A method for reorganizing a laser scanning pattern of a laser processing device and a storage medium

Abstract

The present application relates to a laser processing device, a laser scanning pattern recombination method, and a storage medium. Among them, the laser processing device includes: a laser light source for emitting laser light; a focusing field lens for converging the laser light onto the surface of a target material; a rotating scanning mirror disposed adjacent to the laser light source, and the normal line of the reflecting surface of the rotating scanning mirror has a first included angle with its own rotation central axis; and a segmentation and recombination component disposed adjacent to the rotating scanning mirror, for segmenting a first scanning pattern to form at least two scanning line segments, and performing splicing and recombination on the focal plane of the focusing field lens to form a second scanning pattern. By the above method, the laser processing device in the present application can be compatible with multiple usage scenarios.

Description

Technical Field

[0001] The present application relates to the technical field of laser processing, and particularly relates to a laser processing device and a control method thereof. Background Art

[0002] Laser cleaning technology is to act a high-energy density laser beam on the surface of a target material, so as to process the surface of the target material. The driving mode for controlling the laser scanning trajectory is usually a reciprocating type. However, at the starting end and the stopping end of the laser trajectory, the driving motor that drives the scanning galvanometer to reciprocate usually needs to perform acceleration and deceleration actions, resulting in uneven laser spots at the starting end and the ending end.

[0003] Currently, there already exists a mechanism for improving the laser line scanning speed by driving with a unidirectional motor. However, since the patterns formed by scanning are all circular, it is impossible to generate relatively complex or diversified patterns, which limits the application scenarios of this scanning method. Summary of the Invention

[0004] Aiming at the deficiencies in the above technologies, the present application provides a laser processing device and a control method thereof, which can improve the cleaning efficiency during the laser cleaning process.

[0005] To solve the above technical problems, the technical solution adopted by the present application is:

[0006] A laser processing device includes: a laser light source for emitting laser light; a focusing field lens for converging the laser light onto the surface of the target material; a rotating scanning mirror disposed adjacent to the laser light source, the normal line of the reflecting surface of the rotating scanning mirror having a first included angle with its own rotation central axis, so that the rotating scanning mirror reflects the laser light received from the laser light source through its own rotation movement to form a closed first scanning pattern; and a splitting and recombining component disposed adjacent to the rotating scanning mirror, for receiving the first scanning pattern reflected from the rotating scanning mirror, splitting the first scanning pattern to form at least two scanning line segments, and after reflecting the scanning line segments, performing splicing and recombination on the focal plane of the focusing field lens to form a second scanning pattern on the surface of the target material; wherein, the second scanning pattern is different from the first scanning pattern.

[0007] In an embodiment of the present application, the splitting and recombining component includes two first reflecting mirrors, one first reflecting mirror is located in a first optical path, and the other first reflecting mirror is located in a second optical path; wherein, the first optical path and the second optical path are independent of each other and finally converge on the incident surface of the focusing field lens; wherein, the two first reflecting mirrors are located on different reflecting surfaces and are used for splitting the first scanning pattern to form two arc-shaped scanning line segments.

[0008] In an embodiment of the present application, the reflection angle of at least one of the two first reflectors is adjustable, which is used to adjust the scanning positions of the two scanning line segments on the focusing field lens, so that the two scanning line segments can be connected end to end.

[0009] In an embodiment of the present application, the segmentation and recombination component further includes a second reflector located in the first optical path or the second optical path. The second reflector is arranged between the first reflector and the field lens, and is used to perform mirror symmetry on the scanning line segments in the corresponding optical path, so that the two scanning line segments can overlap each other or have the same scanning direction.

[0010] To solve the above technical problems, a solution proposed in the present application is:

[0011] A laser processing device includes: a laser light source for emitting laser light; a focusing field lens for converging the laser light onto the surface of the target; a rotating scanning mirror arranged adjacent to the laser light source, and the normal line of the reflecting surface of the rotating scanning mirror has a first included angle with its own rotation center axis, so that the rotating scanning mirror reflects the laser light received from the laser light source through its own rotational movement to form a closed first scanning pattern; and a segmentation and recombination component arranged adjacent to the rotating scanning mirror, which is used to receive the first scanning pattern reflected from the rotating scanning mirror, segment the first scanning pattern to form at least two scanning line segments, and converge the scanning line segments onto the surface of the target through the focusing field lens for splicing and recombination on the surface of the target, so as to form a second scanning pattern; wherein, the second scanning pattern is different from the first scanning pattern.

[0012] In an embodiment of the present application, the surface of the target has a first plane and a second plane, and the first plane and the second plane are arranged at a second included angle; wherein, there are two focusing field lenses, and the segmentation and recombination component includes two first reflectors. One first reflector and one focusing field lens are located in the first optical path, and the other first reflector and the other focusing field lens are located in the second optical path; wherein, the first optical path and the second optical path are independent of each other; wherein, the two first reflectors are located on different reflecting surfaces and are used to segment the first scanning pattern to form two arc-shaped scanning line segments.

[0013] In an embodiment of the present application, the reflection angle of at least one of the two first reflectors is adjustable, which is used to adjust the scanning positions of the two scanning line segments on the first plane and the second plane of the target surface, so that the two scanning line segments can be connected end to end at the intersection position of the first plane and the second plane.

[0014] In an embodiment of the present application, the segmentation and recombination component further includes second reflectors respectively located in the first optical path and the second optical path. The second reflectors are arranged between the first reflectors and the focusing field lenses, and are used to perform mirror symmetry on the scanning line segments in the corresponding optical paths, so that the two scanning line segments can overlap each other or have the same scanning direction.

[0015] In an embodiment of the present application, the optical path of the scanning line segment in the first optical path is equal to the optical path of the scanning line segment in the second optical path.

[0016] To solve the above technical problems, a solution proposed in the present application is:

[0017] A method for laser scanning pattern recombination, comprising: forming a closed first scanning pattern; dividing the first scanning pattern to form at least two scanning line segments; and splicing and recombining the scanning line segments to form a second scanning pattern; wherein, the second scanning pattern is different from the first scanning pattern.

[0018] In an embodiment of the present application, the step of forming a closed first scanning pattern includes: emitting laser light through a laser light source; and reflecting the laser light through the self-rotation of a rotating scanning mirror to form the first scanning pattern; wherein, the first scanning pattern is a circle or an ellipse.

[0019] In an embodiment of the present application, the step of dividing the first scanning pattern to form at least two scanning line segments includes: dividing the first scanning pattern through at least two first reflectors located on different reflecting surfaces to form arc-shaped scanning line segments; and reflecting each scanning line segment into independent optical paths; wherein, the optical path of each scanning line segment in the corresponding optical path is equal.

[0020] In an embodiment of the present application, the step of linearly splicing and recombining the scanning line segments to form a second scanning pattern includes: adjusting the reflection angle of the first reflector, thereby adjusting the scanning position of the scanning line segment on the focal plane of the focusing field lens, so that multiple scanning line segments are connected end to end; wherein, the second scanning pattern is an S shape or a wavy shape.

[0021] In an embodiment of the present application, the step of linearly splicing and recombining the scanning line segments to form a second scanning pattern includes: adjusting the mirror symmetry state of the scanning line segment through a second reflector located between the first reflector and the focusing field lens, so that multiple scanning line segments overlap each other; wherein, the second scanning pattern is an arc.

[0022] In an embodiment of the present application, the step of linearly splicing and recombining the scanning line segments to form a second scanning pattern further includes: adjusting the scanning direction of the scanning line segment through a second reflector located between the first reflector and the focusing field lens, so that the scanning directions of multiple scanning line segments are the same.

[0023] To solve the above technical problems, a solution proposed in the present application is:

[0024] A storage medium stores program data, and the program data can be executed to implement the method as described above.

[0025] Compared with the prior art, the beneficial effects of this application are as follows:

[0026] Different from the prior art, the laser scanning pattern recombination in this application can divide, splice, and recombine a closed first scanning pattern to form different scanning patterns, which can be compatible with multiple scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of this application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of this application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings. Among them:

[0028] Figure 1 is a schematic structural diagram of the device for forming a closed scanning pattern in this application;

[0029] Figure 2 is a schematic structural diagram of a laser processing device proposed in this application;

[0030] Figure 3 is a schematic diagram of the splicing and recombination process of the scanning pattern in this application;

[0031] Figure 4 is a schematic diagram of another way to divide the first scanning pattern in this application;

[0032] Figure 5 is a schematic structural diagram of another embodiment of a laser processing device proposed in this application;

[0033] Figure 6 is a schematic diagram of the scanning trajectory formed after the laser in this application unfolds on two processing planes of the target material;

[0034] Figure 7 is a schematic structural diagram of another embodiment of the segmentation and recombination component proposed in this application;

[0035] Figure 8 is a schematic diagram of the process in which the segmentation and recombination component proposed in this application divides and splices the first scanning pattern to form the second scanning pattern;

[0036] Figure 9 is a schematic flowchart of a laser scanning pattern recombination method proposed in this application;

[0037] Figure 10 is in this application Figure 9 partial flowchart;

[0038] Figure 11 is in this application Figure 9 partial flowchart;

[0039] Figure 12 This is a schematic diagram of a storage medium proposed in the present application. Detailed implementation manners

[0040] To make the above objects, features, and advantages of the present application more obvious and understandable, the following will describe the detailed implementation manners of the present application in conjunction with the accompanying drawings. It can be understood that the specific embodiments described herein are only used to explain the present application, rather than limiting the present application. Additionally, it should be noted that for the convenience of description, only the parts related to the present application rather than all the structures are shown in the drawings. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present application.

[0041] The terms "including" and "having" and any variations thereof in the present application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally further include steps or units not listed, or may optionally further include other steps or units inherent to these processes, methods, products, or devices.

[0042] Referring to

[0043] Figure 1 which is a device for forming a closed scanning pattern in the present application. The device includes a mirror 20a / 20b and a unidirectional rotating motor 30. The normal line 21a / 21b of the reflecting surface of the mirror 20a / 20b is arranged at an angle α with the rotation axis 31 of the output shaft of the unidirectional rotating motor 30. When the laser 10 is incident on the reflecting surface of the mirror 20a / 20b, the rotating motor 30 drives the mirror 20a / 20b to rotate unidirectionally, so that the reflected laser 10a / 10b forms an inverted conical shape, and thus a closed scanning pattern 10c can be scanned and formed on the surface of the target material. In this scanning mode, the scanning linear velocity of the laser on the surface of the target material is mainly related to the rotation speed of the rotating motor 30. Figure 1

[0044] ​​In this application, the scanning pattern 10c formed by the device is circular. Of course, it can be understood that during the actual high-speed operation, the output shaft of the rotating motor 30 has a slight swing amplitude, so that after the laser 10 is rotated by the reflecting mirrors 20a / 20b, the formed scanning pattern 10c will have a certain degree of deformation, forming a pattern similar to an ellipse. In other embodiments, by adjusting the optical path of the device in this application, closed patterns of other shapes can also be formed, which will not be elaborated here one by one.

[0045] Specifically, Figure 1 Two states of the reflecting mirror 10c are shown, and the positions of the laser beam 10 at different moments are represented by solid lines and dashed lines respectively. Taking the direction in the figure as an example, in state 1, the reflecting mirror 20a is in the state of being lower on the left and higher on the right. After the laser 10 is incident on the surface of the reflecting mirror 20a, the reflecting mirror 20a reflects the laser 10 to form the first laser beam 10a; at this time, the normal line 21a of the reflecting mirror 20a is on the left side of the rotation axis 31 and forms an angle α with respect to the rotation axis 31. In state 2, the reflecting mirror 20b is in the state of being higher on the left and lower on the right. After the laser 10 is incident on the surface of the reflecting mirror 20b, the reflecting mirror 20b reflects the laser 10 to form the second laser beam 10b, and the normal line 21b of the reflecting mirror 20b is on the right side of the rotation axis 31 and forms an angle α with respect to the rotation axis 31.

[0046] It should be understood that the scanning pattern 10c referred to in this application is not formed by the laser beams 10a / 10b on the surface of the target material at the same moment, but is the superposition effect of repeated rotation accumulation under the action of the rotating motor 30 driving the reflecting mirrors 20a / 20b to rotate and reflect. Therefore, at a certain moment, the laser light speeds 10a / 10b only act on a certain point position on the surface of the target material.

[0047] The laser referred to in this application is generated by exciting a laser light source. Among them, the laser light source can be a gas laser, a solid laser, a semiconductor laser, etc. according to the gain medium; the emitted laser can be a continuous laser or a pulsed laser. It can be understood that those skilled in the art can make adaptive adjustments according to the actual situation, select a suitable laser light source, and adjust relevant parameters such as the wavelength and repetition frequency of the laser light source, which will not be elaborated here one by one.

[0048] Based on the implementation principle described above, please combine Figure 1 and refer to Figure 2 , Figure 2It is a schematic diagram of the optical path structure of a laser processing device 100 proposed in this application. In this application, the laser processing device 100 may include a laser light source 110, a focusing field lens 140, a rotating scanning mirror 120, and a splitting and recombination component 130. Among them, after the laser light source 110 emits the laser 111, it is reflected by the rotating scanning mirror 120 to form a first scanning pattern. The first scanning pattern is subjected to splitting and splicing recombination processing by the splitting and recombination component 130, and then a second scanning pattern different from the first scanning pattern is formed. The second scanning pattern is finally focused on the surface of the target 50a through the focusing field lens 140.

[0049] Specifically, the focusing field lens 410 is used to focus the second scanning pattern on the surface of the target 50a. The rotating scanning mirror 120 is arranged adjacent to the laser light source 110, and the normal line of its reflecting surface has a first included angle with its own rotation axis, so that the rotating scanning mirror 120 reflects the laser 111 received from the laser light source 110 through its own rotation movement to form a closed first scanning pattern. The splitting and recombination component 130 is arranged adjacent to the rotating scanning mirror 120, and is used to receive the first scanning pattern reflected from the rotating scanning mirror 120, split the first scanning pattern to form at least two scanning line segments, and after reflecting the scanning line segments, perform splicing recombination on the focal plane of the focusing field lens 140 to form a second scanning pattern on the surface of the target 50a; wherein, the second scanning pattern is different from the first scanning pattern.

[0050] In the above manner, the laser processing device 100 in this application can splice and recombine a single circular scanning pattern to form different scanning patterns, thereby improving the usage scenarios of the device.

[0051] In an embodiment of this application, the splitting and recombination component 130 may include two first reflectors 131a / 131b. One first reflector 131a is located in the first optical path 112, and the other first reflector 131b is located in the second optical path 113. The two first reflectors 131a / 131b are located downstream of the transmission of the first scanning pattern. The two first reflectors 131a / 131b are located on different reflecting surfaces and can reflect the first scanning pattern in segments into the first optical path 112 and the second optical path 113, thereby realizing the splitting of the first scanning pattern.

[0052] Among them, the first optical path 112 and the second optical path 113 are independent. The laser 111 is adjusted to be transmitted in the first optical path 112 or the second optical path 113 through the reflection of the reflecting surface of the rotating scanning mirror 120 at different times, and finally converges on the incident surface of the focusing field lens 140.

[0053] Further, in an embodiment of the present application, the reflection angles of the two first mirrors 131a / 131b can be adjusted, so as to adjust the positions of the arc scanning line segments transmitted in the first optical path 112 and the second optical path 113 on the focusing field lens 140, thereby realizing the splicing and recombination of the scanning line segments. The first mirror 131a can be arranged on a rotating motor shaft (not shown), or its own fixing bracket (not shown) can be adjusted.

[0054] Of course, considering that there will be a certain degree of distortion or different magnification ratios when multiple scanning line segments are transmitted in the corresponding optical paths. Therefore, in this embodiment, the optical path lengths of the scanning line segments transmitted in the first optical path 112 and the scanning line segments transmitted in the second optical path 113 are the same, so as to avoid the situation of out-of-proportion scanning line segments when converging on the incident surface of the focusing field lens 140.

[0055] Please combine Figure 2 and refer to Figure 3 , Figure 3 which is a schematic diagram of the splicing and recombination process of the scanning pattern in the present application. After the first scanning pattern 10d passes through S10, the two first mirrors 131a / 131b reflect the first scanning pattern 10d to the first optical path 112 and the second optical path 113 respectively, and then split it into two arc scanning line segments 11d / 12d, which are transmitted in the corresponding optical paths. Through S11, the two first mirrors 131a / 131b adjust the positions of the two arc scanning line segments 11d / 12d on the focal plane of the focusing field lens 140 to realize the second scanning pattern in an "S" shape.

[0056] Further, in order to enrich the types of the second scanning pattern, in this embodiment, a second mirror 132 is further arranged in the first optical path 112. The second mirror 132 can mirror-symmetrize the scanning line segment 12d transmitted in the first optical path 112. Thus, through S13, the arc scanning line segment 12d is mirror-symmetrical with respect to the horizontal axis B. After being adjusted and spliced by the two first mirrors 131a / 131b, a second scanning pattern in an "M" shape is formed.

[0057] Considering that after the first scanning pattern 10d is split and recombined by the two first mirrors 131a / 131b in the split recombination component 130, there is a situation of discontinuous scanning. For example: for the second scanning pattern formed after S11, during actual scanning, the laser spot scans from the left "S" shape to the right. When it reaches the center position of the "S" shape, it will jump to the right and scan from left to right, and finally form a second scanning pattern on the surface 50a of the target material that seems continuous but is actually discontinuous in scanning. For example: for the second scanning pattern formed after S13, during actual scanning, the laser spot scans from the left "M" shape to the right. When it reaches the center position of the "M" shape, it will jump to the right and scan from left to right, and finally form a second scanning pattern on the surface 50a of the target material that seems continuous but is actually discontinuous in scanning. Therefore, in order to obtain a continuous scanning pattern, in one embodiment, the second mirror 132 can be located in the second optical path 113 and is used to mirror-symmetrically align the arc scanning line segment 11d located in the second optical path 113 with respect to the vertical axis A. In this way, in S12, the scanning direction of the scanning line segment 12d is the same as that of 11d. After the laser scans the scanning line segment 12d from right to left, it continues to scan 11d from right to left, so as to form a second scanning pattern with continuous scanning on the surface 50a of the target material.

[0058] Furthermore, in order to improve the scanning speed, in S14, by adjusting the first mirrors 131a / 131b, the two scanning line segments 11d / 12d are made to completely coincide. In this way, during one rotation period of the rotary scanning mirror 120, the arc scanning line segment formed by the laser 111 on the surface 50a of the target material can be scanned twice. Thereby, the repeated scanning speed of the laser 111 can be further increased.

[0059] It can be understood that the first scanning pattern 10d in the present application should completely cover the two first mirrors 131a / 131b. In order to prevent the first scanning pattern 10d from leaking out between the two first mirrors 131a / 131b, the two first mirrors 131a / 131bv are arranged seamlessly or at least partially overlapped. Of course, in other embodiments, in order to adjust the arc length of the split scanning line segment, a certain interval distance can also be set between two adjacent first mirrors 131a / 131b, and a laser absorption structure is arranged at the adjacent interval to prevent light from leaking out.

[0060] In addition, the shape of the finally spliced second scanning pattern can also be adjusted by adjusting the proportion of each first scanning mirror 131a / 131b in the entire first scanning pattern 10d, thereby changing the length of the split arc scanning line segment. For example, Figure 4 Another way of splitting the first scanning pattern 10d is given, forming a large arc scanning line segment 11d' and a small arc scanning line segment 12d'.

[0061] Understandably, although only the form of splicing the head and tail of the scanning line segments is given in this embodiment, in other embodiments, it is also possible to adjust the number and arrangement of the first mirrors 131a / 131b and the second mirror 132 to achieve arrangements such as crossing and array for multiple scanning line segments, which will not be elaborated here one by one.

[0062] In the above manner, the laser processing device 100 in the present application can divide the closed first scanning pattern 10d to form various scanning line segments, and further splice and recombine them through multiple mirrors to form various second scanning patterns with different arrangements on the surface of the target 50a. This not only enriches the usage scenarios of the device but also enables the customization of various scanning patterns. Moreover, by superimposing multiple scanning line segments, the working efficiency of laser processing can be further improved by the repeated scanning speed of the laser on the surface of the target.

[0063] Please refer to Figure 5 , Figure 5 FIG. is a schematic structural diagram of another embodiment of the laser processing device 200 in the present application. In this embodiment, the laser processing device may include a laser light source 210, focusing field lenses 241 / 242, a rotary scanning mirror 220, and a segmentation and recombination component 230. The specific implementation principle can refer to the above embodiment and will not be elaborated here one by one.

[0064] Different from the above embodiment, the target 50b in this embodiment has a first processing surface 51b and a second processing surface 52b, and there is a certain included angle β between the two, so that the target 50b has multiple surfaces to be processed. Generally, since there is only one focal plane of the focusing field lenses 241 / 242, it cannot meet the situation of multiple processing planes. However, in this embodiment, there are two focusing field lenses 241 / 242, and the focal planes of the two focusing field lenses 241 / 242 coincide with the first processing surface 51b and the second processing surface 52b of the target 50b respectively. Therefore, when splicing and recombining the scanning line segments on the first processing surface 51b and the second processing surface 52b of the target 50b in the above manner, it is actually splicing and recombining on the focal planes of the focusing field lenses 241 / 242. Therefore, by setting the corresponding number of focusing field lenses for the target 50b with two or more different processing surfaces, and setting each processing surface on the focal plane of the corresponding focusing field lens, and forming partial scanning line segments on the corresponding surface through the segmentation and recombination component 230, the effect of simultaneous scanning on multiple processing planes can be achieved.

[0065] Understandably, in this embodiment, only the case where the target 50b has two different processing planes is shown by way of example. In other embodiments, those skilled in the art can, according to the inventive concept of the present application, adjust the number of optical paths 212 / 213 and the number of focusing field lenses 241 / 242 in the laser processing apparatus according to the actual situation for the multiple processing planes of the target 50b.

[0066] Specifically, please combine Figure 5 and refer to Figure 6 , Figure 6 is Figure 5 A schematic diagram of the scanning trajectory formed after the laser in

[0067] spreads on the two processing planes 51b / 52b of the target 50b. Among them, the splitting and recombining component 230 in this embodiment has two first reflectors 231a / 231b and second reflectors 232a / 232b, which are respectively located in the first optical path 212 and the second optical path 213. The laser 211 rotates in the first optical path 212 and the second optical path 213 through the rotation of the rotary scanning mirror 220, and forms a first scanning line segment 13a and a second scanning line segment 13b on the first surface 51b and the second surface 52b of the target 50b respectively through the first focusing field lens 242 and the second focusing field lens 241. By adjusting the first reflectors 231a / 231b in the corresponding optical paths, the first scanning line segment 13a and the second scanning line segment 13b are connected at the junction of the first surface 51b and the second surface 52b. By setting the second reflectors 232a / 232b, the symmetry state and scanning direction of the first scanning line segment 13a and the second scanning line segment 13b are adjusted. After forming a continuous second scanning pattern on the first surface 51b and the second surface 52b of the target 50b, the simultaneous scanning of different processing surfaces of the target 50b can be achieved by moving the position of the laser processing apparatus 200 relative to the target 50b. Figure 7 Figure 7 Considering that in the laser processing process, linear scanning to fill the surface is a highly efficient line processing method. In order to make the spliced second scanning pattern in the present application closer to a straight line, please refer to

[0068] Combined with Figure 7 and referring to Figure 8 , Figure 8 is Figure 7 a schematic diagram of the process in which the splitting and recombining component 330 in [[ ]] splits the first scanning pattern 10e and splices it to form the second scanning pattern. After the first scanning pattern 10e passes through S21, it is split on the splitting and recombining component 330 to form 4 arc scanning line segments 11e / 12e / 13e / 14e; during the transmission process in the corresponding optical paths 313 / 314 / 315 / 316, it will pass through multiple second reflectors (not shown, refer to the above embodiments) once, so that the morphological positions and scanning directions of the multiple scanning line segments 11e / 12e / 13e / 14e are unified. Finally, after passing through S23, a continuous "S"-shaped second scanning pattern is formed on the target surface. In another case, after the multiple scanning line segments pass through S24, a continuous wavy second scanning pattern is formed on the target surface. After passing through S25, the four arc scanning line segments are overlapped, so that the target surface can be scanned by the laser line four times in one rotation period of the rotating scanning mirror, thereby further improving the laser processing efficiency.

[0069] Of course, considering the spatial complexity of the splitting and recombining component 330, splitting the first scanning pattern 10e into 4 scanning line segments at one time requires relatively high requirements for the laser processing device 200. In another embodiment, the splitting and recombining component 330 can split the first scanning pattern 10e multiple times successively. For example: in S21', the circular closed first scanning pattern 10e is split to form two arc scanning line segments 11e / 12e, and in S22, each arc scanning line segment 11e / 12e is further split, and finally 4 arc scanning line segments 11e / 12e / 13e / 14e are formed.

[0070] It can be understood that the splitting and recombining component 330 in the present application can also split the first scanning pattern 10e into other numbers of scanning line segments, such as: 8, 12, 16, etc. Those skilled in the art can make adjustments according to the actual situation, which will not be elaborated here one by one.

[0071] Please continue to refer to Figure 5 and Figure 6, Considering that after the first scanning pattern is divided into two scanning line segments 13a / 13b and transmitted in the corresponding optical paths 212 / 213, the length of the scanning line segments 13a / 13b when reaching the surfaces of the focusing field lenses 241 / 242 becomes smaller after the first scanning pattern is divided, resulting in a reduced utilization rate of the incident area of each focusing field lens 241 / 242. Therefore, in an embodiment of the present application, a beam expander (not shown) is further provided before the focusing field lenses 241 / 242. The beam expander is used to receive the scanning line segments 13a / 13b in each optical path 212 / 213 and perform beam expansion and amplification until each scanning line segment 13a / 13b completely covers the incident area of the focusing field lenses 241 / 242, thereby improving the utilization rate of the focusing field lenses 241 / 242.

[0072] The present application also proposes a method for reorganizing a laser scanning pattern. Please refer to Figure 2 - 8 and Figure 9 - 11 , and this method includes the following steps.

[0073] S110: Form a closed first scanning pattern.

[0074] In this step, the formed closed first scanning pattern is in the manner shown by Figure 1 . In this implementation, the first scanning pattern formed by scanning has a relatively high line scanning speed.

[0075] Combining Figure 1 and Figure 2 , step S110 may include step S111: emitting laser light through a laser light source and step S112: reflecting the laser light through the self-rotation of a rotary scanning mirror to form a first scanning pattern. For the specific implementation method, please refer to the foregoing, and details will not be repeated here. Of course, in other embodiments, forming a closed first scanning pattern can also be achieved by, for example, controlling the synthesis of scanning galvanometers in two directions. Those skilled in the art can select a suitable method to generate this first scanning pattern according to the actual situation.

[0076] S120: Divide the first scanning pattern to form at least two scanning line segments.

[0077] In this step, dividing the first scanning pattern can form at least two independently transmitted scanning line segments. Among them, the length of the scanning line segments is adjusted according to the division method.

[0078] Combining Figure 2 , Figure 5 and Figure 7, step S120 may include step S121: dividing the first scanning pattern by at least two first reflectors located on different reflecting surfaces to form arc-shaped scanning line segments, and S122: reflecting each scanning line segment into independent optical paths. For the specific implementation methods, please refer to the foregoing, and will not be elaborated here one by one.

[0079] S130: splicing and recombining the scanning line segments to form a second scanning pattern.

[0080] In this step, multiple scanning line segments can be spliced end to end to form a continuous second scanning pattern. Combining Figure 3 with S11 / S12 / S13 in Figure 8 or S23 / S24 in

[0081] step S130 may include adjusting the reflection angle of the first reflector, thereby adjusting the scanning position of the scanning line segments on the focal plane of the focusing field lens, so that multiple scanning line segments are connected end to end. Among them, after being connected end to end, an S-shaped or wavy second scanning pattern can be formed. Figure 3 Combining with S14 in Figure 8 or S25 in

[0082] step S130 may include: adjusting the mirror symmetry state of the scanning line segments through a second reflector located between the first reflector and the focusing field lens, so that multiple scanning line segments overlap each other; among them, the second scanning pattern is an arc formed after multiple arc-shaped scanning line segments overlap. Figure 3 Combining with S12 / S13 in

[0083] Of course, in other embodiments, multiple scanning line segments can also be spliced and arranged in ways such as crossing and array, which will not be elaborated here one by one.

[0084] Through the above method, the laser scanning pattern recombination in the present application can divide, splice and recombine the closed first scanning pattern, so as to form different scanning patterns, and can be compatible with multiple usage scenarios.

[0085] The present application also provides a storage medium, as Figure 12 shown, the storage medium 300 stores program data, and the program data can be executed to implement a laser scanning pattern recombination method as proposed in the embodiments of the present application.

[0086] In the embodiments of the control method of the laser cleaning device proposed in this application, when the method involved exists in the form of a software functional unit and is sold or used as an independent product, it can be stored in a device, such as a computer-readable storage medium.

[0087] Based on such an understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or all or part of this technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) or a processor to execute all or part of the steps of the methods described in various embodiments of the present invention.

[0088] The aforementioned storage medium 300 includes: various media that can store program codes, such as USB flash drives, mobile hard disks, read-only memories (ROM, Read-Only Memory), random access memories (RAM, Random Access Memory), magnetic disks, or optical discs.

[0089] In summary, this application proposes a laser processing device, a method for recombining laser scanning patterns, and a storage medium. By splitting, splicing, and recombining a closed first scanning pattern, different scanning patterns can be formed, which can be compatible with multiple scenarios.

[0090] The above are only the embodiments of this application, and do not limit the patent scope of this application. Any equivalent structure or equivalent process transformation made using the content of the specification and drawings of this application, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of this application.

Claims

1. A laser processing device, characterized in that, Comprising: A laser light source for emitting laser light; A first focusing field lens located in a first optical path for focusing the laser light onto a first plane of a target; A second focusing field lens located in a second optical path for focusing the laser light onto a second plane of the target; wherein the first plane and the second plane are arranged at a second included angle; A rotating scanning mirror disposed adjacent to the laser light source, the normal of the reflecting surface of the rotating scanning mirror having a first included angle with its own rotation central axis, so that the rotating scanning mirror reflects the laser light received from the laser light source through its own rotational movement to form a closed first scanning pattern; and A splitting and recombining assembly disposed adjacent to the rotating scanning mirror for receiving the first scanning pattern reflected from the rotating scanning mirror, splitting the first scanning pattern to form a first scanning line segment and a second scanning line segment, and after reflecting the first scanning line segment and the second scanning line segment to the first optical path and the second optical path respectively, performing splicing and recombination on the first plane and the second plane of the target to form a continuous second scanning pattern on the two planes of the target; Wherein the second scanning pattern is different from the first scanning pattern.

2. The device according to claim 1, characterized in that, The splitting and recombining assembly includes two first reflecting mirrors, one of the first reflecting mirrors and one of the focusing field lenses are located in the first optical path, and the other first reflecting mirror and the other focusing field lens are located in the second optical path; wherein the first optical path and the second optical path are independent of each other; Wherein the two first reflecting mirrors are located on different reflecting surfaces for splitting the first scanning pattern to form the arc-shaped first scanning line segment and the second scanning line segment.

3. The device according to claim 2, characterized in that, The reflection angle of at least one of the two first reflecting mirrors is adjustable for adjusting the scanning positions of the two scanning line segments on the first plane and the second plane of the target surface, so that the positions where the first scanning line segment and the second scanning line segment intersect on the first plane and the second plane can be continuous.

4. A laser scanning pattern recombination method for processing the surface of a target material, characterized in that, The surface of the target includes a first plane and a second plane, wherein the method includes: Generating the laser light; Applying rotation to the laser light to form a closed first scanning pattern; Splitting the first scanning pattern to form a first scanning line segment and a second scanning line segment, and reflecting them to the first optical path and the second optical path respectively; and Focusing the first scanning line segment onto the first plane in the first optical path and focusing the second scanning line segment onto the second plane in the second optical path to perform splicing and recombination of the scanning line segments on the two planes of the target, thereby forming a continuous second scanning pattern; Wherein the second scanning pattern is different from the first scanning pattern, and the first plane and the second plane are arranged at a second included angle.

5. The method according to claim 4, characterized in that The step of splitting the first scanning pattern includes: Splitting the first scanning pattern through two first reflecting mirrors located on different reflecting surfaces to form the arc-shaped first scanning line segment and the second scanning line segment; Wherein, the optical path of the first scanning line segment in the first optical path is equal to the optical path of the second scanning line segment in the second optical path.

6. The method according to claim 5, characterized in that, The step of linearly splicing and recombining the scanning line segments to form a second scanning pattern includes: By adjusting the reflection angle of the first reflector, thereby adjusting the scanning position of the first scanning line segment in the first plane and adjusting the scanning position of the second scanning line segment in the second plane, so that the positions where the first scanning line segment and the second scanning line segment intersect in the first plane and the second plane can be continuous; Wherein, the second scanning pattern is S-shaped or wavy.

7. A storage medium, characterized in that, The storage medium stores program data, and the program data can be executed to implement the method according to any one of claims 4 to 6.

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