Target disk support rod of ion implanter and processing method

Abstract

The utility model discloses a target disc support rod of ion implanter and processing method, including first connecting seat, second connecting seat, first connecting seat and second connecting seat are connected through connecting rod, the middle part of connecting rod is provided with sliding groove, and the upper and lower directions of sliding groove are symmetrically provided with a plurality of waist shape long slot, its processing method includes the following steps: selecting material, processing center milling processing, degreasing, polishing, alkali washing, pickling, blow dry, the utility model discloses convenient processing, simple and reasonable in structure, both reduce the weight of target disc support rod, guarantee rigidity, and high -speed ion beam impact target disc is not easy to produce deformation, and silicon wafer is not easy to produce microcrack after ion implantation, improves the quality of silicon wafer, and chemical cleaning enhances the corrosion resistance of target disc support rod, prolongs the service life, and promotes product appearance.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ion implanter, in particular to a target disc supporting rod of ion implanter and a processing method thereof. BACKGROUND

[0002] The ion implanter is a key equipment in the integrated circuit manufacturing process. Ion implantation is to ionize the element to be implanted, separate and accelerate the positive ions, form a high-energy ion flow with tens of thousands of electron volts, and hit the surface of the silicon wafer. The ion is hit into the surface layer due to its large kinetic energy, and its charge is neutralized to become a substitution atom or an interstitial atom in the lattice, which is left in the surface layer to change the chemical composition, structure and performance of the material. In the process of manufacturing silicon wafers, the silicon wafers need to be placed in the target disc for ion implantation. At present, the impact of high-speed ion beams causes great impact on the target disc. Although a shock-absorbing base is used to reduce the damage to the target disc, the target disc supporting rod is easy to deform, and the silicon wafers in the target disc are easy to produce micro-cracks, thereby reducing the quality of the silicon wafers. SUMMARY

[0003] The present application aims to solve the above technical problems and provide a target disc supporting rod of ion implanter and a processing method thereof.

[0004] In order to achieve the above technical purpose and meet the above technical requirements, the technical solution adopted by the present application is as follows: a target disc supporting rod of ion implanter and a processing method thereof. The target disc supporting rod of ion implanter comprises a first connecting seat and a second connecting seat, characterized in that: the first connecting seat and the second connecting seat are connected through a connecting rod, a sliding groove is arranged in the middle of the connecting rod, and a plurality of waist-shaped long grooves are arranged symmetrically in the up-down direction of the sliding groove.

[0005] The ratio of the depth Lc of the waist-shaped long groove to the thickness Lb of the connecting rod is 0.6-0.75;

[0006] The ratio of the bottom thickness Ld of the waist-shaped long groove to the thickness Lb of the connecting rod is 0.25-0.4;

[0007] The ratio of the thickness Lb of the connecting rod to the length L of the connecting rod is 1:38-1:40;

[0008] The ratio of the width La of the connecting rod to the length L of the connecting rod is 1:11.5-1:12;

[0009] The sliding groove penetrates the first connecting seat, the connecting rod and the second connecting seat;

[0010] The sliding groove is arranged as a dovetail groove or a T-shaped groove;

[0011] The first connecting seat and the second connecting seat are the same in structure;

[0012] The material of the target disc supporting rod is aluminum alloy;

[0013] The processing method comprises the following steps:

[0014] Step one, material selection, select aluminum alloy sheet;

[0015] Step two, write the processing program, use UG software to write the processing program, and process on the machining center;

[0016] Step three, machining center milling

[0017] 1) The pressing plate presses the workpiece, processes the first connecting seat and the second connecting seat to ensure the total length, total width and connecting rod thickness Lb to the drawing size;

[0018] 2) The clamp clamps the workpiece, and processes the mounting hole on the first connecting seat to the drawing size;

[0019] 3) The clamp clamps the workpiece, and processes the mounting hole on the second connecting seat to the drawing size;

[0020] 4) The pressing plate presses the workpiece, and processes the connecting rod length L and the connecting rod width La;

[0021] 5) The pressing plate presses the workpiece, and processes the sliding groove;

[0022] 6) The pressing plate presses the workpiece, and processes the process hole;

[0023] 7) The pressing plate and the process hole lock the workpiece by pressing the workpiece, and process the waist-shaped long groove;

[0024] Step four, degreasing, put the part into an alkaline degreasing agent with a temperature of 10-45℃ and a concentration of 8-20% for 10-35 minutes, then take it out and wash it with clean water, and dry it;

[0025] Step five, polishing, use a hundred abrasive cloth and a diamond sand polisher to process all the lines;

[0026] Step six, alkali washing: immerse the part in a 10-25% sodium hydroxide solution with a temperature of 35-60℃ for 10-30 seconds, then take it out and wash it with clean water;

[0027] Step seven, pickling: immerse the part in a pickling solution containing 1-4% hydrofluoric acid and 10-22% nitric acid for 30-90 seconds, the pickling solution temperature is 30-50℃, then take it out and wash it with clean water;

[0028] Step eight, dry.

[0029] Preferably, the drying is: using dry air or dry nitrogen filtered by a 0.1 μm filter to blow off the visible moisture on the product.

[0030] Compared with the traditional structure, the target disc support rod has the advantages of convenient processing, simple and reasonable structure, reduced weight of the target disc support rod, ensured rigidity, reduced deformation of the target disc under the impact of the high-speed ion beam, reduced micro-cracks of the silicon wafer after ion implantation, improved quality of the silicon wafer, enhanced corrosion resistance of the target disc support rod through chemical cleaning, prolonged service life, improved product appearance, and good economic and social benefits. BRIEF DESCRIPTION OF DRAWINGS

[0031] Figure 1 is a front view of the present application;

[0032] Figure 2 is a top view of the present application;

[0033] Figure 3 is Figure 1 is an A-A sectional view of the present application;

[0034] In the figure: 1. first connecting seat, 2. connecting rod, 3. waist-shaped long groove, 4. sliding groove, 5. second connecting seat, 6. connecting rod width La, 7. connecting rod length L, 8. connecting rod thickness Lb, 9. waist-shaped long groove depth Lc, 10. waist-shaped long groove bottom thickness Ld, 11. mounting hole, 12. process hole. DETAILED DESCRIPTION

[0035] The present application will be further described below.

[0036] In the description of the present application, it should be noted that the terms "upper", "lower", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0037] Example 1: target disc support rod of ion implanter and processing method, the target disc support rod of ion implanter, comprising a first connecting seat 1, a second connecting seat 5, characterized in that: the first connecting seat 1 and the second connecting seat 5 are connected through the connecting rod 2, the connecting rod 2 is provided with a sliding groove 4 in the middle, and a plurality of waist-shaped long grooves 3 are symmetrically arranged on the sliding groove 4 in the up-down direction;

[0038] The ratio of the waist-shaped long groove bottom thickness Ld 10 to the connecting rod thickness Lb 8 is 0.3;

[0039] The ratio of the connecting rod thickness Lb 8 to the connecting rod length L 7 is 1:40;

[0040] The ratio of the connecting rod width La 6 to the connecting rod length L 7 is 1:12;

[0041] The sliding slot 4 runs through the first connecting seat 1, the connecting rod 2 and the second connecting seat 5;

[0042] The sliding slot 4 is designed as a dovetail slot or a T-shaped slot;

[0043] The first connecting seat 1 and the second connecting seat 5 are of the same structure;

[0044] The target disc supporting rod is made of aluminum alloy;

[0045] The processing method comprises the following steps:

[0046] Step one, material selection, aluminum alloy sheet is selected;

[0047] Step two, processing program writing, UG software is used to write processing program, and an upper machining center is used for processing;

[0048] Step three, machining center milling,

[0049] 1) The workpiece is pressed by a pressing plate, the first connecting seat 1 and the second connecting seat 5 are processed to ensure the total length, total width and connecting rod thickness Lb8 to the drawing size;

[0050] 2) The workpiece is clamped by a clamp, and the first connecting seat 1 is processed to the drawing size;

[0051] 3) The workpiece is clamped by a clamp, and the second connecting seat 5 is processed to the drawing size;

[0052] 4) The workpiece is pressed by a pressing plate, and the connecting rod length L7 and the connecting rod width La6 are processed;

[0053] 5) The workpiece is pressed by a pressing plate, and the sliding slot 4 is processed;

[0054] 6) The workpiece is pressed by a pressing plate, and the process hole 12 is processed;

[0055] 7) The workpiece is pressed by a pressing plate and a process hole locking screw, and the waist-shaped long groove 3 is processed;

[0056] Step four, degreasing, the part is soaked in an alkaline degreasing agent with a temperature of 20℃ and a concentration of 10% for 30 minutes, then taken out and washed with clean water, dried, and the visible moisture on the product is blown off by using dry air or dry nitrogen filtered by a filter with a pore size of 0.1 μm.

[0057] Step five, polishing, all the lines generated by using a hundred abrasive cloth and a diamond sand polisher are polished;

[0058] Step six, alkali washing: the part is immersed in a 15% sodium hydroxide solution with a temperature of 40℃ for 25 seconds, then taken out and washed with clean water;

[0059] Step seven, pickling: immerse the parts in a pickling solution containing 2% hydrofluoric acid and 12% nitric acid for 75 seconds, the temperature of the pickling solution is 35°C, and then take out and wash with clean water;

[0060] Step eight, blow dry, use dry air or dry nitrogen filtered with a 0.1 μm filter to blow off the visible moisture on the product.

[0061] Example 2: Target disc support rod of ion implanter and processing method, the target disc support rod of the ion implanter, comprising a first connecting seat 1 and a second connecting seat 5, characterized in that: the first connecting seat 1 and the second connecting seat 5 are connected through a connecting rod 2, a sliding groove 4 is arranged in the middle of the connecting rod 2, and a plurality of waist-shaped long grooves 3 are arranged symmetrically in the up-down direction on the sliding groove 4;

[0062] The ratio of the waist-shaped long groove bottom thickness Ld10 to the connecting rod thickness Lb8 is 0.32;

[0063] The ratio of the connecting rod thickness Lb8 to the connecting rod length L7 is 1:38;

[0064] The ratio of the connecting rod width La6 to the connecting rod length L7 is 1:12;

[0065] The processing method comprises the following steps:

[0066] Step one, material selection, select aluminum alloy sheet;

[0067] Step two, write processing program, use UG software to write processing forming, and process on machining center;

[0068] Step three, machining center milling,

[0069] 1) The workpiece is pressed by the pressing plate, and the first connecting seat 1 and the second connecting seat 5 are machined to ensure the total length, total width and connecting rod thickness Lb8 to the drawing size;

[0070] 2) The workpiece is clamped by the clamp, and the mounting hole 11 on the first connecting seat 1 is machined to the drawing size;

[0071] 3) The workpiece is clamped by the clamp, and the mounting hole 11 on the second connecting seat 5 is machined to the drawing size;

[0072] 4) The workpiece is pressed by the pressing plate, and the connecting rod length L7 and the connecting rod width La6 are machined;

[0073] 5) The workpiece is pressed by the pressing plate, and the sliding groove 4 is machined;

[0074] 6) The workpiece is pressed by the pressing plate, and the process hole 12 is machined;

[0075] 7) The workpiece is pressed by the pressing plate and the process hole locking screw, and the waist-shaped long groove 3 is machined;

[0076] Step four, degreasing, put the parts into the alkaline degreasing agent with the temperature of 25℃ and the concentration of 15% for 25 minutes, then take out and wash with clean water, dry, and blow off the visible moisture on the product with dry air or dry nitrogen filtered by a filter with 0.1 μm.

[0077] Step five, polishing, polish all the lines produced by using the steel wool and diamond sand polisher;

[0078] Step six, alkaline cleaning: immerse the parts into the 20% sodium hydroxide solution with the temperature of 45℃ for 20 seconds, then take out and wash with clean water;

[0079] Step seven, pickling: immerse the parts into the pickling solution containing 3% hydrofluoric acid and 15% nitric acid for 60 seconds, the temperature of the pickling solution is 40℃, then take out and wash with clean water;

[0080] Step eight, drying, blow off the visible moisture on the product with dry air or dry nitrogen filtered by a filter with 0.1 μm.

[0081] Example 3: target disc support rod of ion implanter and processing method, the target disc support rod of the ion implanter comprises a first connecting seat 1 and a second connecting seat 5, characterized in that: the first connecting seat 1 and the second connecting seat 5 are connected through a connecting rod 2, a sliding groove 4 is arranged in the middle of the connecting rod 2, and a plurality of waist-shaped long grooves 3 are symmetrically arranged on the sliding groove 4 in the up-down direction;

[0082] The ratio of the thickness Ld10 of the waist-shaped long groove bottom to the thickness Lb8 of the connecting rod is 0.38;

[0083] The ratio of the thickness Lb8 of the connecting rod to the length L7 of the connecting rod is 1:40;

[0084] The ratio of the width La6 of the connecting rod to the length L7 of the connecting rod is 1:11.5;

[0085] The processing method comprises the following steps:

[0086] Step one, material selection, select aluminum alloy sheet;

[0087] Step two, processing program, use UG software to process and form, and process on the machining center;

[0088] Step three, machining center milling,

[0089] 1) The workpiece is pressed by the pressing plate, and the first connecting seat 1 and the second connecting seat 5 are machined to ensure the total length, total width and thickness Lb8 of the connecting rod to the drawing size;

[0090] 2) The workpiece is clamped by the clamp, and the mounting hole 11 on the first connecting seat 1 is machined to the drawing size;

[0091] 3) clamp clamps the workpiece, and processes the mounting hole 11 on the second connecting base 5 to the drawing size;

[0092] 4) the pressing plate presses the workpiece, and processes the connecting rod length L7 and the connecting rod width La6;

[0093] 5) the pressing plate presses the workpiece, and processes the sliding groove 4;

[0094] 6) the pressing plate presses the workpiece, and processes the process hole 12;

[0095] 7) the pressing plate and the process hole locking screw press the workpiece, and process the waist-shaped long groove 3;

[0096] Step four, degreasing, the part is placed in a temperature of 35 DEG C, concentration of 18% alkaline degreasing agent for 15 minutes, then take out and wash with clean water, dry, use dry air or dry nitrogen gas filtered by a 0.1 mu m filter to blow off the visible moisture on the product.

[0097] Step five, polishing, using a hundred abrasive cloth and a diamond sand polisher to process all the lines;

[0098] Step six, alkali washing: the part is immersed in a 22% sodium hydroxide solution with a temperature of 50 DEG C for 15 seconds, then taken out and washed with clean water;

[0099] Step seven, pickling: the part is immersed in a pickling solution containing hydrofluoric acid 3.5%, nitric acid 20% for 45 seconds, the pickling solution temperature is 45 DEG C, then taken out and washed with clean water;

[0100] Step eight, dry, use dry air or dry nitrogen gas filtered by a 0.1 mu m filter to blow off the visible moisture on the product.

[0101] The connecting rod in the application belongs to an elongated structure, a plurality of waist-shaped long blind grooves are arranged on the connecting rod, the weight of the connecting rod is reduced, and the connecting rod is prevented from deforming, the ratio of the waist-shaped long groove bottom thickness Ld10 to the connecting rod thickness Lb8 is 0.25-0.4, the rigidity of the connecting rod is ensured, and the connecting rod is prevented from deforming under stress. The sliding groove 4 is arranged as a dovetail groove or a T-shaped groove, so that the damping guide rod sliding block on the damping base can stably move in the sliding groove. In the processing, the workpiece is clamped by the pressing plate, the process hole locking screw and the clamp, and the processing quality is ensured.

[0102] The above embodiments of the application are only used to clearly illustrate the examples of the application, but not used to limit the protection scope of the application, all equivalent technical solutions also belong to the scope of the application, and the patent protection scope of the application should be defined by the claims.

Claims

1. A method for processing a target disc support rod of an ion implanter, the target disc support rod of the ion implanter comprising a first connecting seat (1) and a second connecting seat (5), characterized in that: The first connecting seat (1) and the second connecting seat (5) are connected through a connecting rod (2), a sliding groove (4) is arranged in the middle of the connecting rod (2), and a plurality of waist-shaped long grooves (3) are symmetrically arranged on the sliding groove (4) in the up-down direction; The ratio of the waist-shaped long groove depth Lc (9) to the connecting rod thickness Lb (8) is 0.6-0.75; The ratio of the waist-shaped long groove bottom thickness Ld (10) to the connecting rod thickness Lb (8) is 0.25-0.4; The ratio of the connecting rod thickness Lb (8) to the connecting rod length L (7) is 1:38-1:40; The ratio of the connecting rod width La (6) to the connecting rod length L (7) is 1:11.5-1:12; The sliding groove (4) penetrates the first connecting seat (1), the connecting rod (2) and the second connecting seat (5); The sliding groove (4) is arranged as a dovetail groove or a T-shaped groove; The first connecting seat (1) and the second connecting seat (5) are the same in structure; The target disc supporting rod is made of aluminum alloy; The processing method comprises the following steps: Step one, material selection, select aluminum alloy sheet; Step two, write the processing program, write the processing program with UG software, and process on the machining center; Step three, machining center milling 1) The workpiece is pressed by the pressing plate, the first connecting seat (1) and the second connecting seat (5) are machined to ensure the total length, total width and connecting rod thickness Lb (8) to the drawing size; 2) The workpiece is clamped by the clamp, and the mounting hole (11) on the first connecting seat (1) is machined to the drawing size; 3) The workpiece is clamped by the clamp, and the mounting hole (11) on the second connecting seat (5) is machined to the drawing size; 4) The workpiece is pressed by the pressing plate, and the connecting rod length L (7) and the connecting rod width La (6) are machined; 5) The workpiece is pressed by the pressing plate, and the sliding groove (4) is machined; 6) The workpiece is pressed by the pressing plate, and the process hole (12) is machined; 7) The workpiece is pressed by the pressing plate and the process hole locking screw, and the waist-shaped long groove (3) is machined; Step four, degreasing, put the part into an alkaline degreasing agent with a temperature of 10-45℃ and a concentration of 8-20% for 10-35 minutes, then take it out and wash it with clean water, and dry it; Step five, polishing, use a hundred scrubbers and diamond sand polishing machines to process all the lines; Step six, alkali washing: immerse the part in a 10-25% sodium hydroxide solution with a temperature of 35-60℃ for 10-30 seconds, then take it out and wash it with clean water; Step seven, pickling: immerse the part in a pickling solution containing 1-4% hydrofluoric acid and 10-22% nitric acid for 30-90 seconds, the pickling solution temperature is 30-50℃, then take it out and wash it with clean water; Step eight, dry.

2. The method of claim 1, wherein: The drying is: using dry air or dry nitrogen filtered by a 0.1 μm filter to blow off the visible moisture on the product.

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