Tool for determining and method for determining a shape

Abstract

The present application provides a judgment tool and a shape judgment method, which can simply judge the shape of the front end of a machining tool. The judgment tool is used when judging the shape of the front end of a machining tool that machines a workpiece held by a worktable while relatively moving with respect to the worktable, wherein the judgment tool has a bottom surface held to the worktable and a flat inclined surface inclined with respect to the bottom surface and arranged in a direction intersecting the relative moving direction for the front end of the machining tool to cut through.

Description

Technical Field

[0001] This invention relates to a determination tool used for determining the shape of the front end of a processing tool and a shape determination method using the determination tool. Background Technology

[0002] In electronic devices such as mobile phones and personal computers, device chips containing electronic circuits and other components are essential components. Regarding device chips, for example, a wafer formed from semiconductor materials such as silicon is divided into multiple regions on its front side using predetermined dicing lines (spacers). After devices are formed in each region, the wafer is diced using these dicing lines, thereby obtaining a device chip.

[0003] When dividing a plate-shaped workpiece, such as a wafer, into smaller pieces like device chips, a cutting device, for example, is used, which employs a processing tool called a cutting tool equipped with abrasive grains dispersed in a binder. By rotating the cutting tool at high speed and supplying a liquid such as pure water while cutting into a predetermined dividing line, the workpiece can be cut into multiple smaller pieces (see, for example, Patent Document 1).

[0004] Patent Document 1: Japanese Patent Application Publication No. 2000-87282

[0005] However, when machining a workpiece using a cutting tool, the tool's tip wears down and develops rounded corners as machining progresses. When machining a workpiece with a tool that has rounded corners, the rounded corners transfer to the workpiece, making it impossible to machine it into the desired shape. Furthermore, the reduced strength and shape asymmetry caused by the rounded corners can sometimes lead to vibrations in the tool cutting into the workpiece, thus reducing machining quality.

[0006] Therefore, the traditional method involves using a machining tool to cut into a flat, plate-like component, observing the shape of the machining mark from the side of the component, and then determining whether the tip of the machining tool has a rounded corner. However, in this method, in order to observe the shape of the machining mark from the side, the plate-like component needs to be repositioned relative to a camera or similar device, which is time-consuming and takes a considerable amount of time until the determination is completed. Summary of the Invention

[0007] The present invention was made in view of this problem, and its object is to provide a determination tool that can easily determine the shape of the front end of a processing tool and a simple shape determination method using the determination tool.

[0008] According to one aspect of the invention, a judging tool is provided for judging the shape of the front end of a machining tool, which processes the workpiece held by the workpiece while moving relative to the workpiece held by the workpiece. The judging tool has: a bottom surface held by the workpiece; and a flat inclined surface inclined relative to the bottom surface and configured to be oriented in an orientation intersecting the direction of relative movement for the front end of the machining tool to cut through.

[0009] Preferably, the angle between the bottom surface and the inclined surface is 30° or more and 60° or less. Furthermore, it is preferable that the tool used for determining the angle is made of silicon or carbon.

[0010] According to another aspect of the present invention, a shape determination method is provided for determining the shape of the tip of a machining tool, wherein the machining tool moves relative to a worktable holding the workpiece while machining the workpiece held by the worktable, wherein the worktable holds the bottom surface of the determination tool, which has a bottom surface and a flat inclined surface inclined relative to the bottom surface, and the tip of the machining tool cuts into the determination tool in such a way that the tip of the machining tool cuts through the inclined surface, and the shape of the machining mark formed on the inclined surface by the tip cutting through the inclined surface is confirmed from the side of the determination tool opposite to the bottom surface, thereby determining the shape of the tip of the machining tool.

[0011] Preferably, the front end is inserted into the judging tool at the end that does not cut through the bottom surface of the inclined surface. Furthermore, it is preferable to insert the front end into the judging tool while moving the machining tool and the worktable relative to each other in that direction. Additionally, it is preferable to determine that the front end of the machining tool is curved if the end of the machining mark, as confirmed from the side opposite to the bottom surface, is curved.

[0012] One aspect of the present invention provides a judgment tool comprising: a bottom surface held on a worktable; and a flat inclined surface inclined relative to the bottom surface for the front end of the machining tool to cut through. Thus, by simply inserting the front end of the machining tool into the judgment tool in such a manner as to form a machining mark on the inclined surface, the shape of the machining mark can be easily confirmed from the side of the judgment tool opposite to the bottom surface.

[0013] That is, according to one aspect of the determination tool and another aspect of the shape determination method of the present invention, it is not necessary to reconfigure the determination tool in order to confirm the shape of the machining mark corresponding to the shape of the front end of the machining tool. Therefore, compared with conventional methods, the shape of the front end of the machining tool can be determined simply. Attached Figure Description

[0014] Figure 1 It is a three-dimensional diagram schematically showing the structure of the judgment tool.

[0015] Figure 2 It is a perspective view schematically showing the situation where a judgment tool is held using a worktable.

[0016] Figure 3 It is a perspective view schematically showing the situation where the tip of the cutting tool cuts into the tool used for determining the cutting edge.

[0017] Figure 4 It is a schematic side view showing the situation where the tip of the cutting tool cuts into the tool used for determining the cutting position.

[0018] Figure 5 This is a side view schematically showing the confirmation of the shape of the machining mark formed on the inclined surface of the judgment tool.

[0019] Figure 6 This is an example of an image obtained by taking a picture of the machining marks formed on the inclined surface of the judgment tool using a camera.

[0020] Figure 7 It is a side view schematically showing the situation where the front end of the grinding wheel cuts into the tool for determining the cutting position.

[0021] Figure 8 It is a side view schematically showing the situation where the front end of the grinding wheel cuts into the tool for determining the cutting position.

[0022] Figure 9 This is an example of an image obtained by taking a picture of the machining marks formed on the inclined surface of the judgment tool using a camera.

[0023] Figure 10 This is a perspective view schematically showing the structure of the determination tool for the first variation.

[0024] Figure 11 This is a perspective view schematically showing the structure of the judgment tool for the second variation.

[0025] Label Explanation

[0026] 1: Judgment tool; 1a: Bottom surface; 1b: Top surface; 1c: Side surface; 1d: Side surface; 1e: Side surface; 1f: Side surface; 1g: Groove; 1h: Vertical surface; 1i: Inclined surface; 1j: Machining mark; 1k: End; 1l: Machining mark; 1m: End; 3: Strip; 5: Frame; 7: Image; 9: Image; 11: Judgment tool; 11a: Bottom surface; 11b: Top surface; 11c: Side surface; 11e: Side surface; 11f: Side surface; 11i: Inclined surface; 13: Judgment tool; 13a: Bottom surface; 13b: Top surface; 13c: Side surface; 13d: Side surface; 13 e: Side; 13f: Side; 13g: Groove; 13h: Inclined surface; 13i: Inclined surface; 2: Cutting device (machining device); 4: Worktable (chuck worktable); 6: Frame; 6a: Recess; 8: Holding plate; 8a: Upper surface; 10: Fixture; 12: Cutting tool (machining tool); 14: Cutting unit (machining unit); 16: Spindle housing; 18: Spindle; 20: Camera; 32: Grinding device (machining device); 34: Grinding wheel (machining tool); 36: Grinding unit (machining unit); 38: Spindle; 40: Grinding wheel; 42: Base. Detailed Implementation

[0027] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Figure 1 This is a perspective view schematically illustrating the structure of the determination tool 1 in this embodiment. Figure 1 As shown, the judgment tool 1 has a generally flat rectangular bottom surface 1a and an upper surface 1b on the side opposite to the bottom surface 1a. For example, the judgment tool 1 is used when judging the shape of the front end of a machining tool (abrasive tool) formed by dispersing abrasive grains in a binder.

[0028] The four sides (ends) of the rectangular shape corresponding to the bottom surface 1a are connected to the top surface 1b via side surfaces 1c, 1d, 1e, and 1f, respectively. The bottom surface 1a and the top surface 1b are approximately parallel to each other, and the side surfaces 1c, 1d, 1e, and 1f are approximately perpendicular to the bottom surface 1a and the top surface 1b.

[0029] The determining tool 1 is provided with a groove 1g extending approximately parallel to the two sides of the bottom surface 1a that correspond to the sides 1d and 1f. The upper end of the groove 1g opens into the upper surface 1b, and the two ends of the groove 1g in the length direction reach both sides 1c and 1e. That is, the upper surface 1b is divided into a first part on the side 1d and a second part on the side 1f by the groove 1g.

[0030] The groove 1g has: a vertical surface 1h that is substantially perpendicular to the bottom surface 1a and the upper surface 1b and substantially parallel to the side surface 1d; and an inclined surface 1i that is inclined relative to the bottom surface 1a and the upper surface 1b. The inclined surface 1i is formed to be substantially flat, for example, at a predetermined angle relative to the bottom surface 1a (or the upper surface 1b).

[0031] There is no strict limitation on the angle θ1 formed by the bottom surface 1a (or the top surface 1b) and the inclined surface 1i. However, when the angle θ1 is 30° or more and 60° or less, the shape of the front end of the machining tool can be fully confirmed from the top surface 1b side. In addition, when the angle θ1 is 43° or more and 48° or less (typically 45°), the shape of the front end of the machining tool can be confirmed more precisely from the top surface 1b side.

[0032] There are no particular restrictions on the manufacturing method of the judgment tool 1. For example, the judgment tool 1 can be manufactured by forming a groove 1g on a plate-shaped part using any method such as cutting, laser processing, or etching. There are also no strict restrictions on the material of the judgment tool 1. The judgment tool 1 can be made of a material that is easy to process with a tool for processing the object being used.

[0033] However, when the judging tool 1 is formed from a porous material such as a porous material, the pores may overlap with the machining marks formed on the inclined surface 1i using a machining tool, making it impossible to fully confirm the shape of the machining marks. Therefore, it is preferable to form the judging tool 1 from a dense material with fewer pores. Examples of such materials include silicon or carbon.

[0034] Next, a shape determination method for determining the shape of the front end of the processing tool using the aforementioned determination tool 1 will be described. In the shape determination method of this embodiment, the bottom surface 1a of the determination tool 1 is first held by the worktable of the processing device (holding step). Figure 2 This is a perspective view schematically showing the situation in which the judgment tool 1 is held by the worktable (chuck worktable) 4 of the cutting device (machining device) 2.

[0035] like Figure 2 As shown, the cutting device 2 used in this embodiment has a worktable 4 for holding a plate-shaped workpiece (not shown), such as a semiconductor wafer. The worktable 4 includes, for example, a disc-shaped frame 6 made of a metal such as stainless steel. A recess 6a with a circular opening at the upper end is formed on the upper surface side of the frame 6.

[0036] A disc-shaped retaining plate 8, made of porous material such as ceramic, is fixed in the recess 6a of the frame 6. The upper surface 8a of the retaining plate 8 is generally flat and functions as a retaining surface to hold the workpiece. The lower surface of the retaining plate 8 is connected to a suction source (not shown) such as an injector via a flow path or valve (not shown) provided inside the frame 6.

[0037] Furthermore, when processing the workpiece using the cutting device 2, for example, a strip (dicing strip) with a diameter larger than the workpiece is attached to the lower surface of the workpiece. Additionally, an annular frame is fixed to the outer periphery of the strip in a manner that surrounds the workpiece. To hold this annular frame, four clamps 10 are arranged around the frame 6.

[0038] A rotary drive source, such as an electric motor (not shown), is connected to the lower part of the frame 6. The worktable 4 and the fixture 10 rotate around an axis (rotation axis) approximately perpendicular to the vertical direction (Z-axis direction) of the upper surface 8a, with the center of rotation being the center of rotation of the upper surface 8a. Furthermore, the frame 6 is supported by a worktable moving mechanism (not shown), through which the worktable 4 moves along a machining feed direction (X-axis direction) approximately parallel to the upper surface 8a.

[0039] like Figure 2 As shown, the judging tool 1, like the workpiece, is held on the worktable 4 with its bottom surface 1a side supported by the belt (scribing belt) 3 on the annular frame 5. Therefore, before holding the judging tool 1 using the worktable 4, the belt 3, which is larger than the judging tool 1, is attached to the bottom surface 1a of the judging tool 1. Furthermore, the annular frame 5 is fixed to the outer periphery of the belt 3 in a manner that surrounds the judging tool 1.

[0040] When holding the bottom surface 1a of the judgment tool 1 using the worktable 4, first bring the lower surface (the opposite side of the judgment tool 1) of the strap 3 attached to the judgment tool 1 into contact with the upper surface 8a of the worktable 4. Then, the annular frame 5, fixed to the outer periphery of the strap 3, is held by four clamps 10. Next, the valve is opened, applying negative pressure from the suction source to the worktable 4. As a result, the bottom surface 1a of the judgment tool 1 is held by the worktable 4 through the strap 3, and the upper surface 1b of the judgment tool 1 is exposed upwards.

[0041] After holding the bottom surface 1a of the judgment tool 1 using the worktable 4, the front end of the machining tool used in the cutting device 2 cuts through the inclined surface 1i of the judgment tool 1 and then cuts into the judgment tool 1 (cutting step). Figure 3This is a perspective view schematically showing the situation where the tip of the cutting tool (machining tool) 12 used in the cutting device 2 cuts into the determining tool 1. Additionally, in Figure 3 For ease of explanation, the workbench 4, etc., for holding the judgment tool 1 are omitted.

[0042] like Figure 3 As shown, a cutting unit (machining unit) 14 is arranged above the judgment tool 1 held by the worktable 4. The cutting unit 14 has a cylindrical spindle housing 16. A portion of the spindle 18 is housed in the space inside the spindle housing 16 in a manner that the axis (rotation axis) is approximately parallel to the indexing feed direction (Y-axis direction) which is approximately perpendicular to the machining feed direction and the vertical direction.

[0043] A cutting tool 12, which is made by dispersing abrasive grains such as diamond in a binder such as resin or metal, is mounted on one end of the spindle 18 that protrudes from the spindle housing 16. A rotary drive source (not shown) such as an electric motor is connected to the other end of the spindle 18, and the cutting tool 12 mounted on one end of the spindle 18 rotates together with the spindle 18 by the force generated by the rotary drive source.

[0044] The spindle housing 16 (cutting unit 14) is supported, for example, by a cutting unit moving mechanism (not shown). The cutting unit 14 moves along the indexing feed direction and the vertical direction via this cutting unit moving mechanism.

[0045] For example, after adjusting the vertical position of the cutting unit 14, the cutting tool 12 is rotated while the worktable 4 is moved along the machining feed direction, causing the cutting tool 12 to cut into the workpiece, thereby enabling cutting of the workpiece. That is, in the cutting device 2 of this embodiment, the workpiece held by the worktable 4 is machined while the cutting tool 12 is moved relative to the worktable 4 used to hold the workpiece.

[0046] When the cutting tool 12 cuts into the judgment tool 1, the orientation of the worktable 4 around the axis is adjusted, for example, so that the inclined surface 1i of the judgment tool 1 is arranged in an orientation that intersects the machining feed direction (i.e., the direction of relative movement). Specifically, the orientation of the worktable 4 is adjusted so that the length direction of the groove 1g (inclined surface 1i or vertical surface 1h) intersects the machining feed direction (the direction of relative movement).

[0047] There is no restriction on the angle between the machining feed direction and the length direction of the groove 1g, but the closer the angle is to perpendicularity, the easier it is to confirm the shape of the tip of the cutting tool 12. Typically, if the orientation of the worktable 4 is adjusted so that the angle between the machining feed direction and the length direction is 85° or more and 95° or less (i.e., within the range of 90° ± 5°), the shape of the tip of the cutting tool 12 can be properly confirmed.

[0048] After adjusting the orientation of the worktable 4 (or before adjusting the orientation of the worktable 4), adjust the vertical position of the cutting unit 14. Specifically, adjust the vertical position of the cutting unit 14 so that the height of the tip (lower end) of the cutting tool 12 is lower than the height of the upper end (the end on the upper surface 1b side) of the inclined surface 1i of the determination tool 1. Alternatively, adjust the vertical position of the cutting unit 14 so that the height of the tip (lower end) of the cutting tool 12 is higher than the height of the lower end (the end on the bottom surface 1a side) of the inclined surface 1i of the determination tool 1.

[0049] And, as Figure 3 As shown, while rotating the cutting tool 12, the worktable 4 is moved along the machining feed direction so that the cutting tool 12 cuts into the tool 1 for determining the cutting direction. Figure 4 This is a schematic side view showing the case where the tip of the cutting tool 12 cuts into the tool 1 used for determining the cutting edge. Additionally, in Figure 4 For ease of explanation, only the judgment tool 1 and the cutting tool 12 are shown.

[0050] The orientation of the inclined surface 1i and the height of the cutting tool 12 relative to the inclined surface 1i are adjusted as described above. Therefore, when the cutting tool 12 cuts into the judging tool 1, the tip of the cutting tool 12 cuts through the inclined surface 1i without cutting through the lower end (the end on the bottom surface 1a side) of the inclined surface 1i. As a result, a machining mark with a shape corresponding to the shape of the tip of the cutting tool 12 is formed on the inclined surface 1i of the judging tool 1.

[0051] After a machining mark is formed on the inclined surface 1i, the shape of the cutting tool 12 tip is determined by confirming the shape of the machining mark from the upper surface 1b side (opposite to the bottom surface 1a) of the determination tool 1 (shape determination step). Figure 5 This is a schematic side view showing the shape of the machining mark formed on the inclined surface 1i of the judging tool 1. Additionally, in Figure 5 For ease of explanation, only the main structures used to confirm the shape of machining marks are shown in the diagram.

[0052] like Figure 5As shown, a camera 20 capable of capturing images of the judgment tool 1 is positioned above the judgment tool 1 held on the worktable 4. The camera 20 is, for example, a two-dimensional light sensor such as a CMOS (Complementary Metal-Oxide Semiconductor) image sensor or a CCD (Charge Coupled Device) image sensor that is sensitive to visible light, and the camera 20 is fixed to the cutting unit 14. That is, the camera 20 moves together with the cutting unit 14 along the indexing feed direction and the vertical direction via the aforementioned cutting unit moving mechanism.

[0053] When confirming the shape of the machining mark formed on the inclined surface 1i from the upper surface 1b side, the position of the worktable 4 and the position of the camera 20 are adjusted, for example, so that the camera 20 is positioned directly above the machining mark. Furthermore, the area containing the machining mark on the inclined surface 1i is photographed from above the judgment tool 1 (on the side opposite to the upper surface 1b and the bottom surface 1a) using the camera 20. Figure 6 This is an example of an image 7 obtained by using a camera 20 to capture a machining mark 1j formed on the inclined surface 1i of the judgment tool 1.

[0054] As described above, the inclined surface 1i of the judging tool 1 is inclined relative to the bottom surface 1a of the judging tool 1 held by the worktable 4. Therefore, by taking a picture of the inclined surface 1i of the judging tool 1 from above the worktable 4 using the camera 20, an image 7 showing the machining mark 1j that reflects the shape of the tip of the cutting tool 12 can be obtained. Furthermore, based on the shape of the machining mark 1j in the image 7, the shape of the tip of the cutting tool 12 can be determined.

[0055] For example, Figure 6 As shown, when the end 1k of the machining mark 1j located on the lower end side of the inclined surface 1i (the vertical surface 1h side in Image 7) is curved, it is determined that the tip of the cutting tool 12 is curved and has rounded corners. That is, it is determined that the corner that should exist on the tip of the cutting tool 12 has disappeared due to wear. On the other hand, when the end 1k of the machining mark 1j located on the lower end side of the inclined surface 1i is straight (with an angled shape), it is determined that an angle remains on the tip of the cutting tool 12.

[0056] The shape of the cutting tool 12's tip is determined, for example, by processing image 7 through a control unit (computer) (not shown) that controls the cutting device 2. The determination result is communicated to the operator via notification devices (not shown), such as a warning light, speaker, or display. However, the shape of the cutting tool 12's tip can be determined subjectively by the operator. In this case, the shape of the machining mark 1j can be confirmed visually by the operator without using the camera 20 to acquire image 7.

[0057] As described above, the judgment tool 1 of this embodiment has: a bottom surface 1a, which is held on the worktable 4; and a flat inclined surface 1i, which is inclined relative to the bottom surface 1a, for the front end of the cutting tool (machining tool) 2 to cut through. Therefore, by simply cutting the front end of the cutting tool 12 into the judgment tool 1 in such a way that the front end of the cutting tool 12 cuts through the inclined surface 1i and forms a machining mark 1j on the inclined surface 1i, the shape of the machining mark 1j can be easily confirmed from the opposite side (upper surface 1b side) of the bottom surface 1a of the judgment tool 1.

[0058] That is, according to the determination tool 1 and shape determination method of this embodiment, it is not necessary to reconfigure the determination tool 1 in order to confirm the shape of the machining mark 1j corresponding to the shape of the front end of the cutting tool 12. Therefore, compared with the conventional method, the shape of the front end of the cutting tool 12 can be determined simply.

[0059] Furthermore, the present invention is not limited to the embodiments described above, and various modifications and implementations are possible. For example, in the above embodiments, the shape of the tip of the cutting tool (machining tool) 12 is determined based on the machining marks formed on the inclined surface 1i of the determining tool 1, but the bending and other deformations of the cutting tool 12 can also be determined using the same process. In addition, in this case, in order to easily determine the bending and other deformations of the tool 12, the sidewall on the vertical surface 1h side of the groove 1g can be machined in a stepped shape (a shape with multiple layers).

[0060] In addition, in the above embodiment, the cutting tool 12 is moved relative to the worktable 4 in the machining feed direction to make the cutting tool 12 cut into the tool 1. However, the cutting tool 12 can also be moved relative to the worktable 4 in the vertical direction to make the cutting tool 12 cut into the tool 1 (by cutting through the inclined surface 1i by the front end of the cutting tool 12).

[0061] In addition, in the above embodiment, a strip 3 is attached to the bottom surface 1a of the judgment tool 1, and the bottom surface 1a of the judgment tool 1 is held by the worktable 4 through the strip 3. However, a resin board or the like can also be attached to the bottom surface 1a of the judgment tool 1, and the bottom surface 1a of the judgment tool 1 is held by the worktable 4 through the board or the like.

[0062] Furthermore, in the above embodiment, the cutting tool 12 only cuts into the judgment tool 1. However, for example, a dressing plate used for dressing the cutting tool 2 may be placed near the judgment tool 1, and the cutting tool 12 may cut into both the dressing plate and the judgment tool 1, thereby dressing the cutting tool 2 while simultaneously judging the shape of its tip. Similarly, a workpiece may be placed near the judgment tool 1, and the shape of the cutting tool 2's tip may be judged while detecting machining defects in the workpiece, such as chipped edges.

[0063] In addition, for example, in the above embodiment, the determination tool 1 is used to determine the shape of the front end of the cutting tool 12, but the determination tool 1 can also be used to determine the shape of the front end of other machining tools. Figure 7 This is a schematic top view showing the cutting edge of the grinding wheel (machining tool) 34 used in the grinding apparatus (machining device) 32, which is used to determine the cutting edge of the tool 1. The grinding apparatus 32, like the cutting device 2, has a worktable (chuck worktable) (not shown) for holding a plate-shaped workpiece (not shown).

[0064] A rotary drive source, such as an electric motor, is connected to the lower part of the worktable. The worktable rotates about an axis (rotation axis) in the vertical direction or slightly inclined from the vertical direction, with the center of rotation being the center of the upper surface of the worktable. In addition, the worktable is supported by a worktable moving mechanism (not shown) and moves horizontally through this mechanism.

[0065] A grinding unit (machining unit) 36 is arranged above the worktable. The grinding unit 36 ​​has a cylindrical spindle housing (not shown). A portion of the spindle 38 is housed in the space inside the spindle housing in a manner in which the axis (rotation axis) is approximately parallel to the vertical direction.

[0066] A grinding wheel 40 is mounted on the lower end side of the spindle 38 exposed from the spindle housing. The grinding wheel 40 includes: a disc-shaped base 42 on which the spindle 38 is mounted on the upper surface; and a plurality of grinding tools (machining tools) 34 arranged in a ring on the lower surface side of the base 42.

[0067] A rotary drive source (not shown) such as an electric motor is connected to the upper end of the spindle 38. The grinding wheel 40, mounted on the lower end of the spindle 38, rotates together with the spindle 38 by the force generated by this rotary drive source. That is, each grinding tool 34 moves in a manner that revolves around the axis of the spindle 38.

[0068] The spindle housing (grinding unit 36) is supported, for example, by a grinding unit moving mechanism (not shown). The grinding unit 36 ​​moves along the vertical direction via this grinding unit moving mechanism.

[0069] For example, after moving the worktable holding the workpiece below the grinding wheel 40, the grinding unit 36 ​​is lowered while rotating the grinding wheel 40 and the worktable 4, causing the grinding tool 34 to cut into the workpiece on the worktable, thereby enabling grinding of the workpiece. That is, in this grinding apparatus 32, the workpiece held by the worktable is processed while the grinding tool 34 is moved relative to the worktable used to hold the workpiece.

[0070] The shape determination method for determining the shape of the front end of the grinding wheel 34 is the same as the shape determination method for determining the shape of the front end of the cutting tool 12. Specifically, the bottom surface 1a of the determination tool 1 is first held on the worktable of the grinding apparatus 32 (holding step). The detailed process is the same as in the above embodiment. In addition, the determination tool 1 is held on the worktable, for example, through a belt (not shown), but it is not necessary to fix a ring-shaped frame to the outer periphery of the belt.

[0071] After holding the bottom surface 1a of the judgment tool 1 using the worktable, the front end of the grinding wheel 34 is inserted into the judgment tool 1 in such a way that the front end of the grinding wheel 34 cuts through the inclined surface 1i of the judgment tool 1 (insertion step). Figure 8 This is a schematic side view showing the case where the front end of the grinding wheel 34 cuts into the tool 1 for determining its position. Additionally, in Figure 8 For ease of explanation, only the judgment tool 1 and the grinding wheel 34 are shown.

[0072] When the front end of the grinding wheel 34 cuts into the judgment tool 1, the orientation of the worktable around its axis is adjusted, for example, so that the inclined surface 1i of the judgment tool 1 is arranged to intersect the direction of movement of the grinding wheel 34 (the direction of revolution, the direction of relative movement with respect to the worktable). Specifically, the orientation of the worktable is adjusted so that the length direction of the groove 1g (inclined surface 1i or vertical surface 1h) intersects the direction of movement of the grinding wheel 34.

[0073] After adjusting the orientation of workbench 4, as follows Figure 7 As shown, while the grinding wheel 40 is rotated, the grinding unit 36 ​​is lowered, causing the grinding tool 34 to cut into the judgment tool 1 on the worktable. However, the worktable is not rotated at this time. In this way, by rotating the grinding wheel 40 without rotating the worktable, the grinding tool 34 cuts through the inclined surface 1i from a certain direction.

[0074] Furthermore, the descent of the grinding unit 36 ​​is stopped when the height of the front end (lower end) of the grinding wheel 34 is higher than the height of the lower end (bottom surface 1a side) of the inclined surface 1i of the judging tool 1. As a result, the front end of the grinding wheel 34 cuts through the inclined surface 1i without cutting through the lower end of the inclined surface 1i. Consequently, a machining mark with a shape corresponding to the shape of the front end of the grinding wheel 34 is formed on the inclined surface 1i of the judging tool 1.

[0075] After a machining mark is formed on the inclined surface 1i, the shape of the front end of the grinding tool 34 is determined by confirming the shape of the machining mark from the upper surface 1b side (opposite to the bottom surface 1a) of the determination tool 1 (shape determination step). Specifically, for example, the area containing the machining mark on the inclined surface 1i is photographed using a camera (not shown) of the grinding device 32. Figure 9 This is an example of image 9 obtained by taking a picture of the machining mark 1l formed on the inclined surface 1i of the judgment tool 1 using a camera.

[0076] As described above, the inclined surface 1i of the judging tool 1 is inclined relative to the bottom surface 1a of the judging tool 1 held by the worktable. Therefore, by taking a picture of the inclined surface 1i of the judging tool 1 from above the worktable 4 using a camera, an image 9 showing the machining mark 1l that reflects the shape of the front end of the grinding wheel 34 can be obtained. Furthermore, based on the shape of the machining mark 1l in the image 9, the shape of the front end of the grinding wheel 34 can be determined.

[0077] For example, Figure 9 As shown, when the end 1m of the machining mark 1l located on the lower end side of the inclined surface 1i (the vertical surface 1h side in Image 9) is curved, it is determined that the front end of the grinding tool 34 is curved and has rounded corners. That is, it is determined that the corner that should exist on the front end of the grinding tool 34 has disappeared due to wear. On the other hand, when the end 1m of the machining mark 1l located on the lower end side of the inclined surface 1i is straight (with an angled shape), it is determined that an angle remains on the front end of the cutting tool 12.

[0078] The shape of the cutting tool 12's tip is determined, for example, by processing image 9 through a control unit (computer) (not shown) that controls the grinding device 32. Furthermore, using image 9 (machining mark 1l), the control unit can also calculate the width of the grinding wheel 34, etc.

[0079] The results of the judgment are communicated to the operator using notification devices (not shown), such as warning lights (light), speakers (sound), and displays (shown). However, the determination of the shape of the front end of the grinding wheel 34 can also be based on the operator's subjective judgment. In this case, the shape of the machining mark 1l can be confirmed visually by the operator without using a camera to acquire image 9.

[0080] In the above-described embodiments or variations, a determination tool 1 having a groove 1g including a vertical surface 1h and an inclined surface 1i is used to determine the shape of the front end of the cutting tool (machining tool) 12 or the grinding wheel (machining tool) 34. However, the determination tool of the present invention may not have such a groove 1g as described above.

[0081] Figure 10 This is a perspective view schematically showing the construction of the determination tool 11 for the first modified example. (See diagram below.) Figure 10 As shown, the determination tool 11 of the first modified example has: a generally flat rectangular bottom surface 11a; and an upper surface 11b on the opposite side of the bottom surface 11a. The portions (ends) corresponding to the four sides (sides) of the rectangular shape of the bottom surface 11a are connected to the upper surface 1b via side surfaces 11c, 11e, 11f and inclined surface 11i, respectively.

[0082] The bottom surface 11a and the top surface 11b are substantially parallel to each other, and the side surfaces 11c, 11e, and 11f are substantially perpendicular to the bottom surface 11a and the top surface 11b. The inclined surface 11i is formed substantially flat in a manner similar to the inclined surface 1i in the above embodiment, such that it is formed at a predetermined angle relative to the bottom surface 11a (or the top surface 11b).

[0083] The angle θ2 formed by the bottom surface 11a (or the upper surface 11b) and the inclined surface 11i is the same as the angle θ1 in the above embodiment. Furthermore, the manufacturing method of the determination tool 11, the material of the determination tool 11, the method of using the determination tool 11, and the method of determining the shape of the determination tool 11 are also the same as in the above embodiment. Additionally, the determination tool 11 is sometimes deformed into a triangular prism shape without the upper surface 1b.

[0084] Figure 11 This is a perspective view schematically showing the construction of the judgment tool 13 in the second variation example. (See diagram below.) Figure 11 As shown, the determination tool 13 of the second modified example has: a generally flat rectangular bottom surface 13a; and an upper surface 13b on the opposite side of the bottom surface 13a. The portions (ends) corresponding to the four sides (sides) of the rectangular shape of the bottom surface 13a are connected to the upper surface 13b via side surfaces 13c, 13d, 13e and 13f, respectively.

[0085] The bottom surface 13a and the top surface 13b are approximately parallel to each other, and the side surfaces 13c, 13d, 13e, and 13f are approximately perpendicular to the bottom surface 13a and the top surface 13b. The determination tool 13 is provided with a groove 13g extending in a direction approximately parallel to the two sides of the bottom surface 13a that are connected to the side surfaces 13d and 13f.

[0086] The determining tool 13 is provided with a groove 13g extending approximately parallel to the two sides of the bottom surface 13a that correspond to the sides 13d and 13f. The upper end of the groove 13g opens into the upper surface 13b, and both ends of the groove 13g in the longitudinal direction reach the sides 13c and 13e. That is, the groove 13g divides the upper surface 13b into a first part on the side 13d and a second part on the side 13f.

[0087] The groove 13g has: an inclined surface 13h that is inclined relative to the bottom surface 13a and the top surface 13b; and an inclined surface 13i that is inclined relative to the bottom surface 13a and the top surface 13b. The inclined surfaces 13h and 13i are formed substantially flat, for example, in a manner that forms a predetermined angle relative to the bottom surface 13a (or the top surface 13b).

[0088] The angle θ3 formed by the bottom surface 13a (or the upper surface 13b) and the inclined surface 13i is the same as the angle θ1 in the above embodiment. Additionally, the angle formed by the bottom surface 13a (or the upper surface 13b) and the inclined surface 13h is also the same as angle θ1. However, it is not necessary for the angle between the bottom surface 13a (or the upper surface 13b) and the inclined surface 13h to be the same as angle θ3.

[0089] Furthermore, the manufacturing method of the judgment tool 13, the material of the judgment tool 13, the method of using the judgment tool 13, and the method of determining the shape of the judgment tool 13 are the same as in the above-described embodiment. In the judgment tool 13, machining marks are formed on both the inclined surface 13h and the inclined surface 13i, making it easier to properly confirm the shape of the front end of the machining tool. In addition, the judgment tool 13 is sometimes deformed into a shape that does not have the upper surface 1b.

[0090] In addition, the above-described embodiments or variations of the construction and methods can be appropriately modified and implemented as long as they do not depart from the scope of the present invention.

Claims

1. A judging tool used to judge the shape of the front end of a machining tool, the machining tool machining the workpiece held on the workpiece while moving relative to a worktable used to hold the workpiece, wherein... The tool used for this determination has the following features: The bottom surface, which remains on the worktable; and A flat, inclined surface, which is inclined relative to the bottom surface, is configured to face an orientation that intersects the direction of relative movement, for the front end of the processing tool to cut through.

2. The determination tool according to claim 1, wherein, The angle between the bottom surface and the inclined surface is greater than 30° and less than 60°.

3. The determination tool according to claim 1 or 2, wherein, The instrument used for this determination is made of silicon or carbon.

4. A shape determination method used when determining the shape of the front end of a machining tool, wherein the machining tool moves relative to a worktable used to hold the workpiece while machining the workpiece held by the worktable, wherein... The worktable is used to hold the bottom surface of a tool that has a bottom surface and a flat inclined surface that is inclined relative to the bottom surface. With the inclined surface intersecting the direction of relative movement, the cutting edge of the machining tool cuts into the judging tool in such a way that it cuts through the inclined surface. The shape of the front end of the machining tool is determined by confirming the shape of the machining mark formed on the inclined surface by the cutting through the inclined surface from the side opposite to the bottom surface of the tool.

5. The shape determination method according to claim 4, wherein, The front end is inserted into the determining tool in such a way that it does not cut through the bottom side of the inclined surface.

6. The shape determination method according to claim 4 or 5, wherein, While moving the machining tool and the worktable relative to each other in that direction, the front end cuts into the judgment tool.

7. The shape determination method according to claim 4 or 5, wherein, If the end of the machining mark, as confirmed from the side opposite to the bottom surface, is curved, it is determined that the front end of the machining tool is curved.

8. The shape determination method according to claim 6, wherein, If the end of the machining mark, as confirmed from the side opposite to the bottom surface, is curved, it is determined that the front end of the machining tool is curved.

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