A fixture for solving the problem of liquid medicine marks on products with holes

Abstract

The present invention discloses a fixture for solving the problem of liquid medicine traces on perforated products, belonging to the technical field of spraying mechanisms. It includes a hydraulic cylinder. The hydraulic cylinder has a rotating rod for lifting the perforated product at the bottom. A liquid medicine tank is placed at the bottom of the perforated product. A rotating structure is arranged in the middle of the hydraulic cylinder, and a cleaning structure is arranged on the other side of the hydraulic cylinder. A water storage box with a water pump is arranged at the top of the rotating rod. A small nozzle is arranged on the bottom surface of the top of the lifting rod. A water pipe is connected between the small nozzle and the water pump; a water collecting table with a slit in the middle is arranged at the bottom of the perforated product. The slit faces the bottom of the perforated product. The outside of the water collecting table is fixedly connected with a frame through bolts. One end of the frame close to the hydraulic cylinder is fixedly connected to the outside of the hydraulic cylinder, solving the problem that the existing fixture has chemical residues reacting on it due to too long transfer time, resulting in the inability to eliminate the liquid medicine traces and high defective rate of the perforated products.

Description

Technical Field

[0001] The invention belongs to the technical field of spraying mechanisms, and in particular relates to a fixture for solving the problem of liquid marks on products with holes. Background Art

[0002] The production process for dry etching and chemical vapor deposition equipment components used in semiconductor production is extremely complex. Due to the large size and heavy weight of these components, a crane is essential for their operation. However, existing cranes have limited speed and control, so the chemicals used in the production process can easily leave marks on products with holes, such as upper electrodes. These marks can result in poor appearance during incoming inspections, deformed holes, and other issues, increasing the defective rate of products.

[0003] Therefore, there is an urgent need for a fixture that can shorten the transportation time, clean the products with holes in time, and avoid the increase of the defective rate of the products with holes due to the mark left by the liquid. Summary of the Invention

[0004] In view of this, the purpose of the present invention is to provide a jig for solving the problem of liquid drug marks on products with holes, so as to solve the problem that the existing jig has residual reactions of chemicals on it due to the long transportation time, so that the liquid drug marks cannot be eliminated, resulting in a high defective rate of products with holes.

[0005] In order to achieve the above object, the present invention provides the following technical solutions:

[0006] The present invention discloses a jig for solving the problem of liquid medicine marks on products with holes, comprising a hydraulic cylinder and a base, the bottom of the hydraulic cylinder is rotated and inserted into the base, a rotating rod is sleeved and fixed on the top of the hydraulic cylinder, a protrusion is provided at the end of the rotating rod, a hook with a lifting rod is welded at the bottom of the protrusion, the lifting rod lifts the product with holes, a liquid medicine tank is placed at the bottom of the product with holes, the liquid medicine tank is located on one side of the hydraulic cylinder, a rotating structure for driving the hydraulic cylinder to rotate is provided in the middle of the hydraulic cylinder, a cleaning structure is provided on the other side of the hydraulic cylinder, and the product with holes is placed on the bottom of the product with holes. After the product is pulled out of the medicine tank, it is rotated through the rotating structure to the cleaning structure on the other side of the hydraulic cylinder for cleaning; a water storage box is provided on the top of the rotating rod, and a water pump is provided on the top of the water storage box. A small nozzle is provided on the top bottom surface of the lifting rod, and a water pipe is connected between the small nozzle and the water pump through the top of the lifting rod; a water collecting platform with a slit in the middle is provided at the bottom of the perforated product, and the slit is opposite to the bottom of the perforated product. The outside of the water collecting platform is fixedly connected to a frame by bolts, and the end of the frame close to the hydraulic cylinder is fixedly connected to the outside of the hydraulic cylinder.

[0007] Furthermore, the rotating structure includes bevel gears. The large bevel gear is rotatably sleeved in the middle of the hydraulic cylinder. The small bevel gear is engaged with the large bevel gear. The small bevel gear is connected to a generator, and the generator is connected to a speed increaser. A support is placed at the bottom of the generator and the speed increaser. The speed increaser is rotationally connected through a coupling to a number of blades facing the cleaning structure. Small electric fans are provided on one side of each of the several blades, and the front of the small electric fan is aligned with the end of the blade.

[0008] Furthermore, weights are provided at the ends of several of the blades.

[0009] Furthermore, the rotating rod includes a cross bar and a vertical bar. The cross bar is horizontally welded to the side of the vertical bar and is fixedly welded at a right angle to the vertical bar. The vertical bar is fixedly sleeved on the top of the hydraulic cylinder, and the protrusion is provided at the bottom of the tail end of the cross bar.

[0010] Furthermore, the cleaning structure includes a water table in a concave shape. Groove openings are provided on both sides of the water table. The clamping groove includes a first groove opening and a second groove opening. A rotating hole is provided at the bottom of the first groove opening, and a threaded rod is inserted into the rotating hole. A second motor is provided at the top of the threaded rod for driving the threaded rod to rotate. An annular connecting piece is sleeved on the surface of the threaded rod, and the other end of the annular connecting piece is fixedly connected to a spraying plate. A number of nozzles are provided on the surface of the spraying plate. The cleaning structure further includes a flexible pipe. One end of the flexible pipe passes through the second groove opening and is connected to the back of the spraying plate. A water tank is provided at the bottom of the water table, and suction pumps are provided on both outer sides of the water tank. The other end of the flexible pipe is connected to the suction pump.

[0011] Furthermore, an opening penetrating the bottom of the water table and the top of the water tank is provided at the bottom of the water table, and purification devices are provided on both inner sides of the water tank.

[0012] The beneficial effects of the present invention are as follows:

[0013] (1) In the present invention, the wind force of the electric fan drives the blades to rotate, and then the speed of rotation is increased through the speed increaser to prompt the generator to generate electricity and drive the bevel gear to rotate the hydraulic cylinder to transfer the perforated product at the end of the rotating rod to the cleaning structure, shortening the transfer distance of the perforated product taken out from the liquid medicine tank. At the same time, during the transfer of the perforated product, water flow is also sprayed through the small nozzle at the top of the lifting rod to clean the perforated product, reducing the time for the liquid medicine to stay on the surface of the perforated product during the transfer process, promptly cleaning the perforated product, reducing the situation of poor appearance on the surface of the perforated product, and reducing the defective rate of the perforated product.

[0014] (2) In the present invention, weights are provided on the blades. When the blades are at a high position, they are extremely likely to deflect downward and rotate under the influence of the external wind force. The same is true for several blades, so the blades can keep rotating to supply energy.

[0015] (3) The blade-facing cleaning structure of the present invention forms a large airflow through the high-speed rotation of the blade to blow the water vapor, water mist, and splashed water droplets generated during the cleaning process away from the liquid medicine tank, preventing water droplets, etc. from entering the liquid medicine tank and changing the concentration of the liquid medicine, thereby affecting the quality of the perforated products.

[0016] (4) By providing a purification device in the water tank, the present invention can recycle the water used for cleaning the perforated products, saving resources and time.

[0017] Other advantages, objectives, and features of the present invention will be described in the subsequent specification, and are to some extent obvious to those skilled in the art, or those skilled in the art can obtain teachings from the practice of the present invention. The objectives and other advantages of the present invention can be achieved and obtained through the following specification. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to make the objectives, technical solutions, and beneficial effects of the present invention clearer, the present invention provides the following drawings for illustration:

[0019] Figure 1 It is the overall structure diagram of the embodiment of the present invention;

[0020] Figure 2 It is the side view of the blade structure of the embodiment of the present invention;

[0021] Figure 3 It is the front view of the blade structure of the embodiment of the present invention;

[0022] Figure 4 It is the schematic diagram of the structure on both sides of the water table of the embodiment of the present invention;

[0023] Figure 5 It is the top view of the water spraying structure of the embodiment of the present invention;

[0024] Figure 6 It is the schematic diagram of the threaded rod connection structure of the embodiment of the present invention;

[0025] Figure 7 It is the schematic diagram of the perforated product lifting mechanism of the embodiment of the present invention;

[0026] Figure 8 It is the bottom view of the water table of the embodiment of the present invention;

[0027] Figure 9 It is the connection schematic diagram of the water storage box and the small nozzle of the embodiment of the present invention;

[0028] Figure 10 It is the top view of the water collecting table of the embodiment of the present invention.

[0029] The markings in the accompanying drawings are as follows: hydraulic cylinder 1, base 2, protrusion 3, lifting rod 4, hook 5, perforated product 6, liquid medicine tank 7, large bevel gear 8, small bevel gear 9, generator 10, speed increaser 11, support 12, connecting shaft 13, blade 14, small electric fan 15, weight 16, cross bar 17, vertical bar 18, water platform 19, first slot 20, second slot 21, threaded rod 22, second motor 23, annular connector 24, spray plate 25, nozzle 26, flexible pipe 27, water tank 28, suction pump 29, opening 30, purification device 31, water storage box 32, water pump 33, small nozzle 34, water pipe 35, slit 36, water collection platform 37, frame 38, bolt 39. DETAILED DESCRIPTION

[0030] like Figures 1 to 10 As shown, the present invention is a fixture for solving the problem of liquid medicine marks on products with holes, so as to solve the problem that the existing fixture has residual reaction of chemicals on it due to the long transportation time, so that the liquid medicine marks cannot be eliminated, resulting in a high defective rate of products with holes.

[0031] It includes a hydraulic cylinder 1 and a base 2. The bottom of the hydraulic cylinder 1 is rotated and inserted into the base 2. A rotating rod is fixed on the top of the hydraulic cylinder 1. A protrusion 3 is provided at the end of the rotating rod. A hook 5 with a lifting rod 4 is welded at the bottom of the protrusion 3. The lifting rod 4 lifts a product with holes 6. A liquid medicine tank 7 is placed at the bottom of the product with holes 6. The liquid medicine tank 7 is located on one side of the hydraulic cylinder 1. In the embodiment of the present invention, the lifting rod 4 connected to the rotating rod is moved up and down by the hydraulic cylinder 1 to lift the product with holes 6 out of the liquid medicine tank 7. The lifting rod 4 of this embodiment is in the shape of a Chinese character "冂". The vertical rods on both sides of the lifting rod 4 and the two side edges of the product with holes 6 are fixed by screws. A rotating structure for driving the hydraulic cylinder 1 to rotate is provided in the middle of the hydraulic cylinder 1. The other side of the hydraulic cylinder 1 is provided with Cleaning structure, after the perforated product 6 is pulled out of the liquid medicine tank 7, it is rotated to the cleaning structure on the other side of the hydraulic cylinder 1 through the rotating structure for cleaning; a water storage box 32 is provided on the top of the rotating rod. The water storage box 32 of the embodiment of the present invention is arranged at the end of the cross bar 17 close to the perforated product 6. A water pump 33 is provided on the top of the water storage box 32, and a small nozzle 34 is provided on the top bottom surface of the lifting rod 4. A water pipe 35 is connected between the small nozzle 34 and the water pump 33 through the top of the lifting rod 4; a water collecting platform 37 with a slit 36 in the middle is provided at the bottom of the perforated product 6, and the slit 36 is opposite to the bottom of the perforated product 6. The outer side of the water collecting platform 37 is fixedly connected to a frame 38 by bolts 39, and the end of the frame 38 close to the hydraulic cylinder 1 is fixedly connected to the outer side of the hydraulic cylinder 1;

[0032] The rotating structure includes bevel gears. The large bevel gear 8 is rotatably sleeved in the middle of the hydraulic cylinder 1. The small bevel gear 9 is engaged with the large bevel gear 8. The small bevel gear 9 is connected to a generator 10. The generator 10 is connected to a speed increaser 11. A support 12 is placed at the bottom of the generator 10 and the speed increaser 11. The speed increaser 11 is rotationally connected by a coupling 13 to a number of blades 14 facing the cleaning structure. Small electric fans 15 are provided on one side of each of the number of blades 14. Weights 16 are provided at the ends of each of the number of blades 14. The front of the small electric fan 15 faces the end of the blade 14. The rotating rod includes a cross bar 17 and a vertical bar 18. The cross bar 17 is horizontally welded to the side of the vertical bar 18 and is fixedly welded at a right angle to the vertical bar 18. The vertical bar 18 is fixedly sleeved on the top of the hydraulic cylinder 1. The protrusion 3 is provided at the bottom of the tail end of the cross bar 17.

[0033] After the hydraulic cylinder 1 is started, it moves upward to lift the perforated product 6 out of the liquid medicine tank 7 and pass through the slit 36 of the water collecting table 37 and be located above the water collecting table 37. Then, a cover plate with a suitable size is used to cover the slit 36. After the cover plate is covered, the small electric fan 15 is started to supply wind power to drive the blades 14 to start rotating. Then, the rotation speed is increased through the speed increaser 11 to prompt the generator 10 to generate electricity. The generator 10 generates electricity to drive the bevel gears to rotate the hydraulic cylinder 1 and the rotating rod. During the rotation process, the water pump 33 is started to introduce water flow from the water storage box 32 into the water pipe 35 and flow to the small nozzle 34, and then the water flow is sprayed out by the small nozzle 34 to wash the perforated product 6. When the perforated product 6 connected to the rotating rod is rotated to directly above the cleaning structure, the hydraulic cylinder 1 moves downward to move the perforated product 6 to the exact middle of the water table 19 of the cleaning structure for preparation of cleaning. The whole process is simple and fast. The generator 10 of the present application is set to drive the rotating rod to move in a semi-circular orbit and make the rotating rod stay for a certain period of time at both ends of the semi-circle. The two sides of the water collecting table 37 and the two sides of the frame 38 are fixedly connected by bolts 39. During the rotation process, the bolts 39 are tightened to fix the water collecting table 37 and the frame 38 without deflection. The periphery of the water collecting table 37 of the embodiment of the present invention is higher than the middle part by a certain height to prevent the collected waste water from leaking out of the water collecting table 37. All the waste water sprayed by the small nozzle 34 to wash the perforated product 6 is collected by the water collecting table 37. When the waste water in the water collecting table 37 reaches a certain amount, the bolts 39 are loosened, and the water collecting table 37 is flipped or removed to pour out the waste water. After pouring, it is reinstalled on the frame 38 with bolts 39 again.

[0034] The cleaning structure includes a concave-shaped water platform 19, with slots on both sides of the water platform 19, and the slots include a first slot 20 and a second slot 21. A rotating hole is provided at the bottom of the first slot 20, and a threaded rod 22 is inserted into the rotating hole. A second motor 23 is provided on the top of the threaded rod 22 for driving the threaded rod 22 to rotate. An annular connector 24 is provided on the surface of the threaded rod 22, and the other end of the annular connector 24 is fixedly connected to a spray plate 25. A plurality of nozzles 26 are provided on the surface of the spray plate 25. The cleaning structure also includes a flexible pipe 27, one end of the flexible pipe 27 passes through the second slot 21 and is connected to the back of the spray plate 25. A water tank 28 is provided at the bottom of the water platform 19, and pumps are provided on both sides of the outside of the water tank 28. The suction pump 29 and the other end of the flexible pipe 27 are connected to the suction pump 29. After the perforated product 6 extends into the middle of the cleaning structure, the suction pump 29 draws water from the water tank 28 through the flexible pipe 27 to the spray plate 25, and finally sprays water through the nozzle 26 to clean the perforated product 6. When cleaning, the second motor 23 is turned on to drive the threaded rod 22 to rotate, and the annular connector 24 moves up and down on the threaded rod 22, driving the spray plate 25, the nozzle 26 and the flexible pipe 27 to move up and down, so as to rinse the perforated product 6 from top to bottom, and wash it more thoroughly. Moreover, because the nozzles 26 are provided on both sides of the water table 19, the perforated product 6 does not need to be turned over when cleaning, and the nozzles 26 can clean both sides of the perforated product 6 by moving up and down.

[0035] An opening 30 is provided at the bottom of the water platform 19, which passes through the bottom of the water platform 19 and the top of the water tank 28. Purification devices 31 are provided on both sides of the interior of the water tank 28. The sewage purification device 31 independently selects existing equipment according to the on-site implementation situation. The washed water flows through the opening 30 at the bottom of the water platform 19 and flows back into the water tank 28. After being purified by the purification device 31, the wastewater enters the flexible pipe 27 through the suction pump 29 again to rinse the perforated product 6 again, which can recycle water resources and is environmentally friendly and energy-saving.

[0036] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solutions of the present invention and are not limiting. Although the present invention has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the present invention.

Claims

1. A fixture for solving the problem of liquid marks on products with holes, characterized by: The hydraulic cylinder is connected with the hydraulic cylinder to form a base, and the hydraulic cylinder is connected with the hydraulic cylinder to form a base. The hydraulic cylinder is connected with the hydraulic cylinder to form a base. The hydraulic cylinder is connected with the hydraulic cylinder to form a base. The hydraulic cylinder is connected with the hydraulic cylinder to form a base. The hydraulic cylinder is connected with the hydraulic cylinder to form a base. The hydraulic cylinder is connected with the hydraulic cylinder to form a base. The cleaning structure includes a concave-shaped water platform, with slots on both sides of the water platform, the slots including a first slot and a second slot, a rotating hole at the bottom of the first slot, a threaded rod inserted into the rotating hole, a second motor provided at the top of the threaded rod for driving the threaded rod to rotate, an annular connector provided on the surface of the threaded rod, the other end of the annular connector fixedly connected to a spray plate, a plurality of nozzles provided on the surface of the spray plate, the cleaning structure also includes a flexible pipe, one end of the flexible pipe passes through the second slot and is connected to the back of the spray plate, a water tank is provided at the bottom of the water platform, suction pumps are provided on both sides of the outside of the water tank, and the other end of the flexible pipe is connected to the suction pump.

2. A fixture for solving the problem of liquid marks on products with holes according to claim 1, characterized in that: The rotating structure includes a large bevel gear and a small bevel gear. The large bevel gear is rotatably sleeved in the middle of the hydraulic cylinder. The small bevel gear and the large bevel gear are engaged and connected. The small bevel gear is connected to a generator. The generator is connected to a speed increaser. Supports are placed at the bottom of the generator and the speed increaser. The speed increaser is connected to a number of blades facing the cleaning structure through a connecting shaft. Small electric fans are provided on one side of the blades, and the front of the small electric fans is aligned with the end of the blade.

3. The fixture for solving the problem of liquid marks on products with holes according to claim 2, characterized in that: The ends of the plurality of blades are provided with weights.

4. The fixture for solving the problem of liquid marks on products with holes according to claim 1, characterized in that: The rotating rod includes a horizontal rod and a vertical rod. The horizontal rod is horizontally welded to the side of the vertical rod and fixedly welded to the vertical rod at a right angle. The vertical rod is fixedly sleeved on the top of the hydraulic cylinder, and the protrusion is set at the bottom of the tail end of the horizontal rod.

5. The fixture for solving the problem of liquid marks on products with holes according to claim 1, characterized in that: An opening is provided at the bottom of the water platform and penetrates the bottom of the water platform and the top of the water tank. Purification devices are provided on both sides of the interior of the water tank.

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