Semiconductor graphite boat piece processing debris cleaning device

Abstract

A kind of semiconductor graphite boat piece processing chip cleaning device, it relates to graphite material processing equipment field, including chip box, air pump, chip suction pipeline and connecting buckle, the air pump is connected to the rear portion of the chip box, the chip box is separated by filter screen at the air pump connection, one end of the chip suction pipeline is communicated with the front portion of the chip box, one end extends to the lathe tool of graphite processing center, the chip suction pipeline is fixed to the lathe tool by the connecting buckle, the connecting buckle is circular arc bent plate, two ends of the connecting buckle are fixed to the lathe tool of graphite processing center by screw, the flying chip generated when lathe tool of graphite processing center is cut graphite boat piece is efficiently absorbed and cleaned, and the cleanliness of working environment and processing efficiency are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of graphite material processing equipment, in particular to a semiconductor graphite boat piece processing debris cleaning device. BACKGROUND

[0002] Recently, due to the extremely excellent properties of semiconductor graphite material in the physical level, the semiconductor graphite has been greatly developed in the width and depth level of industrial use, and the industries and enterprises involving semiconductor graphite have developed rapidly. However, in the production and processing of graphite products, it is necessary to cut them, and a machining center is usually used for operation, which will produce a lot of graphite debris and flying debris, not only polluting the working environment, but also affecting the work of the machining center tool. The Chinese patent document with publication number CN105415739B discloses a graphite machining center with a dust collection device. In order to collect the graphite dust, the dust collection device is arranged on the top of the graphite machining chamber. However, in the actual production cutting or cutting process, most of the graphite debris tend to concentrate at the contact between the cutting tool and the graphite, and will not splash to the top of the machining chamber, but will splash and accumulate on the surface of the graphite material around the tool. The technical scheme cannot absorb and clean the debris generated in the cutting process in the first time. SUMMARY

[0003] The present application provides a semiconductor graphite boat piece processing debris cleaning device, which can efficiently absorb and clean the flying debris generated when the machining center tool cuts the graphite boat piece, and improve the cleanliness of the working environment and the processing efficiency.

[0004] The above technical purpose of the present application is achieved by the following technical scheme: a semiconductor graphite boat piece processing debris cleaning device, comprising a debris box, a suction pump, a debris suction pipeline and a connecting buckle, the suction pump is connected to the rear part of the debris box, the debris box and the suction pump connection are separated by a filter screen, one end of the debris suction pipeline communicates with the front part of the debris box, and the other end extends to the tool of the graphite machining center, the debris suction pipeline is fixed at the tool through the connecting buckle, the connecting buckle is a circular arc-shaped bent plate, and the two ends of the connecting buckle are fixed at the tool of the graphite machining center through screws.

[0005] As preferred, the dust absorption pipeline comprises a straight suction pipe, a sieve pipe and a particle net, the straight suction pipe and the sieve pipe are connected through a pipe end connecting part, the pipe end connecting part comprises a first protrusion and a second protrusion, the first protrusion is a spacing protrusion protruding inward from an end wall of the straight suction pipe, the first protrusion is provided with a first groove, the first groove is a groove extending upward from a bottom surface of the first protrusion, the second protrusion is a spacing protrusion protruding inward from an upper end wall of the sieve pipe, the second protrusion is provided with a second plug, the second plug is a straight plate extending upward from an upper surface of the first protrusion, a surface of the second plug is provided with horizontally extending protruding horizontal strips, the protruding horizontal strips are vertically and spacedly distributed, the particle net is provided with plug sleeve holes for sleeving around the second plug, the plug sleeve holes are arranged in an array around a periphery of the particle net.

[0006] As preferred, the straight suction pipe is further provided with a transverse insertion pin and a first through hole, the first through hole is a through hole extending horizontally from a wall surface of the straight suction pipe to communicate with the first groove, the second plug is provided with a second through hole, the second through hole is a through hole horizontally penetrating the second plug.

[0007] As preferred, the sieve pipe is further provided with a collecting part for collecting graphite debris on the particle net.

[0008] As preferred, the sieve pipe is provided with a pull-out opening, the pull-out opening is a semicircular slot penetrating a side surface of the sieve pipe, the collecting part comprises a wall block, a push-pull handle and a collecting ring plate, the push-pull handle is used for pushing and pulling the wall block located in the pull-out opening, the wall block is a semicircular bent plate, the collecting ring plate is a ring surface outwardly extending from a bottom edge of an inner side surface of the wall block.

[0009] As preferred, the collecting ring plate is curved and extended inwardly and upwardly from the bottom edge of the inner side surface of the wall block.

[0010] As preferred, the wall block is further provided with a cover joint plate, the cover joint plate is a planar plate extending upwardly and downwardly from upper and lower side edges of the wall block.

[0011] As preferred, a surface of the collecting ring plate is provided with fluid grooves, the fluid grooves are spherical concave grooves recessed inwardly from the surface of the collecting ring plate, the fluid grooves are spacedly distributed on the surface of the collecting ring plate.

[0012] As preferred, the push-pull handle is a circular ring rod horizontally extending outwardly from an outer side surface of the wall block, vertical protruding strips are spacedly distributed on an inner side surface of the push-pull handle.

[0013] In summary, the present application has the following beneficial effects.

[0014] The graphite debris pipeline is fixed to the turning tool by the connecting buckle, so that the flying debris generated when the turning tool of the machining center cuts the graphite boat piece can be efficiently absorbed and cleaned, and the cleanliness of the working environment and the machining efficiency are improved.

[0015] The particle net is connected to the second protrusion through the sleeve hole of the plug-in plate, is stably extruded between the first protrusion and the second protrusion, and can also realize the particle size of the filtered graphite debris by replacing the particle net, so that graphite debris with different particle diameters is targetedly treated or the particle size consistency of the graphite debris entering the debris box is better.

[0016] The graphite debris entering the sieve filter pipe is first filtered by the particle net in the collection part, and the graphite debris with a larger diameter blocked by the particle net can be collected. The graphite debris on the collection ring plate is taken out by operating the push-pull handle.

[0017] The fluid grooves evenly distributed on the surface of the collection ring plate can improve the stability of the surface airflow, so that the graphite debris can be more stable on the surface of the collection ring plate and less affected by the airflow above to move randomly. In addition, the recessed fluid grooves can also stabilize the graphite debris and prevent random rolling. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0019] Figure 1 It is a schematic diagram of the overall structure of the cleaning device.

[0020] Figure 2 It is a schematic diagram of the structure of the upper pipe end connecting part of the straight suction pipe.

[0021] Figure 3 It is a schematic diagram of the structure of the upper pipe end connecting part of the sieve filter pipe.

[0022] Figure 4 It is an enlarged schematic diagram of the second plug-in plate.

[0023] Figure 5 It is a sectional view of the collection part.

[0024] Figure 6 It is a schematic diagram of the overall structure of the collection part.

[0025] Figure 7 It is a schematic diagram of the structure of the connection between the straight suction pipe and the sieve filter pipe.

[0026] Figure 8 It is Figure 7Figure 1 is a schematic view of the first recess and the first plugboard connection.

[0027] Figure 1 is a schematic view of the first recess and the first plugboard connection. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings.

[0029] Embodiment 1

[0030] As shown in Figure 1, a semiconductor graphite wafer processing debris cleaning device includes a debris box 1, a suction pump 2, a debris suction pipeline 3, and a connecting buckle 4. The suction pump 2 is connected to the rear part of the debris box 1. The debris box 1 and the suction pump 2 are separated by a filter screen. One end of the debris suction pipeline 3 is connected to the front part of the debris box 1, and the other end extends to the turning tool of the graphite processing center. The debris suction pipeline 3 is fixed to the turning tool through the connecting buckle 4. The connecting buckle 4 is a circular arc-shaped bent plate. The two ends of the connecting buckle 4 are fixed to the turning tool of the graphite processing center through screws. Figures 1 to 8

[0031] ​The dust suction pipe 3 comprises a straight suction pipe 5, a sieve pipe 6 and a particle net, the straight suction pipe 5 and the sieve pipe 6 are connected through a pipe end connecting part, the pipe end connecting part comprises a first protrusion and a second protrusion, the first protrusion is a spaced protrusion protruding inward from the end wall of the straight suction pipe 5, the first protrusion has a first groove 8, the first groove 8 is a groove extending upward from the bottom surface of the first protrusion, the second protrusion is a spaced protrusion protruding inward from the upper end wall of the sieve pipe 6, the second protrusion has a second plug 9, the second plug 9 is a straight plate extending upward from the upper surface of the first protrusion, the surface of the second plug 9 has horizontally extending protruding horizontal strips, the protruding horizontal strips are vertically and spacedly distributed, the particle net has plug hole sleeves for sleeving around the second plug 9, the plug hole sleeves are arranged in an array around the circumference of the particle net. The straight suction pipe 5 and the sieve pipe 6 are connected through the pipe end connecting part, that is, the second plug 9 on the second protrusion is pushed upward into the first groove 8, the stability of the second plug 9 in the first groove 8 is improved through the contact between the protruding horizontal strips and the surface of the first groove 8, and the connection of the straight suction pipe 5 and the sieve pipe 6 is realized. The particle net is connected to the second protrusion through the plug hole sleeves, and is stably pressed between the first protrusion and the second protrusion. In particular, the particle size of the filtered graphite dust can be changed by replacing the particle net, so that graphite dust with different particle diameters is treated in a targeted manner or the particle size consistency of the graphite dust entering the dust box 1 is better, wherein, Figure 3 Although the net surface of the middle part of the particle net is not shown, it can be easily concluded that when different graphite dust particles need to be sieved, a net surface with different sizes of holes can be selected, and the shape of the net surface can be like a shuttlecock net surface, a strainer shape, etc.

[0032] The straight suction pipe 5 also has a transverse plug pin 11 and a first through hole, the first through hole is a through hole extending horizontally from the wall of the straight suction pipe 5 to the first groove 8, the second plug 9 has a second through hole, the second through hole is a through hole extending horizontally through the second plug 9. One end of the transverse plug pin 11 can be connected to the machining center by means of a wire or a chain, etc., the transverse plug pin 11 is inserted through the first through hole until it is inserted into the second through hole, thereby stably connecting the straight suction pipe 5 and the sieve pipe 6.

[0033] The sieve pipe 6 also has a collecting part for collecting graphite dust on the particle net.

[0034] The sieve pipe 6 has a pull-out hole, the pull-out hole is a semicircular slot extending through the side of the sieve pipe 6, the collecting part comprises a wall block 12, a push-pull handle and a collecting ring plate 13, the push-pull handle is used to push and pull the wall block 12 located in the pull-out hole, the wall block 12 is a semicircular bent plate, and the collecting ring plate 13 is a ring surface extending outward from the inner side surface bottom edge of the wall block 12. The graphite dust entering the sieve pipe 6 is first filtered by the particle net through the collecting part, and the graphite dust with a larger diameter blocked by the particle net can be collected. The graphite dust on the collecting ring plate 13 can be taken out by operating the push-pull handle.

[0035] The collecting ring plate 13 is curved and extends inward and upward from the inner side surface bottom edge of the wall block 12. The curved and extended collecting ring plate 13 can not only prevent the graphite debris on the surface of the collecting ring plate 13 from falling off, but also has the effect of converging the airflow, so that the flow rate in the middle of the collecting ring plate 13 is accelerated, and the suction force at this position is increased.

[0036] The wall block 12 also has a cover joint plate 14, which is a flat plate extending upward and downward from the upper and lower side edges of the wall block 12. The cover joint plate 14 can improve the sealing performance of the pull-out opening, preventing graphite debris from leaking.

[0037] The surface of the collecting ring plate 13 has fluid grooves 15, which are spherical recesses recessed inward from the surface of the collecting ring plate 13, and the fluid grooves 15 are evenly distributed on the surface of the collecting ring plate 13. The evenly distributed fluid grooves 15 on the surface of the collecting ring plate 13 can improve the stability of the airflow on the surface, so that the graphite debris can be more stable on the surface of the collecting ring plate 13 and less affected by the airflow above. In addition, the recessed fluid grooves 15 can also stabilize the graphite debris and prevent it from rolling randomly.

[0038] The push-pull handle bar is a circular ring rod extending horizontally outward from the outer side surface of the wall block 12, and the inner side surface of the push-pull handle bar has vertically distributed vertical protruding bars. The through hole of the circular ring rod is vertically arranged, and the vertically distributed vertical protruding bars can increase the surface roughness and are easier to clean, avoiding the accumulation of graphite debris.

[0039] In the description of the present application, it should be understood that the terms "front and back", "left and right" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or components referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the application.

[0040] Of course, in the present technical solution, those skilled in the art should understand that the term "one" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of one element can be one, and in another embodiment, the number of the element can be multiple, and the term "one" cannot be understood as a limitation on the number.

[0041] The above is only the preferred specific embodiment of the present application, but the protection scope of the present application is not limited thereto, and any changes or replacements easily thought of by those skilled in the art under the technical hints of the present application should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A device for cleaning debris during semiconductor graphite boat processing, characterized in that, Including the debris tank (1), the air pump (2), the dust extraction pipeline (3) and the connecting buckle (4), the air pump (2) is connected to the rear of the debris tank (1), the debris tank (1) is separated from the air pump (2) by filter screen, one end of the dust extraction pipeline (3) is communicated with the front of the debris tank (1), one end extends to the turning tool of graphite machining center, the dust extraction pipeline (3) is fixed to the turning tool through the connecting buckle (4), the connecting buckle (4) is circular arc bent plate, both ends of the connecting buckle (4) are fixed to the turning tool of graphite machining center through screws; The dust extraction pipeline (3) includes straight suction pipe (5), sieve pipe (6) and particle net, the straight suction pipe (5) and the sieve pipe (6) are connected through pipe end connecting part, the pipe end connecting part includes first lug and second lug, the first lug is interval lug protruding inward from the end wall of the straight suction pipe (5), the first lug has first recess (8), the first recess (8) is recess extending upward from the bottom surface of the first lug, the second lug is interval lug protruding inward from the upper end wall of the sieve pipe (6), the second lug has second plug-in plate (9), the second plug-in plate (9) is straight plate extending upward from the upper surface of the first lug, the surface of the second plug-in plate (9) has protruding horizontal strip extending horizontally, the protruding horizontal strips are vertically and spaced, the particle net has plug-in plate sleeve hole for sleeving around the second plug-in plate (9), the plug-in plate sleeve hole is arranged in the circumferential array around the particle net; The sieve pipe (6) also has collecting part for collecting graphite debris on the particle net; The sieve pipe (6) has pull opening, the pull opening is semicircular slot penetrating through the side surface of the sieve pipe (6), the collecting part includes wall block (12), push-pull handle and collecting ring plate (13), the push-pull handle is used for pushing and pulling the wall block (12) located in the pull opening, the wall block (12) is semicircular bent plate, the collecting ring plate (13) is annular surface outwardly extending from the inner side surface bottom edge of the wall block (12); The collecting ring plate (13) is curved and extended inward and upward from the inner side surface bottom edge of the wall block (12); The surface of the collecting ring plate (13) has fluid groove (15), the fluid groove (15) is spherical recess recessed inward from the surface of the collecting ring plate (13), the fluid grooves (15) are spaced on the surface of the collecting ring plate (13).

2. The semiconductor graphite boat piece processing debris cleaning device according to claim 1, characterized by, The straight suction pipe (5) also has transverse plug-in pin (11) and first through hole, the first through hole is through hole extending horizontally from the wall surface of the straight suction pipe (5) to communicate with the first recess (8), the second plug-in plate (9) has second through hole, the second through hole is through hole penetrating horizontally through the second plug-in plate (9).

3. The semiconductor graphite puck processing debris cleaning apparatus of claim 1, wherein, The wall block (12) also has cover joint plate (14), the cover joint plate (14) is plane plate extending upward and downward from the upper and lower side edges of the wall block (12).

4. The semiconductor graphite puck processing debris cleaning apparatus of claim 1, wherein, The push-pull handle is a circular ring rod horizontally extending outwards from the outer side surface of the wall block (12), and vertical protruding strips are distributed on the inner side surface of the push-pull handle.

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