Suction cup assembly and conversion kit for horizontal lathe machining of semiconductor quartz rings

Abstract

The present invention belongs to the technical field of semiconductor processing equipment, and specifically relates to a suction cup assembly and a conversion kit for horizontal lathe processing of semiconductor quartz rings. The suction cup assembly includes: a suction cup base, the top surface of which is a plane, the bottom surface is provided with a base flange, and has air guide holes connected up and down; a suction cup body, the bottom surface is a plane, the top surface has at least one circle of suction cup air grooves, and has air receiving holes connected up and down, the air receiving holes are located in the suction cup air grooves, the bottom surface of the suction cup body is set on the top surface of the suction cup base, and the air receiving holes are connected with the air guide holes; a quartz positioning ring, the bottom surface is a plane, and when the bottom surface is set on the top surface of the suction cup body, the suction cup air groove is covered; the suction cup positioning ring is fixed to the suction cup base, located on the inner side of the inner ring of the suction cup body, and is provided with a positioning flange, the positioning flange is located on the inner side of the inner ring of the quartz positioning ring, and the positioning flange abuts against the inner edge of the top surface of the suction cup body. The suction cup assembly of the present invention is used to greatly reduce the time required for clamping semiconductor quartz rings, and the efficiency is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor processing equipment, and in particular relates to a suction cup assembly and a conversion kit for semiconductor quartz ring horizontal lathe processing. Background Art

[0002] With the development of science and technology, semiconductors have developed rapidly, and the requirements for quartz components are getting higher and higher, and the demand is also increasing. The traditional processing and clamping methods are cumbersome and inefficient, which greatly affects the processing efficiency of products.

[0003] Traditionally, there are two ways to clamp quartz semiconductor components on horizontal lathes. One is to directly clamp semi-finished products through three-jaw chucks, and the other is to bond through wax. Specifically, prepare a base plate of the same material, heat the base plate and the components on the heating platform at the same time, the heating time is about 20 minutes, and then apply wax on the bonding surface to drive out the bubbles on the bonding surface, level it, move it out of the heating platform, wait for cooling, the natural cooling time is about 45 minutes, and the cooling time is about 20 minutes through forced cooling, and then the base plate is used to clamp on the machine tool. After the product processing is completed, it needs to be reheated, the wax is melted, the product is separated, and the residue on the surface of the product is cleaned. The entire clamping cycle is about 90 minutes, and it also wastes electricity, wax, etc. The efficiency is low and cannot fully meet the production requirements.

[0004] In addition, ordinary vacuum suction cups are grid-dense vacuum suction cups, which are sealed with sealing strips according to product requirements. This universal vacuum suction cup cannot fit the shape of the product well and cannot be used directly on a horizontal lathe, which limits its application in this industry and easily causes the product to loosen, thereby causing the product to be scrapped. Summary of the invention

[0005] The present invention aims to solve the above technical problems and provides a suction cup assembly and a conversion kit for machining semiconductor quartz rings on a horizontal lathe.

[0006] A suction cup assembly, comprising:

[0007] A suction cup base, annular structure, with a flat top surface, a base flange on the bottom surface, and air guide holes connected up and down;

[0008] A suction cup body, an annular structure, a flat bottom surface, a top surface having at least one circle of suction cup air grooves, and an air receiving hole connected up and down, the air receiving hole is located in the suction cup air groove, the bottom surface of the suction cup body is arranged on the top surface of the suction cup base, and the air receiving hole is connected to the air guide hole;

[0009] A quartz positioning ring, which is annular in structure and has a flat bottom surface, and when the bottom surface is arranged on the top surface of the suction cup body, the suction cup air groove is covered;

[0010] A suction cup positioning ring, an annular structure, is fixed to the suction cup base and is located inside the inner ring of the suction cup body. A positioning flange is provided. The positioning flange is located inside the inner ring of the quartz positioning ring and abuts against the inner edge of the top surface of the suction cup body.

[0011] When the suction cup assembly of the present invention is in use, the air pipe can be connected to the air guide hole of the suction cup base through the rotating connector, thereby realizing the connection between the air pipe and the suction cup air groove, so as to realize the vacuum suction cup function after suction. The suction cup positioning ring is used to locate the position of the suction cup body on the suction cup base.

[0012] The base flange is integrally formed with the suction cup base, the outer diameter of the base flange is smaller than the outer diameter of the suction cup base, the inner diameter of the base flange is the same as the inner diameter of the suction cup base, and the inner wall of the base flange is flush with the inner wall of the inner ring of the suction cup base.

[0013] An air guiding groove is dug on the top surface around the air guiding hole, the length direction of the air guiding groove is radial, the air guiding groove is connected with the air guiding hole, and the air guiding hole is connected with the air connecting hole through the air guiding groove.

[0014] The top surface of the suction cup body is provided with two circles of suction cup air grooves, the two circles of suction cup air grooves are concentrically arranged in the radial direction, and each circle of the suction cup air grooves is provided with the air receiving holes.

[0015] The positioning flange is integrally arranged on the outer side of the top of the suction cup positioning ring, and the top surface of the positioning flange is flush with the top surface of the suction cup positioning ring.

[0016] The bottom surface of the suction cup positioning ring is integrally provided with an embedded flange, the outer diameter of the embedded flange is smaller than the outer diameter of the suction cup positioning ring, the inner diameter of the embedded flange is the same as the inner diameter of the suction cup positioning ring, and the inner wall of the embedded flange is flush with the inner wall of the inner ring of the suction cup positioning ring;

[0017] The embedded flange is embedded inside the inner ring of the suction cup base.

[0018] The top surface of the suction cup base is provided with a plurality of base fixing holes along the circumferential direction;

[0019] The suction cup positioning ring is provided with a positioning ring countersunk hole connected up and down;

[0020] The suction cup base and the suction cup positioning ring are detachably connected via fixing bolts.

[0021] The suction cup base and the base flange are a stainless steel base made of 304 stainless steel in one piece;

[0022] The suction cup body is a quartz suction cup made of quartz material;

[0023] The suction cup positioning ring and the positioning flange are a PP positioning ring made in one piece of PP material.

[0024] A limiting flange is integrally provided on the top surface of the quartz positioning ring, the outer diameter of the limiting flange is smaller than the outer diameter of the quartz positioning ring, and the inner diameter of the limiting flange is larger than the outer diameter of the quartz positioning ring, so that the limiting flange is circumferentially arranged around the top surface of the quartz positioning ring.

[0025] A conversion kit for horizontal lathe machining of semiconductor quartz rings comprises a horizontal lathe, on which a three-jaw chuck is provided;

[0026] Also includes:

[0027] The suction cup assembly has a base flange connected to the three-jaw chuck;

[0028] a vacuum pump;

[0029] an air storage tank connected to the vacuum pump via an air pipe;

[0030] A hand-pull valve connected to the gas storage tank through another gas pipe;

[0031] A rotary joint is connected to the air guide hole of the suction cup assembly and is connected to the hand-pull valve through another air pipe.

[0032] A muffler is provided at the connection between the hand-pull valve and the air pipe.

[0033] Beneficial effects: The present invention has the following advantages:

[0034] 1. The time required for the suction cup assembly to clamp the semiconductor quartz ring is greatly reduced, and the efficiency is improved;

[0035] 2. The overall structure is simple and the operation is relatively convenient;

[0036] 3. Reduce energy consumption and production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 It is a schematic diagram of an overall structure of the present invention;

[0038] Figure 2 for Figure 1 A top view of

[0039] Figure 3 for Figure 1 Bottom view of

[0040] Figure 4 for Figure 1 Exploded diagram of

[0041] Figure 5for Figure 1 Partial exploded view;

[0042] Figure 6 A schematic diagram of the structure of the suction cup base of the present invention;

[0043] Figure 7 for Figure 6 A top view of

[0044] Figure 8 A top view of the suction cup body of the present invention;

[0045] Fig. 9 for Figure 8 Bottom view of

[0046] Fig.10 A schematic diagram of the structure of the suction cup positioning ring of the present invention;

[0047] Fig.11 for Fig.10 Schematic diagram of the structure on the other side. DETAILED DESCRIPTION

[0048] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below with reference to specific illustrations.

[0049] Reference Figures 1 to 11 A suction cup assembly includes a suction cup base 1, a suction cup body 2, a quartz positioning ring 3 and a suction cup positioning ring 4.

[0050] Reference Figures 1 to 7 The suction cup base 1 is an annular structure, the top surface of the suction cup base 1 is a plane, and the bottom surface of the suction cup base 1 is provided with a base flange 11, which is used to connect with the three-jaw chuck on the horizontal lathe to fix the suction cup assembly on the three-jaw chuck.

[0051] The base flange 11 and the suction cup base 1 are preferably made in one piece, the outer diameter of the base flange 11 is smaller than the outer diameter of the suction cup base 1, the inner diameter of the base flange 11 is the same as the inner diameter of the suction cup base 1, and the inner wall of the base flange 11 is flush with the inner wall of the inner ring of the suction cup base 1.

[0052] The suction cup base 1 has an air guide hole 12 connected up and down. An air guide groove 13 is dug on the top surface around the air guide hole 12. The length direction of the air guide groove 13 is radial. The air guide groove 13 is connected to the air guide hole 12. The air guide hole 12 is connected to the air receiving hole 22 of the suction cup body 2 through the air guide groove 13.

[0053] The suction cup base 1 and the base flange 11 are a stainless steel base made of 304 stainless steel in one piece.

[0054] Reference Figures 1 to 5 , Figure 8and Fig. 9 The suction cup body 2 is an annular structure, the bottom surface of the suction cup body 2 is a plane, the top surface of the suction cup body 2 has at least one circle of suction cup air grooves 21, the suction cup body 2 has an air connection hole 22 connected up and down, the air connection hole 22 is located in the suction cup air groove 21, the bottom surface of the suction cup body 2 is set on the top surface of the suction cup base 1, and the air connection hole 22 is connected to the air guide hole 12. When the suction cup base 1 is provided with an air guide groove 13, the air connection hole 22 only needs to be connected to the air guide groove 13 to achieve communication with the air guide hole 12. Figure 8 Preferably, the top surface of the suction cup body 2 has two circles of suction cup air grooves 21, and the two circles of suction cup air grooves 21 are concentrically arranged in the radial direction. An air receiving hole 22 is provided on each circle of suction cup air grooves 21, and the two air receiving holes 22 are arranged side by side in the radial direction to be connected to the same air guide groove 13 at the same time.

[0055] The suction cup body 2 is a quartz suction cup made of quartz material.

[0056] Reference Figures 1 to 5 The quartz positioning ring 3 is a ring-shaped structure, and the bottom surface of the quartz positioning ring 3 is a plane. When the bottom surface of the quartz positioning ring 3 is arranged on the top surface of the suction cup body 2, the suction cup air groove 21 is covered, so that when the suction cup air groove 21 is sucked, the bottom surface of the quartz positioning ring 3 can be sucked.

[0057] The quartz positioning ring 3 can be adapted according to the different shapes of the products, and the products to be processed can be fixed on the quartz positioning ring 3, and can be easily adsorbed on the suction cup body 2 when preparing for processing. Specifically, the quartz positioning ring 3 can adopt the following structure:

[0058] The top surface of the quartz positioning ring 3 is integrally provided with a limiting flange 31, the outer diameter of the limiting flange 31 is smaller than the outer diameter of the quartz positioning ring 3, and the inner diameter of the limiting flange 31 is larger than the outer diameter of the quartz positioning ring 3, so that the limiting flange 31 is arranged around the top surface of the quartz positioning ring 3. The specific outer diameter and inner diameter of the limiting flange 31 can be determined according to the specifications of the product to be processed.

[0059] The quartz positioning ring 3 is a quartz positioning ring 3 made of quartz material.

[0060] Reference Figures 1 to 5 , Fig.10 and Fig.11 The suction cup positioning ring 4 is used to position the suction cup body 2 on the suction cup base 1. The suction cup positioning ring 4 is an annular structure, the suction cup positioning ring 4 is fixed to the suction cup base 1, the suction cup positioning ring 4 is located inside the inner ring of the suction cup body 2, and the suction cup positioning ring 4 is provided with a positioning flange 41, the positioning flange 41 is located inside the inner ring of the quartz positioning ring 3, and the positioning flange 41 abuts against the inner edge of the top surface of the suction cup body 2. The positioning flange 41 is integrally arranged on the outside of the top of the suction cup positioning ring 4, and the top surface of the positioning flange 41 is flush with the top surface of the suction cup positioning ring 4.

[0061] The bottom surface of the suction cup positioning ring 4 is integrally provided with an embedded flange 42, the outer diameter of the embedded flange 42 is smaller than the outer diameter of the suction cup positioning ring 4, the inner diameter of the embedded flange 42 is the same as the inner diameter of the suction cup positioning ring 4, and the inner wall of the embedded flange 42 is flush with the inner wall of the inner ring of the suction cup positioning ring 4. The embedded flange 42 is embedded inside the inner ring of the suction cup base 1.

[0062] The connection between the suction cup positioning ring 4 and the suction cup base 1 can be a detachable connection fixing mode to achieve the detachability of each component. Figure 7 The top surface of the suction cup base 1 is provided with a plurality of base fixing holes 14 along the circumferential direction; Fig.10 and Fig.11 The suction cup positioning ring 4 is provided with a positioning ring countersunk hole 43 connected up and down; the suction cup base 1 and the suction cup positioning ring 4 are detachably connected by fixing bolts. The fixing bolts are sequentially passed from the upper positioning ring countersunk hole 43 to the lower base fixing hole 14 to realize bolt fixing connection.

[0063] The suction cup positioning ring 4 and the positioning flange 41 are PP positioning rings made of PP material in one piece.

[0064] When the suction cup assembly of the present invention is in use, the air pipe can be connected to the air guide hole 12 of the suction cup base 1 through a rotating connector, thereby realizing the connection between the air pipe and the suction cup air groove 21, so as to realize the vacuum suction cup function after suction.

[0065] The present invention also provides a conversion kit for horizontal lathe processing of semiconductor quartz rings, comprising a horizontal lathe, the suction cup assembly of the present invention, a vacuum pump, a gas storage tank, a hand-pull valve and a rotary joint.

[0066] The horizontal lathe is equipped with a three-jaw chuck.

[0067] The base flange 11 of the suction cup assembly is connected to the three-jaw chuck.

[0068] The vacuum pump, the gas storage tank, the hand-pull valve and the rotary joint are connected in sequence through independent air pipes. The rotary joint is connected to the air guide hole 12 of the suction cup assembly, and a muffler is provided at the connection between the hand-pull valve and the air pipe.

[0069] The air pipe preferably adopts a thick-walled air pipe. The hand-pull valve is used to control the on and off of the vacuum negative pressure, and the muffler is used to reduce the sharp noise during suction. The air tank is used to store part of the negative pressure energy to ensure that when the vacuum pump fails, there is buffer time and the processing of the product can be suspended in time. At the same time, it also has the function of oil-water separation. During processing, some cutting fluid will enter the vacuum pipeline through the gap of the sealing surface. If it enters the vacuum pump directly, it will shorten the life of the vacuum pump and cause failure. The function of the vacuum pump, that is, the vacuum pump negative pressure station, is to provide negative pressure energy to ensure that the pressure inside the conversion kit system is less than the atmospheric pressure. When the invention is in operation, the vacuum pump, air tank, hand-pull valve and rotary joint are first connected in sequence through each independent air pipe. Then turn on the vacuum pump, and when the pressure reaches the preset pressure value, place the product on the quartz positioning ring 3 of the suction cup assembly, and open the hand-pull valve.

[0070] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A suction cup assembly, characterized in that: include: A suction cup base, an annular structure, a flat top surface, a base flange on the bottom surface, and an air guide hole connected up and down, wherein the base flange is used to connect with a three-jaw chuck on a horizontal lathe; A suction cup body, an annular structure, a flat bottom surface, a top surface having at least one circle of suction cup air grooves, and an air receiving hole connected up and down, the air receiving hole is located in the suction cup air groove, the bottom surface of the suction cup body is arranged on the top surface of the suction cup base, and the air receiving hole is connected to the air guide hole; A quartz positioning ring, annular structure, the bottom surface is a plane, when the bottom surface is arranged on the top surface of the suction cup body, the suction cup air groove is covered, the top surface of the quartz positioning ring is integrally provided with a limiting flange, the outer diameter of the limiting flange is smaller than the outer diameter of the quartz positioning ring, the inner diameter of the limiting flange is larger than the inner diameter of the quartz positioning ring, so that the limiting flange is arranged around the top surface of the quartz positioning ring in a circle; A suction cup positioning ring, an annular structure, fixed to the suction cup base, located on the inner side of the inner ring of the suction cup body, provided with a positioning flange, the positioning flange is located on the inner side of the inner ring of the quartz positioning ring, the positioning flange abuts against the inner edge of the top surface of the suction cup body, the bottom surface of the suction cup positioning ring is integrally provided with an embedded flange, the outer diameter of the embedded flange is smaller than the outer diameter of the suction cup positioning ring, the inner diameter of the embedded flange is the same as the inner diameter of the suction cup positioning ring, and the inner wall of the embedded flange is flush with the inner wall of the inner ring of the suction cup positioning ring, and the embedded flange is embedded in the inner side of the inner ring of the suction cup base; An air guiding groove is dug on the top surface around the air guiding hole, the air guiding groove is connected with the air guiding hole, and the air guiding hole is connected with the air connecting hole through the air guiding groove.

2. The suction cup assembly according to claim 1, characterized in that The base flange is integrally formed with the suction cup base, the outer diameter of the base flange is smaller than the outer diameter of the suction cup base, the inner diameter of the base flange is the same as the inner diameter of the suction cup base, and the inner wall of the base flange is flush with the inner wall of the inner ring of the suction cup base.

3. The suction cup assembly according to claim 1, characterized in that The length direction of the air guide groove is radial.

4. The suction cup assembly according to claim 3, characterized in that The top surface of the suction cup body is provided with two circles of suction cup air grooves, the two circles of suction cup air grooves are concentrically arranged in the radial direction, and each circle of the suction cup air grooves is provided with the air receiving holes.

5. The suction cup assembly according to claim 1, wherein: The positioning flange is integrally arranged on the outer side of the top of the suction cup positioning ring, and the top surface of the positioning flange is flush with the top surface of the suction cup positioning ring.

6. The suction cup assembly according to claim 1, wherein: The top surface of the suction cup base is provided with a plurality of base fixing holes along the circumferential direction; The suction cup positioning ring is provided with a positioning ring countersunk hole connected up and down; The suction cup base and the suction cup positioning ring are detachably connected via fixing bolts.

7. The suction cup assembly according to claim 1, characterized in that The suction cup base and the base flange are a stainless steel base made of 304 stainless steel in one piece; The suction cup body is a quartz suction cup made of quartz material; The suction cup positioning ring and the positioning flange are a PP positioning ring made in one piece of PP material.

8. A conversion kit for horizontal lathe machining of semiconductor quartz rings, comprising a horizontal lathe, the horizontal lathe being provided with a three-jaw chuck; It is characterized in that Also includes: The suction cup assembly according to any one of claims 1 to 7, wherein the base flange is connected to a three-jaw chuck; a vacuum pump; an air storage tank connected to the vacuum pump via an air pipe; A hand-pull valve connected to the gas storage tank through another gas pipe; A rotary joint connected to the air guide hole of the suction cup assembly and connected to the hand-pull valve through another air pipe; A muffler is provided at the connection between the hand-pull valve and the air pipe.

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