Inductive delay line position-sensitive anode, position-sensitive anode detection system and detection method

Abstract

The present invention discloses an inductive delay line position-sensitive anode, a position-sensitive anode detection system and a detection method, so as to solve the problem in the existing delay line anode detector that the crosstalk between the two delay line electrodes is large and affects signal transmission. Specifically, it includes a first charge induction layer, a first isolated reference ground layer, a second charge induction layer and a second isolated reference ground layer; the first charge induction layer includes a plurality of first induction lines arranged in parallel with each other and a first serpentine delay line arranged at one end of the plurality of first induction lines; the plurality of first induction lines are respectively connected to the respective bends on the same side of the first serpentine delay line; the second charge induction layer includes a plurality of second induction lines arranged in parallel with each other and a second serpentine delay line arranged at one end of the plurality of second induction lines; one ends of the plurality of second induction lines are respectively connected to the respective bends on the same side of the second serpentine delay line; the first induction lines and the second induction lines are orthogonal to each other; the first serpentine delay line and the second serpentine delay line are used to connect the readout electrodes.

Description

Technical Field

[0001] The present invention relates to a delay line position-sensitive anode, and in particular to an inductive delay line position-sensitive anode, a position-sensitive anode detection system and a detection method. Background Art

[0002] Photon counting technology is a detection method for extremely weak light. By using pulse discrimination technology and digital counting technology, extremely weak signals are identified and extracted to obtain information about individual photons. As a type of single-photon counting detector, the imaging detector based on a microchannel plate (MCP) and a position-sensitive anode has extremely high sensitivity and spatial and temporal resolution capabilities, and has been widely used in fields such as space astronomy, bioluminescence, quantum information, and high-energy physics.

[0003] Common position-sensitive anodes based on MCP mainly include a resistive anode (RA), a wedge and strip anode (WSA), a vernier anode, and a cross-strip anode (XS). Among them, the manufacturing processes and readout circuits of the RA anode, WSA anode, and vernier anode are relatively not too complex. However, all three are limited by the anode structure, and the anode collection area is too large (<100 mm), resulting in a relatively low counting rate capability (the maximum counting rate is 105 Hz). For the cross-strip anode detector, each anode strip corresponds to one piece of electronics. To ensure spatial resolution, the number of required electronics is extremely large, and a dedicated ASIC electronics system must be used to match it; the delay line anode decodes the position information of incident photons by accurately measuring the time difference of the arriving signals, which is independent of the effective area of the anode and is more suitable for the requirements of large-area array detectors; moreover, by using the pulse time measurement method, the limitation of the charge distribution network RC time constant can be avoided, and the highest counting rate can reach 1 MHz.

[0004] The Chinese invention patent "A Delay Line Position Sensitive Detector System and Method", with the patent publication number CN112987075A, is a direct collection type delay line anode detector based on a printed circuit board (PCB), which solves problems such as difficult anode manufacturing process and long processing cycle. However, the lower-layer electrode of this anode realizes charge collection through metal vias and rectangular pads located on the upper layer, which will cause a large crosstalk between the two delay line electrodes, thus affecting the stability of signal transmission and increasing the error of digital position decoding. Moreover, due to the limitation of the processing technology, the anode period is relatively large, which affects the improvement of the resolution of the entire detector system. Summary of the Invention

[0005] The object of the present invention is to provide an inductive delay line position-sensitive anode, a position-sensitive anode detection system and a detection method, so as to solve the technical problem in the existing delay line anode detector that the crosstalk between two delay line electrodes is large, thus affecting the stability of signal transmission.

[0006] To achieve the above object, the present invention provides an inductive delay line position-sensitive anode, which is characterized in that: it includes a first charge induction layer, a first isolation reference ground layer, a second charge induction layer and a second isolation reference ground layer, and is arranged as a multi-layer printed circuit board;

[0007] The first charge induction layer includes a plurality of first induction lines arranged in parallel with each other and a first serpentine delay line arranged at one end of the plurality of first induction lines; the plurality of first induction lines are respectively connected to the respective bends on the same side of the first serpentine delay line;

[0008] The second charge induction layer includes a plurality of second induction lines arranged in parallel with each other and a second serpentine delay line arranged at one end of the plurality of second induction lines; one ends of the plurality of second induction lines are respectively connected to the respective bends on the same side of the second serpentine delay line;

[0009] The plurality of first induction lines, the first isolation reference ground layer, the plurality of first induction lines and the second isolation reference ground layer are sequentially arranged on different circuit layers from the top layer to the bottom layer; the first induction lines and the second induction lines are orthogonal to each other;

[0010] The first serpentine delay line and the second serpentine delay line form a delay unit;

[0011] The first induction lines and the second induction lines form an induction unit;

[0012] The first serpentine delay line and the second serpentine delay line are respectively used to connect readout electrodes.

[0013] Further, the period lengths of the delay unit and the induction unit are the same.

[0014] Further, the first serpentine delay line and the second serpentine delay line are both on the same layer as the plurality of first induction lines;

[0015] The second induction lines pass through the corresponding vias on the first isolation reference ground layer and the first charge induction layer to be connected to the second serpentine delay line.

[0016] Further, it further includes a third isolation reference ground layer and a fourth isolation reference ground layer sequentially stacked in a direction away from the second isolation reference ground layer;

[0017] The third isolation reference ground layer and the fourth isolation reference ground layer are arranged on the side of the second isolation reference ground layer away from the second charge induction layer;

[0018] The first serpentine delay line is disposed between the second isolation reference ground layer and the third isolation reference ground layer, and the second serpentine delay line is disposed between the third isolation reference ground layer and the fourth isolation reference ground layer;

[0019] Alternatively, the second serpentine delay line is disposed between the second isolation reference ground layer and the third isolation reference ground layer, and the first serpentine delay line is disposed between the third isolation reference ground layer and the fourth isolation reference ground layer.

[0020] Further, the geometric shape of the first isolation reference ground layer is the same as and corresponding to the printed line patterns of multiple first induction lines on the top layer.

[0021] Further, the printed lines of the multilayer printed circuit board are made of metal wires with impedance control of 30 to 50 ohms;

[0022] The copper clad laminates of the multilayer printed circuit board are all made of FR4 or Roger.

[0023] The present invention also provides an inductive position-sensitive anode detection system, which is characterized in that: it includes a vacuum chamber, an input window and a substrate respectively disposed at opposite ends of the vacuum chamber, the delay line position-sensitive anode as claimed in the above claims located outside the vacuum chamber, a photocathode and a microchannel plate located inside the vacuum chamber, and readout electronics;

[0024] The photocathode is disposed in parallel on the input window;

[0025] The microchannel plate is disposed in the middle of the vacuum chamber and is parallel to the photocathode;

[0026] A semiconductor thin film is vapor-deposited on one side of the substrate close to the vacuum chamber;

[0027] The delay line position-sensitive anode is disposed on the other side of the substrate, and the first charge induction layer is close to the substrate;

[0028] The readout electronics are respectively connected to the readout electrodes of the first serpentine delay line and the second serpentine delay line.

[0029] Further, the semiconductor thin film is a germanium film;

[0030] The germanium film is 2 - 5 mm away from the exit surface of the microchannel plate;

[0031] The substrate is a ceramic substrate;

[0032] The model of the photocathode is S20;

[0033] The microchannel plate adopts two V-type cascades or three Z-type cascades.

[0034] The present invention also provides an inductive position-sensitive anode detection method, based on the above-mentioned inductive position-sensitive anode detection system, which is characterized in that it includes the following steps:

[0035] Step 1: Incident photons pass through the input window and strike the photocathode. The photocathode converts the incident photons into electrons through the photoelectric effect. The converted electrons reach the microchannel plate under the acceleration of the electric field between the photocathode and the input surface of the microchannel plate, and then are multiplied and output through the microchannel plate, forming an electron cloud at the output end of the microchannel plate.

[0036] Step 2: The electron cloud reaches the semiconductor thin film under the action of the acceleration field. The semiconductor thin film collects the electron cloud emitted from the microchannel plate and slowly diffuses it. At the same time, the delay line position-sensitive anode induces a charge signal through the substrate.

[0037] Step 3: The induced charge signal is transmitted along the first induction line and the second induction line of the delay line position-sensitive anode to both ends of the first serpentine delay line and the second serpentine delay line, and respectively enters the readout electronics.

[0038] Step 4: The readout electronics obtains the time information of the charge signal transmitted to the first induction line and the second induction line, and measures the time difference through the imaging processing software of the host computer to obtain the position information of the incident photons.

[0039] Further, in step 3, it also includes the step of adjusting the thickness of the medium between the first induction line and the first isolation reference ground layer, between the first isolation reference ground layer and the second charge induction layer, and the electrode areas of the first induction line and the second induction line, so that all the charge signals collected by the first induction line and the second induction line are balanced.

[0040] Advantages of the present invention:

[0041] 1. The inductive delay line position-sensitive anode of the present invention physically isolates the signal induction area and the signal delay area in terms of structure, effectively reducing the crosstalk between the two-dimensional direction induction signals, and can achieve high spatial resolution and high counting rate performance, solving the problems of large crosstalk between the existing delay line anode electrodes and unstable transmission.

[0042] 2. Since the position decoding method of the inductive delay line position-sensitive anode of the present invention is related to the time when the incident photons reach both ends of the transmission line and has nothing to do with the detection area, there is no limitation on the design area of the charge collection.

[0043] 3. The inductive delay line position-sensitive anode of the present invention is fabricated by using commercial printed circuit board processing, with a short production cycle, low cost, and is easy to be mass-produced.

[0044] 4. The inductive position-sensitive anode detection system of the present invention arranges the delay-line position-sensitive anode outside the vacuum chamber, which is easy to repair or replace. At the same time, it completely isolates the high-voltage part of the vacuum chamber from the external circuit, greatly reducing the volume of the vacuum device, greatly simplifying the process preparation difficulty of the detection system, and improving the reliability and flexibility of the detection system in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 is a schematic structural diagram of an inductive delay-line position-sensitive anode of the present invention;

[0046] Figure 2 is Figure 1 a schematic side structure diagram of

[0047] Figure 3 is an eight-layer schematic side structure diagram of an inductive delay-line position-sensitive anode of the present invention;

[0048] Figure 4 is a schematic structural diagram of an inductive position-sensitive anode detection system of the present invention;

[0049] Figure 5 is an equivalent circuit diagram of an inductive position-sensitive anode of the present invention.

[0050] Reference numerals in the drawings:

[0051] 1 - First induction wire, 2 - First isolation reference ground layer, 3 - Second charge induction layer, 4 - Second isolation reference ground layer, 5 - First serpentine delay line, 6 - Second serpentine delay line, 7 - Third isolation reference ground layer, 8 - Fourth isolation reference ground layer, 9 - Input window, 10 - Photocathode, 11 - Vacuum chamber, 12 - Microchannel plate, 13 - Semiconductor thin film, 14 - Substrate, 15 - Delay-line position-sensitive anode;

[0052] 01 - Signal induction area, 02 - Signal delay area. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0053] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0054] An inductive delay-line position-sensitive anode, in combination with Figure 1 and Figure 2As shown in the figure, the delay line position-sensitive anode includes a first charge induction layer, a first isolation reference ground layer 2, a second charge induction layer, and a second isolation reference ground layer 4 that are stacked in sequence; the first charge induction layer includes a plurality of first induction lines 1 arranged in parallel with each other and a first serpentine delay line 5 disposed at one end of the plurality of first induction lines; the plurality of first induction lines 1 form an array for sensing imaging charges; the plurality of first induction lines 1 are respectively connected to the respective bends on the same side of the first serpentine delay line 5; the geometric shape of the first isolation reference ground layer 2 is the same as and corresponds to the electrode pattern of the first charge induction layer, which can provide a return path for the induced charges while preventing the induced charges from interfering with the underlying induction signals; the second charge induction layer includes a plurality of second induction lines 3 arranged in parallel with each other and a second serpentine delay line 6 disposed at one end of the plurality of second induction lines; the second serpentine delay line 6 is located on the same layer as the first charge induction layer; the plurality of second induction lines 3 respectively pass through the corresponding vias on the first isolation reference ground layer and the first charge induction layer and are connected to the respective bends of the second serpentine delay line 6. The plurality of first induction lines 1 and the plurality of second induction lines 3 are the signal induction region 01, and the first serpentine delay line 5 and the second serpentine delay line 6 are the signal delay region 02, which transmits the charge signals in the signal induction region 01 to the output electrode, and the signal delay region 02 does not participate in charge induction. The signal delay region 02 has a certain period length and delay time, and its period length corresponds one-to-one to the interval of the signal induction region 01. The first charge induction layer, the first isolation reference ground layer 2, the second charge induction layer, and the second isolation reference ground layer 4 are all composed of metal lines with a 50-ohm impedance control, and these metal lines are all arranged on a copper clad board made of FR4 or Roger or a domestic alternative board with the same parameters. The extending directions of the first induction line 1 and the second induction line 3 are orthogonal to each other.

[0055] The delay line position-sensitive anode can be set to the four-layer structure as described above, or can be set to an eight-layer or other multi-layer structure. When set to eight layers, as Figure 3 shown, its structure is basically the same as that of the four layers. The difference is that it further includes a third isolation reference ground layer 7 and a fourth isolation reference ground layer 8 that are stacked in sequence along the direction away from the second isolation reference ground layer 4; the third isolation reference ground layer 7 and the fourth isolation reference ground layer 8 are arranged on the side of the second isolation reference ground layer 4 away from the second charge induction layer; the first serpentine delay line 5 is arranged between the second isolation reference ground layer 4 and the third isolation reference ground layer 7, and the second serpentine delay line 6 is arranged between the third isolation reference ground layer 7 and the fourth isolation reference ground layer 8; or, the second serpentine delay line 6 is arranged between the second isolation reference ground layer 4 and the third isolation reference ground layer 7, and the first serpentine delay line 5 is arranged between the third isolation reference ground layer 7 and the fourth isolation reference ground layer 8.

[0056] The delay-line position-sensitive anode is divided into a signal induction region (i.e., multiple first induction lines 1 and multiple second induction lines 3) and a signal delay region (i.e., a first serpentine delay line 5 and a second serpentine delay line 6), and the signal induction region and the signal delay region are physically isolated. The shapes of the signal induction region and the signal delay region can be circular, square, fan-shaped, or rectangular according to the detection requirements of the detection system. The area of the signal induction region can be as large as the detection area of the detection system. The position of the signal delay region can be flexibly adjusted according to the detection area and detection position required by the detection system. The signal delay region can be placed on the side of the signal induction region, or can be folded and placed under the signal induction region after adding isolation reference ground layers (i.e., a third isolation reference ground layer 7 and a fourth isolation reference ground layer 8). The isolation reference ground layer is a plane between the signal delay region and the signal induction region, and this plane can also be one or more ground planes, and the ground layer needs to be as close as possible to the reference layer.

[0057] An embodiment of the present invention also provides an inductive position-sensitive anode detection system with the above delay-line position-sensitive anode 15 as the core detection component, as Figure 4 shown, which includes a tubular vacuum cavity 11, an input window 9 and a substrate 14 respectively arranged at opposite ends of the vacuum cavity 11, a photocathode 10 and a microchannel plate 12 located inside the vacuum cavity 11, and a delay-line position-sensitive anode 15 and readout electronics located outside the vacuum cavity 11.

[0058] The photocathode 10 is arranged in parallel on the input window 9, and the photocathode 10 uses S20; the microchannel plate 12 is arranged in the middle of the vacuum cavity 11 and is parallel to the photocathode 10; the microchannel plate 12 is cascaded in a V-shaped or Z-shaped cascade manner. A semiconductor thin film 13 is evaporated on one side of the substrate 14 close to the vacuum cavity 11; the semiconductor thin film 13 is a germanium film; the substrate 14 is a ceramic substrate. The delay-line position-sensitive anode 15 is arranged on the other side of the substrate 14, and the first charge induction layer is close to the substrate 14; the readout electronics are respectively connected to the readout electrodes of the first serpentine delay line 5 and the second serpentine delay line 6. The external high-voltage power supply supplies power to the detection system through the high-voltage terminal, and the output interface SMA connector of the delay-line position-sensitive anode 15 is led out to the readout electronics; the readout electronics includes a preamplifier circuit, a pulse filtering and shaping circuit, an A / D conversion circuit, and a digital image processing circuit connected in sequence.

[0059] It is worth mentioning that the charge induction layer can also include more or less. When including more charge induction layers, multiple induction lines in more charge induction layers are sequentially stacked under multiple second induction lines 3, and the serpentine delay lines in more charge induction layers are sequentially stacked under the second serpentine delay line 6 to adapt to more scenarios.

[0060] A method for realizing photon counting position-sensitive imaging measurement by using the above detection system includes the following steps:

[0061] Step 1: Incident photons pass through the imaging mask plate and hit the photocathode 10. The photocathode 10 converts the incident photons into electrons through the photoelectric effect. The converted electrons reach the microchannel plate 12 under the acceleration of the electric field between the photocathode 10 and the input surface of the V-shaped or Z-shaped cascaded microchannel plate 12, and enter the MCP channel for multiplication output, forming an electron cloud at the output end of the microchannel plate 12.

[0062] Step 2: The electron cloud reaches the semiconductor thin film 13 under the action of the acceleration field. The semiconductor thin film 13 collects the electron cloud emitted from the microchannel plate 12. The electron cloud slowly diffuses on the high-resistance semiconductor thin film 13, and at the same time, the inductive delay line position-sensitive anode 15 on the back of the substrate 14 induces a charge signal through the substrate 14.

[0063] Step 3: The induced charge signal is transmitted along the first charge induction line layer and the second charge induction line of the delay line position-sensitive anode to both ends of the first serpentine delay line 5 and the second serpentine delay line 6, and enters the readout electronics respectively.

[0064] Step 4: The readout electronics obtains the time information of the charge signal transmitted to both ends of the first induction line and the second induction line, and the incident photon position information can be obtained by measuring the time difference through the imaging processing software of the upper computer.

[0065] If the incident photons are weak, the image of the target can be obtained by continuously accumulating a large number of photons. Since the signal induced by the second induction line 3 is weaker than that of the first induction line 1, when calculating the incident photon position information, the collected charge signal can be balanced and then the imaging result of the detector can be obtained through the readout electronics and the relevant data processing software. The above problem of balancing the induced anode charge can be solved by adjusting the following parameters:

[0066] Assume that the voltage between the semiconductor thin film and the heterolayer electrode is stable. The change in the induced charge amount between the heterolayer electrodes of the delay line position-sensitive anode can be evaluated by the change in capacitance. The readout method of the induced charge is equivalent to a simple physical model for analysis, as Figure 5 shown. The thickness of the ceramic substrate 14 is d1, the thickness of the position-sensitive anode substrate ( Figure 2 or Figure 3 the medium in ab ) is d2, the relative permittivity of the ceramic substrate is ε cd , the permittivity of the position-sensitive anode substrate is ε cd , the thickness of the thin film on the ceramic substrate is in the order of μm, which can be ignored compared to the thickness of the position-sensitive anode substrate. Assume that the charge induced on the semiconductor thin film is uniformly distributed and the area of the heterolayer electrodes is S, then the capacitance C is formed between the first induction line, the second induction line and the semiconductor thin filmab , C cd , so the induced thicknesses can be equivalently calculated as follows:

[0067]

[0068]

[0069] where ε 0 the permittivity of vacuum, the induced depth is closely related to the material of the electrode and the capacitance of the electrode. When the electrode material and the substrate material are determined, the larger the electrode capacitance, the smaller the induced depth and the more the induced charge. The induced depth is affected by the processing technology. By adjusting the induced depth and combining it with adjusting the areas of the first induced line electrode and the second induced line electrode, the basic balance of the induced charges of the two different-layer electrodes of the position-sensitive anode can be achieved. Specifically, adjust the thickness of the dielectric between the first induced line and the first isolation reference ground layer, between the first isolation reference ground layer and the second charge induction layer, and the electrode areas of the first induced line and the second induced line, so that all the charge signals collected by the first induced line 1 and the second induced line 3 are balanced.

[0070] As mentioned above, the above is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions within the technical scope disclosed by the present invention should be covered by the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims

1. An inductive delay line position-sensitive anode, characterized in that: It includes a first charge induction layer, a first isolated reference ground layer (2), a second charge induction layer, and a second isolated reference ground layer (4), and is arranged as a multi-layer printed circuit board; The first charge induction layer includes a plurality of first induction lines (1) arranged in parallel with each other and a first serpentine delay line (5) arranged at one end of the plurality of first induction lines (1); the plurality of first induction lines (1) are respectively connected to the respective bends on the same side of the first serpentine delay line (5); The second charge induction layer includes a plurality of second induction lines (3) arranged in parallel with each other and a second serpentine delay line (6) arranged at one end of the plurality of second induction lines (3); one ends of the plurality of second induction lines (3) are respectively connected to the respective bends on the same side of the second serpentine delay line (6); The plurality of first induction lines (1), the first isolated reference ground layer (2), the plurality of first induction lines (1), and the second isolated reference ground layer (4) are sequentially arranged on different circuit layers from the top layer to the bottom layer; the first induction line (1) and the second induction line (3) are orthogonal to each other; The first serpentine delay line (5) and the second serpentine delay line (6) form a delay unit; The first induction line (1) and the second induction line (3) form an induction unit; The first serpentine delay line (5) and the second serpentine delay line (6) are respectively used to connect to readout electrodes; The first serpentine delay line (5) and the second serpentine delay line (6) are both on the same layer as the plurality of first induction lines (1); The second induction line (3) passes through the first isolated reference ground layer (2) and the corresponding vias on the first charge induction layer and is connected to the second serpentine delay line (6); The geometric shape of the first isolated reference ground layer (2) is the same as and corresponds to the printed line pattern of the plurality of first induction lines (1) on the top layer.

2. The inductive delay line position-sensitive anode according to claim 1, characterized in that: The period lengths of the delay unit and the induction unit are the same.

3. The inductive delay line position-sensitive anode according to claim 2, characterized in that: It further includes a third isolated reference ground layer (7) and a fourth isolated reference ground layer (8) stacked in sequence along the direction away from the second isolated reference ground layer (4); The third isolated reference ground layer (7) and the fourth isolated reference ground layer (8) are arranged on the side of the second isolated reference ground layer (4) away from the second charge induction layer; The first serpentine delay line (5) is arranged between the second isolated reference ground layer (4) and the third isolated reference ground layer (7), and the second serpentine delay line (6) is arranged between the third isolated reference ground layer (7) and the fourth isolated reference ground layer (8); Or, the second serpentine delay line (6) is arranged between the second isolated reference ground layer (4) and the third isolated reference ground layer (7), and the first serpentine delay line (5) is arranged between the third isolated reference ground layer (7) and the fourth isolated reference ground layer (8).

4. The inductive delay line position-sensitive anode according to claim 3, characterized in that: The printed lines of the multi-layer printed circuit board are made of metal wires with impedance control of 30-50 ohms; The copper clad laminates of the multi-layer printed circuit boards are all made of FR4 or Roger.

5. An inductive position-sensitive anode detection system, characterized in that: It includes a vacuum chamber (11), an input window (9) and a substrate (14) respectively arranged at opposite ends of the vacuum chamber (11), the delay line position-sensitive anode (15) according to any one of claims 1-4 located outside the vacuum chamber (11), a photocathode (10) and a microchannel plate (12) located inside the vacuum chamber (11), and readout electronics; The photocathode (10) is arranged in parallel on the input window (9); The microchannel plate (12) is arranged in the middle of the vacuum chamber (11) and is parallel to the photocathode (10); A semiconductor thin film (13) is evaporated on one side of the substrate (14) close to the vacuum chamber (11); The delay line position-sensitive anode (15) is arranged on the other side of the substrate (14), and the first charge induction layer is close to the substrate (14); The readout electronics are respectively connected to the readout electrodes of the first serpentine delay line (5) and the second serpentine delay line (6).

6. The inductive position-sensitive anode detection system according to claim 5, characterized in that: The semiconductor thin film (13) is a germanium film; The germanium film is 2-5 mm away from the exit surface of the microchannel plate (12); The substrate (14) is a ceramic substrate; The model of the photocathode (10) is S20; The microchannel plate (12) is cascaded in two V-types or three Z-types.

7. An inductive position-sensitive anode detection method, based on the inductive position-sensitive anode detection system according to claim 5 or 6, characterized in that, it includes the following steps: Step 1, Incident photons pass through the input window (9) and hit the photocathode (10). The photocathode (10) converts the incident photons into electrons through the photoelectric effect. The converted electrons reach the microchannel plate (12) under the acceleration of the electric field between the photocathode (10) and the input surface of the microchannel plate (12), and then are multiplied and output through the microchannel plate (12), and an electron cloud is formed at the exit end of the microchannel plate (12); Step 2, The electron cloud reaches the semiconductor thin film (13) under the action of the acceleration field. The semiconductor thin film (13) collects the electron cloud emitted by the microchannel plate (12) and slowly diffuses it. The delay line position-sensitive anode (15) induces a charge signal through the substrate (14); Step 3, The induced charge signal is transmitted along the first induction line and the second induction line of the delay line position-sensitive anode to both ends of the first serpentine delay line (5) and the second serpentine delay line (6), and respectively enters the readout electronics; Step 4, The readout electronics obtain the time information of the charge signal transmitted to the first induction line (1) and the second induction line (3), and measure the time difference through the upper computer imaging processing software to obtain the incident photon position information.

8. The inductive position-sensitive anode detection method according to claim 7, wherein in step 3, it further includes the step of adjusting the thickness of the medium between the first induction line and the first isolated reference ground layer, between the first isolated reference ground layer and the second charge induction layer, and the electrode areas of the first induction line and the second induction line, so that all the charge signals collected by the first induction line (1) and the second induction line (3) are balanced.

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