Substrate transfer apparatus and method

Abstract

A substrate transfer device including a non-contact driving section is provided. The substrate transfer device includes a stator assembly including a driving surface and an electromagnetic generation module, a first mover including a first magnet module facing the electromagnetic generation module and floatingly moving on the driving surface and including a first inclined surface, a second mover including a second magnet module facing the electromagnetic generation module and floatingly moving on the driving surface and including a second inclined surface, and a transfer member disposed between the first mover and the second mover and moving along the first inclined surface and the second inclined surface according to a distance between the first mover and the second mover.

Description

TECHNICAL FIELD

[0001] The present application relates to a substrate transfer apparatus and method. BACKGROUND

[0002] When manufacturing a semiconductor device or a display device, various processes such as photolithography, etching, ashing, ion implantation, thin film evaporation, cleaning, and the like are performed. Among them, the photolithography process includes a coating process, an exposure process, and a development process. A photosensitive liquid is coated on a substrate (i.e., the coating process), a circuit pattern is exposed on the substrate on which a photosensitive film is formed (i.e., the exposure process), and a region of the substrate subjected to the exposure process is selectively developed (i.e., the development process).

[0003] On the other hand, in order to subject the substrate to the above-described various processes, it is necessary to move the substrate to a device that performs each process. A transfer robot transfers the substrate from one device (e.g., a coating device) to another device (e.g., an exposure device). However, the transfer robot includes a contact-type driving portion, generates dust, and is inevitably limited. SUMMARY

[0004] PROBLEMS TO BE SOLVED BY THE INVENTION

[0005] An object of the present application is to provide a substrate transfer apparatus including a non-contact driving portion.

[0006] Another object of the present application is to provide a substrate transfer method using a substrate transfer apparatus including a non-contact driving portion.

[0007] The objects of the present application are not limited to the above-mentioned objects, and other objects that are not mentioned can be clearly understood by those skilled in the art from the following description.

[0008] MEANS FOR SOLVING THE PROBLEMS

[0009] One aspect of the substrate transfer apparatus of the present application for solving the above-mentioned problems includes: a stator assembly including a driving surface and an electromagnetic generation module; a first mover including a first magnet module facing the electromagnetic generation module, floatingly moving on the driving surface, and including a first inclined surface; a second mover including a second magnet module facing the electromagnetic generation module, floatingly moving on the driving surface, and including a second inclined surface; and a transfer member disposed between the first mover and the second mover, and moving along the first inclined surface and the second inclined surface according to a distance between the first mover and the second mover.

[0010] Another aspect of the substrate transfer device according to the present application for solving the above problem includes: a stator assembly including a driving surface and an electromagnetic generation module; a first mover including a first magnet module facing the electromagnetic generation module and floatingly moving on the driving surface, and including a first bottom surface and a first inclined surface at an acute angle to each other; a second mover including a second magnet module facing the electromagnetic generation module and floatingly moving on the driving surface, and including a second bottom surface and a second inclined surface at an acute angle to each other, the second inclined surface facing the first inclined surface; and a transfer member disposed between the first mover and the second mover and moving along the first inclined surface and the second inclined surface according to a distance between the first mover and the second mover, the transfer member including a first support surface facing the first inclined surface and a second support surface facing the second inclined surface, the first mover including a first magnet member disposed in the first inclined surface, the transfer member including a second magnet member disposed in the first support surface, the second mover including a third magnet member disposed in the second inclined surface, and the transfer member including a fourth magnet member disposed in the second support surface.

[0011] One aspect of the substrate transfer method according to the present application for solving the above problem includes: providing a substrate transfer device including a first mover floatingly moving on a driving surface and including a first inclined surface, a second mover floatingly moving on the driving surface and including a second inclined surface, and a transfer member disposed between the first mover and the second mover and moving along the first inclined surface and the second inclined surface; making a distance between the first mover and the second mover a first distance and making a height of the transfer member a first height; moving the first mover and the second mover to move away from each other to make the distance between the first mover and the second mover a second distance, and making the transfer member descend along the first inclined surface and the second inclined surface as the first mover and the second mover move to make the height of the transfer member a second height.

[0012] Details of other embodiments are included in the detailed description and the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 is a perspective view for explaining a substrate transfer device according to one embodiment of the present application.

[0014] Figure 2 is a block diagram for explaining Figure 1 a substrate transfer device.

[0015] Figure 3 is a view for explaining Figure 1Sectional view of the III-III cut.

[0016] Figure 4 It is used for explanation Figure 1 The diagram shows the stator assembly.

[0017] Figure 5 It is used for explanation Figure 1 The diagram shows the relationship between the stator assembly and the first mover.

[0018] Figure 6 and Figure 7 This is a diagram illustrating the first operation of a substrate transfer apparatus according to an embodiment of the present invention.

[0019] Figure 8 This is a diagram illustrating the second operation of a substrate transfer apparatus according to an embodiment of the present invention.

[0020] Figure 9 This is a diagram illustrating the third operation of a substrate transfer apparatus according to an embodiment of the present invention.

[0021] Figure 10 This is a diagram illustrating the fourth operation of a substrate transfer apparatus according to an embodiment of the present invention.

[0022] Figure 11 as well as Figure 12 This is a diagram illustrating the fifth operation of a substrate transfer apparatus according to an embodiment of the present invention.

[0023] Figure 13 This is a diagram illustrating a substrate transfer apparatus according to another embodiment of the present invention.

[0024] Figure 14 This is a diagram illustrating a substrate transfer apparatus according to yet another embodiment of the present invention.

[0025] Figure 15 This is a diagram illustrating a substrate transfer apparatus according to yet another embodiment of the present invention.

[0026] Explanation of reference numerals in the attached figures

[0027] 100: Stator assembly; 100a: Drive surface

[0028] 110: Electromagnetic generation module 200: First moving part

[0029] 201: First magnet module; 210: First inclined surface

[0030] 211: First bottom surface; 220: First magnet component

[0031] 300: Second mover; 301: Second magnet module

[0032] 310: second inclined surface 311: second bottom surface

[0033] 320: third magnet member 400: transfer member

[0034] 401: second magnet member 402: fourth magnet member

[0035] 410: main body 420: first support portion

[0036] 421: first support surface 430: second support portion

[0037] 431: second support surface DETAILED DESCRIPTION

[0038] The advantages, features and methods of achieving them of the present application will become apparent by referring to the accompanying drawings and the following detailed description. However, the present application is not limited to the embodiments disclosed below, but can be implemented in various ways different from each other, and the present embodiments are provided only for the purpose of completely disclosing the present application and completely informing the scope of the application to those skilled in the art to which the present application pertains, and the present application is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same constituent elements.

[0039] "Below", "beneath", "lower", "above", "upper", and the like as spatially relative terms are used for the purpose of ease of description of the relative relationship between one element or constituent element and other elements or constituent elements as shown in the drawings. The spatially relative terms are to be understood as terms including the directions of the elements different from each other at the time of use or operation, in addition to the directions shown in the drawings. For example, in the case of turning over the elements shown in the drawings, the element described as "below" or "beneath" another element can be placed "above" the other element. Therefore, the exemplary term "beneath" can include all of the beneath and above. The elements can also be oriented in other directions, and thus the spatially relative terms can be interpreted according to the orientation direction.

[0040] It is to be understood that, although the terms first, second, etc. are used herein to describe various elements, constituent elements, and / or sections, these elements, constituent elements, and / or sections should not be limited by these terms. These terms are only used to distinguish one element, constituent element or section from another element, constituent element or section. Thus, a first element, constituent element or section discussed below could be termed a second element, constituent element or section without departing from the teachings of the present application.

[0041] Hereinafter, embodiments according to the present application will be described in detail with reference to the accompanying drawings. In describing the embodiments, like reference numerals are used to designate like elements throughout the several illustrations. The drawings used to describe the embodiments are as follows.

[0042] Figure 1 is a perspective view for explaining a substrate transfer device according to one embodiment of the present application. Figure 2 is a block diagram for explaining Figure 1 a substrate transfer device. Figure 3 is a sectional view taken along Figure 1 III - III cut of

[0043] Referring to Figures 1 to 3 , a substrate transfer device according to one embodiment of the present application includes a stator assembly 100 and a transfer assembly 20.

[0044] The stator assembly 100 includes a driving surface 100a extending in a first direction (e.g., x direction) 12 and a second direction (e.g., y direction) 14. For example, the stator assembly 100 can include a plurality of stator regions 100S arranged in a matrix form. Each stator region 100S can be in a plate form, and can include at least one electromagnetic generation unit. An exemplary structure of such a stator region 100S will be described later with Figure 4 .

[0045] The transfer assembly 20 transfers a substrate W while moving on the driving surface 100a. Such a transfer assembly 20 includes a first mover 200, a second mover 300, and a transfer member 400. The first mover 200 moves in suspension on the driving surface 100a, and includes a first inclined surface 210. The first inclined surface 210 is formed at an acute angle with respect to a first bottom surface 211. The second mover 300 moves in suspension on the driving surface 100a, and includes a second inclined surface 310. The second inclined surface 310 is formed at an acute angle with respect to a second bottom surface 311. As shown, the first inclined surface 210 and the second inclined surface 310 can be configured to face each other.

[0046] The transfer member 400 may be disposed between the first mover 200 and the second mover 300, and move along the first inclined surface 210 and the second inclined surface 310. The transfer member 400 may, for example, include a body 410, a first support portion 420 protruding from the body 410 toward the first mover 200, and a second support portion 430 protruding from the body 410 toward the second mover 300. The first support portion 420 includes a first support surface 421 facing the first inclined surface 210 of the first mover 200. The second support portion 430 includes a second support surface 431 facing the second inclined surface 310 of the second mover 300.

[0047] On the other hand, the controller 600 controls the movement of the stator assembly 100, the first mover 200, and the second mover 300. The controller 600 may include a memory 610 that stores data and instructions related to the movement control of the stator assembly 100, the first mover 200, and the second mover 300. The memory 610 may be located within the controller 600 or configured externally. Under the control of the controller 600, the first mover 200 and the second mover 300 can move along a first direction 12 and a second direction 14 (e.g., in the xy plane), and the interval between the first mover 200 and the second mover 300 can also be adjusted. The memory 610 includes, for example, indicators. Figures 6 to 13 The instructions for the multiple actions shown.

[0048] Since the first mover 200 and the second mover 300 are physically separated from each other, the first mover 200 and the second mover 300 can be moved independently by the controller 600 (see reference). Figure 2 (299, 399).

[0049] The transfer member 400 can move along the first inclined surface 210 of the first mover 200 and the second inclined surface 310 of the second mover 300, and in a third direction (e.g., the z-direction) 15 (see reference). Figure 2 (451, 452). Specifically, the height of the transfer member 400 can be changed according to the distance between the first mover 200 and the second mover 300. For example, when the distance between the first mover 200 and the second mover 300 is a first distance, the height of the transfer member 400 can be a first height. If the distance between the first mover 200 and the second mover 300 becomes a second distance greater than the first distance, the height of the transfer member 400 can be a second height lower than the first height.

[0050] On the other hand, an electromagnetic generation module 110 is provided within the stator assembly 100. A first magnet module 201, facing the electromagnetic generation module 110, is provided within the first mover 200. For example, the first magnet module 201 may be provided on the first bottom surface 211 of the first mover 200. A second magnet module 301, facing the electromagnetic generation module 110, is provided within the second mover 300. For example, the second magnet module 301 may be provided on the second bottom surface 311 of the second mover 300. Based on the electromagnetic forces of the electromagnetic generation module 110, the first magnet module 201, and the second magnet module 301, the first mover 200 and the second mover 300 can levitate and move on the driving surface 100a of the stator assembly 100. This will be achieved by utilizing... Figure 4 as well as Figure 5 Details will be discussed later.

[0051] Furthermore, as described above, the first inclined surface 210 of the first mover 200 and the first support surface 421 of the transfer member 400 face each other. A first magnet member 220 is disposed within the first inclined surface 210, and a second magnet member 401 is disposed within the first support surface 421. For example, the first magnet member 220 may be an electromagnet, and the second magnet member 401 may be a permanent magnet. The magnetic force of the electromagnet can be adjusted by adjusting the amount of current supplied to the first magnet member 220, thereby adjusting the gap between the first inclined surface 210 and the first support surface 421.

[0052] Similarly, the second inclined surface 310 of the second mover 300 and the second support surface 431 of the transfer member 400 face each other. A third magnet member 320 is disposed within the second inclined surface 310, and a fourth magnet member 402 is disposed within the second support surface 431. For example, the third magnet member 320 may be an electromagnet, and the fourth magnet member 402 may be a permanent magnet. The magnetic force of the electromagnet can be adjusted by adjusting the amount of current supplied to the third magnet member 320, thereby adjusting the gap between the second inclined surface 310 and the second support surface 431.

[0053] According to the design, the first magnet component 220 and the second magnet component 401 can both be electromagnets, or both can both be permanent magnets. The third magnet component 320 and the fourth magnet component 402 can also both be electromagnets, or both can both be permanent magnets.

[0054] The relative position can be controlled by the magnetic force generated in the electromagnetic generation module 110 of the stator assembly 100, the first magnet module 201 of the first mover 200, and the second magnet module 301 of the second mover 300. Alternatively, the relative position can be controlled by the magnetic force generated in the first magnet component 220 of the first mover 200, the third magnet component 320 of the second mover 300, the second magnet component 401 of the transfer component 400, and the fourth magnet component 402.

[0055] In summary, the stator assembly 100, the first mover 200, the second mover 300, and the transfer member 400 are physically separated from each other. The movement / position control of the stator assembly 100, the first mover 200, the second mover 300, and the transfer member 400 is achieved using non-contact driving forces such as electromagnets / permanent magnets. Therefore, the generation of particles that may occur due to the movement of the first mover 200, the second mover 300, and the transfer member 400 can be minimized. Process defects that may occur due to particles can be minimized.

[0056] Although the first mover 200 and the second mover 300 can be moved independently by the controller 600, the controller 600 can limit the distance between the first mover 200 and the second mover 300 within a preset range, so that the conveying component does not move away from the first mover 200 and the second mover 300. For this control method, the following will be utilized... Figures 6 to 12 Details will be discussed later.

[0057] Figure 4 It is used for explanation Figure 1 The diagram shows the stator assembly. Figure 5 It is used for explanation Figure 1 The diagram shows the relationship between the stator assembly and the first mover. Although in Figure 5 The relationship between the stator assembly and the first mover is described in the text, but it also applies to the relationship between the stator assembly and the second mover.

[0058] Reference Figure 4 The stator assembly 100 includes multiple stator regions 111, 112, 113, and 114 arranged in a matrix. Figure 4 Four stator regions 111, 112, 113, and 114 arranged in a 2×2 configuration are shown as an example, but are not limited thereto.

[0059] The electromagnetic generation modules 110 of stator regions 111, 112, 113, and 114 may include multiple stator layers 104, 105, 106, and 107. The first stator layer 104, the second stator layer 105, the third stator layer 106, and the fourth stator layer 107 may be arranged sequentially from top to bottom.

[0060] The first stator layer 104 and the third stator layer 106 include a plurality of first electromagnetic generating units 125 extending along a first direction 12. For example, the plurality of first electromagnetic generating units 125 have the same dimensions as each other.

[0061] The second stator layer 105 and the fourth stator layer 107 include a plurality of second electromagnetic generating units 126 extending along a second direction 14 different from the first direction 12. For example, the plurality of second electromagnetic generating units 126 have the same dimensions as each other.

[0062] Furthermore, any one of the stator layers 104, 105, 106, and 107 (e.g., 105) can be electrically insulated from other directly adjacent stator layers (e.g., 104, 106). For example, the stator layers 104, 105, 106, and 107 can be implemented as mutually insulated conductor path layers of a multilayer printed circuit board.

[0063] Multiple stator regions 111, 112, 113, and 114 can be implemented to receive power independently of each other. Specifically, within each of the stator regions 111, 112, 113, and 114, the first electromagnetic generation unit 125 and the second electromagnetic generation unit 126 can be implemented to be insulated from each other. On the other hand, within each of the stator regions 111, 112, 113, and 114, the first electromagnetic generation unit 125 of the first stator layer 104 and the first electromagnetic generation unit 125 of the third stator layer 106 can be electromagnetically connected. Similarly, within each of the stator regions 111, 112, 113, and 114, the second electromagnetic generation unit 126 of the second stator layer 105 and the second electromagnetic generation unit 126 of the fourth stator layer 107 can be electromagnetically connected.

[0064] Reference Figure 5 The first magnet module 201 of the first rotor 200 includes a plurality of magnets 201a, 201b, 201c, and 201d. The first magnet module 201 includes a plurality of first magnets 201a extending along a first rotor direction 206, a plurality of second magnets 201b extending along a second rotor direction 208, a plurality of third magnets 201c extending along a first rotor direction 206, and a plurality of fourth magnets 201d extending along a second rotor direction 208. The first magnets 201a and 201c, the second magnets 201b and 201d are magnetized in directions perpendicular to each other.

[0065] The first mover 200 can be aligned with the stator assembly 100, such that the first rotor direction 206 is oriented along the second direction 14, and the second rotor direction 208 is oriented along the first direction. During operation, the first magnet 201a and the third magnet 201c interact with the magnetic field generated by the second electromagnetic generation unit 126 to move the first mover 200 along the first direction 12. Similarly, the second magnet 201b and the fourth magnet 201d interact with the magnetic field generated by the first electromagnetic generation unit 125 to move the first mover 200 along the second direction 14.

[0066] Figure 6 as well as Figure 7 This diagram illustrates the first operation of a substrate transfer apparatus according to an embodiment of the present invention. The first operation is the up-and-down movement of the transfer member 400.

[0067] Reference Figure 6 Before the movement, the distance between the first mover 200 and the second mover 300 is the first distance L1. When the distance between the first mover 200 and the second mover 300 is the first distance L1, the height of the conveying member 400 is the first height H1.

[0068] Reference Figure 7 The distance between the moved first mover 200 and the second mover 300 is a second distance L2. The second distance L2 is greater than the first distance L1. If the distance between the first mover 200 and the second mover 300 increases, the conveying member 400 descends along the first inclined surface 210 and the second inclined surface 310. Therefore, when the distance between the first mover 200 and the second mover 300 is the second distance L2, the height of the conveying member 400 becomes a second height H2, which is lower than the first height H1.

[0069] Figure 8 This is a diagram illustrating the second operation of a substrate transfer apparatus according to an embodiment of the present invention.

[0070] Reference Figure 8 Before the movement, the distance between the first mover 200 and the second mover 300 is the first distance L1. As the first mover 200 and the second mover 300 move forward, the distance between them increases (refer to reference numerals D13 and D23 in the attached diagram). As a result, the distance between the first mover 200 and the second mover 300 after the movement is the second distance L2.

[0071] As the first mover 200 and the second mover 300 advance, the gap between them increases, and therefore the height of the conveying member 400 decreases as the first mover 200 and the second mover 300 advance.

[0072] Although not illustrated separately, if the gap between the first mover 200 and the second mover 300 decreases as they advance, the height of the conveying member 400 can increase as the first mover 200 and the second mover 300 advance.

[0073] Figure 9 This is a diagram illustrating the third operation of a substrate transfer apparatus according to an embodiment of the present invention.

[0074] Reference Figure 9 Before the movement, the distance between the first mover 200 and the second mover 300 is a first distance L1. As the first mover 200 and the second mover 300 move forward, the distance between them is maintained (refer to reference numerals D11 and D21 in the attached figures). As a result, the distance between the first mover 200 and the second mover 300 after the movement is the first distance L1.

[0075] In this case, the height of the transfer member 400 is also kept fixed during the movement of the first mover 200 and the second mover 300.

[0076] Figure 10 This is a diagram illustrating the fourth operation of a substrate transfer apparatus according to an embodiment of the present invention.

[0077] Reference Figure 10 Before the movement, the distance between the first mover 200 and the second mover 300 is a first distance L1. The first mover 200 moves counterclockwise along a relatively small radius (refer to reference numeral D12 in the attached drawing). The second mover 200 moves counterclockwise along a relatively large radius (refer to reference numeral D22 in the attached drawing). After the movement, the distance between the first mover 200 and the second mover 300 remains the first distance L1.

[0078] In this case, the height of the conveying member 400 is also kept constant during the radial movement of the first mover 200 and the second mover 300.

[0079] Although not illustrated separately, if the interval between the first mover 200 and the second mover 300 decreases as they move radially, the height of the conveying member 400 can increase as the first mover 200 and the second mover 300 move.

[0080] Although not illustrated separately, if the distance between the first mover 200 and the second mover 300 increases as they move radially, the height of the conveying member 400 can decrease as the first mover 200 and the second mover 300 move.

[0081] Figure 11 as well as Figure 12This diagram illustrates the fifth operation of a substrate transfer apparatus according to an embodiment of the present invention. The fifth operation is the pick and place operation of the transfer member 400.

[0082] Reference Figure 11 With the transfer member 400 supporting the substrate W, the first mover 200 and the second mover 300 move toward the substrate support member 500.

[0083] Reference Figure 12 As the first mover 200 and the second mover 300 advance, the gap narrows, preventing the transfer member 400 or the substrate W from interfering with the substrate support member 500. As a result, when the first mover 200 and the second mover 300 stop in front of the substrate support member 500, the height of the transfer member 400 will increase more or less.

[0084] If it is confirmed that the substrate W is located on the substrate support member 500, the gap between the first mover 200 and the second mover 300 becomes larger, and the height of the transfer member 400 becomes lower, and the substrate (W) is placed on the support pin 510 of the substrate support member 500.

[0085] Figure 13 This is a diagram illustrating a substrate transfer apparatus according to another embodiment of the present invention.

[0086] Reference Figure 13 As described above, a first magnet module 201 and a first magnet component 220 are disposed in the first mover 200. For example, an electromagnet can be used as the first magnet module 201 or the first magnet component 220, and a first battery (not shown) for supplying power to the electromagnet is disposed in the first mover 200.

[0087] Similarly, a second magnet module 301 and a third magnet component 320 are disposed in the second mover 300. For example, an electromagnet can be used as the second magnet module 301 or the third magnet component 320, and a second battery (not shown) for supplying power to the electromagnet is disposed in the second mover 200.

[0088] A charging port 600 for charging the first / second battery may be provided on one side of the stator assembly 100. The charging port 600 may be, for example, a wireless charging method, but is not limited thereto.

[0089] In the event of insufficient charging or according to a preset scheme, the first mover 200 and the second mover 300 move into the charging port 600 (refer to reference numerals D14 and D24 in the attached drawing) to charge the first and second batteries.

[0090] Figure 14This is a diagram illustrating a substrate transfer apparatus according to yet another embodiment of the present invention.

[0091] Reference Figure 14 In a substrate transfer apparatus according to yet another embodiment of the present invention, the transfer member 400 can move upward along the first inclined surface 210 of the first mover 200 and the second inclined surface 310 of the second mover 300 (see reference). Figure 14 (451a, 452a).

[0092] A first stop member 210a, protruding from the first inclined surface 210, is provided at the uppermost end of the first inclined surface 210 to prevent the transfer member 400 from moving above a preset height. A second stop member 310a, protruding from the second inclined surface 310, is provided at the uppermost end of the second inclined surface 310.

[0093] Although the accompanying drawings show that both the first inclined surface 210 and the second inclined surface 310 are provided with a first stop member 210a and a second stop member 310a, the invention is not limited thereto. For example, the first stop member 210a may be provided only on the first inclined surface 210, without providing the second stop member on the second inclined surface 310.

[0094] Figure 15 This is a diagram illustrating a substrate transfer apparatus according to another embodiment of the present invention. For ease of explanation and to facilitate the use of… Figures 1 to 3 The explanation will focus on the differences between the previously explained content.

[0095] Reference Figure 15 A first guide hole 200b is formed elongated along the extending direction of the first inclined surface 210. A first support surface 421 (i.e., the first support portion 420) corresponding to the first inclined surface 210 may be provided with a first guide rod 420b inserted into the first guide hole 200b. Alternatively, the first guide rod may be provided on the first inclined surface 210, and the first guide hole may be provided on the first support surface 421.

[0096] Similarly, a second guide hole may also be formed on the second inclined surface 310, and a second guide rod inserted into the second guide hole may also be provided on the second support surface 431 corresponding to the second inclined surface 310. Alternatively, a second guide rod may be provided on the second inclined surface 310, and a second guide hole may be provided on the second support surface 431, but this may be different.

[0097] As described above, by having guide holes / guide rods, the transfer member 400 can be prevented from deviating from the path when it moves along the first inclined surface 210 and the second inclined surface 310.

[0098] Although embodiments of the invention have been described above with reference to the accompanying drawings, those skilled in the art will recognize that the invention can be practiced in other specific ways without altering its technical concept or essential features. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

Claims

1. A substrate transfer apparatus, comprising: Stator assembly, comprising a drive surface and an electromagnetic generation module; The first mover includes a first magnet module facing the electromagnetic generation module and suspends and moves on the driving surface, and includes a first inclined surface; The second mover includes a second magnet module facing the electromagnetic generation module and levitating and moving on the driving surface, and includes a second inclined surface; and A transfer member is disposed between the first mover and the second mover, and moves along the first inclined surface and the second inclined surface according to the distance between the first mover and the second mover.

2. The substrate transfer apparatus according to claim 1, wherein, The first inclined surface and the second inclined surface face each other. The first inclined surface forms an acute angle with the first bottom surface of the first moving part. The second inclined surface forms an acute angle with the second bottom surface of the second mover.

3. The substrate transfer apparatus according to claim 2, wherein, When the distance between the first mover and the second mover is a first distance, the height of the conveying member is a first height. When the distance between the first mover and the second mover is a second distance greater than the first distance, the height of the transfer member is a second height lower than the first height.

4. The substrate transfer apparatus according to claim 1, wherein, The transfer component includes a first support surface facing the first inclined surface and a second support surface facing the second inclined surface. The first mover includes a first magnetic component disposed within the first inclined surface. The transfer component includes a second magnet component disposed within the first support surface.

5. The substrate transfer apparatus according to claim 4, wherein, The second mover includes a third magnet component disposed within the second inclined surface. The transfer component includes a fourth magnet component disposed within the second support surface.

6. The substrate transfer apparatus according to claim 5, wherein, At least one of the first magnet component and the third magnet component is an electromagnet.

7. The substrate transfer apparatus according to claim 4, wherein, A battery for supplying power to the first magnet component is disposed inside the first mover. A charging port for charging the battery is provided on one side of the stator assembly.

8. The substrate transfer apparatus according to claim 4, wherein, A guide hole is provided on either the first inclined surface or the first supporting surface. A guide rod is provided on either the first inclined surface or the first supporting surface, and is inserted into the guide hole.

9. The substrate transfer apparatus according to claim 1, wherein, The first moving element includes a first stop member disposed at the uppermost end of the first inclined surface and protruding beyond the first inclined surface.

10. The substrate transfer apparatus according to claim 1, wherein, The stator assembly includes multiple stator regions arranged in a matrix. The electromagnetic generation module includes multiple electromagnetic generation units. Each stator region is plate-shaped and includes at least one electromagnetic generation unit.

11. The substrate transfer apparatus according to claim 10, wherein, Each stator region includes a stacked first stator layer and a second stator layer. The first stator layer includes a plurality of first electromagnetic generation units extending along a first direction. The second stator layer includes a plurality of second electromagnetic generation units extending along a second direction different from the first direction.

12. The substrate transfer apparatus according to claim 1, wherein, The first magnet module includes: A plurality of first magnets are disposed on the first bottom surface of the first mover and extend along the direction of the first rotor; Multiple second magnets are disposed on the first bottom surface of the first mover and extend along a second rotor direction different from the first rotor direction.

13. A substrate transfer apparatus, comprising: Stator assembly, comprising a drive surface and an electromagnetic generation module; The first mover includes a first magnet module facing the electromagnetic generation module and suspends and moves on the driving surface, and includes a first bottom surface and a first inclined surface at an acute angle to each other; The second mover includes a second magnet module facing the electromagnetic generation module and suspends and moves on the driving surface, and includes a second bottom surface and a second inclined surface at an acute angle to each other, the second inclined surface and the first inclined surface facing each other; as well as A transfer member is disposed between the first mover and the second mover, and moves along the first inclined surface and the second inclined surface according to the distance between the first mover and the second mover. The transfer component includes a first support surface facing the first inclined surface and a second support surface facing the second inclined surface. The first mover includes a first magnetic component disposed within the first inclined surface, and the transfer component includes a second magnetic component disposed within the first support surface. The second mover includes a third magnet component disposed within the second inclined surface, and the transfer component includes a fourth magnet component disposed within the second support surface.

14. The substrate transfer apparatus according to claim 13, wherein, When the distance between the first mover and the second mover is a first distance, the height of the conveying member is a first height. When the distance between the first mover and the second mover is a second distance that is greater than the first distance, the height of the transfer member is a second height that is lower than the first height.

15. The substrate transfer apparatus according to claim 13, wherein, The first and third magnetic components are electromagnets.

16. The substrate transfer apparatus according to claim 13, wherein, The stator assembly includes multiple stator regions arranged in a matrix. The electromagnetic generation module includes multiple electromagnetic generation units. Each stator region is plate-shaped and includes at least one electromagnetic generation unit.

17. The substrate transfer apparatus according to claim 16, wherein, Each stator region includes a stacked first stator layer and a second stator layer. The first stator layer includes a plurality of first electromagnetic generation units extending along a first direction. The second stator layer includes a plurality of second electromagnetic generation units extending along a second direction different from the first direction.

18. The substrate transfer apparatus according to claim 13, wherein, The first magnet module includes: A plurality of first magnets are disposed on the first bottom surface of the first mover and extend along the direction of the first rotor; Multiple second magnets are disposed on the first bottom surface of the first mover and extend along a second rotor direction different from the first rotor direction.

19. A substrate transfer method, comprising: A substrate transfer apparatus is provided, the substrate transfer apparatus comprising: a first mover that suspends and moves on a driving surface and includes a first inclined surface; a second mover that suspends and moves on the driving surface and includes a second inclined surface; and a transfer member disposed between the first mover and the second mover and moving along the first inclined surface and the second inclined surface. The distance between the first mover and the second mover is set to a first distance, and the height of the conveying member is set to a first height; and The first and second moving parts are moved away from each other so that the distance between them becomes a second distance. As the first and second moving parts move, the conveying member descends along the first and second inclined surfaces so that the height of the conveying member becomes a second height.

20. The substrate transfer method according to claim 19, wherein, The first inclined surface and the second inclined surface face each other. The first inclined surface and the first bottom surface of the first moving element form an acute angle with each other. The second inclined surface and the second bottom surface of the second mover form an acute angle with each other.

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