A probe coating positioning tool and a probe coating tool

Abstract

The application provides a probe coating positioning tool and a probe coating tool, and relates to the technical field of semiconductors. The probe coating positioning tool comprises a mounting plate, a limiting bottom plate, a magnetic sheet and a limiting pressing plate. At least one positioning plate is arranged on the mounting surface of the mounting plate, and a mounting hole for needle implantation is arranged on the upper surface of the positioning plate. A magnet piece, a scale area and a glue coating area are arranged on the limiting bottom plate. The positioning plate is fixedly connected with the limiting bottom plate, so that the upper part of the implanted probe corresponds to the scale area, and the lower part of the probe corresponds to the glue coating area. The magnetic sheet is located between the side surface of the mounting plate and the limiting pressing plate, and is fixedly connected with the mounting plate and the limiting pressing plate, respectively. The magnetic attraction between the magnetic sheet and the magnet piece causes the magnetic sheet to be attached to the implanted probe. The probe coating process efficiency is improved, the probe coating precision is improved, and the product quality is ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, in particular to a probe coating positioning tool and a probe coating tool. BACKGROUND

[0002] In the process of using the probe (or wire needle), the product test scheme fails due to the contact between the wire needle and the wire needle, so it is necessary to coat the middle area of the wire needle with insulation. However, due to the small size of the wire needle (especially the micro wire needle), the positioning of the wire needle during coating and the stability of the coating are relatively high, and it is difficult for general processes to obtain wire needle products that meet the coating precision requirements. In order to avoid product test scheme failure, many manufacturers often re-purchase a new batch of coated wire needles, which will lead to a large number of unqualified or uncoated wire needles being scrapped, resulting in costs. SUMMARY

[0003] Therefore, the embodiments of the present application provide a probe coating positioning tool and a probe coating tool, which improve the positioning efficiency and limiting stability during probe coating, can realize the self-fixing and coating turnover of the probe during coating, make the coating of the probe full, uniform and consistent in thickness, improve the probe coating process efficiency and the probe coating precision, thereby guaranteeing the product quality and reducing the failure rate.

[0004] The embodiments of the present application provide the following technical solutions:

[0005] In one aspect, a probe coating positioning tool is provided, comprising: a mounting plate, a limiting bottom plate, a magnetic sheet and a limiting pressing plate, at least one positioning plate is arranged on the mounting surface of the mounting plate, and a mounting hole for planting a probe is arranged on the upper surface of the positioning plate; a magnet piece, a scale area and a glue coating area are arranged on the limiting bottom plate, the positioning plate is fixedly connected with the limiting bottom plate, so that the upper part of the planted probe corresponds to the scale area and the lower part of the planted probe corresponds to the glue coating area; the magnetic sheet is located between the side surface of the mounting plate and the limiting pressing plate, and is fixedly connected with the mounting plate and the limiting pressing plate respectively, and the magnetic attraction between the magnetic sheet and the magnet piece causes the magnetic sheet to be pressed onto the planted probe.

[0006] In some embodiments, the positioning plate is formed by stacking two layers of positioning sheets.

[0007] In some embodiments, the two layers of positioning sheets are respectively provided with a first through hole and a second through hole, the first through hole and the second through hole are respectively connected to form the mounting hole, and the number of the mounting hole, the first through hole and the second through hole is at least one.

[0008] In some embodiments, the mounting hole is a micro round hole, and / or the at least one mounting hole is arranged in a straight line on the positioning plate at a preset interval, and / or the mounting hole has a preset opening size.

[0009] In some embodiments, the preset interval is not less than 0.3 mm, and / or the preset opening size has a hole diameter ranging from 35 ± 2 μm, and a thickness ranging from 0.1 mm to 0.25 mm.

[0010] In some embodiments, the magnetic sheet covers at least the area exposed by the probe after needle implantation from the mounting hole, and / or the magnet piece is arranged on the limiting bottom plate in a manner corresponding to the adsorption of the magnetic sheet, and the number of the magnet piece is at least one.

[0011] In some embodiments, the magnet piece is a circular magnet sheet.

[0012] In some embodiments, the positioning plate is horizontally fixed to the mounting surface of the mounting plate through a first positioning pin, and / or the mounting plate and the limiting bottom plate are fixedly connected through a second positioning pin, and / or the limiting bottom plate and the mounting plate are fixedly connected through a screw.

[0013] In some embodiments, the glue coating area is a glue layer applied to the stepped portion of the limiting bottom plate.

[0014] In some embodiments, the upper part of the probe after needle implantation is attached to the scale area, and the lower part of the probe is attached to the glue coating area, and / or the magnetic attraction between the magnetic sheet and the magnet piece causes the magnetic sheet to lightly press on the probe after needle implantation.

[0015] In some embodiments, the number of probes is at least one, and / or the diameter of the probe ranges from 25 μm to 100 μm, and the length of the probe ranges from 4 mm to 8 mm.

[0016] On the other hand, a probe coating tool is provided, which includes the probe coating positioning tool of any of the above embodiments.

[0017] Compared with the prior art, the above at least one technical solution adopted by the embodiments of the present specification can achieve the beneficial effects at least including:

[0018] Through the magnetic attraction and cooperation of the magnet piece and the magnetic sheet and the adsorption of the gluing area at the same time, the good locking and limiting effect of the probe after planting the needle is realized, the rotation or displacement of the probe is avoided, and due to the appropriate cooperation, the positioning can also protect the probe from deformation; further, in combination with the limiting pressing plate for further cooperation, the excellent positioning effect of the probe after planting the needle is ensured, the positioning efficiency and limiting stability of the probe during coating are improved, the self-fixing and coating turnover of the probe during coating can be realized, the probe coating is full, uniform and consistent in thickness, the probe coating process efficiency is improved, and the probe coating precision is improved, so that the product quality can be ensured, and the failure rate is reduced; in addition, it also has the technical advantages of reasonable structure, convenient assembly and adjustment, convenient operation, strong applicability, reusability and low processing cost. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can obtain other drawings according to these drawings without creative labor.

[0020] Figure 1 is a structural schematic diagram of the probe coating positioning tool provided by the embodiments of the present application;

[0021] Figure 2 is an exploded structural schematic diagram of the probe coating positioning tool provided by the embodiments of the present application. DETAILED DESCRIPTION

[0022] The embodiments of the present application will be described in detail below with reference to the drawings.

[0023] The embodiments of the present application will be described in detail below with reference to the drawings.

[0024] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0025] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0026] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0027] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.

[0028] like Figure 1 and Figure 2 As shown, the probe coating positioning tool provided in this embodiment includes: a limiting base plate 1, a mounting plate 4, a magnetic sheet 5, and a limiting pressure plate 6. Specifically, the mounting surface of the mounting plate 4 ( Figure 2 At least one positioning plate 10 is provided on the upper surface of the mounting plate 4 (shown in the figure). The upper surface of the positioning plate 10 is provided with mounting holes (not shown in the figure) for inserting needles using the probe 3. In some embodiments, the positioning plate 10 is horizontally fixed to the mounting surface of the mounting plate 4 by a first positioning pin 8. In some embodiments, the positioning plate 10 is composed of two layers of positioning pieces stacked together. In some embodiments, the mounting plate 4, the positioning plate 10, or their two layers of positioning pieces are ceramic mounting plates, ceramic positioning plates, or ceramic sheets made of ceramic material. In some embodiments, the two layers of positioning pieces of the positioning plate 10 are respectively provided with a first through hole and a second through hole. The first through hole and the second through hole are respectively connected to form mounting holes. The number of mounting holes, the first through hole, and the second through hole is at least one, that is, the number of mounting holes is not limited, and the corresponding number of mounting holes can be set according to the need for inserting needles into the probe 3. The positioning plate 10, which is composed of two layers of positioning pieces stacked together, can ensure that the deflection angle of the probe 3 after installation is extremely small when the probe 3 is supported and fixed, thus achieving a good installation limiting effect on the probe 3.

[0029] In some embodiments, the mounting holes are micro-circular holes. In some embodiments, at least one mounting hole is arranged sequentially along a straight line on the positioning plate 10 at a preset interval, that is, multiple mounting holes can be arranged in an array along a straight line on the positioning plate 10. In some embodiments, the mounting holes have a preset opening size. In some embodiments, the preset interval between the mounting holes is not less than 0.3 mm. In some embodiments, the aperture range of the preset opening size is 35±2 μm, and the thickness range of the preset opening size is 0.1 mm-0.25 mm, for example, the thickness of the preset opening size can be 0.1 mm, 0.2 mm, 0.25 mm, etc. In some embodiments, the mounting holes on the positioning plate 10 can be processed by laser processing.

[0030] Refer to Figure 1 and Figure 2 The limiting base plate 1 is provided with a magnet 7, a scale area 12, and an adhesive application area 11. The positioning plate 10 is fixedly connected to the limiting base plate 1, so that the upper part of the probe 3 after needle implantation corresponds to the scale area 12 and the lower part of the probe 3 corresponds to the adhesive application area 11. In some embodiments, the mounting plate 10 and the limiting base plate 1 are fixedly connected by a second positioning pin 9. In some embodiments, the magnet 7 is a circular magnet. In some embodiments, the number of magnets 7 can be set to one or more as needed. The scale area 12 is used to check whether the positional state of the probe 3 after needle implantation is qualified. In some embodiments, the engraving width of the scale line of the scale area 12 is equal to the width of the probe 3. The positional state of the probe 3 after needle implantation is judged by comparing whether each probe 3 is collinear with the scale line. In some embodiments, the adhesive application area 11 can be an adhesive layer applied to the step portion 13 on the limiting base plate 1. In some embodiments, the adhesive layer of the adhesive application area 11 can be an adhesive layer prepared according to the corresponding ratio according to the adhesion requirements. It can be specifically selected. The embodiments of this application do not limit its adhesion requirements and ratio. In some embodiments, the glued area 11 can be cleaned of the glue using alcohol under ultrasonic conditions for easy reuse.

[0031] The magnetic sheet 5 is located between the side of the mounting plate 10 and the limiting pressure plate 1, and is fixedly connected to both the mounting plate 10 and the limiting pressure plate 1. The magnetic attraction between the magnetic sheet 5 and the magnet 7 causes the magnetic sheet 5 to adhere to the probe 3 after needle implantation. In some embodiments, the magnetic sheet 5 is a magnetic steel sheet. In some embodiments, the limiting pressure plate 1 and the mounting plate 10 are fixedly connected by screws 14. In some embodiments, the limiting pressure plate 1, the magnetic sheet 5, and the mounting plate 10 are fixedly connected by screws 14. It should be noted that the specific number of the first positioning pin 8, the second positioning pin 9, and the screws 14 can be appropriately set or changed as needed, and this application embodiment does not impose any special limitations. In some embodiments, the magnetic sheet 5 at least covers the area of ​​the probe 3 exposed from the mounting hole after needle implantation (such as the side area of ​​the probe 3 facing the magnetic sheet 5).

[0032] In some embodiments, the magnet 7 is arranged on the limiting base plate 1 in a manner corresponding to the adsorption effect of the magnetic sheet 5, such as... Figure 1 The magnet 7 and magnetic sheet 5 are positioned opposite to the central probe 3 array, and there is at least one magnet 7. In some embodiments, the magnetic surface area of ​​at least one magnet 7 may be smaller than the magnetic surface area of ​​the magnetic sheet 5, as long as the desired magnetic force or magnetic attraction is achieved. In some embodiments, the upper part of the probe 3 after needle implantation is attached to the scale area 12, and the lower part of the probe 3 is attached to the adhesive coating area 11. In some embodiments, the magnetic attraction between the magnetic sheet 5 and the magnet 7 causes the magnetic sheet 5 to lightly press onto the probe 3 after needle implantation.

[0033] Under the magnetic attraction and pressing action of the magnet 7 and the magnetic sheet 5, as well as the adsorption effect of the adhesive coating area 11, the probe 3 after needle implantation can achieve a good locking and limiting effect, preventing the probe 3 from rotating or displacing. Furthermore, due to the appropriate pressing action, the probe 3 can be positioned while also being protected from deformation. In addition, the limiting pressure plate 6 further presses the probe 3 after needle implantation, ensuring excellent positioning effect.

[0034] In some embodiments, the number of probes 3 is at least one, and / or the diameter of probes 3 ranges from 25 μm to 100 μm, and the length of probes 3 ranges from 4 mm to 8 mm. It should be noted that, depending on the linear shape or size specifications of the positioning probes to be coated, the coating positioning tool and its components can be appropriately modified to meet the corresponding coating positioning requirements without departing from the inventive concept of this application. The embodiments of this application do not impose any particular limitations on this.

[0035] In addition, this application also provides a probe coating tool, which includes the probe coating positioning tool described in any of the above embodiments. In some embodiments, it can be used in conjunction with an automatic needle implantation machine to implant the probes 3 on the positioning plate 10, which facilitates assembly line operation and further improves the working efficiency of probe coating positioning and the probe coating tool.

[0036] For example, the probe coating positioning tool and probe coating tool provided in this application embodiment can be operated in the following manner:

[0037] The ceramic positioning plate 10 is installed on the ceramic mounting plate 4 via the first positioning pin 8 and secured with two screws 15. It is then fastened to the limiting pressure plate 6 with screws 14. At this point, the linear probe 3 can be inserted into the mounting hole on the ceramic positioning plate 10. After the probe is fully inserted, it is installed on the limiting base plate 1, which has been coated with a special adhesive layer, via the second positioning pin 9 and secured with screws 14. This design allows the probe 3 to be attracted without sticking it to the adhesive, preventing rotation of the probe 3 during coating or movement. Finally, the circular magnet 7 embedded in the limiting base plate 1 attracts the magnetic steel sheet 5 to the limiting base plate 1. Simultaneously, the magnetic attraction of the magnet 7 gently presses the magnetic steel sheet 5 onto the probe 3. This completes the positioning and limiting (including assembly) work, and the plate can then be moved to the coating operation window for coating.

[0038] In summary, the probe coating and positioning tool and the probe coating tool provided in this application have at least the following beneficial effects:

[0039] By utilizing the magnetic attraction and pressing action of the magnetic components and the magnetic sheet, along with the adsorption effect of the adhesive coating area, a good locking and limiting effect is achieved on the probe after needle implantation, preventing the probe from rotating or shifting. Furthermore, due to the appropriate pressing action, positioning is achieved while protecting the probe from deformation. Further, the limiting pressure plate further enhances the pressing action, ensuring excellent positioning of the probe after needle implantation. This improves the positioning efficiency and limiting stability during probe coating, enabling the probe to be self-fixed and reusable during coating. The resulting probe coating is full, uniform, and of consistent thickness, improving both the efficiency and accuracy of the probe coating process, thereby ensuring product quality and reducing failure rate. In addition, it boasts technical advantages such as a reasonable structural design, convenient assembly and adjustment, easy operation, strong applicability, reusability, and low processing cost.

[0040] In this specification, the same or similar parts between the various embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, for the product embodiments described later, since they correspond to the methods, the descriptions are relatively simple, and the relevant parts can be referred to the descriptions in the system embodiments.

[0041] Furthermore, this specification uses specific terms to describe embodiments thereof. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic associated with at least one embodiment of this specification. Therefore, it should be emphasized and noted that references to "an embodiment," "one embodiment," or "an alternative embodiment" in different locations throughout this specification do not necessarily refer to the same embodiment. Moreover, certain features, structures, or characteristics in one or more embodiments of this specification can be appropriately combined.

[0042] Furthermore, unless expressly stated in the claims, the order of processing elements and sequences, the use of numbers and letters, or other names described in this specification are not intended to limit the order of the processes and methods described herein. Although various examples have been discussed in the foregoing disclosure of some embodiments of the invention that are currently considered useful, it should be understood that such details are for illustrative purposes only, and the appended claims are not limited to the disclosed embodiments; rather, the claims are intended to cover all modifications and equivalent combinations that conform to the spirit and scope of the embodiments described herein. For example, while the system components described above can be implemented by hardware devices, they can also be implemented solely by software solutions, such as installing the described system on existing processing devices or mobile devices.

[0043] The basic concepts have been described above. Obviously, for those skilled in the art, the detailed disclosure above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this specification. Such modifications, improvements, and corrections are suggested in this specification and therefore remain within the spirit and scope of the exemplary embodiments described herein.

Claims

1. A probe coating positioning tool, characterized in that, include: The mounting plate comprises a mounting plate, a limiting base plate, a magnetic sheet, and a limiting pressure plate. At least one positioning plate is provided on the mounting surface of the mounting plate, and the upper surface of the positioning plate has mounting holes for needle implantation. The limiting base plate has a magnet, a scale area, and an adhesive application area. The positioning plate is fixedly connected to the limiting base plate, such that the upper part of the implanted probe corresponds to the scale area, and the lower part of the probe corresponds to the adhesive application area. The magnetic sheet is located between the side of the mounting plate and the limiting pressure plate, and is fixedly connected to both the mounting plate and the limiting pressure plate. The magnetic attraction between the magnetic sheet and the magnet causes the magnetic sheet to adhere to the implanted probe. After needle implantation, the upper part of the probe is attached to the scale area, and the lower part of the probe is attached to the adhesive area. The magnetic attraction between the magnetic sheet and the magnet causes the magnetic sheet to be lightly pressed onto the probe after needle implantation. The adhesive application area is the adhesive layer applied to the stepped part of the limiting base plate.

2. The probe coating positioning tool according to claim 1, characterized in that, The positioning plate is composed of two layers of positioning pieces stacked together.

3. The probe coating positioning tool according to claim 2, characterized in that, The two positioning plates are respectively provided with a first through hole and a second through hole. The first through hole and the second through hole are respectively connected to form the mounting hole. The number of the mounting hole, the first through hole, and the second through hole is at least one.

4. The probe coating positioning tool according to claim 3, characterized in that, The mounting hole is a miniature round hole.

5. The probe coating positioning tool according to claim 3, characterized in that, At least one mounting hole is arranged sequentially along a straight line on the positioning plate at a predetermined interval.

6. The probe coating positioning tool according to claim 3, characterized in that, The mounting hole has a preset opening size.

7. The probe coating positioning tool according to claim 5, characterized in that, The preset interval is not less than 0.3mm.

8. The probe coating positioning tool according to claim 6, characterized in that, The aperture range of the preset opening size is 35±2μm, and the thickness range of the preset opening size is 0.1mm-0.25mm.

9. The probe coating positioning tool according to claim 1, characterized in that, The magnetic sheet at least covers the area where the probe is exposed from the mounting hole after needle implantation, and / or the magnets are arranged on the limiting base plate in a manner corresponding to the adsorption effect of the magnetic sheet, and the number of the magnets is at least one.

10. The probe coating positioning tool according to claim 9, characterized in that, The magnet is a circular magnet sheet.

11. The probe coating positioning tool according to claim 1, characterized in that, The positioning plate is horizontally fixed to the mounting surface of the mounting plate by a first positioning pin, and / or the mounting plate and the limiting base plate are fixedly connected by a second positioning pin, and / or the limiting pressure plate and the mounting plate are fixedly connected by screws.

12. The probe coating positioning tool according to any one of claims 1 to 11, characterized in that, The number of probes is at least one, and / or the diameter of the probes ranges from 25μm to 100μm, and the length of the probes ranges from 4mm to 8mm.

13. A probe coating tool, characterized in that, Includes the probe coating positioning tool according to any one of claims 1 to 12.

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