Device coating method, coating track and device coating mechanism

Abstract

The present application discloses a device coating method, a coating track, and a device coating mechanism, wherein the device coating method includes: providing a carrier, placing the device to be coated on the carrier; providing a coating track and a tray, the coating track having a first section ramp and a second section ramp that are butted against each other, the first section ramp and the second section ramp both having a high end and a low end, the high end of the first section ramp and the high end of the second section ramp butting against each other; installing the carrier on the tray, and coating by physical vapor deposition, the butt joint of the first section ramp and the second section ramp of the coating track is located below the coating source, during coating, the tray drives the carrier to move back and forth, and a coating layer is formed on the front and side of the device to be coated. When the carrier of the present application moves back and forth on the first section ramp and the second section ramp, the side of the device changes from vertical to a certain angle with the vertical, the probability of receiving coating atoms deposited from top to bottom increases, and the difference in coating thickness between the side and the front of the device can be effectively reduced.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor packaging, and in particular to a device coating method, a coating track and a device coating mechanism. Background Art

[0002] Devices require surface metallization to achieve functions such as electromagnetic shielding, which is usually achieved through a PVD sputtering coating process, where the sputtered atoms are deposited on the device surface and surrounding side walls.

[0003] like Figure 1 and Figure 2 As shown, the traditional coating process is as follows:

[0004] 1. Attach one side of the double-sided adhesive layer 4 flatly to the carrier 1, and attach the device 2 to be coated to the other side of the double-sided adhesive layer 4, with two side walls of the device 2 to be coated parallel to the moving direction of the carrier 1;

[0005] 2. The physical vapor deposition method is used for coating operation. The carrier 1 is fixed on the tray 5. During the coating process, the tray 5 moves back and forth along the coating track 3, driving the carrier 1 to oscillate back and forth (along the X direction) under the coating source 6 to ensure the consistency of the coating process.

[0006] The disadvantages of the traditional coating method are as follows: the coating atoms 61 are deposited on the device surface by gravity, and the carrier 1 performs one-dimensional horizontal reciprocating motion along the coating track 3 in the sputtering chamber, and the motion direction is perpendicular to the deposition direction of the coating atoms 61. The probability of the coating atoms 61 being received on the side of the device is much lower than that on the front. In order to ensure the shielding effectiveness of the device surface and ensure the thinnest coating thickness on the side, more time and coating materials are required, resulting in low coating efficiency and material waste. Summary of the invention

[0007] In view of the above problems, the present invention proposes a device coating method, a coating track and a device coating mechanism.

[0008] The technical solution adopted by the present invention is as follows:

[0009] A device coating method, comprising:

[0010] Providing a carrier, and placing the device to be coated on the carrier;

[0011] A coating track and a tray are provided, wherein the coating track has a first ramp section and a second ramp section that are butted against each other, the first ramp section and the second ramp section both have a high end and a low end, the high end of the first ramp section is butted against the high end of the second ramp section, and the tray cooperates with the coating track and can reciprocate on the coating track;

[0012] The carrier with the device to be coated is installed on the pallet, and the coating is carried out by physical vapor deposition. The junction between the first section ramp and the second section ramp of the coating track is located below the coating source. During coating, the pallet drives the carrier to move back and forth to form a coating layer on the front and side of the device to be coated.

[0013] The junction of the first section ramp and the second section ramp of the coating track of the present application is the high point of the coating track. After such a design, when the carrier moves back and forth on the first section ramp and the second section ramp, the side of the device changes from vertical to a certain angle with the vertical, and the probability of accepting coating atoms deposited from top to bottom increases, which can effectively reduce the difference in coating thickness between the side and front of the device during coating.

[0014] In the present application, the high end of the first ramp section and the high end of the second ramp section may be in direct contact or not in contact. For example, when the coating track includes multiple rollers, the high end of the first ramp section and the high end of the second ramp section may not be in contact.

[0015] In actual application, the coated track of the present application can be any of various existing tracks.

[0016] In one embodiment of the present invention, the first ramp section and the second ramp section are both inclined and have the same inclination angle relative to the horizontal plane; an angle a between the first ramp section and the second ramp section is greater than or equal to 120° and less than 180°.

[0017] In the traditional coating process, two side walls of the device to be coated are parallel to the moving direction of the carrier, resulting in the coating thickness of the two sides of the device in the moving direction being greater than the coating thickness of the two sides parallel to the moving direction of the carrier, and the consistency of the coating thickness of the four sides is poor. Similarly, in order to ensure the shielding effectiveness of the device surface and ensure that the thinnest coating thickness of the side meets the standard, more time and coating materials are required, resulting in low coating efficiency and material waste. In one embodiment of the present invention, the angle b between the placement direction of the device to be coated and the moving direction of the carrier is greater than or equal to 30° and less than or equal to 60°.

[0018] The present application controls the placement direction of the device to be coated so that there is a certain angle between the device to be coated and the movement direction of the carrier. The four sides of the carrier can receive coating atoms with basically the same probability during the reciprocating motion of the carrier, effectively reducing the difference in coating thickness on the four sides of the device.

[0019] In one embodiment of the present invention, the tray includes a base and a rotatable part rotatably disposed on the base, the carrier is used to be installed on the rotatable part, the rotatable part has a plurality of working positions, and at different working positions, the rotation angle of the rotatable part relative to the base is different.

[0020] The tray is arranged in this way, so that the device to be coated can be arranged on the carrier in the same way as the traditional coating method, without making any changes. When the carrier is installed on the rotatable part, by adjusting the position of the rotatable part, it can also be quickly achieved that the placement direction of the device to be coated and the movement direction of the carrier have a certain angle b. Preferably, b is greater than or equal to 30° and less than or equal to 60°.

[0021] Since different devices have different length-to-width ratios and correspondingly different placement directions, multiple workstations can be suitable for different devices.

[0022] In one embodiment of the present invention, the device to be coated is fixed on the carrier via a double-sided adhesive layer, one surface of the double-sided adhesive layer is bonded to the carrier, and the other surface of the double-sided adhesive layer is bonded to the back side of the device to be coated.

[0023] In actual use, the double-sided adhesive layer needs to have high temperature resistance, and the base material of the double-sided adhesive layer can be PI or foam and other materials.

[0024] The present application also discloses a coating track, comprising a first section ramp and a second section ramp that are butted against each other, the first section ramp and the second section ramp both having a high end and a low end, the high end of the first section ramp and the high end of the second section ramp being butted against each other, and the butt joint between the first section ramp and the second section ramp of the coating track is used to be arranged directly below a coating source of a physical vapor deposition device.

[0025] In one embodiment of the present invention, the first ramp section and the second ramp section are both inclined and have the same inclination angle relative to the horizontal plane; an angle b between the first ramp section and the second ramp section is greater than or equal to 120° and less than 180°.

[0026] The present application also discloses a device coating mechanism, comprising:

[0027] Coating source;

[0028] A coating track, wherein the coating track comprises a first ramp section and a second ramp section that are butted against each other, the first ramp section and the second ramp section both have a high end and a low end, the high end of the first ramp section and the high end of the second ramp section are butted against each other, and the butt joint of the first ramp section and the second ramp section of the coating track is located directly below the coating source;

[0029] A tray, the tray cooperates with the coating track and can reciprocate on the coating track;

[0030] A carrier, wherein the carrier is mounted on the tray and is used to carry the device to be coated.

[0031] In one embodiment of the present invention, the first ramp section and the second ramp section are both inclined and have the same inclination angle relative to the horizontal plane; the angle between the first ramp section and the second ramp section is greater than or equal to 120° and less than 180°.

[0032] In one embodiment of the present invention, the carrier has a double-sided adhesive layer, one surface of the double-sided adhesive layer is bonded to the carrier, and the other surface is used to bond to the back side of the device to be coated.

[0033] The beneficial effect of the present invention is that the junction of the first section ramp and the second section ramp of the coating track of the present application is the high point of the coating track. After such a design, when the carrier moves back and forth on the first section ramp and the second section ramp, the side of the device changes from vertical to a certain angle with the vertical, and the probability of accepting coating atoms deposited from top to bottom increases, and the difference in coating thickness between the side and front of the device can be effectively reduced during coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a top view of the device to be coated placed on the carrier in the traditional coating process;

[0035] Figure 2 This is a side view of the tray movement in the traditional coating process;

[0036] Figure 3 is a top view of the device to be coated in Example 1 attached to the carrier;

[0037] Figure 4 is a side view of the tray movement of embodiment 1;

[0038] Figure 5 It is a schematic diagram of the tray of Example 2.

[0039] The reference numerals in the figures are:

[0040] 1. Carrier; 2. Device to be coated; 3. Coating track; 31. First ramp; 32. Second ramp; 33. High end; 34. Low end; 4. Double-sided adhesive layer; 5. Tray; 51. Base; 52. Rotatable part; 6. Coating source; 61. Coating atoms. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0042] In the description of this application, it should be noted that the terms "inside", "outside", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the application is usually placed when in use, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0043] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0044] The present invention is described in detail below in conjunction with the accompanying drawings.

[0045] Example 1

[0046] like Figure 3 and 4 As shown, this embodiment discloses a device coating method, comprising:

[0047] Providing a carrier 1, and placing a device 2 to be coated on the carrier 1;

[0048] A coating track 3 and a tray 5 are provided. The coating track 3 has a first ramp section 31 and a second ramp section 32 that are butted against each other. The first ramp section 31 and the second ramp section 32 both have a high end 33 and a low end 34. The high end 33 of the first ramp section 31 and the high end 33 of the second ramp section 32 are butted against each other. The tray 5 cooperates with the coating track 3 and can reciprocate on the coating track 3.

[0049] The carrier 1 with the device 2 to be coated is mounted on the tray 5, and the coating is performed by physical vapor deposition. The joint between the first ramp 31 and the second ramp 32 of the coating track 3 is located below the coating source 6. During coating, the tray 5 drives the carrier 1 to move back and forth to form a coating layer on the front and side of the device 2 to be coated.

[0050] The joint between the first section ramp 31 and the second section ramp 32 of the coating track 3 of the present application is the high point of the coating track 3. After such a design, when the carrier 1 moves back and forth on the first section ramp 31 and the second section ramp 32, the side of the device changes from vertical to a certain angle with the vertical, and the probability of receiving the coating atoms 61 deposited from top to bottom increases, which can effectively reduce the difference in coating thickness between the side and front of the device during coating.

[0051] In the present application, the high end 33 of the first ramp section 31 and the high end 33 of the second ramp section 32 may be in direct contact or non-contact. For example, when the coating track 3 includes multiple rollers, the high end 33 of the first ramp section 31 and the high end 33 of the second ramp section 32 may not be in contact.

[0052] In actual use, the coating track 3 of the present application can be a variety of existing tracks.

[0053] In actual use, after the coating is completed, a feeder can be used to separate the coated components from the tape, and the removed components can be placed in the receiving tray in turn.

[0054] like Figure 4 As shown, in this embodiment, the first ramp section 31 and the second ramp section 32 are both inclined and have the same inclination angle relative to the horizontal plane; the angle a between the first ramp section 31 and the second ramp section 32 is greater than or equal to 120° and less than 180°.

[0055] In actual use, the device 2 to be coated can be processed by various existing manufacturing methods, such as a device structure encapsulated with a chip. Preferably, the cross-section of the device 2 to be coated is basically a rectangular structure, and the device 2 to be coated has a front side, a back side and four side sides.

[0056] In the traditional coating process, two side walls of the device 2 to be coated are parallel to the moving direction of the carrier 1, resulting in a coating thickness on the two sides of the device in the moving direction being greater than that on the two sides parallel to the moving direction of the carrier 1, and poor consistency in coating thickness on the four sides. Similarly, in order to ensure the shielding effectiveness of the device surface, it is necessary to ensure that the thinnest coating thickness on the side meets the standard, which consumes more time and coating materials, resulting in low coating efficiency and material waste. Figure 3 As shown, in this embodiment, the angle b between the placement direction of the device 2 to be coated and the movement direction of the carrier 1 is greater than or equal to 30° and less than or equal to 60°.

[0057] The present application controls the placement direction of the device 2 to be coated so that there is a certain angle between the device 2 to be coated and the movement direction of the carrier 1. The four sides of the carrier 1 can receive coating atoms 61 with basically the same probability during the reciprocating motion of the carrier 1, effectively reducing the difference in coating thickness on the four sides of the device.

[0058] like Figure 4 As shown, in this embodiment, the device to be coated 2 is fixed on the carrier 1 through a double-sided adhesive layer 4, one surface of the double-sided adhesive layer 4 is bonded to the carrier 1, and the other surface is bonded to the back of the device to be coated 2.

[0059] In actual use, the device to be coated 2 can be sucked and placed on the upper surface of the double-sided adhesive layer 4 by a placement machine, and the device to be coated 2 can be pressed by a pressing machine. The pressing machine can bond the back of the device to be coated 2 and the double-sided adhesive layer 4 into a whole with no gap in between, which is convenient for subsequent coating operations and avoids finger penetration on the back of the device.

[0060] In actual use, the double-sided adhesive layer 4 needs to have high temperature resistance, and the base material of the double-sided adhesive layer 4 can be PI or foam.

[0061] like Figure 3 and 4 As shown, this embodiment also discloses a device coating mechanism, including:

[0062] Coating source 6;

[0063] The coating track 3 has a first ramp section 31 and a second ramp section 32 that are butted against each other. The first ramp section 31 and the second ramp section 32 both have a high end 33 and a low end 34. The high end 33 of the first ramp section 31 and the high end 33 of the second ramp section 32 are butted against each other. The butt joint of the first ramp section 31 and the second ramp section 32 of the coating track 3 is located directly below the coating source 6. The first ramp section 31 and the second ramp section 32 are both inclined and have the same inclination angle relative to the horizontal plane. The angle between the first ramp section 31 and the second ramp section 32 is greater than or equal to 120° and less than 180°.

[0064] The tray 5 cooperates with the coating track 3 and can reciprocate on the coating track 3;

[0065] The carrier 1 is installed on the tray 5. The carrier 1 is used to carry the device 2 to be coated. The carrier 1 has a double-sided adhesive layer 4. One surface of the double-sided adhesive layer 4 is bonded to the carrier 1, and the other surface is used to bond to the back of the device 2 to be coated.

[0066] Example 2

[0067] like Figure 5 As shown, the difference between this embodiment and embodiment 1 is that the tray 5 includes a base 51 and a rotatable part 52 rotatably arranged on the base 51, the carrier 1 is used to be installed on the rotatable part 52, the rotatable part 52 has a plurality of working positions, and at different working positions, the rotation angle of the rotatable part 52 relative to the base 51 is different.

[0068] The tray 5 is arranged in this way, so that the device to be coated 2 can be arranged on the carrier 1 in the same way as the traditional coating method, without any changes. When the carrier 1 is installed on the rotatable part 52, by adjusting the position of the rotatable part 52, it is also possible to quickly achieve a certain angle b between the placement direction of the device to be coated 2 and the movement direction of the carrier 1. Preferably, b is greater than or equal to 30° and less than or equal to 60°.

[0069] Since different devices have different length-to-width ratios and correspondingly different placement directions, multiple workstations can be suitable for different devices.

[0070] In actual use, there is a locking structure between the base 51 and the rotatable part 52, and the rotatable part 52 is positioned at the corresponding working position through the locking structure. The locking structure can adopt various existing mechanism forms, such as locking bolts, elastic bayonet pins and other structures.

[0071] In actual use, the tray 5 may also include a driving component (such as a motor component), which is used to drive the rotatable part 52 to rotate, so that the placement direction of the device to be coated 2 on the carrier 1 changes, that is, the working position is switched by the driving component.

[0072] The above description is only a preferred embodiment of the present invention, and does not limit the patent protection scope of the present invention. Any equivalent structural transformation made by using the contents of the present invention and the drawings, directly or indirectly used in other related technical fields, is also included in the protection scope of the present invention.

Claims

1. A device coating method, characterized in that: include: Providing a carrier, and placing the device to be coated on the carrier; A coating track and a tray are provided, wherein the coating track has a first ramp section and a second ramp section that are butted against each other, the first ramp section and the second ramp section both have a high end and a low end, the high end of the first ramp section is butted against the high end of the second ramp section, and the tray cooperates with the coating track and can reciprocate on the coating track; The carrier with the device to be coated is mounted on the tray, and the coating is performed by physical vapor deposition. The joint between the first ramp and the second ramp of the coating track is located below the coating source. During coating, the tray drives the carrier to move back and forth to form a coating layer on the front and side of the device to be coated. The placement direction of the device to be coated forms an angle b with the movement direction of the carrier, and the angle b is greater than or equal to 30° and less than or equal to 60°.

2. The device coating method according to claim 1, characterized in that: The first ramp section and the second ramp section are both inclined, and have the same inclination angle relative to the horizontal plane.

3. The device coating method according to claim 2, characterized in that: The angle a formed by the first ramp section and the second ramp section is greater than or equal to 120° and less than 180°.

4. The device coating method according to claim 1, characterized in that: The tray includes a base and a rotatable part rotatably arranged on the base. The carrier is used to be installed on the rotatable part. The rotatable part has a plurality of working positions. At different working positions, the rotation angle of the rotatable part relative to the base is different.

5. The device coating method according to claim 1, characterized in that: The device to be coated is fixed on the carrier through a double-sided adhesive layer, one surface of the double-sided adhesive layer is bonded to the carrier, and the other surface is bonded to the back side of the device to be coated.

6. A coated track, characterized in that: The coating track has a first ramp section and a second ramp section that are butted against each other, each of the first ramp section and the second ramp section has a high end and a low end, the high end of the first ramp section and the high end of the second ramp section are butted against each other, and the butt joint between the first ramp section and the second ramp section of the coating track is used to be set directly below the coating source of the physical vapor deposition equipment.

7. The coated track according to claim 6, characterized in that: The first ramp section and the second ramp section are both inclined, and have the same inclination angle relative to the horizontal plane.

8. The coating track according to claim 7, characterized in that: The angle between the first ramp section and the second ramp section is greater than or equal to 120° and less than 180°.

9. A device coating mechanism, characterized in that: include: Coating source; A coating track, wherein the coating track comprises a first ramp section and a second ramp section that are butted against each other, the first ramp section and the second ramp section both have a high end and a low end, the high end of the first ramp section and the high end of the second ramp section are butted against each other, and the butt joint of the first ramp section and the second ramp section of the coating track is located directly below the coating source; A tray, the tray cooperates with the coating track and can reciprocate on the coating track; A carrier, wherein the carrier is mounted on the tray and is used to carry the device to be coated.

10. The device coating mechanism according to claim 9, characterized in that: The first ramp section and the second ramp section are both inclined, and have the same inclination angle relative to the horizontal plane.

11. The device coating mechanism according to claim 10, characterized in that: The angle between the first ramp section and the second ramp section is greater than or equal to 120° and less than 180°.

12. The device coating mechanism according to claim 9, characterized in that: The carrier is provided with a double-sided adhesive layer, one surface of the double-sided adhesive layer is bonded to the carrier, and the other surface is used to bond to the back side of the device to be coated.

13. The device coating mechanism according to claim 9, characterized in that: The tray includes a base and a rotatable part rotatably arranged on the base. The carrier is used to be installed on the rotatable part. The rotatable part has a plurality of working positions. At different working positions, the rotation angle of the rotatable part relative to the base is different.

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