A method and device for simultaneously realizing laser scribing and absorption spectrum measurement

Abstract

The present application discloses a method and device for simultaneously realizing laser scribing and absorption spectrum measurement. A broadband laser is obtained, and the broadband laser is converted into parallel laser through a lens. The parallel laser is split by a dielectric film mirror to obtain initial reflected laser and transmitted laser. The initial reflected laser is reflected to an optical attenuator to obtain low-power reflected laser. The low-power reflected laser is introduced into an absorption spectrum sample area to obtain transmitted laser passing through the absorption spectrum sample area. The transmitted laser passing through the absorption spectrum sample area is reflected to a spectrometer and a detector by a mirror to obtain spectral information of a first sample. The initial transmitted laser is transmitted to a monochromator, and the initial transmitted laser is converted by the monochromator to obtain converted laser. The converted laser is introduced into a laser scribing sample area to obtain a second sample after laser scribing. By this method, laser scribing and absorption spectrum measurement are simultaneously realized, saving measurement time.

Description

Technical Field

[0001] The present application relates to the technical field of perovskite solar cells, and particularly to a method and device for simultaneously realizing laser scribing and absorption spectrum measurement. Background Art

[0002] Lead halide perovskite (LHP) has gradually become one of the research focuses in multiple disciplines such as physics, chemistry, and materials. Applying perovskite materials to the manufacture of solar cells has also become the current research focus. So far, the photoelectric conversion efficiency of small-area single-junction perovskite solar cells prepared in the laboratory has been greatly improved. Therefore, perovskite-based solar cells have good application prospects.

[0003] Currently, to achieve grid-connected power generation of perovskite solar cells, perovskite solar cells need to be connected in series to form a module. And to form a series-structured module of perovskite solar cells, laser scribing is required to make the cells form a series structure. However, sometimes it is also necessary to perform ultraviolet-visible absorption spectrum measurement on perovskite solar cells. Usually, the perovskite solar cells are sent to a professional testing institution for measurement, which is a cumbersome process and causes damage to the structure and materials of the perovskite solar cells. At the same time, the lasers used in the perovskite solar cell scribing process are usually single-wavelength lasers, which cannot meet the requirements of the light source for ultraviolet-visible absorption spectrum measurement. Therefore, how to simultaneously realize laser scribing and absorption spectrum measurement of perovskite solar cells has become an urgent problem to be solved. Summary of the Invention

[0004] In view of this, the embodiments of the present application provide a method and device for simultaneously realizing laser scribing and absorption spectrum measurement, aiming to simultaneously realize laser scribing and absorption spectrum measurement to save measurement time.

[0005] In a first aspect, the embodiments of the present application provide a method for simultaneously realizing laser scribing and absorption spectrum measurement, the method comprising:

[0006] Obtain broadband laser, and convert the broadband laser into parallel laser through a lens;

[0007] Split the parallel laser through a dielectric film mirror to obtain initial reflected laser and transmitted laser;

[0008] Reflect the initial reflected laser to an optical attenuator to obtain low-power reflected laser;

[0009] Introduce the low-power reflected laser into an absorption spectrum sample area to obtain transmitted laser passing through the absorption spectrum sample area;

[0010] The transmitted laser passing through the absorption spectral sample area is reflected by a mirror to a spectrometer and a detector to obtain spectral information of a first sample;

[0011] The initial transmitted laser is transmitted to a monochromator, and the initial transmitted laser is converted by the monochromator to obtain a converted laser;

[0012] The converted laser is introduced into a laser scribing sample area for laser scribing to obtain a second sample after laser scribing.

[0013] Optionally, the absorption spectral sample area includes a first absorption spectral sample area of a substrate coated with a preset material and a second absorption spectral sample area of a substrate without coating the preset material. The introducing the low-power reflected laser into the absorption spectral sample area to obtain the transmitted laser passing through the absorption spectral sample area includes:

[0014] The low-power reflected laser is introduced into the first absorption spectral sample area to obtain a first transmitted laser passing through the first absorption spectral sample area;

[0015] The low-power reflected laser is introduced into the second absorption spectral sample area to obtain a second transmitted laser passing through the second absorption spectral sample area;

[0016] The reflecting the transmitted laser passing through the absorption spectral sample area by a mirror to a spectrometer and a detector to obtain spectral information of a first sample includes:

[0017] The first transmitted laser is reflected by the mirror to the spectrometer and the detector to obtain first spectral information;

[0018] The second transmitted laser is reflected by the mirror to the spectrometer and the detector to obtain second spectral information;

[0019] Based on the first spectral information and the second spectral information, the spectral information of the first sample is determined.

[0020] Optionally, the reflecting the transmitted laser passing through the absorption spectral sample area by a mirror to a spectrometer and a detector to obtain spectral information of a first sample includes:

[0021] Difference processing is performed based on the first spectral information and the second spectral information to obtain the spectral information of the first sample.

[0022] Optionally, the dielectric film mirror is a semi-transmissive and semi-reflective dielectric film mirror.

[0023] Optionally, transmit the initial transmitted laser to a monochromator, and convert the initial transmitted laser through the monochromator to obtain a converted laser, including:

[0024] Transmit the initial transmitted laser to the monochromator, and convert the initial transmitted laser to a laser with a preset wavelength through the monochromator to obtain the converted laser.

[0025] In a second aspect, an embodiment of the present application provides a device for simultaneously implementing laser scribing and absorption spectrum measurement, the device includes:

[0026] An acquisition module, configured to acquire a broadband laser, and convert the broadband laser into a parallel laser through a lens;

[0027] A laser beam splitting module, configured to split the parallel laser through a dielectric film mirror to obtain an initial reflected laser and a transmitted laser;

[0028] A first reflection module, configured to reflect the initial reflected laser to an optical attenuator to obtain a low-power reflected laser;

[0029] A first introduction module, configured to introduce the low-power reflected laser into an absorption spectrum sample area to obtain a transmitted laser passing through the absorption spectrum sample area;

[0030] A second reflection module, configured to reflect the transmitted laser passing through the absorption spectrum sample area to a spectrometer and a detector through a reflector to obtain spectral information of a first sample;

[0031] A laser conversion module, configured to transmit the initial transmitted laser to a monochromator, and convert the initial transmitted laser through the monochromator to obtain a converted laser;

[0032] A second introduction module, configured to introduce the converted laser into a laser scribing sample area for laser scribing to obtain a second sample after laser scribing.

[0033] Optionally, the first introduction module includes:

[0034] A first introduction unit, configured to introduce the low-power reflected laser into the first absorption spectrum sample area to obtain a first transmitted laser passing through the first absorption spectrum sample area;

[0035] A second introduction unit, configured to introduce the low-power reflected laser into the second absorption spectrum sample area to obtain a second transmitted laser passing through the second absorption spectrum sample area;

[0036] Correspondingly, the second reflection module includes:

[0037] The first reflection unit is configured to reflect the first transmitted laser to the spectrometer and the detector through the mirror, so as to obtain first spectral information;

[0038] The second reflection unit is configured to reflect the second transmitted laser to the spectrometer and the detector through the mirror, so as to obtain second spectral information;

[0039] The determination unit is configured to determine the spectral information of the first sample according to the first spectral information and the second spectral information.

[0040] Optionally, the second reflection module is specifically configured to:

[0041] Perform a difference operation on the first spectral information and the second spectral information to obtain the spectral information of the first sample.

[0042] Optionally, the dielectric film mirror is a semi-transmissive and semi-reflective dielectric film mirror.

[0043] Optionally, the laser conversion module includes:

[0044] The laser conversion unit is configured to transmit the initial transmitted laser to the monochromator, and convert the initial transmitted laser into a laser with a preset wavelength through the monochromator to obtain the converted laser.

[0045] In a third aspect, an embodiment of the present application provides a device for simultaneously implementing laser scribing and absorption spectrum measurement, and the device includes:

[0046] A memory for storing a computer program;

[0047] A processor for executing the computer program so that the device executes the method for simultaneously implementing laser scribing and absorption spectrum measurement described in the first aspect above.

[0048] In a fourth aspect, an embodiment of the present application provides a computer storage medium, and a computer program is stored on the computer-readable storage medium. When the computer program is run, the device running the computer program implements the method for simultaneously implementing laser scribing and absorption spectrum measurement described in the first aspect above.

[0049] Compared with the prior art, the embodiments of the present application have the following beneficial effects:

[0050] The embodiment of the present application provides a method and device for simultaneously realizing laser scribing and absorption spectrum measurement. First, a broadband laser is obtained, and the broadband laser is converted into parallel laser through a lens. The parallel laser is split by a dielectric film mirror to obtain an initial reflected laser and a transmitted laser. Then, the initial reflected laser is reflected to an optical attenuator to obtain a low-power reflected laser. The low-power reflected laser is introduced into an absorption spectrum sample area to obtain a transmitted laser passing through the absorption spectrum sample area. The transmitted laser passing through the absorption spectrum sample area is reflected to a spectrometer and a detector by a mirror to obtain the spectral information of the first sample. Finally, the initial transmitted laser is transmitted to a monochromator, and the initial transmitted laser is converted by the monochromator to obtain a converted laser. The converted laser is introduced into a laser scribing sample area for laser scribing to obtain a second sample after laser scribing. The broadband laser is split into two paths by the dielectric film mirror. One path of the optical path is reflected to the spectrometer and the detector for ultraviolet-visible absorption spectrum measurement after passing through the optical attenuator, the absorption spectrum sample area, and the mirror. The other path of the optical path is converted by the monochromator and then introduced into the laser scribing sample area for laser scribing. The laser scribing optical path and the absorption spectrum measurement optical path are independent of each other. Laser scribing and absorption spectrum measurement are simultaneously realized by one method, which reduces the cumbersome process of separately measuring the absorption spectrum of the measurement sample, saves the measurement time, and improves the manufacturing efficiency of solar cells at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] To more clearly illustrate the technical solutions in this embodiment or the prior art, the following will briefly introduce the drawings required for the description of the embodiment or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0052] Figure 1 FIG. is a flowchart of a method for simultaneously realizing laser scribing and absorption spectrum measurement provided by an embodiment of the present application;

[0053] Figure 2 FIG. is a schematic structural diagram of a tool for simultaneously realizing laser scribing and absorption spectrum measurement provided by an embodiment of the present application;

[0054] Figure 3 FIG. is a schematic structural diagram of a device for simultaneously realizing laser scribing and absorption spectrum measurement provided by an embodiment of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0055] To enable those skilled in the art to better understand the solution of this application, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are only a part of the embodiments of this application, rather than all the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of this application.

[0056] Currently, to achieve grid-connected power generation of perovskite solar cells, it is necessary to form a series connection of perovskite solar cells to form a module. And to form a module with a series connection structure of perovskite solar cells, laser scribing is required to make the cells form a series connection structure. However, sometimes it is also necessary to perform ultraviolet-visible absorption spectroscopy measurement on perovskite solar cells. Usually, the perovskite solar cells are sent to a professional testing institution for measurement, which is a cumbersome process and causes damage to the structure and materials of the perovskite solar cells. At the same time, the laser used in the scribing process of perovskite solar cells is usually a single-wavelength laser, which cannot meet the requirements of the light source for ultraviolet-visible absorption spectroscopy measurement. Therefore, how to simultaneously achieve laser scribing and absorption spectroscopy measurement of perovskite solar cells has become an urgent problem to be solved.

[0057] Based on this, to solve the above problems, in the embodiments of this application, first, a broadband laser is obtained, and the broadband laser is converted into parallel laser through a lens. The parallel laser is split by a dielectric film mirror to obtain an initial reflected laser and a transmitted laser. Then, the initial reflected laser is reflected to an optical attenuator to obtain a low-power reflected laser. The low-power reflected laser is introduced into the absorption spectroscopy sample area to obtain a transmitted laser passing through the absorption spectroscopy sample area. The transmitted laser passing through the absorption spectroscopy sample area is reflected to a spectrometer and a detector by a mirror to obtain the spectral information of the first sample. Finally, the initial transmitted laser is transmitted to a monochromator, and the initial transmitted laser is converted by the monochromator to obtain a converted laser. The converted laser is introduced into the laser scribing sample area for laser scribing to obtain a second sample after laser scribing.

[0058] It can be seen that the broadband laser is split into two by the dielectric film mirror. One optical path is reflected to the spectrometer and the detector for ultraviolet-visible absorption spectroscopy measurement after passing through the optical attenuator, the absorption spectroscopy sample area, and the mirror. The other optical path is converted by the monochromator and then introduced into the laser scribing sample area for laser scribing. The laser scribing optical path and the absorption spectroscopy measurement optical path are independent of each other. Laser scribing and absorption spectroscopy measurement are simultaneously achieved by one method, reducing the cumbersome process of separately performing absorption spectroscopy measurement on the measurement sample, saving measurement time, and improving the manufacturing efficiency of solar cells at the same time.

[0059] The following will, in conjunction with the accompanying drawings, elaborate on the specific implementation of the method and apparatus for simultaneously achieving laser scribing and absorption spectroscopy measurement in the embodiments of the present application through examples.

[0060] Refer to Figure 1 , which is a flowchart of a method for simultaneously achieving laser scribing and absorption spectroscopy measurement provided by an embodiment of the present application. As shown in conjunction with Figure 1 , it may specifically include:

[0061] S101: Obtain broadband laser, and convert the broadband laser into parallel laser through a lens.

[0062] Obtain broadband laser through a broadband laser source, and convert the broadband laser of a point light source into parallel laser through a lens. Refer to Figure 2 , as shown. Figure 2 is a schematic structural diagram of a tool for simultaneously achieving laser scribing and absorption spectroscopy measurement. The tool for simultaneously achieving laser scribing and absorption spectroscopy measurement includes a broadband laser source 21, a lens 22, a semi-transmissive and semi-reflective dielectric film mirror 23, an optical attenuator 24, a monochromator 25, a reflector 26, an absorption spectroscopy sample area 27, a laser scribing sample area 28, a spectrometer, and a detector 29. The lens 22 is located in the light output direction of the broadband laser source 21, and there is a certain distance between the lens 22 and the outlet of the broadband laser source 21. The semi-transmissive and semi-reflective dielectric film mirror 23 is located behind the lens 22. The monochromator 25 is located behind the optical path reflected by the semi-transmissive and semi-reflective dielectric film mirror 23. The laser scribing sample area 28 is located behind the monochromator 25. The optical attenuator 24 is located behind the other optical path reflected by the semi-transmissive and semi-reflective dielectric film mirror 23. The absorption spectroscopy sample area 27 is located behind the optical attenuator 24. The reflector 26 is located behind the absorption spectroscopy sample area 27. The spectrometer and the detector 29 are located on the reflected optical path of the reflector 26. Among them, the broadband laser source 21 is used to emit broadband laser. The lens 22 is used to convert the broadband laser into parallel laser. The semi-transmissive and semi-reflective dielectric film mirror 23 is used to reflect the broadband laser into two optical paths. The optical attenuator 24 is used to reduce the power of the broadband laser. The monochromator 25 is used to convert the broadband laser. The reflector 26 is used to reflect the broadband laser with reduced power. The spectrometer and the detector 29 are used to test the ultraviolet-visible absorption spectrum of the sample. The absorption spectroscopy sample area 27 is used to place the sample for testing the ultraviolet-visible absorption spectrum. The laser scribing sample area 28 is used to achieve laser scribing.

[0063] S102: Split the parallel laser through a dielectric film mirror to obtain initial reflected laser and transmitted laser.

[0064] The dielectric film mirror can be a semi-transmissive and semi-reflective dielectric film mirror. The parallel laser is split into two optical paths by reflecting half of it (the direction of light propagation changes) and transmitting half of it (the direction of light propagation does not change) through the semi-transmissive and semi-reflective dielectric film mirror, obtaining the initial reflected laser and transmitted laser.

[0065] S103: Reflect the initial reflected laser to an optical attenuator to obtain a low-power reflected laser.

[0066] Reflect the initial reflected laser to an optical attenuator. The optical attenuator is used to reduce the power of the broadband laser, and a low-power reflected laser can be obtained.

[0067] S104: Introduce the low-power reflected laser into the absorption spectroscopy sample area to obtain a transmitted laser passing through the absorption spectroscopy sample area.

[0068] Substrates without coating a preset material and substrates coated with a preset material can be placed in the absorption spectroscopy sample area. When a substrate coated with a preset material is placed, it is the first absorption spectroscopy sample area, and when a substrate without coating a preset material is placed, it is the second absorption spectroscopy sample area. Introducing the low-power reflected laser into the first absorption spectroscopy sample area can obtain a first transmitted laser passing through the first absorption spectroscopy sample area; introducing the low-power reflected laser into the second absorption spectroscopy sample area can obtain a second transmitted laser passing through the second absorption spectroscopy sample area. Among them, the preset material can be perovskite. The first absorption spectroscopy sample area can include a substrate coated with perovskite, and the second absorption spectroscopy sample area can include a substrate without coating perovskite. A battery cell or a half cell can also be placed in the absorption spectroscopy sample area as a test sample. The present application does not specifically limit the specific content of the absorption spectroscopy sample area, which does not affect the implementation of the embodiments of the present application.

[0069] S105: Reflect the transmitted laser passing through the absorption spectroscopy sample area to a spectrometer and a detector through a mirror to obtain spectral information of a first sample.

[0070] Reflect the first transmitted laser passing through the first absorption spectroscopy sample area to a spectrometer and a detector through a mirror, and first spectral information, that is, spectral information of the substrate coated with perovskite, can be obtained; reflect the second transmitted laser passing through the second absorption spectroscopy sample area to a spectrometer and a detector through a mirror, and second spectral information, that is, spectral information of the substrate without coating perovskite, can be obtained. By performing a difference operation on the first spectral information and the second spectral information, spectral information of the ultraviolet-visible absorption light of the first sample can be obtained. Reflecting the transmitted laser passing through the absorption spectroscopy sample area to a spectrometer and a detector through a mirror realizes the function of testing the ultraviolet-absorption visible spectrum of a test sample, and the ultraviolet-absorption visible spectrum of the test sample can be obtained.

[0071] S106: Transmit the initial transmitted laser to a monochromator, and convert the initial transmitted laser through the monochromator to obtain a converted laser.

[0072] In a possible implementation, the initial transmitted laser can be reflected to a monochromator, and the initial transmitted laser can be converted into a preset single-wavelength laser by the monochromator, and the converted laser can be obtained. Among them, the setting of the monochromator can be to selectively generate a laser with a specific wavelength so as to realize laser scribing.

[0073] S107: Introduce the converted laser into the laser scribing sample area for laser scribing to obtain a second sample after laser scribing.

[0074] Introducing the laser converted by the monochromator into the laser scribing sample area enables laser scribing, and a second sample after laser scribing can be obtained, realizing the laser scribing function. Among them, a battery cell or a half cell can be placed in the laser scribing sample area as a test sample. The laser scribing optical path and the absorption spectrum measurement optical path in the embodiments of the present application are independent of each other. Based on a tool that simultaneously realizes laser scribing and absorption spectrum measurement, the laser scribing function and the absorption spectrum measurement function can be simultaneously realized through optical path design and a wide-spectrum laser, and at the same time, the damage caused by ultraviolet-visible absorption spectrum measurement to the battery cell structure and materials is avoided.

[0075] The above is a method for simultaneously realizing laser scribing and absorption spectrum measurement provided by the embodiments of the present application. First, a wide-spectrum laser is obtained, the wide-spectrum laser is converted into parallel laser through a lens, and the parallel laser is split by a dielectric film mirror to obtain an initial reflected laser and a transmitted laser. Then, the initial reflected laser is reflected to an optical attenuator to obtain a low-power reflected laser, the low-power reflected laser is introduced into the absorption spectrum sample area to obtain a transmitted laser passing through the absorption spectrum sample area, and the transmitted laser passing through the absorption spectrum sample area is reflected to a spectrometer and a detector by a mirror to obtain the spectral information of the first sample. Finally, the initial transmitted laser is transmitted to a monochromator, the initial transmitted laser is converted by the monochromator to obtain a converted laser, the converted laser is introduced into the laser scribing sample area for laser scribing to obtain a second sample after laser scribing.

[0076] It can be seen that the wide-spectrum laser is split into two by the dielectric film mirror. One optical path is reflected to the spectrometer and the detector for ultraviolet-visible absorption spectrum measurement after passing through the optical attenuator, the absorption spectrum sample area, and the mirror, and the other optical path is converted by the monochromator and introduced into the laser scribing sample area for laser scribing. The laser scribing optical path and the absorption spectrum measurement optical path are independent of each other. Laser scribing and absorption spectrum measurement are simultaneously realized by one method, reducing the cumbersome process of separately measuring the absorption spectrum of the measurement sample, saving the measurement time, and improving the manufacturing efficiency of solar cells at the same time.

[0077] The above are some specific implementation manners provided by the embodiments of the present application for simultaneously implementing the laser scribing and absorption spectrum measurement methods. Based on this, the present application also provides a corresponding device. The device provided by the embodiments of the present application will be introduced from the perspective of functional modularization below.

[0078] See Figure 3 , which is a schematic structural diagram of a device 300 for simultaneously implementing laser scribing and absorption spectrum measurement provided by an embodiment of the present application. The device 300 may include:

[0079] An acquisition module 301, configured to acquire a broadband laser and convert the broadband laser into parallel laser through a lens;

[0080] A laser beam splitting module 302, configured to split the parallel laser through a dielectric film mirror to obtain an initial reflected laser and a transmitted laser;

[0081] A first reflection module 303, configured to reflect the initial reflected laser to an optical attenuator to obtain a low-power reflected laser;

[0082] A first introduction module 304, configured to introduce the low-power reflected laser into an absorption spectrum sample area to obtain a transmitted laser passing through the absorption spectrum sample area;

[0083] A second reflection module 305, configured to reflect the transmitted laser passing through the absorption spectrum sample area to a spectrometer and a detector through a mirror to obtain spectral information of a first sample;

[0084] A laser conversion module 306, configured to transmit the initial transmitted laser to a monochromator, and convert the initial transmitted laser through the monochromator to obtain a converted laser;

[0085] A second introduction module 307, configured to introduce the converted laser into a laser scribing sample area for laser scribing to obtain a second sample after laser scribing.

[0086] In the embodiment of the present application, through the cooperation of the acquisition module 301, the laser beam splitting module 302, the first reflection module 303, the first introduction module 304, the second reflection module 305, the laser conversion module 306, and the second introduction module 307, the broadband laser is split into two by a dielectric film mirror. One optical path passes through an optical attenuator, an absorption spectrum sample area, and a mirror and is then reflected to a spectrometer and a detector for ultraviolet-visible absorption spectrum measurement. The other optical path passes through a monochromator to convert the broadband laser and then introduces it into a laser scribing sample area for laser scribing. The laser scribing optical path and the absorption spectrum measurement optical path are independent of each other. Laser scribing and absorption spectrum measurement are simultaneously implemented by one method, which reduces the cumbersome process of separately performing absorption spectrum measurement on a measurement sample, saves measurement time, and improves the manufacturing efficiency of solar cells at the same time.

[0087] As an implementation manner, the first introduction module 304 includes:

[0088] A first introduction unit, configured to introduce low-power reflected laser into a first absorption spectrum sample area to obtain first transmitted laser passing through the first absorption spectrum sample area;

[0089] A second introduction unit, configured to introduce low-power reflected laser into a second absorption spectrum sample area to obtain second transmitted laser passing through the second absorption spectrum sample area;

[0090] Correspondingly, the second reflection module 305 includes:

[0091] A first reflection unit, configured to reflect the first transmitted laser to a spectrometer and a detector through a reflector to obtain first spectral information;

[0092] A second reflection unit, configured to reflect the second transmitted laser to a spectrometer and a detector through a reflector to obtain second spectral information;

[0093] A determination unit, configured to determine spectral information of a first sample according to the first spectral information and the second spectral information.

[0094] As an implementation manner, the second reflection module 305 is specifically configured to:

[0095] Perform a difference operation on the first spectral information and the second spectral information to obtain spectral information of the first sample.

[0096] As an implementation manner, the dielectric film mirror is a semi-transmissive and semi-reflective dielectric film mirror.

[0097] As an implementation manner, the laser conversion module 306 includes:

[0098] A laser conversion unit, configured to transmit initial transmitted laser to a monochromator, and convert the initial transmitted laser into laser with a preset wavelength through the monochromator to obtain converted laser.

[0099] The embodiments of the present application also provide corresponding devices and computer storage media for implementing the solutions provided by the embodiments of the present application.

[0100] Wherein, the device includes a memory and a processor, the memory is used to store a computer program, and the processor is used to execute the computer program so that the device executes the method for simultaneously implementing laser scribing and absorption spectrum measurement described in any embodiment of the present application.

[0101] The computer storage medium stores a computer program, and when the code is run, the device running the computer program implements the method for simultaneously implementing laser scribing and absorption spectrum measurement described in any embodiment of the present application.

[0102] In the embodiments of the present application, the "first", "second" (if any) in names such as "the first" and "the second" are only used as name identifiers and do not represent the first and second in sequence.

[0103] From the description of the above embodiments, those skilled in the art can clearly understand that all or part of the steps in the above embodiment methods can be implemented by means of software plus a general hardware platform. Based on such an understanding, the technical solution of the present application can be embodied in the form of a software product, and this computer software product can be stored in a storage medium, such as read-only memory (ROM) / RAM, magnetic disk, optical disc, etc., including several instructions for causing a computer device (which may be a personal computer, a server, or a network communication device such as a router) to execute the methods described in each embodiment or some parts of the embodiments of the present application.

[0104] It should be noted that the embodiments in this specification are all described in a progressive manner. For the same or similar parts between the embodiments, reference can be made to each other. Each embodiment focuses on the differences from other embodiments. In particular, for the device embodiments, since they are basically similar to the method embodiments, the description is relatively simple. For the relevant parts, reference can be made to the partial description of the method embodiments. The device embodiments described above are only illustrative. The units described as separate components may or may not be physically separated, and the components described as unit prompts may or may not be physical units, that is, they may be located in one place or distributed to multiple network units. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment. Those of ordinary skill in the art can understand and implement it without creative efforts.

[0105] As described above, it is only a specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present application should be covered by the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A method for simultaneously realizing laser scribing and absorption spectrum measurement, characterized in that, The method includes: Obtain a broadband laser, and convert the broadband laser into parallel laser through a lens; Split the parallel laser through a dielectric film mirror to obtain an initial reflected laser and a transmitted laser; Reflect the initial reflected laser to an optical attenuator to obtain a low-power reflected laser; Introduce the low-power reflected laser into an absorption spectroscopy sample area to obtain a transmitted laser passing through the absorption spectroscopy sample area; Reflect the transmitted laser passing through the absorption spectroscopy sample area to a spectrometer and a detector through a mirror to obtain spectral information of a first sample; Transmit the initial transmitted laser to a monochromator, and convert the initial transmitted laser through the monochromator to obtain a converted laser; Introduce the converted laser into a laser scribing sample area for laser scribing to obtain a second sample after laser scribing.

2. The method according to claim 1, wherein The absorption spectroscopy sample area includes a first absorption spectroscopy sample area of a substrate coated with a preset material and a second absorption spectroscopy sample area of a substrate not coated with the preset material. The step of introducing the low-power reflected laser into the absorption spectroscopy sample area to obtain a transmitted laser passing through the absorption spectroscopy sample area includes: Introduce the low-power reflected laser into the first absorption spectroscopy sample area to obtain a first transmitted laser passing through the first absorption spectroscopy sample area; Introduce the low-power reflected laser into the second absorption spectroscopy sample area to obtain a second transmitted laser passing through the second absorption spectroscopy sample area; The step of reflecting the transmitted laser passing through the absorption spectroscopy sample area to a spectrometer and a detector through a mirror to obtain spectral information of a first sample includes: Reflect the first transmitted laser to the spectrometer and the detector through the mirror to obtain first spectral information; Reflect the second transmitted laser to the spectrometer and the detector through the mirror to obtain second spectral information; Determine the spectral information of the first sample according to the first spectral information and the second spectral information.

3. The method according to claim 2, wherein The step of reflecting the transmitted laser passing through the absorption spectroscopy sample area to a spectrometer and a detector through a mirror to obtain spectral information of a first sample includes: Perform a difference operation according to the first spectral information and the second spectral information to obtain the spectral information of the first sample.

4. The method according to claim 1, characterized in that The dielectric film mirror is a semi-transmissive and semi-reflective dielectric film mirror.

5. The method according to claim 1, wherein The step of transmitting the initial transmitted laser to a monochromator and converting the initial transmitted laser through the monochromator to obtain a converted laser includes: Transmit the initial transmitted laser to the monochromator, and convert the initial transmitted laser into a laser with a preset wavelength through the monochromator to obtain the converted laser.

6. A device that simultaneously realizes laser scribing and absorption spectrum measurement, characterized in that, The device includes: An acquisition module, configured to obtain a broadband laser and convert the broadband laser into parallel laser through a lens; A laser splitting module, configured to split the parallel laser through a dielectric film mirror to obtain an initial reflected laser and a transmitted laser; A first reflection module, configured to reflect the initial reflected laser to an optical attenuator to obtain a low-power reflected laser; A first introduction module for introducing the low-power reflected laser into the absorption spectroscopy sample area to obtain the transmitted laser passing through the absorption spectroscopy sample area; A second reflection module for reflecting the transmitted laser passing through the absorption spectroscopy sample area to a spectrometer and a detector through a mirror to obtain spectral information of a first sample; A laser conversion module for transmitting the initial transmitted laser to a monochromator, and converting the initial transmitted laser through the monochromator to obtain the converted laser; A second introduction module for introducing the converted laser into the laser scribing sample area for laser scribing to obtain a second sample after laser scribing; 7. The device according to claim 6, characterized in that, The dielectric film mirror is a semi-transmissive and semi-reflective dielectric film mirror; 8. The device according to claim 6, wherein The laser conversion module includes: A laser conversion unit for transmitting the initial transmitted laser to the monochromator, and converting the initial transmitted laser into a laser with a preset wavelength through the monochromator to obtain the converted laser; 9. A device that simultaneously realizes laser scribing and absorption spectrum measurement, characterized in that, The device includes: A memory for storing a computer program; A processor for executing the computer program so that the device executes the method for simultaneously realizing laser scribing and absorption spectroscopy measurement as described in any one of claims 1 to 5; 10. A computer storage medium, characterized in that, A computer program is stored in the computer storage medium, and when the computer program is executed by a processor, the method for simultaneously realizing laser scribing and absorption spectroscopy measurement as described in any one of claims 1 to 5 is realized.

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