A spray device and a spray method

Abstract

The embodiment of the present application discloses a spraying device and a spraying method. The spraying device comprises: a storage bin for containing a spraying material; an exhaust compression unit for exhausting gas in the storage bin and compressing the volume of the storage bin so that the spraying material stored in the storage bin enters a feeding unit; and the feeding unit for feeding the spraying material to a use end.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and to, but is not limited to, a spraying apparatus and a spraying method. Background Technology

[0002] In the field of semiconductor integrated circuits, photolithography has always been considered the most critical step in integrated circuit manufacturing. It needs to be used multiple times throughout the process, and its stability and reliability have a significant impact on product quality, yield, and cost. Photolithography is a complex process. Essentially, it copies the circuit structure in the form of a pattern onto the wafer that will be etched and ion implanted later. First, a photoresist thin layer is formed on the wafer using a photoresist coating system. Then, parallel light is irradiated onto the photoresist thin layer through a mask to expose it and cause it to deteriorate. Finally, a developer is used to develop the photoresist to complete the pattern transfer.

[0003] For related technologies, please refer to Figure 1 Generally, gas 11 (such as nitrogen N2) is pumped into the photoresist bottle 10, and the photoresist 12 inside the photoresist bottle is squeezed to spray the photoresist onto the wafer. However, sometimes nitrogen gas dissolves into the photoresist, causing bubble 13. These bubbles will lead to poor coating quality and thus cause damage to the photoresist pattern. Summary of the Invention

[0004] In view of the above problems, this application provides a spraying device and a spraying method.

[0005] In a first aspect, embodiments of this application provide a spraying apparatus, comprising:

[0006] Storage bins are used to hold spray coating materials;

[0007] An exhaust compression unit is used to exhaust the gas in the storage bin and compress the volume of the storage bin so that the spraying material stored in the storage bin enters the conveying unit.

[0008] The material conveying unit is used to convey the spraying material to the end of use.

[0009] Secondly, an embodiment of this application provides a spraying method, the method comprising:

[0010] The gas in the storage hopper of the spraying device is discharged through the exhaust compression unit in the spraying device;

[0011] After the gas in the storage silo is vented, the volume of the storage silo is compressed by the exhaust compression unit so that the spraying material stored in the storage silo enters the conveying unit.

[0012] The coating material is transported to the application end via the material conveying unit.

[0013] The spraying apparatus and spraying method provided in this application include: a storage bin for holding spraying material; an exhaust compression unit for discharging gas from the storage bin and compressing the volume of the storage bin to allow the spraying material stored in the storage bin to enter a conveying unit; and a conveying unit for conveying the spraying material to the end of use. In this way, the traditional spraying apparatus that uses pumped gas to change the gas pressure in the storage bin can be changed, avoiding the generation of bubbles by gas dissolving into the spraying material and improving the quality of the coating film. Attached Figure Description

[0014] Figure 1 For spraying devices in related technologies;

[0015] Figure 2A This is a spraying device according to an embodiment of the present application;

[0016] Figure 2B This is a spraying method in one embodiment of this application;

[0017] Figures 3 to 12 This is a spraying device according to an embodiment of this application. Detailed Implementation

[0018] Based on the problems existing in related technologies, this application provides a spraying device that uses an exhaust compression unit to discharge gas from the storage silo and compress the volume of the storage silo to allow the spraying material stored in the storage silo to enter the conveying unit. Instead of pumping gas into the storage silo to compress the spraying material, the device avoids the gas dissolving into the spraying material, thereby preventing the generation of bubbles, improving the quality of the coating film, and thus improving the quality of the product.

[0019] To make the objectives, technical features, and advantages of the embodiments of this application more apparent and understandable, the specific implementation methods of this application will be further described in detail below with reference to the accompanying drawings. The described embodiments are merely a part of the possible implementation methods of this application, and not all of them, and should not be construed as limited to the implementation methods set forth herein; rather, these implementation methods are provided so that this application will be comprehensive and complete, and fully convey the concept of exemplary implementation methods to those skilled in the art. In detailing the embodiments of this application, for ease of explanation, the schematic diagrams are merely examples and should not limit the scope of protection of the embodiments of this application; in actual manufacturing, the three-dimensional spatial dimensions of length, width, and depth should be included. The same reference numerals in the figures denote the same or similar structures, and therefore their detailed descriptions will be omitted.

[0020] This application provides a spraying device; please refer to the following embodiments. Figure 2A A spraying apparatus, comprising:

[0021] Storage bin 21, used to hold spray coating material 211;

[0022] The exhaust compression unit 22 is used to exhaust the gas in the storage bin 21 and compress the volume of the storage bin 21 so that the spraying material 211 stored in the storage bin 21 enters the conveying unit 23;

[0023] The material conveying unit 23 is used to convey the spraying material 211 to the end of use.

[0024] In this embodiment, the exhaust compression unit can be any device capable of compressing the volume of the storage bin, discharging the gas in the storage bin, and enabling the spraying material in the storage bin to enter the conveying unit.

[0025] In some embodiments, the storage hopper may be made of stainless steel or other materials that do not react with the spraying material; a light-shielding layer may also be provided on the outside of the storage hopper to protect the spraying material. The light-shielding layer may be made of a light-shielding material such as black polyethylene / aluminum-coated paper composite material.

[0026] In practical applications, the gas in the storage hopper includes: air bubbles dissolved in the spraying material and gas above the spraying material. Generally, the gas in the storage hopper is air, which mainly consists of nitrogen and oxygen; the gas in the storage hopper can also be an inert gas such as helium.

[0027] In this embodiment, the volume of the storage hopper is reduced by using an exhaust compression unit, thereby allowing the coating material stored in the storage hopper to enter the conveying unit for spraying. This avoids the problem of air bubbles caused during the spraying process in traditional technology, which involves pumping gas into the photoresist bottle to compress the photoresist inside the bottle. This improves the coating quality and thus the product quality.

[0028] based on Figure 2A In addition to the provided apparatus, this application also provides a spraying method, please refer to... Figure 2B The method includes the following steps:

[0029] Step 201: Discharge the gas in the storage bin of the spraying device through the exhaust compression unit in the spraying device.

[0030] Step 202: Compress the volume of the storage bin through the exhaust compression unit so that the spraying material stored in the storage bin enters the conveying unit.

[0031] Step 202 is performed only after the gas in the storage silo has been purged.

[0032] Step 203: The coating material is conveyed to the user end through the material conveying unit.

[0033] This application provides another spraying device, please refer to... Figure 3 A spraying device includes a material storage bin 21, an exhaust compression unit, and a material conveying unit 23, wherein...

[0034] The storage bin 21 is used to hold the spraying material 211;

[0035] The material conveying unit 23 is used to convey the spraying material 211 to the end of use;

[0036] The exhaust compression unit includes an exhaust component 221, a lifting component 222, a first control valve 223, and a second control valve 224. The lifting component 222 is used to compress the volume of the storage bin 21 and discharge the gas in the storage bin 21 through the exhaust component 221 when the first control valve 223 is closed and the second control valve 224 is open.

[0037] The lifting component 222 is also used to compress the volume of the storage bin 21 after the gas in the storage bin 21 is purged, with the first control valve 223 open and the second control valve 224 closed, so that the spraying material 211 enters the conveying unit 23.

[0038] In some embodiments, the venting component can be located at the top of the storage hopper or on the side wall of the storage hopper. The venting component, located at the top of the storage hopper, can completely expel the gas from the storage hopper and prevents the sprayed material from overflowing.

[0039] In some embodiments, the lifting component can be any component that compresses the volume of the storage hopper. For example, the lifting component can be located at the bottom or top of the storage hopper. The lifting component can be a movable piston, which is moved by applying an external force to compress the volume of the storage hopper. The movable piston is in close contact with the side wall of the storage hopper, providing good sealing.

[0040] In some embodiments, the movable piston can serve as the top or bottom of the storage hopper, and the storage hopper in the spraying device may not need to be additionally equipped with a top or bottom.

[0041] In some embodiments, the movable piston can be positioned below the bottom or above the top of the storage hopper. Moving the piston causes the bottom of the storage hopper to move upward or the top to move downward, thereby compressing the volume of the storage hopper. The lifting component can also be implemented using a screw jack, a gear-operated hand-cranked jack, a turbine jack, etc. In the latter, the gear-operated hand-cranked jack uses a gear transmission structure to force the bottom of the storage hopper connected to the gear transmission structure to move upward, or to force the top of the storage hopper connected to the gear transmission structure to move downward. In other embodiments, the lifting component can also be used in combination with the movable piston, with the lifting component driving the piston.

[0042] In some embodiments, after all the spraying material in the storage bin is delivered to the conveying unit, the lifting component can be restored to its initial position by external force, that is, the initial volume of the storage bin is restored, so that the spraying device can be reused.

[0043] based on Figure 3 The provided apparatus, in this application embodiment, also provides a spraying method, the method comprising the following steps:

[0044] Step 301: Close the first control valve 223 and open the second control valve 224.

[0045] Step 302: The volume of the storage bin 21 is compressed by the lifting component 222 and the gas in the storage bin 21 is discharged by the exhaust component 221.

[0046] Step 303: Open the first control valve 223 and close the second control valve 224.

[0047] Step 304: The volume of the storage bin 21 is compressed by the lifting component 222, so that the spraying material 211 enters the conveying unit 23.

[0048] Step 305: The spraying material 211 is conveyed to the end of use through the material conveying unit 23.

[0049] Step 303 is performed after the gas in the storage silo has been purged.

[0050] In some embodiments, please refer to Figure 4 The exhaust compression unit further includes a centrifugal component 225; the centrifugal component 225 is disposed in the storage bin 21 and is used to separate the air bubbles in the spraying material 104 and the spraying material 211.

[0051] In practical applications, centrifugal components can be implemented using centrifugal discs, centrifugal rods, etc.

[0052] In some embodiments, when the lifting component is located at the top, the centrifugal component can also be located at the top. When the lifting component compresses downwards at the top of the storage hopper, the centrifugal component cannot contact the spraying material for a certain period of time. Therefore, the centrifugal component can be telescopic, allowing it to extend and fully contact the spraying material, efficiently centrifuging out air bubbles from the spraying material. When there is little spraying material remaining in the storage hopper, the centrifugal component can be compressed to discharge as much spraying material as possible, improving the utilization rate of the spraying material. After all the spraying material in the storage hopper has been conveyed to the conveying unit, if it is necessary to clean the storage hopper, the centrifugal component and the lifting component's continuous up-and-down reciprocating motion can be used to clean the storage hopper.

[0053] In some embodiments, regardless of whether the lifting component is located at the bottom or top of the storage hopper, the centrifugal component 225 can be located at the bottom of the storage hopper. This allows the centrifugal component 225 to fully contact the sprayed material, thereby more efficiently centrifuging out air bubbles from the sprayed material. Since the centrifugal component itself has a certain height (thickness), it may be possible for the sprayed material in the storage hopper to not be completely discharged. Here, the centrifugal component can be retractable. The amount of sprayed material remaining is related to the compressibility of the centrifugal component. The greater the compressibility of the centrifugal component, the less sprayed material remains; the smaller the compressibility of the centrifugal component, the more sprayed material remains.

[0054] In this embodiment, the centrifugal component uses centrifugal force to make the lighter air bubbles run to the surface of the spraying material, thereby compressing the storage bin volume through the lifting component, completely expelling the gas in the storage bin, avoiding the air bubbles from mixing with the spraying material, reducing defects such as pinholes, craters, and fisheyes in the coating film, improving the coating quality, and thus improving the quality of the product.

[0055] based on Figure 4 In some embodiments, the provided apparatus further includes the following step prior to step 302: separating air bubbles in the spray material and the spray material by means of a centrifugal component.

[0056] In practical applications, the step of separating air bubbles from the spraying material using a centrifugal component can be performed before step 302. This allows air bubbles dissolved in the spraying material to be separated before compressing the storage hopper, facilitating the removal of gas from the storage hopper. Alternatively, the steps of separating air bubbles from the spraying material and step 302 can be repeated multiple times. For example, the storage hopper can be compressed by a lifting component until its volume is reduced to half, at which point the centrifugal component separates the air bubbles from the spraying material. Then, the storage hopper can be further compressed until its volume is reduced to one-quarter, at which point the centrifugal component separates the air bubbles from the spraying material again. By continuously repeating these two steps, the gas in the storage hopper can be more effectively removed, resulting in air bubbles-free spraying material, improving the quality of the subsequent coating, and thus improving the overall product quality.

[0057] In some embodiments, please refer to Figure 5 The device further includes: a first drive unit 24 for driving the lifting component 222 to compress the volume of the storage bin 21; and a control unit (not shown in the figure) for controlling the first drive unit 24 to drive the lifting component 222 to work.

[0058] Here, the lifting component can be understood as being able to compress the storage bin volume manually, or by controlling the first drive unit via a control unit to compress the storage bin volume. The first drive unit can be a motor or a hydraulic cylinder.

[0059] In this embodiment, the use of a first drive unit and a control unit can help control the spraying material to enter the conveying unit at a constant speed when the lifting component compresses the storage bin volume, thereby improving the uniformity of the coating film.

[0060] based on Figure 5 In some embodiments, step 302 is achieved by the following steps: the control unit controls the first drive unit 24 to drive the lifting component 222 to compress the volume of the storage bin 21 and discharge the gas in the storage bin 21; step 304 is achieved by the following steps: the control unit controls the first drive unit 24 to drive the lifting component 222 to compress the volume of the storage bin 21 so that the spraying material 211 enters the conveying unit 23.

[0061] In some embodiments, please refer to Figure 6The storage bin 21 includes a cover 212, a cylinder 213 and a bottom 214, at least one of the cover 212 or the bottom 214 being movably connected to the cylinder 213; the lifting component 222 is disposed on the cover 212 or the bottom 214 being movably connected to the cylinder 213.

[0062] In this embodiment, the purpose of movably connecting at least one of the cylinder cover 212 or the cylinder bottom 214 to the cylinder body 213 is to enable the lifting component to compress the volume of the storage bin.

[0063] This application provides another spraying device, please refer to... Figure 7 The device includes: a storage hopper 21, an exhaust compression unit, a conveying unit 23, a first drive unit 24, a second drive unit 25, a third drive unit 26, and a control unit, wherein:

[0064] The storage bin 21 is used to hold the spraying material 211;

[0065] The exhaust compression unit includes an exhaust component 221, a lifting component 222, a first control valve 223, and a second control valve 224; the lifting component 222 is used to compress the volume of the storage bin 21 and discharge the gas in the storage bin 21 through the exhaust component 221 when the first control valve 223 is closed and the second control valve 224 is open.

[0066] The lifting component 222 is also used to compress the volume of the storage bin 21 after the gas in the storage bin 21 is purged, with the first control valve 223 open and the second control valve 224 closed, so that the spraying material 211 enters the conveying unit 23.

[0067] The material conveying unit 23 is used to convey the spraying material 211 to the end of use;

[0068] The first drive unit 24 is used to drive the lifting component 222 to compress the volume of the storage bin 21;

[0069] The second drive unit 25 is used to drive the opening or closing of the first control valve 223 and the second control valve 224;

[0070] The third drive unit 26 is used to drive the centrifugal component 225 to work;

[0071] The control unit is used to control the second drive unit 25 to drive the first control valve 223 to close and the second control valve 224 to open, and then control the first drive unit 24 to drive the lifting component 222 to compress the volume of the storage bin 21 and control the third drive unit 26 to drive the centrifugal component 225 to work.

[0072] The control unit is also used to control the second drive unit 25 to drive the first control valve 223 to open and the second control valve 224 to close after the gas in the storage bin 21 is purged.

[0073] This can be understood to mean that, in practical applications, the spraying device may include the following:

[0074] Case 1: Only the first drive unit is included, excluding the second and third drive units;

[0075] Case 2: Only the second drive unit is included, excluding the first and third drive units;

[0076] Case 3: Only the third drive unit is included, excluding the first and second drive units;

[0077] Case 4: Includes the first and second drive units, but excludes the third drive unit;

[0078] Case 5: Includes the first drive unit and the third drive unit, but excludes the second drive unit;

[0079] Case 6: Includes the second and third drive units, but excludes the first drive unit;

[0080] Case 7: Includes a first drive unit, a second drive unit, and a third drive unit.

[0081] In some embodiments, the spraying material is photoresist, and the spraying material may also be other liquids such as paint or water-based coatings.

[0082] based on Figure 7 The provided apparatus, in this application embodiment, also provides a spraying method, the method comprising the following steps:

[0083] Step 701: Control the second drive unit 25 through the control unit to drive the first control valve 223 to close and the second control valve 224 to open.

[0084] Step 702: Control the third drive unit 26 to drive the centrifugal component 225 to work through the control unit.

[0085] Step 703: Control the first drive unit 24 through the control unit to drive the lifting component 222 to compress the volume of the storage bin 21 and discharge the gas in the storage bin 21.

[0086] Step 704: Control the second drive unit 25 through the control unit to drive the first control valve 223 to open and the second control valve 224 to close.

[0087] Step 705: Control the first drive unit 24 through the control unit to drive the lifting component 222 to compress the volume of the storage bin 21 so that the spraying material 211 enters the conveying unit 23.

[0088] Step 706: The spraying material 211 is conveyed to the end of use through the material conveying unit 23.

[0089] Step 704 is performed after the gas in the storage silo has been purged.

[0090] In some embodiments, steps 702 and 703 can be performed alternately to completely expel the gas from the storage silo.

[0091] When the lifting component 222 compresses the volume of the storage bin 21 to discharge gas, although the pressure in the storage bin 21 is consistent with the atmospheric pressure, a small amount of gas above the storage bin may still dissolve into the spraying material 211. If the gas in the storage bin 21 is extracted, the gas can be prevented from dissolving into the spraying material 211.

[0092] Based on this, this application embodiment further provides a spraying device, see reference. Figure 8 The device includes: a storage bin 21, an exhaust compression unit, and a conveying unit 23, wherein:

[0093] The storage bin 21 is used to hold the spraying material 211;

[0094] The exhaust compression unit includes a lifting component 222, a first control valve 223, and a vacuum component 226;

[0095] The vacuuming component 226 is used to extract gas from the storage bin 21 when the first control valve 223 is closed.

[0096] The lifting component 222 is also used to compress the volume of the storage bin 21 after the gas in the storage bin 21 is purged, so that the spraying material 211 enters the conveying unit 23 when the first control valve 223 is open.

[0097] The material conveying unit 23 is used to convey the spraying material 211 to the end of use.

[0098] In some embodiments, the vacuum pumping component may be implemented using a water jet pump, a steam jet pump, a reciprocating pump, or a centrifugal vacuum pump (water ring vacuum pump, rotary vane vacuum pump, etc.).

[0099] In this embodiment, the vacuuming component extracts the gas from the storage bin, reducing the external pressure and causing the bubbles to expand, thus rupturing and eliminating the bubbles. This reduces defects such as pinholes, craters, and fisheyes in the coating, improving the coating quality and consequently the product quality.

[0100] based on Figure 8 The provided apparatus, in this application embodiment, also provides a spraying method, the method comprising the following steps:

[0101] Step 801: Close the first control valve 223 in the exhaust compression unit.

[0102] Step 802: Extract the gas from the storage bin 21 through the vacuum component 226 in the exhaust compression unit.

[0103] Step 803: Close the vacuum component 226 and open the first control valve 223.

[0104] Step 804: The volume of the storage bin 21 is compressed by the lifting component 22 in the exhaust compression unit, so that the spraying material 211 enters the conveying unit 23.

[0105] Step 805: The spraying material 211 is conveyed to the end of use through the material conveying unit 23.

[0106] Step 803 is performed after the gas in the storage silo has been purged.

[0107] This application also provides a spraying device; please refer to... Figure 9 The device includes: a storage hopper 21, an exhaust compression unit, a conveying unit 23, a first drive unit 24, and a control unit (not shown), wherein:

[0108] The storage bin 21 is used to hold the spraying material 211;

[0109] The exhaust compression unit includes a vacuum pumping component 226, a lifting component 222, and a first control valve 223;

[0110] The vacuuming component 226 is used to extract gas from the storage bin 21 when the first control valve 223 is closed.

[0111] The lifting component 222 is also used to compress the volume of the storage bin 21 after the gas in the storage bin 21 is purged, so that the spraying material 211 enters the conveying unit 23 when the first control valve 223 is open.

[0112] The material conveying unit 23 is used to convey the spraying material 211 to the end of use;

[0113] The first drive unit 24 is used to drive the lifting component 222 to compress the volume of the storage bin 21;

[0114] The control unit is used to control the vacuuming component 226 to work or stop working;

[0115] The control unit is also used to control the first drive unit 24 to drive the lifting component 222 to work.

[0116] The first drive unit is the same as that in some of the aforementioned embodiments. The vacuum pumping component 226 is controlled by the control unit, which allows for easy adjustment of the vacuum pumping rate as needed.

[0117] In some embodiments, please refer to Figure 9 The device further includes:

[0118] The second drive unit 25 is used to drive the opening and closing of the first control valve 223;

[0119] A control unit (not shown) is used to control the second drive unit to drive the first control valve 223 to close before the vacuuming component 226 operates;

[0120] The control unit is also used to control the second drive unit 25 to drive the first control valve 223 to open and control the first drive unit 24 to drive the lifting component 222 to compress the volume of the storage silo 21 after the gas in the storage silo 21 is purged.

[0121] based on Figure 9 The provided spraying apparatus, wherein steps 801 to 804 above can be implemented by the following steps 901 to 904: Step 901: The control unit controls the second drive unit 25 to close the first control valve 223. Step 902: The control unit controls the vacuum component 226 to extract the gas from the storage bin 21. Step 903: The control unit controls the vacuum component 226 to stop working and opens the first control valve 223. Step 904: The control unit controls the first drive unit 24 to drive the lifting component 222 to compress the volume of the storage bin, so that the spraying material 211 stored in the storage bin 21 enters the input unit.

[0122] In some embodiments, please refer to Figure 10 The exhaust compression unit further includes a centrifugal component 225; the centrifugal component 225 is disposed in the storage bin 21 and is used to separate air bubbles in the spraying material 211 and the spraying material 211.

[0123] In some embodiments, please refer to Figure 10 The device further includes:

[0124] The third drive unit 26 is used to drive the centrifugal component 225 to work;

[0125] The control unit is used to control the third drive unit 26 to drive the centrifugal component 225 to work.

[0126] In practical applications, the third drive unit 26 can be a motor or other device that can drive the centrifugal component to work, shortening the time it takes for bubbles to reach the surface of the sprayed material 211. When a motor is used as the third drive unit, the centrifugal component 225 can be connected to the motor via a rotating shaft. When the lifting component is located at the bottom of the storage hopper, the centrifugal unit located above the bottom of the storage hopper needs to move synchronously as the lifting component pushes the bottom of the storage hopper upward.

[0127] based on Figure 10 The provided apparatus, in this application embodiment, also provides a spraying method, the method comprising the following steps:

[0128] Step 1001: Control the first drive unit 24 to drive the first control valve 223 to close through the control unit.

[0129] Step 1002: Control the third drive unit 26 to drive the centrifugal component 225 to work through the control unit.

[0130] Step 1003: Control the vacuuming component 226 to work through the control unit to extract the gas from the storage bin 21.

[0131] Step 1004: Control the vacuuming component 226 to stop working through the control unit, and control the first control valve 223 to open through the control sheet.

[0132] Step 1005: The control unit controls the first drive unit 24 to drive the lifting component 222 to compress the volume of the storage bin 21 so that the spraying material 211 stored in the storage bin 21 enters the input unit.

[0133] Step 1006: The spraying material 211 is conveyed to the end of use through the material conveying unit 23.

[0134] In this embodiment, the spraying material can be photoresist.

[0135] In some embodiments, please refer to Figure 11 The storage bin 21 includes a cover 212, a cylinder 213 and a bottom 214, at least one of the cover 212 or the bottom 214 being movably connected to the cylinder 213; the lifting component 222 is disposed on the cover 212 or the bottom 214 being movably connected to the cylinder 213.

[0136] The lifting component can be installed on the bottom of the cylinder. The lifting component can push the bottom of the cylinder upward, thereby compressing the volume of the storage bin, discharging the gas in the storage bin, and allowing the spraying material stored in the storage bin to enter the conveying unit.

[0137] In practical applications, the lifting component can also be installed on the cylinder cover, and the exhaust component can be installed on the cylinder cover. The lifting component pushes the cylinder cover downward, thereby compressing the volume of the storage bin, discharging the gas in the storage bin, and allowing the spraying material stored in the storage bin to enter the conveying unit.

[0138] Whether the lifting component is located at the bottom of the cylinder or on the cylinder cover, the cylinder cover or bottom must have good contact with the cylinder body and good sealing performance. Rubber sealing rings or gaskets can be installed at the connection between the cylinder cover or bottom and the cylinder body.

[0139] In some embodiments, please refer to Figure 12 The material conveying unit 23 includes a material conveying pipe 231;

[0140] One end of the conveying pipe 231 is connected to the storage bin 21, and the other end of the conveying pipe 231 is connected to the user end;

[0141] The first control valve 223 is disposed on the conveying pipe 231.

[0142] In some embodiments, please refer to Figure 12 The material conveying unit 23 also includes a buffer chamber 232; the buffer chamber 232 is disposed on the material conveying pipe 231 between the first control valve 223 and the use end, and is used to remove microbubbles in the spraying material and store the spraying material.

[0143] In practical applications, it is optional to include a buffer chamber. Adding a buffer chamber further eliminates microbubbles in the sprayed material, improving the quality of subsequent coatings and thus product quality. Additionally, the buffer chamber can also hold the sprayed material that has already had its bubbles removed, eliminating the need for waiting during subsequent use and improving production efficiency.

[0144] In some embodiments, the spraying material is photoresist, and the spraying material may also be other liquids such as paint or water-based coatings.

[0145] based on Figure 12 In some embodiments of the provided apparatus, step 1006 is achieved through the following steps: the spraying material first passes through the first control valve, then through the buffer chamber, and finally reaches the end of use.

[0146] It should be noted that the limitations or descriptions of similar or identical structures in this embodiment (spraying method) and the foregoing embodiments (spraying device) are not limited in this embodiment. Please refer to the limitations or descriptions in the corresponding parts of the foregoing embodiments for details.

[0147] The above description is merely an exemplary embodiment of this application and is not intended to limit the scope of protection of this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A spraying device, characterized in that, The device includes: Storage bins are used to hold spray coating materials; An exhaust compression unit is used to exhaust the gas in the storage bin and compress the volume of the storage bin so that the spraying material stored in the storage bin enters the conveying unit. The material conveying unit is used to convey the spraying material to the user end. The material conveying unit includes a material conveying pipe disposed on the top of the storage silo. One end of the material conveying pipe is connected to the storage silo, and the other end of the material conveying pipe is connected to the user end. The exhaust compression unit includes: An exhaust pipe is installed at the top of the storage silo; A movable piston is disposed at the bottom of the storage silo, and the movable piston is sealed to the cylinder of the storage silo and serves as the bottom of the storage silo; The first control valve is installed on the conveying pipe; A second control valve is installed on the exhaust pipe; A centrifugal component is mounted on the movable piston and moves within the storage hopper as the movable piston moves. The centrifugal component uses centrifugal force to cause lighter air bubbles to reach the surface of the sprayed material. The movable piston is used to compress the volume of the storage bin and discharge the gas in the storage bin through the exhaust pipe when the first control valve is closed and the second control valve is open. It is also used to compress the volume of the storage silo after the gas in the storage silo is purged, with the first control valve open and the second control valve closed, so that the spraying material enters the conveying unit.

2. The apparatus according to claim 1, characterized in that, The device further includes: The first drive unit is used to drive the movable piston to compress the volume of the storage bin; The control unit is used to control the first drive unit to drive the movable piston to compress the volume of the storage bin.

3. The apparatus according to claim 2, characterized in that, The device further includes: The second drive unit is used to drive the opening or closing of the first control valve and the second control valve; The control unit is used to control the second drive unit to drive the first control valve to close and the second control valve to open, and then control the first drive unit to drive the movable piston to compress the volume of the storage bin. The control unit is further configured to, after the gas in the storage silo has been purged, control the second drive unit to drive the first control valve to open and the second control valve to open.

4. The apparatus according to claim 2, characterized in that, The device further includes: The third drive unit is used to drive the centrifugal component to work; The control unit is used to control the third drive unit to drive the centrifugal component to work.

5. The apparatus according to claim 1, characterized in that, The material conveying unit also includes a buffer bin; The buffer chamber is located on the feed pipe between the first control valve and the user end, and is used to remove microbubbles in the spraying material and store the spraying material.

6. The apparatus according to claim 5, characterized in that, The coating material is photoresist.

7. A spraying device, characterized in that, The device includes: Storage bins are used to hold spray coating materials; An exhaust compression unit is used to exhaust the gas in the storage bin and compress the volume of the storage bin so that the spraying material stored in the storage bin enters the conveying unit. The material conveying unit is used to convey the spraying material to the user end. The material conveying unit includes a material conveying pipe disposed on the top of the storage silo. One end of the material conveying pipe is connected to the storage silo, and the other end of the material conveying pipe is connected to the user end. The exhaust compression unit includes: The first control valve is installed on the material conveying unit; A vacuuming component is located at the top of the storage silo; A movable piston is disposed at the bottom of the storage hopper, the movable piston being sealed to the storage hopper and serving as the bottom of the storage hopper; A centrifugal component is mounted on the movable piston and moves within the storage hopper as the movable piston moves. The centrifugal component uses centrifugal force to cause lighter air bubbles to reach the surface of the sprayed material. The vacuuming component is used to extract gas from the storage bin when the first control valve is closed. The movable piston is used to compress the volume of the storage hopper after the gas in the storage hopper is purged, so that the spraying material enters the conveying unit and the first control valve when the first control valve is open.

8. The apparatus according to claim 7, characterized in that, The device further includes: The first drive unit is used to drive the movable piston to compress the volume of the storage bin; The control unit is used to control the operation or shutdown of the vacuum pumping component; The control unit is also used to control the first drive unit to drive the movable piston to work.

9. The apparatus according to claim 8, characterized in that, The device further includes: The third drive unit is used to drive the centrifugal component to work; The control unit is used to control the third drive unit to drive the centrifugal component to work.

10. The apparatus according to claim 7, characterized in that, The material conveying unit also includes a buffer bin; The buffer chamber is located on the feed pipe between the first control valve and the user end, and is used to remove microbubbles in the spraying material and store the spraying material.

11. A spraying method, characterized in that, The method includes: A spraying apparatus according to any one of claims 1 to 6 is provided, wherein the storage hopper of the spraying apparatus contains spraying paint; Close the first control valve and open the second control valve; The process involves the following steps: compressing the volume of the storage hopper by the movable piston, and separating air bubbles from the spray material by a centrifugal component. After the gas in the storage silo is completely discharged through the exhaust pipe, open the first control valve and close the second control valve. The movable piston continues to compress the volume of the storage bin, causing the spraying material stored in the storage bin to enter the conveying pipe of the conveying unit; The spraying material is delivered to the end of use through the feed pipe of the feed unit.

12. The method according to claim 11, characterized in that, The spraying device further includes a first drive unit and a control unit, and the method further includes: The control unit controls the first drive unit to drive the movable piston to compress the volume of the storage bin.

13. The method according to claim 12, characterized in that, The spraying device further includes a second drive unit and a control unit, wherein closing the first control valve and opening the second control valve includes: The control unit controls the second drive unit to drive the first control valve to close and the second control valve to open. After the gas in the storage silo is purged, opening the first control valve and closing the second control valve includes: The control unit controls the second drive unit to open the first control valve and close the second control valve.

14. A spraying method, characterized in that, The method includes: A spraying apparatus according to any one of claims 7 to 10 is provided, wherein the storage hopper of the spraying apparatus contains spraying paint; Close the first control valve; The air bubbles in the spraying material are separated from the spraying material by the centrifugal component, and the gas in the storage bin is extracted by the vacuum component. After the gas in the storage silo is purged, the vacuum pumping component is turned off and the first control valve is opened; The movable piston compresses the volume of the storage bin, causing the spraying material stored in the storage bin to enter the conveying pipe of the conveying unit. The spraying material is delivered to the end of use through the feed pipe of the feed unit.

15. The method according to claim 14, characterized in that, The spraying device further includes: a first drive unit and a control unit, and the method further includes: The control unit controls the first drive unit to drive the movable piston to compress the volume of the storage bin; The control unit controls the operation or shutdown of the vacuum pumping component.

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