). The plurality of first flow guides on the upper surface of the tray bottom plate 21 and the plurality of second flow guides on the lower surface of the tray bottom plate 21 are arranged alternately, and the sum of the depths of the first flow guides and the second flow guides is greater than the height of the boundary side plate 22 of the tray, so that when the trays 20 are stacked, the second flow guides of the tray 20 located on the upper side can intersect and be alternately distributed with the first flow guides of the adjacent tray 20 located on the lower side, so as to guide the carrier gas entering from the opening so that it is evenly and slowly distributed throughout the entire sub-fluid channel 50.

[0055] In the present embodiment 4, when the trays 20 are stacked, the tray 20 located at the top can be a tray only provided with the second drainage member or a tray without the drainage member 211, the tray 20 stacked in the middle can be a tray with drainage members 211 on both the upper and lower surfaces of the tray bottom plate 21, and the tray 20 located at the bottom can be a tray only provided with the first drainage member, and adjacent drainage members 211 are not in contact with each other. Of course, the tray 20 located at the top can also be a tray with drainage members 211 on both the upper and lower surfaces of the tray bottom plate 21. In a specific embodiment, each drainage member 211 also has a drainage surface arranged in an arc shape, and the drainage surface is arranged facing the carrier gas inlet (in the opening, one is the carrier gas inlet and the other is the carrier gas outlet).

[0056] like Figure 1 , Figure 2 and Fig.12 As shown, the collision structure 30 is arranged in the accommodating space 14 and connected to the carrier gas outlet 132. The collision structure 30 has an inlet end and an outlet end, and the outlet end is connected to the carrier gas outlet 132, and a curved gas flow channel is formed between the inlet end and the outlet end. The inlet end of the collision structure 30 is directly or indirectly connected to the s-shaped winding fluid channel. After the carrier gas circulates in the fluid channel, it carries solid compounds (there may be small solid particles carrying solid compounds) into the gas flow channel, and can be discharged from the carrier gas outlet 132 after collision in the gas flow channel. A coarse filter structure 32 is provided at the inlet end of the collision structure 30, which can filter large particles of solid compounds in the carrier gas carrying solid compounds. The gap size in the coarse filter structure 32 can be 30μm or larger. In one embodiment, the collision structure 30 can be a coil, and the coil has multiple bending parts, and a curved gas flow channel is formed in the coil.

[0057] like Figure 12 to Figure 14 As shown, there are collision structures of different shapes, among which, Fig.12 It is a ring coil structure. Fig.13 and Fig.14 All of them are irregular coil structures, but they have a common feature, that is, they have multiple bends. The arrangement of multiple bends can increase the number of collisions of the carrier gas in the gas flow channel, increase the chance of particle collision, and further reduce the problem of small particles.

[0058] like Fig.15 As shown, a plurality of baffles 31 are formed in the gas flow channel at intervals, and each baffle 31 is provided with an air vent 311, and the air vents 311 of adjacent baffles 31 do not overlap or only partially overlap in the carrier gas flow direction; alternatively, air vents are formed between the baffles 31 and the wall of the gas flow channel, and similarly, the air vents do not overlap or only partially overlap in the carrier gas flow direction, so that when the carrier gas carrying solid compounds passes through the plurality of baffles 31, the solid particles of the solid compounds therein can be continuously impacted and crushed to eliminate the particle problem.

[0059] In the above embodiment, there is only one accommodating space in the bottle body 10. In other embodiments, a plurality of accommodating spaces 14 may be formed in the bottle body 10, and the plurality of accommodating spaces 14 are formed in parallel in the horizontal direction in the bottle body 10. A fluid channel is formed in each accommodating space 14, and the plurality of fluid channels are arranged in series. After the plurality of fluid channels are connected in series, they are respectively connected to the carrier gas inlet 131 and the carrier gas outlet 132, so that the carrier gas entering from the carrier gas inlet 131 can sequentially pass through the various sub-fluid channels 50 of each accommodating space 14 in a transverse direction and then be discharged from the carrier gas outlet 132, such as Fig.16 shown.

[0060] In the above embodiment, the sub-fluid channels 50 are formed by the tray 20 itself, and in other embodiments, they can also be formed by the tray 20 and the inner wall of the bottle body 10. In this case, the tray 20 can also be composed of only the tray bottom plate 21, which is sealed on the inner wall of the bottle body 10. At the same time, the inner wall of the bottle body 10 is respectively provided with channels (equivalent to the connecting pipe 40) connecting adjacent sub-fluid channels 50, and a fluid channel can also be formed that is s-shaped and meanders in the longitudinal direction (the axial direction of the bottle body).

[0061] Compared with the prior art, the steel cylinder structure for supplying solid compounds in the embodiment of the present invention enables the airflow to move in a circuitous manner in the lateral direction through the internal structure setting, thereby improving the stability of the airflow, preventing the generation of eddies, and reducing the particle problem.

[0062] The steel cylinder structure for supplying solid compounds according to the embodiment of the present invention can increase the length of the fluid channel by dividing the steel cylinder into a plurality of serially connected accommodation spaces, thereby further improving the vapor pressure and stability of the solid compounds carried by the airflow.

[0063] The steel cylinder structure for supplying solid compounds in the embodiment of the present invention, by arranging a collision structure at the gas outlet, can make the gas carrying solid particles of solid compounds generate a certain collision friction after passing through the collision structure, thereby removing the solid particles of solid compounds in the gas and further eliminating the particle problem.

[0064] The steel cylinder structure for supplying solid compounds according to the embodiment of the present invention can greatly increase the collision chance and heating time and reduce small particles by setting the collision structure as a curved and extended coil structure with multiple bends.

[0065] The foregoing description of specific exemplary embodiments of the present invention is for the purpose of illustration and demonstration. These descriptions are not intended to limit the present invention to the precise form disclosed, and it is clear that many changes and variations can be made based on the above teachings. The purpose of selecting and describing the exemplary embodiments is to explain the specific principles of the present invention and its practical application, so that those skilled in the art can realize and utilize various different exemplary embodiments of the present invention and various different selections and changes. The scope of the present invention is intended to be limited by the claims and their equivalents.

Claims

1. A steel cylinder structure for supplying solid compounds, characterized in that: include: A bottle body, wherein a containing space is formed, and an air inlet and an air outlet are provided on the bottle body; at least two trays, the trays are stacked and arranged in the accommodating space to form a fluid channel, sub-fluid channels are formed between adjacent trays, the fluid channel includes at least one sub-fluid channel, both ends of the fluid channel are respectively connected to the air inlet and the air outlet, and the sub-fluid channels are distributed laterally in the accommodating space; The tray comprises a bottom plate and a boundary side plate, the upper end of the boundary side plate is provided with axially symmetrical openings, one of which is a carrier gas inlet and the other is a carrier gas outlet, and the bottom plate of each tray covers the boundary side plate of the adjacent tray to enclose and form the sub-fluid channel; A plurality of guide members for guiding gas flow are formed on all or part of the upper surface and / or lower surface of the tray, and a plurality of guide members are arrayed and distributed on the upper surface and / or lower surface of the tray bottom plate, and adjacent guide members are arranged without contact, and each of the guide members has a certain molding depth; An array of multiple drainage members is distributed over the lower surface of the tray bottom plate, and a molding depth of the drainage members is at least greater than the depth of the openings on the boundary side plates; or, an array of multiple drainage members is distributed over the upper surface of the tray bottom plate, and a molding depth of the drainage members is almost equal to or equal to the distance between the upper surface of the tray bottom plate where the drainage members are located and the lower surface of the tray bottom plate at the upper end; or, the multiple drainage members on the upper surface of the tray bottom plate and the multiple drainage members on the lower surface of the tray bottom plate are staggered with each other.

2. The steel cylinder structure for supplying solid compounds according to claim 1, characterized in that: The cylinder structure comprises two trays, which are stacked to form a sub-fluid channel, and two ends of the sub-fluid channel are respectively connected to the air inlet and the air outlet.

3. The steel cylinder structure for supplying solid compounds according to claim 1, characterized in that: The cylinder structure comprises at least three trays, and the at least three trays are stacked to form at least two sub-fluid channels connected in series.

4. The steel cylinder structure for supplying solid compounds according to claim 1, characterized in that: A plurality of accommodating spaces are formed in the bottle body, and the fluid channel is formed in each of the accommodating spaces. The plurality of fluid channels are arranged in series, the first fluid channel is connected to the air inlet, and the last fluid channel is connected to the air outlet.

5. The steel cylinder structure for supplying solid compounds as claimed in claim 4, characterized in that: A plurality of the accommodating spaces are formed in parallel in the bottle body in a horizontal direction.

6. The steel cylinder structure for supplying solid compounds according to claim 1, characterized in that: The cylinder structure also includes a collision structure, which has an inlet end and an outlet end. The inlet end is directly or indirectly connected to the fluid channel, and the outlet end is connected to the gas outlet. A curved gas flow channel is formed between the inlet end and the outlet end.

7. The steel cylinder structure for supplying solid compounds according to claim 6, characterized in that: The inlet end of the collision structure is provided with a filter structure.

8. The steel cylinder structure for supplying solid compounds as claimed in claim 6, characterized in that: A plurality of baffles arranged at intervals are formed in the gas flow channel, each of the baffles is provided with a vent, and the vents of adjacent baffles do not overlap or only partially overlap in the carrier gas flow direction.

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