A winding coating machine

Abstract

The present invention relates to the field of coating, and in particular to a winding coating machine, comprising: a machine housing, a driving mechanism, two groups of symmetrically arranged inner cylinders and an exhaust device, specifically, two groups of substrates are vertically arranged inside the inner cylinder, and the surfaces of the two groups of substrates are detachably provided with target materials, and a magnetic target head is fixed between the substrates inside the machine housing, and the driving mechanism controls the rotation of the inner cylinder to switch the target material perpendicular to the magnetic target head, and the driving mechanism drives the coil feeding mechanism to horizontally transport the two surfaces of the coil along the surfaces of the target materials of the two inner cylinders. The present invention provides a structure of two groups of fixed target materials that can be freely switched by setting two groups of inner cylinders and substrates arranged inside the inner cylinders, so that in daily use, they can be switched according to needs, and the target materials at the end of their service life can be directly removed and replaced with new ones, so as to achieve the purpose of recycling.

Description

Technical Field

[0001] The invention relates to the field of film coating, and in particular to a winding film coating machine. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum degree. There are many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, etc. The main idea is to divide it into evaporation and sputtering.

[0003] For magnetron sputtering coating machines, the target material is generally bombarded by a magnetic target head, so that the components on the surface of the target material are sputtered out in the form of atomic groups or ions. For the wound coil, the magnetic target head is usually perpendicular to the target material and the coil, so that the sputtering can be performed vertically to achieve the coating function. Although this method can meet the needs, a new target material needs to be replaced every time the life of the target material ends, and it cannot be used continuously, and there are certain usage problems. Summary of the invention

[0004] In view of the shortcomings of the prior art, the present invention provides a winding coating machine, and the specific technical solution is as follows:

[0005] A winding coating machine comprises: a machine shell, a driving mechanism, two groups of symmetrically arranged inner cylinders and an exhaust device.

[0006] Specifically, a coil feeding mechanism is arranged inside the machine casing, two groups of substrates are vertically arranged inside the inner cylinder, target materials are detachably arranged on the surfaces of the two groups of substrates, a magnetic target head is fixed between the substrates inside the machine casing, the driving mechanism controls the rotation of the inner cylinder to switch the target material perpendicular to the magnetic target head, the exhaust device exhausts air from the inside of the machine casing to ensure that the inside of the machine casing is in a vacuum state, and the driving mechanism drives the coil feeding mechanism to transport the coil horizontally along the surfaces of the target materials of the two inner cylinders.

[0007] As an improvement of the above technical solution, the coil feeding mechanism includes an outer roller group, an inner roller group and two synchronous belts, the outer roller group and the inner roller group each include four roller bodies, the four roller bodies of the outer roller group are in a quadrilateral shape and fixed to the inside of the machine housing, the four roller bodies of the inner roller group are in a rectangular shape and fixed to the inner side of the outer roller group, one end of each roller body is provided with a gear, the gears of the roller bodies of the outer roller group are meshed with one of the synchronous belts, and the gears of the roller bodies of the inner roller group are meshed with the other synchronous belt.

[0008] As an improvement of the above technical solution, a material roller with a coiled material is arranged inside the machine housing, and the coiled material is sent out from the material roller and passes through two roller bodies on the vertical side of the inner roller group, two roller bodies on the horizontal upper side of the outer roller group, two roller bodies on the vertical other side of the inner roller group, and two roller bodies on the lower side of the outer roller group in sequence.

[0009] As an improvement of the above technical solution, the driving mechanism includes motor 1, motor 2 and motor 3, the power end of motor 1 is fixed to one of the roller ends of the outer roller group, the power end of motor 2 is fixed to one of the roller ends of the inner roller group, and the power end of motor 3 is fixed to the inner cylinder.

[0010] As an improvement of the above technical solution, adjustable shafts are fixed at both ends of the inner cylinder, and the power end of the motor three is fixed to the fixed inner cylinder through the adjustable shaft.

[0011] As an improvement of the above technical solution, two side grooves are arranged on the surface of the inner cylinder, and the side grooves are respectively arranged horizontally with the two target materials, and the side grooves are tightly attached to the coil to form a closed space.

[0012] As an improvement of the above technical solution, the exhaust device includes an exhaust pipe 1 and an exhaust pipe 2, the exhaust pipe 2 is connected to the interior of the machine housing, and the exhaust pipe 1 is connected to the enclosed space.

[0013] As an improvement of the above technical solution, a baffle is arranged on the outer side of the magnetic target head, and the baffle is arranged horizontally with the magnetic target head.

[0014] As an improvement of the above technical solution, a removable sealing door is provided on the front surface of the machine housing, an inner cavity is provided inside the machine housing, a side door is removably provided on the side of the machine housing, the side door closes the inner cavity, and the inner cylinder rotates to drive the substrate to rotate into the inner cavity.

[0015] Beneficial effects of the present invention:

[0016] By setting up two groups of inner cylinders and a substrate arranged inside the inner cylinders, a structure with two groups of fixed target materials that can be freely switched is provided, so that in daily use, they can be switched according to needs, and the targets at the end of their life can be directly removed and replaced with new ones, thereby achieving the purpose of recycling. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a front view of the present invention;

[0018] Figure 2 It is a structural diagram of one side of the present invention;

[0019] Figure 3 It is a structural diagram of the other side of the present invention;

[0020] Figure 4 is a cross-sectional view of the present invention;

[0021] Figure 5 for Figure 4 Schematic diagram of the enlarged structure at point A in the middle.

[0022] Figure numerals: 10, machine housing; 11, sealing door; 12, side door; 13, sealing bearing; 14, material roller; 15, inner cavity; 20, driving mechanism; 21, motor one; 22, motor two; 23, motor three; 24, synchronous belt; 25, outer roller group; 26, inner roller group; 27, adjusting shaft; 30, inner cylinder; 31, magnetic target head; 32, substrate; 33, target material; 34, side groove; 35, baffle; 40, exhaust equipment; 41, exhaust pipe one; 42, exhaust pipe two. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0024] By pointing the magnetic target head vertically toward the target material and the coil, the coil is vertically sputtered to achieve the coating function of the wound material. Although this method can meet the needs, it needs to be replaced with a new target material every time the life of the target material ends, and it cannot be used continuously, which leads to certain usage problems.

[0025] To solve the above problems, see Figure 1-5 , a winding coating machine is provided, including: a machine housing 10, a driving mechanism 20, two groups of inner cylinders 30 arranged symmetrically and an exhaust device 40.

[0026] Specifically, a coil feeding mechanism is provided inside the machine housing 10, two groups of substrates 32 are vertically provided inside the inner cylinder 30, and targets 33 are detachably provided on the surfaces of the two groups of substrates 32. A magnetic target head 31 is fixed between the substrates 32 inside the machine housing 10, and the driving mechanism 20 controls the rotation of the inner cylinder 30 to switch the target 33 perpendicular to the magnetic target head 31. The exhaust device 40 exhausts air from the inside of the machine housing 10 to ensure that the inside of the machine housing 10 is in a vacuum state. The driving mechanism 20 drives the coil feeding mechanism to transport the coil horizontally along the surfaces of the targets 33 of the two inner cylinders 30.

[0027] That is, the coil is transported by the coil feeding mechanism, and then the internal coating is carried out by two sets of symmetrical inner cylinders 30, and the coating is carried out in a manner that the magnetic target head 31 is perpendicular to the target material 33, and the air is evacuated by the exhaust device 40. In this way, when vacuum coating is required, the interior of the machine housing 10 can be evacuated to meet the vacuum operation requirements.

[0028] In the above technical solution, the target material 33 perpendicular to the magnetic target head 31 can be switched by rotating the inner cylinder 30, and the target material 33 at the end of its life can be directly removed and replaced with a new target material 33. There is no need to stop working during the operation, and only a certain switching time needs to be waited before continuing to work.

[0029] In the above technical solution, although it can meet the normal use, it is impossible to switch the target material 33 in a vacuum environment. In order to meet this condition, please refer to Figure 5 A detachable sealing door 11 is provided on the front surface of the machine housing 10, an inner cavity 15 is provided inside the machine housing 10, a side door 12 is detachably provided on the side of the machine housing 10, the side door 12 closes the inner cavity 15, and the inner cylinder 30 rotates to drive the substrate 32 to rotate into the inner cavity 15.

[0030] That is, the sealing door 11 is used to carry out sealing and unloading and loading after the coating is completed. Sometimes, the life of the target material 33 will end during the processing. In order to maintain the internal vacuum environment, the inner cavity 15 is used to disassemble the position of the substrate 32. In this way, when switching, the interior is still in a closed state, and the position of the substrate 32 is at the position of the inner cavity 15. The side door 12 is opened from the outside. At this time, the inner cavity 15 is opened, and the target material 33 on the substrate 32 can be removed. Since the target material 33 is set on another substrate 32, there will be no connection state, thereby ensuring the internal sealing. After replacing the target material 33, the inner cavity 15 is evacuated again. Only after it is completely vacuumed can the switching operation be performed, that is, a structure is formed to ensure continuous operation by freely switching the operating position.

[0031] In the above technical solution, the high-energy electrons emitted by the magnetic target head 31 are prone to unexpected situations due to collision. In order to avoid the high-energy electron collision affecting the switching operation, please refer to Figure 5 A baffle 35 is disposed on the outer side of the magnetic target head 31 , and the baffle 35 is disposed horizontally with the magnetic target head 31 .

[0032] The baffle 35 is used to block the outer side of the magnetic target head 31 , thereby providing a better protection effect and preventing the high-energy electrons emitted by the magnetic target head 31 from affecting the switching operation of the target material 33 .

[0033] In one embodiment, see Figure 2-4The coil feeding mechanism includes an outer roller group 25, an inner roller group 26 and two synchronous belts 24. The outer roller group 25 and the inner roller group 26 each include four roller bodies. The four roller bodies of the outer roller group 25 are in a quadrilateral shape and fixed inside the machine housing 10. The four roller bodies of the inner roller group 26 are in a rectangular shape and fixed on the inner side of the outer roller group 25. Gears are provided at one end of the roller bodies. The gears of the roller bodies of the outer roller group 25 are meshed with one of the synchronous belts 24, and the gears of the roller bodies of the inner roller group 26 are meshed with the other synchronous belt 24.

[0034] That is, the gear meshing and the connection of the synchronous belt 24 control the synchronous rotation of each roller of the outer roller group 25 and the synchronous rotation of each roller of the inner roller group 26.

[0035] In one embodiment, see Figure 2-4 A material roller 14 with a coiled material is arranged inside the machine housing 10. The coiled material is sent out from the material roller 14 and passes through the two roller bodies on the vertical side of the inner roller group 26, the two roller bodies on the horizontal upper side of the outer roller group 25, the two roller bodies on the vertical other side of the inner roller group 26, and the two roller bodies on the lower side of the outer roller group 25.

[0036] That is, the coil is first fed out through the material roller 14 and then rolled on the outside of the roller bodies of the two vertically arranged inner roller groups 26. The processing position of the magnetic target head 31 is between the roller bodies of the two vertically arranged inner roller groups 26 to ensure the surface flatness of the coating position.

[0037] In the above technical solution, both ends of each roller body are connected to the machine housing 10 by sealed bearings 13, thereby ensuring the sealing performance at the roller body connection position.

[0038] In one embodiment, see Figure 1 , 3 5. The driving mechanism 20 includes a motor 1 21, a motor 22 and a motor 3 23. The power end of the motor 1 21 is fixed to one of the roller ends of the outer roller group 25, the power end of the motor 22 is fixed to one of the roller ends of the inner roller group 26, and the power end of the motor 3 23 is fixed to the inner cylinder 30.

[0039] The outer roller group 25 is controlled to rotate by the motor 1 21 , the inner roller group 26 is controlled to rotate by the motor 2 22 , and the inner cylinder 30 is controlled to rotate by the motor 3 23 .

[0040] In one embodiment, see Figure 1 , 3 5. Adjustable rotating shafts 27 are fixed at both ends of the inner cylinder 30, and the power end of the motor 3 23 is fixed to the fixed inner cylinder 30 through the adjusting rotating shaft 27.

[0041] That is, each motor 3 23 controls an inner cylinder 30 to rotate, so that the two inner cylinders 30 can rotate independently, thereby achieving the purpose of switching the internal target material 33 .

[0042] In one embodiment, see Figure 5 Two side grooves 34 are provided on the surface of the inner cylinder 30 , and the side grooves 34 are respectively arranged horizontally with the two targets 33 , and the side grooves 34 are closely attached to the coil to form a closed space.

[0043] By providing the side grooves 34 , not only can the target material 33 and the coil be arranged horizontally, but the target material 33 and the coil can also be arranged closer, so that the coating is finer and denser, thereby ensuring the coating effect without affecting the rotation of the inner cylinder 30 .

[0044] In one embodiment, see Figure 2 The exhaust device 40 includes an exhaust pipe 1 41 and an exhaust pipe 2 42 . The exhaust pipe 2 42 is connected to the interior of the machine housing 10 , and the exhaust pipe 1 41 is connected to the enclosed space.

[0045] The vacuum work is performed separately through the vacuum pipe 1 41 and the vacuum pipe 2 42, and a plurality of vacuum pumps or vacuum fans and the like are usually arranged inside the vacuum pipe 1 41 and the vacuum pipe 2 42 are vacuumed separately. The vacuum pipe 1 41 can be operated only after the target material 33 is replaced, that is, the side door 12 is closed before the vacuum can be performed, so as to ensure the vacuum state inside the inner cavity 15, while the vacuum pipe 2 42 is used to ensure that the inside of the machine housing 10 is vacuumed after the unloading and replacing operations after the processing is completed.

[0046] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A roll-to-roll coating machine, characterized in that: include: A machine housing (10), wherein a coil feeding mechanism is arranged inside the machine housing (10); A driving mechanism (20); Two groups of inner cylinders (30) are symmetrically arranged, two groups of base plates (32) are vertically arranged inside the inner cylinders (30), targets (33) are detachably arranged on the surfaces of the two groups of base plates (32), a magnetic target head (31) is fixed between the base plates (32) inside the machine housing (10), and the driving mechanism (20) controls the inner cylinders (30) to rotate so as to switch the target (33) perpendicular to the magnetic target head (31); An air extraction device (40), wherein the air extraction device (40) extracts air from the interior of the machine housing (10) to ensure that the interior of the machine housing (10) is in a vacuum state; The driving mechanism (20) drives the coiled material feeding mechanism to horizontally convey the coiled material along the surfaces of the target materials (33) of the two inner cylinders (30); The surface of the inner cylinder (30) is provided with two side grooves (34), the side grooves (34) are respectively arranged horizontally with the two target materials (33), and the side grooves (34) are closely attached to the coiled material to form a closed space; The exhaust device (40) comprises an exhaust pipe 1 (41) and an exhaust pipe 2 (42), wherein the exhaust pipe 2 (42) is connected to the interior of the machine housing (10), and the exhaust pipe 1 (41) is connected to the enclosed space; A baffle (35) is arranged on the outer side of the magnetic target head (31), and the baffle (35) is arranged horizontally with the magnetic target head (31); A detachable sealing door (11) is provided on the front surface of the machine housing (10), an inner cavity (15) is provided inside the machine housing (10), a side door (12) is detachably provided on the side of the machine housing (10), the side door (12) seals the inner cavity (15), and the inner cylinder (30) rotates to drive the base plate (32) to rotate into the inner cavity (15).

2. A roll-to-roll coating machine according to claim 1, characterized in that: The coil feeding mechanism comprises an outer roller group (25), an inner roller group (26) and two synchronous belts (24); the outer roller group (25) and the inner roller group (26) each comprise four roller bodies; the four roller bodies of the outer roller group (25) are in a quadrilateral shape and fixed inside the machine housing (10); the four roller bodies of the inner roller group (26) are in a rectangular shape and fixed inside the outer roller group (25); one end of each roller body is provided with a gear; the gear of the roller body of the outer roller group (25) is meshed with one of the synchronous belts (24); the gear of the roller body of the inner roller group (26) is meshed with the other synchronous belt (24).

3. A roll-to-roll coating machine according to claim 2, characterized in that: A material roller (14) wound with a coiled material is arranged inside the machine housing (10); the coiled material is fed from the material roller (14) and sequentially passes through two roller bodies on one vertical side of the inner roller group (26), two roller bodies on the horizontal upper side of the outer roller group (25), two roller bodies on the other vertical side of the inner roller group (26), and two roller bodies on the lower side of the outer roller group (25).

4. A roll-to-roll coating machine according to claim 3, characterized in that: The driving mechanism (20) comprises a motor 1 (21), a motor 2 (22) and a motor 3 (23); a power end of the motor 1 (21) is fixed to one of the roller ends of the outer roller group (25); a power end of the motor 2 (22) is fixed to one of the roller ends of the inner roller group (26); and a power end of the motor 3 (23) is fixed to the inner cylinder (30).

5. A roll-to-roll coating machine according to claim 4, characterized in that: Adjustable rotating shafts (27) are fixed at both ends of the inner cylinder (30), and the power end of the motor three (23) is fixed to the fixed inner cylinder (30) via the adjustable rotating shaft (27).

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