Sample carrier holding device

Abstract

The application provides a sample carrier storage device, which comprises a storage assembly, a mounting assembly and a carrier; the storage assembly comprises a storage bin, the extension direction of the storage bin is a first direction, and the direction intersecting with the first direction at an angle is a second direction; the storage bin has a mounting end, and the storage bin is used for storing a plurality of sample carriers arranged in sequence along the first direction from the mounting end; the carrier is arranged on one side of the storage bin along the second direction; and the mounting assembly is used for moving the sample carriers located at the mounting end to the carrier. In this way, the user can mount the sample carriers on the carrier through the mounting assembly, so that the damage of the sample carriers during the mounting process is avoided, and the mounting success rate of the sample carriers is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, in particular to a sample carrier storage device. Background Art

[0002] In semiconductor manufacturing, transmission electron microscopy (TEM) analysis uses a focused ion beam (FIB) to micro-cut samples to remove surface defects and analyze them. TEM analysis significantly improves the timeliness of defect analysis and is now an indispensable analytical method in semiconductor factories. Existing sample carriers are stored in containers similar to centrifuge tubes. Tweezers are used to remove and mount the sample carrier on a stage. Due to the thinness of the sample carrier, transfer and installation are difficult and can easily cause the sample carrier to bend, resulting in the sample carrier being scrapped and reducing the installation success rate. Summary of the Invention

[0003] The object of the present invention is to provide a sample carrier storage device to solve the problem that the sample carrier is thin and bends during the transfer and installation process, thereby affecting the installation success rate.

[0004] In order to achieve the above-mentioned object, the present invention provides a sample carrier storage device, comprising: a storage component, a mounting component and a carrier;

[0005] The storage assembly includes a storage bin, wherein the extension direction of the storage bin is a first direction, and the direction intersecting the first direction at an angle is a second direction;

[0006] The storage bin has a mounting end, and the storage bin is used to store a plurality of sample carriers arranged sequentially along the first direction from the mounting end;

[0007] The carrier is arranged on one side of the storage bin along the second direction;

[0008] The mounting assembly is used to move the sample carrier located at the mounting end to the carrier stage.

[0009] Optionally, the storage assembly further includes a first connecting member and a first driving member;

[0010] The first connecting member is accommodated in the storage bin and is movably arranged along the first direction;

[0011] One end of the first connecting member abuts against the sample carrier away from the mounting end along the first direction, and the other end of the connecting member is connected to the first driving member.

[0012] Optionally, the storage bin has a fixed end, and the fixed end and the mounting end are arranged opposite to each other along the first direction;

[0013] One end of the first driving member is connected to the first connecting member, and the other end of the first driving member is connected to the fixed end. The first driving member is used to drive the first connecting member to move along the first direction.

[0014] Optionally, the carrier includes a limiting member and a clamping member;

[0015] The limiting member is movably arranged along the second direction between a closed position and an open position; and the clamping member is detachably connected to the sample carrier.

[0016] Optionally, the mounting assembly includes a second driving member;

[0017] The second driving member is movable along the second direction, and when the second driving member moves, it drives the limiting member to move along the second direction between the closing position and the opening position.

[0018] Optionally, the mounting assembly further includes a third driving member;

[0019] The third driving member is movable along the second direction, and when the third driving member moves, it drives the sample carrier located at the mounting end to move onto the clamping member.

[0020] Optionally, after the second driving member drives the limiting member to move from the closed position to the open position along the second direction, the third driving member drives the sample carrier at the mounting end to move onto the clamping member along the second direction.

[0021] Optionally, after the third driving member drives the sample carrier to move to the clamping member along the second direction, the second driving member drives the limiting member to move from the open position to the closed position along the second direction, and the clamping member locks the sample carrier.

[0022] Optionally, the mounting assembly further includes a pressing member, the sample carrier holding device has a shell, the pressing member is located on an outer surface of the shell, and the pressing member is used to drive the second driving member and the third driving member to move along the second direction.

[0023] Optionally, the sample carrier storage device further includes a second connecting member, which is located on the outer surface of the shell and is used to connect the sample carrier storage device to the machine.

[0024] In summary, in the sample carrier storage device provided by the present application, it comprises a storage assembly, a mounting assembly and a carrier. The storage assembly comprises a storage bin, the extension direction of the storage bin is a first direction, and the direction intersecting with the first direction at an angle is a second direction. The storage bin has a mounting end, and the storage bin is used for storing a plurality of sample carriers arranged in sequence along the first direction from the mounting end. The carrier is arranged on one side of the storage bin along the second direction. The mounting assembly is used for moving the sample carriers located at the mounting end to the carrier.

[0025] In this way, the sample carriers are arranged in sequence along the first direction in the storage bin, and the user does not need to clamp the sample carriers, thereby optimizing the mounting step of the sample carriers and improving the mounting efficiency of the sample carriers. Meanwhile, the sample carriers are mounted to the carrier by the mounting assembly, thereby avoiding deformation of the sample carriers during the mounting process, reducing the loss of the sample carriers during the transfer and mounting process, and improving the mounting success rate of the sample carriers. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is a structural schematic diagram of a sample carrier in an embodiment of the present application;

[0027] Figure 2 is a schematic diagram of a sample located on a sample carrier in an embodiment of the present application;

[0028] Figure 3 is a schematic diagram of a limiting piece in a closed position in an embodiment of the present application;

[0029] Figure 4 is a schematic diagram of a limiting piece in an open position in an embodiment of the present application;

[0030] Figure 5 is a schematic diagram of a sample carrier located on a carrier in an embodiment of the present application;

[0031] Figure 6 is a structural schematic diagram of a sample carrier storage device in an embodiment of the present application.

[0032] Among them, the reference signs are:

[0033] 1-storage assembly; 2-mounting assembly; 3-carrier; 4-first direction; 5-second direction; 6-sample carrier; 7-sample; 8-second connecting piece; 9-housing; 11-storage bin; 12-first connecting piece; 13-first driving piece; 21-second driving piece; 22-third driving piece; 23-pressing piece; 31-limiting piece; 32-clamping piece; 111-mounting end; 112-fixed end. DETAILED DESCRIPTION

[0034] To make the objects, advantages, and features of the present invention more clearly apparent, the present invention is further described below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale. They are only used to conveniently and clearly assist in illustrating the purposes of the embodiments of the present invention. In addition, the structures shown in the drawings are often part of the actual structure. In particular, different drawings may need to illustrate different focuses and sometimes use different scales.

[0035] As used in this specification, the singular forms "a", "an", and "the" include plural referents, the term "or" is generally used to include "and / or", the term "several" is generally used to include "at least one", and the term "at least two" is generally used to include "two or more". In addition, the terms "first", "second", and "third" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features specified as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features, "one end" and "the other end" and "proximal end" and "distal end" generally refer to two corresponding parts, which include not only endpoints, and the terms "mounted", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication between two elements or the interaction relationship between two elements. In addition, as used in this specification, an element disposed on another element generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements may be direct or indirect through an intermediate element, and it cannot be understood as indicating or implying a spatial positional relationship between the two elements, that is, one element may be in any orientation such as inside, outside, above, below or to one side of another element, unless otherwise clearly indicated in the content. The terms "upper", "lower", "top" and "bottom" are generally relative positional relationships arranged in the direction of gravity; the terms "vertical" and "vertical direction" generally refer to the direction of gravity, which is generally perpendicular to the ground, and "horizontal" and "horizontal plane direction" generally refer to the direction parallel to the ground; for ordinary technicians in this field, the specific meanings of the above terms in this specification can be understood according to specific circumstances.

[0036] The object of the present invention is to provide a sample carrier storage device to solve the problem that the sample carrier is thin and bends during the transfer and installation process, thereby affecting the installation success rate.

[0037] The following description is given with reference to the accompanying drawings.

[0038] Please refer to Figures 1 to 6The present invention provides a sample carrier storage device, which includes: a storage component 1, a mounting component 2 and a carrier 3; the storage component 1 includes a storage bin 11, the extension direction of the storage bin 11 is a first direction 4, and the direction intersecting the first direction 4 at an angle is a second direction 5; the storage bin 11 has a mounting end 111, and the storage bin 11 is used to store a plurality of sample carriers 6 arranged in sequence along the first direction 4 from the mounting end 111; the carrier 3 is arranged on one side of the storage bin 11 along the second direction 5; the mounting component 2 is used to move the sample carrier 6 located at the mounting end 111 to the carrier 3. It should be noted that Figures 1 to 2 as well as Figure 6 In the illustrated example, the sample carrier 6 is an arc-shaped structure, the storage bin 11 is also a corresponding cylindrical component, the first direction 4 is a horizontal direction, and the second direction 5 is a vertical direction. In some other embodiments, the sample carrier 6 and the storage bin 11 can be components of other shapes, the first direction 4 can be other directions, and the second direction 5 can also be other directions that are compatible with the first direction 4. Those skilled in the art can configure them according to actual conditions, and the present invention is not limited to this.

[0039] As an optional embodiment, Figure 2 In the illustrated example, a sample carrier 6 can hold up to four samples 7. Of course, in other embodiments, the number of samples 7 that can be placed on the sample carrier 6 varies depending on the structure of the sample carrier 6, and the present invention is not limited thereto.

[0040] With such configuration, the sample carriers 6 are arranged in sequence along the first direction 4 in the storage bin 11, and the user does not need to clamp the sample carriers 6, which optimizes the installation steps of the sample carriers 6 and improves the installation efficiency of the sample carriers 6; at the same time, the sample carriers 6 are installed on the carrier 3 through the installation component 2, which avoids deformation of the sample carriers 6 during the installation process, reduces the loss of the sample carriers 6 during the transfer and installation process, and improves the installation success rate of the sample carriers 6.

[0041] In an alternative exemplary embodiment, the storage component 1 further includes a first connector 12 and a first drive member 13; the first connector 12 is accommodated in the storage bin 11 and is movably arranged along the first direction 4; one end of the first connector 12 abuts against the sample carrier 6 away from the mounting end 111 along the first direction 4, and the other end of the connector is connected to the first drive member 13. In this configuration, the first connector 12 abuts against the sample carrier 6, which increases the contact area between the first connector 12 and the sample carrier 6 and avoids deformation of the sample carrier 6 due to stress during storage and transfer. It should be noted that in Figure 6In the example shown, the first direction 4 is a horizontal direction, and the first connecting member 12 is an arc-shaped component that is compatible with the storage bin 11. Of course, in some other examples, the first direction 4 can also be other directions with a certain angle to the horizontal direction. When the angle reaches a certain degree, such as a downward deflection of 45°, the sample carrier 6 can slide down by its own gravity. At this time, there is no need to set the first connecting member 12 and the first driving member 13. Those skilled in the art can configure the shape and position of the first connecting member 12 and the position of the first driving member 13 according to actual conditions, and the present invention is not limited to this.

[0042] Furthermore, the storage bin 11 has a fixed end 112, and the fixed end 112 is arranged opposite to the mounting end 111 along the first direction 4; one end of the first driving member 13 is connected to the first connecting member 12, and the other end of the first driving member 13 is connected to the fixed end 112, and the first driving member 13 is used to drive the first connecting member 12 to move along the first direction 4. It should be noted that Figure 6 In the illustrated example, the first driving member 13 is an elastic member that can generate elastic potential energy through compression and convert the elastic potential energy into a force acting on the first connecting member 12, thereby pushing the first connecting member 12 to move the sample carrier 6 along the first direction 4. In other examples, the first driving member 13 can also be a member with the same function, and the present invention is not limited thereto.

[0043] Please refer to Figures 3 and 4 The carrier 3 includes a limiter 31 and a clamping member 32; the limiter 31 is movably arranged between a closed position and an open position along the second direction 5; the clamping member 32 is detachably connected to the sample carrier 6. It should be noted that when the limiter 31 is in the closed position, the clamping member 32 is in a locked state (the state at this time is as shown in FIG. Figure 3 As shown), to lock the sample carrier 6 or prohibit the sample carrier 6 from loading; when the limit member 31 is in the open position, the clamping member 32 is in the unlocked state (the state at this time is as shown in FIG. Figure 4 As shown), the sample carrier 6 is unlocked or allowed to be loaded. Of course, in other embodiments, the carrier 3 may also be other components with the same function, and the present invention is not limited thereto.

[0044] Please refer to Figures 3 to 6 The mounting assembly 2 includes a second driving member 21; the second driving member 21 is movable along the second direction 5, and when the second driving member 21 moves, it drives the limiting member 31 to move along the second direction 5 between the closed position and the open position. Figures 3 to 6In the example shown, the limit member 31 is a component with a rebound force. When the second driving member 21 moves along the second direction 5 toward the direction close to the carrier 3, the limit member 31 is subjected to the force of the second driving member 21 and moves from the closed position to the open position; when the second driving member 21 moves along the second direction 5 toward the direction away from the carrier 3, the limit member 31 moves from the open position to the closed position under the action of the rebound force.

[0045] Furthermore, the mounting assembly 2 includes a third driving member 22; the third driving member 22 is movable along the second direction 5. When the third driving member 22 moves, it drives the sample carrier 6 located at the mounting end 111 to move onto the clamping member 32. It should be noted that the third driving member 22 is a thin plate-shaped member. When the third driving member 22 moves along the second direction 5 toward the carrier 3, the sample carrier 6 located at the mounting end 111 is moved from the storage compartment 11 to the unlocked clamping member 32. In other examples, the third driving member 22 can also be a member of other shapes, but it should be noted that the third driving member 22 needs to be of moderate strength to avoid damage to the sample carrier 6 during the transfer process.

[0046] Please continue to refer to Figure 6 When the second driving member 21 drives the limiting member 31 to move from the closed position to the open position along the second direction 5, the third driving member 22 drives the sample carrier 6 located at the mounting end 111 to move onto the clamping member 32 along the second direction 5. It should be noted that when the second driving member 21 moves in the second direction 5 toward the carrier 3, it can drive the limiting member 31 from the closed position to the open position, and the clamping member 32 is in the unlocked state. At this time, the sample carrier 6 located at the mounting end 111 is driven by the third driving member 22 along the second direction 5 to move onto the clamping member 32, further reducing the possibility of damage to the sample carrier.

[0047] Please refer to Figures 5 and 6 , when the third driving member 22 drives the sample carrier 6 to move to the clamping member 32 along the second direction 5, the second driving member 21 drives the limiting member 31 along the second direction 5 from the open position to the closed position, and the clamping member 32 locks the sample carrier 6. It should be noted that when the third driving member 22 drives the sample carrier 6 to move to the clamping member 32 along the second direction 5, the second driving member 21 moves along the second direction 5 away from the carrier 3, and can drive the limiting member 31 from the open position to the closed position, and the clamping member 32 is in a locked state (the state at this time is as shown in FIG. Figure 5 as shown) to lock the sample carrier 6.

[0048] Please refer to Figure 6, the mounting assembly 2 also includes a pressing member 23, the sample carrier holding device has a shell 9, the pressing member 23 is located on the outer surface of the shell 9, and the pressing member 23 is used to drive the second driving member 21 and the third driving member 22 to move along the second direction 5. In an alternative exemplary embodiment, the pressing member 23 is communicatively connected with the second driving member 21 and the third driving member 22. The user sends a start signal by pressing the pressing member 23, and the second driving member 21 and the third driving member 22 start to move along the second direction 5 after receiving the start signal through the signal receiver. Of course, in other embodiments, the pressing member 23 and the second driving member 21 and the third driving member 22 can also be connected through a circuit. Those skilled in the art can configure the connection method of the pressing member 23 and the second driving member 21 and the third driving member 22 according to actual conditions, and the present invention is not limited to this. The specific structure and principle of the signal receiver can refer to the existing technology, and the present invention will not elaborate on it.

[0049] Please continue to refer to Figure 6 The sample carrier storage device further includes a second connector 8 located on the outer surface of the housing 9 and configured to connect the sample carrier storage device to the machine. It should be noted that a user can pull the second connector 8 to open the housing 9 of the sample carrier storage device, thereby placing the sample carriers 6 sequentially arranged along the first direction 4 into the storage compartment 11.

[0050] The following combination Figures 1 to 6 , further illustrating the principle of use of the sample carrier storage device provided in this embodiment. The user presses the pressing member 23, the second driving member 21 moves along the second direction 5 toward the direction of the carrier 3, driving the limit member 31 to move from the closed position to the open position, and the clamping member 32 is in the unlocked state (the state at this time is as shown in FIG. Figure 4 At the same time, the third driving member 22 moves along the second direction 5 toward the direction close to the carrier 3, driving the sample carrier 6 located at the mounting end 111 to move onto the clamping member 32; then, the second driving member 21 moves along the second direction 5 toward the direction away from the carrier 3, driving the limit member 31 to move from the open position to the closed position, and the clamping member 32 locks the sample carrier 6 (the state at this time is as shown in FIG. Figure 5 shown).

[0051] In summary, the sample carrier storage device provided by the present invention includes: a storage component, a mounting component and a carrier; the storage component includes a storage bin, the extension direction of the storage bin is a first direction, and the direction intersecting the first direction at an angle is a second direction; the storage bin has a mounting end, and the storage bin is used to store a plurality of sample carriers arranged in sequence from the mounting end along the first direction; the carrier is arranged on one side of the storage bin along the second direction; the mounting component is used to move the sample carrier located at the mounting end to the carrier.

[0052] With this configuration, the sample carriers are arranged in sequence along the first direction in the storage bin, and users do not need to clamp the sample carriers, which optimizes the installation steps of the sample carriers and improves the installation efficiency of the sample carriers. At the same time, the sample carriers are installed on the carrier through the installation component, which avoids deformation of the sample carriers during the installation process, reduces the loss of the sample carriers during the transfer and installation process, and improves the installation success rate of the sample carriers.

[0053] The above description is only a description of the preferred embodiments of the present invention and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A sample carrier storage device, characterized in that: include: Storage components, mounting components, and carriers; The storage assembly includes a storage bin, wherein the extension direction of the storage bin is a first direction, and the direction intersecting the first direction at an angle is a second direction; The storage bin has a mounting end, and the storage bin is used to store a plurality of sample carriers arranged sequentially along the first direction from the mounting end; The carrier is arranged on one side of the storage bin along the second direction; The mounting assembly is used to move the sample carrier located at the mounting end to the stage; The storage assembly further includes a first connecting member and a first driving member; The first connecting member is accommodated in the storage bin and is movably arranged along the first direction; One end of the first connecting member abuts against the sample carrier away from the mounting end along the first direction, and the other end of the connecting member is connected to the first driving member; The carrier includes a limiting member and a clamping member; the limiting member is movably arranged between a closed position and an open position along the second direction; the clamping member is detachably connected to the sample carrier; The mounting assembly includes a second driving member and a third driving member; the second driving member is movable along the second direction, and when the second driving member moves, it drives the limit member to move along the second direction between the closed position and the open position; the third driving member is movable along the second direction, and when the third driving member moves, it drives the sample carrier located at the mounting end to move onto the clamping member.

2. The sample carrier storage device according to claim 1, wherein: The storage bin has a fixed end, and the fixed end and the mounting end are arranged opposite to each other along the first direction; One end of the first driving member is connected to the first connecting member, and the other end of the first driving member is connected to the fixed end. The first driving member is used to drive the first connecting member to move along the first direction.

3. The sample carrier storage device according to claim 1, wherein: When the second driving member drives the limiting member to move from the closed position to the open position along the second direction, the third driving member drives the sample carrier at the mounting end to move onto the clamping member along the second direction.

4. The sample carrier storage device according to claim 3, wherein: When the third driving member drives the sample carrier to move to the clamping member along the second direction, the second driving member drives the limiting member to move from the open position to the closed position along the second direction, and the clamping member locks the sample carrier.

5. The sample carrier storage device according to claim 1, wherein: The mounting assembly further includes a pressing member. The sample carrier holding device has a shell. The pressing member is located on an outer surface of the shell. The pressing member is used to drive the second driving member and the third driving member to move along the second direction.

6. The sample carrier storage device according to claim 5, characterized in that: The sample carrier storage device further includes a second connecting member, which is located on the outer surface of the shell and is used to connect the sample carrier storage device to the machine platform.

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