A coaxial spinning airflow protection excitation device

Abstract

The present invention provides an excitation device with coaxial spin-type airflow protection, comprising: an excitation platform main body, a lens assembly, and a coaxial spin excitation chamber; the coaxial spin excitation chamber comprises an excitation chamber, an electrode, a rectifier assembly, and a high-voltage protection device, wherein the excitation platform main body is provided with an air inlet and two airflow channels connected to the air inlet, one of which is connected to the bottom of the rectifier assembly to reach the excitation chamber, and the other is connected to the top of the rectifier assembly, and a plurality of inclined air vents are provided on the upper surface of the rectifier assembly, and the inclined directions and angles of the plurality of air vents are consistent, and the first air channel is connected to the air vent. The present invention provides inclined air vents on the rectifier assembly, so that the airflow entering the excitation chamber spins coaxially with the excitation electrode, and can quickly fill the excitation chamber, providing a more stable gas environment required for excitation, protecting the excitation chamber, and also facilitating the discharge of fly ash, thereby avoiding the occurrence of arc creep.

Description

Technical Field

[0001] The present invention relates to the technical field of in-situ analysis, in particular to an excitation device for coaxial spinning airflow protection, and more particularly to a high-precision excitation device for coaxial spinning airflow protection with water-cooled constant temperature and automatic cleaning functions. Background Art

[0002] The Large Metal Component In-Situ Analyzer is a high-throughput, in-situ statistical distribution analysis and characterization instrument for large-scale metal components. Utilizing in-situ statistical distribution analysis and high-throughput statistical mapping techniques, it can be applied to large-scale component-level metal material analysis, solving the global challenge of analyzing composition segregation and inclusions in large-scale metal components for applications such as aviation, high-speed rail, and nuclear power.

[0003] The large-scale metal component segregation analyzer performs continuous, automatic measurements while in motion. The optical system is located above the sample stage, and the sample excitation position is changed by moving the sample stage. The operating principle is that a highly stable digital light source generates a single spark through the excitation stage, scanning and exciting a large area of ​​metal material. The resulting composite spectrum enters the optical chamber through the incident slit, is split by a grating, and converted into monochromatic light. The photoelectric conversion unit converts the optical signal into an electrical signal, obtaining the spectral intensity of the monochromatic light. After processing by analysis software, the element concentration is determined.

[0004] Due to the large area of ​​metal samples, scanning times are long. For example, when scanning a 300 mm × 300 mm sample using a line-by-line scanning method, each line takes 300 seconds to scan, while a typical single-point analysis typically takes 30 seconds. Therefore, many problems arise during the long scanning excitation process. For example, prolonged continuous excitation can cause the excitation stage to overheat; the excitation electrodes cannot be cleaned promptly; fly ash generated by excitation easily adheres to the inner wall of the excitation stage, and long-term continuous excitation can cause severe ash accumulation and arc creep; an excessively long grounding path can lead to abnormal sparking; and wear and oil stains caused by direct contact and relative motion between the excitation stage and the sample can contaminate the surface of the sample being tested. These factors can damage the excitation stage and seriously affect the accuracy of the analysis results. Summary of the Invention

[0005] In view of this, in order to solve the technical problems existing in the above-mentioned background technology that the fly ash generated by excitation is easily adsorbed on the inner wall of the excitation platform, long-term continuous excitation, serious dust accumulation, and arc creep phenomenon occur, the present invention provides an excitation device with coaxial spinning airflow protection, which opens an inclined air vent on the rectifier component so that the airflow entering the excitation chamber spins coaxially with the excitation electrode, can quickly fill the excitation chamber, provide a more stable gas environment required for excitation, protect the excitation chamber, and is also conducive to the discharge of fly ash, avoiding the occurrence of arc creep phenomenon.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A coaxial spin-type airflow protection excitation device comprises an excitation platform body, a lens assembly, and a coaxial spin excitation chamber, wherein the lens assembly is arranged at the upper end of the excitation platform body, and the coaxial spin excitation chamber is arranged at the lower end of the excitation platform body;

[0008] The coaxial spin excitation chamber includes an excitation chamber, an electrode, a rectifier assembly, and a high-voltage protection device. The excitation chamber is arranged at the lower end of the excitation platform body, the rectifier assembly is arranged in the excitation chamber, and the electrode passes through the rectifier assembly to enter the excitation chamber; a high-voltage protection device is arranged above the electrode;

[0009] The main body of the excitation platform is provided with an air inlet and two air flow channels connected to the air inlet, the two air flow channels are respectively a first air channel and a second air channel, the first air channel is connected to the bottom of the rectifier assembly to reach the excitation chamber, the second air channel is connected to the top of the rectifier assembly, and a plurality of inclined air holes are provided on the upper surface of the rectifier assembly, and the inclination direction and inclination angle of the plurality of air holes are consistent, and the first air channel is connected to the air holes.

[0010] Furthermore, the lens assembly is a plug-in lens assembly, which includes a lens, a rubber ring, a lens support plate, and a fixed base plate. The lens support plate is provided with a handle, the lens is mounted on the lens support plate and sealed and fixed by the rubber ring, the fixed base plate is provided with a raised limit block, the lens support plate is provided with a groove that cooperates with the limit block, and the fixed base plate and the lens support plate are connected through the limit block and the groove.

[0011] Furthermore, the excitation device also includes a water-cooled constant temperature system, which includes a circulating water circuit. A water inlet and a water outlet are provided on the outer wall of the excitation platform body. The water inlet is connected to the water inlet end of the circulating water circuit, and the water outlet is connected to the water outlet end of the circulating water circuit. The circulating water circuit is arranged in the excitation platform body and extends to the position of the coaxial spin excitation chamber and is arranged around the excitation chamber.

[0012] Furthermore, the water-cooled constant temperature system also includes a circulating water machine, a water tank and a fan. The water inlet is connected to the circulating water machine, and the circulating water machine and the water outlet are respectively connected to the water tank. The water tank is provided with the fan, and the fan is used to cool the water in the water tank.

[0013] Furthermore, the excitation device also includes an automatic cleaning system, which includes an electrode brush, a servo motor, a buffer device, and an electrode brush motion control system. The automatic cleaning system is fixedly installed at the upper right position of the sample stage and is used for automatic cleaning of the electrode surface; the electrode brush is connected to the rotating shaft of the servo motor, and the lower end and outer ring of the electrode brush are respectively provided with the buffer device, and the buffer device is used to convert the contact between the electrode and the electrode brush into soft contact, and the electrode brush motion control system controls the servo motor to drive the electrode brush to rotate.

[0014] Furthermore, the excitation device also includes a continuously moving grounding component, an excitation platform cover is provided at the bottom end of the excitation platform body, the continuously moving grounding component is arranged on the excitation platform cover, the continuously moving grounding component includes a hollow fixing component, a grounding ball, and a compression spring, the hollow fixing component is fixedly connected to the rectifier component, two grounding balls and the compression spring are arranged from bottom to top in the hollow fixing component, wherein the lower grounding ball emerges from the excitation platform cover and is indirectly connected to the compression spring through the upper grounding ball.

[0015] Furthermore, the continuously moving grounding components are provided in two groups and are installed at the rear side of the electrode.

[0016] Furthermore, the electrode is a pure tungsten electrode, which is connected to an insulating fixing component via a brass fixing component. The brass fixing component is used to fix the electrode and provide voltage, and is insulated from the excitation platform body via the insulating fixing component.

[0017] Furthermore, the rectifier assembly is made of ceramic material, surrounds the electrode, and is used to protect the inner wall of the exciting platform.

[0018] Furthermore, the high-voltage protection device is composed of an insulating shell and a pure copper shell, and is used to prevent the high voltage loaded on the electrode from being directly exposed to the external environment.

[0019] The coaxial spinning airflow protection excitation device provided by the present invention opens an inclined vent hole on the rectifier component, so that the airflow entering the excitation chamber spins coaxially with the excitation electrode, which can quickly fill the excitation chamber and provide a more stable gas environment required for excitation. While protecting the excitation chamber, it is also beneficial to the discharge of fly ash and avoid the occurrence of arc creep.

[0020] Furthermore, the coaxial spinning airflow protection excitation device provided by the present invention can ensure that the optical chamber is always in a sealed state during the cleaning and replacement of the lens by setting the lens assembly as a plug-in lens assembly, thereby achieving the goal of not destroying the inert gas atmosphere of the optical chamber.

[0021] Furthermore, the coaxial self-spinning airflow-protected excitation device provided by the present invention can timely cool the excitation platform body by setting a water-cooling constant temperature system on the excitation platform body, so that it always maintains a constant temperature state, thereby ensuring the stability and accuracy of the analysis results.

[0022] Furthermore, the coaxial self-spinning airflow-protected excitation device provided by the present invention can clean the excitation electrode tip in a very short time by arranging an automatic cleaning system on the excitation platform body.

[0023] Furthermore, the coaxial, self-spinning, airflow-protected excitation device provided by the present invention utilizes a continuously moving grounding assembly mounted on the excitation stage, enabling adaptive response to varying spacing variations while preventing wear and tear from hard contact with the sample. Furthermore, the continuously moving grounding assembly is positioned behind the excitation electrode. This ensures that, when scanning a sample, the electrode always reaches the sample's test position before the grounding ball, preventing wear and oil contamination caused by the relative motion of the grounding ball and sample from affecting the analytical results. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 Schematic diagram of the overall structure of the excitation device of the coaxial spinning airflow protection of the present invention;

[0025] Figure 2a This is a schematic diagram of the coaxial spinning airflow motion trajectory of the present invention;

[0026] Figure 2b This is a simulation diagram of the airflow motion of the excitation device of the coaxial spinning airflow protection of the present invention;

[0027] Figure 2c This is a schematic diagram of the water circuit of the water-cooling constant temperature system of the present invention;

[0028] Figure 3a This is a schematic structural diagram of the automatic cleaning system of the present invention;

[0029] Figure 3b This is a comparison diagram before and after the automatic cleaning system of the present invention cleans the electrode;

[0030] Figure 4 This is a schematic diagram of the structure of the continuous motion grounding assembly of the present invention;

[0031] Figure 5 This is a schematic structural diagram of the pluggable lens assembly of the present invention;

[0032] Figure 6 Comparison chart of scanning results before and after adding a water-cooled constant temperature system to the present invention;

[0033] Figure 7 This is a comparison diagram of dust accumulation in the chamber of the excitation stage of the present invention;

[0034] In the figure, 1. Excitation platform main body, 12. Excitation platform upper cover, 2. Lens assembly, 21. Lens, 22. Fixed base plate, 23. Lens support plate, 24. Rubber ring, 25. Limit block, 26. Groove, 27. Handle, 3. Coaxial spin excitation chamber, 31. Rectifier assembly, 32. Electrode, 33. Air vent, 34. Air inlet, 35. Second air channel, 36. First air channel, 4. Water-cooled constant temperature system, 41. Circulating water channel, 42. Water inlet, 43. Water outlet, 5. Automatic cleaning system, 51. Servo motor, 52. Electrode brush, 53. Buffer device, 6. Continuous motion grounding assembly, 61. Hollow fixed assembly, 62. Lower ball, 63. Upper ball, 64. Compression spring, 7. High-voltage protection device. DETAILED DESCRIPTION

[0035] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention; it is obvious that the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0036] In the description of the present invention, it should be noted that the terms "upper," "lower," "inner," "outer," "top / bottom," and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0037] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "provided with," "mounted / connected," and "connected" should be understood in a broad sense. For example, "connected" can mean a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be internal communication between two components. Those skilled in the art will be able to understand the specific meanings of the above terms in the present invention in specific circumstances.

[0038] like Figure 1 and Figure 2aAs shown, in order to solve the technical problems existing in the above-mentioned background technology that fly ash generated by excitation is easily adsorbed on the inner wall of the excitation platform, long-term continuous excitation causes serious ash accumulation, and arc creep phenomenon occurs, the present invention provides an excitation device with coaxial spin airflow protection, including an excitation platform main body 1, a lens assembly 2 and a coaxial spin excitation chamber 3, wherein the lens assembly 2 is arranged at the upper end of the excitation platform main body 1, and the coaxial spin excitation chamber 3 is arranged at the lower end of the excitation platform main body 1;

[0039] The coaxial spin excitation chamber 3 includes an excitation chamber, an electrode 32, a rectifier assembly 31, and a high-voltage protection device 7. The excitation chamber is arranged at the lower end of the excitation stage body 1, the rectifier assembly 31 is arranged in the excitation chamber, and the electrode 32 passes through the rectifier assembly 31 and enters the excitation chamber; a high-voltage protection device 7 is arranged above the electrode 32;

[0040] The excitation platform body 1 is provided with an air inlet 34 and two air flow channels connected to the air inlet 34, the two air flow channels are respectively a first air channel 36 and a second air channel 35, the first air channel 36 is connected to the bottom of the rectifier component 31 to reach the excitation chamber, the second air channel 35 is connected to the top of the rectifier component 31, and the upper surface of the rectifier component 31 is provided with a plurality of inclined air holes 33, for example 6, and the inclination direction and inclination angle of the plurality of the air holes 33 are consistent, and the first air channel 36 is connected to the air hole 33.

[0041] The first air channel 36 and the second air channel 35 are argon gas flow channels. Six vents 33 with a certain tilt angle are opened above the rectifier assembly 31, so that the argon gas flow entering the excitation chamber rotates coaxially with the electrode 32, which can quickly fill the excitation chamber and provide a more stable pure argon environment required for excitation. It protects the excitation chamber and is also conducive to the discharge of fly ash. Figure 2b The figure shows a simulation diagram of the airflow movement of argon gas in the excitation device.

[0042] For example, the electrode 32 is a pure tungsten electrode, which is connected to an insulating fixing assembly via a brass fixing assembly. The brass fixing assembly is used to fix the electrode 32 and provide voltage, and is insulated from the stimulating platform body 1 by the insulating fixing assembly. Pure tungsten electrodes have the advantages of high temperature resistance and high hardness.

[0043] The rectifier assembly 31 is made of ceramic and surrounds the electrode 32 to protect the inner wall of the excitation platform. It can also reduce the adsorption of fly ash and adjust the direction of airflow so that the airflow can evenly bypass the electrode 32 without rotation, thereby discharging the generated fly ash in a timely manner.

[0044] The high-voltage protection device 7 is composed of an insulating shell and a pure copper shell, and is used to prevent the high voltage loaded on the electrode 32 from being directly exposed to the external environment, thereby posing a threat to the safety of the operator.

[0045] like Figure 5 As shown, the lens assembly 2 is a plug-in lens assembly, which includes a lens 21, an adhesive ring 24, a lens support plate 23, and a fixed base plate 22. The lens support plate 23 is provided with a handle. The lens 21 is mounted on the lens support plate 23 and is sealed and fixed by the adhesive ring 24. The fixed base plate 22 is provided with a raised limit block 25. The lens support plate 23 is provided with a groove 26 that cooperates with the limit block 25. The fixed base plate 22 and the lens support plate 23 are connected by the limit block 25 and the groove 26. Specifically, two limit blocks 25 and two grooves 26 can be provided respectively. The plug-in lens assembly can realize the cleaning and replacement of the lens without affecting the inert gas atmosphere of the light chamber. In the process of pulling out the lens support plate 23, the fixed base plate 22 will be moved together. The unpulled part of the fixed base plate 22 cooperates with the adhesive ring 24 to ensure that the light chamber is in a sealed state, thereby achieving the inert gas atmosphere of the light chamber without destroying it.

[0046] like Figure 2c As shown, in order to solve the technical problem that long-term continuous excitation will cause the temperature of the excitation platform to be too high, the excitation device also includes a water-cooled constant temperature system 4, and the water-cooled constant temperature system 4 includes a circulating water circuit 41. A water inlet 42 and a water outlet 43 are provided on the outer wall of the excitation platform body 1. The water inlet 42 is connected to the water inlet end of the circulating water circuit 41, and the water outlet 43 is connected to the water outlet end of the circulating water circuit 41. The circulating water circuit 41 is arranged in the excitation platform body 1 and extends to the position of the coaxial spin excitation chamber 3, and is arranged around the excitation chamber. The circulating water enters the interior of the excitation platform body 1 through the water inlet 42 on the upper part of the excitation platform body 1, and first circles around one side of the excitation platform body 1 along the circulating water circuit 41, and then circles around the other side of the excitation platform body 1, and is discharged from the water outlet 43 on the upper part of the excitation platform body 1.

[0047] The water-cooled constant temperature system also includes a circulating water machine, a water tank, and a fan. The water inlet 42 is connected to the circulating water machine, and the circulating water machine and the water outlet 43 are respectively connected to the water tank. The water tank is provided with the fan, which is used to cool the water in the water tank. The circulating water in the circulating water machine enters the interior of the stimulation platform through the water inlet 42. After absorbing heat, the circulating water returns to the water tank of the circulating water machine through the water outlet 43. The water tank is combined with the fan to control the temperature of the water tank and recycle it. When stimulating the sample, the water-cooled constant temperature system can promptly cool the stimulation platform to keep it at a constant temperature, thus ensuring the stability and accuracy of the analysis results.

[0048] like Figure 3a and Figure 3b As shown, in order to solve the technical problem that the excitation electrode cannot be cleaned in time, the excitation device also includes an automatic cleaning system 5, which includes an electrode brush 52, a servo motor 51, a buffer device 53, and an electrode brush motion control system. The automatic cleaning system is fixedly installed at the upper right position of the sample stage and is used for automatic cleaning of the surface of the electrode 32; the electrode brush 52 is connected to the rotating shaft of the servo motor 51, and the lower end and outer ring of the electrode brush 52 are respectively provided with the buffer device 53 to form a double buffer device. The buffer device 53 is used to convert the contact between the electrode 32 and the electrode brush 52 into soft contact, and the electrode brush motion control system controls the servo motor 51 to drive the electrode brush 52 to rotate.

[0049] When exciting the sample, the analysis path of the analysis surface of the sample is formulated according to the analysis area of ​​the sample, and the analysis is performed in a line-by-line scanning manner. After each line is excited by the excitation platform, the electrode will be automatically cleaned. First, the high-precision three-dimensional motion system W-axis controls the excitation platform to rise to the preset height, and then the high-precision three-dimensional motion system XY axis moves the automatic cleaning system horizontally to the electrode coordinate position, and then lowers the excitation platform to contact the electrode brush. At the same time, the electrode brush motion control system controls the servo motor to drive the electrode brush to start rotating. After the electrode contacts the electrode brush, the excitation platform will continue to buffer and descend for a distance with the assistance of the buffer device, and complete the cleaning of the electrode tip in a very short time. The buffer device is used to convert the contact between the electrode and the electrode brush into soft contact to avoid damage to the electrode and the electrode brush caused by hard contact. After the cleaning is completed, the high-precision three-dimensional motion system W-axis controls the excitation platform to rise to the preset height again, and then the high-precision three-dimensional motion system XY axis moves the starting position of the next line horizontally to the excitation position, and the W axis lowers the excitation platform to continue to excite the sample until all lines are scanned. Regular and automatic cleaning of the electrode can timely remove fly ash adsorbed on the electrode surface and maintain a good excitation effect. Figure 3b As shown, the left picture (a) is a real picture before the automatic cleaning system cleans the electrode, and the right picture (b) is the effect picture after the automatic cleaning system cleans the electrode. By comparing before and after the automatic cleaning system cleans the electrode, it can be seen that the automatic cleaning system has a good effect in cleaning the electrode.

[0050] like Figure 4As shown, in order to solve the technical problem that the wear and oil generated when the excitation platform and the sample are in direct contact and relative motion will contaminate the surface of the sample to be tested, the excitation device also includes a continuously moving grounding component 6, and the bottom end of the excitation platform body 1 is provided with an excitation platform upper cover 12, and the continuously moving grounding component 6 is arranged on the excitation platform upper cover 12, and the continuously moving grounding component 6 includes a hollow fixed component 61 (for example, a hollow columnar structure), a grounding ball, and a compression spring 64. The hollow fixed component 61 is fixedly connected to the rectifier component 31, and two grounding balls and a compression spring 64 are arranged from bottom to top in the hollow fixed component, wherein the lower grounding ball is the lower ball 62, which protrudes a certain height from the excitation platform upper cover 12, and the upper grounding ball is the upper ball 63, and the lower ball 62 is indirectly connected to the compression spring 64 through the upper ball 63.

[0051] Within the hollow fixed assembly 61, the compression spring 64, upper ball 63, and lower ball 62 are arranged in this order from top to bottom, enabling adaptive movement to varying spacings while preventing wear and tear from hard contact with the sample. Furthermore, two sets of the continuously moving grounding assembly 6 are installed behind the electrode 32. This ensures that when scanning a sample, the electrode 32 always reaches the sample's target location before the grounding ball, preventing wear and oil contamination caused by the relative motion between the grounding ball and the sample from affecting the analytical results.

[0052] When scanning the sample to be tested, the high-precision three-dimensional motion system moves the excitation table down to the excitation position and stops when the electrode 32 reaches the set distance with the sample to be tested. During the excitation, the sample to be tested moves synchronously according to the designed path, and the grounding ball located on the rear side is higher than the upper cover of the excitation table and can rotate freely, so it can always keep in contact with the sample to be tested, ensuring that the excitation table is continuously and stably grounded. When exciting the sample, the excitation table is located above the sample table, and the excitation table is grounded by contacting the sample with the grounding ball. The grounding resistance is small, which greatly shortens the grounding path. If the grounding is done from the tail of the light chamber or other positions, the path is too long, which will cause abnormal excitation sparks. A good grounding state can effectively prevent the instrument from freezing and other damage.

[0053] The following is a scanning analysis of a 300mm x 300mm sample. The working process and principle of the high-precision excitation device with water-cooling constant temperature, automatic cleaning, and coaxial spinning airflow protection are as follows:

[0054] S1. Fix the sample to be tested

[0055] The sample to be tested is fixed on the sample stage, and the sample surface is processed using a milling device, and then scanned and characterized.

[0056] S2. Start the water cooling constant temperature system

[0057] Set the desired temperature to 26°C and start the circulating water machine. The circulating water machine, coupled with the circulating water path 41 connection assembly, delivers cooled circulating water into the excitation platform through the water inlet 42 on the platform's outer wall. This water flows along the internal circulating water path 41 around the platform, absorbing the heat generated by the excitation. The water then exits the platform through the water outlet 43 on the platform's outer wall and is collected in the circulating water machine's water tank. The water tank, coupled with a fan, controls the temperature and allows for recycling. This process continues uninterrupted until the excitation is complete.

[0058] like Figure 6 The following chart compares the sample scanning results before and after adding the water-cooled constant temperature system. It can be seen that the addition of the water-cooled constant temperature system makes the central segregation and ingot-shaped segregation bands of carbon in the sample more distinct. The water-cooled constant temperature system improves the stability and accuracy of the sample scanning analysis results.

[0059] S3, the excitation station excites the sample to be tested

[0060] During scanning, the sample stage moves horizontally along the X and Y axes of the high-precision 3D motion system, while the optical system moves vertically along the W axis of the high-precision 3D motion system. The analysis path for the sample's analysis surface is defined according to the sample's analysis area, and analysis is performed using a line-by-line scanning method. During scanning, the sample under test moves synchronously along the designed path until the entire sample is scanned and analyzed.

[0061] The continuous motion grounding component is located on the side behind the electrode, which will not contaminate the test position of the sample to be tested. The grounding ball can always maintain contact with the sample to be tested, ensuring that the excitation platform is continuously and stably grounded.

[0062] The rectifier assembly 31 adjusts the direction of the argon gas flow so that the gas flow evenly bypasses the excitation electrode 32 without rotation, and the generated fly ash is discharged in time. Figure 7 The figure shows a comparison of dust accumulation in the excitation chamber. It can be found that the water-cooled constant temperature, automatic cleaning, coaxial spinning airflow protection high-precision excitation device designed in the present invention has greatly improved the dust accumulation phenomenon in the excitation stage chamber.

[0063] S4, automatic cleaning of excitation electrodes

[0064] After the exciting stage excites each row, it automatically cleans the exciting electrode 32 .

[0065] First, the W-axis of the high-precision three-dimensional motion system controls the excitation table to rise to the preset height w1, and the XY-axis of the high-precision three-dimensional motion system moves the electrode brush 52 to the coordinate position (x1, y1) of the excitation electrode 32, and then lowers the excitation table to contact the electrode brush 52. At the same time, the motion control system of the electrode brush 52 receives the instruction, and the servo motor 51 drives the electrode brush 52 to start rotating.

[0066] When the excitation platform descends to the height w2, the excitation electrode 32 contacts the electrode brush 52. With the assistance of the buffer device 53, the excitation platform will continue to buffer and descend for a distance to w3, and complete the cleaning of the electrode tip within 3-4 seconds. The buffer device 53 is used to convert the contact between the excitation electrode 32 and the electrode brush 52 into soft contact, avoiding damage to the excitation electrode 32 and the electrode brush 52 caused by hard contact.

[0067] After cleaning is completed, the high-precision three-dimensional motion system controls the excitation stage to rise to w1, and then the high-precision three-dimensional motion system XY axis moves the sample stage to the (x2, y2) coordinate position, that is, the starting position of the next row is moved horizontally to the excitation position, and the high-precision three-dimensional motion system W axis lowers the excitation stage to w0 to continue to excite the sample.

[0068] Repeat the above process until all rows are scanned.

[0069] In summary, the present invention provides a high-precision excitation device with water-cooling, constant temperature, automatic cleaning, and coaxial, self-spinning airflow protection. During the sample scanning excitation process, the temperature can be promptly reduced to maintain a constant temperature at the excitation stage. The electrodes can be automatically cleaned regularly, reducing the adsorption of fly ash on the inner wall of the excitation stage and promptly discharging the generated fly ash. Furthermore, the excitation stage and the sample can be continuously and stably grounded without contaminating the analytical surface of the sample to be tested, thereby improving the accuracy and stability of the analysis results. Furthermore, the lens can be cleaned and replaced by plugging and unplugging without affecting the inert gas atmosphere of the optical chamber, which is convenient and quick.

[0070] The above are only preferred embodiments of the present invention; however, the scope of protection of the present invention is not limited thereto. Any person skilled in the art who, within the technical scope disclosed by the present invention, makes equivalent substitutions or modifications based on the technical solutions and improved concepts of the present invention shall be covered by the scope of protection of the present invention.

Claims

1. A coaxial spinning airflow protection excitation device, characterized in that: include: An excitation platform body, a lens assembly, and a coaxial spin excitation chamber, wherein the lens assembly is arranged at the upper end of the excitation platform body, and the coaxial spin excitation chamber is arranged at the lower end of the excitation platform body; The coaxial spin excitation chamber includes an excitation chamber, an electrode, a rectifier assembly, and a high-voltage protection device. The excitation chamber is arranged at the lower end of the excitation platform body, the rectifier assembly is arranged in the excitation chamber, and the electrode passes through the rectifier assembly to enter the excitation chamber; a high-voltage protection device is arranged above the electrode; The main body of the excitation platform is provided with an air inlet and two air flow channels connected to the air inlet, the two air flow channels are respectively a first air channel and a second air channel, the first air channel is connected to the bottom of the rectifier component to reach the excitation chamber, the second air channel is connected to the top of the rectifier component, and a plurality of inclined air holes are provided on the upper surface of the rectifier component, and the inclination direction and inclination angle of the plurality of the air holes are consistent, so that the air flow produces a coaxial spin with the electrode, and the first air channel is connected to the air holes.

2. The excitation device for coaxial spinning airflow protection according to claim 1, characterized in that: The lens assembly is a plug-in lens assembly, which includes a lens, a rubber ring, a lens support plate, and a fixed base plate. The lens support plate is provided with a handle. The lens is mounted on the lens support plate and sealed and fixed by the rubber ring. The fixed base plate is provided with a raised limit block, and the lens support plate is provided with a groove that cooperates with the limit block. The fixed base plate and the lens support plate are connected through the limit block and the groove.

3. The excitation device for coaxial spinning airflow protection according to claim 1, characterized in that: The excitation device also includes a water-cooled constant temperature system, which includes a circulating water circuit. A water inlet and a water outlet are provided on the outer wall of the excitation platform body. The water inlet is connected to the water inlet end of the circulating water circuit, and the water outlet is connected to the water outlet end of the circulating water circuit. The circulating water circuit is arranged in the excitation platform body and extends to the position of the coaxial spin excitation chamber and is arranged around the excitation chamber.

4. The excitation device for coaxial spinning airflow protection according to claim 3, characterized in that: The water-cooled constant temperature system also includes a circulating water machine, a water tank and a fan. The water inlet is connected to the circulating water machine, and the circulating water machine and the water outlet are respectively connected to the water tank. The water tank is provided with the fan, and the fan is used to cool the water in the water tank.

5. The excitation device for coaxial spinning airflow protection according to claim 1, characterized in that: The excitation device also includes an automatic cleaning system, which includes an electrode brush, a servo motor, a buffer device, and an electrode brush motion control system. The automatic cleaning system is fixedly installed at the upper right position of the sample stage and is used for automatic cleaning of the electrode surface; the electrode brush is connected to the rotating shaft of the servo motor, and the lower end and outer ring of the electrode brush are respectively provided with the buffer device, and the buffer device is used to convert the contact between the electrode and the electrode brush into soft contact. The electrode brush motion control system controls the servo motor to drive the electrode brush to rotate.

6. The excitation device for coaxial spinning airflow protection according to claim 1, characterized in that: The excitation device also includes a continuously moving grounding component, and an excitation platform cover is provided at the bottom end of the excitation platform body. The continuously moving grounding component is arranged on the excitation platform cover. The continuously moving grounding component includes a hollow fixing component, a grounding ball, and a compression spring. The hollow fixing component is fixedly connected to the rectifier component. Two grounding balls and the compression spring are arranged from bottom to top in the hollow fixing component, wherein the lower grounding ball emerges from the excitation platform cover and is indirectly connected to the compression spring through the upper grounding ball.

7. The excitation device for coaxial spinning airflow protection according to claim 1, characterized in that: The electrode is a pure tungsten electrode, which is connected to an insulating fixing component via a brass fixing component. The brass fixing component is used to fix the electrode and provide voltage, and is insulated from the main body of the excitation platform via the insulating fixing component.

8. The excitation device for coaxial spinning airflow protection according to claim 1, characterized in that: The rectifier assembly is made of ceramic material, surrounds the electrode, and is used to protect the inner wall of the excitation platform.

9. The excitation device for coaxial spinning airflow protection according to claim 1, characterized in that: The high-voltage protection device consists of an insulating shell and a pure copper shell, and is used to prevent the high voltage loaded on the electrode from being directly exposed to the external environment.

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