A polysilicon reduction furnace

Abstract

The present invention relates to the technical field of polysilicon reduction furnaces, and specifically to a polysilicon reduction furnace, comprising a furnace body, wherein the lower end of the furnace body is fixedly connected to discharge pipes at positions near both sides, the lower end inner wall of the furnace body is fixedly connected to a base, the upper end of the base is plugged with silicon rods, the lower end of the furnace body is located between the two discharge pipes and the two sides are fixedly connected to air inlet pipes, the upper end of the furnace body is fixedly connected to an exhaust pipe, a scraping mechanism is provided inside the furnace body, the scraping mechanism comprises a cross bar, the cross bar is fixedly connected to the inner wall of the exhaust pipe, the upper end of the cross bar is rotatably connected to a fan blade, the lower end of the outer wall of the fan blade is rotatably connected to a belt, which can continuously scrape the polysilicon generated by the reduction on the surface of the silicon rod to avoid accumulation on the surface of the silicon rod that affects the heat generation capacity of the silicon rod, improve the reduction reaction capacity of silicon, make the quality of the product purer, and improve the practicability of the device.

Description

Technical Field

[0001] The invention relates to the technical field of polysilicon reduction furnaces, in particular to a polysilicon reduction furnace. Background Art

[0002] At present, there are many methods for producing polysilicon in the industry, among which the most common one is the hydrogen reduction method. It is to use purified trichlorosilane and purified hydrogen as raw materials, and pass them into the reaction container. Under high temperature and high pressure environment, the two react chemically in the reaction container to form polysilicon, which is deposited on the heating element in the reaction container. As the chemical reaction continues, more and more polysilicon is deposited on the heating element, gradually covering the entire heating element, and turning it into a rod-shaped body wrapped with polysilicon on the outside, commonly known as silicon.

[0003] When the silicon rod is continuously reduced, reduced silicon is continuously generated on the outer surface of the silicon rod, thus wrapping the silicon rod inside the polysilicon. Due to the influence of the thermal conductivity of the polysilicon, this will affect the purity of the prepared reduced silicon.

[0004] To this end, a polysilicon reduction furnace is proposed. Summary of the invention

[0005] The object of the present invention is to provide a polysilicon reduction furnace, which can continuously scrape off the polysilicon generated by the reduction on the surface of the silicon rod, avoid accumulation on the surface of the silicon rod affecting the heat generation capacity of the silicon rod, improve the reduction reaction capacity of silicon, make the quality of the product purer, and improve the practicality of the device to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solutions: a polysilicon reduction furnace, comprising a furnace body, wherein the positions of the lower end of the furnace body near both sides are fixedly connected to discharge pipes, the inner wall of the lower end of the furnace body is fixedly connected to a base, the upper end of the base is plugged with silicon rods, the lower end of the furnace body is located between the two discharge pipes and the positions of the two sides are fixedly connected to the air inlet pipe, and the upper end of the furnace body is fixedly connected to the exhaust pipe;

[0007] A scraping mechanism is provided inside the furnace body;

[0008] The scraping mechanism can accelerate the reaction speed of the silicon rods and improve the reaction efficiency.

[0009] When the silicon rod is undergoing reduction reaction, the silicon rod is first inserted on the base. At this time, the base is powered on, and then hydrogen and trichlorosilane are introduced through two air inlet pipes to generate polysilicon. The gas after the reaction is discharged through the exhaust pipe, and the reduced polysilicon is scraped off the silicon rod by a scraping mechanism, so that the gas and the silicon rod are fully in contact, making the reduction rate optimal.

[0010] Preferably, the scraping mechanism includes a cross bar, which is fixedly connected to the inner wall of the exhaust pipe, and the upper end of the cross bar is rotatably connected to a fan blade, and the lower end of the outer wall of the fan blade is rotatably connected to a belt, and positions on both sides of the interior of the furnace body are rotatably connected to reciprocating screws, and positions of the rod walls of the two reciprocating screws near the upper ends are rotatably connected to the two sides of the belt accordingly, and the rod walls of the reciprocating screws are meshingly connected to screw nuts, and a support rod is fixedly connected between the opposite sides of the two screw nuts, and the rod walls of the support rod are fixedly connected to a scraping block, and the inner wall of the scraping block is slidably connected to the outer side of the silicon rod, and the upper end of the reciprocating screw 604 on the right is fixedly connected to a motor 608.

[0011] Because the temperature of the gas will reach 1000 degrees when it is introduced into the interior of the furnace body, the gas after the reduction reaction will expand many times. It should be noted that the furnace body needs to be in a sealed state during the reaction, the discharged gas is collected by existing technology, and the discharge pipe is sealed by existing technology. When the gas is discharged, the rapid airflow drives the fan blades connected to the cross bar to rotate, and the fan blades drive the rotating belts to rotate when rotating. The belt rotation drives the reciprocating screws on both sides of the furnace body to rotate. When the reciprocating screw rotates, the meshing screw nut reciprocates up and down, and when the screw nut moves, it drives the support rod to move up and down, and the support rod drives the scraper block to move up and down to scrape the polycrystals generated on the surface of the silicon rod.

[0012] Preferably, a box body is fixedly connected to the upper and lower ends of the reciprocating screw rod inside the furnace body, a first return spring is fixedly connected to the inside of the box body, a soft iron sheet is fixedly connected to the outer side of the first return spring, and two groups of the soft iron sheets are fixedly connected to the upper and lower ends of the support rod.

[0013] When scraping the polysilicon, it may affect the movement of the reciprocating screw and the screw nut. When the support rod moves up and down, the fixed soft iron sheet is driven to move up and down. When the soft iron sheet moves up and down, the first return spring inside the box releases and contracts the soft iron sheet, thus ensuring that the scraped polysilicon will not contact the reciprocating screw.

[0014] Preferably, the lower end of the scraper block is fixedly connected to an L-shaped block near both sides, the lower end of the L-shaped block is fixedly connected to a second return spring, and the lower end of the second return spring is fixedly connected to a contact plate.

[0015] When the scraping block moves downward, the contact plate scrapes the silicon rod due to the limitation of the L-shaped block. When the scraping block moves upward, the contact plate is in a loose state and only scrapes the polysilicon downward to avoid residue on the upper end of the scraping block.

[0016] Preferably, a toggle block is fixedly connected to the reciprocating screw rod wall near the upper end, and fixed blocks are fixedly connected to the inner walls on both sides of the furnace body near the upper end, a groove is provided inside the fixed block, a first spring is fixedly connected inside the groove, a knocking block is fixedly connected to the lower end of the first spring, and openings matching the toggle block are provided on the back sides of the two knocking blocks, and a first filter is fixedly connected to the inner wall of the furnace body near the upper end.

[0017] When the reciprocating screw rotates, it drives the toggle block to rotate. When the toggle block rotates to the inside of the opening, due to the height difference between the toggle block and the opening and the inclined design of the toggle block close to the opening, the knocking block moves toward the inside of the fixed block and compresses the first spring. When the toggle block is misaligned with the opening, the knocking block moves downward rapidly under the action of the first spring and knocks on the first filter, so that some tiny polysilicon flowing with the gas is bounced off to avoid clogging of the first filter.

[0018] Preferably, the rod wall of the support rod is fixedly connected to a moving block at a position between adjacent silicon rods, the internal spiral transmission of the moving block is provided with a threaded rod, the upper end of the threaded rod is rotatably connected to the lower end of the first filter, a cavity is opened inside the base, air leakage holes are evenly opened at the upper end of the base, and the lower end of the threaded rod is fixedly connected to a stirring blade.

[0019] When the support rod moves up and down, it drives the moving block to move up and down. When the moving block moves up and down, the threaded rod of the spiral transmission rotates. The rotation of the threaded rod drives the stirring blade to rotate, so that the two gases introduced into the furnace body are fully mixed, which is beneficial to the later reduction reaction. The gas enters the furnace body through the leakage hole. When the moving block moves, because the threaded rod rotates, the brush removes some polysilicon on the surface of the threaded rod to avoid affecting the movement of the moving block.

[0020] Preferably, a second filter screen is fixedly connected to the upper end of the air leakage hole.

[0021] The upper end of the air leakage hole is fixedly connected with a second filter screen to prevent the air leakage hole from being blocked by polysilicon.

[0022] Preferably, the thread directions of the two threaded rods are opposite.

[0023] This allows the two stirring blades to rotate in opposite directions to form convection, resulting in better mixing efficiency.

[0024] Preferably, a brush is fixedly connected to the lower end of the moving block.

[0025] Can be cleaned with multi-threaded rod.

[0026] Preferably, the first filter screen is made of high temperature resistant metal material.

[0027] Avoid internal temperature from damaging the first filter.

[0028] Compared with the prior art, the present invention has the following beneficial effects:

[0029] 1. The polysilicon generated by reduction on the surface of the silicon rod can be continuously scraped off to avoid accumulation on the surface of the silicon rod that affects the heating capacity of the silicon rod, thereby improving the reduction reaction capacity of silicon, making the quality of the product purer and improving the practicality of the device;

[0030] 2. The first filter is knocked to bounce off some tiny polysilicon flowing with the gas, thereby preventing the first filter from being blocked and further improving the practicality of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a structural schematic diagram of the present invention;

[0032] Figure 2 A sectional view of the front view of the present invention;

[0033] Figure 3 For the present invention Figure 2 The enlarged structural diagram at A in the middle;

[0034] Figure 4 For the present invention Figure 2 The enlarged structural diagram at B in the middle;

[0035] Figure 5 It is a structural schematic diagram of the toggle block of the present invention.

[0036] In the figure: 1. furnace body; 2. discharge pipe; 3. silicon rod; 4. air inlet pipe; 5. exhaust pipe; 6. scraping mechanism; 7. first filter screen; 8. knocking block; 9. first spring; 10. groove; 11. opening; 12. toggle block; 13. fixed block; 14. first return spring; 15. box body; 16. soft iron sheet; 17. L-shaped block; 18. second return spring; 19. contact plate; 20. moving block; 21. threaded rod; 22. brush; 23. base; 24. second filter screen; 25. air leakage hole; 26. stirring blade; 27. cavity.

[0037] 601, cross bar; 602, fan blades; 603, belt; 604, reciprocating screw; 605, screw nut; 606, support rod; 607, scraper block; 608, motor. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] See also Figures 1 to 5 , the present invention provides a technical solution:

[0040] A polysilicon reduction furnace, such as Figure 1 , Figure 2 and Figure 4 As shown, it comprises a furnace body 1, wherein the positions of the lower end of the furnace body 1 near both sides are fixedly connected with discharge pipes 2, the inner wall of the lower end of the furnace body 1 is fixedly connected with a base 23, the upper end of the base 23 is plugged with a silicon rod 3, the lower end of the furnace body 1 is located between the two discharge pipes 2 and the positions of the two sides are fixedly connected with air inlet pipes 4, and the upper end of the furnace body 1 is fixedly connected with an exhaust pipe 5;

[0041] The furnace body 1 is provided with a scraping mechanism 6 inside;

[0042] The scraping mechanism 6 can accelerate the reaction speed of the silicon rod 3 and improve the reaction efficiency;

[0043] During operation, when the silicon rod 3 is subjected to a reduction reaction, the silicon rod 3 is first inserted on the base 23, and the base 23 is energized. Then, hydrogen and trichlorosilane are introduced through two air inlet pipes 4 to generate polysilicon. The gas after the reaction is discharged through the exhaust pipe 5, and the reduced polysilicon is scraped off the silicon rod 3 through the scraping mechanism 6, so that the gas is in full contact with the silicon rod 3 to avoid the temperature affecting the reduction efficiency.

[0044] As an embodiment of the present invention, Figure 1 , Figure 2 and Figure 4As shown, the scraping mechanism 6 includes a cross bar 601, which is fixedly connected to the inner wall of the exhaust pipe 5, and the upper end of the cross bar 601 is rotatably connected to a fan blade 602, and the lower end of the outer wall of the fan blade 602 is rotatably connected to a belt 603, and the positions on both sides of the interior of the furnace body 1 are rotatably connected to reciprocating screws 604, and the positions of the rod walls of the two reciprocating screw rods 604 near the upper ends are rotatably connected to the two sides of the belt 603, and the rod walls of the reciprocating screw rods 604 are meshed and connected with a screw nut 605, and the two screw rods A support rod 606 is fixedly connected between opposite sides of the nut 605, a scraper block 607 is fixedly connected to the rod wall of the support rod 606, the inner wall of the scraper block 607 is slidably connected to the outer side of the silicon rod 3, an L-shaped block 17 is fixedly connected to the lower end of the scraper block 607 near both sides, a second return spring 18 is fixedly connected to the lower end of the L-shaped block 17, a contact plate 19 is fixedly connected to the lower end of the second return spring 18, and a motor 608 is fixedly connected to the upper end of the reciprocating screw rod 604 on the right side;

[0045] During operation, because the temperature of the gas will reach 1000 degrees when it is introduced into the interior of the furnace body 1, the gas after the reduction reaction will expand many times. It should be noted that the furnace body 1 needs to be in a sealed state during the reaction, and the discharged gas is collected by the existing technology, and the discharge pipe 2 is sealed by the existing technology. When the gas is discharged, the rapid airflow drives the fan blades 602 connected to the cross bar 601 to rotate, and the fan blades 602 drive the rotating belt 603 to rotate when rotating. The rotation of the belt 603 drives the reciprocating screw rods 604 on both sides of the furnace body 1 to rotate. When the reciprocating screw rod 604 rotates, the meshing screw rod nut 605 reciprocates up and down, and the screw rod nut 605 moves up and down. The support rod 606 drives the scraping block 607 to move up and down to scrape the polycrystalline generated on the surface of the silicon rod 3. When the scraping block 607 moves downward, the contact plate 19 scrapes the silicon rod 3 due to the limitation of the L-shaped block 17. When the scraping block 607 moves upward, the contact plate 19 is in a loose state, and only the polycrystalline silicon is scraped downward to avoid residue on the upper end of the scraping block 607. It is explained here that when the gas can drive the above operation, it is driven by the gas, and when the driving force of the gas is small, it is driven by the motor 608; in this way, the polycrystalline silicon generated by the reduction on the surface of the silicon rod 3 can be continuously scraped off, and the accumulation on the surface of the silicon rod 3 that affects the heat generation capacity of the silicon rod 3 is avoided, the reduction reaction capacity of silicon is improved, the quality of the product is purer, and the practicality of the device is improved.

[0046] As an embodiment of the present invention, Figure 2 and Figure 3As shown, the interior of the furnace body 1 is fixedly connected to the upper and lower ends of the reciprocating screw rod 604 with a box body 15, the interior of the box body 15 is fixedly connected to a first return spring 14, the outer side of the first return spring 14 is fixedly connected to a soft iron sheet 16, and two groups of the soft iron sheets 16 are fixedly connected to the upper and lower ends of the support rod 606;

[0047] During operation, when the polysilicon is scraped, the movement of the reciprocating screw 604 and the screw nut 605 may be affected. When the support rod 606 moves up and down, the fixedly connected soft iron sheet 16 is driven to move up and down. When the soft iron sheet 16 moves up and down, the first return spring 14 inside the box body 15 releases and contracts the soft iron sheet 16, thereby ensuring that the scraped polysilicon will not contact the reciprocating screw 604; this further improves the device and improves the practicability of the device.

[0048] As an embodiment of the present invention, Figure 3 As shown, a toggle block 12 is fixedly connected to the rod wall of the reciprocating screw rod 604 near the upper end, and fixed blocks 13 are fixedly connected to the inner walls of both sides of the furnace body 1 near the upper end, and a groove 10 is provided inside the fixed block 13, and a first spring 9 is fixedly connected inside the groove 10, and a knocking block 8 is fixedly connected to the lower end of the first spring 9, and an opening 11 matching the toggle block 12 is provided on the back side of the two knocking blocks 8, and a first filter screen 7 is fixedly connected to the inner wall of the furnace body 1 near the upper end;

[0049] During operation, when the reciprocating screw 604 rotates, it drives the toggle block 12 to rotate. When the toggle block 12 rotates to the inside of the opening 11, due to the height difference between the toggle block 12 and the opening 11 and the toggle block 12 is designed with an inclined surface on the side close to the opening, the knocking block 8 moves toward the inside of the fixed block 13 and compresses the first spring 9. When the toggle block 12 is misaligned with the opening 11, the knocking block 8 moves downward rapidly under the action of the first spring 9 to knock the first filter 7, so that some fine polysilicon flowing with the gas is bounced off, avoiding the first filter 7 from being blocked, thereby further improving the practicability of the device.

[0050] As an embodiment of the present invention, Figure 4As shown, the rod wall of the support rod 606 is fixedly connected to the position between the adjacent silicon rods 3 with a moving block 20, the internal spiral transmission of the moving block 20 is provided with a threaded rod 21, the upper end of the threaded rod 21 is rotatably connected to the lower end of the first filter screen 7, the base 23 is provided with a cavity 27 inside, the upper end of the base 23 is evenly provided with leakage holes 25, the lower end of the threaded rod 21 is fixedly connected with a stirring blade 26, the upper end of the leakage hole 25 is fixedly connected with a second filter screen 24, the lower end of the moving block 20 is fixedly connected with a brush 22, and the first filter screen 7 is made of metal high temperature resistant material;

[0051] During operation, when the support rod 606 moves up and down, it drives the moving block 20 to move up and down. When the moving block 20 moves up and down, the spirally driven threaded rod 21 rotates. The rotation of the threaded rod 21 drives the stirring blade 26 to rotate, so that the two gases introduced into the furnace body 1 are fully mixed, which is beneficial to the later reduction reaction. The gas enters the furnace body 1 through the leakage hole 25. The upper end of the leakage hole 25 is fixedly connected with a second filter 24 to prevent polysilicon from clogging the leakage hole 25. When the moving block 20 moves, because the threaded rod 21 rotates, the brush 22 removes some polysilicon on the surface of the threaded rod 21 to avoid affecting the movement of the moving block 20; in this way, the two gases entering the furnace body 1 can be fully mixed, making the later reduction reaction more ideal.

[0052] Working principle:

[0053] During operation, when the silicon rod 3 is subjected to reduction reaction, the silicon rod 3 is first inserted on the base 23, and then the base 23 is powered, and then hydrogen and trichlorosilane are introduced through the two air inlet pipes 4, so that polysilicon is generated, and the gas after the reaction is discharged through the exhaust pipe 5, and the reduced polysilicon is scraped off the silicon rod 3 by the scraping mechanism 6, so that the gas is fully in contact with the silicon rod 3, so that the reduction rate is optimal. Because the temperature of the gas will reach 1400 degrees when it is introduced into the interior of the furnace body 1, the gas after the reduction reaction will expand many times. It is clear that the furnace body 1 needs to be in a sealed state during the reaction, the discharged gas is collected by the existing technology, and the discharge pipe 2 is sealed by the existing technology. When the gas is discharged, the fast airflow drives the fan blade 602 connected to the cross bar 601 to rotate, and the fan blade 602 drives the belt 603 connected to the rotation to rotate when rotating. The belt 603 rotates and drives the reciprocating screw rods 604 on both sides of the furnace body 1 to rotate. When the reciprocating screw rod 604 rotates, the screw nut 605 connected in meshing reciprocates up and down. When the lead screw nut 605 moves, it drives the support rod 606 to move up and down, and the support rod 606 drives the scraper block 607 to move up and down to scrape the polycrystalline generated on the surface of the silicon rod 3. When the scraper block 607 moves downward, the contact plate 19 scrapes the silicon rod 3 due to the limitation of the L-shaped block 17. When the scraper block 607 moves upward, the contact plate 19 is in a loose state, and only the polycrystalline silicon is scraped downward to avoid residue on the upper end of the scraper block 607; in this way, the polycrystalline silicon generated by the reduction on the surface of the silicon rod 3 can be continuously scraped off , avoiding accumulation on the surface of the silicon rod 3 that affects the reduction reaction rate, improving the reduction reaction rate of silicon, and improving the practicality of the device. When scraping the polysilicon, it may affect the movement of the reciprocating screw 604 and the screw nut 605. When the support rod 606 moves up and down, it drives the fixedly connected soft iron sheet 16 to move up and down. When the soft iron sheet 16 moves up and down, the first return spring 14 inside the box body 15 releases and contracts the soft iron sheet 16, so that it can be ensured that the scraped polysilicon will not contact the reciprocating screw 604;This further improves the device and increases the practicability of the device. When the reciprocating screw 604 rotates, it drives the toggle block 12 to rotate. When the moving block 20 rotates to the inside of the opening 11, the knocking block 8 moves toward the inside of the fixed block 13 and compresses the first spring 9. When the toggle block 12 is misaligned with the opening 11, the knocking block 8 moves downward rapidly under the action of the first spring 9 to knock the first filter screen 7. In this way, some fine polysilicon flowing with the gas is bounced off to avoid the first filter screen 7 from being blocked, further improving the practicability of the device. When the support rod 606 moves up and down, it drives the moving block 20 to move up and down. When moving downward, the screw rod 21 of the spiral transmission is rotated, and the rotation of the screw rod 21 drives the stirring blade 26 to rotate, so that the two gases entering the furnace body 1 are fully mixed, which is beneficial to the later reduction reaction. The gas enters the furnace body 1 through the leakage hole 25. The upper end of the leakage hole 25 is fixedly connected with a second filter 24 to prevent polysilicon from clogging the leakage hole 25. When the moving block 20 moves, because the screw rod 21 rotates, the brush 22 removes some polysilicon on the surface of the screw rod 21 to avoid affecting the movement of the moving block 20; in this way, the two gases entering the furnace body 1 can be fully mixed, making the later reduction reaction more ideal. ;

[0054] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A polysilicon reduction furnace, comprising a furnace body (1), wherein the lower end of the furnace body (1) is fixedly connected to a discharge pipe (2) at positions near both sides, the lower end inner wall of the furnace body (1) is fixedly connected to a base (23), the upper end of the base (23) is plugged with a silicon rod (3), the lower end of the furnace body (1) is located between the two discharge pipes (2) and the two sides are fixedly connected to an air inlet pipe (4), and the upper end of the furnace body (1) is fixedly connected to an exhaust pipe (5); It is characterized in that A scraping mechanism (6) is provided inside the furnace body (1); The scraping mechanism (6) can accelerate the reaction speed of the silicon rod (3) and improve the reaction efficiency; The scraping mechanism (6) comprises a cross bar (601), the cross bar (601) being fixedly connected to the inner wall of the exhaust pipe (5), the upper end of the cross bar (601) being rotatably connected to a fan blade (602), the lower end of the outer wall of the fan blade (602) being rotatably connected to a belt (603), and positions on both sides of the interior of the furnace body (1) being rotatably connected to reciprocating screw rods (604), the positions of the rod walls of the two reciprocating screw rods (604) close to the upper ends being in contact with the belt (603). The two sides are correspondingly connected for rotation, the rod wall of the reciprocating screw rod (604) is meshedly connected with a screw nut (605), a support rod (606) is fixedly connected between the opposite sides of the two screw nuts (605), the rod wall of the support rod (606) is fixedly connected with a scraper block (607), the inner wall of the scraper block (607) is slidably connected with the outer side of the silicon rod (3), and the upper end of the reciprocating screw rod (604) on the right side is fixedly connected with a motor (608); A box body (15) is fixedly connected to the upper and lower ends of the reciprocating screw rod (604) inside the furnace body (1), a first return spring (14) is fixedly connected to the inside of the box body (15), a soft iron sheet (16) is fixedly connected to the outer side of the first return spring (14), and two groups of the soft iron sheets (16) are fixedly connected to the upper and lower ends of the support rod (606); The lower end of the scraping block (607) is fixedly connected to an L-shaped block (17) near both sides, the lower end of the L-shaped block (17) is fixedly connected to a second return spring (18), and the lower end of the second return spring (18) is fixedly connected to a contact plate (19); A toggle block (12) is fixedly connected to the rod wall of the reciprocating screw rod (604) near the upper end, and fixed blocks (13) are fixedly connected to the inner walls of both sides of the furnace body (1) near the upper end, a groove (10) is provided inside the fixed block (13), a first spring (9) is fixedly connected inside the groove (10), a knocking block (8) is fixedly connected to the lower end of the first spring (9), and openings (11) matching the toggle block (12) are provided on opposite sides of the two knocking blocks (8), and a first filter screen (7) is fixedly connected to the inner wall of the furnace body (1) near the upper end; The rod wall of the support rod (606) is fixedly connected to a moving block (20) at a position between adjacent silicon rods (3); the moving block (20) has a threaded rod (21) for internal spiral transmission; the upper end of the threaded rod (21) is rotatably connected to the lower end of the first filter screen (7); a cavity (27) is provided inside the base (23); air leakage holes (25) are evenly provided at the upper end of the base (23); and a stirring blade (26) is fixedly connected to the lower end of the threaded rod (21); A second filter screen (24) is fixedly connected to the upper end of the air leakage hole (25); The thread directions of the two threaded rods (21) are opposite; The lower end of the moving block (20) is fixedly connected with a brush (22); The first filter screen (7) is made of a metal high temperature resistant material.

Images