Double-axis spacing adjustable plastic cake pick-and-place head device and semiconductor laminator

Abstract

The present application discloses a dual-axis spacing-adjustable glue cake picking and placing head device and a semiconductor plastic packaging machine, comprising a sliding seat, a guide post and a guide sleeve, a spacing adjustment component and a clamping claw group, the guide post is slidingly connected to the sliding seat, the guide sleeve is rotatably connected to the guide post, the guide post and the guide sleeve are used to realize the lifting and rotation of the picking and placing head, the spacing adjustment component comprises an adjustment frame, a scissor rod group and a ball screw, the adjustment frame is rotatably connected to the guide sleeve, the ball screw is rotatably connected to the adjustment frame, the scissor rod group is connected to the nut of the ball screw and can be extended and retracted following the rotation of the screw, the clamping claw group comprises a plurality of pneumatic clamping claws, the pneumatic clamping claws are connected to the scissor rod group, and can realize equidistant adjustment of the distance following the extension and retraction of the scissor rod group, so that the glue cake picking and placing head device can clamp glue cakes on barrels with different spacings and place the glue cakes on lead frames with different placement methods.

Description

Technical Field

[0001] The present application relates to the technical field of packaging equipment, and in particular to a dual-axis spacing adjustable glue cake pick-and-place head device and a semiconductor plastic packaging machine. Background Art

[0002] When producing the chip of an integrated circuit, the chip is first placed on a lead frame with a guide groove. A plastic cake is placed at the outward-facing notch of the guide groove. The plastic cake is then extruded at high temperature. The melted plastic encapsulant can flow along the guide groove into the lead frame to wrap the chip of the integrated circuit. Finally, the plastic encapsulant cools and solidifies and is completely combined with the lead frame to protect the chip.

[0003] As the chip carrier of integrated circuits, the lead frame is a key structural component that uses bonding materials (gold wire, aluminum wire, copper wire) to achieve electrical connection between the internal circuit lead ends of the chip and the external leads to form an electrical circuit. It acts as a bridge connecting to external wires. Lead frames are required in most semiconductor integrated blocks and are an important basic material in the electronic information industry.

[0004] In the prior art, the mold for placing the lead frame and the glue cake is adapted to the operating space set by the laminator, and the size of the mold does not change. The mold includes a carrier plate for placing the lead frame and a barrel for placing the glue cake, such as Figure 1 As shown, the mold can hold 12 lead frames and 30 glue cakes at the same time. First, place the lead frame on the carrier plate, and then place the glue cakes in the barrel. Then, use the pick-and-place head device to clamp 5 glue cakes at the same time and move them longitudinally to place the glue cakes in the guide groove of the lead frame. The glue cakes are pressed at high temperature to melt the glue cakes and flow into the lead frame to complete the plastic sealing of the chip.

[0005] However, when the model of the lead frame changes, since the overall size of the mold remains unchanged, the positions of the carrier plate for placing the lead frame and the barrels for placing the rubber cakes on the mold, as well as the spacing between each group of barrels, will change. At this time, it is necessary to readjust the setting of the rubber cake picking and placing head or replace it with a different model of picking and placing head. The operation is cumbersome and wastes time and manpower. Summary of the Invention

[0006] In order to enable the glue cake picking and placing head device to clamp the glue cakes on barrels with different spacings and place the glue cakes on lead frames with different placement methods, the present application provides a dual-axis spacing adjustable glue cake picking and placing head device and a semiconductor laminating machine.

[0007] The present application provides a dual-axis spacing adjustable glue cake picking and placing head device adopts the following technical solution: it includes a sliding seat, which is slidably connected to the upper pressure table of the plastic sealing machine; a guide column, which is slidably connected to the bottom of the sliding seat; a guide sleeve, which is rotatably connected to the other end of the guide column; a clamping jaw group, which is connected to the guide sleeve and includes a plurality of pneumatic clamping jaws arranged side by side; a spacing adjustment component, which is arranged between the guide sleeve and the clamping jaw group, and includes an adjustment frame, and the pneumatic clamping jaws are slidably connected to the adjustment frame.

[0008] Based on the above technical solution, the guide post is slidably connected to the bottom of the sliding seat, which can realize the up and down lifting of the pick-up and placement head device. The guide sleeve is rotatably connected to the other end of the guide post, which can realize the rotation of the pick-up and placement head device. The pneumatic clamp is slidably connected to the adjustment frame of the spacing adjustment component, which facilitates the spacing adjustment of the pneumatic clamp, thereby facilitating the pick-up and placement head device to clamp the rubber cakes arranged at different spacings and transfer the rubber cakes from the barrel to the lead frame through lifting and rotating operations.

[0009] Preferably, the spacing adjustment assembly includes a scissor rod group, the scissor rod group is slidingly connected to the adjustment frame, and the pneumatic clamp is connected to the hinge of two rods of the scissor rod group.

[0010] Based on the above technical solution, a scissor rod group is slidably connected to the adjustment frame, and the pneumatic clamp is connected to the hinge of the two rods of the scissor rod group. The extension and contraction of the scissor rod group are used to adjust the spacing of the pneumatic clamp. At the same time, when the scissor rod group is deformed, the points on different scissor rods on the scissor rod group are always equidistant, thereby realizing equidistant changes of the pneumatic clamp, so that the pneumatic clamp can clamp the rubber cake more accurately, thereby improving the precision of the operation.

[0011] Preferably, the spacing adjustment assembly is provided with two limiting rods, and the limiting rods are fixedly connected to the adjustment frame, and are used to limit the pneumatic clamping jaws to move only along the arrangement direction of the pneumatic clamping jaws.

[0012] Based on the above technical solution, two limit rods are used to limit the position of the pneumatic clamp, so that the pneumatic clamp can only move on the axis where the spacing changes, making it convenient to move the pneumatic clamp to a position directly above the rubber cake to make it easier to clamp the rubber cake.

[0013] Preferably, a limiting rail perpendicular to the limiting rod is fixedly connected to the limiting rod, and the limiting rail includes two limiting rails arranged in parallel up and down, and the limiting rails are used to fix the position of the pneumatic clamp located in the middle.

[0014] Based on the above technical solution, the limit rail is used to limit the position of the pneumatic clamp located in the middle, so that the pneumatic clamp in the middle is used as a reference, and the other pneumatic clamps move away from or closer to both sides based on the pneumatic clamp in the middle, further improving the precision of clamping the rubber cake.

[0015] Preferably, the spacing adjustment assembly includes a ball screw, which is rotatably connected to the adjustment frame, and the end points of the scissor rod group are connected to the nut of the ball screw.

[0016] Based on the above technical solution, a ball screw is provided to be rotatably connected to the adjustment frame. The ball screw includes a screw and a nut. The nut is threadedly rotatably connected to the screw. Since the screw can only rotate on the adjustment frame without displacement, when the screw rotates, the nut will displace. The end points of the scissor rod group are connected to the nut, and the scissor rod group moves driven by the nut, thereby achieving extension or contraction.

[0017] Preferably, the ball screw comprises two sections of opposite threads and two nuts, and the two nuts are rotatably connected to the two sections of the screw with opposite threads.

[0018] Based on the above technical solution, two sections of threads in opposite directions are provided on the screw rod, and the number of nuts is also set to two and they are rotated and connected to the two sections of threads respectively. Therefore, when the screw rod rotates, the two nuts will move in opposite directions, driving the two ends of the scissors rod group to move simultaneously to achieve the extension or contraction of the scissors rod group.

[0019] Preferably, a driving member is provided at the end point of the screw, and the driving member is used to rotate the screw.

[0020] Based on the above technical solution, a driving member is set at the end point of the screw, and the driving member drives the screw to rotate.

[0021] Preferably, a cylinder is provided between the sliding seat and the guide column.

[0022] Based on the above technical solution, a cylinder is set between the sliding seat and the guide column, and the cylinder is used to drive the guide column to move up and down, which facilitates the up and down movement of the pick-and-place head, so that the clamping claw can automatically rise and fall to facilitate the clamping of the rubber cake and realize the transfer of the rubber cake.

[0023] Preferably, a DD motor is provided between the guide column and the guide sleeve.

[0024] Based on the above technical solution, a DD motor is used to drive the guide sleeve to rotate, thereby realizing the rotation of the entire clamping jaw group to facilitate the clamping of rubber cakes arranged in different directions. The use of a DD motor to directly drive the guide sleeve to rotate avoids the use of equipment such as transmission belts. Transmission equipment is a component with a higher failure rate in the system, so the use of a DD motor can have a lower failure rate. In addition, the DD motor is more energy-saving and power-saving, reducing production costs.

[0025] The present application also provides a semiconductor laminating machine, comprising an upper press platform, a working substrate, a mold, and a dual-axis spacing adjustable glue cake picking and placing head device, wherein the upper press platform and the working substrate constitute a working chamber, the mold is placed in the working chamber, and the dual-axis spacing adjustable glue cake picking and placing head device is slidably connected to the upper press platform.

[0026] Based on the above technical solution, a dual-axis spacing adjustable glue cake picking and placing head device is provided on the semiconductor laminating machine, which is convenient for clamping the glue cake from the material barrel of the mold and transferring it to the lead frame, avoiding high temperature burns caused by manual transfer and contamination of the material cake caused by direct touching of the hands. The spacing between the clamping claws of the picking and placing head can be extended and retracted, which facilitates the transfer of glue cakes on different molds without replacing or adjusting the picking and placing head, making the application range of the machine wider and improving work efficiency.

[0027] In summary, this application includes at least one of the following beneficial technical effects:

[0028] 1. The guide post is slidably connected to the bottom of the sliding seat to enable the pick-and-place head device to be raised and lowered. The guide sleeve is rotatably connected to the other end of the guide post to enable the pick-and-place head device to be rotated. The pneumatic gripper is slidably connected to the adjustment frame of the spacing adjustment component to facilitate the spacing adjustment of the pneumatic gripper, thereby facilitating the pick-and-place head device to grasp rubber cakes arranged at different spacings and transfer the rubber cakes from the barrel to the lead frame through lifting and rotating operations;

[0029] 2. A scissor rod group is slidably connected to the adjustment frame, and the pneumatic gripper is connected to the hinge of the two rods of the scissor rod group. The distance between the pneumatic gripper is adjusted by the extension and contraction of the scissor rod group. At the same time, when the scissor rod group is deformed, the points on different scissor rods of the scissor rod group are always equidistant, thereby achieving equidistant changes in the pneumatic gripper, allowing the pneumatic gripper to more accurately clamp the rubber cake and improve the precision of the operation;

[0030] 3. Set the ball screw to be rotatably connected to the adjustment frame. The ball screw includes a screw and a nut. The nut is threaded and rotatably connected to the screw. Because the screw can only rotate on the adjustment frame without displacement, when the screw rotates, the nut will displace. The end points of the scissor rod group are connected to the nut, and the scissor rod group moves under the drive of the nut, thereby achieving extension or contraction. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 A schematic structural diagram of a lead frame is depicted;

[0032] Figure 2 A schematic diagram of the overall structure of an embodiment of the present application is depicted;

[0033] Figure 3 The embodiment of the present application is different from Figure 1 Schematic diagram of the overall structure;

[0034] Figure 4 A schematic diagram of the bottom portion of an embodiment of the present application is depicted.

[0035] Description of reference numerals: 10, sliding seat; 11, guide column; 12, cylinder; 13, guide sleeve; 14, DD motor;

[0036] 1. Spacing adjustment assembly; 21. Adjustment frame; 211. Top plate; 212. Extension; 213. Side plate; 214. Slide; 22. Ball screw; 221. Screw; 222. Nut; 223. Drive element; 23. Scissor lever assembly; 231. Articulated lever; 232. Latch; 233. Slider; 24. Limiting member; 241. Limiting lever; 242. Limiting rail;

[0037] 1. Gripping jaw assembly; 31. Clamping arm; 32. Connecting column;

[0038] 40. Mold; 41. Carrying plate; 42. Material barrel. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0040] It should be noted that the terms "setting" and "connecting" should be understood in a broad sense. For example, it can be directly setting or connecting, or it can be indirectly setting or connecting through a central component or a central structure.

[0041] In addition, if there are terms such as "longitudinal", "transverse", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicating orientation or positional relationships in the embodiments of the present invention, they are based on the orientation or positional relationships shown in the drawings or the conventional placement state or usage state, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the structure, feature, device or element referred to must have a specific orientation or positional relationship, nor must it be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0042] Reference Figure 1 , Figure 1The structure of the mold 40 is depicted. The mold 40 includes a carrier plate 41 for placing the lead frame and a material barrel 42 for placing the rubber cake. The carrier plate 41 is fixedly connected to the main body of the mold 40, and the material barrels 42 are arranged in groups and fixedly connected around the carrier plate 41. First, the rubber cake is placed in the material barrel 42, and the lead frame is placed on the carrier plate 41. Then, the pick-up and placement head device is used to clamp the rubber cake in groups and place it on the lead frame to complete subsequent operations.

[0043] The embodiment of the present application discloses a rubber cake picking and placing head device with adjustable dual-axis spacing.

[0044] Reference Figure 2 The dual-axis spacing adjustable rubber cake picking and placing head device includes: a sliding seat 10, a guide column 11 and a guide sleeve 13, a clamping claw group 30 and a spacing adjustment component 20. The sliding seat 10 is slidably connected to the upper pressure table of the semiconductor plastic packaging machine, and can realize horizontal or longitudinal sliding on the upper pressure table. The guide post 11 is connected to the bottom of the sliding seat 10, and the guide sleeve 13 is sleeved on the other end of the guide post 11, and the guide sleeve 13 is rotatably connected to the guide post 11. The clamping jaw group 30 is installed on the guide sleeve 13. The clamping jaw group 30 includes a plurality of pneumatic clamps arranged side by side for clamping multiple rubber cakes at the same time to improve work efficiency. A spacing adjustment component 20 is provided between the guide sleeve 13 and the clamping jaw group 30. The spacing adjustment component 20 includes an adjusting frame 21. The pneumatic clamping jaws are slidably connected to the adjusting frame 21, which is convenient for changing the spacing of the pneumatic clamping jaws, so that the pick-up and placement head device can not only clamp multiple rubber cakes at one time, but also can grab rubber cakes with different spacings placed according to the positions of different mold loading barrels, and automatically adjust the spacing of the pneumatic clamping jaws, which greatly saves time and manpower, improves production efficiency, and reduces production costs.

[0045] Reference Figure 2 Specifically, in this embodiment, a cylinder 12 is provided between the sliding seat 10 and the guide column 11. The main body of the cylinder 12 is fixedly connected to the sliding seat 10, and the output end of the cylinder 12 is fixedly connected to the guide column 11. The guide column 11 can move up and down under the drive of the cylinder 12, and is used to realize the height adjustment of the pick-and-place head to clamp the rubber cake and transfer it. The means are simple and easy to implement.

[0046] In some embodiments, other structures with similar functions to the cylinder 12 can also be selected to realize the up and down movement of the guide column 11. For example, a combination structure of a gear and a rack can be selected, and the rack is fixedly connected to the guide column 11. The rotation of the gear drives the rack to slide up and down, thereby further realizing the up and down sliding of the guide column 11.

[0047] Reference Figure 2Specifically, a DD motor 14 is provided between the guide post 11 and the guide sleeve 13. The inner ring of the DD motor 14 is fixedly connected to the guide post 11, and the outer ring of the DD motor 14 is fixedly connected to the guide sleeve 13. The guide sleeve 13 can rotate under the drive of the DD motor 14, thereby adjusting the arrangement direction of the clamping jaw group 30, making it convenient to clamp rubber cakes with different arrangement directions at the same time, further improving the operating efficiency.

[0048] Reference Figure 2 The spacing adjustment assembly 20 includes an adjustment frame 21 and a scissor rod group 23. The adjustment frame 21 is fixedly connected to the guide sleeve 13. The adjustment frame 21 includes a top plate 211 and two opposite side plates 213. The two side plates 213 are slidably connected to the top plate 211. The scissor rod group 23 is slidably connected to the two side plates 213. When the side plates 213 approach each other, the scissor rod group 23 contracts. When the side plates 213 move away from each other, the scissor rod group 23 stretches. The pneumatic grippers are connected to the scissor rod group 23 through a connecting column. When the scissor rod group 23 contracts, the pneumatic grippers can follow the movement of the points on the scissor rod group 23 to equidistantly reduce the distance between the pneumatic grippers. When the scissor rod group 23 extends, the pneumatic grippers can follow the movement of the points on the scissor rod group 23 to equidistantly increase the spacing. Therefore, using the scissor rod group 23 to change the distance of the pneumatic grippers can not only achieve the change in spacing, but also keep the spacing of the pneumatic grippers equal at all times. The equidistant telescopic gripper group 30 can clamp the rubber cake more accurately, thereby improving the precision of the operation.

[0049] Reference Figure 2 and Figure 3 Specifically, the scissor rod group 23 includes 4 shorter short hinged rods 231 and 8 longer long hinged rods 231. The long hinged rods 231 and the short hinged rods 231 are hinged by pins 232. The long hinged rods 231 are hinged to each other in a scissor shape. One end of the short hinged rod 231 is hinged to the long hinged rod 231, and the other end is hinged to the short hinged rod 231 and is also hinged to a slider 233. Horizontal slide grooves 214 are opened on the two side plates 213. The slider 233 is slidably connected in the slide groove 214 to realize the sliding connection between the scissor rod group 23 and the adjustment frame 21.

[0050] The pin 232 used to realize the hinge of the edge of the scissor lever group 23 is defined as the edge pin 232, and the pin 232 used to realize the hinge in the middle of the scissor lever group 23 is defined as the center pin 232. In this embodiment, the pneumatic clamp is connected to the edge pin 232 of the scissor lever group 23 through a connecting column. Because the scissor lever group 23 has a total of 4 center pins 232 but 5 edge pins 232, compared with setting the pneumatic clamp on the center pin 232 of the scissor lever group 23, the method adopted in this embodiment can save materials for the scissor lever group 23.

[0051] A limit member 24 is provided on the spacing adjustment assembly 20, and the limit member 24 is used to limit the position of the pneumatic clamp. The limit member 24 includes a limit rod 241 and a limit rail 242. The limit rod 241 is slidably connected between the two side plates 213. The limit rod 241 is perpendicular to the side plates 213 and is provided with two. The distance between the two limit rods 241 is the diameter of the connecting column used to connect the pneumatic clamp and the scissor rod group 23. One end of the connecting column is connected to the pin 232 on the edge connection point of the scissor rod group 23, and the other end passes through the limit rod 241 and is connected to the cylinder 12 of the pneumatic clamp. The limit rod 241 is used to prevent the pneumatic clamp from moving in other directions except for the axis of the pneumatic clamp's extension and contraction when changing the spacing, thereby facilitating the improvement of the operational accuracy when clamping the rubber cake.

[0052] Two limit rails 242 are fixedly connected to the middle position of the limit rod 241. The extension direction of the limit rail 242 is the same as the direction of the side plate 213. The limit rail 242 is fixedly connected to the limit rod 241 in parallel to the left and right. The other end of the limit rail 242 is fixedly connected to the top plate 211 through a vertical rod. The edge pin 232 located in the middle is slidably connected to the upper and lower limit rails 242, so that the edge connection point in the middle will not move left and right when the scissors rod group 23 is extended or contracted, so that the position of the pneumatic clamp located in the middle can remain unchanged, and the other clamps move equidistantly based on the clamp in the middle, further improving the accuracy of clamping the rubber cake.

[0053] The spacing adjustment assembly 20 also includes a ball screw 22. The top plate 211 of the adjustment frame 21 extends downward on both sides to form an extension portion 212. A through hole is opened on the extension portion 212. The screw 221 of the ball screw 22 is rotatably connected to the extension portion 212 through the through hole. In this embodiment, the thread on the screw 221 is divided into two sections, left and right, and the directions of the two sections of thread are opposite. Two nuts 222 are symmetrically arranged on the screw 221 within the range of the two side plates 213. The two nuts 222 are rotatably connected to the areas where the threads in different directions are located. The two side plates 213 are respectively fixedly connected to the two nuts 222. By rotating the screw 221, the two side plates 213 can approach or move away at the same time, thereby driving the scissor rod group 23 to extend or contract, and then driving the pneumatic clamp to extend and retract equidistantly.

[0054] A driving member 223 is provided at one end point of the screw 221. In this embodiment, the driving member 223 is configured as a rotary motor, which is fixedly connected to the side plate 213. The output end of the rotary motor is fixedly connected to the end point of the screw 221. The rotary motor is used to realize automatic rotation of the screw 221, thereby realizing automatic extension and retraction of the pneumatic clamp.

[0055] In some other embodiments, the driving member 223 can also be configured as a crank or other structure similar to a rotary motor, and the crank is fixedly connected to the end point of the screw 221, and the screw 221 is rotated by manually turning the crank.

[0056] In some other embodiments, a combination of belts and gears can also be selected to achieve the contraction and extension of the scissors rod group. The two gears are connected by rotating on the adjustment frame, and the belt is put on the gear so that the two ends of the scissors rod group are respectively connected to the two sides of the belt. When the gear is rotated, the belt drives the two ends of the scissors rod group to move toward or relative to each other, thereby achieving the stretching or contraction of the scissors rod group, as long as the telescopic movement of the scissors rod group can be achieved.

[0057] Specifically, the side of the pneumatic clamping arm 31 that contacts the rubber cake is set to be arc-shaped. When the two clamping arms 31 are clamped, the shape formed by the two clamping arms 31 can just match the shape of the rubber cake, making it easy to clamp the rubber cake.

[0058] The implementation principle of a dual-axis spacing adjustable rubber cake picking and placing head device in an embodiment of the present application is as follows: the cylinder 12 is used to realize the up and down lifting of the picking and placing head, so that the picking and placing head can clamp the rubber cake downward and then move downward to just above the lead frame, and move downward to place the rubber cake on the lead frame. The DD motor 14 is driven to rotate the picking and placing head device, so that the picking and placing head device can clamp rubber cakes arranged in different directions. The scissor rod group 23 is hinged on the adjustment frame 21, and the pneumatic clamping claw is connected to the scissor rod group 23, which can not only adjust the spacing of the pneumatic clamping claws but also realize equidistant adjustment. The setting of the ball screw 22 can realize the extension and retraction of the scissor rod group 23, so as to drive the pneumatic clamping claw to realize distance change, so that the picking and placing head device can clamp rubber cakes on barrels with different spacings and place the rubber cakes on lead frames with different placement methods, thereby improving production efficiency and reducing production costs.

[0059] The present application also discloses a semiconductor laminating machine. The semiconductor laminating machine includes a working base, an upper pressing platform, a working chamber, a mold, and a biaxially adjustable glue cake pick-and-place head device. The working chamber is formed between the upper pressing platform and the working base. The biaxially adjustable glue cake pick-and-place head device is slidably connected to the semiconductor laminating machine. The mold includes a carrier plate for placing a lead frame and a material barrel for placing glue cakes. During the laminating operation, the lead frame is first placed on the carrier plate, and the glue cakes are placed in the material barrel. Then, the biaxially adjustable glue cake pick-and-place head device is used to simultaneously transfer multiple glue cakes to the lead frame. After the relevant operations on the mold are completed, the mold is transferred to the working chamber on the working base. The upper pressing platform is moved to press the glue cakes at high temperature. The glue cakes melt and flow into the lead frame to complete the laminating operation of the semiconductor chip.

[0060] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A double-axis spacing adjustable rubber cake pick-up and place head device, characterized in that: include: A sliding seat (10) is slidingly connected to the upper pressing table of the laminator; A guide column (11) is slidably connected below the sliding seat (10); A guide sleeve (13) rotatably connected to the other end of the guide post (11); A clamping jaw assembly (30) is mounted on the guide sleeve (13) and includes a plurality of pneumatic clamping jaws arranged side by side; A spacing adjustment assembly (20) is arranged between the guide sleeve (13) and the clamping jaw assembly (30); The spacing adjustment assembly (20) includes an adjustment frame (21), a ball screw (22) and a scissor rod group (23), the end point of the ball screw (22) is connected to the adjustment frame (21), the scissor rod group (23) is fixedly connected to the nut (222) of the ball screw (22), the scissor rod group (23) is slidably connected to the adjustment frame (21), the pneumatic clamp is connected to the hinge of two rods of the scissor rod group (23), and the adjustment frame (21) is provided for the pneumatic clamp to be slidably connected; the adjustment frame (21) includes a top plate (211) and two opposite side plates (213), the two side plates (213) are slidably connected to the top plate (211), the scissor rod group (23) is slidably connected in the two side plates (213), and the side plates (213) are close to each other. When the scissor rod group (23) is close, the side plates (213) are retracted, and the scissor rod group (23) is moved away from each other, and the scissor rod group (23) is stretched; the pneumatic clamping claws are connected to the pins (232) of the hinge points on one side between the long hinge rods (231) of the scissor rod group (23) through the connecting column (32); when the scissor rod group (23) is retracted, the pneumatic clamping claws can follow the movement of the points on the scissor rod group (23) to equidistantly reduce the distance between the pneumatic clamping claws; when the scissor rod group (23) is extended, the pneumatic clamping claws can follow the movement of the points on the scissor rod group (23) to equidistantly increase the distance between the pneumatic clamping claws, so that the distance between the pneumatic clamping claws is kept equal at all times by the scissor rod group (23); and the equidistant extension and retraction of the clamping claw group (30) can accurately clamp the rubber cake; The scissor rod group (23) has short hinged rods at both ends of the long hinged rod (231), and the short hinged rods at both ends are hinged to a slider (233). The two side plates (213) of the adjustment frame (21) are provided with horizontal sliding grooves (214), and the sliders (233) are slidably connected in the sliding grooves (214) to achieve a sliding connection between the scissor rod group (23) and the adjustment frame (21); Two limiting rods (241) are provided on the spacing adjustment component (20), and the limiting rods (241) are connected to the adjustment frame (21) and are used to limit the pneumatic clamp to move only along the arrangement direction of the pneumatic clamp; a limiting rail (242) perpendicular to the two limiting rods (241) is also fixedly connected to the middle position of the limiting rod (241), and the limiting rails (242) are arranged in parallel up and down, and the limiting rails (242) are used to fix the position of the pneumatic clamp located in the middle; The extending direction of the limit rail (242) is the same as the direction of the side plate (213), and the limit rail (242) is fixedly connected to the limit rod (241) in parallel. The other end of the limit rail (242) is fixedly connected to the top plate (211) through a vertical rod. The pin (232) at the middle of the hinge point on the other side of the long hinge rod (231) of the scissor rod group (23) is slidably connected to the upper and lower limit rails (242), so that the pin (232) at the middle of the hinge point on one side of the long hinge rod (231) will not move left and right or forward and backward when the scissor rod group (23) is extended or contracted.

2. The double-axis spacing adjustable rubber cake pick-up and place head device according to claim 1 is characterized in that: The ball screw (22) comprises two sections of opposite threads and two nuts (222), and the two nuts (222) are rotatably connected to the two sections of the screw (221) with opposite threads.

3. The double-axis spacing adjustable rubber cake pick-up and place head device according to claim 2, characterized in that: A driving member (223) is provided at the end point of the screw rod (221), and the driving member (223) is used to enable the screw rod (221) to rotate.

4. The double-axis spacing adjustable rubber cake pick-up and place head device according to claim 1, characterized in that: A cylinder (12) is provided between the sliding seat (10) and the guide column (11).

5. The double-axis spacing adjustable rubber cake pick-up and place head device according to claim 1, characterized in that: A DD motor (14) is provided between the guide column (11) and the guide sleeve (13).

6. A semiconductor laminating machine, characterized in that: include: An upper press platform, a working base plate, a mold, and a dual-axis spacing adjustable rubber cake picking and placing head device as described in any one of claims 1 to 5, wherein the upper press platform and the working base plate constitute a working cavity, the mold is placed in the working cavity, and the dual-axis spacing adjustable rubber cake picking and placing head device is slidably connected to the upper press platform.

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