A method for desoldering a target material component with welding defects

Abstract

The present invention relates to a method for desoldering a welding defect target assembly, the desoldering method comprising: assembling the welding defect target assembly and a gasket, and then sequentially performing a first extrusion and a second extrusion to obtain a separated target and a backing plate; the first extrusion is to set a first pad on the backing plate of the welding defect target assembly for extrusion; the second extrusion is to set a second pad on the backing plate after the first extrusion for extrusion; the diameter of the first pad is greater than the diameter of the second pad. The desoldering method provided by the present invention realizes efficient desoldering of the welding defect target assembly by adopting a specific extrusion process and an extrusion assembly, so that the welding surfaces of the target and the backing plate after desoldering can be subjected to secondary welding after being leveled and machined.

Description

Technical Field

[0001] The invention relates to the field of target materials, and in particular to a method for desoldering a target material component with welding defects. Background Art

[0002] At present, as a key raw material required for sputtering coating, the target assembly usually needs to be welded to the backing plate during the preparation process, such as diffusion welding, brazing, etc.

[0003] For example, CN110565057A discloses a method for binding a TFT target material to a copper backplane, including the following steps: 1) material preparation for standby use; 2) heating pretreatment: heating the target blank and the backplane simultaneously; 3) metallization pretreatment: ultrasonic indium coating pretreatment of the target blank and the backplane; 4) binding and bonding treatment: injecting indium solder into the welding surface of the backplane, adjusting the position of the target blank so that the target blank is attached to the binding area of ​​the backplane at a certain tilt angle. The binding method of this scheme can effectively improve the binding quality of the TFT target material, so that the welding rate of the bound target material is as high as 98.5%.

[0004] CN111822847A discloses a method for rotating friction welding of a target assembly, comprising the following steps: S1 pre-welding treatment: grinding the end faces of target A and target B to be welded, and performing pre-welding treatment on the end faces of target A and target B to be welded; S2 target assembly: clamping target A and target B at the rotating end and sliding end of the friction welding machine, respectively, and setting welding parameters; S3 target welding: running the friction welding machine to perform friction welding of target A and target B, rotating the target installed at the rotating end, sliding the target installed at the sliding end to contact the target installed at the rotating end, and adding a telescopic contact to perform top contact treatment on the weld during the contact interface welding, and the top contact treatment is specifically: retreating the axial shortening amount of 0.5-1mm 1-2s after the start of the contact interface welding, contacting the overflow flash part of the weld by the telescopic contact, and resetting after maintaining for 1-2s. This scheme can improve the consumption of rotary friction welding targets, reduce the overflow flash of the weld, and improve the strength of the rotary friction welding joint.

[0005] However, the existing welding methods cannot guarantee that the specified welding requirements can be met 100% during the welding process, and defective products still exist. However, the defective products still have certain utilization value. Currently, the common treatment method for non-compliant target material components is to remove the back plate by turning, and then weld the target material and the new back plate to bind them. Obviously, this results in a waste of back plate materials. Summary of the invention

[0006] In view of the problems existing in the prior art, the purpose of the present invention is to provide a method for desoldering a welding defect target assembly to solve the current problem of difficulty in desoldering when recycling welding defect target materials, while also avoiding the waste of backing plates.

[0007] To achieve this object, the present invention adopts the following technical solutions:

[0008] The present invention provides a desoldering method for a welding defective target material assembly, the desoldering method comprising:

[0009] Assembling the welding defect target assembly and the gasket, and then sequentially performing a first extrusion and a second extrusion to obtain a separated target and a backing plate;

[0010] The first extrusion is to set a first cushion block on the back plate of the welding defective target assembly for extrusion;

[0011] The second extrusion is to arranging a second cushion block on the back plate after the first extrusion for extrusion;

[0012] The diameter of the first cushion block is greater than the diameter of the second cushion block.

[0013] The desoldering method provided by the present invention realizes efficient desoldering of target material components with welding defects by adopting a specific extrusion process and an extrusion component. After desoldering, the back plate and the target material welding surface can be reworked and re-welded, thereby avoiding waste of back plate materials.

[0014] In the present invention, the first pad on the back plate needs to be removed when performing the second extrusion, and then the second pad is set for the second extrusion, that is, the first pad in this application corresponds to the first extrusion process, and the second pad corresponds to the second extrusion process.

[0015] As a preferred technical solution of the present invention, the welding defect target material assembly includes a target material and a back plate after hot isostatic pressing welding.

[0016] In the present invention, the welding defect target material assembly is obtained by diffusion pressure welding (such as hot isostatic pressing welding, but excluding diffusion welding with an intermediate layer). This is because when the target material assembly is brazed, the backing plate and the target material are severely deformed or even torn, and there is no separation between the deformed or torn backing plate and the target material.

[0017] In the present invention, the welding defect target assembly refers to a target and a back plate whose welding bonding rate is ≤ 99%.

[0018] In the present invention, the target material is a titanium target material.

[0019] In the present invention, the material of the back plate can be a copper alloy, a copper back plate, a titanium or titanium alloy back plate.

[0020] If the solution of the present invention is used for hot isostatic pressing welding of tantalum target and aluminum target, the product will gradually deform as the pressure is pressed down during desoldering, and the product will not separate. That is, in the present invention, the tensile stress of the target material and the tensile stress of the back plate are both greater than the meshing force between the target material and the back plate, so as to ensure that the target material and the back plate can withstand the extrusion effect during the desoldering process.

[0021] As a preferred technical solution of the present invention, the first extrusion is performed at a constant pressure after the pressing head and the first cushion block come into contact.

[0022] Preferably, the constant pressure is provided by an oil hydraulic press.

[0023] Preferably, the constant pressure is 200-315t, for example, it can be 200t, 202t, 204t, 206t, 208t, 210t, 212t, 214t, 216t, 218t, 220t, 222t, 224t, 226t, 228t, 230t, 232t, 234t, 236t, 238t, 240t, 242t, 244t, 246t, 248t, 250t, 252t, 254t, 256t, 258t , 260t, 262t, 264t, 266t, 268t, 270t, 272t, 274t, 276t, 278t, 280t, 282t, 284t, 286t, 288t, 290t, 292t, 294t, 296t, 298t, 300t, 302t, 304t, 306t, 308t, 310t, 312t, 314t or 315t, but are not limited to the listed values, and other unlisted values ​​within the range are equally applicable.

[0024] As a preferred technical solution of the present invention, the vertical distance that the pressure head travels after the pressure head contacts the first cushion block in the first extrusion is 4-6 cm, for example, it can be 4 cm, 4.05 cm, 4.1 cm, 4.15 cm, 4.2 cm, 4.25 cm, 4.3 cm, 4.35 cm, 4.4 cm, 4.45 cm, 4.5 cm, 4.55 cm, 4.6 cm, 4.65 cm, 4.7 cm, 4.75 cm, 4.8 cm, 4.85 cm, 4.9 cm, m, 4.95cm, 5cm, 5.05cm, 5.1cm, 5.15cm, 5.2cm, 5.25cm, 5.3cm, 5.35cm, 5.4cm, 5.45cm, 5.5cm, 5.55cm, 5.6cm, 5.65cm, 5.7cm, 5.75cm, 5.8cm, 5.85cm, 5.9cm, 5.95cm or 6cm, etc., but are not limited to the listed values, and other unlisted values ​​within the range are equally applicable.

[0025] As a preferred technical solution of the present invention, the diameter of the first cushion block is 50-55% of the diameter of the back plate, for example, it can be 50%, 50.1%, 50.2%, 50.3%, 50.4%, 50.5%, 50.6%, 50.7%, 50.8%, 50.9%, 51%, 51.1%, 51.2%, 51.3%, 51.4%, 51.5%, 51.6%, 51.7%, 51.8%, 51.9%, 52%, 52.1%, 52.2%, 52.3%, 52.4%, 52.5%, 52.6%, 52.7%, 52.8%, 52.9%, 53.1%, 53.2%, 53.3%, 53.4%, 53.5%, 53.6%, 53.7%, 53.8%, 53.9%, 54.1%, 54.2%, 54.3%, 54.4%, 54.5%, 54.6%, 54.7%, 54.8%, 54.9%, 55. .4%, 52.5%, 52.6%, 52.7%, 52.8%, 52.9%, 53%, 53.1%, 53.2%, 53.3%, 53.4%, 53.5%, 53.6%, 53.7%, 53.8%, 53.9%, 54%, 54.1%, 54.2%, 54.3%, 54.4%, 54.5%, 54.6%, 54.7%, 54.8%, 54.9% or 55%, etc., but are not limited to the listed values, and other unlisted values ​​within the range are also applicable.

[0026] Preferably, in the first extrusion, center lines of the first cushion block, the back plate and the pressing head coincide with each other.

[0027] As a preferred technical solution of the present invention, the second extrusion is performed with a constant pressure after the pressing head and the second cushion block come into contact.

[0028] Preferably, the constant pressure is provided by an oil hydraulic press.

[0029] Preferably, the constant pressure is 200-315t, for example, it can be 200t, 202t, 204t, 206t, 208t, 210t, 212t, 214t, 216t, 218t, 220t, 222t, 224t, 226t, 228t, 230t, 232t, 234t, 236t, 238t, 240t, 242t, 244t, 246t, 248t, 250t, 252t, 254t, 256t, 258t , 260t, 262t, 264t, 266t, 268t, 270t, 272t, 274t, 276t, 278t, 280t, 282t, 284t, 286t, 288t, 290t, 292t, 294t, 296t, 298t, 300t, 302t, 304t, 306t, 308t, 310t, 312t, 314t or 315t, but are not limited to the listed values, and other unlisted values ​​within the range are equally applicable.

[0030] As a preferred technical solution of the present invention, the vertical distance traveled by the pressure head after the pressure head contacts the second pad in the second extrusion is 4-6 cm, for example, it can be 4 cm, 4.05 cm, 4.1 cm, 4.15 cm, 4.2 cm, 4.25 cm, 4.3 cm, 4.35 cm, 4.4 cm, 4.45 cm, 4.5 cm, 4.55 cm, 4.6 cm, 4.65 cm, 4.7 cm, 4.75 cm, 4.8 cm, 4.85 cm, 4.9 cm m, 4.95cm, 5cm, 5.05cm, 5.1cm, 5.15cm, 5.2cm, 5.25cm, 5.3cm, 5.35cm, 5.4cm, 5.45cm, 5.5cm, 5.55cm, 5.6cm, 5.65cm, 5.7cm, 5.75cm, 5.8cm, 5.85cm, 5.9cm, 5.95cm or 6cm, etc., but are not limited to the listed values, and other unlisted values ​​within the range are equally applicable.

[0031] As a preferred technical solution of the present invention, the diameter of the second cushion block is 22-25% of the diameter of the backplate, for example, it can be 22%, 22.1%, 22.2%, 22.3%, 22.4%, 22.5%, 22.6%, 22.7%, 22.8%, 22.9%, 23%, 23.1%, 23.2%, 23.3%, 23.4%, 23.5%, 23.6%, 23.7%, 23.8%, 23.9%, 24%, 24.1%, 24.2%, 24.3%, 24.4%, 24.5%, 24.6%, 24.7%, 24.8%, 24.9% or 25%, etc., but is not limited to the listed values, and other values ​​not listed within the range are also applicable.

[0032] Preferably, in the second extrusion, the center lines of the second cushion block, the back plate and the pressing head coincide with each other.

[0033] In the present invention, the thickness of the first cushion block and the second cushion block can be 27-30mm, for example, it can be 27mm, 27.1mm, 27.2mm, 27.3mm, 27.4mm, 27.5mm, 27.6mm, 27.7mm, 27.8mm, 27.9mm, 28mm, 28.1mm, 28.2mm, 28.3mm, 28.4mm, 28.5mm, 28.6mm, 28.7mm, 28.8mm, 28.9mm, 29mm, 29.1mm, 29.2mm, 29.3mm, 29.4mm, 29.5mm, 29.6mm, 29.7mm, 29.8mm, 29.9mm or 30mm, but is not limited to the listed values, and other values ​​not listed within the range are also applicable.

[0034] In the present invention, the contact between the pressure head and the pad means that the vertical distance between the pressure head and the pad is ≤3mm, for example, it can be 3mm, 2.8mm, 2.6mm, 2.4mm, 2.2mm, 2mm or 1mm, but is not limited to the listed values, and other unlisted values ​​within the range are also applicable.

[0035] As a preferred technical solution of the present invention, the gasket is an annular gasket.

[0036] Preferably, the inner diameter of the annular gasket is greater than the diameter of the target material.

[0037] Preferably, the outer diameter of the annular gasket is less than or equal to the diameter of the back plate.

[0038] In the present invention, the depth of the gasket is greater than the thickness of the target material, so that after the target material assembly and the gasket are assembled, the gasket supports the back plate, and the target material is in a suspended state, providing a certain space for subsequent extrusion. At this time, the target material assembly should ensure that the diameter of the target material is less than the diameter of the back plate. Specifically in the present invention, the depth of the gasket can be 1.25-1.7 times the thickness of the target material, for example, it can be 1.25 times, 1.26 times, 1.27 times, 1.28 times, 1.29 times, 1.3 times, 1.31 times, 1.32 times, 1.33 times, 1.34 times, 1.35 times, 1.36 times, 1.37 times, 1.38 times, 1 .39 times, 1.4 times, 1.41 times, 1.42 times, 1.43 times, 1.44 times, 1.45 times, 1.46 times, 1.47 times, 1.48 times, 1.49 times, 1.5 times, 1.51 times, 1.52 times, 1.53 times, 1.54 times, 1.55 times, 1.56 times, 1.57 times, 1.58 times, 1.59 times, 16 times, 1.61 times, 1.62 times, 1.63 times, 1.64 times, 1.65 times, 1.66 times, 1.67 times, 1.68 times, 1.69 times or 1.7 times, but are not limited to the listed values, and other values ​​not listed in this range are also applicable.

[0039] As a preferred technical solution of the present invention, the desoldering method comprises:

[0040] Assembling the welding defect target assembly and the gasket, and then sequentially performing a first extrusion and a second extrusion to obtain a separated target and a backing plate;

[0041] The welding defect target assembly comprises a target material and a backing plate welded by hot isostatic pressing; the gasket is an annular gasket, the inner diameter of the annular gasket is greater than the diameter of the target material, and the outer diameter of the annular gasket is less than or equal to the diameter of the backing plate;

[0042] The first extrusion is to set a first pad on the back plate of the welding defect target assembly for extrusion, and the pressure head and the first pad are contacted to extrude at a constant pressure, and the constant pressure is provided by an oil hydraulic press. The constant pressure is 200-315t, and the vertical distance traveled by the pressure head after the pressure head and the first pad are contacted is 4-6cm;

[0043] The second extrusion is to arranging a second cushion block on the back plate after the first extrusion for extrusion, and the pressure head is extruded at a constant pressure after contacting the second cushion block, and the constant pressure is provided by a hydraulic press, and the constant pressure is 200-315t, and the vertical distance traveled by the pressure head after contacting the second cushion block is 4-6cm;

[0044] The diameter of the first pad is greater than the diameter of the second pad, the diameter of the first pad is 50-55% of the diameter of the back plate, and the center lines of the first pad, the back plate and the pressure head coincide with each other in the first extrusion; the diameter of the second pad is 22-25% of the diameter of the back plate, and the center lines of the second pad, the back plate and the pressure head coincide with each other.

[0045] Compared with the prior art solutions, the present invention has the following beneficial effects:

[0046] The desoldering method provided by the present invention adopts a combination of a pad of a specific size and a pressure head pressure and a downward stroke of the pressure head, and first adopts a specific large-area pressure block for the first extrusion to achieve pre-separation of the target material and the back plate, and then uses a small-area pressure block for the second extrusion to achieve complete separation of the target material and the back plate, without the need to perform multiple pressure changes on different extrusion points, which significantly simplifies the desoldering process, and the welding surfaces of the target material and the back plate obtained can be subjected to secondary welding after being leveled and machined. DETAILED DESCRIPTION

[0047] To better illustrate the present invention and facilitate understanding of the technical solution of the present invention, typical but non-limiting embodiments of the present invention are as follows:

[0048] Example 1

[0049] This embodiment provides a method for desoldering a target material assembly with welding defects, and the desoldering method comprises:

[0050] Assembling the welding defect target assembly and the gasket, and then sequentially performing a first extrusion and a second extrusion to obtain a separated target and a backing plate;

[0051] The welding defect target assembly includes a titanium target with a diameter of 434 mm and a thickness of 14.8 mm and a copper back plate with a diameter of 534 mm, with a welding bonding rate of 75%, and is obtained by hot isostatic pressing; the gasket is an annular gasket, the inner diameter of the annular gasket is greater than the diameter of the target material, and the outer diameter of the annular gasket is less than or equal to the diameter of the back plate. At this time, the depth of the gasket is 1.5 times the thickness of the target material, that is, 22.2 mm. At this time, the inner diameter of the annular gasket can be directly taken as 450 mm, and the outer diameter can be taken as 534 mm.

[0052] The first extrusion is to set a first pad on the back plate of the welding defect target assembly for extrusion, and the pressure head and the first pad are contacted to perform extrusion at a constant pressure, and the constant pressure is provided by a hydraulic press to provide a constant pressure of 300t, and the vertical distance traveled by the pressure head after the pressure head and the first pad are contacted is 4.3cm;

[0053] The second extrusion is to arranging a second cushion block on the back plate after the first extrusion for extrusion, and the pressure head is extruded at a constant pressure after contacting the second cushion block, and the constant pressure is provided by a hydraulic press, and the constant pressure is 200t. After the pressure head contacts the second cushion block, the vertical distance traveled by the pressure head is 6cm;

[0054] The diameter of the first pad is greater than the diameter of the second pad. The diameter of the first pad is 52% of the diameter of the back plate, which is 277.68 mm. In the first extrusion, the center lines of the first pad, the back plate and the pressure head coincide with each other. The diameter of the second pad is 23% of the diameter of the back plate, which is 122.82 mm. The center lines of the second pad, the back plate and the pressure head coincide with each other.

[0055] The thickness of the first cushion block and the second cushion block are both 30 mm.

[0056] After the above desoldering, the target material and the component are completely separated.

[0057] Example 2

[0058] This embodiment provides a method for desoldering a target material assembly with welding defects, and the desoldering method comprises:

[0059] Assembling the welding defect target assembly and the gasket, and then sequentially performing a first extrusion and a second extrusion to obtain a separated target and a backing plate;

[0060] The welding defect target assembly includes a titanium target with a diameter of 357 mm and a thickness of 12.6 mm and a copper back plate with a diameter of 460 mm, with a welding bonding rate of 65%, and is obtained by hot isostatic pressing; the gasket is an annular gasket, the inner diameter of the annular gasket is greater than the diameter of the target, and the outer diameter of the annular gasket is less than or equal to the diameter of the back plate. At this time, the depth of the gasket is 1.7 times the thickness of the target, that is, 21.42 mm. At this time, the inner diameter of the annular gasket can be directly taken as 380 mm, and the outer diameter can be taken as 440 mm.

[0061] The first extrusion is to set a first pad on the back plate of the welding defect target assembly for extrusion, and the pressure head and the first pad are contacted to perform extrusion at a constant pressure, and the constant pressure is provided by a hydraulic press. The constant pressure is 250t, and the vertical distance traveled by the pressure head after the pressure head and the first pad are contacted is 6cm;

[0062] The second extrusion is to set a second cushion block on the back plate after the first extrusion for extrusion, and the pressure head is extruded at a constant pressure after contacting the second cushion block. The constant pressure is provided by a hydraulic press, and the constant pressure is 315t. After the pressure head contacts the second cushion block, the vertical distance traveled by the pressure head is 4cm;

[0063] The diameter of the first pad is greater than the diameter of the second pad. The diameter of the first pad is 50% of the diameter of the back plate, which is 230 mm. In the first extrusion, the center lines of the first pad, back plate and pressure head coincide with each other. The diameter of the second pad is 24% of the diameter of the back plate, which is 110.4 mm. The center lines of the second pad, back plate and pressure head coincide with each other.

[0064] The thickness of the first cushion block and the second cushion block are both 27 mm.

[0065] After the above desoldering, the target material and the component are completely separated.

[0066] Example 3

[0067] This embodiment provides a method for desoldering a target material assembly with welding defects, and the desoldering method comprises:

[0068] Assembling the welding defect target assembly and the gasket, and then sequentially performing a first extrusion and a second extrusion to obtain a separated target and a backing plate;

[0069] The welding defect target assembly includes a target with a diameter of 434 mm and a thickness of 14.8 mm and a back plate with a diameter of 534 mm, with a welding bonding rate of 57%, and is obtained by hot isostatic pressing; the gasket is an annular gasket, the inner diameter of the annular gasket is greater than the diameter of the target, and the outer diameter of the annular gasket is less than or equal to the diameter of the back plate. At this time, the depth of the gasket is 1.25 times the thickness of the target, that is, 18.5 mm. At this time, the inner diameter of the annular gasket can be directly taken as 450 mm, and the outer diameter can be taken as 534 mm.

[0070] The first extrusion is to set a first pad on the back plate of the welding defect target assembly for extrusion, and the pressure head and the first pad are contacted to perform extrusion at a constant pressure, and the constant pressure is provided by an oil hydraulic press. The constant pressure is 250t, and the vertical distance traveled by the pressure head after the pressure head and the first pad are contacted is 4.7cm;

[0071] The second extrusion is to set a second cushion block on the back plate after the first extrusion for extrusion, and the pressure head is extruded at a constant pressure after contacting the second cushion block. The constant pressure is provided by a hydraulic press, and the constant pressure is 243t. After the pressure head contacts the second cushion block, the vertical distance traveled by the pressure head is 5.3cm;

[0072] The diameter of the first pad is greater than the diameter of the second pad. The diameter of the first pad is 55% of the diameter of the back plate, which is 293.7 mm. In the first extrusion, the center lines of the first pad, the back plate and the pressure head coincide with each other. The diameter of the second pad is 22% of the diameter of the back plate, which is 117.48 mm. The center lines of the second pad, the back plate and the pressure head coincide with each other.

[0073] The thickness of the first cushion block and the second cushion block are both 29 mm.

[0074] After the above desoldering, the target material and the component are completely separated.

[0075] Example 4

[0076] This embodiment provides a method for desoldering a target material assembly with welding defects, and the desoldering method comprises:

[0077] Assembling the welding defect target assembly and the gasket, and then sequentially performing a first extrusion and a second extrusion to obtain a separated target and a backing plate;

[0078] The welding defect target assembly includes a target with a diameter of 224 mm and a thickness of 8.6 mm and a back plate with a diameter of 334 mm, and the welding bonding rate is 66%, which is obtained by hot isostatic pressing; the gasket is an annular gasket, the inner diameter of the annular gasket is greater than the diameter of the target material, and the outer diameter of the annular gasket is less than or equal to the diameter of the back plate. At this time, the depth of the gasket is 1.33 times the thickness of the target material, that is, 11.44 mm. At this time, the inner diameter of the annular gasket can be directly taken as 244 mm, and the outer diameter can be taken as 334 mm.

[0079] The first extrusion is to set a first pad on the back plate of the welding defect target assembly for extrusion, and the pressure head and the first pad are contacted to perform extrusion at a constant pressure, and the constant pressure is provided by a hydraulic press. The constant pressure is 226t, and the vertical distance traveled by the pressure head after the pressure head and the first pad are contacted is 5.3cm;

[0080] The second extrusion is to arranging a second cushion block on the back plate after the first extrusion for extrusion, and the pressure head is extruded at a constant pressure after contacting the second cushion block, and the constant pressure is provided by a hydraulic press, and the constant pressure is 276t. After the pressure head contacts the second cushion block, the vertical distance traveled by the pressure head is 4.7cm;

[0081] The diameter of the first pad is greater than the diameter of the second pad. The diameter of the first pad is 54% of the diameter of the back plate, which is 180.36 mm. In the first extrusion, the center lines of the first pad, the back plate and the pressure head coincide with each other. The diameter of the second pad is 25% of the diameter of the back plate, which is 83.5 mm. The center lines of the second pad, the back plate and the pressure head coincide with each other.

[0082] The thickness of the first cushion block and the second cushion block are both 28 mm.

[0083] After the above desoldering, the target material and the component are completely separated.

[0084] Example 5

[0085] The only difference from Example 1 is that the target assembly is replaced with a tantalum target and copper backing plate assembly of equal size. After the above-mentioned desoldering, the tantalum target and the copper backing plate cannot be separated, and only the tantalum target is pulled and deformed.

[0086] Example 6

[0087] The only difference from Example 1 is that the target assembly is replaced with an aluminum target and titanium back plate assembly of equal size. After the above-mentioned desoldering, the aluminum target and the titanium back plate cannot be separated, and only the aluminum target is pulled and deformed.

[0088] Example 7

[0089] The only difference from Example 1 is that the center line of the first pad does not coincide with the center of the back plate and the pressure head, that is, a deviation occurs, but the surface of the pad and the surface of the back plate are kept coincident. After the above-mentioned desoldering, the titanium material and the copper back plate cannot be separated, and there is still adhesion in some areas.

[0090] Example 8

[0091] The only difference from Example 1 is that the center line of the second cushion block is not coincident with the center of the back plate and the pressure head, that is, there is a deviation, but the surface of the cushion block is kept coincident with the surface of the back plate.

[0092] After the above desoldering, the titanium material and the copper back plate cannot be separated, and there are still some areas that are adhered.

[0093] Example 9

[0094] The only difference from Example 1 is that the size of the second cushion block is replaced by the size of the first cushion block, that is, the size of the cushion block is the same during the two extrusion processes. After the above desoldering, the titanium material and the copper back plate cannot be separated, and there is still adhesion in some areas.

[0095] Example 10

[0096] The only difference from Example 1 is that the size of the first cushion block is replaced by the size of the second cushion block, that is, the size of the cushion block is the same during the two extrusion processes. After the above desoldering, the titanium material and the copper back plate cannot be separated, and there is still adhesion in some areas.

[0097] Embodiment 11

[0098] The only difference from Example 1 is that a target material with a welding bonding rate of 99.2% is selected for desoldering. Desoldering cannot be performed, and the treated target material and the back plate are still adhered together.

[0099] It can be seen from the results of the above embodiments that the desoldering method provided by the present invention achieves efficient desoldering of target material assemblies with welding defects by adopting a specific extrusion process and an extrusion assembly, so that the welding surfaces of the target material and the back plate after desoldering can be re-welded after simple machining.

[0100] It is stated that the present invention illustrates the detailed structural features of the present invention through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must rely on the above detailed structural features to be implemented. Those skilled in the art should understand that any improvement of the present invention, equivalent replacement of the components selected by the present invention, addition of auxiliary components, selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

[0101] The preferred embodiments of the present invention are described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the technical concept of the present invention, a variety of simple modifications can be made to the technical solution of the present invention, and these simple modifications all belong to the protection scope of the present invention.

[0102] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not further describe various possible combinations.

[0103] In addition, various embodiments of the present invention may be arbitrarily combined, and as long as they do not violate the concept of the present invention, they should also be regarded as the contents disclosed by the present invention.

Claims

1. A method for desoldering a target assembly with welding defects, characterized in that: The desoldering method comprises: The welding defect target assembly and the gasket are assembled, and then the first extrusion and the second extrusion are performed in sequence to obtain a separated titanium target and a backing plate; the gasket is an annular gasket; the inner diameter of the annular gasket is greater than the diameter of the target; the outer diameter of the annular gasket is less than or equal to the diameter of the backing plate; The first extrusion is to set a first cushion block on the back plate of the welding defective target assembly for extrusion; The second extrusion is to arranging a second cushion block on the back plate after the first extrusion for extrusion; The diameter of the first cushion block is greater than the diameter of the second cushion block; The diameter of the first pad is 50-55% of the diameter of the back plate; In the first extrusion, the center lines of the first cushion block, the back plate and the pressing head coincide with each other; The diameter of the second pad is 22-25% of the diameter of the back plate; In the second extrusion, the center lines of the second cushion block, the back plate and the pressing head coincide with each other.

2. The desoldering method according to claim 1, characterized in that: The welding defect target material assembly comprises a target material and a back plate welded by hot isostatic pressing.

3. The desoldering method according to claim 1, characterized in that: The first extrusion is performed at a constant pressure after the pressing head and the first cushion block come into contact.

4. The desoldering method according to claim 3, characterized in that: The constant pressure is provided by an oil hydraulic press.

5. The desoldering method according to claim 3, characterized in that: The constant pressure is 200-315t.

6. The desoldering method according to claim 3, characterized in that: During the first extrusion, the vertical distance traveled by the pressure head after the pressure head contacts the first cushion block is 4-6 cm.

7. The desoldering method according to claim 1, characterized in that: The second extrusion is performed by extruding with a constant pressure after the pressing head and the second cushion block come into contact.

8. The desoldering method according to claim 7, characterized in that: The constant pressure is provided by an oil hydraulic press.

9. The desoldering method according to claim 7, characterized in that: The constant pressure is 200-315t.

10. The desoldering method according to claim 7, characterized in that: During the second extrusion, the vertical distance traveled by the ram after the ram contacts the second cushion block is 4-6 cm.

11. The desoldering method according to claim 1, characterized in that: The desoldering method comprises: Assembling the welding defect target assembly and the gasket, and then sequentially performing a first extrusion and a second extrusion to obtain a separated target and a backing plate; The welding defect target assembly comprises a target material and a backing plate welded by hot isostatic pressing; the gasket is an annular gasket, the inner diameter of the annular gasket is greater than the diameter of the target material, and the outer diameter of the annular gasket is less than or equal to the diameter of the backing plate; The first extrusion is to set a first pad on the back plate of the welding defect target assembly for extrusion, and the pressure head and the first pad are contacted to extrude at a constant pressure, and the constant pressure is provided by an oil hydraulic press. The constant pressure is 200-315t, and the vertical distance traveled by the pressure head after the pressure head and the first pad are contacted is 4-6cm; The second extrusion is to arranging a second cushion block on the back plate after the first extrusion for extrusion, and the pressure head is extruded at a constant pressure after contacting the second cushion block, and the constant pressure is provided by a hydraulic press, and the constant pressure is 200-315t, and the vertical distance traveled by the pressure head after contacting the second cushion block is 4-6cm; The diameter of the first pad is greater than the diameter of the second pad, the diameter of the first pad is 50-55% of the diameter of the back plate, and the center lines of the first pad, the back plate and the pressure head coincide with each other in the first extrusion; the diameter of the second pad is 22-25% of the diameter of the back plate, and the center lines of the second pad, the back plate and the pressure head coincide with each other.