Magnetic head and method for manufacturing the same, magnetic recording and reproducing device and method for manufacturing the same

Abstract

The present invention provides a magnetic head and a method for manufacturing the same, as well as a magnetic recording and reproducing device and a method for manufacturing the same, that reduce damage caused by contact with a magnetic recording medium. In one embodiment, the magnetic head includes a protective layer. When the element portion is a magnetic recording element portion, the protective layer includes a first region on a protruding portion of the magnetic recording element and a second region on a shield portion of the magnetic recording element, wherein the first and second regions are coplanar or recessed relative to the second region. When the element portion is a magnetic reproducing element portion, the protective layer includes a third region on the protruding portion of the magnetic reproducing element and a fourth region on the shield portion of the magnetic reproducing element, wherein the third and fourth regions are coplanar or recessed relative to the fourth region.

Description

[0001] Related Application

[0002] This application claims priority based on Japanese Patent Application No. 2021-135449 (filing date: August 23, 2021), and the entire contents of the basic application are incorporated herein by reference. Technical Field

[0003] Embodiments of the present invention relate to a magnetic head and a method for manufacturing the same, and a magnetic recording and reproducing device and a method for manufacturing the same. Background Art

[0004] The magnetic recording and reproducing element of the magnetic head of a magnetic disk device (HDD) protrudes toward the magnetic disk relative to the surrounding shield due to its material and structural characteristics. The amount of protrusion is slightly less than approximately 1 nm.

[0005] When the floating amount of the HDD's magnetic head is as low as possible, the recording density becomes higher. Therefore, the magnetic recording and reproducing element portion is made to protrude toward the medium side by utilizing thermal expansion through DFH (Dynamic Flying Height) technology, and once contacts the magnetic disk (landing). From then on, the desired gap is maintained constant by pulling back (retreating). However, during this landing action, the magnetic recording and reproducing element portion is sometimes damaged by contact with the magnetic disk. In addition, since the gap between the magnetic head and the magnetic disk is narrower, if, for example, a sudden change of the magnetic head occurs, the protruding magnetic recording and reproducing element portion is easily damaged by contact with the magnetic disk, and the recording and reproducing capability is sometimes reduced. Nevertheless, when the recording density of the magnetic disk is low, the slight damage caused by the contact between the protruding portion of the magnetic recording and reproducing element and the magnetic disk does not affect the overall performance and reliability of the device that much. However, in recent years, as the recording density has increased, the magnetic recording and reproducing elements have been miniaturized, and there is a tendency for contact damage to have a significant impact.

[0006] Therefore, there is a demand to reduce damage to the magnetic head and ensure the operational reliability of the magnetic head and the magnetic recording and reproducing device equipped with the magnetic head. Summary of the Invention

[0007] An object of embodiments of the present invention is to provide a magnetic head and a method for manufacturing the same, and a magnetic recording and reproducing device and a method for manufacturing the same, which reduce damage caused by contact with a magnetic recording medium.

[0008] According to an embodiment, a magnetic head is provided for floating on a magnetic recording medium to record or reproduce magnetic information, characterized in that, when floating, the floating surface side opposite to the magnetic recording medium includes an element portion of at least one of a magnetic recording element portion or a magnetic reproduction element portion and a protective layer for protecting the element portion, the magnetic recording element portion includes a magnetic recording element, a magnetic recording element protrusion protruding from the magnetic recording element, and a magnetic recording element shielding portion surrounding the magnetic recording element protrusion, the magnetic reproduction element portion includes a magnetic reproduction element, a magnetic reproduction element protrusion protruding from the magnetic reproduction element, and a magnetic reproduction element shielding portion surrounding the magnetic reproduction element protrusion The protective layer comprises a shielding portion of a magnetic reproduction element having a protruding portion, wherein the protective layer includes a first region on the protruding portion of the magnetic recording element and a second region on the shielding portion of the magnetic recording element when the element portion is the magnetic recording element portion, or includes a third region on the protruding portion of the magnetic reproduction element and a fourth region on the shielding portion of the magnetic reproduction element when the element portion is the magnetic reproduction element portion, wherein the first region and the second region are in the same plane, or the first region is recessed relative to the second region, and the third region and the fourth region are in the same plane, or the third region is recessed relative to the fourth region. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a schematic diagram showing a magnetic recording and reproducing device according to a second embodiment.

[0010] Figure 2 It is a side view showing the magnetic head and the suspension.

[0011] Figure 3 This is a cross-sectional view showing an enlarged portion of the magnetic head and the magnetic disk.

[0012] Figure 4 It is a perspective view schematically showing the periphery of the write gap of the recording head.

[0013] Figure 5 It will Figure 4 Schematic diagram showing a portion of the recording head enlarged and viewed from the floating surface side.

[0014] Figure 6 It is a graph showing how the magnetic recording element and the magnetic reproducing element protrude from the floating surface.

[0015] Figure 7 It is a diagram schematically showing the periphery of the magnetic recording element portion of the magnetic head before processing.

[0016] Figure 8 It is a diagram schematically showing the periphery of the magnetic recording element portion of the magnetic head after processing.

[0017] Figure 9 This is a schematic diagram showing an enlarged view of the periphery of a magnetic recording element portion of a modified example of a magnetic head before processing.

[0018] Figure 10 This is an enlarged view of the periphery of a magnetic recording element portion of a modified example of a processed magnetic head according to the embodiment.

[0019] Figure 11 This is an enlarged view of the periphery of the magnetic recording element portion of another modified example of the processed magnetic head according to the embodiment.

[0020] Figure 12 This is a flowchart showing a method for manufacturing a magnetic head according to the third embodiment.

[0021] Figure 13 This is a flowchart showing a method for manufacturing a magnetic recording and reproducing device according to a fourth embodiment.

[0022] Figure 14 It is a graph showing the relationship between the DFH power applied to the magnetic head and the change in landing power.

[0023] Figure 15 This is a schematic diagram showing an example of a magnetic recording medium used in the embodiment.

[0024] Figure 16 It is a schematic diagram showing an example of the shape of the cutting portion.

[0025] Figure 17 It is a schematic diagram showing another example of the shape of the cutting portion.

[0026] Figure 18 It is a schematic diagram showing another example of the shape of the cutting portion.

[0027] Figure 19 It is a diagram schematically showing the vicinity of the reproducing and recording element portion of the magnetic head before processing.

[0028] Figure 20 It is a diagram schematically showing the vicinity of the reproduction and recording element portion of the processed magnetic head.

[0029] Description of Reference Numerals

[0030] 1…magnetic recording medium, 10…magnetic head, 13-2…cutting portion, magnetic recording element protrusion, 44a, 62a'…magnetic recording element shielding portion, 54…magnetic reproducing element portion, 55…magnetic reproducing element, 56a, 57a…magnetic reproducing element shielding portion, 58…magnetic recording element portion, 60, 81…magnetic recording element, 68…protective layer, 68b…first region, 68a…second region, 100…magnetic recording and reproducing device. DETAILED DESCRIPTION

[0031] The magnetic head of the first embodiment is a magnetic head that floats above a magnetic recording medium to record or reproduce magnetic information, wherein the floating surface side opposite to the magnetic recording medium during floating includes an element portion having a magnetic recording element portion and / or a magnetic reproducing element portion and a protective layer that protects the element portion.

[0032] The magnetic recording element portion includes a magnetic recording element, a magnetic recording element protrusion protruding from the magnetic recording element, and a magnetic recording element shield portion surrounding the magnetic recording element protrusion. The magnetic reproducing element portion includes a magnetic reproducing element, a magnetic reproducing element protrusion protruding from the magnetic reproducing element, and a magnetic reproducing element shield portion surrounding the magnetic reproducing element protrusion.

[0033] When the element portion is a magnetic recording element portion, the protective layer includes a first region on the protruding portion of the magnetic recording element and a second region on the shielding portion of the magnetic recording element; when the element portion is a magnetic reproduction element portion, the protective layer includes a third region on the protruding portion of the magnetic reproduction element and a fourth region on the shielding portion of the magnetic reproduction element.

[0034] Furthermore, when the element portion is a magnetic recording element portion, the protective layer has (1) the first region and the second region being coplanar or the first region being recessed relative to the second region; and when the element portion is a magnetic reproducing element portion, (2) the third region and the fourth region being coplanar or the third region being recessed relative to the fourth region. When the element portion includes both a magnetic recording element portion and a magnetic reproducing element portion, the protective layer can have at least one of the shapes (1) and (2).

[0035] The magnetic recording and reproducing device according to the second embodiment is a magnetic recording and reproducing device including the magnetic head according to the first embodiment.

[0036] When the magnetic head of the embodiment is used, damage to the magnetic head caused by contact with the magnetic recording medium can be reduced by adjusting the thickness of the protective layer of the magnetic head. By reducing the impact of damage caused by contact between the protruding portion of the magnetic recording and reproducing element and the magnetic recording medium during landing and operation on device performance and reliability, device performance and reliability can be ensured.

[0037] Hereinafter, embodiments will be described in more detail with reference to the accompanying drawings.

[0038] (Example 1)

[0039] First, refer to Figure 1 The following describes the configuration of a magnetic head according to a first embodiment and a disk drive as a magnetic recording and reproducing device according to a second embodiment that includes the magnetic head. Here, a magnetic recording and reproducing device including a magnetic head that uses a magnetic recording and reproducing element unit having both a magnetic recording element unit and a magnetic reproducing element unit as its element unit is described. Figure 1 The structure of the magnetic recording and reproducing device, that is, the disk drive, is also applicable to the second to sixth embodiments described below.

[0040] Figure 1 It is a schematic diagram showing a magnetic recording and reproducing device according to a second embodiment.

[0041] like Figure 1 As shown, a magnetic disk drive 100 is a magnetic disk device of a perpendicular magnetic recording type incorporating a magnetic disk (hereinafter simply referred to as a disk) 1 as a magnetic recording medium, for example, and a magnetic head 10 having a flux control layer described later.

[0042] The disk 1 is fixed to a spindle motor (SPM) 2 and mounted so as to rotate. The magnetic head 10 is mounted on an actuator 3 and is configured to move radially above the disk 1. The actuator 3 is rotationally driven by a voice coil motor (VCM) 4. The magnetic head 10 includes a recording (write) head (magnetic recording element unit) 58 and a reproducing (read) head (magnetic reproducing element unit) 54.

[0043] The disk drive includes a head amplifier integrated circuit (hereinafter referred to as a head amplifier IC) 11, a read / write channel (R / W channel) 12, a hard disk controller (HDC) 13, a microprocessor (MPU) 14, a driver IC 16, and a memory 17. The R / W channel 12, HDC 13, and MPU 14 are incorporated into a controller 15 formed as a single-chip integrated circuit.

[0044] As described later, the head amplifier IC 11 includes a circuit group for driving a spin-torque oscillator (STO), which serves as a magnetic flux control layer. Hereinafter, the spin-torque oscillator will be referred to as the STO. Furthermore, the head amplifier IC 11 includes a driver that supplies a recording signal (write current) corresponding to write data supplied from the R / W channel 12 to the recording head 58. Furthermore, the head amplifier IC 11 includes a read amplifier that amplifies the read signal output from the playback head 54 and transmits it to the R / W channel 12.

[0045] The R / W channel 12 is a signal processing circuit for reading / writing data. The HDC 13 constitutes an interface between the disk drive and the host computer 18 and performs transfer control of read / write data.

[0046] The MPU 14 is the main control unit of the disk drive and performs servo control required for reading and writing operations and positioning the magnetic head 10. The MPU 14 also performs power-on control of the STO related to this embodiment. The memory 17 includes a buffer memory composed of DRAM and a flash memory.

[0047] Figure 2 It is a side view showing the magnetic head and the suspension.

[0048] like Figure 2As shown, each magnetic head 10 is constructed as a floating head, including a slider 42 of a substantially rectangular parallelepiped shape and a head portion 44 for recording and reproducing provided at the outflow end (trailing end) of the slider 42. The magnetic head 10 is fixed to a universal joint spring 41 provided at the top end of the suspension 34. Each magnetic head 10 is applied with a head load L toward the surface of the magnetic disk 1 by the elasticity of the suspension 34. Figure 2 As shown, each magnetic head 10 is connected to the head amplifier IC 11 and the HDC 13 via a wiring member (flexure) 35 fixed to the suspension 34 and the arm 32 .

[0049] Next, the structures of the magnetic disk 1 and the magnetic head 10 will be described in detail.

[0050] Figure 3 It is a cross-sectional view showing the head portion 44 of the magnetic head 10 and the magnetic disk 1 in an enlarged manner.

[0051] like Figure 2 and Figure 3 As shown, the magnetic disk 1 has, for example, a substrate 101 formed into a disk shape having a diameter of approximately 3.5 inches (approximately 9 cm) and a thickness of approximately 0.8 mm and made of a non-magnetic material. On each surface of the substrate 101, a soft magnetic layer 102 having a thickness of approximately 20 to 30 nm and made of a material exhibiting soft magnetic properties as a base layer, a magnetic recording layer 103 having a thickness of approximately 10 to 20 nm and having magnetic anisotropy in a direction perpendicular to the disk surface, and a protective layer 104 having a thickness of approximately 1 to 2 nm, are sequentially stacked.

[0052] The main body of the slider 42 of the magnetic head 10 is formed, for example, from a sintered body of aluminum oxide and titanium carbide (AlTiC), and the head portion 44 is formed by stacking thin films. The slider 42 has a rectangular disk-facing surface (air bearing surface (ABS)) 43 that faces the surface of the magnetic disk 1. The slider 42 is lifted by the air flow C generated between the disk surface and the ABS 43 due to the rotation of the magnetic disk 1. The direction of the air flow C coincides with the rotation direction B of the magnetic disk 1. The slider 42 is positioned relative to the surface of the magnetic disk 1 so that the longitudinal direction of the ABS 43 roughly coincides with the direction of the air flow C.

[0053] The slider 42 has a leading end 42a located on the inflow side of the air flow C and a trailing end 42b located on the outflow side of the air flow C. The ABS 43 of the slider 42 is formed with a leading step, a trailing step, a side step, a negative pressure cavity, etc. (not shown).

[0054] like Figure 3As shown, the head 44 is provided at the trailing end 42b of the slider 42 and includes a playback head 54 and a recording head (magnetic recording head) 58 formed by thin film processing, forming a separate type magnetic head. The playback head 54 and the recording head 58, except for the portion exposed at the ABS 43 of the slider 42, are covered by a protective insulating film 76 made of a base material such as aluminum oxide. The protective insulating film 76 defines the outer shape of the head 44.

[0055] The playback head 54 is composed of a magnetic film 55 exhibiting a magnetoresistive effect, and shield films (magnetic playback element shield portions) 56 and 57 disposed on the trailing and leading sides of the magnetic film 55 so as to sandwich the magnetic film 55. The top portion 55a of the magnetic film 55, the top portion 56a of the shield film 56, and the top portion 57a of the shield film 57 are exposed at the ABS 43 of the slider 42. The top portion 55a of the magnetic playback element protrudes in the direction of the magnetic disk beyond the top portions 56a and 57a of the shield films, with the amount of protrusion being approximately 1 nm or less.

[0056] The recording head 58 is provided on the trailing end 42 b side of the slider 42 with respect to the reproducing head 54 .

[0057] Figure 4 is a perspective view schematically showing the periphery of the write gap WG of the recording head 58, Figure 5 It will Figure 4 FIG. 1 is a schematic diagram showing a partially enlarged view of the recording head 58 as viewed from the floating surface side.

[0058] like Figures 3 to 5 As shown, the recording head 58 has a main magnetic pole 60 made of a high saturation magnetization material that generates a recording magnetic field in a direction perpendicular to the surface of the magnetic disk 1, a trailing shield (auxiliary magnetic pole) 62 made of a soft magnetic material that is arranged on the trailing side of the main magnetic pole 60 and is provided to efficiently close the magnetic circuit through the soft magnetic layer 102 directly below the main magnetic pole 60, recording coils 64a, 64b that are arranged in a manner wound around a magnetic core (magnetic circuit) including the main magnetic pole 60 and the trailing shield 62 in order to allow magnetic flux to flow toward the main magnetic pole 60 when writing a signal to the magnetic disk 1, and a flux control layer 65 that is arranged in a write gap between the end 60a on the ABS43 side of the main magnetic pole 60 and the trailing shield 62 and is coplanar with the ABS43.

[0059] The main magnetic pole 60, formed of a soft magnetic material, extends approximately perpendicularly to the surface of the magnetic disk 1 and the ABS 43. The lower end of the main magnetic pole 60 on the ABS 43 side has a recessed portion 60b that tapers toward the ABS 43 and is funnel-shaped in the track width direction, and an end portion 60a of a predetermined width that extends from the recessed portion 60b toward the magnetic disk. The top, or lower, end portion 60a is exposed at the ABS 43 of the magnetic head. The width of the end portion 60a in the track width direction roughly corresponds to the width of the track on the magnetic disk 1.

[0060] The trailing shield 62, formed of a soft magnetic material, is formed into a substantially L-shape. The trailing shield 62 includes an end portion 62a that faces the end portion 60a of the main magnetic pole 60 across a write gap WG, and a connecting portion (back gap portion) 50 that is separated from the ABS 43 and connected to the main magnetic pole 60. The connecting portion 50 is connected to the upper portion of the main magnetic pole 60, that is, the upper portion that is separated from the ABS 43 and upward, via a non-conductive member (not shown).

[0061] The end portion 62a of the trailing shield 62 is formed into an elongated rectangular shape. The lower end portion 62a' of the trailing shield end portion 62a is exposed at the ABS 43 of the slider 42. The leading-side end surface 62b of the end portion 62a (main magnetic pole end surface) extends along the width direction of the magnetic disk 1 track and is inclined toward the trailing side relative to the ABS 43. This leading-side end surface 62b is substantially parallel to the shield-side end surface 60c of the main magnetic pole 60 at the lower end portion (end portion 60a and a portion of the recessed portion 60b) of the main magnetic pole 60, across the write gap WG. The top portion 60a' of the main magnetic pole 60 protrudes toward the magnetic disk 1 beyond the lower end portion (magnetic recording element shield portion) 62a' of the trailing shield end portion 62a and the lower end portion (magnetic recording element shield portion) 44a of the head portion 44, with the protrusion being approximately 1 nm or less.

[0062] like Figure 4 As shown, the recording head 58 shows a MAMR (Microwave Assisted Magnetic Recording) element as an example, and the STO (Spin Torque Oscillator) element 65 unique to the MAMR element is arranged at the position of the aforementioned write gap. The STO element 65, for example, has a spin injection layer 65c on the main magnetic pole 60 side and an oscillation layer 65b on the write shield side. An intermediate layer not shown in the figure can be provided between the spin injection layer 65c and the oscillation layer 65b. In addition, a hot seed layer (HotSL) portion 81 is provided on the portion of the write shield 62 close to the main magnetic pole 60, and the HotSL portion 81, like the main magnetic pole 60, protrudes toward the magnetic disk 1 relative to the write shield 62. The amount of protrusion is about 1 nm or less. In addition, as shown in FIG. Figure 5 As shown, the main magnetic pole 60 and the HotSL portion 81 protrude from the end portion 62 a of the write shield 62 in a direction approaching a magnetic disk (not shown) (for example, in a direction indicated by an arrow 141 ).

[0063] exist Figure 6 Graphs showing how the magnetic recording element and the magnetic reproducing element protrude from the floating surface are shown in FIG.

[0064] In addition, here, the shape of the floating surface of the head of the magnetic head having a protective layer formed along the protruding shapes of the magnetic recording element 60 (81) and the magnetic reproducing element 55 was measured. Each curve 111, 112, and 113 represents the relationship between the distance from the floating surface side end 42c of the AlTiC member constituting the slider 42 and the gap between the surface of the magnetic recording medium 1 and the floating surface 43. Curve 111 represents the landing state, curve 112 represents the retreat state, and curve 113 represents the case where the thermal expansion of the magnetic recording element 60 (81) and the magnetic reproducing element 55 (magnetic recording and reproducing element) based on the DFH technology is turned off.

[0065] The area where the distance from the floating surface side end 42c is lower than 0 represents the cross-sectional shape of the floating surface of the AlTiC component, the area where the distance from the floating surface side end 42c is higher than 0 represents the cross-sectional shape of the floating surface of the head 44, and the portion where the distance from the floating surface side end 42c is 0 represents the boundary between the AlTiC component and the component constituting the head 44 (e.g., alumina).

[0066] exist Figure 6 In the figure, protrusion 111c represents the protrusion of the magnetic reproducing element 55, and region 111d represents the magnetic reproducing element shielding portions 56a and 57a surrounding the magnetic reproducing element 55. As shown in the figure, protrusion 111c protrudes by approximately 1 nm or less than region 111d of the magnetic reproducing element shielding portions 56a and 57a. Furthermore, protrusion 111b represents the protrusion of the magnetic recording element 60 (81), and region 111a represents the magnetic recording element shielding portion 44a surrounding the magnetic recording element 60 (81). As shown in the figure, protrusion 111b protrudes by approximately 1 nm or less than region 111a of the magnetic recording element shielding portion 44a.

[0067] In this way, Figure 6 As shown, the magnetic recording and reproducing element parts 58, 54 (magnetic reproducing element: reader and magnetic recording element: writer) of the magnetic head 10 mounted on the magnetic disk device 100 (HDD) protrude toward the magnetic disk 1 relative to the surrounding shielding part, and the protrusion amount is less than about 1 nm.

[0068] Typically, in the manufacture of an HDD 100 equipped with such a magnetic head 10, after the assembly process of the HDD 100, in an inspection process, a portion of the protrusion including the magnetic recording and reproducing element portions 58 and 54 is heated to cause thermal expansion, thereby causing it to protrude and once contact the magnetic disk 1 (landing (TD)). From there, it is pulled back (backed off (BO)) to achieve the desired gap, thereby performing an adjustment to suppress the deviation of the gap between the heads (landing / backed off adjustment).

[0069] By keeping the distance between the magnetic recording and reproducing element parts 58 and 54 protruding toward the disk 1 side from the shield part at a constant level by the aforementioned landing / retraction adjustment, there are advantages in that the unevenness of the recording and reproducing capabilities between the heads is reduced and the assembly yield of the hard disk device 100 is improved. On the other hand, during landing, the protruding parts of the magnetic recording and reproducing element parts 58 and 54 are cut due to contact with the disk 1, and there is a tendency for the magnetic recording and reproducing element parts 58 and 54 to be damaged. This is because, for example, Figure 6 As shown in the curve 111 at the time of landing, what can detect the contact between the magnetic head and the disk at the time of landing (Spacing = 0nm) is the shielding part arranged around the protrusion of the magnetic recording and reproducing element part 58, 54. When the distance relative to the disk is close to approximately zero, it is difficult to detect that the protrusion of the magnetic recording and reproducing element part 58, 54 is in contact with the magnetic disk 1.

[0070] In addition, after the landing / retreat adjustment, the protrusions of the magnetic recording and reproducing element parts 58 and 54 are very close to the magnetic disk. When the occasional gap changes during the operation of the HDD (such as interference such as impact and vibration) are applied, they come into contact with the magnetic disk 1 and are cut. As a result, there is a possibility that the magnetic recording and reproducing element parts 58 and 54 are damaged.

[0071] Therefore, in the magnetic head of the embodiment, by adjusting the thickness of the protective layer of the magnetic head of the magnetic disk device, the impact of damage caused by the contact between the protrusion of the magnetic recording and reproducing element and the magnetic recording medium during landing and operation on the performance and reliability of the device is reduced, thereby ensuring the performance and reliability of the device.

[0072] exist Figure 7 2 is a diagram schematically showing the periphery of the magnetic recording element portion of the magnetic head before processing.

[0073] As shown in the figure, in the magnetic recording element portion 58 of the magnetic head 10 before processing, the protrusion 60a' of the main magnetic pole 60 and the protrusion 81b of the HotSL portion 81 form a magnetic recording element protrusion 80b that protrudes toward the medium relative to the surrounding magnetic recording element shield 44a. A protective layer 68, such as carbon, is provided on the magnetic recording element protrusion 80b and the magnetic recording element shield 44a disposed around the magnetic recording element protrusion 80b via a close-fitting layer 70, such as silicon. The thickness of the close-fitting layer 70 can be set to approximately 0.3 to 1.0 nm. The thickness T1 of the protective layer 68 can be set to approximately 1.0 to 2.0 nm. The close-fitting layer 70 is used to ensure close contact between the protective layer 68 and the magnetic recording element portion 58. In addition, by covering the magnetic recording element portion 58 with the close-fitting layer 70 and the protective layer 68, the magnetic recording element portion 58 is protected from corrosion and contact damage. The protective layer 68 includes a first region 68b on the magnetic recording element protrusion 80b and a second region 68a on the magnetic recording element shield 44a. The first region 68b includes a protrusion 68-1 formed along the contour of the protrusion 60a' of the main magnetic pole 60 and a protrusion 68-2 formed along the contour of the protrusion 81b of the HotSL portion 81. In the unprocessed protective layer 68, the first region 68b protrudes more than the second region 68a. A thicker protective layer 68 more reliably protects the magnetic recording and reproducing elements 58 and 54. However, an excessively thick protective layer widens the gap between the magnetic recording and reproducing elements 58 and 54 and the magnetic disk 1, potentially reducing recording and reproducing capabilities and, consequently, recording density. Furthermore, if the protruding first region 68b contacts the magnetic recording medium 1 during landing, the magnetic recording element 58 is likely to be damaged.

[0074] Therefore, in the magnetic head of the embodiment, the protective layer 68 is processed so that the first region 68b and the second region 68a are flush with each other or the first region 68b is recessed relative to the second region 68a.

[0075] exist Figure 8 2 is a diagram schematically showing the periphery of the magnetic recording element portion of the magnetic head after processing according to the embodiment.

[0076] exist Figure 8 In the magnetic head shown in FIG. 1 , the protrusions 68-1 and 68-2, respectively indicated by dotted lines, of the first region 68b provided on the protrusion 80b of the magnetic recording element of the protective layer 68 are removed, so that the first region 68b and the second region 68a of the protective layer 68 can be formed into the same plane. In this case, the thickness T2 of the protective layer can be set to about 0.0 to 1.0 nm. The other structures are the same as those in FIG. Figure 7 The composition is the same.

[0077] In order to achieve the desired protective performance and an optimized film thickness for the protective layer 68 left after forming, the thickness T1 of the protective layer before processing can be formed thick in advance. If only the area of the magnetic recording and reproducing element portion 54, 58 has the desired protective layer thickness (the thickness that can be protected), then even if the protective layer 68 in other parts is thick, the magnetic recording and reproducing performance and long-term reliability will not be deteriorated. In other words, by forming the protective layer 68 thicker, the coverage becomes better, the surface energy is reduced, and the effect of suppressing the adhesion of contaminants, which is one of the main factors causing the change in the floating amount of the magnetic head 10, is also produced.

[0078] exist Figure 19 2 is a diagram schematically showing the periphery of the magnetic reproducing element portion of the magnetic head before processing.

[0079] As shown in the figure, in the magnetic reproducing element portion 54 of the magnetic head 10 before processing, the top end of the magnetic reproducing element 55 forms a magnetic reproducing element protrusion 55a that protrudes toward the medium direction relative to the top ends 56a and 57a of the surrounding magnetic reproducing element shielding portions 56 and 57. On the magnetic reproducing element protrusion 55a and the magnetic reproducing element shielding portions 56 (56a) and 57 (57a) provided around the magnetic reproducing element protrusion 55a, for example, Figure 7 Similarly, a protective layer 68 can be provided via an adhesion layer 70. The adhesion layer 70 is used to ensure close contact between the protective layer 68 and the magnetic reproducing element unit 54. Furthermore, by covering the magnetic reproducing element unit 54 with both the adhesion layer 70 and the protective layer 68, the magnetic reproducing element unit 54 is protected from corrosion and contact damage. The protective layer 68 includes a third region 68-3 on the magnetic reproducing element protrusion 55a and a fourth region 68-3a on the magnetic reproducing element shields 56 and 57. The third region 68-3 is formed along the contour of the magnetic reproducing element protrusion 55a. In the unprocessed protective layer 68, the third region 68-3 protrudes further than the fourth region 68-3a. A thicker protective layer 68 provides more reliable protection for the magnetic recording and reproducing element units 58 and 54. However, an excessively thick protective layer 68 widens the gap between the magnetic recording and reproducing element units 58 and 54 and the magnetic disk 1, potentially leading to a decrease in recording and reproducing performance and, consequently, a decrease in recording density. Furthermore, if the protruding third region 68 - 3 comes into contact with the magnetic recording medium 1 at the time of landing, the magnetic reproducing element unit 54 tends to be damaged.

[0080] Therefore, in the magnetic head of the embodiment, the protective layer 68 is processed so that the third region 68-3 and the fourth region 68-3a are flush with each other or the third region 68-3 is recessed relative to the fourth region 68-3a.

[0081] exist Figure 20 2 is a diagram schematically showing the periphery of the magnetic reproducing element portion of the magnetic head after processing according to the embodiment.

[0082] exist Figure 20 In the magnetic head shown in FIG. 1 , the protrusion indicated by the dotted line in the third region 68-3 on the magnetic reproduction element protrusion 55a of the protective layer 68 is removed, so that the third region 68-3 and the fourth region 68-3a of the protective layer 68 are formed into the same plane. In this case, the thickness T2-2 of the protective layer can be set to about 0.0 to 1.0 nm. The other structures are the same as those in FIG. Figure 19 The composition is the same.

[0083] In order to achieve the desired protective performance and an optimized film thickness for the protective layer 68 left after forming, the thickness T1 of the protective layer before processing can be formed thick in advance. If only the area of the magnetic recording and reproducing element portion 54, 58 has the desired protective layer thickness (the thickness that can be protected), then even if the protective layer 68 in other parts is thick, the magnetic recording and reproducing performance and long-term reliability will not be deteriorated. In other words, by forming the protective layer 68 thicker, the coverage becomes better, the surface energy is reduced, and the effect of suppressing the adhesion of contaminants, which is one of the main factors causing the change in the floating amount of the magnetic head 10, is also produced.

[0084] When using the magnetic head of the embodiment, by adjusting the thickness of the magnetic head protective layer, damage to the magnetic head caused by contact with the magnetic recording medium can be reduced. By reducing the impact of damage caused by contact between the protruding portion of the magnetic recording and reproducing element and the magnetic recording medium during landing and operation on device performance and reliability, device performance and reliability can be ensured.

[0085] (Example 2)

[0086] exist Figure 9 3 is a schematic diagram showing an enlarged view of the periphery of a magnetic recording element portion of a modified example of a magnetic head before processing.

[0087] The magnetic head 10-1 is a magnetic head that adopts a thermally assisted recording method. As shown in the figure, in the thermally assisted recording method, by applying laser light, the magnetic recording and reproducing element portion 71 including the magnetic recording element portion, the magnetic recording and reproducing portion, and the near-field optical transducer (NFT) portion has a protrusion 71b that protrudes from the magnetic recording and reproducing element shield portion 71a provided therearound. On the magnetic recording and reproducing element shield portion 71a and the protrusion 71b, a protective layer 68-1 such as carbon is provided via a close contact layer 70' such as silicon. The thickness of the close contact layer can be set to approximately 0.3 to 1.0 nm. The thickness T1-1 of the protective layer can be set to approximately 1.0 to 3.0 nm. By covering the magnetic recording and reproducing element portion 71b with the close contact layer 70' and the protective layer 68-1, the magnetic recording and reproducing element portion 71b is protected from corrosion and contact damage. The protective layer 68-1 includes a first region 68-1b on the protruding portion 71b of the magnetic recording and reproducing element unit 71 and a second region 68-1a on the magnetic recording and reproducing element shield 71a. The first region 68-1b of the protective layer 68-1 is provided along the contour of the magnetic recording and reproducing element unit 71 via a contact layer 71b'. In the unprocessed protective layer 68-1, the first region 68-1b protrudes more than the second region 68-1a. A thicker protective layer 68-1 more reliably protects the magnetic recording and reproducing element unit 71. However, an excessively thick protective layer 68-1 widens the gap between the magnetic recording and reproducing element 71 and the magnetic disk 1, potentially reducing recording and reproducing capabilities and, consequently, recording density. Furthermore, if the protruding first region 68-1b contacts the magnetic recording medium 1 during landing, the magnetic recording element unit 58 is likely to be damaged. The NFT portion of the magnetic recording and reproducing element section 71 is an important element that determines the recording performance of the thermally assisted recording method. Therefore, from the viewpoint of maintaining performance and reliability, damage such as contact should be avoided as much as possible.

[0088] exist Figure 10 3 is an enlarged view of the periphery of the magnetic recording element portion of a modified example of the processed magnetic head according to the embodiment.

[0089] As shown in the figure, in the processed magnetic head 10-2, the protrusion 68-1b' of the first region 68-1b of the protective layer 68-1 is processed, for example, by removing the protrusion 68-1b' in a state in which the protrusion 68-1b is slightly protruded in advance by applying laser, so as to be flush with the second region 68-1a on the shielding portion 71a. When the laser is applied, the protective layer 68-1 is set in the same plane as the shielding portion. In this case, the thickness T2-1 of the protective layer 68-1 can be set to about 0.0 to 2.0 nm. The other structures are the same as those of FIG. Figure 9 The composition is the same.

[0090] By using a modified example of the magnetic head of the embodiment, damage to the magnetic head caused by contact with the magnetic recording medium can be reduced by adjusting the thickness of the protective layer of the magnetic head of the magnetic recording and reproducing device. Furthermore, by reducing the impact of damage caused by contact between the protruding portion of the magnetic recording and reproducing element and the magnetic recording medium during landing and operation on device performance and reliability, device performance and reliability can be ensured.

[0091] (Example 3)

[0092] exist Figure 11 2 is an enlarged view of the periphery of the magnetic recording element portion of another modified example of the processed magnetic head according to the embodiment.

[0093] As shown in the figure, in the magnetic head 10-2 of another modified example after processing, when the first area 68-1c of the protective layer 68-1 is slightly protruded in advance by applying a laser, the first area 68-1c is processed by using a laser power stronger than that of the embodiment 2 so as to protrude more. As a result, the amount of removal is greater than that of the embodiment 2, so that the first area 68-1c of the protective layer 68-1 is recessed relative to the second area 68-1a on the shield portion 71a. At this time, the thickness T3 of the protective layer can be set to about 0.0 to 1.0 nm. The other structures are the same as those of the embodiment 2. Figure 9 The composition is the same.

[0094] In this way, if a variation of the magnetic head of the embodiment is used, by adjusting the thickness of the protective layer of the magnetic head of the magnetic recording and reproducing device, the impact of damage caused by the contact between the protrusion of the magnetic recording and reproducing element and the magnetic recording medium during landing and operation on the performance and reliability of the device can be reduced, thereby ensuring the performance and reliability of the device.

[0095] In Examples 1 to 3, the first region or the third region of the protective layer used in the magnetic head can be cut during the production of the magnetic head or during the inspection process of the magnetic head or the recording medium.

[0096] (Example 4)

[0097] The manufacturing method of the magnetic head of the third embodiment includes an example of a time to cut the protective layer used in the magnetic head, including: landing the magnetic head on the surface of a magnetic recording medium having a cutting portion, and cutting at least the protective layer on the magnetic recording element protrusion or the magnetic reproducing element protrusion of the magnetic head using the cutting portion.

[0098] In addition, the manufacturing method of the magnetic recording and reproducing device of the fourth embodiment includes: after assembling a magnetic recording and reproducing device including a magnetic recording medium having a cutting portion and a magnetic head, landing the magnetic head on the surface of the magnetic recording medium, and cutting at least the protective layer on the magnetic recording element protrusion or the magnetic reproducing element protrusion of the magnetic head using the cutting portion.

[0099] By using these methods, the first region or the third region of the protective layer used in the magnetic head can be cut simultaneously in the landing process without increasing the number of steps. The landing process can be performed as one of the inspection steps in the manufacturing method of the magnetic head or the recording and reproducing device, for example.

[0100] exist Figure 12 Detailed Description of the Preferred Embodiment 3 A flowchart showing a method for manufacturing a magnetic head according to the third embodiment is shown in FIG.

[0101] As shown in the figure, the recording and playback element is first formed on the slider's head (ST121). Next, the recording and playback element undergoes polishing using ion beam etching (IBE) to correct its shape and perform fine surface processing (ST122). Afterwards, the raised surface is contoured (ST123). Next, the landing process is performed (ST124), while simultaneously removing the protruding portion of the protective layer. Afterwards, shipping inspection is performed (ST125).

[0102] In addition, Figure 13 Detailed Description of the Invention A flowchart showing a method for manufacturing a magnetic recording and reproducing device according to a fourth embodiment is shown in FIG.

[0103] Here, the landing step is performed as a part of the inspection step of the method for manufacturing the magnetic recording and reproducing device.

[0104] As shown in the figure, the magnetic recording and reproducing device is first assembled within a housing (ST126). Next, a servo write (SW) process is performed to write positioning information to the servo area of the magnetic recording medium (ST127). Next, a landing process is performed at the desired position (ST128), while simultaneously cutting the protruding portion of the protective layer. Based on the results of the landing process, the optimal floating amount and the current applied to the recording element are adjusted (ST129). Finally, the recording and reproducing performance of the magnetic recording and reproducing device is inspected (ST130).

[0105] like Figure 12 and Figure 13As shown, the timing of cutting the protrusion of the protective layer in the landing process can be roughly divided into two types: after the magnetic head is manufactured and before the shipment inspection, or after the magnetic recording and reproducing device is manufactured and before the shipment inspection. In either case, the landing process (ST124) or the landing process (ST128) can be performed by actually floating the magnetic head on the disk and repeatedly landing it, or by maintaining the landing state for a certain period of time, so that the protrusion of the protective layer is in contact with the disk and wears it, thereby cutting the protrusion. In addition, at this time, by adjusting the DFH power during landing to control the cutting amount and time, it is possible to adjust the method of cutting the protrusion stably in a shorter time.

[0106] The landing process (ST124) or the landing process (ST128) does not change significantly whether in the magnetic head manufacturing process or in the HDD manufacturing process, and is carried out through the following process. First, DFH power is applied while monitoring the value of the contact detection sensor arranged near or inside the magnetic head. In the magnetic head manufacturing process, an AE (Acoustic Emission) sensor can be arranged in the suspension mechanism supporting the magnetic head to perform contact detection. In the manufacturing process of the magnetic recording and reproducing device, an HDI (Head Disk Interface) sensor can be used as a temperature sensor built into the magnetic head to perform contact detection. For example, if DFH power is applied, the magnetic reproducing element of the magnetic head or the protrusion near the magnetic recording element contacts the magnetic disk, then the vibration at this time is detected and the output value of the AE sensor becomes larger, and also, heat is detected and the output value of the HDI sensor becomes larger. A threshold value is set in advance for the output value, and if the output of each sensor exceeds the threshold value, it is determined to be landing. During this landing, the magnetic recording and reproducing element portion contacts the magnetic disk, so its protruding portion can be cut.

[0107] (Example 5)

[0108] exist Figure 14 Graph showing the relationship between the amount of DFH power applied to the magnetic head and the amount of change in landing power is shown in FIG.

[0109] On the horizontal axis of this figure, a DFH power application amount of 0 indicates that the shield is in contact with the disk surface (near the surface of the lubricant applied to the disk surface), and a touchdown is determined. Values less than 0 (to the left of 0) indicate that the gap between the head and the disk is increased by reducing the DFH power application amount. Furthermore, values greater than 0 (to the right of 0) indicate that the gap between the disk and the head is decreased by increasing the DFH power application amount. The DFH power application amount when the first touchdown is determined is TD0.

[0110] Next, a DFH power greater than the TD0 is applied. As a result, the magnetic head and the magnetic medium are in stronger contact than at the first landing. Afterwards, the DFH power application amount is pulled back to the desired value, so that the magnetic head is fully separated from the magnetic disk. Next, a DFH power greater than the last time is applied to make the magnetic head and the magnetic medium contact, and then pulled back. If this action is repeated and the DFH power application amount is gradually increased, the protective layer of the shielding part is cut accordingly, and the gap between the magnetic head and the magnetic disk becomes larger. Therefore, repeatedly, when the DFH power application amount is applied, the protective layer of the shielding part is in contact, and the DFH power application amount at the time of landing is determined to be gradually increased. The curve obtained by plotting the difference between the landing power application amount and the applied power TD0 at the first landing on the vertical axis is Figure 14 Curve 131.

[0111] In the curve 131, there is a region 131a where there is no change in landing power from TD0 to near 80 mW. TD0 is the power when the protective layer of the shielding part contacts the lubricant surface of the magnetic disk, so the gap between the protective layer of the protruding part of the magnetic recording and reproducing element and the protective layer formed under the lubricant of the magnetic disk is smaller than the gap between the lubricant surface and the protective layer of the magnetic disk. If the DFH power application amount is further increased from this state, the protective layer of the protruding part of the magnetic recording and reproducing element contacts the magnetic disk surface before the shielding part and begins to wear. If the DFH power application amount is further increased, the protective layer of the protruding part of the magnetic recording and reproducing element (the protruding part of the protective layer) is fully removed, and the protective layer on the shielding part contacts the magnetic disk. This is based on Figure 14 As shown in the curve 131, when the power is 80mW. After this, if the DFH power applied is increased, the shielding layer is cut due to contact, so the landing power increases according to the amount of cutting, that is, the amount of DFH power applied. Figure 14 The reason why the landing power change increases to the right when the DFH power application amount exceeds 80mW in curve 131 is shown in FIG.

[0112] Considering this, the horizontal axis value (DFH power applied) of region 131a corresponds to the size of the protruding portion of the protective layer of the magnetic recording and reproducing element that has been removed. Although this varies depending on the component structure of the magnetic head and the surface condition of the magnetic disk, for example, 80 mW corresponds to approximately 0.3 nm. Therefore, in this case, the protrusion of the protective layer of the magnetic recording and reproducing element is approximately 0.3 nm.

[0113] In order to actually remove the protruding portion of the protective layer of the magnetic recording and reproducing element, the DFH power application amount at which the region 131a disappears is previously investigated and set as Figure 12 The landing process during the manufacture of the magnetic head shown in the figure, Figure 13The setting value of the protrusion cutting amount of the protective layer in the landing process during HDD manufacturing shown above can be used. In this way, a magnetic head in which the magnetic recording and reproducing element does not protrude from the shield surface or a hard disk drive equipped with the magnetic head can be stably manufactured.

[0114] (Example 6)

[0115] The magnetic recording medium used in the second embodiment and the fourth embodiment can be provided with a cutting portion capable of cutting by contacting at least the first region or the third region of the protective layer during landing.

[0116] The cutting portion may include one or more protrusions provided on the surface of the magnetic recording medium. Alternatively, the cutting portion may be provided on the surface of the magnetic recording medium so that the surface roughness of the cutting portion is greater than that of the area other than the cutting portion.

[0117] Figure 15 This is a schematic diagram showing an example of a magnetic recording medium used in the embodiment.

[0118] The disk-shaped magnetic recording medium 1-1 has a cutout portion 13-2 at a specific location (eg, the inner circumference of a track). The cutout portion 13-2 may have a concave-convex shape that facilitates cutting when in contact with a protruding portion of the protective layer.

[0119] Figure 16 It is a schematic diagram showing an example of the shape of the cutting portion.

[0120] The surface roughness of the cutting portion 134 is greater than the surface roughness of the data surface 134 a .

[0121] Figure 17 It is a schematic diagram showing another example of the shape of the cutting portion.

[0122] The cutout portion 135 is a section having a concavo-convex shape with respect to the surface 135 a of the disk, and can be provided, for example, at the innermost peripheral region of the disk surface.

[0123] Figure 18 It is a schematic diagram showing another example of the shape of the cutting portion.

[0124] The cutting portion 136 has a protrusion 136 a that facilitates cutting of the recording and reproducing protrusion by causing the protrusion to collide with the protrusion.

[0125] Figures 16-18 The cutouts 134 and 136 shown can be provided at the same position as the cutout 13 - 2 or at the innermost peripheral region on the disk surface.

[0126] The magnetic recording medium having a cutting portion can be used when the magnetic head is landed to cut the protrusion of the protective layer. As needed, the magnetic recording medium can be removed after use in the process of cutting the protrusion, or can remain in the magnetic recording and reproducing device and be used as it is. When set in the magnetic recording and reproducing device, even if the process of landing the magnetic head to cut the protrusion of the protective layer is not set during the manufacture of the magnetic head or the HDD, the magnetic head can be landed to cut the protrusion of the protective layer when the magnetic recording and reproducing device is used, which can further simplify the process during the manufacture of the magnetic head or the HDD.

[0127] While some embodiments of the present invention have been described, these embodiments are provided as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other ways and can be omitted, replaced, or modified without departing from the gist of the invention. These embodiments and their variations are included within the scope and gist of the invention and are included in the invention described in the claims and their equivalents.

Claims

1. A magnetic head that floats above a magnetic recording medium to record or reproduce magnetic information, characterized in that: The floating surface side opposite to the magnetic recording medium during floating includes an element portion of at least one of a magnetic recording element portion or a magnetic reproducing element portion and a protective layer for protecting the element portion. The magnetic recording element portion includes a magnetic recording element, a magnetic recording element protruding portion protruding from the magnetic recording element, and a magnetic recording element shield portion surrounding the magnetic recording element protruding portion. The magnetic reproducing element portion includes a magnetic reproducing element, a magnetic reproducing element protruding portion protruding from the magnetic reproducing element, and a magnetic reproducing element shield portion surrounding the magnetic reproducing element protruding portion. When the element portion is the magnetic recording element portion, the protective layer includes a first region on the protruding portion of the magnetic recording element and a second region on the shield portion of the magnetic recording element; when the element portion is the magnetic reproducing element portion, the protective layer includes a third region on the protruding portion of the magnetic reproducing element and a fourth region on the shield portion of the magnetic reproducing element. The first region and the second region are coplanar, or the first region is recessed relative to the second region. The third region and the fourth region are coplanar, or the third region is recessed relative to the fourth region.

2. The magnetic head according to claim 1, The first region or the third region is cut during the inspection step of the magnetic head.

3. A magnetic recording and reproducing device, The magnetic head according to claim 1 or 2 is included.

4. The magnetic recording and reproducing device according to claim 3, The first region or the third region is cut during the inspection step of the magnetic recording medium.

5. The magnetic recording and reproducing device according to claim 3, The magnetic recording medium further includes a cutting portion capable of cutting by contacting at least the first region or the third region of the protective layer during landing.

6. The magnetic recording and reproducing device according to claim 5, The cutting portion includes one or more protrusions provided on the surface of the magnetic recording medium.

7. The magnetic recording and reproducing device according to claim 5, The cutting portion is provided on the surface of the magnetic recording medium, and the surface roughness of the region of the cutting portion is greater than the surface roughness of the region other than the cutting portion.

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