Air exhaust system of a uniform coating developing unit and control method thereof

Abstract

The present application relates to the technical field of exhaust system, and particularly relates to an exhaust system for a uniform glue developing unit and a control method thereof, which can improve the stability of the environmental air pressure during the working process of the uniform glue developing unit, solve the technical problem that constant pressure cannot be maintained when multiple stations work, and the uniform glue developing unit comprises a first station of the uniform glue developing unit and a second station of the uniform glue developing unit, and the exhaust system comprises: a public air duct, which is provided with a public air duct exhaust port; a first air duct matched with the first station of the uniform glue developing unit, which is provided with a first air inlet and is in communication with the public air duct; a second air duct matched with the second station of the uniform glue developing unit, which is provided with a second air inlet and is in communication with the public air duct; a first air duct pneumatic valve, which is arranged in the first air duct and is used for controlling the opening and closing of the first air duct; and a second air duct pneumatic valve, which is arranged in the second air duct and is used for controlling the opening and closing of the second air duct.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of exhaust system, in particular to an exhaust system for a uniform glue developing unit. BACKGROUND

[0002] With the development of global electronic information industry, chips have a large number of applications in the fields of automobile household appliances, 3C electronics, etc. In the production process, uniform glue development is a key link in the whole process. The exhaust system of the uniform glue developing machine is designed for the special environment required in the uniform glue development process. Its main function is to maintain the stability of the internal air pressure and timely discharge the gas and impurity particles generated in the uniform glue development process.

[0003] The traditional exhaust system mainly consists of an exhaust duct, an exhaust fan and an air inlet valve. However, the single-path exhaust system commonly used in the prior art cannot coordinate the working states of different uniform glue developing units in the production process, resulting in a decrease in the yield rate of the uniform glue developing machine and even damage to the equipment during long-term operation. SUMMARY

[0004] The present application can solve the technical problem of unstable pressure of the double-station spin coating exhaust system during the operation of the uniform glue developing unit.

[0005] To solve the above problems, the present application provides an exhaust system for a uniform glue developing unit, which comprises a uniform glue developing unit first station and a uniform glue developing unit second station. The exhaust system comprises: a common air duct provided with a common air duct exhaust port; a first air duct adapted to the uniform glue developing unit first station, the first air duct being provided with a first air inlet and being in communication with the common air duct; a second air duct adapted to the uniform glue developing unit second station, the second air duct being provided with a second air inlet and being in communication with the common air duct; a first air control valve provided in the first air duct and used for controlling the opening and closing of the first air duct; a second air control valve provided in the second air duct and used for controlling the opening and closing of the second air duct; and a manual air valve used for adjusting the air speed in the air duct and provided in the second air duct.

[0006] Compared with the prior art, the technical effects achieved by using this technical solution are as follows: It can be understood that when the exhaust system performs exhaust operation on multiple stations of the uniform glue developing unit, multiple air ducts are needed for exhaust operation. The first air duct adjusts the exhaust for the uniform glue developing unit first station, and the second air duct adjusts the exhaust for the uniform glue developing unit second station. The first air control valve controls the first air duct, and the second air valve controls the second air duct. When the exhaust system is working, the exhaust system can timely discharge the waste gas and impurity particles in the environment, thereby maintaining the stability of the air pressure and achieving the purpose of air exchange and pressure stabilization.

[0007] Further, in the application, the first air duct and the second air duct are arranged side by side, the second air duct is arranged between the first air duct and the exhaust port of the public air duct, and the manual air valve is arranged in the second air duct.

[0008] Compared with the prior art, the technical effects achieved by adopting the technical scheme are as follows: since the air exhaust system occupies a large space, the conflict between the air exhaust structure and the internal structure of the developing machine is avoided after the double-station double-branch air exhaust system of the uniform coating and developing unit is adopted, the stable operation of the equipment is ensured, and the equipment is convenient to disassemble and maintain; the first air duct and the second air duct are arranged side by side, the cooperation between the air exhaust system and the uniform coating and developing machine is ensured; the manual air valve arranged in the second air duct can meet the stable pressure regulation requirement of the entire air exhaust system, the internal space of the air exhaust system is saved, and the air exhaust efficiency of the air exhaust system is further improved.

[0009] Further, in the application, the air exhaust system further comprises: a public air duct air control valve arranged in the public air duct.

[0010] Compared with the prior art, the technical effects achieved by adopting the technical scheme are as follows: the public air duct air control valve is arranged to adjust the air pressure of the public air duct and the external air duct, and the stability of the internal air pressure of the uniform coating and developing machine is ensured; further, the public air duct air control valve can cooperate with the first air duct and the second air duct to promote the pressure relief of the uniform coating and developing unit, and the problem that the internal air pressure of the uniform coating and developing machine is too high due to the untimely pressure relief of the uniform coating and developing unit is avoided.

[0011] Further, in the application, the air exhaust system further comprises: a first double-branch air duct arranged outside the first air inlet of the first air duct; and / or a second double-branch air duct arranged outside the first air inlet of the second air duct.

[0012] Compared with the prior art, the technical effects achieved by adopting the technical scheme are as follows: the double-branch air duct can be avoided from the structures such as the developing liquid nozzle in the uniform coating and developing machine, so that the interference between the air exhaust system and other structures in the uniform coating and developing machine during the operation of the uniform coating and developing machine is avoided; compared with the single air inlet design, the double-branch air duct increases the air inlets, improves the air exhaust and air exchange efficiency, and ensures the stability of the air pressure of the air exhaust system.

[0013] Further, in the application, the air exhaust system further comprises: a first air duct air baffle arranged in the first air duct; and / or a second air duct air baffle arranged in the second air duct.

[0014] Compared with the prior art, the technical effects reached by the technical scheme are as follows: the first air duct air grating and the second air duct air grating are supplementary air inlet devices of the air duct opening of the uniform coating developing machine, and are used for balancing the air pressure of the exhaust system and the inside of the uniform coating developing machine; the first air duct air grating and the second air duct air grating can also assist the exhaust system to complete pressure relief of the uniform coating developing unit, and the grating-shaped air grating plays an auxiliary role in uniform air inlet of the exhaust system.

[0015] Further, in the present application, the manual air valve comprises: an air baffle connecting rod, an air baffle roller and an air baffle, the air baffle is connected with the air baffle roller and is used for being turned over by the air baffle connecting rod to block or avoid the air duct; and a manual valve, which is arranged at any one end of the air baffle roller and is used for driving the air baffle to turn over.

[0016] Compared with the prior art, the technical effects reached by the technical scheme are as follows: the manual air valve can control the initial air pressure value of the inside of the uniform coating developing machine, so that the air pressure when the exhaust system starts is more uniform, and the manual air valve can be manually controlled according to the pressure difference table in the uniform coating developing unit.

[0017] Further, in the present application, the manual air valve comprises: a dial, the dial is provided with a dial groove, and the manual valve is limited to be turned clockwise or counterclockwise by the dial groove.

[0018] Compared with the prior art, the technical effects reached by the technical scheme are as follows: the dial can make the adjustment process more accurate, and also improves the adjustment precision of the manual air valve.

[0019] Further, the present application further provides a control method of the exhaust system, the control method is used for controlling the exhaust system in the above-mentioned embodiments, and the control method comprises the following steps.

[0020] In the case that one of the first work position of the uniform coating developing unit and the second work position of the uniform coating developing unit is opened, the exhaust opening of the public air duct is kept opened; according to the respective start-stop states of the first work position of the uniform coating developing unit and the second work position of the uniform coating developing unit, the opening and closing of the first air duct pneumatic valve and the second air duct pneumatic valve are controlled; the first air pressure of the first air duct in the exhaust state is obtained, and the second air pressure of the second air duct in the exhaust state is obtained; and when the first work position of the uniform coating developing unit and the second work position of the uniform coating developing unit are simultaneously opened, the opening and closing of the manual air valve is controlled according to the difference between the first air pressure and the second air pressure.

[0021] Compared with the prior art, the technical effects achieved by the technical scheme are as follows: the control method of the air exhaust system is adapted to different working modes of the uniform coating developing unit, and in the case that at least one of the first working position of the uniform coating developing unit and the second working position of the uniform coating developing unit is opened, the air exhaust pressure stabilization mechanism can complete the task of air exhaust pressure stabilization of at least one of the first working position of the uniform coating developing unit and the second working position of the uniform coating developing unit by closing the remaining air duct air valves, thereby reducing the load of the whole system of the uniform coating developing machine and further saving resources; by controlling the opening and closing of the manual air valve, the purpose of manually controlling the environmental air pressure is achieved, the stability of the environmental air pressure is ensured, and the air exhaust efficiency of the uniform coating developing unit is improved.

[0022] Further, in the present application, the air exhaust system further comprises a public air duct air control valve: in the case that the first working position of the uniform coating developing unit and the second working position of the uniform coating developing unit are simultaneously opened, the public air duct air control valve is closed.

[0023] Compared with the prior art, the technical effects achieved by the technical scheme are as follows: the air exhaust system can also realize the control of the air pressure stability of the public air duct, and since the public air duct is affected by the internal air pressure of the uniform coating developing machine, closing the public air duct air control valve when multiple working positions of the uniform coating developing unit are simultaneously operated can maximize the influence of other components of the uniform coating developing machine on the public air duct.

[0024] In summary, after the technical scheme of the present application is adopted, the following technical effects can be achieved:

[0025] i) When the air exhaust system performs air exhaust operation on multiple units, multiple air ducts are needed for air exhaust operation, the first air duct is used for air exhaust regulation of the first working position of the uniform coating developing unit, the second air duct is used for air exhaust regulation of the second working position of the uniform coating developing unit, the first air control valve controls the first air duct, and the second air valve controls the second air duct, so that the waste gas and impurity particles in the environment are timely discharged, the air pressure is kept stable, and the purpose of air exchange pressure stabilization is achieved.

[0026] ii) The control method of the air exhaust system is adapted to different working modes of the uniform coating developing unit, and in the case that at least one of the first working position of the uniform coating developing unit and the second working position of the uniform coating developing unit is opened, the air exhaust pressure stabilization mechanism can complete the task of air exhaust pressure stabilization of at least one of the first working position of the uniform coating developing unit and the second working position of the uniform coating developing unit by closing the remaining air duct air valves, thereby reducing the load of the whole system and saving resources. BRIEF DESCRIPTION OF DRAWINGS

[0027] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the exhaust system of the spin coating and developing unit provided in the first embodiment of the present invention;

[0029] Figure 2 for Figure 1 Exploded view;

[0030] Figure 3 for Figure 2 Schematic diagram of the manual air valve;

[0031] Figure 4 for Figure 3 Top view;

[0032] Figure 5 This is a flowchart of the exhaust system control method provided in the second embodiment of the present invention;

[0033] Explanation of reference numerals in the attached figures

[0034] 10-Exhaust system; 100-Common air duct; 101-Common air duct exhaust port; 102-Quick release device; 203-First air duct; 204-Second air duct; 205-First air duct pneumatic control valve; 206-Second air duct pneumatic control valve; 301-Common air duct pneumatic control valve; 302-Manual air valve; 401-First dual-branch air duct; 402-Second dual-branch air duct; 201-First air duct air grille; 202-Second air duct air grille; 323-Windshield roller; 325-Windshield connecting rod; 312-Windshield; 322-Manual valve; 321-Digital dial; 331-Digital dial groove. Detailed Implementation

[0035] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In the description of the present invention, it should be understood that the terms "lateral," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0036] [First Embodiment]

[0037] Preferably, Figure 1 With Figure 2 , see the first embodiment of the present application provides a kind of exhaust system 10 for uniform glue developing unit, and uniform glue developing unit includes uniform glue developing unit first station and uniform glue developing unit second station;Exhaust system 10 is connected to the uniform glue developing unit of uniform glue developing machine, and exhaust system 10 includes: public air duct 100, and public air duct 100 is equipped with public air duct exhaust port 101;With the first air duct 203 of uniform glue developing unit first station adaptation, and first air duct 203 is equipped with first air inlet, and is communicated with public air duct 100;With the second air duct 204 of uniform glue developing unit second station adaptation, and second air duct 204 is equipped with second air inlet, and is communicated with public air duct 100;First air duct pneumatic valve 205, first air duct pneumatic valve 205 is located in first air duct 203, and is used to control the opening and closing of first air duct 203;Second air duct pneumatic valve 206, second air duct pneumatic valve 206 is located in second air duct 204, and is used to control the opening and closing of second air duct 204;Manual air valve 302, manual air valve 302 is used to adjust the wind speed in air duct, and manual air valve 302 is located in any one of first air duct 203 and second air duct 204.

[0038] Wherein, uniform glue developing unit first station and uniform glue developing unit second station are the rotating disc structure in uniform glue developing machine;First air duct 203 is connected to public air duct 100, and the bending structure is arranged between first air duct 203 and public air duct 100, and the height of first air duct 203 is same with second air duct 204;Public air duct 100 is equipped with left and right two openings, and uniform glue developing machine is further provided with air inlet pipeline (not shown in the drawing) and exhaust pipeline (not shown in the drawing), and the left opening of public air duct 100 is connected with air inlet pipeline, and air inlet pipeline can transport waste gas generated in the inside of uniform glue developing machine into public air duct 100;The right opening of public air duct 100 is connected with exhaust pipeline, for discharging the gas in exhaust system outside uniform glue developing machine;The overall configuration of air duct is hollow structure, and public air duct 100 is left wide right narrow configuration, and quick release device 102 is mounted on the right narrow port sleeve structure, to facilitate the connection with exhaust pipeline.

[0039] Further, manual air valve 302 is used to adjust the wind speed in air duct, and manual air valve 302 is located in first air duct 203 or second air duct 204;First air duct 203 and second air duct 204 are arranged on the same side of public air duct 100, and second air duct 204 is arranged between first air duct 203 and public air duct exhaust port 101;Exhaust system 10 further includes: public air duct pneumatic valve 301, and public air duct pneumatic valve 301 is located in public air duct 100, for controlling the opening and closing of public air duct 100;For example, in the embodiment, manual air valve 302 is located in second air duct 204.

[0040] Preferably, the exhaust system 10 further comprises: a first double-branch air duct 401 and / or a second double-branch air duct 402, the first double-branch air duct 401 is arranged outside the first air inlet of the first air duct 203; the second double-branch air duct 402 is arranged outside the first air inlet of the second air duct 204; the exhaust system 10 further comprises: a first air duct air baffle 201 and / or a second air duct air baffle 202, the first air duct air baffle 201 is arranged in the first air duct 203, and the second air duct air baffle 202 is arranged in the second air duct 204.

[0041] Specifically, the first double-branch air duct 401 is connected with the first air duct 203, the first air duct air control valve 205 is arranged in the first air duct 203, and the first air duct air baffle 201 is arranged outside the first air duct 203; the second double-branch air duct 402 is connected with the second air duct 204, the second air duct air control valve 206 is arranged in the second air duct 204, and the second air duct air baffle 202 is arranged outside the second air duct 204; the manual air valve 302 is arranged in the second air duct 204, the second air duct air control valve 206 is arranged at the position close to the second double-branch air duct 402 of the manual air valve 302, and the first air duct 203 and the second air duct 204 are configured as a hollow cubic structure, so as to facilitate the assembly of the air valve air baffle and the air duct.

[0042] It should be noted that when the air inlet pipeline delivers exhaust gas to the exhaust system 10, the exhaust gas can enter the first air duct 203 through the first double-branch air duct 401, and then enter the public air duct 100 after passing through the first air duct air control valve 205; and / or the exhaust gas can enter the second air duct 204 through the second double-branch air duct 402, and then enter the public air duct 100 after passing through the second air duct air control valve 206; wherein when the manual air valve 302 is arranged in the second air duct 204, the exhaust gas will pass through the second air duct air control valve 206 and the manual air valve 302 in sequence, and then enter the public air duct 100; when the exhaust system is running, the first air duct 203 and the second air duct 204 participate in the exhaust, which improves the working efficiency of the exhaust system 10, the first air duct air baffle 201 and the second air duct air baffle 202 assist in completing the exhaust operation when the first air duct 203 and the second air duct 204 work cooperatively; the air pressure in the exhaust system 10 can be controlled through the first air duct air control valve 205, the second air duct air control valve 206 and the manual air valve 302; the public air duct air control valve 301 is arranged on the left side of the public air duct 100 to adjust the air pressure of the air inlet pipeline of the uniform glue developing machine connected to the exhaust system 10, and the manual air valve 302 can adjust the adjustment threshold of the first air duct air control valve 205 and the second air duct air control valve 206.

[0043] Preferably, as shown in FIG. 1, the exhaust system 10 comprises: a first air duct 203 and a second air duct 204, the first air duct 203 and the second air duct 204 are connected with the public air duct 100; the first air duct 203 and the second air duct 204 are arranged in parallel and connected with the public air duct 100; the first air duct 203 and the second air duct 204 are connected with the public air duct 100 through the first air duct air control valve 205 and the second air duct air control valve 206 respectively. Figure 3 , Figure 4The manual air valve 302 comprises an air baffle connecting rod 325, an air baffle roller 323, an air baffle 312 and a manual valve 322; the air baffle 312 is connected with the air baffle roller 323 and is used for being turned over by the air baffle connecting rod 325 to block or avoid the air duct; the manual valve 322 is arranged at any one end of the air baffle connecting rod 325 and is used for driving the air baffle 312 to turn over; the manual valve 322 is provided with a scale disc 321, the scale disc 321 is provided with a scale disc groove 331, and the scale disc groove 331 can limit the manual valve 322 from being rotated clockwise or counterclockwise.

[0044] Specifically, the air baffle connecting rod 325 penetrates through the air baffle roller 323, is connected with the scale disc 321 and is fixed in the second air duct 204; the air baffle roller 323 and the air baffle 312 can be driven to rotate around the air baffle connecting rod 325 by rotating the manual valve 322; the manual valve 322 needs to be rotated according to the scale in the scale disc groove 331 in the scale disc 321 during the rotation, so that the quantitative operation of the air pressure adjustment can be realized.

[0045]

Second embodiment

[0046] The second embodiment of the present application provides an air conditioner energy-saving control method, which is used for controlling the air conditioner energy-saving system in the above-mentioned embodiments, and comprises the following steps:

[0047] In the case that at least one of the first work position of the uniform glue developing unit and the second work position of the uniform glue developing unit is opened, the common air duct exhaust port is kept open; according to the respective start-stop states of the first work position of the uniform glue developing unit and the second work position of the uniform glue developing unit, the opening and closing of the first air duct pneumatic valve and the second air duct pneumatic valve are controlled; the first air duct pressure in the exhaust state is obtained, and the second air duct pressure in the exhaust state is obtained.

[0048] Specifically, referring to Figure 5 , the control method comprises the following steps:

[0049] S101: initial closing state of the air duct, the gas flow in the air duct is limited by the pneumatic valve and the manual air valve, and the internal and external environments are blocked;

[0050] S112: judging the working conditions of the first work position of the uniform glue developing unit and the second work position of the uniform glue developing unit; if the first work position of the uniform glue developing unit works and the second work position of the uniform glue developing unit does not work, S113 to S115 are executed;

[0051] S102: judging the working conditions of the first work position of the uniform glue developing unit and the second work position of the uniform glue developing unit; if the first work position of the uniform glue developing unit does not work and the second work position of the uniform glue developing unit works, S103 to S105 are executed;

[0052] S122: judge the working condition of the first station of the uniform glue developing unit and the second station of the uniform glue developing unit, if the working condition of the first station of the uniform glue developing unit and the working condition of the second station of the uniform glue developing unit are satisfied, execute S123 to S125.

[0053] It can be understood that the uniform glue developing unit has three working modes in addition to the initial closed state, which are the first station of the uniform glue developing unit working and the second station of the uniform glue developing unit not working, the second station of the uniform glue developing unit working and the first station of the uniform glue developing unit not working, and the first station of the uniform glue developing unit and the second station of the uniform glue developing unit working at the same time. The corresponding exhaust system control mode also needs to be set to three modes in addition to the initial state.

[0054] Preferably, in S101, after obtaining the wind pressure value in the standard range through the pressure difference table in the uniform glue developing unit, the size of the wind pressure value is judged to determine whether the condition for starting the exhaust system is met. When the wind pressure value is greater than a certain value and meets the condition for starting the exhaust system, the exhaust system is adjusted according to the different working modes of the uniform glue developing unit.

[0055] Further, when the control method of the exhaust system meets the condition of S112:

[0056] S113: open the air control valve of the public air duct, keep the overall public air duct and the external air duct unobstructed;

[0057] S114: open the first air duct air control valve and close the second air duct air control valve, so that the exhaust system is only for the working first station of the uniform glue developing unit;

[0058] S115: adjust the manual air valve to make the wind pressure in the two air ducts uniform.

[0059] Specifically, when the first station of the uniform glue developing unit works and the second station of the uniform glue developing unit does not work, the exhaust system executes a control mode, opens the air control valve of the public air duct, opens the first air duct air control valve and closes the second air duct air control valve, obtains the wind pressure value in the standard range according to the pressure difference table in the unit, and adjusts the manual air valve according to the wind pressure value to change the exhaust capacity of the second air duct. It should be noted that although the second air duct air control valve is in the closed state at this time, ambient air can still enter the air duct through the air grille, and adjusting the manual air valve can still stabilize the wind pressure.

[0060] Further, when the control method of the exhaust system meets the condition of S102:

[0061] S103: open the air control valve of the public air duct, keep the overall public air duct and the external air duct unobstructed;

[0062] S104: opening the second air duct pneumatic valve, closing the first air duct pneumatic valve, so that the exhaust system is only for the working uniform glue developing unit second station;

[0063] S105: adjusting the manual air valve, so that the air pressure in the first air duct and the second air duct is uniform.

[0064] Specifically, when the uniform glue developing unit second station works and the uniform glue developing unit first station does not work, the exhaust system executes a control mode, opens the public air duct pneumatic valve, opens the second air duct pneumatic valve, closes the first air duct pneumatic valve, obtains the air pressure value in the standard range according to the unit internal pressure difference table, and then adjusts the manual air valve according to the air pressure value to change the second air duct exhaust capacity. It should be noted that at this time, the second air duct pneumatic valve is in the open state, and adjusting the manual air valve can still control the air pressure.

[0065] Further, when the control method of the exhaust system meets the condition of S122:

[0066] S123: closing the public air duct pneumatic valve;

[0067] S124: opening the first air duct pneumatic valve, and opening the second air duct pneumatic valve;

[0068] S125: adjusting the manual air valve, so that the air pressure in the first air duct and the second air duct is uniform.

[0069] Specifically, when the uniform glue developing unit second station works and the uniform glue developing unit first station does not work, the exhaust system executes a control mode, opens the public air duct pneumatic valve, opens the second air duct pneumatic valve, closes the first air duct pneumatic valve, obtains the air pressure value in the standard range according to the unit internal pressure difference table, and then adjusts the manual air valve according to the air pressure value to change the second air duct exhaust capacity. It should be noted that at this time, the second air duct pneumatic valve is in the open state, and adjusting the manual air valve can still control the air pressure.

[0070] S111: each adjustment mode finally reaches air pressure stability.

[0071] Preferably, in S111, each adjustment mode finally reaches air pressure stability, which is the guarantee for the normal work of the uniform glue developing unit.

[0072] Although the present application is disclosed as above, the present application is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present application, and therefore the protection scope of the present application should be subject to the range defined by the claims.

Claims

1. An exhaust system for a spin coat developing unit, characterized in that, The spin coating and developing unit includes a first station and a second station, and the exhaust system (10) includes: A common air duct (100) is provided with a common air duct exhaust port (101); A first air duct (203) adapted to the first station of the spin coating and developing unit, the first air duct (203) is provided with a first air inlet and is connected to the common air duct (100); A second air duct (204) adapted to the second station of the spin coating and developing unit, the second air duct (204) is provided with a second air inlet and is connected to the common air duct (100); The first air duct pneumatic control valve (205) is located in the first air duct (203) and is used to control the opening and closing of the first air duct (203); The second air duct pneumatic control valve (206) is located in the second air duct (204) and is used to control the opening and closing of the second air duct (204); A common air duct air control valve (301) is provided in the common air duct (100) and is used to control the opening and closing of the common air duct (100); Manual air valve (302) is used to adjust the air speed in the air duct. The manual air valve (302) is located in either the first air duct (203) or the second air duct (204).

2. The exhaust system according to claim 1, characterized in that, The first air duct (203) and the second air duct (204) are arranged side by side. The second air duct (204) is located between the first air duct (203) and the exhaust port (101) of the common air duct. The manual air valve (302) is located in the second air duct (204).

3. The exhaust system according to claim 1, characterized in that, The exhaust system also includes: The first dual-branch air duct (401) is located outside the air inlet of the first air duct (203); and / or The second dual-branch air duct (402) is located outside the air inlet of the second air duct (204).

4. The exhaust system according to claim 1, characterized in that, The exhaust system also includes: The first air duct louver (201) is disposed in the first air duct (203); and / or The second air duct louver (202) is located in the second air duct (204).

5. The exhaust system according to claim 1, characterized in that, The manual air valve (302) includes: Windshield linkage (325), windshield roller (323) and windshield (312), the windshield (312) is connected to the windshield roller (323) and is used to flip by the windshield linkage (325) to block or avoid the air duct; A manual valve (322) is provided at either end of the windshield roller (323) and is used to drive the windshield (312) to rotate.

6. The exhaust system according to claim 5, characterized in that, The manual air valve (302) includes: A dial (321) is provided with a dial groove (331), and the manual valve (322) is restricted by the dial groove (331) to be turned clockwise or counterclockwise.

7. A control method for an exhaust system, said control method being used to control the exhaust system as described in any one of claims 1 to 6, characterized in that, The control method includes: When at least one of the first station of the spin coating and the second station of the spin coating and developing unit is open, the exhaust port (101) of the common air duct remains open. Based on the start / stop status of the first station of the spin coating and the second station of the spin coating and developing unit, control the opening and closing of the first air duct air control valve (205) and the second air duct air control valve (206). Obtain the first air pressure of the first air duct (203) in the exhaust state, and obtain the second air pressure of the second air duct (204) in the exhaust state; When the first station of the spin coating and the second station of the spin coating and developing unit are opened simultaneously, the opening and closing of the manual air valve (302) is controlled according to the degree of difference between the first air pressure and the second air pressure.

8. The control method for the exhaust system according to claim 7, characterized in that, The exhaust system also includes a common duct air control valve (301), and the control method further includes: When the first station of the spin coating and the second station of the spin coating and developing unit are opened simultaneously, the air control valve (301) of the common air duct is closed.

Images