A chip alignment and peeling platform

CN115410970BActive Publication Date: 2025-09-23SUZHOU CLINTEK INTELLIGENT TECH CO LTD +1
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Patent Information

Application Number
CN202211073324.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-09-02
Publication Date
2025-09-23
Estimated Expiration
2042-09-02

AI Technical Summary

Technical Problem

In the prior art, the lifting method using ejector pins easily causes damage to the blue film, resulting in chip suction failure.

Method used

The fine-tuning structure and large-stroke mechanism are adopted to drive the suction nozzle to move up and down through the fine-tuning structure to prevent the ejector from moving accordingly. The Y-axis and X-axis adjustment mechanisms are combined to accurately locate and adjust the position of the blue film chip, and the servo motor and cam mechanism are used to achieve precise control of the suction nozzle.

Benefits of technology

The blue film chip can be lifted without damage and accurately positioned, which prevents the ejector from puncturing the blue film. At the same time, the success rate of chip absorption and the accuracy of position adjustment are improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention discloses a chip alignment and peeling platform, including a fine-tuning structure, a supporting platform, a connecting ejector pin and a suction nozzle, wherein the connecting ejector pin and the suction nozzle are clamped inside the fine-tuning structure, and the fine-tuning structure drives the suction nozzle to move in the up and down directions. A large-stroke mechanism is fixedly connected to one side of the fine-tuning structure, and a supporting platform that fits with the connecting ejector pin and the suction nozzle is provided above the fine-tuning structure. The present invention can drive the suction nozzle and the ejector pin to move in a large stroke by providing a large-stroke mechanism, and can move them to the bottom of the blue film chip, and then start the fine-tuning mechanism to operate. Such a setting can make the suction nozzle move up and down during the process of lifting the blue film, while the internal ejector pin will not move accordingly. Such a setting is convenient for external grains to be sucked up when the suction nozzle is used to lift it, and will not cause the ejector pin to puncture the blue film chip.
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Description

Technical Field

[0001] The present invention relates to the technical field of chip processing, in particular to a chip alignment and peeling platform. Background Art

[0002] During the chip manufacturing process, a large number of chip dies need to be transported by a placement machine, and the dies are accurately placed on a glass wafer or a silicon wafer by moving the placement head. During the die suction process, the soft transparent film in the middle of the top of the blue film chip needs to be supported and positioned. This setting can prevent the suction nozzle from directly extending to suck the chip dies, so that the transparent film will be pushed back, causing the vacuum to break and the suction failure. The existing technology usually uses the lifting of the ejector pin to lift the film. Because the blue film is thin, the traditional method of using the ejector pin to lift is prone to damage. For this reason, we propose a chip alignment and peeling platform. Summary of the Invention

[0003] The purpose of the present invention is to provide a chip alignment and peeling platform to solve the problems that need to be solved in the background technology.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a chip alignment and peeling platform, comprising a fine-tuning structure, a carrying platform, a connecting ejector pin and a suction nozzle, wherein the connecting ejector pin and the suction nozzle are clamped in the interior of the fine-tuning structure, and the fine-tuning structure drives the suction nozzle to move in the up and down directions, and a large-stroke mechanism is fixedly connected to one side of the fine-tuning structure, and a carrying platform that fits with the connecting ejector pin and the suction nozzle is provided above the fine-tuning structure, and the fine-tuning structure comprises a second support frame and a third support frame, the top of the second support frame is fixedly connected to the third support frame, and one side of the third support frame is fixedly connected to the first servo motor, and the third support frame is fixedly connected to the first servo motor. The output end of a servo motor is fixedly connected to a cam, a first clamping block is fixedly connected to one side of the first servo motor and located above the cam through a first connecting block, a connecting ejector pin is clamped inside the first clamping block, a second slide rail is fixedly connected to one side of the first servo motor, a first slide seat is slidably connected to the outer surface of the second slide rail, a bearing is rotatably connected to the bottom of the first slide seat and corresponding to the position of the cam through a second mounting seat, a second clamping block is fixedly connected to one side of the first slide seat and located above the connecting ejector pin, a suction nozzle is clamped inside the second clamping block, and the connecting ejector pin is inserted into the inside of the suction nozzle.

[0005] Preferably, the bottom of the carrying platform is fixedly connected to a Y-axis adjustment mechanism that drives it to move in the Y-axis direction, and an X-axis adjustment mechanism is fixedly installed below the Y-axis adjustment mechanism that drives the carrying platform and the Y-axis adjustment mechanism to move in the X-axis direction.

[0006] Preferably, the large-stroke mechanism includes a first support frame, a first mounting seat and a screw motor, one side of the first support frame is fixedly connected to two sets of first slide rails, the outer surface of the first slide rail is slidably connected to the first mounting seat, and a screw motor that drives the first threaded sleeve to move up and down is provided at the top of the first support frame and at a position corresponding to the first mounting seat, and one side of the first mounting seat is fixedly connected to the second support frame through the first threaded sleeve.

[0007] Preferably, the X-axis adjustment mechanism includes a third mounting seat and a fourth mounting seat, the third slide rail is arranged on the third mounting seat, the third mounting seat is arranged into two groups symmetrical to each other, the outer surface of the third slide rail is slidably connected to the second slide, the top of the second slide is fixedly connected to the second connecting block, the fourth mounting seat is arranged into two groups and is located between the two groups of third slide rails, one side of the fourth mounting seat is fixedly connected to the second servo motor, the output end of the second servo motor is fixedly connected to the first threaded rod, the other end of the first threaded rod is rotatably mounted on the surface of the other group of fourth mounting seats, the outer surface of the first threaded rod is provided with a second threaded sleeve adapted thereto, and the top of one side of the second threaded sleeve is fixedly mounted on the side wall of the second connecting block.

[0008] Preferably, the Y-axis adjustment mechanism includes a fifth mounting seat and a third servo motor, the fifth mounting seat is fixedly mounted on the top of the second connecting block, one side of the fifth mounting seat is fixedly connected to the third servo motor, the output end of the third servo motor is fixedly connected to the second threaded rod, one end of the second threaded rod is rotatably mounted on one side of the inner wall of the fifth mounting seat, the outer surface of the second threaded rod is rotatably connected to a third threaded sleeve adapted thereto, and the top of the third threaded sleeve is fixedly connected to the connecting seat.

[0009] Preferably, a through groove is provided between the top of the third threaded sleeve and the bottom of the connecting seat, the interior of the through groove is slidably connected to a limit plate, and both ends of the limit plate are fixedly mounted on the top of the fifth mounting seat.

[0010] Preferably, the supporting platform includes a first supporting frame, an upper chuck, a lower chuck and a blue film chip. The top of the connecting seat is fixedly connected to the first supporting frame, the inner wall of the first supporting frame is rotatably connected to the upper chuck and the lower chuck, the top of the upper chuck is overlapped with the blue film chip, and a pressure block for positioning the blue film chip is provided at the top of the first supporting frame and above the blue film chip.

[0011] Preferably, a taking groove for facilitating taking of the blue film chip is provided on the surface of the first carrying frame and on one side corresponding to the upper chuck.

[0012] Preferably, a second supporting frame is fixedly connected to one side of the first supporting frame, a fourth servo motor is fixedly connected to the bottom of the second supporting frame, and a cam is fixedly connected to the output end of the fourth servo motor and located inside the second supporting frame, and the outer surface of the cam is connected to the connection position of the upper chuck and the lower chuck through a belt.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. The present invention provides a large-stroke mechanism to drive the suction nozzle and the ejector pin to perform a large-stroke movement, which can move them to the bottom of the blue film chip, and then activate the fine-tuning mechanism to operate. This arrangement allows the suction nozzle to move up and down during the process of lifting the blue film, while the internal ejector pin does not move accordingly. This arrangement facilitates the suction of external grains when the suction nozzle is used to lift it, and does not cause the ejector pin to puncture the blue film chip;

[0015] 2. After a portion of the grains are extracted, the Y-axis adjustment mechanism and the X-axis adjustment mechanism can be used to adjust the position of the blue film chip on the carrying platform, and the external alignment camera can be used to position it. This setting can facilitate accurate adjustment of the position of the blue film chip;

[0016] 3. The rotation of the fourth servo motor can drive the blue film chip between the upper chuck and the lower chuck to rotate through the belt. This setting can cooperate with the Y-axis adjustment mechanism and the X-axis adjustment mechanism to facilitate rapid adjustment of the position of the blue film chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0018] Figure 2 This is a schematic diagram of the connection structure between the large stroke mechanism and the fine adjustment structure of the present invention;

[0019] Figure 3 This is a schematic diagram of the three-dimensional structure of the fine-tuning structure of the present invention;

[0020] Figure 4 This is an enlarged schematic diagram of structure A of the present invention;

[0021] Figure 5 This is a schematic diagram of the three-dimensional structure of the connecting ejector pin of the present invention;

[0022] Figure 6 This is a schematic diagram of the three-dimensional connection structure of the Y-axis adjustment mechanism and the X-axis adjustment mechanism of the present invention;

[0023] Figure 7 This is a schematic diagram of the three-dimensional structure of the carrying platform of the present invention;

[0024] Figure 8 This is a schematic diagram of the three-dimensional structure of the carrying platform after the first carrying frame and the second carrying frame are removed.

[0025] In the figure: 1 large stroke mechanism, 2 fine adjustment structure, 3 carrying platform, 4 Y axis adjustment mechanism, 5 X-axis adjustment mechanism, 6 first support frame, 7 first mounting seat, 8 lead screw motor, 9 first threaded sleeve, 10 first slide rail, 11 second support frame, 12 third support frame, 13 first servo motor, 14 cam, 15 first connecting block, 16 first clamping block, 17 connecting ejector, 18 second slide rail, 19 first slide, 20 second mounting seat, 21 bearing, 22 second clamping block, 23 suction nozzle, 24 third mounting seat, 25 third slide rail, 26 second slide, 27 second connecting block, 28 fourth mounting seat, 29 second servo motor, 30 first threaded rod, 31 second threaded sleeve, 32 fifth mounting seat, 33 third servo motor, 34 second threaded rod, 35 third threaded sleeve, 36 limiting plate, 37 connecting seat, 38 first bearing frame, 39 upper chuck, 40 lower chuck, 41 blue film chip, 42 second bearing frame, 43 fourth servo motor, 44 concave wheel, 45 belt. DETAILED DESCRIPTION

[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0027] See also Figure 1 、 Figure 2 、 Figure 3 and Figure 4The present invention provides a technical solution: a chip alignment and peeling platform, comprising a fine-tuning structure 2, a carrying platform 3, a connecting ejector pin 17 and a suction nozzle 23, wherein the connecting ejector pin 17 and the suction nozzle 23 are clamped in the interior of the fine-tuning structure 2, and the fine-tuning structure 2 drives the suction nozzle 23 to move in the up and down directions. A large-stroke mechanism 1 is fixedly connected to one side of the fine-tuning structure 2, and a carrying platform 3 that fits with the connecting ejector pin 17 and the suction nozzle 23 is provided above the fine-tuning structure 2. The fine-tuning structure 2 comprises a second support frame 11 and a third support frame 12, the top of the second support frame 11 is fixedly connected to the third support frame 12, and one side of the third support frame 12 is fixedly connected to the first servo motor 13, and the output of the first servo motor 13 The output end is fixedly connected to a cam 14, and a first clamping block 16 is fixedly connected to one side of the first servo motor 13 and located above the cam 14 through a first connecting block 15, and a connecting ejector pin 17 is clamped inside the first clamping block 16, and a second slide rail 18 is fixedly connected to one side of the first servo motor 13, and a first slide seat 19 is slidably connected to the outer surface of the second slide rail 18, and a bearing 21 is rotatably connected to the bottom of the first slide seat 19 and the position corresponding to the cam 14 through a second mounting seat 20, and a second clamping block 22 is fixedly connected to one side of the first slide seat 19 and located above the connecting ejector pin 17, and a suction nozzle 23 is clamped inside the second clamping block 22, and the connecting ejector pin 17 is inserted into the inside of the suction nozzle 23.

[0028] Among them, the large-stroke mechanism 1 can drive the suction nozzle 23 and the ejector pin 17 to perform a large-stroke movement, which can move them to the bottom of the blue film chip 41, and then start the fine-tuning structure 2 to operate. Such a setting can make the suction nozzle 23 move up and down in the process of lifting the blue film chip 41, and the internal ejector pin 17 will not move accordingly. Such a setting is convenient for external grain absorption when using the suction nozzle 23 to lift it, and will not cause the ejector pin 17 to puncture the blue film chip. When the fine-tuning structure 2 is in operation, the first servo motor 13 is first started to operate. The rotation of the first servo motor 13 can drive the cam 14 to rotate. The rotating cam 14 can continuously contact the bearing 21, and then the first slide 19, the second clamping block 22 and the suction nozzle 23 connected to the bearing 21 and the second mounting seat 20 can be moved up and down along the outer surface of the second slide rail 18, so that the blue film chip set on the surface of the carrying platform 3 can be continuously lifted.

[0029] See also Figure 1 The bottom of the carrying platform 3 is fixedly connected to a Y-axis adjustment mechanism 4 that drives it to move in the Y-axis direction, and the lower part of the Y-axis adjustment mechanism 4 is fixedly installed with an X-axis adjustment mechanism 5 that drives the carrying platform 3 and the Y-axis adjustment mechanism 4 to move in the X-axis direction.

[0030] Among them, after a part of the grains are extracted, the Y-axis adjustment mechanism 4 and the X-axis adjustment mechanism 4 can be used to adjust the position of the blue film chip 41 carried by the carrying platform, and the external alignment camera can be used to position it. This setting can facilitate the accurate adjustment of the position of the blue film chip 41.

[0031] See also Figure 1 and Figure 2 The large-stroke mechanism 1 includes a first support frame 6, a first mounting seat 7 and a screw motor 8. Two sets of first slide rails 10 are fixedly connected to one side of the first support frame 6. The outer surface of the first slide rail 10 is slidably connected to the first mounting seat 7. A screw motor 8 that drives the first threaded sleeve 9 to move up and down is provided at the top of the first support frame 6 and corresponding to the position of the first mounting seat 7. One side of the first mounting seat 7 is fixedly connected to the second support frame 11 through the first threaded sleeve 9.

[0032] Among them, when it is necessary to drive the suction nozzle 23 and the ejector pin 17 to move a large stroke, the screw motor 8 is first started to operate. The operation of the screw motor 8 can drive the first mounting seat 7 and the first threaded sleeve 9 to move a large stroke in the up and down directions. The up and down movement of the first threaded sleeve 9 can drive the fine-tuning structure 2, the ejector pin 17 and the suction nozzle 23 connected thereto to move in the up and down directions.

[0033] See also Figure 1 and Figure 6 The X-axis adjustment mechanism 5 includes a third mounting seat 24 and a fourth mounting seat 28. The third slide rail 25 is arranged on the third mounting seat 24. The third mounting seat 24 is arranged into two groups symmetrical to each other. The outer surface of the third slide rail 25 is slidably connected with the second slide seat 26. The top of the second slide seat 26 is fixedly connected with the second connecting block 27. The fourth mounting seat 28 is arranged into two groups and is located between the two groups of third slide rails 25. One side of the fourth mounting seat 28 is fixedly connected with the second servo motor 29. The output end of the second servo motor 29 is fixedly connected with the first threaded rod 30. The other end of the first threaded rod 30 is rotatably mounted on the surface of the other group of fourth mounting seats 28. The outer surface of the first threaded rod 30 is provided with a second threaded sleeve 31 adapted thereto. The top of one side of the second threaded sleeve 31 is fixedly mounted on the side wall of the second connecting block 27.

[0034] Among them, when it is necessary to adjust the position of the supporting platform 3, the second servo motor 29 is first started to rotate. The operation of the second servo motor 29 can drive the second connecting block 27 and the second slide 26 to move along the third slide rail 25 in the X-axis direction through the second threaded sleeve 31, so that the Y-axis adjustment mechanism 4 and the supporting platform 3 on the top can be moved.

[0035] See also Figure 1 and Figure 6 The Y-axis adjustment mechanism 4 includes a fifth mounting seat 32 and a third servo motor 33. The fifth mounting seat 32 is fixedly mounted on the top of the second connecting block 27. One side of the fifth mounting seat 32 is fixedly connected to the third servo motor 33. The output end of the third servo motor 33 is fixedly connected to a second threaded rod 34. One end of the second threaded rod 34 is rotatably mounted on one side of the inner wall of the fifth mounting seat 32. The outer surface of the second threaded rod 34 is rotatably connected to a third threaded sleeve 35 adapted thereto. The top of the third threaded sleeve 35 is fixedly connected to a connecting seat 37. A through groove is provided between the top of the third threaded sleeve 35 and the bottom of the connecting seat 37. The inside of the through groove is slidably connected to a limit plate 36. The two ends of the limit plate 36 are respectively fixedly mounted on the top of the fifth mounting seat 32.

[0036] Among them, when it is necessary to move the supporting platform 3 in the Y-axis direction, the third servo motor 33 is started to operate. The operation of the third servo motor 33 can drive the second threaded rod 34 to rotate, and then the third threaded sleeve 35 and the connecting seat 37 at its top can be driven to move along the outer surface of the limiting plate 36, thereby driving the supporting platform 3 at its top to move in the Y-axis direction.

[0037] See also Figure 1 、 Figure 7 and Figure 8 The carrying platform 3 includes a first carrying frame 38, an upper chuck 39, a lower chuck 40 and a blue film chip 41. The top of the connecting seat 37 is fixedly connected to the first carrying frame 38, and the inner wall of the first carrying frame 38 is rotatably connected to the upper chuck 39 and the lower chuck 40. The top of the upper chuck 39 is overlapped with the blue film chip 41. The top of the first carrying frame 38 and above the blue film chip 41 are provided with a pressure block for positioning the blue film chip 41. The surface of the first carrying frame 38 and the side corresponding to the upper chuck 39 are penetrated by a taking groove for conveniently taking the blue film chip 41. A second carrying frame 42 is fixedly connected to one side of the first carrying frame 38, and a fourth servo motor 43 is fixedly connected to the bottom of the second carrying frame 42. The output end of the fourth servo motor 43 and the interior of the second carrying frame 42 are fixedly connected to a concave wheel 44. The outer surface of the concave wheel 44 is connected to the connection position of the upper chuck 39 and the lower chuck 40 by a belt 45.

[0038] Among them, the setting of the upper chuck 39 and the lower chuck 40 can carry the blue film chip 41, and then starting the operation of the fourth servo motor 43 can drive the upper chuck 39 and the lower chuck 40 to rotate through the concave wheel 44 and the belt 45, and then the blue film chip 41 can be rotated. Such a setting can cooperate with the Y-axis adjustment mechanism 4 and the X-axis adjustment mechanism 5, so as to facilitate the rapid adjustment of the position of the blue film chip 41.

[0039] When in use, first, the large-stroke mechanism 1 can drive the suction nozzle 23 and the ejector pin 17 to perform a large-stroke movement, so that they can be moved to the bottom of the blue film chip 41, and then the fine-tuning structure 2 is started to operate. Such a setting can make the suction nozzle 23 move up and down in the process of lifting the blue film chip 41, and the internal ejector pin 17 will not move accordingly. Such a setting is convenient for external grain absorption when the suction nozzle 23 is used to lift it, and the ejector pin 17 will not puncture the blue film chip. When the fine-tuning structure 2 is in operation, the first servo motor 13 is first started to operate. The rotation of the first servo motor 13 can drive the cam 14 to rotate, and the rotating cam 14 can continuously connect with the bearing 21 After the first slide 19, the second clamping block 22 and the suction nozzle 23 connected to the bearing 21 and the second mounting seat 20 are touched, the first slide 19, the second clamping block 22 and the suction nozzle 23 connected to the bearing 21 and the second mounting seat 20 can be moved up and down along the outer surface of the second slide rail 18, so that the blue film chip set on the surface of the carrying platform 3 can be continuously lifted up. After a part of the grains are extracted, the Y-axis adjustment mechanism 4 and the X-axis adjustment mechanism 4 can be used to adjust the position of the blue film chip 41 carried by the carrying platform, and the external alignment camera can be used to position it. Such a setting can facilitate the accurate adjustment of the position of the blue film chip 41. When it is necessary to drive the suction nozzle 23 and the ejector pin 17 to move a large stroke, the screw motor 8 is first started to operate. The operation of the screw motor 8 can drive The first mounting seat 7 and the first threaded sleeve 9 are moved up and down with a large stroke. The up and down movement of the first threaded sleeve 9 can drive the fine-tuning structure 2, the ejector pin 17 and the suction nozzle 23 connected thereto to move up and down. When it is necessary to adjust the position of the carrying platform 3, the second servo motor 29 is first started to rotate. The operation of the second servo motor 29 can drive the second connecting block 27 and the second slide 26 to move in the X-axis direction along the third slide rail 25 through the second threaded sleeve 31, so that the Y-axis adjustment mechanism 4 and the carrying platform 3 on the top can be moved. When it is necessary to move the carrying platform 3 in the Y-axis direction, the third servo motor 33 is started to operate. The operation of the third servo motor 33 can drive the second threaded rod 34 to rotate, and then the third threaded sleeve 35 and the connecting seat 37 on its top can be driven to move along the outer surface of the limit plate 36, so as to drive the carrying platform 3 on its top to move in the Y-axis direction, and then the upper chuck 39 and the lower chuck 40 are set to carry the blue film chip 41, and then the operation of the fourth servo motor 43 is started to drive the upper chuck 39 and the lower chuck 40 to rotate through the concave wheel 44 and the belt 45, and then the blue film chip 41 can be rotated. Such a setting can cooperate with the Y-axis adjustment mechanism 4 and the X-axis adjustment mechanism 5, so as to facilitate the rapid adjustment of the position of the blue film chip 41.

[0040] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A chip alignment and peeling platform, comprising a fine-tuning structure (2), a carrying platform (3), a connecting ejector pin (17) and a suction nozzle (23), characterized in that: The connecting ejector pin (17) and the suction nozzle (23) are clamped in the interior of the fine-tuning structure (2), and the fine-tuning structure (2) drives the suction nozzle (23) to move in the up-down direction. A large stroke mechanism (1) is fixedly connected to one side of the fine-tuning structure (2), and a bearing platform (3) is provided above the fine-tuning structure (2) and is fitted with the connecting ejector pin (17) and the suction nozzle (23). The fine-tuning structure (2) includes a second support frame (11) and a third support frame (12), the top of the second support frame (11) is fixedly connected to the third support frame (12), one side of the third support frame (12) is fixedly connected to a first servo motor (13), an output end of the first servo motor (13) is fixedly connected to a cam (14), and one end of the first servo motor (13) is fixedly connected to the cam. A first clamping block (16) is fixedly connected to the side of the cam (14) through a first connecting block (15), a connecting ejector pin (17) is clamped inside the first clamping block (16), a second slide rail (18) is fixedly connected to one side of the first servo motor (13), an outer surface of the second slide rail (18) is slidably connected to a first slide seat (19), a bottom of the first slide seat (19) and a bearing (21) is rotatably connected to the position of the cam (14) through a second mounting seat (20), a second clamping block (22) is fixedly connected to one side of the first slide seat (19) and located above the connecting ejector pin (17), a suction nozzle (23) is clamped inside the second clamping block (22), and the connecting ejector pin (17) is plugged into the interior of the suction nozzle (23); The bottom of the carrying platform (3) is fixedly connected to a Y-axis adjustment mechanism (4) for driving the carrying platform (3) to move in the Y-axis direction, and an X-axis adjustment mechanism (5) is fixedly installed below the Y-axis adjustment mechanism (4) for driving the carrying platform (3) and the Y-axis adjustment mechanism (4) to move in the X-axis direction; The large stroke mechanism (1) comprises a first support frame (6), a first mounting seat (7) and a screw motor (8); one side of the first support frame (6) is fixedly connected to two groups of first slide rails (10); the outer surface of the first slide rail (10) is slidably connected to the first mounting seat (7); a screw motor (8) for driving a first threaded sleeve (9) to move up and down is provided at the top of the first support frame (6) and at a position corresponding to the first mounting seat (7); one side of the first mounting seat (7) is fixedly connected to the second support frame (11) through the first threaded sleeve (9); When the fine-tuning structure (2) is in operation, the first servo motor (13) is in operation and rotates, and the rotation of the first servo motor (13) drives the cam (14) to rotate. The rotating cam (14) is in continuous contact with the bearing (21), so that the first slide (19), the second clamping block (22) and the suction nozzle (23) connected to the bearing (21) and the second mounting seat (20) move up and down along the outer surface of the second slide rail (18), so that the blue film chip set on the surface of the supporting platform (3) is continuously lifted up.

2. The chip alignment and peeling platform according to claim 1, characterized in that: The X-axis adjustment mechanism (5) includes a third mounting seat (24) and a fourth mounting seat (28), the third slide rail (25) is arranged on the third mounting seat (24), the third mounting seat (24) is arranged into two groups symmetrical to each other, the outer surface of the third slide rail (25) is slidably connected to the second slide seat (26), the top of the second slide seat (26) is fixedly connected to the second connecting block (27), the fourth mounting seat (28) is arranged into two groups and is located between the two groups of third slide rails (25), one side of the fourth mounting seat (28) is fixedly connected to the second servo motor (29), the output end of the second servo motor (29) is fixedly connected to the first threaded rod (30), the other end of the first threaded rod (30) is rotatably mounted on the surface of the other group of fourth mounting seats (28), the outer surface of the first threaded rod (30) is provided with a second threaded sleeve (31) adapted thereto, and the top of one side of the second threaded sleeve (31) is fixedly mounted on the side wall of the second connecting block (27).

3. The chip alignment and peeling platform according to claim 2, characterized in that: The Y-axis adjustment mechanism (4) comprises a fifth mounting seat (32) and a third servo motor (33), wherein the fifth mounting seat (32) is fixedly mounted on the top of the second connecting block (27), one side of the fifth mounting seat (32) is fixedly connected to the third servo motor (33), an output end of the third servo motor (33) is fixedly connected to a second threaded rod (34), one end of the second threaded rod (34) is rotatably mounted on one side of the inner wall of the fifth mounting seat (32), an outer surface of the second threaded rod (34) is rotatably connected to a third threaded sleeve (35) adapted thereto, and the top of the third threaded sleeve (35) is fixedly connected to a connecting seat (37).

4. The chip alignment and peeling platform according to claim 3, characterized in that: A through slot is provided between the top of the third threaded sleeve (35) and the bottom of the connecting seat (37), and a limiting plate (36) is slidably connected inside the through slot. Both ends of the limiting plate (36) are fixedly mounted on the top of the fifth mounting seat (32).

5. The chip alignment and peeling platform according to claim 4, characterized in that: The carrying platform (3) comprises a first carrying frame (38), an upper chuck (39), a lower chuck (40) and a blue film chip (41); the top of the connecting seat (37) is fixedly connected to the first carrying frame (38); the inner wall of the first carrying frame (38) is rotatably connected to the upper chuck (39) and the lower chuck (40); the top of the upper chuck (39) is overlapped with the blue film chip (41); and a pressure block for positioning the blue film chip (41) is provided at the top of the first carrying frame (38) and above the blue film chip (41).

6. The chip alignment and peeling platform according to claim 5, characterized in that: A taking groove for facilitating the taking of the blue film chip (41) is provided on the surface of the first carrying frame (38) and on one side corresponding to the upper chuck (39).

7. The chip alignment and peeling platform according to claim 6, characterized in that: A second carrying frame (42) is fixedly connected to one side of the first carrying frame (38), a fourth servo motor (43) is fixedly connected to the bottom of the second carrying frame (42), a cam (44) is fixedly connected to the output end of the fourth servo motor (43) and located inside the second carrying frame (42), and an outer surface of the cam (44) is connected to the connection position of the upper chuck (39) and the lower chuck (40) via a belt (45).

Citation Information

Patent Citations

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