A punching process for nitrogen and oxygen sensor chip

Abstract

The present application discloses a punching process for a nitrogen oxide sensor chip, including a diaphragm. The diaphragm is punched by mechanical punching to complete the production of circular holes, and laser punching is used to complete the production of special-shaped cavities. The mechanical punching and laser punching steps are performed simultaneously. A nitrogen oxide sensor chip is composed of several layers of diaphragms. During the production process, the special-shaped cavities and holes are prepared by laser punching. The power of the laser can be adjusted according to the thickness of the diaphragm. It is possible to choose to punch through or not. It is very flexible, low-cost and high-efficiency. For circular holes, mechanical punching is used. Mechanical punching is convenient for punching circular holes of various specifications, and the accuracy is greatly improved. The processing method of the two cooperating with each other greatly improves efficiency and accuracy, and does not require multiple processes or equipment, reduces processes, and reduces costs.

Description

Technical Field

[0001] The invention relates to the technical field of sensor production, and in particular to a nitrogen oxygen sensor chip punching process. Background Art

[0002] The nitrogen and oxygen sensor chip needs to go through the cast film process, cutting process, hole filling and printing process, lamination process, isostatic pressing process, slitting process, debinding and sintering process, etc. during the production process. During the production process, each diaphragm needs to be precisely punched, with round holes, square holes, and composite cavities of round holes and square holes. Usually, cast film strips are punched mechanically, which is convenient for punching round holes of various specifications. It is more difficult to use mechanical punching for other special-shaped holes. One shape requires a customized punch. If the shapes are different, it is difficult to complete it on a punching machine (a punching machine generally has 4 to 8 punches). In addition, due to the existence of edges and corners, the die is easily damaged when the punch moves up and down. The production of nitrogen and oxygen sensor chips is a process in which special-shaped cavities and round holes coexist. In the process of product research and development, the size and shape of the cavity often need to be adjusted. Due to the above-mentioned technical problems, the punching of the cast film tape requires multiple processes and equipment. On the one hand, the production efficiency is low, and on the other hand, the production cost is increased, so improvements are needed. Summary of the invention

[0003] The present invention aims to solve one of the technical problems existing in the prior art.

[0004] The present application provides a punching process for a nitrogen and oxygen sensor chip, including a diaphragm, characterized in that the diaphragm is punched by mechanical punching to complete the production of circular holes, and laser punching is used to complete the production of special-shaped cavities during the punching process.

[0005] Preferably, the mechanical punching and laser punching steps are performed simultaneously.

[0006] The above-mentioned nitrogen oxide sensor chip punching process is adopted. A nitrogen oxide sensor chip is composed of 12 to 16 layers of diaphragm. During the production process, special-shaped cavities and holes are prepared by laser punching. The power of the laser can be adjusted according to the thickness of the diaphragm. You can choose to punch through or not. It is very flexible, low cost and high efficiency. For round holes, mechanical structure punching is adopted. Mechanical punching is convenient for punching round holes of various specifications, and the accuracy is greatly improved. The processing method of the two coordinating with each other greatly improves the efficiency and accuracy, and does not require multiple processes or equipment, reduces the process and reduces the cost.

[0007] The present invention also discloses a punching device suitable for the above-mentioned nitrogen oxygen sensor chip punching process, which is characterized by comprising a processing platform, a support frame is arranged on the processing platform, and a liftable mechanical punching component and a laser punching component are arranged on the top of the support frame.

[0008] Preferably, the mechanical punching assembly comprises a lifting cylinder arranged on the top of the support frame, a vertical rod connected to the output end of the lifting cylinder in the vertical direction, and a lifting seat connected to the lower end of the vertical rod, a fixed platform is arranged on the bottom surface of the lifting seat, a punching tool for punching holes is arranged on the lower surface of the fixed platform, and the laser punching assembly is arranged on the fixed platform.

[0009] Preferably, the upper surface of the processing platform is provided with a U-shaped seat for cooperating with a punching tool, both ends of the U-shaped seat are fixed on the processing platform, and a through hole is provided in the middle thereof for the punching tool to pass downward.

[0010] Preferably, the support frame includes four vertical main frames and a top cover fixed on the top of the four main frames, the lifting cylinder is arranged on the top of the top cover, and sleeves are respectively slid up and down on the four main frames, and the four sleeves are located in the same horizontal plane and are fixedly connected to the lifting seat.

[0011] Preferably: the lifting seat is provided with a pre-fixing component for pre-fixing the diaphragm on the U-shaped seat in advance, the pre-fixing component includes positioning and fixing blocks symmetrically arranged on the left and right side walls of the lifting seat, pre-fixing top rods respectively lifted and inserted on the two positioning and fixing blocks, a top block connected to the lower ends of the two pre-fixing top rods, and a spring connected to the upper surface of the top block and surrounding the top rod, the upper end of the spring is connected to the bottom of the positioning and fixing block.

[0012] Preferably, the laser punching assembly includes a solid laser, an electrical system and an optical system arranged on a fixed table, the electrical system supplies energy to the laser and controls the laser output mode, and the optical system is used to accurately focus the laser beam onto the punching processing part of the membrane.

[0013] Preferably, a feed conveyor belt is provided on the processing platform and located on one side of the U-shaped seat, the upper surface of the feed conveyor belt and the upper surface of the U-shaped seat are located in the same plane, an alignment plate is provided on the end of the U-shaped seat away from the feed conveyor belt, and a feed alignment component for intermittently controlling diaphragm feeding and cooperating with the alignment plate for alignment is provided on the main frame and located above the side of the conveyor belt close to the U-shaped seat.

[0014] Preferably, the feed alignment component includes a main board arranged on the main frame, a cavity at the top of the main board, a lifting wedge block set in the cavity for lifting and lowering, a push rod connected to the bottom of the lifting wedge block, a slot arranged at the lower part of the right side wall of the main board, a lifting plate set in the slot for lifting and lowering, a through hole opened on the lifting plate, a guide block set on the slot wall and inserted into the through hole for lifting and lowering sliding, a pushing plate connected to one end of the lifting plate, a reset plate set in the slot that is supported at the bottom of the lifting plate and slides up and down, a plurality of reset springs connected between the bottom of the reset plate and the slot, a cavity spring connected to the bottom of the cavity and the bottom of the lifting wedge block, and a pushing wedge block set on the left side of the cavity, a pushing cylinder for driving the pushing wedge block is arranged on the outer side wall of the main board, and the output end of the pushing cylinder is connected to A pushing rod is connected, and one end of the pushing rod away from the pushing cylinder penetrates the main board along the horizontal direction and is connected to the pushing wedge block, and the lower end of the push rod penetrates the main board along the vertical direction and is pressed on the top of the lifting plate. A secondary power component is arranged on the right side of the main board based on the pushing of the pushing wedge block to drive the pushing plate to move horizontally. The secondary power component includes a transverse moving inner cavity arranged in the main board and located at the right top of the cavity, a transverse moving block arranged horizontally in the transverse moving inner cavity, a transverse moving main rod connected horizontally to the transverse moving block, a transverse moving return spring connected between the inner wall of the transverse moving inner cavity and the right side wall of the transverse moving block, a deep groove opened at the top of the pushing plate, and an upper and lower slide plates slidably inserted in the deep groove, one end of the transverse moving main rod penetrates horizontally into the cavity and is located above the lifting wedge block, and the other end penetrates horizontally out of the main board and is connected to the upper and lower slide plates.

[0015] The beneficial effects of the present invention will be described in detail in the examples to make the beneficial effects more obvious. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of the diaphragm structure in the embodiment of the present application.

[0017] Figure 2 This is a schematic diagram of the specific structure of an embodiment of the present application.

[0018] Figure 3 for Figure 2 Schematic diagram of the partial enlarged structure of part A in the middle. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present application to clearly describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application belong to the scope of protection of this application.

[0020] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0021] The embodiments of the present application are described in detail below through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0022] Embodiment 1:

[0023] like Figure 1 As shown, a punching process for a nitrogen and oxygen sensor chip includes a diaphragm. In a specific embodiment of the present invention, the diaphragm is punched by mechanical punching to complete the production of circular holes, and laser punching is used to complete the production of special-shaped cavities.

[0024] In a specific embodiment of the present invention, the mechanical punching and laser punching steps are performed simultaneously.

[0025] Using the above-mentioned nitrogen oxygen sensor chip punching process, such as Figure 1 The diaphragm shown in the figure has round holes and special-shaped holes. A nitrogen oxide sensor chip is composed of 12 to 16 layers of diaphragms. During the production process, special-shaped cavities and holes are prepared by laser punching. The power of the laser can be adjusted according to the thickness of the diaphragm. You can choose to punch through or not. It is very flexible, low-cost and efficient. For round holes, mechanical punching is used. Mechanical punching is convenient for punching round holes of various specifications, and the accuracy is greatly improved. The mechanical punching and laser punching steps are carried out simultaneously. The coordinated processing method of the two greatly improves efficiency and accuracy, and does not require multiple processes or equipment, reduces processes, and reduces costs.

[0026] Embodiment 2:

[0027] like Figure 1-Figure 2As shown, the present invention also discloses a punching device suitable for the above-mentioned nitrogen oxygen sensor chip punching process. In a specific embodiment of the present invention, it includes a processing platform 1, a support frame 2 is provided on the processing platform 1, and a mechanical punching component and a laser punching component that can be raised and lowered are provided on the top of the support frame 2. In a specific embodiment of the present invention, the laser punching component includes a solid laser, an electrical system and an optical system arranged on a fixed platform 6. The electrical system supplies energy to the laser and controls the laser output mode. The optical system is used to accurately focus the laser beam on the diaphragm punching processing part.

[0028] When processing the diaphragm of the nitrogen oxide sensor chip, the diaphragm is placed on the processing platform 1, and the mechanical punching component and the laser punching component are in operation. The mechanical punching component performs the punching processing of the round holes, and the laser punching component performs the punching processing of the special-shaped holes. The processing method of the two coordinating with each other greatly improves the efficiency and accuracy, and does not require multiple processes or equipment, thereby reducing the processes and reducing costs.

[0029] In a specific embodiment of the present invention, the mechanical punching assembly includes a lifting cylinder 3 arranged on the top of the support frame 2, a vertical rod 4 connected to the output end of the lifting cylinder 2 in the vertical direction, and a lifting seat 5 connected to the lower end of the vertical rod 4, a fixed platform 6 is arranged on the bottom surface of the lifting seat 5, a punching tool 7 for punching holes is arranged on the lower surface of the fixed platform 6, and the laser punching assembly is arranged on the fixed platform 6.

[0030] The diaphragm is placed on the processing platform 1, and the vertical rod 4 connected to the output end is driven by the lifting cylinder 3 to descend. The descent of the vertical rod 4 drives the lifting seat 5 to descend, and the fixed platform 6 on the bottom of the lifting seat 5 follows the descent, and a circular hole is punched out on the diaphragm by the punching tool 7 on the lower surface of the fixed platform 6. During the circular hole punching process, the laser punching component processes special-shaped holes on the surface of the diaphragm.

[0031] In a specific embodiment of the present invention, a U-shaped seat 8 for cooperating with a punching tool 7 is disposed on the upper surface of the processing platform 1. Both ends of the U-shaped seat 8 are fixed on the processing platform 1, and a through hole 9 is disposed in the middle thereof for the punching tool 7 to pass downward.

[0032] In order to further facilitate the discharge of waste during the processing of circular holes and special-shaped holes, a U-shaped seat 8 for cooperating with the punching tool 7 is provided on the upper surface of the processing platform 1, and a through hole 9 for the punching tool 7 to pass downward and a waste hole for the waste to be discharged during laser punching are provided in the middle. The structure of the U-shaped seat 8 facilitates the collection and recycling of the waste at the bottom.

[0033] Embodiment 3:

[0034] like Figure 1-Figure 2As shown, the difference from Example 2 is that, in the specific embodiment of the present invention, the support frame 2 includes four vertical main frames 10 and a top cover 11 fixed on the top of the four main frames 10, the lifting cylinder 3 is arranged on the top of the top cover 11, and sleeves 12 are respectively slidably sleeved up and down on the four main frames 10, and the four sleeves 12 are located in the same horizontal plane and are fixedly connected to the lifting seat 5.

[0035] In order to further improve the lifting stability of the lifting seat 5, sleeves 12 are respectively slidably sleeved up and down on the four main frames 10. The four sleeves 12 are located in the same horizontal plane and are fixedly connected to the lifting seat 5. The vertical rod 4 connected to the output end is driven by the lifting cylinder 3 to descend, and the vertical rod 4 descends to drive the lifting seat 5 to descend. During the lifting process, the lifting seat 5 slides on the four main frames 10 through the cooperation of the four sleeves 12, which plays a role in guiding the lifting seat 5 to stably lift and lower horizontally.

[0036] In a specific embodiment of the present invention, a pre-fixing component for pre-fixing the diaphragm on the U-shaped seat 8 is provided on the lifting seat 5, and the pre-fixing component includes a positioning fixing block 21 symmetrically arranged on the left and right side walls of the lifting seat 5, a pre-fixing top rod 22 respectively lifted and inserted on the two positioning fixing blocks 21, a top block 23 connected to the lower ends of the two pre-fixing top rods 22, and a spring 24 connected to the upper surface of the top block 23 and surrounding the top rod 22, and the upper end of the spring 24 is connected to the bottom of the positioning fixing block 21.

[0037] The diaphragm is placed on the processing platform 1, and the vertical rod 4 connected to the output end is driven to descend by the lifting cylinder 3. The descent of the vertical rod 4 drives the lifting seat 5 to descend. During the lifting process, the lifting seat 5 slides on the four main frames 10 through the cooperation of four sleeves 12, and the fixed platform 6 on the bottom of the lifting seat 5 follows the descent. The top blocks 23 on the left and right sides of the lifting seat 5 contact the diaphragm before the punching tool 7 and support the two sides of the diaphragm. As the lifting seat 5 continues to descend, the two pre-fixed top rods 22 slide along the two positioning fixed blocks 21 and squeeze the spring 24, further enhancing the positioning stability of the diaphragm. Subsequently, a circular hole is punched out on the diaphragm by the punching tool 7 on the lower surface of the fixed platform 6, and in the process of punching the circular hole, a special-shaped hole is processed on the surface of the diaphragm by the laser punching component.

[0038] Embodiment 4:

[0039] like Figure 2-Figure 3As shown, the difference from Example 3 is that, in the specific embodiment of the present invention, a feed conveyor belt 100 is provided on the processing platform 1 and located on one side of the U-shaped seat 8, the upper surface of the feed conveyor belt 100 and the upper surface of the U-shaped seat 8 are located in the same plane, and an alignment plate 101 is provided at the end of the U-shaped seat 8 away from the feed conveyor belt 100, and a feed alignment component for intermittently controlling diaphragm feeding and cooperating with the alignment plate 101 for alignment is provided on the main frame 10 and located above the side of the conveyor belt 100 close to the U-shaped seat 8.

[0040] When in use, the diaphragm is transported on the feed conveyor belt 100 and transported to the right side of the feed conveyor belt 100. At this time, the feed alignment component controls the diaphragm to be fed onto the U-shaped seat 8, and cooperates with the alignment plate 101 to clamp the diaphragm and align it on the upper surface of the U-shaped seat 8. Subsequently, the vertical rod 4 connected to the output end is driven by the lifting cylinder 3 to descend, and the vertical rod 4 descends to drive the lifting seat 5 to descend. During the lifting process, the lifting seat 5 slides on the four main frames 10 through the four sleeves 12, and the fixed platform 6 on the bottom of the lifting seat 5 follows the decline. The top blocks 23 on the left and right sides of the lifting seat 5 contact the diaphragm before the punching tool 7 and hold up the two sides of the diaphragm. At this time, the feed alignment assembly retracts and resets. As the lifting seat 5 continues to descend, the two pre-fixed top rods 22 slide along the two positioning fixed blocks 21 and squeeze the spring 24, further enhancing the positioning stability of the diaphragm. Subsequently, a circular hole is punched out on the diaphragm by the punching tool 7 on the lower surface of the fixed table 6, and during the circular hole punching process, a special-shaped hole is processed on the surface of the diaphragm by the laser punching assembly.

[0041] Embodiment 5:

[0042] like Figure 2-Figure 3As shown, the difference from Example 3 is that in the specific embodiment of the present invention, the feed alignment component includes a main board 102 arranged on the main frame 10, a cavity 103 at the top of the main board 102, a lifting wedge 104 set in the cavity 103, a top rod 105 connected to the bottom of the lifting wedge 104, a slot 106 set at the lower part of the right side wall of the main board 102, a lifting plate 107 set in the slot 106, a through hole 108 opened on the lifting plate 107, and a lifting sliding plug set on the slot wall of the slot 106. A guide block 109 inserted into the through hole 108, a push plate 110 connected to one end of the lifting plate 107, a reset plate 111 supported at the bottom of the lifting plate 107 and slidably arranged in the slot 106, a plurality of reset springs 112 connected between the bottom of the reset plate 111 and the slot 106, a cavity spring 113 connected to the bottom of the cavity 103 and the bottom of the lifting wedge 104, and a push wedge 114 arranged on the left side of the cavity 103. A push cylinder 111 for driving the push wedge 114 is arranged on the outer wall of the main board 102. 5, the output end of the push cylinder 115 is connected to a push rod 116, the end of the push rod 116 away from the push cylinder 115 passes through the main board 102 in the horizontal direction and is connected to the push wedge 114, the lower end of the push rod 105 passes through the main board 102 in the vertical direction and is supported on the top of the lifting plate 107, and a secondary power component is provided on the right side of the main board 102 for driving the push plate 110 to move horizontally based on the push wedge 114, and the secondary power component includes a lateral movement inner cavity 121 arranged in the main board 102 and located at the right top of the cavity 103, A transverse block 122 is transversely arranged in the transverse inner cavity 121, a transverse main rod 123 is transversely connected to the transverse block 122, a transverse return spring 124 is connected between the inner wall of the transverse inner cavity 121 and the right side wall of the transverse block 122, a deep groove 125 is opened on the top of the push plate 110, and an upper and lower slide plate 126 is inserted in the deep groove 125 for upward and downward sliding movement, one end of the transverse main rod 123 transversely penetrates into the cavity 103 and is located above the lifting wedge block 104, and the other end transversely penetrates out of the main board 102 and is connected to the upper and lower slide plates 126.

[0043] The diaphragm is transported on the feed conveyor belt 100 and transported to the right side of the feed conveyor belt 100. At this time, the push cylinder 115 is running, and the push rod 116 connected to its driving output end is pushed out horizontally, driving the push wedge block 114 to move horizontally to the right, driving the lifting wedge block 104 to move downward, so that the push rod 105 pushes the lifting plate 107 to move downward, along the guide block 109, the reset plate 111 descends, and squeezes a number of reset springs 112. When the push wedge block 114 pushes the lifting wedge block 104 to the limit of the descending position, the push rod 105 pushes the lifting plate 107 to the guide block 109 to escape from the through hole 108, and the push plate 110 moves downward, and the bottom of the push plate 110 is close to the upper surface of the feed conveyor belt 100. At this time, the push wedge block 114 The push continues to the right, and the main transverse rod 123 is pushed to the right. The main transverse rod 123 moves to the right, driving the transverse block 122 to move to the right, squeezing the transverse return spring 124, and the upper and lower slide plates 126 move to the right, so that the push plate 110 moves to the right, and the push plate 110 controls the diaphragm to be fed onto the U-shaped seat 8, and cooperates with the alignment plate 101 to clamp the diaphragm and align it on the upper surface of the U-shaped seat 8. In the process of the push plate 110 moving to the right, the lifting plate 107 is driven to the right together, and the upper surface of the lifting plate 107 and the lower surface of the guide block 109 squeeze and slide against each other, and the lower surface of the lifting plate 107 and the upper surface of the return plate 111 squeeze and slide against each other. The above structure only needs one driving power source to complete the first descending and then transverse pushing of the push plate 110. The structure is simple and the production cost is reduced. Subsequently, the vertical rod 4 connected to the output end is driven by the lifting cylinder 3 to descend, and the descent of the vertical rod 4 drives the lifting seat 5 to descend. During the lifting process, the lifting seat 5 slides on the four main frames 10 through the cooperation of the four sleeves 12, and the fixed platform 6 on the bottom of the lifting seat 5 follows the descent, and the top blocks 23 on the left and right sides of the lifting seat 5 contact the diaphragm before the punching tool 7, and support the two sides of the diaphragm. At this time, the push cylinder 115 drives the push rod 116 to retract, driving the push wedge block 114 to move horizontally to the left. Under the action of the horizontal reset spring 124, the horizontal block 122 is reset to the left, and the horizontal main rod 123 is reset horizontally. During the horizontal reset process of the horizontal main rod 123, the push plate 110 and the lifting plate 107 are driven. It is reset by moving horizontally to the left, so that the guide block 109 is aligned with the through hole 108, and the wedge block 114 is pushed to continue to move horizontally to the left and reset. Under the restoring action of the cavity spring 113, the lifting wedge block 104 is driven to rise and reset. Under the restoring action of several reset springs 112, the reset plate 111 rises and resets, and the auxiliary lifting plate 107 rises and rises and resets along the guide block 109. As the lifting seat 5 continues to descend, the two pre-fixed push rods 22 slide along the two positioning fixed blocks 21 and squeeze the spring 24, further enhancing the positioning stability of the diaphragm. Subsequently, a circular hole is punched out on the diaphragm by the punching tool 7 on the lower surface of the fixed table 6, and in the process of punching the circular hole, a special-shaped hole is processed on the surface of the diaphragm by the laser punching component.

[0044] It should be noted that, in this article, the terms "comprise", "include" or any other variant thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise one..." do not exclude the presence of other identical elements in the process, method, article or device including the element. In addition, it should be pointed out that the scope of the methods and devices in the embodiments of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in reverse order according to the functions involved, for example, the described method may be performed in an order different from that described, and various steps may also be added, omitted, or combined. In addition, the features described with reference to certain examples may be combined in other examples.

[0045] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the purpose of the present application and the scope of protection of the claims, all of which are within the protection of the present application.

Claims

1. A punching process for a nitrogen oxygen sensor chip, comprising a diaphragm, It is characterized in that During the punching process, the diaphragm is punched mechanically to complete the production of circular holes, and laser punching is used to complete the production of special-shaped cavities. The mechanical punching and laser punching steps are performed simultaneously. The diaphragm comprises a processing platform (1), a support frame (2) is arranged on the processing platform (1), and a mechanical punching component and a laser punching component that can be lifted and lowered are arranged on the top of the support frame (2). The mechanical punching component comprises a lifting cylinder (3) arranged on the top of the support frame (2), a vertical rod (4) connected to the output end of the lifting cylinder (3) in the vertical direction, and a lifting seat (5) connected to the lower end of the vertical rod (4), and the bottom surface of the lifting seat (5) is provided with a lifting mechanism. A fixed platform (6) is provided, a punching tool (7) for punching holes is provided on the lower surface of the fixed platform (6), the laser punching assembly is provided on the fixed platform (6), a U-shaped seat (8) for matching the punching tool (7) is provided on the upper surface of the processing platform (1), both ends of the U-shaped seat (8) are fixed on the processing platform (1), and a through hole (9) is provided in the middle thereof for the punching tool (7) to pass downward, the support frame (2) comprises four vertical main frames (10) and a top cover (11) fixed on the top of the four main frames (10), the lifting cylinder (3) is provided on the top of the top cover (11), and the four main frames are provided with a plurality of vertical main frames (10) and a plurality of vertical main frames (10). (10) are respectively provided with sleeves (12) for sliding up and down, the four sleeves (12) are located in the same horizontal plane and are all fixedly connected to the lifting seat (5), the lifting seat (5) is provided with a pre-fixing component for pre-fixing the diaphragm on the U-shaped seat (8) in advance, the pre-fixing component comprises a positioning fixing block (21) symmetrically arranged on the left and right side walls of the lifting seat (5), a pre-fixing top rod (22) respectively lifted and inserted on the two positioning fixing blocks (21), a top block (23) connected to the lower ends of the two pre-fixing top rods (22), and a top block (23) connected to the upper surface of the top block (23) and surrounding the pre-fixing top rod (22) A spring (24) is provided, the upper end of the spring (24) is connected to the bottom of the positioning fixed block (21), a feeding conveyor belt (100) is provided on the processing platform (1) and located on one side of the U-shaped seat (8), the upper surface of the feeding conveyor belt (100) and the upper surface of the U-shaped seat (8) are located on the same plane, an alignment plate (101) is provided on the end of the U-shaped seat (8) away from the feeding conveyor belt (100), and a feeding alignment component for intermittently controlling the diaphragm feeding and cooperating with the alignment plate (101) for alignment is provided on the main frame (10) and located above the side of the feeding conveyor belt (100) close to the U-shaped seat (8),The feed alignment assembly comprises a main board (102) arranged on the main frame (10), a cavity (103) at the top of the main board (102), a lifting wedge (104) arranged in the cavity (103) for lifting, a top rod (105) connected to the bottom of the lifting wedge (104), a slot (106) arranged at the lower part of the right side wall of the main board (102), a lifting plate (107) arranged in the slot (106) for lifting, a through hole (108) provided on the lifting plate (107), a guide block (109) arranged on the slot wall of the slot (106) and inserted into the through hole (108) for lifting and sliding, and a connecting rod (105) connected to the bottom of the lifting wedge (104). A push plate (110) connected to one end of the lifting plate (107), a reset plate (111) supported at the bottom of the lifting plate (107) and slidably arranged in the slot (106), a plurality of reset springs (112) connected between the bottom of the reset plate (111) and the slot (106), a cavity spring (113) connected to the bottom of the cavity (103) and the bottom of the lifting wedge (104), and a push wedge (114) arranged on the left side of the cavity (103), and a push cylinder (115) for driving the push wedge (114) is arranged on the outer wall of the main board (102), and the push cylinder (115) is arranged on the outer wall of the main board (102), and the push cylinder (115) is arranged on the outer wall of the main board (102). The output end of the push rod (116) is connected to the output end of the push rod (116), and the end of the push rod (116) away from the push cylinder (115) passes through the main board (102) in the horizontal direction and is connected to the push wedge block (114). The lower end of the push rod (105) passes through the main board (102) in the vertical direction and is supported on the top of the lifting plate (107). The right side of the main board (102) is provided with a secondary power component for driving the push plate (110) to move horizontally based on the push of the push wedge block (114). The secondary power component includes a lateral movement inner cavity (121) arranged in the main board (102) and located at the right top of the cavity (103), and a lateral movement inner cavity (121) arranged in the lateral movement inner cavity (121) arranged in the lateral movement inner cavity (121) and located at the right top of the cavity (103). A transverse movement block (122) in the inner cavity (121), a transverse movement main rod (123) transversely connected to the transverse movement block (122), a transverse movement return spring (124) connected between the inner wall of the transverse movement inner cavity (121) and the right side wall of the transverse movement block (122), a deep groove (125) provided on the top of the push plate (110), and an upper and lower slide plate (126) inserted in the deep groove (125) for sliding up and down. One end of the transverse movement main rod (123) transversely penetrates into the cavity (103) and is located above the lifting wedge block (104), and the other end transversely penetrates out of the main board (102) and is connected to the upper and lower slide plates (126).

2. A punching device suitable for the punching process of a nitrogen oxygen sensor chip as described in claim 1 above, It is characterized in that The laser punching assembly comprises a solid laser, an electrical system and an optical system arranged on a fixed platform (6). The electrical system supplies power to the laser and controls the laser output mode, and the optical system is used to accurately focus the laser beam on the punching processing position of the membrane.

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