A solar cell and its preparation method and battery assembly

Abstract

A solar cell and a preparation method and a cell assembly, belonging to the technical field of solar cells. The preparation method of the solar cell includes: an oxidation removal and cleaning process performed between a wet texturing process and a boron / phosphorus diffusion process. The oxidation removal and cleaning process includes: heating the silicon wafer after wet texturing using a basket to form a first oxide layer to absorb impurities on the silicon wafer; removing the first oxide layer on the front and back of the silicon wafer. Performing the oxidation removal and cleaning process between the texturing and boron / phosphorus diffusion processes can improve the cleanliness of the silicon wafer surface, so as to further improve the diffusion uniformity of the subsequent boron / phosphorus diffusion process, and improve the quality and efficiency of the solar cell.

Description

Technical Field

[0001] The present application relates to the technical field of solar cells, and in particular to a solar cell and a preparation method thereof and a cell assembly. Background Art

[0002] Currently, most TOPCon cells in the market are based on P-type monocrystalline silicon. However, the photoelectric conversion efficiency of P-type TOPCon cells is difficult to reach more than 23.5%, and the efficiency in the industry is close to the limit. Cells based on N-type silicon have higher conversion efficiency. The research and development of N-type high-efficiency cells is an effective way to improve the photoelectric conversion efficiency.

[0003] For N-TOPCon cells, the current mainstream preparation processes include: silicon wafer - texturing - boron diffusion - back etching - tunneling oxidation - in-situ doping of amorphous silicon - de-coating - front aluminum oxide - front silicon nitride - back silicon nitride - printing and sintering - testing and sorting.

[0004] However, the inventors have found that the TOPCon cells prepared by the existing preparation process often appear black during EL testing. In addition, the prepared TOPCon cells are prone to blackening and low efficiency. Summary of the invention

[0005] Based on the above-mentioned deficiencies, the present application provides a solar cell and a preparation method thereof and a solar cell assembly to partially or completely improve or even solve the problem of solar cell blackening in the related art.

[0006] This application is implemented as follows:

[0007] In a first aspect, an example of the present application provides a method for preparing a solar cell, the method comprising a texturing process and a boron or phosphorus diffusion process performed in sequence; between the texturing process and the boron or phosphorus diffusion process, the method further comprises:

[0008] The silicon wafer after wet texturing by using a flower basket is heated to form a first oxide layer on both the front and back sides of the silicon wafer to absorb impurities of the silicon wafer; and the first oxide layer on the front and back sides of the silicon wafer is removed;

[0009] Optionally, the thickness of the first oxide layer is 4-5 nm.

[0010] In the above implementation process, after the silicon wafer is wet-textured by using a basket for loading, impurities such as additives and alkali crystal residues will inevitably exist at the contact point between the basket teeth and the silicon wafer, and defects will be formed at the contact point between the silicon wafer and the basket. After the silicon wafer is wet-textured by using a basket for loading, the silicon wafer is heated to form a first oxide layer on the front and back of the silicon wafer to adsorb organic matter and impurities attached to the surface of the silicon wafer; then the first oxide layer with adsorbed impurities is removed to improve the cleanliness of the silicon wafer surface, so as to further improve the diffusion uniformity of the subsequent boron diffusion process or phosphorus diffusion process, and improve the quality and efficiency of solar cells. If the subsequent boron diffusion or phosphorus diffusion process is directly performed on the cell after texturization, these defects will be multiplied at the contact point between the silicon wafer and the wet basket teeth after the boron diffusion process. Under the EL test, serious blackening defects occur at this position, affecting the yield and efficiency of the solar cell.

[0011] In combination with the first aspect, in a first possible implementation manner of the first aspect of the present application, the silicon wafer is an n-type single crystal silicon wafer; the solar cell includes a stacked passivation / anti-reflection film, a passivation layer, a p-type emitter, an n-type single crystal silicon wafer substrate, a tunneling oxide layer, an n-type polycrystalline silicon thin film and an anti-reflection film.

[0012] The boron diffusion process of the N-TOPCon battery needs to be carried out at a larger opening voltage and a higher temperature. For example, when the opening voltage is above 700mV, the temperature of the boron diffusion process rises to 1000°C. The N-TOPCon battery is more sensitive to the influence of impurity contamination, and the blackening phenomenon during the EL test is more obvious. Therefore, the above method has a more significant improvement effect on the N-TOPCon battery. In the above implementation process, in the preparation process of the N-TOPCon battery, the n-type single crystal silicon wafer after wet texturing is heated to form a first oxide layer to absorb impurities, and the boron diffusion process is performed after removing the first oxide layer on both sides of the silicon wafer, which can improve the quality and efficiency of the prepared N-TOPCon battery.

[0013] In combination with the first aspect, in a second possible implementation manner of the first aspect of the present application, the heating method includes: heating the texturized silicon wafer to a first preset temperature and keeping it warm for a first preset time; the first preset temperature is 600-800°C, and the first preset time is 30-60s.

[0014] In combination with the first aspect, in a third possible implementation manner of the first aspect of the present application, the first preset temperature is 700-800°C.

[0015] In the above implementation process, the silicon wafer after wet texturing is heated to a first preset temperature of 600-800°C and kept warm for a first preset time of 30-60s. This can ensure the formation of a first oxide layer to adsorb impurities on the surface of the silicon wafer, while avoiding the ineffective adsorption of impurities due to too low a heating temperature or too short a holding time, and also avoiding the impurities adsorbed on the first oxide layer from diffusing into the interior of the silicon wafer due to too high a heating temperature or too long a holding time, thereby affecting the quality and efficiency of the solar cell.

[0016] Heating the texturized silicon wafer to 700-800°C can further reduce impurities on the silicon wafer and improve the quality and efficiency of solar cells.

[0017] In combination with the first aspect, in a fourth possible implementation manner of the first aspect of the present application, the method for removing the first oxide layer on the front and back sides of the silicon wafer includes: cleaning the silicon wafer with a cleaning agent for 30 to 50 seconds; the cleaning agent includes HF;

[0018] Optionally, the cleaning agent includes HF at a volume concentration of 15-30%.

[0019] The silicon wafer is heated to form a first oxide layer on the surface of the silicon wafer, so that impurities on the surface of the silicon wafer are adsorbed on the first oxide layer. In the above implementation process, the silicon wafer is cleaned for 30 to 50 seconds using a cleaning agent containing HF, which can remove the first oxide layer on the surface of the silicon wafer and the impurities adsorbed on the first oxide layer, so as to improve the quality and efficiency of the solar cell obtained by subsequent processes such as boron diffusion or phosphorus diffusion process.

[0020] By using HF with a volume concentration of 15 to 30%, the amount of HF used can be reduced while removing the first oxide layer and impurities, thereby reducing the preparation cost of the solar cell.

[0021] In combination with the first aspect, in a fifth possible implementation manner of the first aspect of the present application, the cleaning agent further includes HCl;

[0022] Optionally, the cleaning agent further comprises HCl having a volume concentration of 5 to 10%;

[0023] Optionally, the cleaning agent includes HF and HCl in a volume ratio of 3:1.

[0024] In the above implementation process, using HF and HCl in a suitable ratio can effectively remove the first oxide layer and impurities adsorbed on the first oxide layer, and can also reduce the amount of HF and HCl, avoid HF and HCl affecting the silicon wafer (such as over-corrosion and damage to the velvet surface), and reduce the preparation cost of solar cells.

[0025] In combination with the first aspect, in a sixth possible implementation manner of the first aspect of the present application, after the silicon wafer is cleaned with a cleaning agent, a second oxide layer is formed on the surface of the silicon wafer, and a boron or phosphorus diffusion process is performed on the silicon wafer with the second oxide layer formed on the surface;

[0026] Optionally, the method for forming the second oxide layer includes: purging the silicon wafer with ozone.

[0027] In the above implementation process, after the first oxide layer is removed by a cleaning agent, a second oxide layer is re-formed on the silicon wafer surface, so that a protective layer can be formed on the silicon wafer surface, which can further reduce impurity contamination and make the subsequent boron diffusion or phosphorus diffusion process more uniform.

[0028] In a second aspect, an example of the present application provides a solar cell, which is manufactured according to the method for manufacturing a solar cell provided in the first aspect.

[0029] In the above implementation process, in the preparation process of solar cells, the silicon wafer after wet texturing is heated to form an oxide layer, which can adsorb impurities generated on the silicon wafer due to tooling methods such as flower baskets during the texturing process, and remove the oxide layer adsorbed with impurities using cleaning agents and the like, so that the solar cells subsequently prepared through processes such as boron diffusion or phosphorus diffusion have better quality and conversion efficiency.

[0030] In combination with the second aspect, in a first possible implementation of the second aspect, the solar cell includes a stacked passivation / anti-reflection film, a passivation layer, a p-type emitter, an n-type silicon wafer substrate, a tunneling oxide layer, an n-type polysilicon thin film and an anti-reflection film; the solar cell is a quadrilateral thin plate structure, having a first side for contacting the flower basket during the texturing process and a second side that does not contact the flower basket; the first side and the second side have the same degree of blackening during the EL test.

[0031] The second side of the N-TOPCon that does not contact the flower basket during the texturing process usually does not turn black during the EL test; whereas the first side of the existing N-TOPCon that contacts the flower basket during the texturing process usually shows a flower basket mark and turns black during the EL test. In the above implementation process, the N-TOPCon provided in this example is used to have the same degree of blackening during the EL test for the first side that contacts the flower basket and the second side that does not contact the flower basket, that is, the blackening of the flower basket mark will not appear at any position of the first side, which can effectively remove the wet flower basket mark and improve the quality and conversion efficiency of the N-TOPCon battery.

[0032] In a third aspect, an example of the present application provides a battery assembly comprising a plurality of solar cells provided in the second aspect.

[0033] In the above implementation process, the solar cell provided by the second aspect can avoid the generation of wet basket marks and has high quality and conversion efficiency. Therefore, the battery assembly including multiple solar cells provided by the second aspect has good conversion efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below.

[0035] Figure 1 It is a schematic cross-sectional view of a silicon wafer after wet texturing in the prior art;

[0036] Figure 2 A schematic cross-sectional view of a silicon wafer having a first oxide layer formed thereon according to the present application;

[0037] Figure 3 This is a schematic cross-sectional view of a silicon wafer after the first oxide layer is removed in this application;

[0038] Figure 4 A process flow chart of the preparation of TOPCon cells provided as an example of this application;

[0039] Figure 5 This is an EL test diagram of the TOPCon battery provided in Example 1 of the present application;

[0040] Figure 6 This is an EL test diagram of the TOPCon battery provided in Example 2 of the present application;

[0041] Figure 7 This is an EL test diagram of the TOPCon battery provided in Comparative Example 1 of the present application;

[0042] Figure 8 This is the EL test image of the TOPCon battery provided in Comparative Example 2 of the present application.

[0043] Icon: 10-textured silicon wafer; 20-impurities; 30-first oxide layer. DETAILED DESCRIPTION

[0044] The embodiments of the present application will be described in detail below in conjunction with the examples, but it will be appreciated by those skilled in the art that the following examples are only used to illustrate the present application and should not be considered as limiting the scope of the present application. In the examples, if specific conditions are not specified, they are carried out according to normal conditions or the conditions recommended by the manufacturer. If the manufacturer is not specified for the reagents or instruments used, they are all conventional products that can be purchased commercially.

[0045] The following is a detailed description of the TOPCon battery and its preparation method and battery assembly provided in the example of this application:

[0046] For N-TOPCon cells, the current mainstream preparation processes include: N-type silicon wafer - texturing - boron diffusion - back etching - tunneling oxidation - in-situ doping of amorphous silicon - de-coating - front aluminum oxide - front silicon nitride - back silicon nitride - printing and sintering - testing and sorting.

[0047] However, the inventors have found that TOPCon cells prepared using existing preparation processes often appear black during EL testing.

[0048] The inventor analyzed the cause of the blackening phenomenon and believed that: in the research and development and production of N-type high-efficiency TOPCon batteries, during wet texturing, the silicon wafers are loaded into a flower basket, and the flower basket and the silicon wafers are immersed in the texturing tank together. At the contact position between the texturing silicon wafer 10 and the flower basket teeth, there will be slight residues of additive organic matter and alkali crystals. The schematic diagram of impurities 20 such as additive organic matter and alkali crystals remaining on the surface of the texturing silicon wafer 10 is shown in FIG. Figure 1 In the subsequent boron diffusion high temperature process, the defect was magnified, causing the location where the silicon wafer and the turnbuckle contacted to appear black during the EL test.

[0049] The inventors believe that in the preparation process of TOPCon cells, the basket prints present during texturing will reduce the uniformity of subsequent boron diffusion or phosphorus diffusion processes, thereby reducing the yield and efficiency of TOPCon cells.

[0050] Based on this, the inventor provides a method for preparing a TOPCon cell, including: an oxidation removal and cleaning process performed between a wet texturing process and a boron diffusion or phosphorus diffusion process. The oxidation removal and cleaning process includes: heating a silicon wafer that has been wet texturing using a flower basket loading method, forming a first oxide layer on both the front and back sides of the silicon wafer to absorb impurities on the silicon wafer; and removing the first oxide layer on the front and back sides of the silicon wafer.

[0051] After the silicon wafer is loaded with a basket for wet texturing, the texturing silicon wafer 10 is heated to form a first oxide layer 30 on the surface of the texturing silicon wafer 10 to adsorb impurities 20 such as organic matter and alkali crystals attached to the surface of the texturing silicon wafer 10. A cross-sectional schematic diagram of the first oxide layer 30 formed on the surface of the texturing silicon wafer 10 after wet texturing is shown in FIG. Figure 2 As shown (for the sake of clarity, the impurity 20 is drawn on the upper surface of the first oxide layer 30, which does not mean that the impurity 20 is located on the surface of the first oxide layer 30. The impurity 20 can also be located inside the first oxide layer 30).

[0052] Then, the first oxide layer 30 with the impurities 20 adsorbed thereon is removed, which can improve the cleanliness of the surface of the textured silicon wafer 10, so as to further improve the uniformity of the subsequent boron diffusion or phosphorus diffusion process, avoid the wet basket print of the TOPCon battery, and improve the quality and efficiency of the TOPCon battery. If the impurities 20 are not eliminated or improved, after the boron diffusion process, these defects at the contact part of the wet basket teeth of the silicon wafer will be magnified exponentially, resulting in serious blackening defects at this position under the EL test, seriously affecting the yield and efficiency of the TOPCon battery. The cross-sectional schematic diagram of the silicon wafer with the first oxide layer 30 adsorbed with impurities 20 removed is shown in FIG. Figure 3 shown.

[0053] The preparation method of the TOPCon battery provided in the example of this application is further described in detail below in conjunction with the accompanying drawings.

[0054] See also Figure 4 This example provides a method for preparing an N-TOPCon battery, comprising:

[0055] S1. Velveting

[0056] The front and back sides of the silicon wafer are texturized to form a velvet surface on the surface of the silicon wafer to increase the reflectivity of light and remove some impurities in the silicon substrate.

[0057] During texturing, the silicon wafers can be loaded into a basket, and the basket loaded with the silicon wafers can be immersed in a texturing tank containing a texturing agent such as KOH liquid. The texturing agent in the texturing tank can be KOH with a volume concentration of 1 to 20%, and the temperature condition of the texturing step can be 40 to 80°C. Then, the silicon wafers after texturing are acid-washed, washed with water, slowly pulled, and dried at a temperature of 80 to 100°C. The acid-washing can use HF with a volume concentration of 1 to 30%.

[0058] S2, Oxidation Cleaning

[0059] The textured silicon wafer 10 that has been wet textured using a basket loading method is heated to form a first oxide layer 30 to absorb impurities 20 on the surface of the textured silicon wafer 10; and the first oxide layer 30 on the front and back sides of the textured silicon wafer 10 is removed.

[0060] In the texturing process, after the silicon wafer is loaded with a flower basket and wet texturing is performed to obtain the texturing silicon wafer 10, there will inevitably be some impurities 20 such as additives and alkali crystal residues at the contact position between the texturing silicon wafer 10 and the flower basket teeth, and there will be defects at the contact position where the silicon wafer is used to contact the flower basket. For example, in a quadrilateral flat-plate N-TOPCon battery, the N-TOPCon battery cell has a first side for contacting the flower basket and a second side that is not in contact with the flower basket. Some impurities 20 such as additives and alkali crystal residues may remain on the first side in contact with the flower basket, forming defects at the first side. If these defects are not improved, these defects will be amplified in the subsequent boron expansion process, resulting in the first side in contact with the flower basket to appear abnormally black during the EL test, affecting the quality and efficiency of the N-TOPCon battery.

[0061] After the silicon wafer is loaded with a basket for wet texturing, the texturing silicon wafer 10 is heated to form a first oxide layer 30 on the surface of the texturing silicon wafer 10, which can adsorb impurities 20 such as organic matter and alkali crystals attached to the surface of the texturing silicon wafer 10. Then, the first oxide layer 30 adsorbed with impurities 20 can be removed to improve the cleanliness of the surface of the texturing silicon wafer 10, so as to further improve the diffusion uniformity of the subsequent boron diffusion or phosphorus diffusion process, and improve the quality and efficiency of the N-TOPCon battery.

[0062] The present application does not limit how to heat the textured silicon wafer 10 to form the first oxide layer 30. In some possible implementations, the textured silicon wafer 10 is heated to a first preset temperature of 600-800° C. and kept at the temperature for a first preset time of 30-60 seconds.

[0063] Exemplarily, the first preset temperature includes, but is not limited to, a range between one or any two of 600° C., 650° C., 700° C., 750° C., and 800° C.

[0064] Exemplarily, the first preset time includes but is not limited to a range between one or any two of 30s, 35s, 40s, 50s and 60s.

[0065] Heating the texturing silicon wafer 10 to a first preset temperature of 600-800°C and keeping it warm for a first preset time of 30-60s can ensure the formation of a first oxide layer 30 to adsorb impurities 20 on the surface of the texturing silicon wafer 10. At the same time, it can avoid the impurities 20 being effectively adsorbed due to too low a heating temperature or too short a holding time, and it can also avoid the impurities 20 adsorbed on the first oxide layer 30 diffusing into the interior of the texturing silicon wafer 10 due to too high a heating temperature or too long a holding time, thereby affecting the quality and efficiency of the N-TOPCon battery.

[0066] In order to improve the oxidation treatment efficiency of the texturing silicon wafer 10 and control the oxidation gettering quality of the texturing silicon wafer 10, in some possible implementations, a step-beam heating furnace can be used to heat the texturing silicon wafer 10. By setting the length of the heating furnace and the conveying speed (roller conveying) of the texturing silicon wafer 10 in the heating furnace, the heating time of the texturing silicon wafer 10 is controlled to reduce the error of the oxidation treatment process.

[0067] The present application does not limit the specific heating time and heating temperature, and relevant personnel can make corresponding adjustments as needed while ensuring that the first oxide layer 30 can be formed on the surface of the texturing silicon wafer 10.

[0068] In some possible implementations, the texturing silicon wafer 10 can be placed in a pure oxygen environment or a high pressure or low pressure environment for heating. Since the oxidation rate and the diffusion rate of impurities in a pure oxygen or low pressure or high pressure environment will change, relevant personnel can appropriately reduce or increase the first preset temperature, and appropriately extend or shorten the insulation time.

[0069] The present application does not limit how to remove the first oxide layer 30 on which impurities 20 are adsorbed on the surface of the texturing silicon wafer 10, and relevant personnel may make corresponding adjustments as needed.

[0070] In some possible implementations, the textured silicon wafer 10 having the first oxide layer 30 formed on the surface thereof may be cleaned using a cleaning agent including HF.

[0071] Cleaning the surface of the textured silicon wafer 10 with a cleaning agent including HF can not only effectively remove the first oxide layer 30 and the impurities 20 , but also perform surface modification on the textured surface of the textured silicon wafer 10 and perform passivation treatment on the textured silicon wafer 10 .

[0072] The present application does not limit the specific composition of the cleaning agent. In some possible implementations, the cleaning agent also includes HCL.

[0073] Exemplarily, the cleaning agent includes HF at a volume concentration of 15-30% and HCl at a volume concentration of 5-10%.

[0074] Furthermore, the cleaning agent includes HF with a volume concentration of 15-30% and HCl with a volume concentration of 5-10% in a volume ratio of 3:1.

[0075] The present application does not limit the specific cleaning time. In some possible implementations, a cleaning agent including 15-30% HF and 5-10% HCl in a volume ratio of 3:1 is used to clean the textured silicon wafer 10 for 30-50 seconds. Exemplarily, the cleaning time includes but is not limited to one of 30 seconds, 35 seconds, 40 seconds, 50 seconds and 60 seconds or any two of them.

[0076] In order to further improve the quality and efficiency of the prepared N-TOPCOn battery, in some possible embodiments, a second oxide layer thin layer can be formed on the surface of the textured silicon wafer 10 after removing the first oxide layer 30, and surface modification and passivation treatment can be performed to make the subsequent boron diffusion treatment process more uniform.

[0077] Furthermore, a second oxide layer may be formed on the surface of the silicon wafer by means of ozone purging, or by passivation treatment with nitric acid to form the second oxide layer.

[0078] S3, post-processing the textured silicon wafer 10 obtained in step S2 to obtain an N-TOPCOn battery.

[0079] S3 can adopt the conventional N-TOPCOn battery preparation process. The N-TOPCon battery manufacturing process of the example in this application does not change the original N-TOPCon battery manufacturing steps. An oxidation cleaning step is performed between the texturing and boron diffusion processes. The basket print produced during wet texturing can be removed, the uniformity of subsequent boron diffusion is improved, and the quality of the prepared N-TOPCon battery is improved.

[0080] In the present application, any post-processing step for the silicon wafer after oxidation cleaning in step S2 is feasible as long as it can achieve the production of N-TOPCon batteries, and the present application does not make any specific restrictions thereon.

[0081] Exemplarily, the oxidized and impurity-removed textured silicon wafer 10 is subjected to a boron expansion process to form a pn junction. The step of performing boron expansion on the textured silicon wafer 10 may include placing the textured silicon wafer 10 in a boron expansion tube, introducing a boron source at a temperature of 700 to 900° C. for 20 to 1000 seconds, and then pushing the junction at a temperature of 900 to 1200° C. for 100 to 5000 seconds.

[0082] For example, the silicon wafer after the boron diffusion process is etched. The etching method may include: placing the silicon wafer after the boron diffusion process in a container containing HNO 3 and HF and other etchants in the etching tank.

[0083] Exemplarily, the etched silicon wafer is subjected to tunnel oxidation, and the tunnel oxidation step includes: heating the etched silicon wafer to 600° C. for oxidation to form a tunnel oxidation layer on the back of the silicon wafer.

[0084] Exemplarily, the silicon wafer after tunnel oxidation is doped with amorphous silicon. The step of doping amorphous silicon includes: at a process temperature of 400° C., introducing a gas of PH 3 and SiH 4 The mixed gas is used to in-situ dope amorphous silicon on the silicon wafer obtained after the tunneling oxidation step.

[0085] Exemplarily, the silicon wafer doped with amorphous silicon is annealed, and the annealing step includes: placing the silicon wafer at 800° C. for constant temperature annealing for about 60 minutes, so that the doped amorphous silicon is converted into phosphorus-doped polysilicon.

[0086] Exemplarily, the annealed silicon wafer is de-coated. The de-coating step includes: growing silicon oxide on the back of the annealed silicon wafer, washing the silicon oxide on the front side of the de-coated area with HF, and then placing it in an alkaline polishing tank (KOH volume concentration of 1%-20%, temperature of 40-90°C, and amount of alkaline polishing additive of 2-20L) to remove the front polysilicon de-coating.

[0087] Exemplarily, the silicon wafer after de-coating is subjected to the front side aluminum oxide deposition, the front side silicon nitride deposition and the back side silicon nitride deposition. The step of depositing the front side aluminum oxide comprises: depositing the front side aluminum oxide by thermal atomic deposition (ALD) at a process temperature of 200 to 250° C. The step of depositing the front side silicon nitride and the back side silicon nitride deposition comprises: depositing the front side silicon nitride film and the back side silicon nitride film by plasma chemical vapor deposition, and passing NH 3 and SiH 4 gas.

[0088] Exemplarily, the silicon wafer on which the front and back silicon nitride films are deposited is subjected to screen printing and sintering.

[0089] In some possible embodiments, the present application example provides a method for preparing a P-TOPCon battery, including: texturing: wet alkaline texturing; oxidation cleaning: heating the texturized silicon wafer 10 to form a first oxide layer 30, and using a cleaning agent to remove the first oxide layer 30 adsorbed with impurities 20; phosphorus diffusion: phosphorus doping; etching: back polishing and removal of edge PN junction; front / back film: plating front / back passivation anti-reflection film; screen printing: subjecting the back silver paste, aluminum paste and front silver paste to a screen printing process, and then drying and sintering to form a contact electrode.

[0090] The examples of the present application also provide a TOPCon battery prepared by the above-mentioned preparation method.

[0091] For example, the examples of the present application provide a method of Figure 4 The N-TOPCon battery prepared by the preparation method.

[0092] The N-TOPCon battery is a quadrilateral thin plate structure, having a first side for contacting the flower basket during the texturing process and a second side that does not contact the flower basket. Generally, the second side that does not contact the flower basket usually does not show blackening, and the second side that contacts the flower basket will show flower basket marks, so the degree of blackening of the two is quite different, that is, the second side is almost not blackened, and the first side shows obvious abnormal blackening. In the N-TOPCon battery provided in this example, the first side and the second side will not show blackening during the EL test, which can avoid the generation of flower basket marks.

[0093] The example of the present application also provides a battery assembly, which includes a plurality of N-TOPCon batteries as described above.

[0094] This application does not limit the specific configuration of the battery assembly, and relevant personnel can make corresponding adjustments as needed.

[0095] In a possible implementation, the battery assembly includes a plurality of N-TOPCon batteries, and the plurality of N-TOPCon batteries may be connected in series.

[0096] Exemplarily, the photovoltaic cell module includes 64 or 72 N-TOPCon cells.

[0097] In a possible implementation, the battery assembly further includes a photovoltaic glass layer. The photovoltaic glass layer covers the upper surface of the N-TOPCon battery to protect the N-TOPCon battery. The photovoltaic glass in the photovoltaic glass layer is also called photoelectric glass, which is a tempered low-iron glass with very good light transmittance and high hardness. It can adapt to large temperature differences between day and night and severe weather conditions, thereby protecting the N-TOPCon battery.

[0098] Similarly, in a possible implementation, the battery assembly further includes a photovoltaic backsheet. The photovoltaic backsheet has good insulation, waterproofness and aging resistance. The photovoltaic backsheet is arranged on the back of the N-TOPCon battery to further protect the N-TOPCon battery. The photovoltaic backsheet can also be made of tempered glass.

[0099] Furthermore, in a possible implementation, the battery assembly also includes an EVA film layer with good light transmittance. N-TOPCon cells are very fragile, and the photovoltaic glass layer cannot be directly attached to the upper surface of the N-TOPCon cells, requiring the EVA film to play a bonding role in the middle.

[0100] In order to improve the stability of the battery assembly, the battery assembly may also be provided with a frame, and multiple N-TOPCon batteries may be installed in the frame to support and protect the battery assembly.

[0101] The N-TOPCon battery provided by the example of this application is described in detail below in conjunction with the embodiments.

[0102] Example 1

[0103] Example 1 of the present application provides an N-TOPCon battery, which is prepared by the following method:

[0104] Taking N-type silicon wafer as the original silicon wafer, the silicon wafer is sequentially subjected to the following processes: texturing + oxidation cleaning + boron diffusion + alkali polishing + poly + annealing + RCA + front and back silicon nitride plating + screen printing.

[0105] Among them, the texturing conditions are: 20% KOH volume concentration, texturing temperature is 40℃; oxidation cleaning conditions are: heat the silicon wafer after texturing to 600℃, keep warm for 60S; prepare the cleaning agent with a volume concentration of 15% HF and a volume concentration of 5% HCL hydrochloric acid in a volume ratio of 3:1, and clean for 50S; boron expansion conditions are: place the silicon wafer after oxidation cleaning in a boron expansion tube, introduce the boron source at a temperature of 700℃ for 500S, and then push it at a temperature of 1000℃ for 1000S; alkali polishing conditions are: place the above silicon wafer in an alkali polishing tank (volume concentration of 10% KOH, temperature of 40℃, and the amount of alkali polishing additive is 10L); poly conditions are: the gas introduced is PH 3 and SiH 4 Mixed gas, process temperature is 600℃; annealing conditions are: 60min constant temperature annealing at 850℃; RCA conditions are: HF with a volume concentration of 20% to wash away silicon oxide; front and back silicon nitride coating conditions are: plasma chemical vapor deposition is used to deposit silicon nitride films on the front and back surfaces of the silicon wafer, and NH 3 and SiH 4 Gas, wherein the process temperature is 500°C and the pressure is 200Pa; the screen printing conditions are: the N-TOPCon battery is obtained by screen printing using a DUP screen.

[0106] Example 2

[0107] Embodiment 2 of the present application provides an N-TOPCon battery, which differs from Embodiment 1 in that, in its preparation method, the texturized silicon wafer is heated to 800° C. and kept warm for 30 seconds.

[0108] Comparative Example 1

[0109] Comparative Example 1 of the present application provides an N-TOPCon battery, which is different from Example 1 in that its preparation method is sequentially performed by texturing + boron diffusion + alkali polishing + poly + annealing + RCA + front and back silicon nitride plating + screen printing. The specific conditions of each process are the same as those of Example 1.

[0110] Comparative Example 2

[0111] Comparative Example 2 of the present application provides an N-TOPCon battery, which differs from Example 1 in that during oxidation cleaning, the texturized silicon wafer is heated to 400° C.

[0112] Comparative Example 3

[0113] Comparative Example 3 of the present application provides an N-TOPCon battery, which differs from Example 1 in that during oxidation cleaning, the texturized silicon wafer is heated to 1000° C.

[0114] Experimental example

[0115] The N-TOPCon cells provided in Examples 1 and 2 and Comparative Examples 1 and 2 were subjected to EL tests to observe their blackening phenomenon.

[0116] The test results of Example 1 are as follows Figure 5 As shown, the test results of Example 2 are as follows Figure 6 As shown, the test results of Comparative Example 1 are as follows Figure 7 As shown, the test results of Comparative Example 2 are as follows Figure 8 shown.

[0117] Results analysis shows that according to the comparison chart between Examples 1 and 2 and Comparative Example 1, the N-TOPCon batteries provided in Examples 1 and 2 of the present application did not show any blackening phenomenon during the EL test, and can avoid the generation of basket prints; the N-TOPCon battery provided in Comparative Example 1 has obvious basket prints.

[0118] According to the comparison diagram of Examples 1 and 2 with Comparative Example 2, the N-TOPCon battery provided in Comparative Example 2 still has obvious basket marks.

[0119] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A method for preparing a solar cell, the method comprising a texturing process and a boron or phosphorus diffusion process performed in sequence, characterized in that: Between the texturing process and the boron or phosphorus diffusion process, the preparation method further includes: The silicon wafer after wet texturing by using a basket is heated to form a first oxide layer on both the front and back sides of the silicon wafer to absorb impurities of the silicon wafer; and the first oxide layer on the front and back sides of the silicon wafer is removed; The heating method includes: heating the silicon wafer after texturing to a first preset temperature and keeping the temperature for a first preset time; the first preset temperature is 600-800° C., and the first preset time is 30-60 s.

2. The method for preparing a solar cell according to claim 1, characterized in that: The thickness of the first oxide layer is 4-5 nm.

3. The method for preparing a solar cell according to claim 1, characterized in that: The silicon wafer is an n-type single crystal silicon wafer; the solar cell comprises a stacked passivation / anti-reflection film, a passivation layer, a p-type emitter, an n-type single crystal silicon wafer substrate, a tunneling oxide layer, an n-type polycrystalline silicon film and an anti-reflection film.

4. The method for preparing a solar cell according to claim 1, characterized in that: The first preset temperature is 700-800°C.

5. The method for preparing a solar cell according to claim 1, characterized in that: The method for removing the first oxide layer on the front and back sides of the silicon wafer comprises: cleaning the silicon wafer with a cleaning agent for 30 to 50 seconds; the cleaning agent comprises HF.

6. The method for preparing a solar cell according to claim 5, characterized in that: The cleaning agent includes HF with a volume concentration of 15-30%.

7. The method for preparing a solar cell according to claim 6, characterized in that: The cleaning agent also includes HCl.

8. The method for preparing a solar cell according to claim 7, characterized in that: The cleaning agent also includes HCl with a volume concentration of 5-10%.

9. The method for preparing a solar cell according to claim 8, characterized in that: The cleaning agent includes HF and HCl in a volume ratio of 3:

1.

10. The method for preparing a solar cell according to claim 6, characterized in that: After the silicon wafer is cleaned with a cleaning agent, a second oxide layer is formed on the surface of the silicon wafer, and the boron or phosphorus diffusion process is performed on the silicon wafer with the second oxide layer formed on the surface.

11. The method for preparing a solar cell according to claim 10, characterized in that: The method for forming the second oxide layer includes: using ozone to purge the silicon wafer.

12. A solar cell, characterized in that: The solar cell is prepared according to the method for preparing the solar cell according to any one of claims 1 to 11.

13. The solar cell according to claim 12, characterized in that: The solar cell comprises a stacked passivation / anti-reflection film, a passivation layer, a p-type emitter, an n-type silicon wafer substrate, a tunneling oxide layer, an n-type polysilicon film and an anti-reflection film; the solar cell has a first side for contacting with a flower basket and a second side not in contact with the flower basket; the first side and the second side have the same degree of blackening during EL testing.

14. A battery assembly, characterized in that: The method comprises a plurality of solar cells as claimed in claim 12 or 13.

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