Device and method for detecting assembly gap of hemispherical resonant gyroscope using circumferential multipole spectrum ranging

Abstract

The present invention relates to a circumferential multipole spectral ranging hemispherical resonator gyroscope assembly clearance detection device and method. By arranging multiple dispersive confocal probes along the circumference of a hemispherical resonator gyroscope having a spherical electrode structure and rationally adjusting the posture and position of the dispersive confocal probes using an adjustment table and a motion table, the present invention can accurately measure the spatial radial assembly clearance between the hemispherical resonator and the resonator gyroscope base at multiple circumferential points, providing an effective adjustment basis for subsequent assembly and adjustment. Without relying on any capacitance detection information, the present invention can invert multipole spatial radial assembly clearance data to obtain key system assembly parameters such as the transverse and longitudinal assembly clearances and assembly coaxiality between the hemispherical resonator and the resonator gyroscope base. Furthermore, the measurement results are stable and have low requirements for working environment conditions, thus avoiding the problem in existing capacitance detection where the measured value is easily affected by ambient temperature, humidity, and other conditions.

Description

Technical Field

[0001] The present invention relates to the field of precision measurement technology, in particular to a device and method for detecting an assembly gap of a circumferential multipole spectrum ranging hemispherical resonant gyroscope. Background Art

[0002] The hemispherical resonator gyroscope (HRG) is one of the most advanced and core sensors in current inertial navigation systems, possessing significant civilian and military applications. It primarily consists of a HRG resonator made of high-quality fused quartz and a resonator gyroscope base. The resonator gyroscope base can be further categorized by its structure as either a spherical electrode structure or a planar electrode structure. Precision assembly technology plays a crucial role in the HRG's manufacturing process, significantly impacting its overall performance.

[0003] Chinese patent application CN114459449A discloses a method for inspecting the assembly quality of a hemispherical resonator gyroscope (HRG) resonator and a flat electrode. By establishing a corresponding relationship between the equivalent assembly capacitance and the equivalent assembly gap between the HRG and the flat electrode, the equivalent assembly capacitance is used to accurately characterize the equivalent assembly gap, which serves as a key indicator for evaluating the assembly quality of the HRG and the flat electrode. Chinese patent application CN113804172A discloses a precision assembly device and method for a HRG with a planar electrode structure. This device uses a spectral confocal sensor fixed to a multi-dimensional adjustment mount to measure the gap between the HRG and the HRG base. This device, in conjunction with a differential capacitance detection device, enables precise measurement and adjustment of the gap and radial position deviation between the HRG and the base electrode.

[0004] Although the above-mentioned method for measuring the assembly gap of a hemispherical resonant gyroscope overcomes the defects of the traditional method of using standard gauge blocks to measure the gap, such as high requirements on the outer dimensions of the gauge block, difficulty in gap adjustment, and easy scratches on the hemispherical resonant gyroscope, it also leads to problems such as high complexity of the gap measurement model and device and poor universality. It cannot be applied to other types of hemispherical resonant gyros except for planar electrode structures. At present, no relevant reports on the assembly gap detection technology of hemispherical resonant gyros with spherical electrode structures have been found. Summary of the Invention

[0005] In view of the shortcomings of the prior art, the present invention proposes a device and method for detecting the assembly gap of a circumferential multi-pole spectrum ranging hemispherical resonant gyroscope.

[0006] The technical solutions of the present invention are as follows:

[0007] A circumferential multipole spectrum ranging hemispherical resonator gyroscope assembly gap detection device includes a marble vibration isolation table, a motion table support seat, a Z-axis long-stroke motion table, a six-degree-of-freedom adjustment table, a flexible non-destructive fixture, a hemispherical resonator, a dispersive confocal probe, a dispersive confocal controller, an angle fine-tuning turntable, a probe fixing bracket, a resonant gyroscope base, and a two-dimensional precision translation table. The motion table support seat is arranged on the marble vibration isolation table, the Z-axis long-stroke motion table is fixed on the motion table support seat, the six-degree-of-freedom adjustment table is fixed on the Z-axis long-stroke motion table, the flexible non-destructive fixture clamps the hemispherical resonator and is fixed on the six-degree-of-freedom adjustment table, the dispersive confocal probe is connected to the dispersive confocal controller and is fixed to the probe fixing bracket through the angle fine-tuning turntable, the resonant gyroscope base is arranged on the two-dimensional precision translation table, and the two-dimensional precision translation table is fixed on the marble vibration isolation table.

[0008] Furthermore, the Z-axis long-stroke motion stage is used to control the vertical movement of the probe fixing bracket, and its motion resolution is better than 0.3 μm and its repeatability is better than 1 μm.

[0009] Furthermore, a plurality of angle fine-tuning turntables are evenly arranged on the probe fixing bracket along the circumference of the hemispherical resonant gyroscope, and a dispersive confocal probe is fixed on the angle fine-tuning turntable.

[0010] Furthermore, the angle fine-tuning turntable is used to adjust the inclination angle between the dispersive confocal probe and the axis of the hemispherical resonant gyroscope, and the adjustment resolution is better than ±1′.

[0011] Furthermore, the dispersive confocal probe has a measurement range of 0.2 to 1.2 mm, a longitudinal measurement resolution better than 0.1 μm, and a lateral measurement resolution better than 5 μm.

[0012] Furthermore, the dispersive confocal probe generates spectral dispersion and captures the reflected spectrum to the dispersive confocal controller, and obtains the spatial radial assembly gap by extracting the spectral peak position and inverting the inner and outer surface position information of the hemispherical resonator.

[0013] Furthermore, the six-degree-of-freedom adjustment platform can realize translation and rotational motion along the X, Y, and Z directions, and can be used to adjust the spatial position and posture of the hemispherical resonator to facilitate assembly.

[0014] The method for detecting the assembly gap of a circumferential multi-pole spectrum ranging hemispherical resonant gyroscope comprises the following steps:

[0015] S1: Fix the hemispherical resonator and resonant gyro base on the six-degree-of-freedom adjustment stage and the two-dimensional precision translation stage respectively, and clamp all dispersive confocal probes at the same height on the angle fine-tuning turntable;

[0016] S2: Taking the No. 1 dispersive confocal probe as an example, adjust the 2D precision translation stage to move the resonant gyro base. At the same time, control the Z-axis long-stroke motion stage to move the probe fixed bracket so that the resonant gyro base surface is near the end of the dispersive confocal probe range. The measured distance to the resonant gyro base surface is D 11 (The first number in the subscript indicates that the distance measurement value corresponds to the No. 1 dispersive confocal probe);

[0017] S3: Fine-tune the angle of the turntable back and forth to make the spectrum peak received by the dispersive confocal controller reach the maximum value and ensure that the axis of the dispersive confocal probe intersects the center of the sphere on the surface of the resonant gyroscope base;

[0018] S4: Adjust the six-degree-of-freedom adjustment stage to complete the rough assembly between the hemispherical resonator and the resonant gyroscope base, and record the distance D from the upper surface of the hemispherical resonator measured at this time. 12 Distance D from the lower surface 13 ;

[0019] S5: Consider the refraction of light on the distance D from the lower surface of the hemispherical resonator 13 The influence of the measurement results, the geometric optical compensation model is established by ray tracing, which can further reduce the lower surface distance D 13m Indicated as D 12 +k(D 13 -D 12 ), where k represents the compensation coefficient;

[0020] S6: Therefore, the radial assembly clearance of the hemispherical resonant gyroscope monopole can be expressed as δ1 = D 11 -D 13m ;

[0021] S7: Repeat steps S2 to S6 for all dispersive confocal probes until the radial assembly gaps δ1 to δ1 of each pole space are obtained. n .

[0022] Furthermore, the measured spatial radial assembly clearance data can be used to further calculate key assembly parameters such as the transverse and longitudinal assembly clearances and assembly coaxiality between the hemispherical resonator and the resonant gyroscope base.

[0023] Furthermore, the method can also be used for precise online measurement of the assembly gap of a hemispherical resonant gyroscope and real-time adjustment of the hemispherical resonant gyroscope attitude during its assembly process.

[0024] The beneficial effects of the present invention are:

[0025] 1. A high-precision non-contact precision detection technology for the assembly gap of a hemispherical resonator gyroscope with a spherical electrode structure is provided. By arranging multiple dispersive confocal probes along the circumference of the hemispherical resonator gyroscope and rationally adjusting the posture and position of the dispersive confocal probes using an adjustment table and a motion table, the radial assembly gap between the hemispherical resonator and the resonator gyroscope base at multiple points along the circumference can be measured.

[0026] 2. By establishing a simple geometric optical compensation model to compensate for the gap measurement results, the assembly gap measurement accuracy can reach 0.1μm, which is much higher than the existing hemispherical resonator gyroscope assembly gap measurement method. The measurement data can provide an accurate and effective adjustment basis for the subsequent installation and adjustment of the hemispherical resonator and resonator gyroscope base attitude and position.

[0027] 3. In addition to the general advantages of non-contact measurement, the optical measurement method adopted can obtain the key parameters for evaluating the system assembly quality, such as the transverse and longitudinal assembly gaps and assembly coaxiality between the hemispherical resonator and the resonant gyroscope base, by inverting the spatial radial assembly gap data measured by the multipole dispersive confocal probe without the need for any capacitance detection information. The measurement results are stable and have low requirements for working environment conditions, avoiding the problem that the measurement values ​​of the currently used capacitance detection method are easily affected by environmental conditions such as ambient temperature and humidity. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is the overall structural diagram of the detection device of the present invention.

[0029] Figure 2 This is a schematic diagram of the principle of the dispersive confocal probe of the present invention for measuring a hemispherical resonator.

[0030] Figure 3 This is a schematic diagram of the principle of using the dispersive confocal probe of the present invention to measure a resonant gyroscope hemisphere.

[0031] Figure 4 Schematic diagram of measuring the assembly gap between the hemispherical resonator and the resonant gyroscope base of the present invention.

[0032] Figure 5 Schematic diagram of the detection of the lateral assembly gap and coaxiality of the circumferential multi-pole of the hemispherical resonator gyroscope of the present invention. DETAILED DESCRIPTION

[0033] In order to make the objectives, technical solutions and advantages of the present invention more clear, the following is a further detailed description with reference to the accompanying drawings and embodiments.

[0034] The present invention discloses a circumferential multi-pole spectrum ranging hemispherical resonant gyroscope assembly gap detection device, such as Figure 1As shown, it includes a marble vibration isolation table 1, a motion table support base 2, a Z-axis long-stroke motion table 3, a six-degree-of-freedom adjustment table 4, a flexible non-destructive fixture 5, a hemispherical resonator 6, a dispersive confocal probe 7, a dispersive confocal controller 8, an angle fine-tuning turntable 9, a probe fixing bracket 10, a resonant gyroscope base 11, and a two-dimensional precision translation stage 12. The motion table support base 2 is set on the marble vibration isolation table 1, the Z-axis long-stroke motion table 3 is fixed to the motion table support base 2, the six-degree-of-freedom adjustment table 4 is fixed to the Z-axis long-stroke motion table 3, the flexible non-destructive fixture 5 clamps the hemispherical resonator 6 and is fixed to the six-degree-of-freedom adjustment table 4, the dispersive confocal probe 7 is connected to the dispersive confocal controller 8 and is fixed to the probe fixing bracket 10 via the angle fine-tuning turntable 9, the resonant gyroscope base 11 is set on the two-dimensional precision translation stage 12, and the two-dimensional precision translation stage 12 is fixed to the marble vibration isolation table 1.

[0035] Furthermore, the Z-axis long-stroke motion stage 3 is used to control the vertical movement of the probe fixing bracket 10 , and its motion resolution is better than 0.3 μm and its repeatability is better than 1 μm.

[0036] Furthermore, a plurality of angle fine-tuning turntables 9 are evenly arranged on the probe fixing bracket 10 along the circumference of the hemispherical resonant gyroscope, and a dispersive confocal probe 7 is fixed on the angle fine-tuning turntable.

[0037] Furthermore, the angle fine-tuning turntable 9 is used to adjust the inclination angle between the dispersive confocal probe 7 and the axis of the hemispherical resonant gyroscope, and the adjustment resolution is better than ±1′.

[0038] Furthermore, the measuring range of the dispersive confocal probe 7 is 0.2-1.2 mm, the longitudinal measuring resolution is better than 0.1 μm, and the lateral measuring resolution is better than 5 μm.

[0039] Furthermore, the dispersive confocal probe 7 generates spectral dispersion and captures the reflected spectrum to the dispersive confocal controller 8, and obtains the spatial radial assembly gap by extracting the spectral peak position and inverting the inner and outer surface position information of the hemispherical resonator.

[0040] like Figure 2 As shown in (a), the dispersion spectrum generated by the dispersive confocal probe 7 is focused on the inner and outer surfaces of the assembled hemispherical resonator 6, and the dispersive confocal controller 8 receives and extracts the peak of the reflected confocal spectrum signal, as shown in FIG. Figure 2 As shown in (b), the spectral wavelengths corresponding to the peaks of the spectral signal are λ1 and λ2 respectively. By mapping the calibrated known spectral wavelength λ with the measured distance value D, the final distance measurement values ​​D(λ1) and D(λ2) can be obtained. Figure 3 As shown in (a), the dispersion spectrum generated by the dispersive confocal probe 7 is focused on the outer surface of the assembled resonant gyroscope base 11, as shown in FIG. Figure 3As shown in (b), the spectral wavelength corresponding to the peak of the spectral signal received by the dispersive confocal controller 8 is λ3. The final distance measurement value D(λ3) can be obtained through the mapping relationship between the spectral wavelength and the measured distance value.

[0041] Furthermore, the six-degree-of-freedom adjustment platform 4 can realize translation and rotational motion along the X, Y, and Z directions, and can be used to adjust the spatial position and posture of the hemispherical resonator 6 for easy assembly.

[0042] The method for detecting the assembly gap of a circumferential multi-pole spectrum ranging hemispherical resonant gyroscope comprises the following steps:

[0043] S1: Fix the hemispherical resonator 6 and the resonant gyro base 11 to the six-degree-of-freedom adjustment stage 4 and the two-dimensional precision translation stage 12 respectively, and clamp all the dispersive confocal probes 7 at the same height on the angle fine-tuning turntable 9;

[0044] S2: Adjust the No. 1 dispersive confocal probe. First, adjust the two-dimensional precision translation stage 12 to move the resonant gyro base 11. At the same time, control the Z-axis long-stroke motion stage 3 to move the probe fixing bracket 10 so that the surface of the resonant gyro base 11 is near the end of the range of the dispersive confocal probe 7. The measured distance to the resonant gyro base surface is D 11 (The first number in the subscript indicates that the distance measurement value corresponds to the No. 1 dispersive confocal probe);

[0045] S3: fine-tune the inclination of the turntable 9 back and forth so that the spectrum peak received by the dispersive confocal controller 8 reaches the maximum value, ensuring that the axis of the dispersive confocal probe intersects the center of the sphere on the surface of the resonant gyroscope base;

[0046] S4: Adjust the six-degree-of-freedom adjustment platform 4 to complete the rough assembly between the hemispherical resonator 6 and the resonant gyro base 11, and record the distance D from the upper surface of the hemispherical resonator measured at this time. 12 Distance D from the lower surface 13 ;

[0047] S5: Consider the refraction of light on the distance D from the lower surface of the hemispherical resonator 13 The influence of the measurement results, the geometric optical compensation model is established by ray tracing, which can further reduce the lower surface distance D 13m Expressed as:

[0048] D 12 +k(D 13 -D 12 ), where k represents the compensation coefficient;

[0049] S6: The radial assembly clearance of the hemispherical resonant gyroscope monopole can be expressed as δ1 = D 11 -D 13m ;

[0050] S7: Repeat steps S2 to S6 for all dispersive confocal probes 7 until the radial assembly gaps δ1 to δ n .

[0051] As a preferred embodiment, the measured spatial radial assembly clearance data can be used to further calculate key assembly parameters such as the transverse and longitudinal assembly clearances and assembly coaxiality between the hemispherical resonator and the resonant gyroscope base.

[0052] like Figure 4 As shown in the figure, the radial assembly gap δ can be obtained by measuring the position of the resonant gyro base and the inner wall of the hemispherical resonator before and after assembly using a dispersive confocal probe. r (corresponding to the spatial radial assembly clearance δ1~δ n ), and the horizontal and vertical assembly clearances can be approximately expressed as δ x ≈δ r / cosθ,δ y ≈δ r / sinθ, where θ is the angle between the dispersive confocal probe and the bottom surface of the resonant gyroscope base. Figure 5 As shown in the figure, the transverse assembly gap values ​​of each pole measured by the multi-pole dispersive confocal probe evenly distributed around the hemispherical resonant gyroscope are δx1, δx2, δ x3 and δ x4 Based on these lateral assembly clearance values, the assembly coaxiality Δ between the hemispherical resonator 6 and the resonant gyro base 11 can be further calculated. x1 =δ x2 -δ x1 and Δ x2 =δ x3 -δ x4 .

[0053] As a preferred embodiment, the method can also be used for precise online measurement of the assembly gap of a hemispherical resonator gyroscope and real-time adjustment of the attitude of the hemispherical resonator gyroscope during its assembly process.

[0054] It should be emphasized that the above embodiments are intended only to illustrate the technical concepts and features of the present invention. Their purpose is to enable those skilled in the art to understand the contents of the present invention and implement them accordingly. They are not intended to limit the scope of protection of the present invention. Any equivalent changes or modifications made in accordance with the spirit of the present invention are intended to be covered by the scope of protection of the present invention.

Claims

1. A method for detecting the assembly gap of a hemispherical resonant gyroscope using circumferential multipole spectral ranging, characterized in that: The following steps are involved: S1: Fix the hemispherical resonator and resonant gyro base on the six-degree-of-freedom adjustment stage and the two-dimensional precision translation stage respectively, and clamp all dispersive confocal probes at the same height on the angle fine-tuning turntable; S2: Adjust the No. 1 dispersive confocal probe. First, adjust the two-dimensional precision translation stage to move the resonant gyro base. At the same time, control the Z-axis long-stroke motion stage to move the probe fixed bracket so that the resonant gyro base surface is near the end of the dispersive confocal probe range. The measured distance from the resonant gyro base surface is D 11 ; S3: Fine-tune the angle of the turntable back and forth to make the spectrum peak received by the dispersive confocal controller reach the maximum value and ensure that the axis of the dispersive confocal probe intersects the center of the sphere on the surface of the resonant gyroscope base; S4: Adjust the six-degree-of-freedom adjustment stage to complete the rough assembly between the hemispherical resonator and the resonant gyroscope base, and record the distance D from the upper surface of the hemispherical resonator measured at this time. 12 Distance D from the lower surface 13 ; S5: Consider the refraction of light on the distance D from the lower surface of the hemispherical resonator 13 In order to determine the influence of the measurement results, a geometric optical compensation model was established by ray tracing, and the lower surface distance D was further 13m Indicated as D 12 +k(D 13 -D 12 ), where k represents the compensation coefficient; S6: Therefore, the radial assembly clearance of the hemispherical resonant gyroscope monopole can be expressed as δ1 = D 11 -D 13m ; S7: Repeat steps S2 to S6 for all dispersive confocal probes until the radial assembly gaps δ1 to δ1 of each pole space are obtained. n ; The measured spatial assembly clearance data can be used to further calculate the horizontal and vertical assembly clearances and assembly coaxiality between the hemispherical resonator and the resonant gyroscope base. A circumferential multipole spectrum ranging hemispherical resonator gyroscope assembly gap detection device comprises a marble vibration isolation table, a motion table support seat, a Z-axis long-stroke motion table, a six-degree-of-freedom adjustment table, a flexible non-destructive fixture, a hemispherical resonator, a dispersive confocal probe, a dispersive confocal controller, an angle fine-tuning turntable, a probe fixing bracket, a resonant gyroscope base, and a two-dimensional precision translation table; the motion table support seat is arranged on the marble vibration isolation table, the Z-axis long-stroke motion table is fixed on the motion table support seat, the six-degree-of-freedom adjustment table is fixed on the Z-axis long-stroke motion table, the flexible non-destructive fixture clamps the hemispherical resonator and is fixed on the six-degree-of-freedom adjustment table, the dispersive confocal probe is connected to the dispersive confocal controller and is fixed to the probe fixing bracket via the angle fine-tuning turntable, the resonant gyroscope base is arranged on the two-dimensional precision translation table, and the two-dimensional precision translation table is fixed on the marble vibration isolation table.

2. The method for detecting the assembly gap of a circumferential multipole spectrum ranging hemispherical resonator gyroscope according to claim 1, characterized in that: The Z-axis long-stroke motion stage is used to control the movement of the probe fixing bracket in the vertical direction. Its motion resolution is better than 0.3μm and its repeatability is better than 1μm.

3. The method for detecting the assembly gap of a circumferential multipole spectrum ranging hemispherical resonator gyroscope according to claim 2, characterized in that: A plurality of angle fine-tuning turntables are evenly arranged on the probe fixing bracket along the circumference of the hemispherical resonant gyroscope, and a dispersive confocal probe is fixed on the angle fine-tuning turntable.

4. The method for detecting the assembly gap of a circumferential multipole spectrum ranging hemispherical resonator gyroscope according to claim 3, characterized in that: The angle fine-tuning turntable is used to adjust the inclination angle between the dispersive confocal probe and the axis of the hemispherical resonant gyroscope, and the adjustment resolution is better than ±1′.

5. The method for detecting the assembly gap of a circumferential multipole spectrum ranging hemispherical resonator gyroscope according to claim 3, characterized in that: The dispersive confocal probe has a measuring range of 0.2-1.2 mm, a longitudinal measurement resolution better than 0.1 μm, and a lateral measurement resolution better than 5 μm.

6. The method for detecting the assembly gap of a circumferential multipole spectrum ranging hemispherical resonator gyroscope according to claim 3, characterized in that: The dispersive confocal probe generates spectral dispersion and captures the reflected spectrum to the dispersive confocal controller, and obtains the spatial radial assembly gap by extracting the spectral peak position and inverting the inner and outer surface position information of the hemispherical resonator.

7. The method for detecting the assembly gap of a circumferential multi-pole spectrum ranging hemispherical resonator gyroscope according to claim 1, characterized in that: The six-degree-of-freedom adjustment platform can realize translation and rotation along the X, Y, and Z directions, and can be used to adjust the spatial position and posture of the hemispherical resonator to facilitate assembly.

8. The method for detecting the assembly gap of a circumferential multipole spectrum ranging hemispherical resonator gyroscope according to claim 1, characterized in that: This method can also be used for precise online measurement of the spatial assembly gap of a hemispherical resonant gyroscope and real-time adjustment of the hemispherical resonant gyroscope's attitude during its assembly process.

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