Hydrofluoric acid containment sampling device

Abstract

The application provides a hydrofluoric acid sealed sampling device, which comprises a storage bottle for storing hydrofluoric acid, a connecting mechanism arranged at a connecting port of the storage bottle, and a sampling mechanism matched with the connecting mechanism to sample the hydrofluoric acid, the connecting mechanism comprises a sealing cover arranged at the connecting port of the storage bottle, a connecting assembly arranged on the sealing cover, and a cleaning assembly arranged on the connecting assembly, the connecting assembly comprises a liquid delivery member with one end penetrating into a storage groove of the storage bottle and the other end penetrating above the sealing cover, and a connecting member arranged above the sealing cover and connected with the liquid delivery member, and the cleaning assembly comprises a cleaning block connected with the cleaning assembly through a connecting groove, and the cleaning block is connected with the cleaning assembly, the application can safely sample the hydrofluoric acid, and avoids the volatilization of the hydrofluoric acid into the air to cause danger.

Description

Technical Field

[0001] This invention relates to the field of hydrofluoric acid sampling technology, specifically to a closed sampling device for hydrofluoric acid. Background Technology

[0002] Hydrofluoric acid is an aqueous solution of hydrogen fluoride gas. It is a clear, colorless, fuming, corrosive liquid with a strong, pungent odor. Hydrofluoric acid is a weak acid with extremely high corrosiveness, severely corroding metals, glass, and silicon-containing materials. Inhalation of its vapors or contact with skin can cause burns that are difficult to heal. In the laboratory, it is generally prepared using fluorite (whose main component is calcium fluoride) and concentrated sulfuric acid, and must be sealed in plastic bottles and stored in a cool place.

[0003] The manufacturing processes in industries such as chips and LCD panels are increasingly demanding precision and high performance. High-purity hydrofluoric acid is required in these production processes. Currently, the production process for high-purity hydrofluoric acid involves chemically pretreating anhydrous hydrofluoric acid, then distilling it in a distillation column. The resulting anhydrous hydrofluoric acid is cooled and absorbed by ultrapure water in an absorption tower. Methods such as controlling spray density and gas-liquid ratio are used to further purify the high-purity hydrofluoric acid. This is followed by an ultrafiltration process below 0.2μm, and finally, it is filled in a closed clean environment (CLASS100) to obtain the final product—high-purity hydrofluoric acid. During the process, the anhydrous hydrofluoric acid is sampled multiple times to better adjust process parameters. The anhydrous hydrofluoric acid sampling equipment needs to maintain a high level of cleanliness during sampling, and the sampling waste gas needs to be treated for safety and ease of operation.

[0004] However, most current high-purity anhydrous hydrofluoric acid equipment adopts the sampling methods of industrial-grade hydrofluoric acid, mostly using open sampling without controlling the sampling environment or providing sealing. Furthermore, existing sampling methods do not adequately consider safety; sampling hydrofluoric acid without sealing allows it to evaporate into the air, as anhydrous hydrofluoric acid is highly volatile above 5°C. Current equipment does not treat the evaporated acid gas, posing a potential safety risk. Additionally, the open design of the sampling bottles allows contaminants to easily contaminate the sample, and improper sampling procedures can easily lead to hazards. Summary of the Invention

[0005] To address the aforementioned technical problems, this invention provides a closed sampling device for hydrofluoric acid, which can safely sample hydrofluoric acid and avoid the danger caused by hydrofluoric acid volatilizing into the air.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a hydrofluoric acid sealed sampling device, comprising a storage bottle for storing hydrofluoric acid, a connecting mechanism disposed at the connection port of the storage bottle, and a sampling mechanism that cooperates with the connecting mechanism to sample hydrofluoric acid, wherein the connecting mechanism comprises a sealing cap disposed at the connection port of the storage bottle, a connecting component disposed on the sealing cap, and a cleaning component disposed on the connecting component.

[0007] The connecting assembly includes an infusion fitting with one end inserted through the bottom wall of the storage tank inside the storage bottle and the other end inserted through the top of the sealing cap, and a connector located above the sealing cap and connected to the infusion fitting.

[0008] The cleaning assembly includes a cleaning block that can be connected to the cleaning assembly via a connecting groove, and a cleaning assembly that connects to the cleaning block;

[0009] The infusion device includes a connecting tube located above the sealing cap at one end and penetrating the sealing cap at the bottom end into the storage tank, an extension tube whose top end is movably sleeved on the bottom end of the connecting tube and is vertically arranged with its bottom end attached to the bottom wall of the storage tank, an extension ring located at the top end of the extension tube, and a first return spring sleeved on the connecting tube with its bottom end connected to the extension ring and its top end attached to the sealing cap.

[0010] The connector includes a connector at the top of the connecting pipe, two sealing blocks at the opening of two second liquid extraction slots on the inner wall of the connector with a through groove, and a control structure on the connector that controls the two sealing blocks to move away from the opening of the second liquid extraction slots. The two second liquid extraction slots are symmetrically opened on the upper surface of the connector and are connected to the through groove.

[0011] The control structure includes a driven rod with its bottom end movable vertically connected to the upper end face of the through groove, a transmission ring provided on the bottom end of the driven rod, two vertical rods with their top ends corresponding to each other and vertically provided on the lower end face of the sealing block, and two linkage rods that correspond to each other and are movably connected at both ends to the bottom ends of the two vertical rods and the two sides of the transmission ring, respectively. A third return spring is sleeved on the driven rod, with its two ends respectively connected to the inner wall of the through groove and the transmission ring.

[0012] The sampling mechanism includes a sampling cylinder with a sampling groove on its upper end face, a control rod with a sealing block that is sealed to the inner wall of the sampling groove at its bottom end and a control block at its top end, and a sampling component that is located on the bottom end of the sampling cylinder and cooperates with the top end of the connector.

[0013] The sampling assembly includes a limiting rod vertically mounted on the bottom wall of the sampling tank, a sealing strip located on the bottom wall of the sampling tank and fitted inside a first liquid sampling tank that matches the second liquid sampling tank, and a reset block located on the bottom wall of the sampling tank, fitted onto the limiting rod, and connecting the two sealing strips. A second reset spring is fitted on the limiting rod, with its two ends respectively connected to the top of the limiting rod and the reset block. The length of the limiting rod is the same as the sum of the depths of the first and second liquid sampling tanks.

[0014] Preferably, a liquid extraction pipe that fits the bottom wall of the storage tank and forms a vortex is provided on the bottom wall of the storage tank, and multiple liquid extraction holes are equally spaced along the length of the side of the liquid extraction pipe near the bottom wall of the storage tank.

[0015] Preferably, the cleaning assembly includes a cleaning block fitted onto the connector head via a connecting groove, an outlet pipe with one end passing through the cleaning block and connected to a waste liquid tank via a cleaning groove inside the cleaning block, an inlet pipe with one end passing through the cleaning block and connected to a cleaning tank via a cleaning groove inside the cleaning block, and a miniature water pump mounted on the inlet pipe, wherein the connecting groove matches the bottom end of the sampling cylinder.

[0016] The beneficial effects of this invention are as follows: the sampling mechanism is connected to the connecting component on the sealing cap, which facilitates the sampling of hydrofluoric acid in the storage bottle. Furthermore, the sampling mechanism and the connecting component are equipped with a cleaning component, which facilitates the cleaning of any leaked hydrofluoric acid at the connection point. This prevents residual hydrofluoric acid from evaporating after sampling, thus avoiding the release of evaporating hydrofluoric acid into the air and ensuring safe sampling of hydrofluoric acid, preventing any potential danger caused by its evaporation into the air. Attached Figure Description

[0017] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used together with the embodiments of the invention to explain the invention, but do not constitute a limitation thereof. In the drawings:

[0018] Figure 1 This is a simplified structural diagram of the hydrofluoric acid closed sampling device proposed in this invention.

[0019] Figure 2 This is a schematic diagram of the cross-sectional structure of the hydrofluoric acid closed sampling device proposed in this invention.

[0020] Figure 3 This is a schematic diagram of the cross-sectional structure of the sampling mechanism of the present invention.

[0021] Figure 4 This is an enlarged structural diagram of point A in the present invention.

[0022] In the diagram: 1. Storage bottle; 2. Sealing cap; 3. Connecting tube; 4. Cleaning block; 5. Outlet tube; 6. Inlet tube; 7. Miniature water pump; 8. Sampling cylinder; 9. Sampling tank; 10. Control rod; 11. Control block; 12. Storage tank; 13. Extension tube; 14. Extension ring; 15. First return spring; 16. Liquid extraction tube; 17. Sealing block; 18. Cleaning tank; 19. Connector; 20. Connecting tank; 21. Return block; 22. First liquid extraction tank; 23. Sealing strip; 24. Limiting rod; 25. Second return spring; 26. Second liquid extraction tank; 27. Separator block; 28. Vertical rod; 29. ​​Linkage rod; 30. Driven rod; 31. Third return spring; 32. Transmission ring; 33. Through groove. Detailed Implementation

[0023] To make the technical means, creative features, achieved objectives, and effects of this invention readily understandable, the invention is further described below with reference to specific embodiments and accompanying drawings. However, the following embodiments are merely preferred embodiments of this invention and not all embodiments. Other embodiments obtained by those skilled in the art based on the embodiments described herein without creative effort are all within the protection scope of this invention.

[0024] Please see Figure 1-4 A closed sampling device for hydrofluoric acid includes a storage bottle 1 for storing hydrofluoric acid, a connecting mechanism disposed at the connection port of the storage bottle 1, and a sampling mechanism that cooperates with the connecting mechanism to sample hydrofluoric acid. The connecting mechanism includes a sealing cap 2 disposed at the connection port of the storage bottle 1, a connecting component disposed on the sealing cap 2, and a cleaning component disposed on the connecting component.

[0025] The connecting assembly includes an infusion fitting with one end inserted into the bottom wall of the storage groove 12 inside the storage bottle 1 and the other end inserted above the sealing cap 2, and a connector located above the sealing cap 2 and connected to the infusion fitting.

[0026] The cleaning assembly includes a cleaning block 4 that can be connected to the cleaning assembly via a connection slot 20, and a cleaning assembly that connects to the cleaning block 4.

[0027] like Figure 1-4 As shown, the sampling mechanism is directly connected to the connecting component on the sealing cap 2 to facilitate the removal of hydrofluoric acid placed in the storage bottle 1. The connection is cleaned by the cleaning component on the sampling mechanism and the connecting component, which facilitates the cleaning of residual hydrofluoric acid at the connection between the sampling mechanism and the connecting component. This prevents the hydrofluoric acid remaining on the sampling mechanism and the connecting component from evaporating into the air, allowing for safe sampling of hydrofluoric acid and avoiding the danger caused by hydrofluoric acid evaporating into the air.

[0028] The infusion set includes a connecting tube 3 located above the sealing cap 2 at one end and penetrating the sealing cap 2 into the storage tank 12 at the bottom end; an extension tube 13 movably sleeved on the bottom end of the connecting tube 3 and vertically arranged with its bottom end attached to the bottom wall of the storage tank 12; an extension ring 14 located at the top end of the extension tube 13; and a first return spring 15 sleeved on the connecting tube 3 with its bottom end connected to the extension ring 14 and its top end attached to the sealing cap 2.

[0029] like Figure 1 As shown, the extension tube 13, which is inserted through the top of the connecting tube 3, can move vertically on the connecting tube 3. A first return spring 15 is sleeved on the connecting tube 3, so that the elastic force of the first return spring 15 can push the bottom end of the extension tube 13 to fit tightly against the bottom wall of the storage tank 12. This makes it easier for the extension tube 13 to be inserted into the storage tank 12 at different depths, thus improving the practicality of the device.

[0030] A liquid extraction pipe 16 is provided on the bottom wall of the storage tank 12, which is in a spiral shape and fits against the bottom wall. Multiple liquid extraction holes are opened at equal intervals along the length of the side of the liquid extraction pipe 16 near the bottom wall of the storage tank 12.

[0031] like Figure 2 As shown, the liquid collection tube 16 facilitates the delivery of hydrofluoric acid placed in the storage tank 12, and the liquid collection tube 16 attached to the bottom wall of the storage tank 12 facilitates the sampling of hydrofluoric acid in the storage tank 12.

[0032] The connector includes a connector 19 at the top of the connecting pipe 3, two sealing blocks 27 at the openings of two second liquid extraction grooves 26 on the inner wall of the connecting head 19 with a through groove 33, and a control structure on the connecting head 19 that controls the two sealing blocks 27 to move away from the openings of the second liquid extraction grooves 26. The two second liquid extraction grooves 26 are symmetrically opened on the upper surface of the connecting head 19 and are connected to the through groove 33.

[0033] like Figure 3-4 As shown, when the sampling mechanism is connected to the connector 19, the two sealing blocks 27 are moved away from the opening of the second liquid extraction tank 26 by the control structure, so as to facilitate the opening of the second liquid extraction tank 26, so that the sampling mechanism can obtain hydrofluoric acid in the storage tank 12 through the second liquid extraction tank 26. The sealing block 17 is moved away or moved to the opening of the second liquid extraction tank 26 by the control structure, so as to control the opening of the second liquid extraction tank 26 to close or open, thereby facilitating the sampling of hydrofluoric acid.

[0034] The control structure includes a driven rod 30 with its upper end face in the through groove 33, a transmission ring 32 on the bottom end of the driven rod 30, two vertical rods 28 with their top ends vertically arranged on the lower end face of the sealing block 27, and two linkage rods 29 with their ends movably connected to the bottom ends of the two vertical rods 28 and the two sides of the transmission ring 32, respectively. A third return spring 31 with its two ends connected to the inner wall of the through groove 33 and the transmission ring 32 is sleeved on the driven rod 30.

[0035] like Figure 4 As shown, when the sampling mechanism is in contact with the upper end face of the connector 19, it facilitates the movement of the driven rod 30, which passes through the connector 19, into the connector 19. This facilitates the movement of the two vertical rods 28 away from the connector 19 via the two linkage rods 29, thereby facilitating the removal of the two sealing blocks 27 from the opening of the second liquid extraction tank 26. This allows the second liquid extraction tank 26 to be opened, facilitating the sampling of hydrofluoric acid. After the sampling mechanism has completed sampling, it is moved away from the connector 19. At this time, the third return spring 31, which is sleeved on the driven rod 30, moves the driven rod 30 to the outside of the connector 19. Simultaneously, the two sealing blocks 27 are moved back to the second liquid extraction tank 26 via the linkage rods 29 and the vertical rods 28. This prevents hydrofluoric acid from flowing out of the storage bottle 1 through the second liquid extraction tank 26, ensuring safe sampling of hydrofluoric acid and preventing the hydrofluoric acid from evaporating into the air and causing danger.

[0036] The sampling mechanism includes a sampling cylinder 8 with a sampling groove 9 on its upper end face, a control rod 10 with a sealing block 17 that is sealed to the inner wall of the sampling groove 9 at its bottom end and a control block 11 at its top end, and a sampling component that is located on the bottom end of the sampling cylinder 8 and cooperates with the top end of the connector 19.

[0037] like Figure 3 As shown, by moving the control block 11, the control rod 10 connected to the control block 11 drives the sealing block 17 located in the sampling tank 9 to move within the sampling tank 9, thereby facilitating the creation of a negative pressure between the bottom of the sampling tank 9 and the sealing block 17, so as to facilitate the sampling of hydrofluoric acid through the second liquid sampling tank 26.

[0038] The sampling assembly includes a limiting rod 24 with its bottom end vertically mounted on the bottom wall of the sampling groove 9, a sealing strip 23 located on the bottom wall of the sampling groove 9 and provided in the first liquid extraction groove 22 to match the second liquid extraction groove 26, and a reset block 21 located on the bottom wall of the sampling groove 9, fitted onto the limiting rod 24 and connecting the two sealing strips 23. A second reset spring 25 is fitted on the limiting rod 24 with its two ends respectively connected to the top of the limiting rod 24 and the reset block 21. The length of the limiting rod 24 is the same as the depth of the first liquid extraction groove 22 and the second liquid extraction groove 26.

[0039] like Figure 4As shown, the bottom end of the sampling cylinder 8 is attached to the upper end face of the connector 19, so that the bottom end of the sealing strip 23 passes through the second liquid extraction groove 26, thereby facilitating the sealing of the first liquid extraction groove 22 and the second liquid extraction groove 26. Then, the control block 11 pulls the sealing block 17 to move in the sampling groove 9, thereby facilitating the space between the sealing block 17 and the bottom wall of the sampling groove 9 to be in a negative pressure state. The suction reset block 21 drives the sealing strip 23 to move above the first liquid extraction groove 22, thereby facilitating the movement of hydrofluoric acid through the first liquid extraction groove 22 and the second liquid extraction groove 26 into the sampling groove 9.

[0040] The cleaning assembly includes a cleaning block 4 fitted onto a connector 19 via a connecting groove 20, an outlet pipe 5 with one end passing through the cleaning block 4 and communicating with the cleaning groove 18 inside the cleaning block 4 and the other end connected to a waste liquid tank, an inlet pipe 6 with one end passing through the cleaning block 4 and communicating with the cleaning groove 18 inside the cleaning block 4 and the other end connected to a cleaning tank, and a miniature water pump 7 mounted on the inlet pipe 6. The connecting groove 20 matches the bottom end of the sampling cylinder 8.

[0041] like Figure 1-3 As shown, the sampling cylinder 8 is connected to the connector 19 to sample the hydrofluoric acid in the storage bottle 1. After sampling, water from the cleaning tank is transported to the cleaning tank 18 through the micro water pump 7 and the inlet pipe 6 to clean the residual hydrofluoric acid at the contact point between the bottom end face of the sampling cylinder 8 and the surface of the connector 19. This allows for safe sampling of hydrofluoric acid and avoids the danger caused by the hydrofluoric acid evaporating into the air.

[0042] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A sealed sampling device for hydrofluoric acid, comprising a storage bottle (1) for storing hydrofluoric acid, a connecting mechanism disposed at the connection port of the storage bottle (1), and a sampling mechanism cooperating with the connecting mechanism to sample hydrofluoric acid, characterized in that, The connecting mechanism includes a sealing cap (2) located at the connection port of the storage bottle (1), a connecting component located on the sealing cap (2), and a cleaning component located on the connecting component; The connecting assembly includes an infusion fitting with one end inserted through the bottom wall of the storage groove (12) inside the storage bottle (1) and the other end inserted through the top of the sealing cap (2), and a connector located above the sealing cap (2) and connected to the infusion fitting; The cleaning assembly includes a cleaning block (4) that can be connected to the cleaning assembly via a connecting groove (20), and a cleaning assembly that connects to the cleaning block (4); The infusion device includes a connecting tube (3) located above the sealing cap (2) and penetrating the sealing cap (2) into the storage tank (12) at the bottom end; an extension tube (13) movably sleeved on the bottom end of the connecting tube (3) and vertically arranged with its bottom end attached to the bottom wall of the storage tank (12); an extension ring (14) located at the top end of the extension tube (13); and a first return spring (15) sleeved on the connecting tube (3) and connected at the bottom end to the extension ring (14) with its top end attached to the sealing cap (2). The connector includes a connector (19) at the top of the connector (3), two sealing blocks (27) at the opening of two second liquid extraction grooves (26) on the inner wall of the through groove (33) in the connector (19), and a control structure on the connector (19) that controls the two sealing blocks (27) to move open from the opening of the second liquid extraction grooves (26). The two second liquid extraction grooves (26) are symmetrically opened on the upper end face of the connector (19) and communicate with the through groove (33). The control structure includes a driven rod (30) with the upper end face of the bottom movable vertical connector (19) inside the through groove (33), a transmission ring (32) provided on the bottom end of the driven rod (30), two vertical rods (28) with their top ends corresponding to each other and vertically provided on the lower end face of the sealing block (27), and two linkage rods (29) corresponding to each other and movably connected at both ends to the bottom ends of the two vertical rods (28) and the two sides of the transmission ring (32). A third return spring (31) with its two ends connected to the inner wall of the through groove (33) and the transmission ring (32) respectively is sleeved on the driven rod (30). The sampling mechanism includes a sampling cylinder (8) with a sampling groove (9) on its upper end face, a control rod (10) with a sealing block (17) that is sealed to the inner wall of the sampling groove (9) and a control block (11) on its top end, and a sampling component that is located on the bottom end of the sampling cylinder (8) and cooperates with the top end of the connector (19). The sampling assembly includes a limiting rod (24) with its bottom end vertically mounted on the bottom wall of the sampling groove (9), a sealing strip (23) provided on the bottom wall of the sampling groove (9) and located in the first liquid extraction groove (22) that matches the second liquid extraction groove (26), and a reset block (21) provided on the bottom wall of the sampling groove (9), fitted onto the limiting rod (24), and connecting the two sealing strips (23). A second reset spring (25) is fitted on the limiting rod (24) with its two ends connected to the top of the limiting rod (24) and the reset block (21), respectively. The length of the limiting rod (24) is the same as the depth of the first liquid extraction groove (22) and the second liquid extraction groove (26).

2. The hydrofluoric acid sealed sampling device according to claim 1, characterized in that: The storage tank (12) is provided with a liquid extraction pipe (16) that fits the bottom wall and is in the shape of a vortex. The liquid extraction pipe (16) has multiple liquid extraction holes at equal intervals along the length direction on the side of the bottom wall of the storage tank (12) near the bottom wall.

3. A hydrogen fluoride containment sampling device according to claim 1, wherein: The cleaning assembly includes a cleaning block (4) fitted onto a connector (19) via a connecting groove (20), an outlet pipe (5) with one end passing through the cleaning block (4) and connected to a waste liquid tank via a cleaning groove (18) within the cleaning block (4), an inlet pipe (6) with one end passing through the cleaning block (4) and connected to a cleaning tank via a cleaning groove (18) within the cleaning block (4), and a miniature water pump (7) mounted on the inlet pipe (6). The connecting groove (20) matches the bottom end of the sampling cylinder (8).

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