Calibration equipment and calibration methods

Abstract

The calibration device of the present application is used to calibrate the part to be calibrated, and the calibration device includes a carrier and a plurality of positioning members. The part to be calibrated is carried on the carrier; the positioning member can move within a predetermined stroke, and the predetermined stroke includes a target position. When a plurality of positioning members are located at the corresponding target position, the plurality of positioning members surround a predetermined positioning space, and the part to be calibrated is located in the positioning space and conflicts with the plurality of positioning members. The calibration device and calibration method of the present application carry the part to be calibrated by a carrier, and move it to the corresponding target position by a plurality of positioning members that can move within a predetermined stroke, so that the part to be calibrated is accurately positioned in the predetermined positioning space, and the position calibration of the part to be calibrated is quickly completed, so that the position of the part to be calibrated remains unchanged when it is grasped by a robot, so that when the robot grasps the part to be calibrated and moves it to the detection device, the part to be calibrated is always located at the same predetermined position on the detection device, thereby ensuring the detection effect and detection efficiency of the part to be calibrated.

Description

Technical Field

[0001] The present application relates to the field of detection technology, and in particular to a calibration device and a calibration method. Background Art

[0002] In the field of semiconductor testing, the DUT needs to be placed at a predetermined position on the carrier. However, due to the possible differences in the initial placement of different DUTs, when the robot grabs the DUT and moves it to the testing equipment, the DUT cannot be accurately located at the predetermined position. In addition, in order to meet the needs of accurate testing, the DUT needs to be repeatedly positioned before testing, which affects the testing efficiency. Summary of the invention

[0003] In view of this, embodiments of the present application provide a calibration device and a calibration method.

[0004] The calibration device of the embodiment of the present application is used to calibrate the part to be calibrated, and the calibration device includes a carrier and a plurality of positioning members. The part to be calibrated is carried on the carrier; the positioning member can move within a predetermined stroke, and the predetermined stroke includes a target position. When the plurality of positioning members are all located at the corresponding target positions, the plurality of positioning members enclose a predetermined positioning space, and the part to be calibrated is located in the positioning space and conflicts with the plurality of positioning members.

[0005] The calibration method of the embodiment of the present application is used to calibrate the part to be calibrated. The calibration method includes moving the part to be calibrated to a carrier by a manipulator so that the carrier carries the part to be calibrated; and controlling multiple positioning members to move to corresponding target positions within a predetermined stroke so that the part to be calibrated is located in a predetermined positioning space and conflicts with multiple positioning members.

[0006] The calibration device and calibration method of the embodiment of the present application carry the part to be calibrated by a carrier, and then move it to the corresponding target position by a plurality of positioning members that can move within a predetermined stroke, so that the part to be calibrated is accurately positioned in a predetermined positioning space, and the position calibration of the part to be calibrated is quickly completed. The position of the part to be calibrated remains unchanged when it is grasped by the manipulator, so that when the manipulator grasps the part to be calibrated and moves it to the detection device, the part to be calibrated is always located at the same predetermined position on the detection device, and there is no need to repeatedly position the part to be calibrated, thereby ensuring the detection effect and detection efficiency of the part to be calibrated.

[0007] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] In order to more clearly illustrate the implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0009] Figure 1 is a schematic diagram of the three-dimensional structure of a calibration device in certain embodiments of the present application;

[0010] Figure 2 is a schematic diagram of the three-dimensional structure of a calibration device in certain embodiments of the present application;

[0011] Figure 3 is a schematic diagram of a three-dimensional structure of a carrier in some embodiments of the present application;

[0012] Figure 4 It is a three-dimensional structural schematic diagram of a positioning member of certain embodiments of the present application from one viewing angle;

[0013] Figure 5 is a schematic diagram of a three-dimensional structure of a positioning member in some embodiments of the present application from another viewing angle;

[0014] Figure 6 is a schematic diagram of the three-dimensional structure of a part to be calibrated in certain embodiments of the present application;

[0015] Figure 7 is a schematic diagram of the three-dimensional structure of a base, a positioning member and a mounting member in certain embodiments of the present application; and

[0016] Figure 8 It is a flowchart of the calibration method of certain embodiments of the present application. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical solution and advantages of this application more clear, the following further describes this application in detail in conjunction with the accompanying drawings and implementation methods. It should be understood that the specific implementation methods described here are only used to explain this application and are not used to limit this application.

[0018] See also Figure 1 The calibration device 100 of the embodiment of the present application is used to calibrate the object to be calibrated 200, and the calibration device 100 includes a carrier 10 and a plurality of positioning members 20. The object to be calibrated 200 is carried on the carrier 10; the positioning members 20 can move within a predetermined stroke, and the predetermined stroke includes a target position. When the plurality of positioning members 20 are all located at the corresponding target positions, the plurality of positioning members 20 enclose a predetermined positioning space 21, and the object to be calibrated 200 is located in the positioning space 21 and conflicts with the plurality of positioning members 20.

[0019] The calibration device 100 of the embodiment of the present application carries the workpiece 200 to be calibrated through the carrier 10, and then moves through a plurality of positioning members 20 that can move within a predetermined stroke, so that the positioning members 20 move to the corresponding target position, so that the workpiece 200 to be calibrated is accurately positioned in the predetermined positioning space 21, and the position calibration of the workpiece 200 to be calibrated is quickly completed. The position of the workpiece 200 to be calibrated remains unchanged when it is grabbed by the manipulator 300, so that when the manipulator 300 grabs the workpiece 200 to be calibrated and moves it to the detection device (not shown), the workpiece 200 to be calibrated is always located at the same predetermined position on the detection device, and there is no need to repeatedly position the workpiece to be calibrated, thereby ensuring the detection effect and detection efficiency of the workpiece 200 to be calibrated.

[0020] See also Figure 2 The calibration device 100 of the embodiment of the present application includes a base 30, a carrier 10, a positioning member 20, a connecting member 40 and a mounting member 50.

[0021] The calibration device 100 is used to calibrate the part to be calibrated 200, so that the part to be calibrated 200 (such as the center of the part to be calibrated 200) moves to a predetermined position (such as the predetermined position is the position where the center of the manipulator 300 is located when the manipulator 300 grabs the part to be calibrated 200). The manipulator 300 grabs the part to be calibrated 200 at the predetermined position each time (the part to be calibrated 200 can also be a part to be tested by the testing device), and places the part to be calibrated 200 on the supporting platform of the testing device along a predetermined trajectory, so that the part to be calibrated 200 is located at a preset position of the supporting platform (such as the center of the part to be calibrated 200 is exactly located at the center of the supporting platform), ensuring the detection effect of the testing device on the part to be calibrated 200.

[0022] The base 30 includes a base plate 31 and a side plate 32. The base plate 31 includes a bearing surface 311. The side plate 32 is disposed on the bearing surface 311.

[0023] There are multiple side panels 32, such as four side panels 32, and the four side panels 32 form a rectangular receiving space, and the carrier 10 is arranged in the receiving space. For another example, there are three side panels 32, including a first side panel 321, a second side panel 322, and a third side panel 323. The first side panel 321 and the second side panel 322 are perpendicular to each other, and the second side panel 322 and the third side panel 323 are perpendicular to each other. A notch 324 is formed between the first side panel 321 and the third side panel 323. The notch 324 can facilitate the manipulator 300 to carry the calibrated part 200 in and out, and the width of the notch 324 can be greater than the maximum width of the calibrated part 200 (such as the maximum value of the distance between any two points on the edge of the calibrated part 200) to ensure that the calibrated part 200 can enter and exit from the notch 324. In this embodiment, the side panels 32 include a first side panel 321, a second side panel 322, and a third side panel 323.

[0024] Please combine Figure 3 The bearing member 10 is arranged on the bearing surface 311. The bearing member 10 includes a bearing plate 11 and a support column 12. The support column 12 is arranged on the bearing plate 11.

[0025] The supporting plate 11 includes an upper surface 111 and a lower surface 112 opposite to each other. The lower surface 112 contacts the supporting surface 311 .

[0026] The support column 12 extends from the upper surface 111 in a direction away from the upper surface 111. The support column 12 includes a support body 121 and a support platform 122, and the support platform 122 includes a support surface 123, a side surface 124, and a connecting surface 125. The side surface 124 is perpendicular to the upper surface 111, the support surface 123 is parallel to the upper surface 111, and the connecting surface 125 is inclined to connect the support surface 123 and the side surface 124. When the calibrated object 200 is placed on the support surface 123, due to the existence of the inclined connecting surface 125, the edge of the support surface 123 will not be too sharp, and it is not easy to cause damage when the calibrated object 200 contacts the support column 12.

[0027] There are multiple support columns 12, for example, there are 3, 4, 5, etc. support columns 12, and the support surfaces 123 of the multiple support columns 12 are located in the same plane to cooperate with the support of the part to be calibrated 200. It can be understood that when there are 3 support columns 12, the three support columns 12 need to form a triangular stable structure to ensure the load stability of the part to be calibrated 200. In the embodiment of the present application, there are 4 support columns 12 supporting each part to be calibrated 200, and they form a rectangle, so as to provide stable support for the part to be calibrated 200.

[0028] The bearing plate 11 includes a first bearing portion 113 and a second bearing portion 114, wherein the first bearing portion 113 surrounds the second bearing portion 114, and the supporting column 12 includes a first supporting column 126 and a second supporting column 127, wherein the first supporting column 126 is disposed on the first bearing portion 113, and the second supporting column 127 is disposed on the second bearing portion 114. The number of the first supporting column 126 and the second supporting column 127 may both be 4, and the supporting surface 123 of the first supporting column 126 is higher than the supporting surface 123 of the second supporting column 127. The first supporting column 126 and the second supporting column 127 are respectively used to carry the to-be-calibrated parts 200 of different sizes, and the size of the to-be-calibrated parts 200 carried by the first supporting column 126 is larger than the size of the to-be-calibrated parts 200 carried by the second supporting column 127. For example, the size of the to-be-calibrated parts 200 carried by the first supporting column 126 is 8 inches, and the size of the to-be-calibrated parts 200 carried by the second supporting column 127 is 6 inches. In this way, one calibration device 100 can realize the calibration of the to-be-calibrated parts 200 of different sizes.

[0029] It can be understood that in other embodiments, the supporting plate 11 may also include more supporting parts (such as a third supporting part, a fourth supporting part, etc.), and corresponding supporting columns (such as a third supporting column, a fourth supporting column, etc.) are provided, so as to cooperate in realizing the calibration of the calibrated parts 200 of more sizes (such as 4 inches, 12 inches, etc.), and there is no limitation here.

[0030] The carrier plate 11 is also provided with a plurality of mounting holes 115. The connector 40 is provided with the mounting holes 115 to connect the carrier plate 11 and the base plate 31. The connector 40 may include a fixing screw 41 and a top screw 42 ( Figure 7 ). The fixing screw 41 is used to fix the carrier plate 11 and the base plate 31, and the top screw 42 can move vertically on the carrier surface 311 to adjust the levelness of the carrier plate 11, thereby ensuring that the plane where the support surface 123 of the support column 12 is located remains horizontal, thereby improving the load-bearing stability. When adjusting the levelness of the carrier plate 11, a level meter or other device can be used to determine whether it is horizontal, thereby accurately adjusting the levelness of the carrier plate 11.

[0031] The number of the top screws 42 can be multiple. For example, when the supporting plate 11 is rectangular, there are four top screws 42, which are respectively arranged on the four corners of the supporting plate 11 and located on the diagonal line. In this way, it is convenient to adjust the horizontality of the top screws 42; the number of the top screws 42 can also be 8, with each 2 as a group, divided into four groups and respectively arranged on the four corners of the supporting plate 11, and the midpoint of the connecting line of the two top screws 42 in each group is located on the diagonal line. In this way, while facilitating the adjustment of the horizontality of the top screws 42, the fixing strength of the adjusted supporting plate 11 and the substrate 31 can be improved.

[0032] Please combine Figure 2 , Figure 4 and Figure 5 The positioning member 20 is disposed on the side plate 32. The positioning member 20 includes a driving portion 22 and a moving portion 23. The driving portion 22 and the moving portion 23 are connected, and the driving portion 22 is used to drive the moving portion 23 to move within a predetermined stroke to change the shape and size of the positioning space 21.

[0033] There are multiple positioning members 20. For example, the positioning members 20 include a first positioning member 24, a second positioning member 25 and a third positioning member 26, and the first positioning member 24, the second positioning member 25 and the third positioning member 26 form an acute triangle, so that after the first positioning member 24, the second positioning member 25 and the third positioning member 26 move to the target position within the corresponding predetermined stroke, the part to be calibrated 200 is just located in the predetermined positioning space 21 and cannot move further, thereby ensuring the accuracy of positioning. The first positioning member 24, the second positioning member 25 and the third positioning member 26 can be respectively arranged on the first side plate 321, the second side plate 322 and the third side plate 323. For another example, there can be more positioning members 20, such as 4, 5, 6, 7, 8, 9, etc., as long as the part to be calibrated 200 can be stably confined within the predetermined positioning space 21.

[0034] In the embodiment of the present application, there are 8 positioning members 20, of which 3 positioning members 20 are located on the first side plate 321, 2 positioning members 20 are located on the second side plate 322, and 3 positioning members 20 are located on the third side plate 323. The positioning members 20 will not block the gap 324, thereby ensuring that the manipulator 300 can enter and exit the gap 324 without hindrance. Among them, the positioning member 20 located on the first side plate 322, one positioning member 20 on the second side plate 321, and one positioning member 20 on the third side plate 323 form an acute triangle. For example, the extension direction of the predetermined stroke of the positioning member 20 on the second side plate 322 is perpendicular to the second side plate 322. The angle between the extension direction of the predetermined stroke of the positioning member 20 on the first side plate 321 for forming an acute triangle and the extension direction of the predetermined stroke of the positioning member 20 on the third side plate 323 for forming an acute triangle (i.e., the angle between the first positioning member 24 and the third positioning member 26) can be 110 degrees, 120 degrees, etc.

[0035] See also Figure 6 The part to be calibrated 200 of the present application is a wafer, which includes a wafer body 201 and an annular mounting portion 202 supporting the wafer body 201. The annular mounting portion 202 has a specified shape, and 8 positioning members 20 are arranged according to the specified shape, thereby further improving the positioning effect of the wafer.

[0036] In another embodiment, the carrier 10 and the positioning member 20 are arranged on the carrier surface 311. The carrier 10 may include a carrier plate 11, and the carrier plate 11 includes an upper surface 111 and a lower surface 112 opposite to each other, and the lower surface 112 is in contact with the carrier surface 311. The carrier plate 11 is provided with an opening (not shown) formed by being recessed from the upper surface 111 to the lower surface 112. After the manipulator 300 moves the part to be calibrated 200 to the top of the carrier 10, it moves toward the upper surface 111 so that the part to be calibrated 200 is carried on the upper surface 111, and the manipulator 300 moves into the opening without contacting the carrier 10, thereby preventing the manipulator 300 from colliding with the carrier 10 and causing damage.

[0037] Then, the plurality of positioning members 20 disposed on the bearing surface 311 move in coordination, so that the workpiece 200 to be calibrated moves to the predetermined positioning space 21 (i.e., is located at the predetermined position), thereby completing the calibration of the workpiece 200 to be calibrated. At this time, the robot 300 moves again in a direction away from the lower surface 112 to lift the workpiece 200 to be calibrated, thereby moving the workpiece 200 to be calibrated to the bearing platform for detection.

[0038] In another embodiment, the positioning member 20 may be directly disposed on the upper surface 111 of the supporting plate 11 , so that the positioning and detection of the object to be calibrated 200 can be achieved without providing the base 30 .

[0039] The driving part 22 can be a cylinder or a stepping motor, etc., which has high positioning accuracy.

[0040] The moving part 23 includes a positioning surface 231. After the multiple moving parts 23 move to the corresponding target positions, the multiple positioning surfaces 231 can enclose the positioning space 21. The positioning surface 231 is the surface that contacts the part to be calibrated 200 after positioning. The part of the part to be calibrated 200 that contacts the positioning surface 231 has the same curvature as the positioning surface 231. For example, if the part of the part to be calibrated 200 that contacts is a plane, the positioning surface 231 is also a plane; if the part of the part to be calibrated 200 that contacts is a curved surface, the positioning surface 231 is also a curved surface with the same curvature. In this way, the positioning effect can be improved, and the contact area between the positioning surface 231 and the part to be calibrated 200 that contacts is too small, thereby damaging the part to be calibrated 200 or the positioning part 20.

[0041] In other embodiments, the portion of the part to be calibrated 200 that is in contact with the positioning surface 231 is different from the curvature of the positioning surface 231. For example, the positioning surface 231 is a plane, the portion of the part to be calibrated 200 that is in contact with the positioning surface 231 is a curved surface, and the extension direction of the predetermined stroke is perpendicular to the tangent direction of the portion of the part to be calibrated 200 that is in contact with the positioning surface 231, that is, when the positioning surface 231 is in contact with the part to be calibrated 200, the portion of the part to be calibrated 200 that is in contact with the positioning surface 231 is just tangent to the positioning surface 231. In this way, it can be ensured that the contact of the positioning surface 231 with the part to be calibrated 200 is relatively stable, thereby improving the positioning effect.

[0042] There may be multiple positioning surfaces 231, for example, corresponding to the first bearing portion 113 and the second bearing portion 114, the positioning surface 231 includes a first positioning surface 232 and a second positioning surface 233, and the multiple first positioning surfaces 232 enclose the first positioning space 211 ( Figure 1 ), a plurality of second positioning surfaces 233 enclose a second positioning space 212 ( Figure 1 ), the first positioning space 211 is larger than the second positioning space 212. For example, the first positioning space 211 can position an 8-inch to-be-calibrated component 200, and the second positioning space 212 can position a 6-inch to-be-calibrated component 200. The distance between the first positioning surface 232 and the second positioning surface 233 can be determined according to the size of the first positioning space 211 and the second positioning space 212, so that the moving part 23 does not need to move to different target positions, and can simultaneously enclose the first positioning space 211 and the second positioning space 212 through one movement.

[0043] It is understandable that the positioning surface 231 may also include a third positioning surface, a fourth positioning surface, etc., which can match the number of supporting parts of the carrier 10, so as to cooperate to achieve the positioning of the calibrated parts 200 of more sizes, which is not limited here.

[0044] Specifically, the movable portion 23 can be designed to be in a stepped shape, each step including a step surface 234 and a corresponding positioning surface 231. The number of steps can be designed according to the number of positioning surfaces 231. For example, when the positioning surface 231 includes a first positioning surface 232 and a second positioning surface 233, the number of steps is 2; for another example, when the positioning surface 231 includes a first positioning surface 232, a second positioning surface 233 and a third positioning surface, the number of steps is 3.

[0045] Please continue reading Figure 4 and Figure 5 The positioning member 20 further includes a position sensor 24 to detect the position of the moving part 23 within a predetermined stroke.

[0046] The driving portion 22 may further include a driving shaft 221 . The driving shaft 221 is connected to the moving portion 23 . The driving shaft 221 moves to drive the moving portion 23 to move within a predetermined stroke.

[0047] The position sensor 24 may be arranged in the driving part 22, and the driving part 22 is provided with a slide groove 222, and the extension direction of the slide groove 222 is the same as the extension direction of the predetermined stroke (i.e., the moving direction of the driving shaft 221), and the position sensor 24 may be arranged in the slide groove 222, and the position sensor 24 may be a Hall sensor, and when the driving shaft 221 (such as a magnetic member that can be detected by the Hall sensor is arranged at a specific position of the driving shaft 221 (such as an end of the driving shaft 221 located at the driving part 22)) moves to the position where the position sensor 24 is located, the Hall sensor will generate a corresponding in-position signal, thereby determining the current position of the driving shaft 221. For example, the position of the position sensor 24 in the slide groove 222 can be determined according to the target position, and the position sensor 24 can be arranged when the target position is at the position corresponding to the slide groove 222, so that when the Hall sensor generates an in-position signal, it can be determined that the moving part 23 has moved to the target position, and at this time the moving part 23 no longer moves, so as to prevent the moving part 23 from continuing to move and squeezing the part to be calibrated 200, thereby damaging the moving part 23 or the part to be calibrated 200.

[0048] Among them, the target position at the position corresponding to the slide groove 222 means: when the moving part 23 is at the target position, the magnetic part of the driving shaft 221 is at the position corresponding to the slide groove 222, and the line connecting the position of the magnetic part of the driving shaft 221 and the corresponding position on the slide groove 222 is perpendicular to the axis of the driving shaft 221.

[0049] In the embodiment of the present application, there are two position sensors 24, namely a first position sensor 241 and a second position sensor 242. The first position sensor 241 can be set at a position corresponding to the initial position of the moving part 23 on the slide groove 222 (at this time, the distance between the moving part 23 and the driving part 22 is the shortest), and the second position sensor 242 can be set at a position corresponding to the target position on the slide groove 222.

[0050] When placing the part to be calibrated 200, it is necessary to move the moving part 23 so that the first position sensor 241 generates a first in-position signal. At this time, it can be determined that the moving part 23 is in the initial position, so that the space enclosed by the positioning surface 231 is maximized, ensuring that the part to be calibrated 200 is placed on the carrier 10 without colliding with any moving part 23.

[0051] During positioning, the moving part 23 needs to be moved to the target position. When the second position sensor 242 generates a second in-position signal, it can be determined that the moving part 23 has moved to the target position, thereby completing the positioning of the part to be calibrated 200.

[0052] In other embodiments, the position sensor 24 can also be a distance sensor. The position sensor 24 is arranged on the driving part 22. The position sensor 24 can emit a laser along the axial direction of the driving shaft toward the end of the driving shaft 221 located at the driving part 22, and determine the distance between the position sensor 24 and the end of the driving shaft 221 located at the driving part 22 by detecting the intensity of the reflected laser, thereby determining the position of the moving part 23 within the predetermined stroke.

[0053] See also Figure 2 and Figure 7 The mounting member 50 is disposed on the side plate 32 . The mounting member 50 includes a mounting surface 51 , and the mounting surface 51 is used for mounting the positioning member 20 .

[0054] It can be understood that since the extension directions of the first side plate 321, the second side plate 322 and the third side plate 323 are fixed, in order to make the extension direction of the predetermined stroke of the positioning member 20 meet the positioning requirements, a mounting member 50 that can mount the positioning member 20 at any angle can be provided.

[0055] Specifically, according to the extension direction of the predetermined stroke of the installed positioning member 20, the mounting member 50 can be cut so that the mounting surface 51 is parallel to the extension direction. After the positioning member 20 is installed on the mounting surface 51, the moving part 23 can move along the direction parallel to the mounting surface 51.

[0056] Please combine Figure 2 and Figure 8 The calibration method of the present application is used to calibrate the object to be calibrated 200, and includes the following steps:

[0057] 011: Move the workpiece 200 to be calibrated to the carrier 10 by the robot 300, so that the carrier 10 carries the workpiece 200 to be calibrated;

[0058] 012: Control the multiple positioning members 20 to move to the corresponding target positions within the predetermined stroke, so that the part to be calibrated 200 is located in the predetermined positioning space 21 and conflicts with the multiple positioning members 20 .

[0059] Specifically, during calibration, the part to be calibrated 200 is first moved to the top of the support column 12 by the manipulator 300, and then the manipulator 300 descends so that the part to be calibrated 200 is carried on the support column 12. Due to the difference in the initial placement position, the position of the part to be calibrated 200 placed on the support column 12 will also deviate. Therefore, the calibration device 100 controls the moving parts 23 of the multiple positioning parts 20 to move to the corresponding target positions, so that the part to be calibrated 200 is positioned in the predetermined positioning space 21 and conflicts with multiple positioning surfaces 231.

[0060] The predetermined positioning space 21 can be determined by prior calibration, for example, by first placing the part to be calibrated 200 on the support column 12 by an employee, and then manually adjusting the position of the part to be calibrated 200 so that the part to be calibrated 200 is located at the predetermined position, and then using a detection instrument to detect whether the position is accurate. After the position is accurately placed, the positioning member 20 is controlled to move the moving part 23 so that the positioning surface 231 just contacts the part to be calibrated 200, and then the position of the driving shaft 221 at this time is recorded, so that the target position corresponding to each moving part 23 can be determined, thereby completing the calibration of the target position.

[0061] After positioning is completed, the robot arm 300 may rise again (in a direction away from the carrying surface 311 ) to carry the part to be calibrated 200 , and move the part to be calibrated 200 to a preset position of the carrying platform of the detection device for accurate detection.

[0062] The calibration method of the embodiment of the present application uses a carrier 10 to carry the workpiece 200 to be calibrated, and then moves through a plurality of positioning members 20 that can move within a predetermined stroke, so that the positioning members 20 move to the corresponding target position, so that the workpiece 200 to be calibrated is accurately positioned in the predetermined positioning space 21, and the position calibration of the workpiece 200 to be calibrated is quickly completed. The position of the workpiece 200 to be calibrated remains unchanged when it is grabbed by the manipulator 300, so that when the manipulator 300 grabs the workpiece 200 to be calibrated and moves it to the detection device (not shown), the workpiece 200 to be calibrated is always located at the same predetermined position on the detection device, and there is no need to repeatedly position the workpiece to be calibrated, thereby ensuring the detection effect and detection efficiency of the workpiece 200 to be calibrated.

[0063] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiments or examples are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0064] Any process or method description in a flowchart or otherwise described herein may be understood to represent a module, segment or portion of a program's code that includes one or more steps for implementing a specific logical function or process, and the scope of the preferred embodiments of the present application includes alternative implementations in which functions may not be performed in the order shown or discussed, including performing functions in a substantially simultaneous manner or in the reverse order depending on the functions involved, which should be understood by those skilled in the art to which the embodiments of the present application belong.

[0065] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A calibration device, characterized in that: Used to calibrate the part to be calibrated, the calibration equipment includes: A carrier, on which the part to be calibrated is carried; A plurality of positioning members, wherein the positioning members are movable within a predetermined stroke, the predetermined stroke includes a target position, and when the plurality of positioning members are located at the corresponding target positions, the plurality of positioning members enclose a predetermined positioning space, and the part to be calibrated is located in the positioning space and conflicts with the plurality of positioning members; The positioning member includes a driving part and a moving part, the moving part includes a positioning surface, and the driving part drives the moving part to move within the predetermined stroke to change the shape and size of the positioning space; The positioning surface includes a first positioning surface and a second positioning surface, the positioning space includes a first positioning space and a second positioning space, the first positioning surface encloses the first positioning space, the second positioning surface encloses the second positioning space, and the first positioning space is larger than the second positioning space; The distance between the first positioning surface and the second positioning surface is determined according to the size of the first positioning space and the second positioning space; The moving part is in a stepped shape, each of the steps includes a step surface and a positioning surface corresponding to the step surface, and the number of the steps is determined according to the number of the positioning surfaces; The supporting member includes a supporting plate and a plurality of supporting columns arranged on the supporting plate, the supporting columns include a supporting surface, the supporting plate includes a first supporting portion and a second supporting portion, the first supporting portion surrounds the second supporting portion, the supporting columns include a first supporting column and a second supporting column, the first supporting column is arranged on the first supporting portion, the second supporting column is arranged on the second supporting portion, and the supporting surface of the first supporting column is higher than the supporting surface of the second supporting column.

2. The calibration device according to claim 1, characterized in that The support column also includes a side surface and a connecting surface, and the connecting surface is inclined to connect the side surface and the support surface.

3. The calibration device according to claim 1, characterized in that The calibration device further includes a base, and the base includes a base plate and a side plate, wherein the side plate is arranged on the base plate, the bearing member is arranged on the base plate, and the positioning member is arranged on the side plate.

4. The calibration device according to claim 1, characterized in that The positioning member includes a first positioning member, a second positioning member and a third positioning member, and the first positioning member, the second positioning member and the third positioning member form an acute triangle.

5. The calibration device according to claim 1, characterized in that The extending direction of the predetermined stroke is perpendicular to the tangent direction of the portion of the part to be calibrated that interferes with the positioning part.

6. The calibration device according to any one of claims 1 to 5, characterized in that: The positioning member comprises a positioning surface, a plurality of the positioning surfaces enclose the positioning space, the positioning surface abuts against the member to be calibrated, and a portion of the member to be calibrated abutting against the positioning surface has the same curvature as that of the positioning surface.

7. The calibration device according to claim 1, characterized in that The positioning member further includes a position sensor, and the position sensor is used to detect the position of the moving part within the predetermined stroke.

8. The calibration device according to claim 7, characterized in that The position sensor includes a first position sensor and a second position sensor. When the moving part is located at the initial position, the first position sensor generates a first in-position signal. When the moving part is located at the target position, the second position sensor generates a second in-position signal.

9. The calibration device according to claim 7, characterized in that The driving part is provided with a slide groove, the extension direction of the slide groove is the same as the extension direction of the predetermined stroke, the position sensor is movably arranged in the slide groove, and the position of the position sensor in the slide groove is determined according to the target position.

10. A calibration method, characterized in that: Used to calibrate the parts to be calibrated, including: Move the part to be calibrated to a carrier by a robot, so that the carrier carries the part to be calibrated; Controlling the plurality of positioning members to move to corresponding target positions within a predetermined stroke, so that the member to be calibrated is located in a predetermined positioning space and conflicts with the plurality of positioning members; The positioning member includes a driving part and a moving part, the moving part includes a positioning surface, and the driving part drives the moving part to move within the predetermined stroke to change the shape and size of the positioning space; The positioning surface includes a first positioning surface and a second positioning surface, the positioning space includes a first positioning space and a second positioning space, the first positioning surface encloses the first positioning space, the second positioning surface encloses the second positioning space, and the first positioning space is larger than the second positioning space; The distance between the first positioning surface and the second positioning surface is determined according to the size of the first positioning space and the second positioning space; The moving part is in a stepped shape, each of the steps includes a step surface and a positioning surface corresponding to the step surface, and the number of the steps is determined according to the number of the positioning surfaces; The supporting member includes a supporting plate and a plurality of supporting columns arranged on the supporting plate, the supporting columns include a supporting surface, the supporting plate includes a first supporting portion and a second supporting portion, the first supporting portion surrounds the second supporting portion, the supporting columns include a first supporting column and a second supporting column, the first supporting column is arranged on the first supporting portion, the second supporting column is arranged on the second supporting portion, and the supporting surface of the first supporting column is higher than the supporting surface of the second supporting column.

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