Objective lens inspection device and method

Abstract

The application provides an objective lens detection device and method, which comprises a workbench, a camera module, an objective lens lifting locking mechanism and an adjustable light source module; a support is installed on the workbench, a positioning sleeve is detachably installed on the support in the vertical direction, the camera module is axially adjustable and arranged above the positioning sleeve, the objective lens lifting locking mechanism comprises a mounting seat which is vertically liftable and located below the positioning sleeve, the mounting seat is provided with a mounting cavity for placing an objective lens workpiece, the mounting seat is driven upward to lock the objective lens workpiece against the positioning sleeve, and the adjustable light source module is located below the objective lens workpiece; the detection method of the application comprises the steps of fixing the objective lens workpiece, focusing adjustment, objective lens qualification judgment and the like; the application has the functions of focusing adjustment, objective lens cooperation and definition detection, the device is stable and reliable, and the objective lens detection efficiency is high.

Description

Technical Field

[0001] This invention relates to the field of microscope objective lens inspection, and in particular to an objective lens inspection device and method. Background Technology

[0002] A microscope is an optical instrument consisting of one or more lenses, used to magnify tiny objects visible to the naked eye. An optical microscope comprises an eyepiece, objective lens, stage, light source, and arm. The objective lens is the most important optical component of the microscope; it is a lens group composed of several lenses. The magnification of the microscope depends primarily on the objective lens, and its quality directly affects the image quality. It is the main component determining the microscope's resolution and image sharpness; therefore, the calibration and quality control of the objective lens are crucial.

[0003] Chinese invention patent application number CN200710044558.X discloses an objective lens inspection device and method. The objective lens inspection device includes a light source, a mask stage, a workpiece stage, an objective lens frame, a mask stage driving device and a workpiece stage driving device for driving the mask stage and the workpiece stage respectively. The method includes the following steps: (1) setting the objective lens to be inspected on the objective lens frame and turning on the light source so that the alignment pattern on the first mask is imaged through the objective lens; (2) controlling the mask stage driving device and the workpiece stage driving device to drive the mask stage and the workpiece stage respectively to align the first mask with the second mask; (3) controlling the workpiece stage driving device to drive the workpiece stage to perform scanning motion in the preset area; (4) detecting the intensity of light transmitted through the alignment pattern on the second mask and the position of the alignment pattern when the workpiece stage is performing scanning motion; (5) running a processing program on the detected data to obtain the imaging quality parameters of the objective lens to be inspected.

[0004] The invention does not specifically mention the positioning and unloading of objective lens workpieces, or the parfocal adjustment of objective lenses. Therefore, a device can be designed to inspect objective lenses of different sizes and specifications, and to combine objective lens parfocal adjustment and resolution detection together. Summary of the Invention

[0005] (a) Technical problems to be solved

[0006] The problem to be solved by the present invention is to provide an objective lens inspection device and method to overcome the defects in the prior art. The device can complete the detection of objective lens parfocal adjustment and resolution.

[0007] (II) Technical Solution

[0008] To address the aforementioned technical problems, this invention provides an objective lens inspection device and method. The objective lens inspection device includes: a worktable, a camera module, an objective lens lifting and locking mechanism, and an adjustable light source module. A bracket is mounted on the worktable, and a positioning sleeve is detachably mounted on the bracket along the vertical direction. The camera module is axially adjustable and positioned directly above the positioning sleeve. The objective lens lifting and locking mechanism includes a mounting base located below the positioning sleeve and capable of vertical lifting and lowering, and the mounting base is provided with a mounting cavity for placing the objective lens workpiece. The mounting base is driven upwards to lock the objective lens workpiece against the positioning sleeve. The adjustable light source module is located directly below the objective lens workpiece and includes a reticle and a light source that can be moved vertically as a whole. The camera module, the positioning sleeve, the objective lens workpiece, and the reticle are arranged coaxially in sequence.

[0009] Furthermore, the mounting cavity is U-shaped, with a stepped groove formed at its upper end for supporting the objective lens workpiece. A spring retainer is installed inside the stepped groove to prevent the objective lens workpiece from coming out of the U-shaped opening of the mounting cavity.

[0010] Furthermore, the objective lens lifting and locking mechanism also includes a lifting cylinder mounted on the worktable, the cylinder shaft of the lifting cylinder being connected to a lifting seat, and the mounting seat being mounted on the lifting seat; a guide column that slides with the lifting seat is mounted on the bracket; a buffer is provided on the worktable above the lifting seat; the buffer is mounted on the worktable via a connecting plate and a connecting shaft.

[0011] Furthermore, the bracket is equipped with a vertically arranged slide rail, and the camera module is slidably mounted on the slide rail via a slider seat, which is fastened to the slide rail by a limiting bolt; the positioning sleeve is fixedly installed in the mounting cavity of the bracket by a locking screw to accommodate objective lens workpieces of different sizes.

[0012] Furthermore, the adjustable light source module includes a hand-cranked screw lifting device vertically mounted on the worktable. The vertical height of the reticle and the light source can be adjusted by rotating the hand crank of the hand-cranked screw lifting device. A digital display grating ruler is installed on one side of the hand-cranked screw lifting device. The digital display grating ruler can also be used to read the object distance difference between different objective lens workpieces, enabling the pairing function of the objective lens workpieces.

[0013] Furthermore, the reticle and the light source are mounted on the screw seat of the hand-cranked screw lifting device via a connecting bracket, and the connecting bracket is equipped with a transparent light-diffusing plate for placing the reticle.

[0014] Furthermore, this technical solution also provides a method for inspecting objective lenses, implemented based on the aforementioned objective lens inspection device, specifically including the following steps:

[0015] Step S001, Place the objective lens workpiece to be inspected; Place the objective lens workpiece 7 to be inspected on the mounting base of the objective lens lifting and locking mechanism;

[0016] Step S002: Fix the objective lens workpiece and unify the image distance; drive the objective lens workpiece upward by lifting the hydraulic cylinder to abut against the positioning sleeve, so that the image distance between the camera module and the objective lens workpiece is fixed and uniform; the camera module transmits the image of the reticle to the computer software in real time.

[0017] Step S003, parfocal adjustment; rotate the main tube of the objective lens to adjust the objective lens to the maximum magnification; rotate the hand crank of the adjusting screw lifting device to adjust the object distance and adjust the image at the maximum magnification to the clearest state; continue to rotate the main tube of the objective lens to adjust the objective lens to the minimum magnification, and adjust the image at the minimum magnification to the clearest state by rotating the rear lens group of the objective lens;

[0018] Step S004: Repeat step S003 to complete the parfocal adjustment detection;

[0019] Step S005, objective lens qualification judgment; during the process of rotating the main tube of the objective lens workpiece from the minimum magnification to the maximum magnification, it is judged whether the image sharpness is greater than the sharpness threshold and whether the center displacement is less than the center displacement threshold; if both are true, a green light is output for sharpness and center displacement qualification, and the objective lens is qualified; if not, a red light is output for sharpness and / or center displacement failure, and the objective lens is unqualified.

[0020] Step S006: Remove the inspected objective lens workpiece and repeat steps S001-S005.

[0021] Furthermore, in step S004, after the objective lens is parfocalized, the digital display grating ruler is calibrated to zero for the first time. When inspecting different objective lens workpieces, the object distance difference between different objective lens workpieces can be measured by the digital display value of the digital display grating ruler.

[0022] Furthermore, the sharpness threshold is set to 6, and the center displacement threshold is set to 1; in step S005, it is also necessary to check whether the imaging optical magnification meets the objective lens specification standard.

[0023] Furthermore, the positioning sleeve is detachably mounted on the support of the worktable to accommodate objective lens workpieces of different sizes; after the objective lens workpiece to be inspected is installed on the stepped groove of the mounting base, the objective lens workpiece is positioned in the mounting cavity by the spring latch of the mounting base; the lifting cylinder is driven by a foot switch to move the objective lens workpiece on the mounting base against the positioning sleeve.

[0024] The camera module is slidably mounted on the slide rail of the bracket via a slider seat, and the slider seat is fastened to the slide rail by a limiting bolt. When adjusting the image distance, loosen the limiting bolt on the slider seat, adjust the height of the camera module in the vertical direction, and then tighten the limiting bolt.

[0025] (III) Beneficial Effects

[0026] Compared with existing technologies, the objective lens inspection device provided by this invention has the following advantages: 1) The objective lens workpiece can be locked and positioned on the positioning sleeve by the objective lens lifting and locking mechanism, making it convenient to install and remove the objective lens workpiece and also facilitating the standardization of the image distance between the camera module and the objective lens workpiece, ensuring that the camera module and the objective lens workpiece are coaxially set; 2) The positioning sleeve is detachable and replaceable, and different positioning sleeves can be used to match objective lenses with different outer diameters; 3) The object distance is adjusted by rotating the hand crank of the hand crank lifting device, which drives the reticle and light source to rise and fall as a whole, making the adjustment convenient and precise. Indeed, the object distance difference between different objectives can be read by the digital display value of the digital grating ruler, which can be used for objective lens matching; 4) The objective lens workpiece is placed in the U-shaped mounting cavity of the mounting base, and the objective lens workpiece is limited by the spring clip, which can ensure that the objective lens workpiece is in a vertical state, making it easy to position the objective lens workpiece onto the positioning sleeve; 5) The camera module is slidably mounted on the slide rail of the bracket through the slider seat, which can be used to adjust the image distance between the camera module and the objective lens workpiece; This invention has functions such as parfocal adjustment, objective lens matching, and sharpness detection. Its device is stable and reliable, and its objective lens detection efficiency is high. Attached Figure Description

[0027] Figure 1 This is a perspective view of an objective lens inspection device according to the present invention;

[0028] Figure 2 This is a front view of the objective lens inspection device of the present invention, omitting the worktable;

[0029] Figure 3 This is a perspective view of the objective lens lifting and locking mechanism and the camera module portion of the objective lens inspection device of the present invention;

[0030] Figure 4 For the present invention Figure 3 Enlarged view of A in the middle;

[0031] Figure 5 This is a perspective view of the camera module portion of an objective lens inspection device according to the present invention;

[0032] Figure 6 This is a perspective view of an adjustable light source module of an objective lens inspection device according to the present invention;

[0033] Figure 7 This is a perspective view of the objective lens workpiece of the objective lens inspection device of the present invention;

[0034] Figure 8 This is a physical structural diagram of an objective lens inspection device according to the present invention;

[0035] Figure 9 This is a flowchart of the steps of an objective lens inspection method according to the present invention;

[0036] Figure 10 Screenshot of the imaging and detection parameters of the objective lens workpiece of this invention;

[0037] Figure 11 This is a screenshot of the detection parameters after magnification of the objective lens workpiece of the present invention;

[0038] The component names corresponding to the various labels in the figure are as follows: 1. Worktable; 2. Support; 3. Positioning sleeve; 4. Camera module; 5. Objective lens lifting and locking mechanism; 6. Mounting base; 7. Objective lens workpiece; 8. Mounting cavity; 9. Adjustable light source module; 10. Reticle; 11. Light source; 12. Step groove; 13. Spring pin; 14. Lifting cylinder; 15. Lifting seat; 16. Guide column; 17. Buffer; 18. Connecting plate; 19. Slide rail; 20. Slider seat; 21. Hand crank screw lifting device; 22. Hand crank; 23. Digital display grating ruler; 24. Connecting bracket; 25. Transparent light-diffusing plate; 26. Main lens barrel; 27. Rear objective lens group; 28. Hole; 29. ​​Connecting shaft. Detailed Implementation

[0039] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0040] Example 1:

[0041] See Figures 1 to 8 This invention provides an objective lens inspection device, mainly applicable to stereo microscope objectives. The device specifically includes: a worktable 1, a camera module 4, an objective lens lifting and locking mechanism 5, and an adjustable light source module 9. A bracket 2 is mounted on the worktable 1, and a positioning sleeve 3 is detachably mounted on the bracket 2 along the vertical direction. (See details...) Figure 3 and Figure 4 The positioning sleeve 3 is fixedly installed in the mounting cavity of the bracket 2 by locking screws to accommodate objective lens workpieces 7 of different sizes. The objective lens lifting and locking mechanism 5 lifts the objective lens workpiece 7 upward and abuts it against the positioning sleeve 3. The outer diameter of the upper connecting sleeve of the objective lens workpiece 7 matches the inner diameter of the positioning sleeve 3 (different objective lens workpieces 7 have different outer diameters of their upper connecting sleeves, so different specifications of positioning sleeve 3 can be used to ensure that the image distance between the objective lens workpiece 7 and the camera module 4 is uniform, and that the objective lens workpiece 7 and the camera module 4 are coaxially set). The camera module 4 is axially adjustable and positioned directly above the positioning sleeve 3. See details. Figure 3 and Figure 5 The bracket 2 is equipped with a vertically arranged slide rail 19. The camera module 4 is slidably mounted on the slide rail 19 via a slider seat 20. The slider seat 20 is fastened to the slide rail 19 by a limit bolt.

[0042] See Figure 7 The objective lens workpiece 7 to be inspected is briefly described as follows: it includes a connecting sleeve at the upper end, a main lens barrel 26, and a rear objective lens group 27. The rear objective lens group 27 is provided with a hole 28. The main lens barrel 26 is rotatable, and the rear objective lens group 27 is rotatable.

[0043] See Figure 2 and Figure 3 The objective lens lifting and locking mechanism 5 includes a mounting base 6 located below the positioning sleeve 3 and capable of vertical lifting. The mounting base 6 has a mounting cavity 8 for placing the objective lens workpiece 7. The entire assembly is driven upward to drive the mounting base 6 to abut and lock the objective lens workpiece 7 against the positioning sleeve 3. The objective lens lifting and locking mechanism 5 also includes a lifting cylinder 14 mounted on the worktable 1. In this embodiment, the lifting cylinder 14 is driven by a foot switch. The cylinder shaft of the lifting cylinder 14 is connected to a lifting seat 15, and the mounting base 6 is mounted on the lifting seat 15. A guide post 16 is mounted on the bracket 2 and slides with the lifting seat 15. A buffer 17 is provided on the worktable 1 above the lifting seat 15. The buffer 17 is mounted on the worktable 1 via a connecting plate 18 and a connecting shaft 29. Both the guide post 16 and the connecting shaft 29 have a vertical guiding function to ensure that the objective lens workpiece 7 moves axially in the vertical direction.

[0044] See Figure 2 and Figure 6 The adjustable light source module 9 is located directly below the objective lens workpiece 7, and specifically includes a reticle 10 and a light source 11 that can be moved vertically as a whole. The adjustable light source module 9 includes a hand-cranked screw lifting device 21 vertically mounted on the worktable 1. By rotating the hand crank 22 of the hand-cranked screw lifting device 21, the vertical height of the reticle 10 and the light source 11 can be adjusted as a whole (the hand crank 22 drives the screw to rotate, thereby moving the screw seat vertically, thus realizing the vertical height adjustment of the reticle 10 and the light source 11). A digital display grating ruler 23 is installed on one side of the hand-cranked screw lifting device 21. The reticle 10 and the light source 11 are mounted on the screw seat of the hand-cranked screw lifting device 21 via a connecting bracket 24, and a transparent light-diffusing plate 25 for placing the reticle 10 is installed on the connecting bracket 24. The hand-cranked screw lifting device 21 and the digital display grating ruler 23 can be used to adjust the objective distance of the objective lens to adjust the imaging resolution to the clearest state. Another function of the digital display grating ruler 23 is to measure the object distance difference between different objectives.

[0045] See Figure 2 The camera module 4, positioning sleeve 3, objective lens workpiece 7, and reticle 10 are arranged coaxially in sequence.

[0046] See Figure 3 and Figure 4 The mounting cavity 8 has a U-shaped opening for placing the objective lens workpiece 7. The upper end of the mounting cavity 8 forms a stepped groove 12 for supporting the objective lens workpiece 7 (the lower end face of the connecting sleeve at the upper end of the objective lens workpiece 7 is placed on the stepped groove 12). A spring clip 13 is installed inside the stepped groove 12. After the objective lens workpiece 7 is installed, the spring clip 13 plays a certain limiting role on the objective lens workpiece 7, preventing the objective lens workpiece 7 from falling out of the U-shaped opening of the mounting cavity 8, and ensuring that when the lifting cylinder 14 lifts the objective lens workpiece 7 upward, the outer diameter of the connecting sleeve at the upper end of the objective lens workpiece 7 matches the inner diameter of the positioning sleeve 3.

[0047] Among them, the hydraulic station driving the lifting cylinder 14, the display connected to the camera module 4, and the digital display screen of the digital display grating ruler 23 are not in... Figure 1 As shown in the image.

[0048] The objective lens inspection device of this embodiment can lock and position the objective lens workpiece 7 on the positioning sleeve 3 through the objective lens lifting and locking mechanism 5, and drive it up and down through the lifting cylinder 14. The positioning sleeve 3 is detachable and replaceable, and different positioning sleeves 3 can be used to match objective lenses with different outer diameters, ensuring that the objective lens workpiece 7 and the camera module 4 are coaxial and that their image distance is uniform. The object distance can be adjusted by rotating the hand crank lifting device 21, and the object distance difference between different objective lenses can be read by the digital display value of the digital grating ruler 23, which can be used for objective lens matching. The objective lens workpiece 7 is placed in the U-shaped mounting cavity 8 of the mounting base 6, and the objective lens workpiece 7 is limited by the spring clip 13. The camera module 4 is slidably mounted on the slide rail 19 of the bracket 2 through the slider seat 20, which can be used to adjust the image distance between the camera module 4 and the objective lens workpiece 7.

[0049] Example 2:

[0050] See Figure 7 , Figures 9-11 This embodiment provides a method for inspecting objective lenses, based on the objective lens inspection device of Embodiment 1, and specifically includes the following steps:

[0051] Step S001: Place the objective lens workpiece to be inspected; place the objective lens workpiece 7 on the mounting base 6 of the objective lens lifting and locking mechanism 5; Step S002: Fix the objective lens workpiece and unify the image distance; drive the objective lens workpiece 7 against the positioning sleeve 3 of the bracket 2 by lifting cylinder 14, so that the image distance between the camera module 4 and the objective lens workpiece 7 is fixed and unified; the camera module 4 transmits the image of the reticle 10 to the computer software in real time; Step S003: Parfocal adjustment; rotate the main tube 26 of the objective lens workpiece 7 to adjust the objective lens to the maximum magnification; rotate the hand crank 22 of the adjusting hand crank lifting device 21 to adjust the object distance, and adjust the image at the maximum magnification to the clearest state; continue to rotate the main tube 26 of the objective lens workpiece 7 to adjust the objective lens to the minimum magnification, and rotate the rear lens group 27 of the objective lens (using a screwdriver, etc.) to adjust the image distance. The objective lens assembly 27 is rotated via the abutment hole 28 to adjust the image at the minimum magnification to the clearest state; Step S004, repeat step S003 to complete the parfocal adjustment test (this step is used to verify whether the objective lens parfocal adjustment is in place in step S003); Step S005, objective lens qualification judgment; during the process of rotating the main tube 26 of the objective lens workpiece 7 from the minimum magnification to the maximum magnification, it is judged whether the image clarity is greater than the clarity threshold and whether the center displacement is less than the center displacement threshold; if both are true, a green light is output for clarity and center displacement qualification, and the objective lens is qualified; if not, a red light is output for clarity and / or center displacement failure, and the objective lens is unqualified (if any one of the failure red lights is present, the objective lens is deemed unqualified); Step S006, remove the inspected objective lens workpiece and repeat steps S001-S005.

[0052] Furthermore, in step S004, after the objective lens parfocal adjustment is completed, the digital display grating ruler 23 is zeroed for the first time. When detecting different objective lens workpieces 7, the object distance difference between different objective lens workpieces 7 can be measured through the digital display value of the digital display grating ruler 23, which can be used for objective lens pairing (in actual use, the objective lenses can be graded, and the object distance difference of each grade of objective lens is controlled within 0.02mm to meet the pairing requirements). For example, after two objective lens workpieces 7 have completed the above operation steps, if the digital display value of their digital display grating ruler 23 is within 0.02mm, it is determined that the focal lengths of the two are the same and can be used for objective lens pairing. Compared with the prior art, this embodiment has an objective lens pairing function, and the pairing determination method is convenient.

[0053] In this embodiment, the sharpness threshold is set to 6, and the center displacement threshold is set to 1. The center displacement threshold is defined with reference to the national standard for stereomicroscopes. It is the limit of the deviation of the reticle scale center (original field-of-view center point) from the objective lens during rotation to any other magnification. In this embodiment, a displacement less than 1 is acceptable (the purpose is to ensure that the imaging is linearly magnified / reduced when adjusting the objective lens magnification; large offsets or jitter will affect observation). The sharpness of the objective lens in this embodiment must meet the national standard for stereomicroscopes, verified by an optical resolution test plate. The number of line pairs visible on the optical resolution test plate at the corresponding objective lens magnification must meet the requirements. The sharpness threshold in this embodiment is calculated accordingly. In this embodiment, a sharpness ≥ 6 (6-10) is acceptable. In step S005, it is also necessary to check whether the imaging optical magnification (i.e., magnification) meets the objective lens specifications (the magnification error of the objective lens should not exceed ±5%). See [reference needed]. Figure 11 , Figure 11 This is a parameter diagram showing the parameters of a certain objective lens workpiece 7 when it passes inspection.

[0054] The positioning sleeve 3 is detachably installed on the bracket 2 of the worktable 1 to accommodate objective lens workpieces 7 of different sizes. After the objective lens workpiece 7 to be inspected is installed on the stepped groove 12 of the mounting base 6, the objective lens workpiece 7 is positioned in the mounting cavity 8 by the spring latch 13 of the mounting base 6. The lifting cylinder 14 is driven by the foot switch to lift the objective lens workpiece 7 on the mounting base 6 to abut against the positioning sleeve 3.

[0055] The camera module 4 is slidably mounted on the slide rail 19 of the bracket 2 via the slider seat 20. The slider seat 20 is fastened to the slide rail 19 by the limit bolt. When adjusting the image distance, loosen the limit bolt on the slider seat 20, adjust the height of the camera module 4 in the vertical direction, and then tighten the limit bolt.

[0056] The detection method in this embodiment enables parfocal adjustment of the objective lens, sharpness judgment, and objective lens pairing.

[0057] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A method for inspecting objective lenses, implemented using an objective lens inspection device, the objective lens inspection device comprising: A workbench (1) is provided with a support (2) and a positioning sleeve (3) is detachably installed on the support (2) along the vertical direction. The camera module (4) is axially adjustable and positioned directly above the positioning sleeve (3); The objective lens lifting and locking mechanism (5) includes a mounting base (6) located below the positioning sleeve (3) and capable of vertical lifting and lowering. The mounting base (6) is provided with a mounting cavity (8) for placing the objective lens workpiece (7). The mounting base (6) is driven upward as a whole to lock the objective lens workpiece (7) against the positioning sleeve (3). The adjustable light source module (9) is located directly below the objective lens workpiece (7) and includes a reticle (10) and a light source (11) that can be moved vertically as a whole. The camera module (4), the positioning sleeve (3), the objective lens workpiece (7), and the reticle (10) are arranged coaxially in sequence. Its characteristic is that the objective lens inspection method includes the following steps: Step S001, place the objective lens workpiece to be tested; place the objective lens workpiece (7) to be tested on the mounting base (6) of the objective lens lifting and locking mechanism (5); Step S002: Fix the objective lens workpiece and unify the image distance; drive the objective lens workpiece (7) against the positioning sleeve (3) by lifting cylinder (14) to make the image distance between the camera module (4) and the objective lens workpiece (7) fixed and uniform; the camera module (4) transmits the image of the reticle (10) to the computer software in real time. Step S003, parfocal adjustment; rotate the main tube (26) of the objective lens workpiece (7) to adjust the objective lens to the maximum magnification; rotate the hand crank (22) of the adjusting hand crank lifting device (21) to adjust the object distance and adjust the image at the maximum magnification to the clearest state; continue to rotate the main tube (26) of the objective lens workpiece (7) to adjust the objective lens to the minimum magnification, and adjust the image at the minimum magnification to the clearest state by rotating the rear lens group (27); Step S004: Repeat step S003 to complete the parfocal adjustment detection; Step S005, objective lens qualification judgment; during the process of rotating the main tube (26) of the objective lens workpiece (7) from the minimum magnification to the maximum magnification, judge whether the image sharpness is greater than the sharpness threshold and whether the center displacement is less than the center displacement threshold; if both are true, output a green light indicating that the sharpness and center displacement are qualified, and the objective lens is qualified; if not, output a red light indicating that the sharpness and / or center displacement are unqualified, and the objective lens is unqualified. Step S006: Remove the inspected objective lens workpiece and repeat steps S001-S005.

2. The objective lens inspection method as described in claim 1, characterized in that: In step S004, after the objective lens is parfocalized, the digital display grating ruler (23) is reset to zero for the first time. When detecting different objective lens workpieces (7), the object distance difference between different objective lens workpieces (7) can be measured by the digital display value of the digital display grating ruler (23).

3. The objective lens inspection method as described in claim 1, characterized in that: in, The sharpness threshold is set to 6, and the center displacement threshold is set to 1. In step S005, it is also necessary to check whether the imaging optical magnification meets the objective lens specification standard.

4. The objective lens inspection method as described in claim 1, characterized in that: The positioning sleeve (3) is detachably mounted on the bracket (2) of the worktable (1) to accommodate objective lens workpieces (7) of different sizes; after the objective lens workpiece (7) to be tested is mounted on the stepped groove (12) of the mounting base (6), the objective lens workpiece (7) is positioned in the mounting cavity (8) by the spring latch (13) of the mounting base (6); the lifting cylinder (14) is driven by the foot switch to lift the objective lens workpiece (7) on the mounting base (6) to abut against the positioning sleeve (3); The camera module (4) is slidably mounted on the slide rail (19) of the bracket (2) via a slider seat (20). The slider seat (20) is fastened to the slide rail (19) by a limiting bolt. When adjusting the image distance, loosen the limiting bolt on the slider seat (20), adjust the height of the camera module (4) in the vertical direction, and then tighten the limiting bolt.

5. The objective lens inspection method as described in claim 1, characterized in that: The mounting cavity (8) is U-shaped, and a stepped groove (12) is formed at its upper end for supporting the objective lens workpiece (7). A spring catch (13) is installed inside the stepped groove (12) to prevent the objective lens workpiece (7) from coming out of the U-shaped opening of the mounting cavity (8). The objective lens lifting and locking mechanism (5) also includes a lifting cylinder (14) installed on the worktable (1). The cylinder shaft of the lifting cylinder (14) is connected to a lifting seat (15). The mounting seat (6) is installed on the lifting seat (15). A guide column (16) that slides with the lifting seat (15) is installed on the bracket (2). A buffer (17) is provided above the lifting seat (15) on the worktable (1). The buffer (17) is installed on the worktable (1) through a connecting plate (18) and a connecting shaft (29).

6. The objective lens inspection method as described in claim 1, characterized in that: The bracket (2) is equipped with a vertically arranged slide rail (19). The camera module (4) is slidably mounted on the slide rail (19) via a slider seat (20). The slider seat (20) is fastened to the slide rail (19) by a limiting bolt. The positioning sleeve (3) is fixedly mounted in the mounting cavity of the bracket (2) by a locking screw to accommodate objective lens workpieces (7) of different sizes.

7. The objective lens inspection method as described in claim 1, characterized in that: The adjustable light source module (9) includes a hand-cranked screw lifting device (21) vertically mounted on the workbench (1). The vertical height of the reticle (10) and the light source (11) can be adjusted by rotating the hand crank (22) of the hand-cranked screw lifting device (21). A digital display grating ruler (23) is installed on one side of the hand-cranked screw lifting device (21). The reticle (10) and the light source (11) are mounted on the screw seat of the hand-cranked screw lifting device (21) via a connecting bracket (24). A transparent light-diffusing plate (25) for placing the reticle (10) is installed on the connecting bracket (24).

Images