Contact terminals, inspection jigs, and inspection devices

Abstract

The present invention provides a contact terminal, an inspection jig, and an inspection device. The contact terminal comprises a cylindrical body including: an end side cutout, which is arranged at one axial end of the cylindrical body in a shape formed by cutting from one axial end surface toward the other axial end; a hole portion, which is open at one axial end; and a pair of arms, which are clamped by the end side cutout and the hole portion; a first insertion portion of a first conductor having: an inclined portion, the outer diameter of which increases toward one axial end; and a first straight portion, which is connected to one axial end of the inclined portion and has an outer diameter fixed along the axial direction, the outer diameter of the first straight portion being larger than the inner diameter of the cylindrical body, the first straight portion being in contact with the arm portion, and a wall portion arranged at one axial end of the first straight portion being capable of contacting the hole portion.

Description

Technical Field

[0001] The present invention relates to a contact terminal, an inspection jig and an inspection device for inspecting an inspection object. Background Art

[0002] Conventionally, there is known a contact terminal that contacts an inspection object. Such a contact terminal is formed by inserting a conductive rod-shaped member into a cylindrical body having a spring portion formed in the middle.

[0003] In the contact terminal, the rod-shaped member is fixed to the front end of the cylindrical body while the end of the rod-shaped member protrudes from the cylindrical body. As an example of such a fixing method, a contact terminal in which the rod-shaped member is fixed to the cylindrical body by press-fitting is known (for example, see Patent Document 1).

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2019-15542 Summary of the Invention

[0007] Problems to be solved by the invention

[0008] However, in the contact terminal in which the rod-shaped member is fixed by press-fitting as described above, there is room for improvement in the assembly properties of the rod-shaped member to the cylindrical body.

[0009] In view of the above circumstances, an object of the present invention is to provide a contact terminal capable of improving the assembly performance of a conductor into a cylindrical body, and an inspection jig and an inspection device using the contact terminal.

[0010] Technical means to solve the problem

[0011] An exemplary contact terminal of the present invention includes: a cylindrical body extending in an axial direction of the contact terminal and having conductivity; and a rod-shaped first conductor having conductivity.

[0012] The cylindrical body includes: an end side cutout, which is arranged at one axial end portion of the cylindrical body and is cut from one axial end surface toward the other axial side; a hole portion, which is open at one axial end portion; and a pair of arm portions, which are clamped by the end side cutout and the hole portion.

[0013] The first conductor includes a first protrusion protruding from the cylindrical body toward one axial side, and a first insertion portion connected to the other axial side of the first protrusion and disposed inside the cylindrical body.

[0014] The first insertion portion includes: an inclined portion whose outer diameter increases toward one side in the axial direction; and a first straight portion connected to the one side in the axial direction of the inclined portion and having an outer diameter constant along the axial direction.

[0015] The outer diameter of the first straight portion is larger than the inner diameter of the cylindrical body. The first straight portion contacts the arm portion, and a wall portion disposed at one axial end of the first straight portion can contact the hole portion.

[0016] Effects of the Invention

[0017] According to the exemplary contact terminal of the present invention, and the inspection jig and inspection device using the same, it is possible to improve the assembly performance of the conductor into the cylindrical body. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram showing the overall structure of an inspection device according to an exemplary embodiment of the present invention.

[0019] Figure 2 It is a side view showing a contact terminal according to an exemplary embodiment of the present invention.

[0020] Figure 3 It means that the plane parallel to the paper will Figure 2 A side cross-sectional view of a structure cut away.

[0021] Figure 4 Yes Figure 3 A side sectional view of a state where a load is applied to the contact terminal.

[0022] Figure 5 Yes Figure 1 A magnified view of a portion of the structure.

[0023] Figure 6 This is a perspective view of the exploded state of the structure of the first embodiment in which the first conductor is fixed to the cylindrical body, viewed from the end portion-side notch side.

[0024] Figure 7 This is a perspective view of an exploded state of the structure of the first embodiment in which the first conductor is fixed to the cylindrical body, viewed from the hole side.

[0025] Figure 8 It means in Figure 6 A perspective view showing a state where the first conductor is assembled to the cylindrical body.

[0026] Figure 9 It means in Figure 7 A perspective view showing a state where the first conductor is assembled to the cylindrical body.

[0027] Figure 10 It means Figure 8 A side view of a state where the first conductor is assembled to the cylindrical body.

[0028] Figure 11 It is a perspective view showing a modified example of the first embodiment.

[0029] Figure 12 This is a perspective view of an exploded state of the structure of the second embodiment in which the first conductor is fixed to the cylindrical body, viewed from the end portion-side notch side.

[0030] Figure 13 This is a perspective view of an exploded state of the structure of the second embodiment in which the first conductor is fixed to the cylindrical body, viewed from the hole side.

[0031] Figure 14 It means in Figure 12 A perspective view showing a state where the first conductor is assembled to the cylindrical body.

[0032] Figure 15 It means in Figure 13 A perspective view showing a state where the first conductor is assembled to the cylindrical body.

[0033] Figure 16 Yes Figure 14 A side view showing a state where the first conductor is assembled to the cylindrical body.

[0034] Figure 17 Yes Figure 14 A side view showing a state where the first conductor is assembled to the cylindrical body, as viewed from the end portion notch side.

[0035] Figure 18 Yes Figure 14 A side view showing a state where the first conductor is assembled to the cylindrical body as viewed from the hole side.

[0036] Figure 19 It is an exploded perspective view showing a structure of a comparative example in which a first conductor is fixed to a cylindrical body.

[0037] Figure 20 It is a perspective view showing a completed state of the structure of a comparative example in which the first conductor is fixed to the cylindrical body.

[0038] Figure 21 It is a side view showing a completed state of the structure of a comparative example in which the first conductor is fixed to the cylindrical body.

[0039] Figure 22 This is a perspective view of the structure for fixing the second conductor to the cylindrical body in an exploded state, viewed from the end portion cutout side.

[0040] Figure 23This is a perspective view of an exploded state of the structure for fixing the second conductor to the cylindrical body, viewed from the hole side.

[0041] Figure 24 This is a perspective view of a state where the second conductor is assembled to the cylindrical body, viewed from the end-side notch side.

[0042] Figure 25 This is a perspective view of a state where the second conductor is assembled to the cylindrical body, as seen from the hole side.

[0043] Figure 26 It is a perspective view showing a modified example of the other axial end portion of the cylindrical body.

[0044] [Explanation of Symbols]

[0045] 1: Probe head

[0046] 2: Contact terminals

[0047] 2A: One end

[0048] 2B: The other end

[0049] 3: Supporting members

[0050] 6: Spacing conversion unit

[0051] 7: Connecting plate

[0052] 8: Check the fixture

[0053] 9: Inspection and Processing Department

[0054] 10: Inspection device

[0055] 20, 20X: cylindrical body

[0056] 21: First main body

[0057] 22: First spring part

[0058] 23: Second spring part

[0059] 24: Second main body

[0060] 31: End side incision

[0061] 31A: Fixed width section

[0062] 31B: wide part

[0063] 32: Hole

[0064] 32A: Narrow part

[0065] 40: First conductor

[0066] 41: First protrusion

[0067] 42: First insertion part

[0068] 50: Second conductor

[0069] 51: Second protrusion

[0070] 52: Second insertion part

[0071] 61: First electrode

[0072] 100: Check object

[0073] 100A: Checkpoint

[0074] 201: One end of the axial direction

[0075] 201A: Axial end face on one side

[0076] 201B: Axial protrusion

[0077] 201C, 201D: Circumferential protrusion

[0078] 202: The other end of the axial direction

[0079] 202A: End face on the other side of the axis

[0080] 202B: End side incision

[0081] 202C: Hole

[0082] 202C1: concave part

[0083] 202C2: protruding edge

[0084] 202D, 202E: Arm

[0085] 202F: Protrusion

[0086] 211, 212: Arm

[0087] 301: Upper support

[0088] 301A: Support hole

[0089] 302: Intermediate support

[0090] 302A: Support hole

[0091] 303: Lower support

[0092] 303A: Support hole

[0093] 303B: Upper surface

[0094] 311: Fixed-width section

[0095] 321: Axial protruding edge

[0096] 322, 323: Circumferential protruding edge

[0097] 411: Rod-shaped body part

[0098] 411A: front end

[0099] 412: flange

[0100] 421: Inclined part

[0101] 422: First straight

[0102] 422A: One side of the axial end

[0103] 422B: The other side of the axis

[0104] 423: Narrowing

[0105] 424: Second straight section

[0106] 425: wall face

[0107] 511: front end

[0108] 512: flange

[0109] 521: inclined portion

[0110] 522: The third straight section

[0111] 523: Narrowing

[0112] 524: Fourth Straight Section

[0113] 525: wall face

[0114] CP: Sliding Contact

[0115] D1: inner diameter

[0116] D2, D3: outer diameter

[0117] J: Center axis

[0118] L1, L2: distance

[0119] S20: End side incision

[0120] Wz: width

[0121] X1: One side of the axis

[0122] X2: The other side of the axis

[0123] Y1: One side of the first direction

[0124] Y2: The other side of the first direction

[0125] Z1: One side of the second direction

[0126] Z2: The other side of the second direction

[0127] θ: angle DETAILED DESCRIPTION

[0128] Hereinafter, an exemplary embodiment of the present invention will be described with reference to the accompanying drawings. Figure 2 ) is called the "axial direction", and in the accompanying drawings, the axial direction is represented as X, one side of the axial direction is represented as X1, and the other side of the axial direction is represented as X2. In addition, in the accompanying drawings, the direction perpendicular to the axial direction X is represented as the first direction Y, one side of the first direction is represented as Y1, and the other side of the first direction is represented as Y2. Furthermore, as described later, the end side cutout 31 side in the tubular body 20 is the side of one side of the first direction Y1, and the hole 32 side is the side of the other side of the first direction Y2. In addition, in the accompanying drawings, the direction perpendicular to the axial direction X and the first direction Y is represented as the second direction Z, one side of the second direction is represented as Z1, and the other side of the second direction is represented as Z2. In addition, the direction around the center axis J is called the "circumferential direction".

[0129] <1. Overall structure of the inspection device> Use Figure 1 The overall structure of the inspection device 10 according to the exemplary embodiment of the present invention will be described. Figure 1 In the embodiment, the contact terminal 2 is assembled to the inspection device 10 so that the one axial side X1 side faces downward.

[0130] Figure 1 The inspection apparatus 10 shown performs electrical inspection of an inspection object 100. The inspection apparatus 10 includes an inspection jig 8 and an inspection processing unit 9. The inspection jig 8 is configured as a so-called probe card, for example.

[0131] The inspection object 100 is, for example, a semiconductor wafer having multiple circuits formed on a semiconductor substrate such as silicon. The semiconductor wafer is singulated into semiconductor chips having the respective circuits by dicing. Furthermore, in addition to semiconductor wafers, the inspection object 100 may also be an electronic component such as a semiconductor chip, a chip size package (CSP), a wafer level package (WLP), a fan-out wafer level package (FOWLP), or a semiconductor element.

[0132] Alternatively, the inspection object 100 may be a substrate. In this case, the inspection object 100 may be, for example, a printed wiring substrate, a glass epoxy substrate, a flexible substrate, a ceramic multilayer wiring substrate, a package substrate for semiconductor packaging, an interposer substrate, a film carrier, or an electrode plate for a display such as a liquid crystal display, an electroluminescence (EL) display, or a touch screen display, or an electrode plate for a touch screen.

[0133] Alternatively, products produced using a packaging technology called Embedded Multi-die Interconnect Bridge (EMIB) can be used as inspection objects 100. In EMIB, a small silicon substrate called a silicon bridge is embedded in a packaging resin substrate, and fine, high-density wiring is formed on the surface of the silicon bridge, thereby allowing adjacent silicon dies to be mounted close together on the packaging resin substrate.

[0134] like Figure 1 As shown, the inspection jig 8 includes a probe head 1 , a pitch conversion unit 6 , and a connection plate 7 . The probe head 1 includes contact terminals (probes) 2 and a support member 3 .

[0135] The inspection jig 8 includes a plurality of contact terminals 2 and a support member 3 that supports the plurality of contact terminals 2 .

[0136] The pitch conversion unit 6 is arranged above the support member 3 and fixed to the support member 3. The contact terminal 2 has one end 2A on one axial side X1 and another end 2B on the other axial side X2. The other end 2B is connected to each first electrode 61 (see FIG. Figure 5 )connect.

[0137] The pitch conversion unit 6 converts the first pitch between the contact terminals 2 into a second pitch between the second electrodes formed at the upper end of the pitch conversion unit 6. The second pitch is longer than the first pitch. The pitch conversion unit 6 is formed, for example, from a multilayer wiring substrate such as a multi-layer organic (MLO) or multi-layer ceramic (MLC).

[0138] The connection plate 7 is configured to be detachable from the pitch conversion unit 6 . The pitch conversion unit 6 is electrically connected to the inspection processing unit 9 via the connection plate 7 .

[0139] The inspection processing unit 9 includes, for example, a power supply circuit, a voltmeter, an ammeter, a microcomputer, etc. The inspection processing unit 9 controls a driving mechanism (not shown) to move the inspection jig 8 relative to the inspection object 100 .

[0140] When inspection object 100 is, for example, a semiconductor wafer, multiple inspection points, such as pads or bumps, are formed on each circuit of inspection object 100, corresponding to the individual semiconductor chips formed after dicing. Inspection processing unit 9 uses a portion of the multiple circuits formed on inspection object 100 as the inspection area and moves inspection jig 8 relative to a position where contact terminals 2 face each inspection point within the inspection area in the vertical direction. At this point, inspection jig 8 is positioned so that one end 2A of contact terminals 2 faces toward inspection object 100.

[0141] Then, the inspection processing unit 9 moves the inspection jig 8 downward to bring the contact terminals 2 into contact with each inspection point within the inspection area.

[0142] In this state, the inspection processing unit 9 supplies an inspection current or voltage to each inspection point of the inspection object 100 via each contact terminal 2 , and performs inspection of the inspection object 100 based on the voltage signal or current signal obtained from each contact terminal 2 .

[0143] Specifically, the inspection apparatus 10 includes an inspection jig 8 and an inspection processing unit 9 , and inspects the inspection object 100 based on an electrical signal obtained by bringing the contact terminal 2 into contact with an inspection point provided on the inspection object 100 .

[0144] When the inspection of the inspection area of ​​the inspection object 100 is completed, the inspection processing unit 9 moves the inspection jig 8 upward, relatively and parallel to the position corresponding to the new inspection area, and then moves the inspection jig 8 downward, so that the contact terminals 2 contact each inspection point in the new inspection area and the inspection is carried out. In this way, by sequentially changing the inspection area and performing the inspection simultaneously, the entire inspection object 100 is inspected.

[0145] <2. Structure of Contact Terminal> The structure of the contact terminal 2 will be described in more detail below. Figure 2 and Figure 3 This shows a case where no load is applied to the contact terminal 2 and the first spring portion 22 and the second spring portion 23 are in a naturally extended state.

[0146] The contact terminal 2 includes a conductive cylindrical body 20 extending in the axial direction of the contact terminal 2, a conductive rod-shaped first conductor (plug) 40, and a conductive rod-shaped second conductor (plug) 50. The first conductor 40 and the second conductor 50 are formed of a conductive material such as a palladium alloy.

[0147] The cylindrical body 20 is formed into a cylindrical shape, for example, using a nickel or nickel alloy tube having an outer diameter of about 25 μm to 300 μm and an inner diameter of about 10 μm to 250 μm. In addition, a conductive layer such as a gold plating layer is preferably formed on the inner peripheral surface of the cylindrical body 20. This can reduce the sliding contact CP ( Figure 4 Furthermore, the outer peripheral surface of the cylindrical body 20 may be insulated and coated as needed.

[0148] The cylindrical body 20 includes a first body 21, a first spring 22, a second spring 23, and a second body 24. The first body 21, the first spring 22, the second body 24, and the second spring 23 are arranged in this order from one axial side X1 to the other axial side X2.

[0149] The first spring portion 22 and the second spring portion 23 are formed as spiral bodies extending spirally along the circumferential surface of the cylindrical body 20. The first main body portion 21 and the second main body portion 24 are cylindrical and not formed in a spiral shape.

[0150] To produce this spiral cylindrical body, for example, a gold-plated layer is formed on the periphery of a core material by plating, and then a nickel electroformed layer is formed on the periphery of the formed gold-plated layer by electroforming. After forming a resist layer on the periphery of the nickel electroformed layer, a portion of the resist layer is removed in a spiral shape by exposure with a laser. The resist layer is used as a masking material and is etched to remove the nickel electroformed layer from the portion where the resist layer has been removed in a spiral shape. Subsequently, the gold-plated layer is removed from the portion where the nickel electroformed layer has been removed in a spiral shape after the resist layer has been removed, and the core material is removed while the gold-plated layer remains on the inner periphery of the nickel electroformed layer, thereby forming a cylindrical body.

[0151] The first conductor 40 includes a first protruding portion 41 protruding from the cylindrical body 20 to one axial side X1 side; and a first inserting portion 42 connected to the other axial side X2 side of the first protruding portion 41 and disposed inside the cylindrical body 20 ( Figure 3 The first conductor 40 and the second conductor 50 are in the shape of a body of revolution about the axial direction. Therefore, the first conductor 40 and the second conductor 50 can be formed by cutting using a lathe.

[0152] The first protrusion 41 includes a rod-shaped main body 411 and a flange 412 connected to the other axial side X2 of the rod-shaped main body 411. The rod-shaped main body 411 has a tip 411A on the axial side X1. The tip 411A contacts an inspection point of the inspection object 100 as described below.

[0153] Furthermore, Figure 3 In the example, the front end portion 411A is set to be conical, but is not limited to this, and can also be set to, for example, a truncated cone shape, a hemispherical shape, or a cylindrical shape.

[0154] The first insertion portion 42 is connected to the other axial side X2 of the flange portion 412 and is fixed to the first main body 21. More specifically, the first insertion portion 42 is fixed to one axial end portion 201 of the cylindrical body 20. The one axial end portion 201 is included in the first main body 21. The fixing structure for fixing the first insertion portion 42 to the first main body 21 will be described later.

[0155] The second conductor 50 includes a second protruding portion 51 and a second inserting portion 52 ( Figure 3 The second insertion portion 52 is connected to the axial side X1 of the second protrusion 51. The second insertion portion 52 is fixed to the other axial end portion 202 of the tubular body 20. The fixing structure for fixing the second insertion portion 52 to the tubular body 20 will be described later.

[0156] In this manner, the first conductor 40 and the second conductor 50 are fixed to the cylindrical body 20 to form the contact terminal 2 .

[0157] like Figure 3 As shown, the second insertion portion 52 extends axially inside the cylindrical body 20 through the second spring portion 23, the second main body portion 24, and the first spring portion 22 to the first main body portion 21. Thus, the second insertion portion 52 contacts the first main body portion 21.

[0158] Figure 4 The first spring portion 22 and the second spring portion 23 are compressed by applying a load to the contact terminal 2. Figure 3 Compared to the state shown in FIG. , the second conductor 50 moves relative to the first conductor 40 toward one axial side, X1. Consequently, the second insertion portion 52 contacts the first main body 21 and simultaneously moves toward one axial side, X1. Meanwhile, the first insertion portion 42 is fixed to the first main body 21. Therefore, the contact between the second insertion portion 52 and the first main body 21 forms a sliding contact point CP. The current path in the contact terminal 2 passes through the first insertion portion 42, the first main body 21, the sliding contact point CP, and the second insertion portion 52.

[0159] In addition, in the contact terminal 2, as Figure 3 As shown, by shortening the axial length of the first conductor 40 and lengthening the axial length of the second conductor 50, the difference in length between the two can be reduced. This makes it easier to manufacture the first conductor 40 and the second conductor 50.

[0160] Figure 5 3 is a diagram showing a state where the contact terminal 2 is supported by the supporting member 3. Figure 5As shown, the support member 3 includes an upper support body 301, an intermediate support body 302, and a lower support body 303. Here, the structure in which the contact terminal 2 is supported by the support member 3 will be described.

[0161] The lower support body 303 has a support hole 303A, which is a through-hole extending through the lower support body 303 in the thickness direction. The cross-sectional area of ​​the support hole 303A, as viewed in the axial direction, is slightly larger than the cross-sectional area of ​​the rod-shaped body 411, and smaller than the cross-sectional area of ​​the flange 412. This allows the rod-shaped body 411 to be inserted into the support hole 303A, while the flange 412 prevents the contact terminal 2 from falling out.

[0162] The intermediate support body 302 is positioned above the lower support body 303 and includes a support hole 302A, which is a through-hole coaxial with the support hole 303A. The cross-sectional area of ​​the support hole 302A, as viewed in the axial direction, is slightly larger than the cross-sectional area of ​​the outer shape of the second main body 24, as viewed in the axial direction. This allows the second main body 24 to be inserted into the support hole 302A.

[0163] The upper support body 301 is positioned above the intermediate support body 302 and includes a support hole 301A, which is a through-hole coaxial with the support hole 302A. The cross-sectional area of ​​the support hole 301A, as viewed in the axial direction, is slightly larger than the cross-sectional area of ​​the outer shape, as viewed in the axial direction, of the other axial end portion 202 of the cylindrical body 20 and the second protrusion 51. This allows the other axial end portion 202 and the second protrusion 51 to be inserted into the support hole 301A.

[0164] When the contact terminal 2 is supported by the support member 3, the rod-shaped body 411 is inserted through the support hole 301A, the support hole 302A, and the support hole 303A in order from above. Furthermore, the support holes 301A and 302A have an axial cross-section that allows the flange 412 to be inserted.

[0165] With the contact terminal 2 supported by the support member 3 in this manner, the rod-shaped body portion 411 is received in the support hole 303A. The flange portion 412 abuts against the upper surface 303B of the lower support body 303. The second body portion 24 is received in the support hole 302A. The axially opposite end portion 202 and the second protrusion 51 are received in the support hole 301A.

[0166] Next, the tip 511 of the second protrusion 51 is brought into contact with the first electrode 61 exposed on the lower surface of the pitch conversion unit 6, while the upper surface of the upper support body 301 is pressed against the lower surface of the pitch conversion unit 6. This secures the support member 3 to the pitch conversion unit 6. At this point, the first spring portion 22 and the second spring portion 23 are compressed in the axial direction. Consequently, the elastic force of the spring portions 22 and 23 presses the tip 511 against the first electrode 61, maintaining stable conductive contact between the tip 511 and the first electrode 61.

[0167] When inspecting the inspection object 100, the tip 411A of the rod-shaped main body 411 is brought into contact with the inspection point 100A of the inspection object 100. At this point, a force is applied to the tip 411A toward the other axial side X2, compressing the first and second spring portions 22 and 23 in the axial direction. Consequently, the elastic forces of the spring portions 22 and 23 press the tip 411A against the inspection point 100A, maintaining stable conductive contact between the tip 411A and the inspection point 100A.

[0168] In the contact terminal 2, the spring portion includes a first spring portion 22 and a second spring portion 23 located axially closer to the other side X2 than the first spring portion 22. The cylindrical body 20 includes a second main body portion 24 disposed between the first spring portion 22 and the second spring portion 23 and not formed into a spiral shape. Thus, the second main body portion 24 located in the middle of the cylindrical body 20 can be supported by the intermediate support body 302, thereby suppressing buckling of the cylindrical body 20.

[0169] <3. Fixing of Conductor to Cylindrical Body> <3-1. First Embodiment of Fixing Structure of First Conductor to Cylindrical Body> Next, a first embodiment of a fixing structure for fixing the first conductor 40 of the contact terminal 2 to the cylindrical body 20 will be described. Figure 6 and Figure 7 This is a diagram showing an exploded state before the first conductor 40 is fixed to the cylindrical body 20 .

[0170] An end portion-side notch 31 and a hole 32 are provided at one end portion 201 on the axial side of the cylindrical body 20 .

[0171] End side cutout 31 ( Figure 6 ) is formed into a shape that is cut from one axial end surface 201A of one axial end portion 201 toward the other axial side X2 side. The hole portion 32 ( Figure 7) is open at one end 201 in the axial direction. The end-side cutout 31 is provided on one side Y1 in the first direction. The hole 32 is provided on the other side Y2 in the first direction. The circumferential center position of the end-side cutout 31 is circumferentially offset by 180° relative to the circumferential center position of the hole 32. However, the two circumferential center positions may be slightly offset from 180°.

[0172] That is, the cylindrical body 20 includes: an end side incision 31, which is arranged at one axial end portion 201 of the cylindrical body 20 and is cut from one axial end face 201A toward the other axial side X2 side; and a hole portion 32, which is open at one axial end portion 201.

[0173] The first insertion portion 42 ( Figure 6 ) comprises an inclined portion 421, a first straight portion 422, a narrowed portion 423, and a second straight portion 424. The outer diameter of the inclined portion 421 increases toward one axial side X1. The first straight portion 422 is connected to the inclined portion 421 on one axial side X1 and has a constant outer diameter along the axial direction.

[0174] The outer diameter D2 of the first straight portion 422 is larger than the inner diameter D1 of the cylindrical body 20 ( Figure 6 ).

[0175] The narrowed portion 423 is connected to one axial side X1 of the first straight portion 422 and to the other axial side X2 of the flange portion 412 . The outer diameter of the narrowed portion 423 is smaller than the outer diameter of the first straight portion 422 .

[0176] The second straight portion 424 is connected to the other axial side X2 of the inclined portion 421 , and has a constant outer diameter along the axial direction.

[0177] When assembling the first conductor 40 to the cylindrical body 20, the second straight portion 424 is inserted from the axial end face 201A into the cylindrical body 20. As the insertion is pushed forward, the inclined portion 421 contacts the inner circumference of the axial end face 201A. When the first conductor 40 is directly pressed in, the axial end face 201 expands, and the first straight portion 422 is inserted into the cylindrical body 20.

[0178] When the insertion is directly pushed forward, the flange portion 412 contacts the end surface 201A on one side in the axial direction, thereby restricting the insertion of the first conductor 40. Figure 8 and Figure 9 3 shows a state where the first conductor 40 is pressed into the cylindrical body 20 and the flange portion 412 is in contact with one end surface 201A on one axial side. Figure 8 Indicates Figure 6 The first conductor 40 is inserted into the cylindrical body 20. Figure 9 Indicates Figure 7The first conductor 40 is inserted into the cylindrical body 20.

[0179] exist Figure 8 and Figure 9 In the illustrated state, the first straight portion 422 is held from both sides by the pair of arms 211 and 212 of the cylindrical body 20 in the second direction Z. The arms 211 and 212 are held by the end-side notches 31 and the hole 32 .

[0180] Since the outer diameter D2 of the first straight portion 422 is larger than the inner diameter D1 of the cylindrical body 20, the first straight portion 422 is pressed by the pair of arms 211 and 212. That is, the first straight portion 422 contacts the arms 211 and 212. Thus, the first conductor 40 is fixed to the cylindrical body 20.

[0181] In addition, the step difference between the first straight portion 422 and the narrowed portion 423 forms a wall portion 425 ( Figure 6 ). Here, if Figure 9 As shown, the distance L1 between the wall portion 425 and the flange portion 412 is longer than the distance L2 between the hole portion 32 and one end surface 201A on one axial side. Figure 9 In this state, the narrowed portion 423 is fitted between the hole portion 32 and the axial end surface 201A on one side. The wall portion 425 can contact the axially protruding edge portion 321 included in the hole portion 32. The axially protruding edge portion 321 is the edge of the axially protruding portion 201B that protrudes toward the axial other side X2 at the axial end portion 201 on one side.

[0182] That is, the wall portion 425 disposed at one axial end of the first straight portion 422 can contact the hole portion 32. As a result, the first conductor 40 assembled to the cylindrical body 20 is unlikely to escape from the cylindrical body 20. In addition, since the wall portion 425 can contact the axially protruding edge portion 321 ( Figure 7 ), the first conductor 40 is less likely to come out of the cylindrical body 20. Furthermore, the wall surface portion 425 is prevented from coming into contact with the vicinity of both ends of the axially protruding edge portion 321 in the circumferential direction.

[0183] Here, assuming that Figure 19 As shown, in the case where the end portion 201 on one side of the axial direction of the cylindrical body 20X is not provided with a hole portion and only an end side cutout S20 is provided, when the first conductor 40 is assembled to the cylindrical body 20X, it becomes Figure 20 At this time, since only the end-side cutout S20 is provided, when the first conductor 40 is inserted into the cylindrical body 20X, the end portion 201 on one side in the axial direction is unlikely to expand.

[0184] In contrast, in the contact terminal 2 of this embodiment, the end portion 201 on one side in the axial direction is easily enlarged due to the end portion notch 31 and the hole portion 32 provided in the cylindrical body 20. This makes it easier to press the first conductor 40 in, thereby facilitating assembly of the first conductor 40.

[0185] In addition, if Figure 8 and Figure 9 As shown, the first protrusion 41 includes a flange portion 412 that faces the axial end surface 201A on one side of the cylindrical body 20. This prevents overinsertion of the first conductor 40 when the first conductor 40 is inserted into the cylindrical body 20.

[0186] In addition, when the first conductor 40 is inserted into Figure 19 In the case of the cylindrical body 20X shown in FIG. 2 , the first straight portion 422 having an outer diameter D2 thicker than the inner diameter D1 of the cylindrical body 20X plays a role in expanding the axial end portion 201 on one side of the cylindrical body 20X. At this time, the portion of the end side cutout S20 on the axial end portion 201 on the other side of the axial direction X2 moves in the circumferential direction of the cylindrical body 20X. In addition, the portion of the cylindrical body 20X in contact with the first straight portion 422 moves toward the radially outer side of the cylindrical body 20X. Therefore, the axial end portion 201 on one side of the cylindrical body 20X expands. At this time, the axis of the axial end portion 201 on one side of the axial direction is offset from the axis when the first conductor 40 is not inserted. As shown in FIG. Figure 20 As shown, when the first conductor 40 is inserted until the flange portion 412 contacts the axial end surface 201A on one side, the axial center of the first conductor 40 near the axial end surface 201A is greatly offset. Therefore, the first conductor 40 is likely to tilt from the direction along the axial center of the cylindrical body 20X when the first conductor 40 is not inserted. The first conductor 40 tilts toward the end side notch S20. Figure 21 , a state where the first conductor 40 is inclined at an angle θ is shown.

[0187] In contrast, in the case of the contact terminal 2 of the first embodiment, Figure 10 As shown, a portion of the first straight portion 422 is exposed from the hole portion 32 along the axial direction from one axial end 422A to the other axial end 422B. In other words, a portion of the first straight portion 422 is exposed from the hole portion 32. As a result, the exposed portion of the first straight portion 422 does not contact the cylindrical body 20, thereby suppressing tilting of the first conductor 40 relative to the cylindrical body 20.

[0188] In addition, the outer diameter D3 of the second straight portion 424 ( Figure 6) is substantially the same as the inner diameter D1 of the cylindrical body 20. This prevents the first conductor 40 from tilting relative to the cylindrical body 20. The aforementioned effect can be achieved as long as the relationship between the outer diameter D3 and the inner diameter D1 satisfies 0 < D1 - D3 ≤ 6 μm. For example, if the inner diameter D1 of the cylindrical body 20 is 47 μm and the outer diameter is 58 μm, the aforementioned effect can be achieved by setting the outer diameter D3 of the second straight portion 424 to 45 μm.

[0189] In addition, if Figure 7 As shown, one end portion 201 in the axial direction has a pair of circumferential protrusions 201C and 201D that are close to each other and protrude in the circumferential direction. The hole portion 32 includes a circumferential protrusion edge portion 322 and a circumferential protrusion edge portion 323. The circumferential protrusion edge portions 322 and 323 are the edges of the circumferential protrusions 201C and 201D. The first conductor 40 is held by the circumferential protrusions 201C and 201D, which can suppress the tilt of the first conductor 40 ( Figure 9 ).

[0190] Furthermore, as a variation of this embodiment, Figure 11 As shown, the distance L1 between the wall portion 425 and the flange portion 412 can be substantially equal to the distance L2 between the hole portion 32 and one axial end surface 201A. This can suppress axial movement of the first conductor 40 relative to the cylindrical body 20. The aforementioned effect can be achieved as long as the relationship between the distances L1 and L2 satisfies 0 ≤ L1 - L2 ≤ 30 μm.

[0191] In addition, if Figure 8 As shown, the end-side cutout 31 includes a fixed-width portion 311 having a constant width Wz along the axial direction. The fixed-width portion 311 extends from one end surface 201A in the axial direction to a position overlapping the inclined portion 421 when viewed in the first direction Y. Thus, the first conductor 40 is retained by the portion of the cylindrical body 20 near the fixed-width portion 311, thereby suppressing tilting of the first conductor 40.

[0192] <3-2. Second embodiment of the structure for fixing the first conductor to the cylindrical body> Figures 12 to 18 1 is a diagram showing a second embodiment of a structure in which the first conductor 40 is fixed to the cylindrical body 20. In the first conductor 40 and the cylindrical body 20 of the second embodiment, the components corresponding to the components in the first embodiment are marked with the same symbols as those in the first embodiment. Therefore, the second embodiment can achieve the same effects as the effects brought about by the above-mentioned characteristic structure of the first embodiment. Here, the use of Figure 17 and Figure 18 The shapes of the end-side notches 31 and the hole 32 , which are different from the first embodiment, will be described in detail.

[0193] like Figure 17 As shown, the end-side cutout 31 includes a fixed-width portion 31A and a widened portion 31B. The width Wz of the fixed-width portion 31A is constant along the axial direction from one end surface 201A. The widened portion 31B is connected to the other axial side X2 of the fixed-width portion 31A, and the width Wz increases as it moves toward the other axial side X2.

[0194] That is, the end-side cutout 31 has a wide portion 31B whose width Wz increases toward the other axial side X2. By enlarging the end-side cutout 31, the axial end 201 of the cylindrical body 20 can be more easily expanded. In addition, the first conductor 40 can be prevented from tilting relative to the cylindrical body 20.

[0195] In addition, if Figure 18 As shown in FIG. 1 , the hole 32 has a narrow portion 32A whose circumferential width Wz decreases toward the other axial side X2 .

[0196] <3-3. Fixing Structure of Second Conductor to Cylindrical Body> Next, a fixing structure for fixing the second conductor 50 of the contact terminal 2 of the present embodiment to the cylindrical body 20 will be described. Figure 22 and Figure 23 This is a diagram showing an exploded state before the second conductor 50 is fixed to the cylindrical body 20 . Figure 22 2 is a diagram showing a view from the end portion of the cylindrical body 20 as viewed from the notch 202B side. Figure 23 The figure viewed from the hole portion 202C side of the cylindrical body 20 is shown.

[0197] An end portion-side notch 202B and a hole 202C are provided at the other axial end portion 202 of the cylindrical body 20 .

[0198] The end-side notch 202B is formed into a shape notched along the axial direction from the other axial end surface 202A of the other axial end 202. The hole 202C opens at the other axial end 202. The end-side notch 202B and the hole 202C face each other in a direction perpendicular to the axial direction (radial direction).

[0199] That is, the cylindrical body 20 includes: an end side cutout 202B, which is arranged at the axial other side end 202 of the cylindrical body 20 and is cut from the axial other side end face 202A toward one axial side X1; and a hole portion 202C, which is open at the axial other side end 202.

[0200] The second conductor 50 includes a second protrusion 51 that protrudes from the cylindrical body 20 toward the other axial side X2, and a second insertion portion 52 that is connected to the second protrusion 51 on the one axial side X1 and is disposed within the cylindrical body 20. The second protrusion 51 includes a flange 512 on the one axial side X1.

[0201] The second insertion portion 52 includes an inclined portion 521, a third straight portion 522, a narrowed portion 523, and a fourth straight portion 524. The outer diameter of the inclined portion 521 increases toward the axially opposite side X2. The third straight portion 522 is connected to the axially opposite side X2 of the inclined portion 521 and has a constant outer diameter along the axial direction.

[0202] That is, the second insertion portion 52 includes an inclined portion 521 whose outer diameter increases toward the other axial side X2 and a third straight portion 522 connected to the other axial side X2 of the inclined portion 521 and having a constant outer diameter in the axial direction.

[0203] The outer diameter of the third straight portion 522 is larger than the inner diameter of the cylindrical body 20 .

[0204] The narrowed portion 523 is connected to the other axial side X2 of the third straight portion 522 and to one axial side X1 of the flange portion 512 . The outer diameter of the narrowed portion 523 is smaller than that of the third straight portion 522 .

[0205] The fourth straight portion 524 is connected to one axial side X1 of the inclined portion 521 , and has a constant outer diameter along the axial direction.

[0206] When assembling the second conductor 50 to the cylindrical body 20, the fourth straight portion 524 is inserted from the axially opposite end surface 202A into the cylindrical body 20. As the insertion is pushed forward, the inclined portion 521 contacts the inner circumference of the axially opposite end surface 202A. Pressing the second conductor 50 directly into place expands the axially opposite end surface 202, allowing the third straight portion 522 to penetrate into the cylindrical body 20.

[0207] When the insertion is directly pushed forward, the flange portion 512 contacts the other axial end surface 202A, thereby restricting the insertion of the second conductor 50. Figure 24 and Figure 25 Shown in Figure 22 and Figure 23 In FIG. 5 , the second conductor 50 is pressed into the cylindrical body 20 and the flange portion 512 is in contact with the other axial end surface 202A.

[0208] exist Figure 24 and Figure 25 In the illustrated state, the third straight portion 522 is held from both sides in a direction perpendicular to the axial direction by a pair of arms 202D and 202E of the cylindrical body 20. The arms 202D and 202E are held by the end-side notches 202B and the hole 202C.

[0209] Since the outer diameter of the third straight portion 522 is larger than the inner diameter of the cylindrical body 20 , the third straight portion 522 is pressed by the pair of arms 202D and 202E. That is, the third straight portion 522 contacts the arms 202D and 202E. Thus, the second conductor 50 is fixed to the cylindrical body 20 .

[0210] Since the end-side notch 202B and the hole 202C are provided in the cylindrical body 20 , the other axial end 202 can be easily expanded, and the second conductor 50 can be easily pressed in, thereby facilitating assembly of the second conductor 50 .

[0211] In addition, a wall portion 525 ( Figure 22 ). Here, if Figure 25 As shown, the distance between the wall portion 525 and the flange portion 512 is longer than the distance between the hole portion 202C and the other axial end surface 202A. Figure 25 In this state, the narrowed portion 523 is fitted between the hole portion 202C and the other axial end surface 202A. Furthermore, the wall surface portion 525 can contact the hole portion 202C.

[0212] That is, the wall surface portion 525 disposed at the other axial end of the third straight portion 522 can contact the hole portion 202C.

[0213] In this manner, the fixing structure of the second conductor 50 to the cylindrical body 20 is similar to the fixing structure of the first conductor 40 described above, and can achieve the same effect.

[0214] Furthermore, the fourth straight portion 524 is inserted into the interior of the cylindrical body 20 and is able to be aligned with the first main body portion 21 ( Figure 3 ) contacts the cylindrical body 20, the fourth straight portion 524 extends in the axial direction, and thus the axial length of the fourth straight portion 524 is long, thereby increasing the effect of suppressing the inclination of the second conductor 50 relative to the cylindrical body 20.

[0215] In addition, the structure of the other axial end portion 202 may also be as follows Figure 26 As shown. Figure 26 In the embodiment, when viewed from the front, the hole portion 202C is formed symmetrically with respect to the central axis of the cylindrical body 20. The hole portion 202C has a recessed portion 202C1 on one axial side (X1) and a protruding edge portion 202C2 on the other axial side (X2). The recessed portion 202C1 is recessed toward the one axial side (X1). The other axial end portion 202 has a protruding portion 202F that protrudes toward the one axial side (X1). The protruding edge portion 202C2 is the edge of the protruding portion 202F.

[0216] <4. Others> While the embodiment of the present invention has been described above, the embodiment can be modified in various ways within the scope of the gist of the present invention.

[0217] For example, the conductor securing structure described above can also be applied to a contact terminal in which two sliding contacts are formed between a main body located in the middle of a cylindrical body into which conductors arranged axially opposite sides are inserted. Furthermore, the securing structure can also be applied to a contact terminal in which only one conductor is secured to a cylindrical body.

[0218] The present invention can be used, for example, for electrical inspection of various inspection objects.

Claims

1. A contact terminal, comprising: a cylindrical body extending along the axial direction of the contact terminal and having conductivity; as well as The first rod-shaped conductor is conductive. The cylindrical body comprises: The end side notch is provided at one axial end portion of the cylindrical body and is formed by notching from one axial end surface toward the other axial end surface; A hole portion having an opening at one end portion on one side in the axial direction; and A pair of arms, clamped by the end side cutout and the hole, The first conductor has: a first protrusion protruding from the cylindrical body toward one side of the axis; as well as The first insertion portion is connected to the other axial side of the first protrusion and is disposed inside the cylindrical body. The first insertion portion has: an inclined portion, the outer diameter of which increases toward one side of the axial direction; and The first straight portion is connected to one side of the axial direction of the inclined portion and has an outer diameter fixed along the axial direction. The outer diameter of the first straight portion is larger than the inner diameter of the cylindrical body. The first straight portion is in contact with the arm portion, A wall surface portion disposed at one axial side end of the first straight portion is capable of contacting the hole portion.

2. The contact terminal according to claim 1, wherein The first protrusion has a flange portion facing one end surface of the cylindrical body in the axial direction.

3. The contact terminal according to claim 2, wherein The distance between the wall portion and the flange portion is equal to the distance between the hole portion and the end surface on one side in the axial direction.

4. The contact terminal according to any one of claims 1 to 3, wherein A portion of the first straight portion is exposed from the hole.

5. The contact terminal according to any one of claims 1 to 4, wherein The first insertion portion has a second straight portion connected to the other axial side of the inclined portion and having an outer diameter fixed along the axial direction. The outer diameter of the second straight portion is the same as the inner diameter of the cylindrical body.

6. The contact terminal according to any one of claims 1 to 5, wherein The hole portion includes an axially protruding edge portion, which is an edge portion of the axially protruding portion protruding from one end portion in the axial direction toward the other end portion in the axial direction. The wall surface portion is capable of contacting the axially protruding edge portion.

7. The contact terminal according to any one of claims 1 to 6, wherein One end portion of the axial direction has a pair of circumferential protrusions close to each other and protruding in the circumferential direction, The hole portion includes a circumferential protruding edge portion, which is an edge portion of the circumferential protrusion.

8. The contact terminal according to any one of claims 1 to 7, wherein The end side cutout has a fixed width portion whose width is fixed along the axial direction. The fixed width portion extends from one end surface on one side in the axial direction to a position overlapping with the inclined portion when viewed in a first direction perpendicular to the axial direction.

9. The contact terminal according to any one of claims 1 to 8, wherein The hole portion has a narrow portion whose circumferential width decreases toward the other axial side.

10. The contact terminal according to any one of claims 1 to 9, wherein The end-side cutout has a wide portion whose width increases toward the other axial side.

11. The contact terminal according to any one of claims 1 to 10, wherein The first conductor has a shape of a body of revolution about the axial direction.

12. The contact terminal according to any one of claims 1 to 11, wherein It also includes a second rod-shaped conductor having electrical conductivity, The second conductor has a second insertion portion disposed inside the cylindrical body. The cylindrical body comprises: The second end side notch is provided at the other axial end of the cylindrical body and is notched from the other axial end surface toward one axial side; A second hole portion is open at the other end portion in the axial direction; and A pair of second arm portions, clamped by the second end side cutout and the second hole portion, The second insertion portion has: The second inclined portion has an outer diameter that increases toward the other axial side; and The third straight portion is connected to the other axial side of the second inclined portion and has an outer diameter fixed in the axial direction. The outer diameter of the third straight portion is larger than the inner diameter of the cylindrical body. The third straight portion contacts the second arm portion, A wall surface portion arranged at the other axial side end of the third straight portion is capable of contacting the second hole portion.

13. An inspection jig, comprising: A plurality of contact terminals according to any one of claims 1 to 12; as well as A supporting member supports the plurality of contact terminals.

14. An inspection device comprising: The inspection jig according to claim 13; as well as The inspection processing unit inspects the inspection object based on an electrical signal obtained by bringing the contact terminal into contact with an inspection point provided on the inspection object.

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