An optimized device to solve the particle pollution caused by the vibration of Marangoni drying module

Abstract

The present invention relates to an optimization device for solving particle pollution caused by vibration of a Marangoni drying module, the optimization device comprises an overall stability control system and a mobile control system of a drying chamber (1), the overall stability control system comprises two groups of coupling blocks arranged at the bottom of a dewatering tank (3), the two groups of coupling blocks are adjustably fixed to a frame (001) of a machine (0) by giant bolts, and a fulcrum corresponding to the coupling blocks is arranged on the frame (001); the mobile control system comprises a cover opening mechanism (2) and an adjustment rod assembly (4), the cover opening mechanism (2) is arranged between the drying chamber (1) and the dewatering tank (3) to achieve phase movement, and an adjustment rod assembly (4) is arranged between the cover opening mechanism (2) and the drying chamber (1). The optimization device of the present invention improves the support stability of a large and heavy drying chamber, ensures the stability of horizontal movement, and can prevent polluted particles from entering the drying module.

Description

Technical Field

[0001] The invention relates to the field of semiconductor equipment, and in particular to an optimization device for solving particle pollution caused by vibration of a Marangoni drying module. Background Art

[0002] In the field of semiconductor equipment, wafer cleaning and drying are the last key link. The conventional practice is to use Marangoni drying technology to design and manufacture wafer drying equipment. The core component of the wafer drying machine is to use a specific drying module to achieve wafer cleaning and drying operations. Figure 1 As shown, for a machine, it must include a complete drying tank module. The drying module is generally made in parts, and can be regarded as a complete drying tank module consisting of the drying cavity in the upper drying area and the dehydration tank area in the lower half. When drying, the action that needs to be achieved is to open and close the cavity in the upper drying area. In normal use, the cavity is mostly opened and closed by moving horizontally.

[0003] However, when the drying chamber is opening and closing, it needs to ensure linear motion so that the long-axis cylinder does not generate large vibrations during movement. However, for a 12-inch wafer, its diameter reaches 30 cm, and the size of the drying chamber needs to be 50 cm. This size and weight can easily cause shaking or even horizontal changes when moving left and right, and can also easily cause positioning errors or dust during movement, which can lead to excessive vibrations to the entire drying module or re-contamination of particles. Summary of the invention

[0004] The purpose of the present invention is to overcome the shortcomings of the above-mentioned prior art and provide an optimization device to solve the particle pollution caused by the vibration of the Marangoni drying module. The optimization device of the present invention is intended to improve the support stability of the large and heavy drying chamber, ensure the stability of horizontal movement, reduce the possibility of contamination particles entering the drying module, and avoid air or liquid leakage during the drying process of the drying module.

[0005] In order to achieve the above-mentioned object of the invention, the technical solution provided by the present invention is as follows:

[0006] An optimization device for solving particle pollution caused by vibration of a Marangoni drying module, wherein the Marangoni drying module comprises a drying chamber and a dewatering tank, and the optimization device comprises an overall stability control system and a movement control system of the drying chamber.

[0007] The overall stability control system includes two sets of combination blocks arranged at the bottom of the dewatering tank, the two sets of combination blocks are adjustably fixed to the frame of the machine using giant bolts, and the frame is provided with fulcrums corresponding to the combination blocks;

[0008] The mobile control system comprises a cover opening mechanism and an adjusting rod assembly. The cover opening mechanism is arranged between the drying chamber and the dehydration tank to realize phase movement. The adjusting rod assembly is arranged between the cover opening mechanism and the drying chamber.

[0009] In an optimization device for solving particle contamination caused by vibration of a Marangoni drying module of the present invention, overflow grooves are respectively provided on the left and right sides of the dewatering groove, and a pair of coupling blocks are respectively provided at the bottom of the overflow groove on each side.

[0010] In an optimization device for solving the particle pollution caused by the vibration of the Marangoni drying module of the present invention, further, the bottom of the dewatering trough is a slowly descending slope, and a pair of front connecting blocks and a pair of rear connecting blocks are respectively provided on both sides of the slowly descending slope, and two front supporting points corresponding to the two front connecting blocks and two rear supporting points corresponding to the two rear connecting blocks are provided on the skeleton, and a giant bolt with adjustable height is provided between the front connecting block and the front supporting point, and a giant bolt with adjustable height is provided between the rear connecting block and the rear supporting point.

[0011] In the optimization device for solving the particle pollution caused by the vibration of the Marangoni drying module of the present invention, further, a T-shaped sleeve and a rigid spring for shock absorption are embedded inside the front combining block and the rear combining block.

[0012] In an optimization device for solving the particle contamination caused by the vibration of the Marangoni drying module of the present invention, the cover opening mechanism includes a horizontal support beam, a slide rail, a slide table, a cylinder and a mounting plate, the mounting plate is fixed with a slide rail, the slide rail is provided with a slide table which can move left and right, the slide table is connected to the cylinder, the horizontal support beam is fixed on the slide table, the horizontal support beam is provided with a plurality of the adjustment rod combinations to connect the drying chamber, and the bottom of the mounting plate is fixed on the side wall of the dehydration tank.

[0013] In an optimization device for solving the particle contamination caused by the vibration of the Marangoni drying module of the present invention, further, the horizontal support beam is a cantilever structure that is overall U-shaped, and the two cantilevers extending from the cantilever structure are respectively arranged on both sides of the drying chamber, and two of the adjustment rod combinations are provided on each cantilever.

[0014] In an optimization device for solving the particle pollution caused by the vibration of the Marangoni drying module of the present invention, further, the connection part between the horizontal support beam and the drying chamber is located above the center of gravity of the drying chamber, and the stability is improved by increasing the support height.

[0015] In an optimization device for solving the particle contamination caused by the vibration of the Marangoni drying module of the present invention, further, the adjustment rod combination includes an adjustment rod, an upper connecting block and a lower connecting block, the adjustment rod passes through the cantilever, one end of the adjustment rod at the upper part of the cantilever is connected to the upper connecting block, and one end of the adjustment rod at the lower part of the cantilever is connected to the lower connecting block.

[0016] In an optimization device for solving the particle pollution caused by the vibration of the Marangoni drying module of the present invention, further, the upper combining block is a split structure, the upper part of the split structure is fixed on the side wall of the drying chamber, the lower part of the split structure is fixed in the upper part of the split structure by fixing bolts, a fixing bolt mounting position is provided at the upper part of the split structure, a gasket is sleeved on the fixing bolt between the upper and lower parts of the split structure, a deep hole for adjusting rod mounting is provided at the center position of the upper part of the split structure, and an adjusting rod through hole is provided at the center position of the lower part of the split structure.

[0017] In an optimization device for solving the particle pollution caused by the vibration of the Marangoni drying module of the present invention, further, the adjustment rod is a composite structure including a rigid inner bolt, a low-elastic outer bolt, a low-elastic rigid spring and a rigid outer bolt, the low-elastic outer bolt is a hollow tubular structure, the rigid inner bolt is sleeved with a low-elastic rigid spring and is arranged in the hollow tube of the low-elastic outer bolt, one end of the rigid inner bolt is provided with an inner bolt cap and is embedded in the adjustment rod mounting deep hole of the upper connecting block, the other end of the rigid inner bolt is coaxially fixed with the rigid outer bolt, the rigid outer bolt passes through the cantilever and is connected to the lower connecting block.

[0018] In an optimization device for solving the particle contamination caused by the vibration of the Marangoni drying module of the present invention, the slide is a T-shaped standard slide connecting the cylinder and the slide rail, the lower part of which is a standard slide connected to the cylinder, and the upper part is a standard slide connected to the slide rail.

[0019] In an optimization device for solving the particle pollution caused by the vibration of the Marangoni drying module of the present invention, it further includes an upper dustproof plate, which is vertically fixed to the top of the mounting plate to cover the slide rail and the slide table, and side dustproof plates are respectively provided on both sides of the cylinder on the mounting plate.

[0020] In an optimization device for solving the particle contamination caused by the vibration of the Marangoni drying module of the present invention, further, a sensor is provided at the cylinder, and the sensor is arranged to be aligned with the slide to detect the position, so as to realize the segmented execution of the slide's stroke.

[0021] In an optimization device for solving particle contamination caused by vibration of a Marangoni drying module of the present invention, further, the horizontal movement of the slide on the slide rail is defined as the phase movement in the horizontal direction of the X-axis, and the position of the slide on the slide rail is divided into seven position points, namely, X0, X1, X2, X3, X4, X5 and X6, which correspond to the following respectively:

[0022] X0 is the initial limit position of the drying chamber;

[0023] X1 is the initial position of the drying chamber leaving the negative pressure chamber on the right side of the dehydration tank. The negative pressure chamber on the right side is in the overflow tank on the right side. Here, the center line of the drying chamber coincides with the center line of the dehydration tank and the drying module is in a closed state;

[0024] X2 is the initial position of the drying chamber leaving the dehydration tank, and is also the end position of leaving the right negative pressure chamber;

[0025] X3 is the end position of the drying chamber leaving the dehydration tank;

[0026] X4 is the initial position of the drying chamber leaving the right negative pressure chamber, and the left negative pressure chamber is in the overflow tank on the left;

[0027] X5 is the end position of the drying chamber leaving the negative pressure chamber on the left, and is the position where the dehydration tank is completely separated from the drying chamber;

[0028] X6 is the final limit position of the drying chamber.

[0029] In an optimization device for solving the particle contamination caused by the vibration of the Marangoni drying module of the present invention, the action of adjusting the drying chamber up and down relative to the horizontal support beam by combining four adjustment rods is further defined as the lifting action of the drying chamber in the Z-axis direction.

[0030] Based on the above technical solution, the present invention provides an optimization device for solving particle contamination caused by vibration of the Marangoni drying module, which is applied in wafer drying equipment and achieves the following technical effects:

[0031] 1. The optimization device of the present invention uses different top screw adjustment bolts as fulcrums to make them absorb vibrations with the embedded shock absorbers in the connecting blocks on both sides of the trough body. The giant adjustment bolts are installed in the trough body to support the skeletons on both sides of the drying module, forming an effective support for the drying module and adjusting the height and levelness. T-shaped sleeves for shock absorption and high-rigidity springs with low rebound are embedded in the connecting blocks. When there is vibration caused by the movement of the cavity on the upper part of the drying module or vibration caused by some components installed on the skeleton, the generated vibration can be absorbed and dissipated.

[0032] 2. The optimization device of the present invention is equipped with four fixed adjustment positions on the trough body. The shock-absorbing structure adopted accordingly can have more tolerance for horizontal adjustment. The combination of a sleeve and a rigid spring is inserted into the adjustment rod. Under the action of the rigid spring and the sleeve, it only needs the basic level to automatically restore it to the adjustment plane corresponding to the correct level.

[0033] 3. The optimization device of the present invention establishes supportable adjustment blocks on the four sides of the slot cover cavity of the drying area in the upper part, which can adjust the drying cavity horizontally and support it firmly on the moving device. Since the left and right ends of the drying cavity in the drying area are respectively provided with adjustable blocks, the adjustable blocks here are different from the blocks of the slot body. The blocks are divided into an upper block and a lower block, and the space between them allows the embedding of a thick polyurethane shock-absorbing ring, in which a blind hole is tapped to allow the adjustment rod in the form of a giant threaded rod to be screwed in, and combined with the blocks on the support beam assembled with the moving device to fix and adjust the level. The adjustable blocks and the horizontal support beam are supported against each other by rigid springs. When vibration occurs, the axial direction can be relieved by the thick polyurethane shock-absorbing ring and the rigid spring on the support beam in the reverse direction. The overall moving device is also provided with a dustproof metal shell to prevent dust particles generated during the movement process from directly falling into the gap between the dehydration tank and the drying cavity, thereby having a proper and complete dustproof and particle prevention effect.

[0034] 4. The optimization device of the present invention has a close fit between the upper cover cavity and the dehydration trough. When the upper cover cavity is moved to the position where the central axis is set, a small amount of exhaust system will be operated to keep the internal pressure tight so as to achieve a close fit between the two. There are interlocking groove tracks that cooperate with each other, which can completely prevent problems such as particles escaping during the movement and sealing processes.

[0035] 5. In the optimization device of the present invention, a special mobile control system is designed for the drying module composed of a heavier drying chamber and a dewatering trough, with the purpose of realizing phase shift of the drying chamber and the dewatering trough. When the cover opening mechanism is used to realize phase shift, in order to ensure stable movement of the long-axis cylinder with a longer stroke, a special sensor is designed to monitor its position. Therefore, according to the needs of the drying process, 6 pause positions are set for the drying chamber relative to the dewatering trough, and five moving actions are designed, so as to achieve smooth and stable control during the movement process, avoid dislocation and vibration during the movement process, and thus avoid the generation of polluted particles and their entry into the drying module to cause secondary pollution. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 This is a schematic diagram of the location of the Marangoni drying module on the wafer drying equipment.

[0037] Figure 2This is a schematic diagram of the setup of the platform and frame on the wafer drying equipment.

[0038] Figure 3 It is a schematic diagram of the positioning points on the skeleton of an optimization device for solving the particle pollution caused by the vibration of the Marangoni drying module of the present invention.

[0039] Figure 4 It is a three-dimensional schematic diagram of the drying chamber, the cover opening mechanism and the dewatering tank in an optimization device for solving the particle pollution caused by the vibration of the Marangoni drying module of the present invention.

[0040] Figure 5 It is a side schematic diagram of the components of a drying chamber, a cover opening mechanism and a dewatering tank in an optimization device for solving particle pollution caused by vibration of a Marangoni drying module of the present invention.

[0041] Figure 6 It is another three-dimensional schematic diagram of the composition of the drying chamber, the cover opening mechanism and the dewatering tank in the optimization device for solving the particle pollution caused by the vibration of the Marangoni drying module of the present invention.

[0042] Figure 7 It is a structural schematic diagram of a cover opening mechanism in an optimization device for solving particle pollution caused by vibration of a Marangoni drying module according to the present invention.

[0043] Figure 8 It is a schematic diagram of the combined structure of adjustment rods in an optimization device for solving particle pollution caused by vibration of a Marangoni drying module according to the present invention.

[0044] Fig. 9 The present invention is a schematic cross-sectional structural diagram of an adjustment rod in an optimization device for solving particle pollution caused by vibration of a Marangoni drying module.

[0045] Fig.10 It is a schematic diagram of the phase shift point of the drying chamber relative to the dewatering tank in an optimization device for solving the particle pollution caused by the vibration of the Marangoni drying module of the present invention.

[0046] Among them, 0-machine table 001-skeleton 002-front fulcrum 003-rear fulcrum 1-drying chamber 2-opening mechanism 201-horizontal support beam 202-slide rail 203-slide table 204-cylinder 205-air supply valve 206-mounting plate 207-upper dustproof plate 208-sensor 209-side dustproof plate 3-dewatering groove 4-adjustment rod assembly 5-upper combination block 6-lower combination block 7-front combination block 70-adjustment rod 71-rigid inner bolt 72-low elastic outer bolt 73-low elastic rigid spring 74-inner bolt cap 75-rigid outer bolt 76-lower part of adjustment rod 77-upper part of adjustment rod 8-rear combination block 81-fixing bolt installation position 82-fixing bolt 9-washer DETAILED DESCRIPTION

[0047] Below we further elaborate on the optimization device for solving particle pollution caused by vibration of Marangoni drying module of the present invention in combination with the accompanying drawings and specific embodiments, so as to understand its structural composition and working process more clearly, but this shall not be used to limit the protection scope of the present invention.

[0048] like Figure 1 and Figure 2 As shown, the present invention is an optimization device for solving the particle pollution caused by the vibration of the Marangoni drying module, which can directly improve the problem that the vibration of the overall drying module of the Marangoni drying cannot be controlled during use, and it is difficult to effectively maintain the horizontal state to avoid the problem of dust pollution again. In the wafer drying equipment, the Marangoni drying module includes a drying chamber 1 and a dewatering tank 3. The optimization device includes an overall stability control system and a mobile control system of the drying chamber, and the purpose of the invention is achieved by controlling the overall stability and mobile stability. Among them, the overall stability control system includes two groups of binding blocks arranged at the bottom of the dewatering tank 3, and the two groups of binding blocks are adjustably fixed on the skeleton 001 of the machine 0 by giant bolts, and the fulcrum corresponding to the binding blocks is provided on the skeleton 001. The mobile control system includes a cover opening mechanism 2 and an adjustment rod assembly 4, and a cover opening mechanism 2 is provided between the drying chamber 1 and the dewatering tank 3 to achieve phase movement, and an adjustment rod assembly 4 is provided between the cover opening mechanism 2 and the drying chamber 1. The optimization device of the present invention solves the above-mentioned vibration and pollution problems by maintaining the cavity module of the drying area in the upper part and the dewatering tank module in the lower part in a stable overall position and effectively controlling the moving device.

[0049] like Figure 3 As shown, in order to improve the overall stability of the drying chamber 1 and the dewatering tank 3, an overall stability control system is designed between the bottom of the dewatering tank 3 and the frame 001 of the machine 0. Specifically, since overflow tanks are provided on the left and right sides of the dewatering tank 3, a pair of coupling blocks are provided at the bottom of the overflow tank on each side. The bottom of the dewatering tank 3 is a slow-down slope, and specifically, a pair of front coupling blocks 7 and a pair of rear coupling blocks 8 are provided on both sides of the slow-down slope, as shown in FIG. Figure 3 and Figure 5 As shown, two front fulcrums 002 corresponding to the two front connecting blocks 7 and two rear fulcrums 003 corresponding to the two rear connecting blocks 8 are provided on the skeleton 001, and a giant bolt with adjustable height is provided between the front connecting block 7 and the front fulcrum 002, and a giant bolt with adjustable height is provided between the rear connecting block 8 and the rear fulcrum 003. For the giant bolts, in coordination with the front connecting block 7 and the rear connecting block 8, a T-shaped sleeve and a rigid spring for shock absorption are embedded inside the front connecting block 7 and the rear connecting block 8.

[0050] A slowly descending slope is formed at the bottom of the dehydration tank 3 to correspond to the power line when the fluid moves downward. Two corresponding sets of binding blocks, namely the front binding block 7 and the rear binding block 8, are made at the bottom of the left and right sides of the slowly descending slope tank body. Specially corresponding to the style of tapping thread combined with giant bolts, the bottom height of the binding blocks at the front end and the rear end is consistent, so the front binding block at the front end is longer and the rear binding block at the rear end is shorter. In terms of material selection, stainless steel 304 or aluminum alloy 8101 is selected according to the requirements of the drying process for cleanliness, strength, rigidity, ability to withstand corresponding reactive gases, and surface flatness that does not affect the airflow, or other plastics such as PVDF PVC PTFE and other materials.

[0051] The above-mentioned overall stability control system uses a stable module frame to produce a supporting effect. The bottom of the overflow tank area on the left and right sides of the module of the lower half of the dewatering tank is designed as a slope, so the combination blocks with different relative height top screws are established to effectively adapt to the installation of the sloped tank configuration. Then, the shock absorbers embedded in the combination blocks of the giant bolts and the two sides of the tank body are adjusted by different top screws to absorb vibrations. The adjustment giant bolts installed in the tank body are supported on the skeleton on both sides of the drying module to support the drying module and adjust the height and levelness. The ring T-shaped sleeve made of polyurethane rubber for shock absorption and the high-rigidity spring with low rebound are embedded in the combination block. When there is vibration caused by the movement of the cavity on the upper part of the drying module or other parts installed on the skeleton due to other factors, the vibration can be absorbed and dissipated.

[0052] like Figure 4 , Figure 5 and Figure 6 As shown, the present invention specially designs a mobile control system for the drying chamber 1, so that the drying chamber 1 can realize controllable phase movement relative to the dehydration tank 3 by using the cover opening mechanism 2, and an adjustment rod assembly 4 is arranged between the drying chamber 1 and the cover opening mechanism 2, and the adjustment rod assembly 4 includes an adjustment rod 70, an upper connecting block 5 and a lower connecting block 6, and the adjustment rod 70 passes through the horizontal support beam 201 as a cantilever on the cover opening mechanism 2, and one end of the adjustment rod 70 at the upper part of the cantilever is connected to the upper connecting block 5, and one end of the adjustment rod 70 at the lower part of the cantilever is connected to the lower connecting block 6. The structure of the adjustment rod assembly 4 is Figure 8 It can be clearly displayed in.

[0053] like Figure 7As shown, as the core component of the present invention, the cover opening mechanism 2 includes a horizontal support beam 201, a slide rail 202, a slide 203, a cylinder 204 and a mounting plate 206. Among them, a horizontally arranged slide rail 202 is fixed on the mounting plate 206, and a slide 203 that can move left and right to achieve phase change is provided on the slide rail 202. The slide 203 is connected to the cylinder 204, and a gas supply valve 205 is provided on one side of the cylinder 204. The cylinder 204 is a long-axis cylinder. In order to ensure the overall smooth operation, the stroke of the long-axis cylinder is divided into multiple sections. The slide 203 is a T-shaped standard slide connecting the cylinder 204 and the slide rail 202, the lower part of which is a standard slide connected to the cylinder 204, and the upper part is a standard slide connected to the slide rail 202.

[0054] The horizontal support beam 201 is vertically fixed to the upper part of the slide 203, and its two sides extend forward to form two cantilevers to embrace the drying chamber 1. A plurality of the adjustment rod assemblies 4 are arranged in pairs on the horizontal support beam 201 to connect the drying chamber 1. The bottom of the mounting plate 206 is fixed to the side wall of the dewatering tank 3, so that the bottom of the cover opening mechanism 2 is fixed to the dewatering tank 3. Specifically, the horizontal support beam 201 is a cantilever structure that is U-shaped as a whole. The two cantilevers extending from the cantilever structure are respectively arranged on both sides of the drying chamber 1. Two adjustment rod assemblies 4 are arranged on each cantilever, and the back of the horizontal support beam 201 is fixed to the slide 203.

[0055] Furthermore, the connection portion between the horizontal support beam 201 and the drying chamber 1 is located above the center of gravity of the drying chamber 1, and the stability is improved by increasing the support height.

[0056] like Figure 8As shown, the connection between the drying chamber 1 and the cover opening mechanism 2 is realized by adjusting the rod assembly 4. Since the drying chamber 1 needs to accommodate the whole wafer to rise into it, the space and height occupied by it are very large. If there is no stable mobile design to maintain stability and maintain its clamping rigidity, it is easy to cause collision caused by misalignment interference when the phase changes, or generate particles to cause pollution again, or cause pollution by the atmosphere coming in from the outside. Therefore, adjustable binding blocks, namely upper binding blocks 5, are respectively configured at the left and right ends of the drying chamber 1, which are different from the structural form of other binding blocks. The upper binding block 5 is a split structure, the upper part of the split structure is fixed on the side wall of the drying chamber 1, and the lower part of the split structure is connected to the upper part of the split structure by a fixing bolt 81. A fixing bolt installation position 82 is provided on the upper part of the split structure to accommodate the screw front end of the fixing bolt 81 to be screwed in, and a washer 9 is sleeved on the fixing bolt 81 between the upper and lower parts of the split structure. The washer 9 here is embedded between the upper and lower parts and is a thick polyurethane shock absorbing ring. In order to cooperate with the adjustment rod 70, an adjustment rod installation deep hole is provided at the upper center position of the split structure, and the adjustment rod installation deep hole is a blind hole. An adjustment rod through hole is provided at the lower center position of the split structure, and the adjustment rod through hole is a through hole.

[0057] Furthermore, if Fig. 9 As shown, the adjustment rod 70 is a composite structure including a rigid inner bolt 71, a low-elastic outer bolt 72, a low-elastic rigid spring 73 and a rigid outer bolt 75, the purpose of which is to use elastic buffering to achieve vibration reduction and smooth operation, and the four adjustment rods 70 on the four sides can also be adjusted separately to achieve the balance of the drying chamber 1. In order to realize the function similar to the shock absorbing arm, the low elastic outer bolt 72 is a hollow tubular structure, the rigid inner bolt 71 is sleeved with a low elastic rigid spring 73 and arranged in the hollow tube of the low elastic outer bolt 72, one end of the rigid inner bolt 71 is provided with an inner bolt cap 74 and embedded in the adjustment rod installation deep hole of the upper joint block 5, the other end of the rigid inner bolt 71 is coaxially fixed with the rigid outer bolt 75, the rigid outer bolt 75 passes through the cantilever and is connected to the lower joint block 6, wherein the upper part of the elastic rigid spring 73 is against the inner side of the inner bolt cap 74, the bottom of the elastic rigid spring 73 is in contact with the horizontal support beam 201, and when vibration occurs, the thick polyurethane shock absorbing ring and the elastic rigid spring 73 that can be used as the gasket 9 in the axial direction can realize reverse relief. In the present invention, the overall presentation of the adjustment rod 70 is made into a giant bolt, the upper part 77 of the adjustment rod is connected to the upper joint block 5 to realize adjustment and buffering, and the lower part 76 of the adjustment rod passes through the horizontal support beam 201 and is connected to the lower joint block 6 to realize the adjustment and buffering function.

[0058] The present invention designs a dustproof structure on the cover opening mechanism 2 to avoid the particle problem. The dustproof structure includes an upper dustproof plate 207 and a side dustproof plate 208, wherein the upper dustproof plate 207 is vertically fixed to the top of the mounting plate 206, and covers the slide rail 202 and the slide table 203 from the top to the bottom. On the mounting plate 206, side dustproof plates 209 are respectively provided on the left and right sides of the cylinder 204. In addition, holes are provided on the side dustproof plates 209 to accommodate the circuit or pipeline of the cylinder 204. By configuring a dustproof metal shell on the cover opening mechanism 2, dust particles generated during the movement are prevented from falling directly into the gap between the dehydration tank 3 and the drying chamber 1, so as to obtain a complete dust-proof particle function. A dustproof design for the cover opening mechanism 2 is formed by an upper dustproof plate 207 and two side dustproof plates 209, so as to prevent the generated particles from falling into the drying chamber 1 and avoid secondary pollution of the cleaned wafers.

[0059] Furthermore, for the long-axis cylinder, a brushless cylinder is used to achieve dust-free movement and stable X-axis movement. In order to avoid misalignment or deformation during operation caused by the long stroke, it is formed into multiple sections. When implementing multi-segment formation operation, it is necessary to monitor its operating position in real time, so it is necessary to provide a sensor 208 near the cylinder 204. The sensor 208 is set to align with the slide 203 to detect the position, so as to realize the segmented execution of the stroke of the slide 203. Based on the above-mentioned long-stroke segmented control, the horizontal movement of the slide 203 on the slide rail 202 is defined as the horizontal phase movement of the X-axis. As Figure 4 As shown, overflow grooves are provided on both sides of the top of the dewatering groove 3, and one side of the overflow groove is a negative pressure chamber. Accordingly, a left negative pressure chamber and a right negative pressure chamber are correspondingly provided on the left and right sides of the dewatering groove 3. The function of the left negative pressure chamber and the right negative pressure chamber is to provide a negative pressure environment, so that when the drying chamber 1 moves relative to the dewatering groove 3, negative pressure is generated by exhausting air, thereby preventing particles in the external environment from entering the dewatering groove 3 and causing pollution.

[0060] like Fig.10 As shown, based on the movement of the long-axis cylinder 204, the position of the slide 203 on the slide rail 202 is divided into seven position points, namely, X0, X1, X2, X3, X4, X5 and X6, which correspond to the following respectively:

[0061] X0 is the initial limit position of the drying chamber;

[0062] X1 is the initial position of the drying chamber leaving the negative pressure chamber on the right side of the dehydration tank. The negative pressure chamber on the right side is in the overflow tank on the right side. Here, the center line of the drying chamber coincides with the center line of the dehydration tank and the drying module is in a closed state;

[0063] X2 is the initial position of the drying chamber leaving the dehydration tank, and is also the end position of leaving the right negative pressure chamber;

[0064] X3 is the end position of the drying chamber leaving the dehydration tank;

[0065] X4 is the initial position of the drying chamber leaving the left negative pressure chamber, and the left negative pressure chamber is in the overflow tank on the left;

[0066] X5 is the end position of the drying chamber leaving the negative pressure chamber on the left, and is the position where the dehydration tank is completely separated from the drying chamber;

[0067] X6 is the final limit position of the drying chamber.

[0068] Regarding the travel and control on the X-axis, we designed the control steps as follows:

[0069] The first action: the center line of the dehydration tank coincides with the center line of the drying chamber, which is the state of the drying module being tightly closed, corresponding to the first positioning point X1 on the long-axis cylinder 204, at which time the long-axis cylinder 204 does not supply air;

[0070] The second action: the drying chamber starts to move driven by the long-axis cylinder 204, from X1 to X2, which is the state of the drying module moving to release the tightness. The air supply on the long-axis cylinder 204 uses a small air supply volume VA. Because a small amount of air supply is provided to slowly separate the drying chamber 1 from the dehydration tank 3, the pressure of the negative pressure chamber is gradually exposed to the external atmospheric pressure.

[0071] The third action: after the drying chamber leaves the negative pressure chamber, it is driven by the long-axis cylinder 204 to move from X2 to X3, which is a state where the drying module moves significantly. The air supply on the long-axis cylinder 204 uses a normal air flow rate VB to provide a large amount of air supply to make the drying chamber 1 leave the main body of the dehydration tank 3, so that the drying chamber 1 can leave the position of the dehydration tank 3 at this stage;

[0072] The fourth action: the drying chamber 1 is driven by the long-axis cylinder 204 to move from X3 to X4, so that the drying module moves away from the range of the main tank body 3 and needs to contact the negative pressure chamber position on the other side. In order to achieve the same unsealed state as the second action, a small air supply volume VA is used corresponding to the air supply on the long-axis cylinder 204. In order to provide a small amount of air supply to slowly separate the drying chamber 1 from the dehydration tank 3, the pressure of the negative pressure chamber on the left side is gradually in contact with the external atmospheric pressure.

[0073] The fifth action: after the drying chamber 1 leaves the position of the left negative pressure chamber, it is driven by the long axis cylinder 204 to move from X4 to X5, which is a state of large-scale movement of the drying module. The air supply on the long axis cylinder 204 uses a normal air flow rate VB to provide a large amount of air supply to completely separate the drying chamber 1 from the range of the dehydration tank 3. The drying chamber 1 can completely separate from the main body of the dehydration tank 1 and all positions of the left negative pressure chamber at this stage, which can be regarded as the end point of the overall moving process.

[0074] Through long-stroke segmented control in the X-axis direction, combined with the rigid support of the horizontal support beam 201, and the buffer support of the drying chamber 1 by the adjustment rod assembly 4, precise control and buffering shock absorption during operation are achieved, and particle contaminants caused by misalignment or collision are avoided. In addition to the movement and control in the X-axis direction, the control in the Z-axis direction is also designed, specifically using the four adjustment rod assemblies 4 to adjust the drying chamber 1 up and down relative to the horizontal support beam 201, thereby defining the vertical direction action as the lifting action of the drying chamber 1 in the Z-axis direction.

[0075] Undoubtedly, the above is only a limited implementation of the optimization device of the present invention for solving the particle pollution caused by the vibration of the Marangoni drying module, and other obvious changes and substitutions are also included for those skilled in the art. In short, the protection scope of the optimization device of the present invention also includes other obvious changes and substitutions for those skilled in the art.

Claims

1. An optimized device for solving particle pollution caused by vibration of a Marangoni drying module, the Marangoni drying module comprising a drying chamber (1) and a dewatering tank (3), characterized in that: The optimization device comprises an overall stability control system and a movement control system of the drying chamber (1). The overall stability control system comprises two groups of coupling blocks arranged at the bottom of the dewatering tank (3), the two groups of coupling blocks being adjustably fixed to the frame (001) of the machine platform (0) by means of giant bolts, and fulcrums corresponding to the coupling blocks are arranged on the frame (001); The mobile control system comprises a cover opening mechanism (2) and an adjustment rod assembly (4); the cover opening mechanism (2) is provided between the drying chamber (1) and the dewatering tank (3) to achieve phase movement; and the adjustment rod assembly (4) is provided between the cover opening mechanism (2) and the drying chamber (1); The cover opening mechanism (2) comprises a horizontal support beam (201), a slide rail (202), a slide table (203), a cylinder (204) and a mounting plate (206); the slide rail (202) is fixed on the mounting plate (206); a slide table (203) movable leftward and rightward is provided on the slide rail (202); the slide table (203) is connected to the cylinder (204); the horizontal support beam (201) is fixed above the slide table (203); the horizontal support beam (201) is provided with a plurality of adjustment rod assemblies (4) for connecting to the drying chamber (1); and the bottom of the mounting plate (206) is fixed on the side wall of the dewatering tank (3); The adjustment rod assembly (4) comprises an adjustment rod (70), an upper combining block (5) and a lower combining block (6); the adjustment rod (70) passes through the horizontal support beam (201); one end of the adjustment rod (70) located at the upper part of the horizontal support beam (201) is connected to the upper combining block (5); and one end of the adjustment rod (70) located at the lower part of the horizontal support beam (201) is connected to the lower combining block (6); The upper combining block (5) is a split structure, the upper part of the split structure is fixed to the side wall of the drying chamber (1), the lower part of the split structure is fixed to the upper part of the split structure by a fixing bolt (81), a fixing bolt mounting position (82) is provided on the upper part of the split structure, a washer (9) is sleeved on the fixing bolt (81) between the upper and lower parts of the split structure, an adjustment rod mounting deep hole is provided at the center position of the upper part of the split structure, and an adjustment rod through hole is provided at the center position of the lower part of the split structure; the adjustment rod (70) is a composite structure comprising a rigid inner bolt (71), a low-elastic outer bolt (72), a low-elastic rigid spring (73) and a rigid outer bolt (75), the low-elastic outer bolt (72) is a hollow tubular structure, the rigid inner bolt (71) is sleeved with a low-elastic rigid spring (73) and is arranged in the hollow tube of the low-elastic outer bolt (72), One end of the rigid inner bolt (71) is provided with an inner bolt cap (74) and is embedded in the adjustment rod mounting deep hole of the upper connecting block (5); the other end of the rigid inner bolt (71) is coaxially fixed with the rigid outer bolt (75); the rigid outer bolt (75) passes through the horizontal support beam (201) and is connected to the lower connecting block (6).

2. According to claim 1, an optimization device for solving particle contamination caused by vibration of Marangoni drying module is characterized in that: The left and right sides of the dewatering tank (3) are respectively provided with overflow tanks, and a pair of coupling blocks are respectively provided at the bottom of the overflow tank on each side.

3. According to claim 2, an optimization device for solving particle contamination caused by vibration of Marangoni drying module is characterized in that: The bottom of the dewatering trough (3) is a slowly descending slope, and a pair of front combining blocks (7) and a pair of rear combining blocks (8) are respectively arranged on both sides of the slowly descending slope. Two front supporting points (002) corresponding to the two front combining blocks (7) and two rear supporting points (003) corresponding to the two rear combining blocks (8) are arranged on the frame (001). A giant bolt with adjustable height is arranged between the front combining block (7) and the front supporting point (002), and a giant bolt with adjustable height is arranged between the rear combining block (8) and the rear supporting point (003).

4. According to claim 3, an optimization device for solving particle contamination caused by vibration of Marangoni drying module is characterized in that: T-shaped sleeves and rigid springs for shock absorption are embedded inside the front combining block (7) and the rear combining block (8).

5. According to claim 2, an optimization device for solving particle contamination caused by vibration of Marangoni drying module is characterized in that: The horizontal support beam (201) is a cantilever structure that is in a U-shape as a whole. Two cantilevers extending from the cantilever structure are respectively arranged on two sides of the drying chamber (1), and two adjustment rod assemblies (4) are arranged on each cantilever.

6. According to claim 2, an optimization device for solving particle contamination caused by vibration of Marangoni drying module is characterized in that: The slide (203) is a T-shaped standard slide that connects the cylinder (204) and the slide rail (202); the lower part of the slide (203) is connected to the cylinder (204), and the upper part of the slide (203) is connected to the slide rail (202).

7. According to claim 2, an optimization device for solving particle contamination caused by vibration of Marangoni drying module is characterized in that: The cover opening mechanism (2) further comprises an upper dustproof plate (207), wherein the upper dustproof plate (207) is vertically fixed to the top of the mounting plate (206) to cover the slide rail (202) and the slide table (203), and side dustproof plates (209) are respectively provided on both sides of the cylinder (204) on the mounting plate (206).

8. The optimization device for solving particle contamination caused by vibration of Marangoni drying module according to claim 2, characterized in that: A sensor (208) is also provided at the cylinder (204), and the sensor (208) is arranged to be aligned with the slide table (203) to detect the position thereof, thereby realizing segmented execution of the travel of the slide table (203).

9. The optimization device for solving particle contamination caused by vibration of Marangoni drying module according to claim 2, characterized in that: The horizontal movement of the slide table (203) on the slide rail (202) is defined as a phase movement in the horizontal direction of the X-axis. The position of the slide table (203) on the slide rail (202) is divided into seven position points X0, X1, X2, X3, X4, X5 and X6, which correspond to the following respectively: X0 is the initial limit position of the drying chamber; X1 is the initial position of the drying chamber leaving the negative pressure chamber on the right side of the dehydration tank. The negative pressure chamber on the right side is in the overflow tank on the right side. Here, the center line of the drying chamber coincides with the center line of the dehydration tank and the drying module is in a closed state; X2 is the initial position of the drying chamber leaving the dehydration tank, and is also the end position of leaving the right negative pressure chamber; X3 is the end position of the drying chamber leaving the dehydration tank; X4 is the initial position of the drying chamber leaving the left negative pressure chamber, and the left negative pressure chamber is in the overflow tank on the left; X5 is the end position of the drying chamber leaving the negative pressure chamber on the left, and is the position where the dehydration tank is completely separated from the drying chamber; X6 is the final limit position of the drying chamber.

10. An optimization device for solving particle contamination caused by vibration of Marangoni drying module according to claim 8 or 9, characterized in that: The action of adjusting the drying chamber up and down relative to the horizontal support beam by combining four adjustment rods is defined as the lifting action of the drying chamber in the Z-axis direction.

11. An optimization device for solving particle contamination caused by vibration of Marangoni drying module according to claim 8 or 9, characterized in that: The connection portion between the horizontal support beam (201) and the drying chamber (1) is located above the center of gravity of the drying chamber (1).

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