Placement head tilt correction device and correction method

Abstract

This invention discloses a mounting head tilt correction device and method, relating to the field of semiconductor chip packaging and testing technology. The correction device includes: a base plate; a top plate located above the base plate and movable vertically relative to the base plate; a top plate moving mechanism located between the base plate and the top plate, used to drive the top plate to move vertically and limit the top plate to any horizontal height; a mounting head mounting mechanism mounted on the base plate, used to fix the tilted mounting head to be corrected; and a correction mechanism mounted on the top plate, including a correction end that abuts against the tilted mounting head. The correction mechanism is configured such that its correction end moves downward to correct the tilted mounting head to a horizontal position. This invention eliminates the need to disassemble the entire mounting head assembly; only the correction end of the correction mechanism abuts against the tilted mounting head, and the tilted mounting head is corrected to a horizontal position by moving or rotating the correction end downward. This method is more efficient and economical than replacing the entire mounting head assembly.

Description

Technical Field

[0001] This invention relates to the field of semiconductor chip packaging and testing technology, and more specifically to a mounting head tilt correction device and correction method. Background Technology

[0002] High-precision bond heads (BH) are used in various stages of semiconductor chip packaging processes. For example, in the chip cover plate mounting process, the bond head is used to pick up and place the cover plate. In practical applications, the bond head is prone to tilting due to factors such as collisions, meaning it no longer meets the requirement of being horizontally coplanar. When the tilt angle of the bond head is too large, it will cause the cover plate to fail to be picked up or placed.

[0003] Existing technologies typically replace the entire placement head assembly, including the placement head, to avoid cover plate removal failure caused by excessive tilt angle of the placement head. However, replacing the placement head assembly is time-consuming and costly. Summary of the Invention

[0004] In order to overcome the defects existing in the prior art, the purpose of this invention is to provide a mounting head tilt correction device and correction method to improve the correction efficiency of tilted mounting heads.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0006] A placement head tilt correction device includes:

[0007] Base plate;

[0008] A top plate, which is located above the bottom plate and is movable up and down relative to the bottom plate;

[0009] A top plate moving mechanism, located between the bottom plate and the top plate, is used to drive the top plate to move up and down and limit the top plate to any horizontal height;

[0010] A placement head mounting mechanism is mounted on the base plate and is used to fix the tilted placement head to be corrected.

[0011] A correction mechanism, mounted on the top plate, includes a correction end that abuts against the tilted mounting head, the correction mechanism being configured such that its correction end moves downward to correct the tilted mounting head to a horizontal position.

[0012] Furthermore, the correction mechanism is rotatably mounted on the top plate, and the correction mechanism is configured to rotate while its correction end moves downward to correct the tilted mounting head to a horizontal position.

[0013] As an optional implementation, the calibration mechanism includes a calibration handle and a calibration section;

[0014] The calibration handle is rotatably mounted on the top plate, with its upper part extending upward and its lower part passing through the top plate downward, and its bottom end connected to the calibration part;

[0015] The calibration unit rotates in response to the rotation of the calibration handle, calibrating the mounting head that it is in contact with to a horizontal position.

[0016] The correction part is cylindrical, and several rolling elements are installed on its bottom surface along the circumferential direction. During correction, the rolling elements abut against the inclined mounting head and roll on it.

[0017] A first thrust bearing is provided between the correction section and the top plate.

[0018] As an optional implementation, the calibration mechanism includes a clamping handle threaded onto the top plate;

[0019] The upper part of the clamping handle extends upward and the lower part passes through the top plate downward. The bottom end abuts against the tilting mounting head. The clamping handle moves downward in response to its own rotation to correct the high point of the tilting mounting head to be level.

[0020] The calibration mechanism also includes a T-flange nut, which is mounted on the top plate, and the clamping handle passes downward through the T-flange nut and is threaded into it.

[0021] Furthermore, the top plate moving mechanism includes several guide rods, the bottom ends of which are fixed to the bottom plate and the upper parts of which pass through the top plate upwards.

[0022] Furthermore, the top plate moving mechanism also includes an adjusting screw, which passes through the top plate from top to bottom and is inserted into the bottom plate. The adjusting screw drives the top plate to move up and down, and an adjusting knob is provided at its top end.

[0023] Furthermore, the top plate moving mechanism also includes an adjusting plate, which is vertically mounted on the base plate. The bottom ends of the plurality of guide rods are fixed on the adjusting plate, and the bottom of the adjusting screw is assembled on the adjusting plate.

[0024] Furthermore, the top plate moving mechanism also includes a linear bearing and a linear bearing adjusting block. The linear bearing adjusting block is mounted on the top plate, the linear bearing is mounted on the linear bearing adjusting block, and the guide rod passes vertically through the linear bearing.

[0025] Furthermore, the mounting head installation mechanism includes a mounting base, on which a vertical mounting head shaft fixing cavity is provided.

[0026] Furthermore, the mounting base includes an extrusion base plate and an extrusion movable plate. Both the extrusion base plate and the extrusion movable plate are provided with vertical shaft engaging arc-shaped cavities. The extrusion movable plate is movably mounted on the extrusion base plate, and the shaft engaging arc-shaped cavities of the two cooperate with each other to form the mounting head shaft fixing cavity.

[0027] Furthermore, the mounting head installation mechanism also includes a hand-tightening turntable, which is rotatably mounted on the base plate, and the mounting base is mounted on the hand-tightening turntable.

[0028] Furthermore, a second thrust bearing is provided between the hand-cranked turntable and the base plate.

[0029] Furthermore, the mounting head mechanism also includes an anti-rotation component for limiting the rotation of the mounting base.

[0030] Furthermore, the base plate is also equipped with a tilt measuring mechanism for detecting the tilt of the tilted mounting head on the mounting head mechanism.

[0031] Furthermore, the tilt measuring mechanism includes a measuring meter guide rod, a measuring meter guide block, and a measuring meter; the measuring meter guide rod is vertically mounted on the base plate, the measuring meter guide block is slidably mounted on the measuring meter guide rod, and the measuring meter is fixedly mounted on the measuring meter guide block, with its measuring head facing the tilting mounting head on the mounting head mechanism.

[0032] Furthermore, the calibration mechanism area on the top plate is provided with scales for indicating the rotation angle and / or movement distance of the calibration mechanism.

[0033] The present invention also provides a method for correcting the tilt of a mounting head, comprising:

[0034] Remove the top plate from above the top plate moving mechanism, fix the shaft of the front end of the mounting head assembly to the mounting head mounting mechanism, and then reinstall the top plate into the top plate moving mechanism.

[0035] The top plate moving mechanism moves the correction end of the correction mechanism downward and abuts against the tilted mounting head on the mounting head mounting mechanism;

[0036] Drive the correction end to rotate downwards or move downwards, so that the tilted mounting head is corrected to a horizontal position.

[0037] Furthermore, before, during, or after calibration, the calibration mechanism uses a tilt measuring mechanism to measure the real-time tilt of the mounting head, and adjusts the downward rotation or downward movement of the calibration end based on the real-time tilt.

[0038] The beneficial effects of this invention are:

[0039] The placement head tilt correction device provided by this invention does not require disassembling the entire placement head assembly. It only requires the correction end of the correction mechanism to abut against the tilted placement head. The tilted placement head is corrected to be horizontal by moving or rotating the correction end downward. This method is more efficient and economical than replacing the placement head assembly.

[0040] The mounting head tilt correction method provided by this invention decomposes the horizontal correction of the mounting head into a top plate abutment process and a mounting head leveling process. The top plate abutment process is based on a double-sided symmetrical mechanism, which ensures a high-precision leveling reference plane. The mounting head leveling process can be realized through various correction end mechanism forms, taking into account various application scenarios. In addition, the introduction of real-time tilt measurement further ensures the correction efficiency and correction quality. Attached Figure Description

[0041] Figure 1 This is a schematic diagram of the mounting head tilt correction device according to Embodiment 1 of the present invention;

[0042] Figure 2 This is a schematic diagram of the correction mechanism of the mounting head tilt correction device in Embodiment 1 of the present invention;

[0043] Figure 3 This is a schematic diagram of the placement head tilt correction device in Embodiment 1 of the present invention for correcting the tilt of the placement head;

[0044] Figure 4 This is a schematic diagram of the mounting head tilt correction device according to Embodiment 2 of the present invention;

[0045] Figure 5 This is a schematic diagram of the correction mechanism of the mounting head tilt correction device in Embodiment 2 of the present invention;

[0046] Figure 6 This is a schematic diagram of the placement head tilt correction device in Embodiment 2 of the present invention for correcting the tilt of the placement head;

[0047] Figure label:

[0048] 1. Base plate; 2. Top plate; 3. Top plate moving mechanism; 31. Guide rod; 32. Adjusting screw; 33. Adjusting knob; 34. Adjustment plate; 35. Linear bearing; 36. Linear bearing adjusting block; 4. Mounting head mounting mechanism; 401. Mounting seat; 402. Mounting head shaft fixing cavity; 403. Extrusion base plate; 404. Extrusion movable plate; 405. Hand-tightening turntable; 406. Second thrust bearing; 411. Seat fixing component; 421. Clamping component; 422. Locking component; 5. Correction mechanism; 511. Correction handle; 512. Correction part; 513. Rolling component; 514. First thrust bearing; 521. Pressing handle; 522. T-flange nut; 6. Inclination measuring mechanism; 61. Measuring gauge guide rod; 62. Measuring gauge guide block; 63. Measuring gauge. Detailed Implementation

[0049] The following will provide a clear and complete description of the concept, specific structure, and technical effects of the present invention in conjunction with the embodiments and accompanying drawings, so as to fully understand the purpose, features, and effects of the present invention.

[0050] In the following embodiments, the alignment end abuts against the placement head by the sequential or coordinated movement of the two side placement head moving mechanisms 3. This abutment refers to the lower surface of the horizontal alignment end contacting (or nearly contacting) the highest point of the tilted placement head. The alignment end provides a downward pressure to the real-time highest point of the placement head, allowing the placement head to be adjusted to a horizontal state through one or more alignment processes.

[0051] Furthermore, the contact between the calibration end and the highest point of the placement head can be single-point contact, multi-point contact, line contact, or surface contact, corresponding to different calibration end shapes.

[0052] The downward movement of the calibration end during calibration can also come from various sources. It can be from the downward movement or rotation of the calibration mechanism, or it can be achieved by adjusting the current horizontal height of the calibration end to a lower horizontal height through the top plate moving mechanism 3 after a certain intermediate calibration process.

[0053] Based on the above, Embodiments 1 and 2 provide two preferred implementation methods, but the scope of the claims of the present invention is not limited to the following embodiments.

[0054] Example 1

[0055] A placement head tilt correction device, such as Figure 1-3 As shown, it includes:

[0056] Base plate 1;

[0057] Top plate 2, which is located above bottom plate 1 and can move up and down relative to bottom plate 1;

[0058] Top plate moving mechanism 3 is located between bottom plate 1 and top plate 2, and is used to drive top plate 2 to move up and down and limit top plate 2 to any horizontal height.

[0059] Placement head mounting mechanism 4 is mounted on the base plate 1 and is used to fix the tilted placement head to be corrected;

[0060] The correction mechanism 5 is mounted on the top plate 3 and includes a correction end that abuts against the tilted mounting head. The correction mechanism 5 is configured such that its correction end moves downward to correct the tilted mounting head to a horizontal position.

[0061] In this embodiment, the base plate 1 is the support mechanism for the entire mounting head tilt correction device; the top plate 2 is used to install the correction mechanism 5; the top plate moving mechanism 3 is used to move the top plate 2 up and down; the mounting head mounting mechanism 4 is used to install the tilted mounting head that needs to be corrected and to fix the tilted mounting head; the correction mechanism 5 is used to correct the tilted mounting head.

[0062] When calibrating the tilted mounting head, remove the top plate 2 from the top plate moving mechanism 3, install the tilted mounting head on the mounting head mounting mechanism 4, and fix the mounting head; then install the top plate 2 on the top plate moving mechanism 3, and abut the calibration end of the calibration mechanism 5 against the tilted mounting head; during calibration, move the calibration end of the calibration mechanism 5 downward, and the calibration end drives the tilted mounting head to move, so that the mounting head returns to the horizontal state, thereby calibrating the tilted mounting head.

[0063] In this embodiment, the correction mechanism 5 is rotatably mounted on the top plate 3. The correction mechanism 5 is configured to rotate while its correction end moves downward to correct the tilted mounting head to a horizontal position.

[0064] The following sections will describe the correction mechanism 5, the top plate moving mechanism 3, and the mounting head installation mechanism 4 of this embodiment in detail.

[0065] 1. Calibration mechanism

[0066] like Figure 1 and 2 As shown, the calibration mechanism 5 includes a calibration handle 511 and a calibration part 512; the calibration handle 511 is rotatably mounted on the top plate 2, with its upper part extending upward and its lower part passing through the top plate 2 downward, and its bottom end connected to the calibration part 512; the calibration part 512 rotates in response to the rotation of the calibration handle 511, and calibrates the mounting head that is in contact with it to a horizontal state.

[0067] like Figure 2 As shown, the correction part 512 is cylindrical, and several rolling elements 513 are mounted on its bottom end surface along the circumferential direction. During correction, the rolling elements 513 abut against the tilting mounting head and roll on it. By setting the rolling elements 513 to contact the tilting mounting head, the correction part 512 can rotate smoothly during correction, preventing the tilting mounting head from restricting the rotation of the correction part 512 due to friction.

[0068] In this embodiment, the tilting placement head has a disc-shaped structure. The tilting placement head is brought to a horizontal state by pressing down the correction part 512. The purpose of rotating the correction part 512 using the correction handle 511 is to make the roller 513 roll on the placement head to correct the placement head and ensure the horizontality of the top surface of the placement head.

[0069] like Figure 1As shown, a first thrust bearing 514 is provided between the correction section 512 and the top plate 2. During correction, the tilting mounting head contacts the rolling element 513, and the tilting mounting head exerts an upward thrust on the correction section 512. When the correction section 512 is pushed to contact the top plate 2, the rotation of the correction section 512 is restricted due to friction. This embodiment, by providing a first thrust bearing 514 between the correction section 512 and the top plate 2, allows the correction section 512 to rotate smoothly and prevents the thrust of the tilting mounting head from affecting the rotation of the correction section 512.

[0070] In this embodiment, during calibration, the calibration handle 511 is rotated, and the top plate moving mechanism 3 drives the top plate 2 to move downward, thereby driving the calibration mechanism 5 to move downward. The downward movement of the calibration mechanism 5 is also the downward movement of the calibration part 512. The calibration part 512 rotates under the drive of the calibration handle 511 and moves downward under the drive of the top plate moving mechanism 3. As the calibration part 512 rotates and moves downward, the rolling element 513 at its bottom end abuts against and rolls on the tilted mounting head, thereby driving the tilted mounting head to rotate in the opposite direction of its tilt, so that the mounting head returns to a horizontal state.

[0071] 2. Top plate moving mechanism

[0072] like Figure 1 As shown, the top plate moving mechanism 3 includes several guide rods 31, the bottom ends of which are fixed on the bottom plate 1, and the upper parts pass through the top plate 2.

[0073] In this embodiment, both the base plate 1 and the top plate 2 are rectangular, and four guide rods 31 are provided at their four corners to guide the vertical movement of the top plate 2. In addition, the four guide rods 31 in this embodiment are arranged symmetrically from left to right, so that the top plate 2 moves vertically downward and prevents it from tilting, thereby ensuring the levelness of the top plate 2 and thus ensuring a high-precision leveling reference surface.

[0074] like Figure 1 As shown, the top plate moving mechanism 3 also includes an adjusting screw 32, which passes through the top plate 2 from top to bottom and is inserted into the bottom plate 1. The adjusting screw 32 drives the top plate 2 to move up and down, and an adjusting knob 33 is provided at its top.

[0075] In this embodiment, the adjusting screw 32 is used to adjust the up-and-down movement of the top plate 2 and fix the up-and-down movement. When the correction mechanism 5 corrects the tilted mounting head, the adjusting screw 32 drives the top plate 2 to move up and down, which in turn drives the correction mechanism 5 to move up and down. At this time, the adjusting screw 32 has the function of driving the correction mechanism 5 to move up and down to correct the tilted mounting head.

[0076] The adjusting screw 32 can drive the top plate 2 to move up and down in the following two ways:

[0077] Method 1: The top plate 2 and the adjusting screw 32 are rotatably engaged and cannot move up and down relative to each other; the bottom of the adjusting screw 32 is threadedly engaged with the bottom plate 1. In this method, rotating the adjusting knob 33 causes the adjusting screw 32 to rotate, and the bottom of the adjusting screw 32 rotates threadedly on the bottom plate 1, causing the adjusting screw 32 to move up and down, thereby driving the top plate 2, which is rotatably engaged with it, to move up and down.

[0078] Method 2: The top plate 2 is threadedly engaged with the adjusting screw 32; the bottom of the adjusting screw 32 is rotatably engaged with the base plate 1, and they cannot move up and down relative to each other. In this method, rotating the adjusting knob 33 causes the adjusting screw 32 to rotate, and the bottom of the adjusting screw 32 rotates on the base plate 1, without moving up and down; the adjusting screw 32 rotates threadedly on the top plate 2, causing the top plate 2 to move up and down.

[0079] In this embodiment, two symmetrical adjusting screws 32 are provided. The adjusting knobs 33 of the two adjusting screws 32 need to be rotated synchronously to keep the top plate 2 horizontally against the ground. After horizontal contact is achieved, the calibration handle 511 is rotated to ensure that the rotation reference plane of the calibration handle 511 is horizontal.

[0080] like Figure 1 As shown, the top plate moving mechanism 3 also includes an adjusting plate 34, which is vertically mounted on the base plate 1. Several guide rods 31 have their bottom ends fixed to the adjusting plate 34, and the bottom of the adjusting screw 32 is mounted on the adjusting plate 34. By setting the adjusting plate 34 in this manner, it is easier to install the guide rods 31 and the adjusting screw 32, avoiding excessive length. In this configuration, the guide rods 31 and the adjusting screw 32 are no longer mounted on the base plate 1.

[0081] like Figure 1 As shown, the top plate moving mechanism 3 also includes a linear bearing 35 and a linear bearing adjusting block 36. The linear bearing adjusting block 36 is mounted on the top plate 2, and the linear bearing 35 is mounted on the linear bearing adjusting block 36. The guide rod 31 passes vertically through the linear bearing 35. By setting the linear bearing 35 and the linear bearing adjusting block 36 in the above manner, the vertical movement of the top plate 2 on the guide rod 3 is facilitated.

[0082] 3. Placement head installation mechanism

[0083] like Figure 1 As shown, the mounting head mounting mechanism 4 includes a mounting base 401, on which a vertical mounting head shaft fixing cavity 402 is provided to mount the shaft of the tilting mounting head and fix the tilting mounting head in the mounting head shaft fixing cavity 402.

[0084] like Figure 1As shown, the mounting base 401 includes an extrusion base plate 403 and an extrusion movable plate 404. Both the extrusion base plate 403 and the extrusion movable plate 404 have vertical shaft-engaging arc-shaped cavities inside. The extrusion movable plate 404 is movably mounted on the extrusion base plate 403, and the shaft-engaging arc-shaped cavities of both cooperate to form a mounting head shaft fixing cavity 402. When installing the tilted mounting head, first remove the extrusion movable plate 404, then install the shaft of the tilted mounting head into the shaft-engaging arc-shaped cavity of the extrusion base plate 403. Then, use bolts to install the extrusion movable plate 404 onto the extrusion base plate 403, and adjust the bolts to fix the shaft of the tilted mounting head within the mounting head shaft fixing cavity 402.

[0085] like Figure 1 As shown, the mounting head installation mechanism 4 also includes a hand-cranked turntable 405, which is rotatably mounted on the base plate 1, and the mounting base 401 is mounted on the hand-cranked turntable 405. By setting the hand-cranked turntable 405, the mounting base 401 can be rotated, thereby facilitating the subsequent tilt measurement mechanism 6 to measure the tilt of the tilted mounting head.

[0086] like Figure 1 As shown, a second thrust bearing 406 is provided between the hand-cranked turntable 405 and the base plate 1 to allow the hand-cranked turntable 405 to rotate smoothly and prevent the base plate 1 from restricting its rotation.

[0087] 4. Anti-rotation component

[0088] As a preferred embodiment of this example, the mounting head mounting mechanism 4 further includes an anti-rotation component for limiting the rotation of the mounting base 401, so as to fix the mounting base 401 when the calibration mechanism 5 is correcting, and prevent its rotation from affecting the calibration of the calibration mechanism 5.

[0089] like Figure 1 As shown, the anti-rotation assembly includes a seat fixing member 411. One end of the seat fixing member 411 is fixed to the base plate 1. Two symmetrical C-shaped fixing rods are provided on the seat fixing member 411. A seat engagement cavity is formed between the two C-shaped fixing rods. The mounting seat 401 is located in the seat engagement cavity. The front ends of the two C-shaped fixing rods are movable ends, and an adjusting rod is provided between the two movable ends. The adjusting rod adjusts the size of the seat engagement cavity to fix the mounting seat 401.

[0090] In this embodiment, when it is necessary to rotate the mounting base 401, the adjusting rod is used to loosen the seat engagement cavity to allow the mounting base 401 inside the seat engagement cavity to rotate; when it is necessary to fix the mounting base 401, the adjusting rod is used to tighten the seat engagement cavity to restrict the rotation of the mounting base 401 inside the seat engagement cavity. The adjusting rod in this embodiment can be a screw and nut structure.

[0091] 5. Inclination measuring mechanism

[0092] As a preferred embodiment of this example, Figure 1 and 3 As shown, a tilt measuring mechanism 6 is also installed on the base plate 1 to detect the tilt of the tilted placement head on the placement head mounting mechanism 4. Before, during, or after calibration by the calibration mechanism 5, the tilt of the tilted placement head can be measured by the tilt measuring mechanism 6 to facilitate subsequent measurements and to obtain the calibration results.

[0093] like Figure 1 and 3 As shown, the tilt measuring mechanism 6 includes a measuring gauge guide rod 61, a measuring gauge guide block 62, and a measuring gauge 63. The measuring gauge guide rod 61 is vertically mounted on the base plate 1, the measuring gauge guide block 62 is slidably mounted on the measuring gauge guide rod 61, and the measuring gauge 63 is fixedly mounted on the measuring gauge guide block 62, with its measuring head facing the tilting mounting head on the mounting head installation mechanism 4. In this embodiment, the measuring gauge 63 is a dial indicator. During measurement, the measuring gauge 63 is moved up and down on the measuring gauge guide rod 61, and the tilting mounting head inside the mounting base 401 is rotated to measure the highest and lowest points of the tilting mounting head, thereby determining its tilt.

[0094] like Figure 1 and 3 As shown, the calibration mechanism 5 area on the top plate 2 is provided with a scale for indicating the rotation angle of the calibration mechanism 5, that is, indicating the rotation angle of the calibration handle 511.

[0095] Based on the above-mentioned placement head tilt correction device, this embodiment also provides a placement head tilt correction method, including the following steps:

[0096] S1. After tilting the placement head, remove the front shaft disc of the placement head assembly.

[0097] In the above steps, when the placement head is tilted, the front end of the placement head assembly (with a tilting placement head on the end of ...

[0098] S2. Remove the top plate 2 from above the top plate moving mechanism 3, fix the shaft of the front end shaft of the mounting head assembly to the mounting head mounting mechanism 3, and then reinstall the top plate 2 back into the top plate moving mechanism 3.

[0099] In the above steps, such as Figure 1 and 3As shown, before calibration, the top plate 2 on the top plate moving mechanism 3 is first removed, and then the tilting mounting head is installed. When installing the tilting mounting head, the extrusion movable plate 404 is first removed, and then the shaft of the tilting mounting head is installed in the shaft engagement arc-shaped cavity of the extrusion base plate 403. Then, the extrusion movable plate 404 is installed on the extrusion base plate 403 using bolts, and the bolts are adjusted so that the shaft of the tilting mounting head is fixed in the mounting head shaft fixing cavity 402.

[0100] like Figure 1 and 3 As shown, after installing the tilting mounting head, the top plate 2 is then installed on the top plate moving mechanism 3.

[0101] S3. The top plate moving mechanism 3 causes the correction end of the correction mechanism 5 to move downward and abut against the tilted mounting head on the mounting head mounting mechanism 3.

[0102] S4. Drive the correction end to rotate downwards so that the tilted mounting head is corrected to a horizontal position.

[0103] In the above steps, such as Figure 1 and 3 As shown, when using the calibration mechanism 5 for calibration, the calibration handle 511 is rotated, and the top plate moving mechanism 3 drives the top plate 2 to move downward (by rotating the adjusting knob 33, the adjusting screw 32 rotates, and the adjusting screw 32 rotates, causing the top plate 2 to move downward), which in turn drives the calibration mechanism 5 to move downward. The downward movement of the calibration mechanism 5 is also the downward movement of the calibration part 512. The calibration part 512 rotates under the drive of the calibration handle 511 and moves downward under the drive of the top plate moving mechanism 3. As the calibration part 512 rotates and moves downward, the rolling element 513 at its bottom end abuts against and rolls on the tilted mounting head, thereby driving the tilted mounting head to rotate in the opposite direction of its tilt, so that the mounting head returns to a horizontal state.

[0104] After calibration, the calibration mechanism 5 uses the tilt measuring mechanism 6 to measure the real-time tilt of the mounting head, and adjusts the downward rotation of the calibration end based on the real-time tilt. Specifically, during measurement, the measuring gauge 63 is moved up and down on the measuring gauge guide rod 61, and the tilted mounting head inside the mounting base 401 is rotated to measure the highest and lowest points of the tilted mounting head, thereby obtaining its tilt, and then adjusting the downward rotation of the calibration end based on the tilt.

[0105] When measuring the tilt angle of the tilting mounting head using the tilt angle measuring mechanism 6, the tilting mounting head needs to be rotated to measure its tilt angle. After measurement, when using the calibration mechanism 5 for calibration, the tilting mounting head needs to be fixed. Specifically, when it is necessary to rotate the tilting mounting head, the adjusting rod is used to loosen the seat locking cavity so that the mounting seat 401 inside the seat locking cavity can rotate, thereby allowing the tilting mounting head inside the mounting seat 401 to rotate; when it is necessary to fix the tilting mounting head, the adjusting rod is used to tighten the seat locking cavity to restrict the rotation of the mounting seat 401 inside the seat locking cavity, thereby restricting the rotation of the tilting mounting head inside the mounting seat 401.

[0106] In Example 1, the correction end itself does not move downwards. The downward movement of the reference plane of the correction end is achieved by the downward movement of the top plate moving mechanism 3. Since the correction end has multiple points of contact with the mounting head, it is not necessary to obtain the specific position information of the tilt high point, nor is it necessary to rotate the mounting head horizontally to complete the tilt correction. The downward adjustment of the reference plane of the correction end is completed by the cooperation of the top plate moving mechanism 3. The tilt measurement mechanism 6 is mainly used for measuring the result after correction.

[0107] Example 2

[0108] A placement head tilt correction device, such as Figure 4-6 As shown, it includes:

[0109] Base plate 1;

[0110] Top plate 2, which is located above bottom plate 1 and can move up and down relative to bottom plate 1;

[0111] Top plate moving mechanism 3 is located between bottom plate 1 and top plate 2, and is used to drive top plate 2 to move up and down and limit top plate 2 to any horizontal height.

[0112] Placement head mounting mechanism 4 is mounted on the base plate 1 and is used to fix the tilted placement head to be corrected;

[0113] The correction mechanism 5 is mounted on the top plate 3 and includes a correction end that abuts against the tilted mounting head. The correction mechanism 5 is configured such that its correction end moves downward to correct the tilted mounting head to a horizontal position.

[0114] In this embodiment, the base plate 1 is the support mechanism for the entire mounting head tilt correction device; the top plate 2 is used to install the correction mechanism 5; the top plate moving mechanism 3 is used to move the top plate 2 up and down; the mounting head mounting mechanism 4 is used to install the tilted mounting head that needs to be corrected and to fix the tilted mounting head; the correction mechanism 5 is used to correct the tilted mounting head.

[0115] When calibrating the tilted mounting head, remove the top plate 2 from the top plate moving mechanism 3, install the tilted mounting head on the mounting head mounting mechanism 4, and fix the mounting head; then install the top plate 2 on the top plate moving mechanism 3, and abut the calibration end of the calibration mechanism 5 against the tilted mounting head; during calibration, move the calibration end of the calibration mechanism 5 downward, and the calibration end drives the tilted mounting head to move, so that the mounting head returns to the horizontal state, thereby calibrating the tilted mounting head.

[0116] In this embodiment, the correction mechanism 5 is rotatably mounted on the top plate 3. The correction mechanism 5 is configured to rotate while its correction end moves downward to correct the tilted mounting head to a horizontal position.

[0117] The following sections will describe the correction mechanism 5, the top plate moving mechanism 3, and the mounting head installation mechanism 4 of this embodiment in detail.

[0118] 1. Calibration mechanism

[0119] like Figure 4 and 5 As shown, the correction mechanism 5 includes a clamping handle 521, which is threaded onto the top plate 2. The upper part of the clamping handle 521 extends upward and the lower part passes through the top plate 2 downward. The bottom end abuts against the tilting mounting head. The clamping handle 521 moves downward in response to its own rotation to correct the high point of the tilting mounting head to a horizontal position.

[0120] like Figure 4 and 5 As shown, the calibration mechanism 5 also includes a T-flange nut 522, which is mounted on the top plate 2. The clamping handle 521 passes downward through the T-flange nut 522 and is threaded into it. The T-flange nut 522 facilitates the installation of the clamping handle 521 and its rotation and vertical movement. In this configuration, the internal threaded hole is located on the T-flange nut 522 and is no longer located on the top plate 2.

[0121] In this embodiment, during calibration, the calibration mechanism 5 rotates the clamping handle 521, causing the clamping handle 521 to rotate within the thread of the T-flange nut 522. This causes the bottom end of the clamping handle 521 to rotate and move downwards. The bottom end of the clamping handle 521 drives the highest point of the tilted mounting head in contact with it to rotate in the opposite direction of its tilt, so that the mounting head returns to a horizontal state.

[0122] 2. Top plate moving mechanism

[0123] like Figure 4 As shown, the top plate moving mechanism 3 includes several guide rods 31, the bottom ends of which are fixed on the bottom plate 1, and the upper parts pass through the top plate 2.

[0124] In this embodiment, both the base plate 1 and the top plate 2 are rectangular, and four guide rods 31 are provided at their four corners to guide the vertical movement of the top plate 2. In addition, the four guide rods 31 in this embodiment are arranged symmetrically from left to right, so that the top plate 2 moves vertically downward and prevents it from tilting, thereby ensuring the levelness of the top plate 2 and thus ensuring a high-precision leveling reference surface.

[0125] like Figure 4 As shown, the top plate moving mechanism 3 also includes an adjusting screw 32, which passes through the top plate 2 from top to bottom and is inserted into the bottom plate 1. The adjusting screw 32 drives the top plate 2 to move up and down, and an adjusting knob 33 is provided at its top.

[0126] In this embodiment, the adjusting screw 32 is used to adjust the up-and-down movement of the top plate 2 and to fix the up-and-down movement. When the correction mechanism 5 corrects the tilted mounting head, the adjusting screw 32 needs to be fixed to prevent it from rotating and causing the top plate 2 to move up and down. At this time, the up-and-down movement of the correction mechanism 5 is driven by itself to correct the tilted mounting head.

[0127] The adjusting screw 32 can drive the top plate 2 to move up and down in the following two ways:

[0128] Method 1: The top plate 2 and the adjusting screw 32 are rotatably engaged and cannot move up and down relative to each other; the bottom of the adjusting screw 32 is threadedly engaged with the bottom plate 1. In this method, rotating the adjusting knob 33 causes the adjusting screw 32 to rotate, and the bottom of the adjusting screw 32 rotates threadedly on the bottom plate 1, causing the adjusting screw 32 to move up and down, thereby driving the top plate 2, which is rotatably engaged with it, to move up and down.

[0129] Method 2: The top plate 2 is threadedly engaged with the adjusting screw 32; the bottom of the adjusting screw 32 is rotatably engaged with the base plate 1, and they cannot move up and down relative to each other. In this method, rotating the adjusting knob 33 causes the adjusting screw 32 to rotate, and the bottom of the adjusting screw 32 rotates on the base plate 1, without moving up and down; the adjusting screw 32 rotates threadedly on the top plate 2, causing the top plate 2 to move up and down.

[0130] In this embodiment, two symmetrical adjusting screws 32 are provided. The adjusting knobs 33 of the two adjusting screws 32 need to be rotated synchronously to keep the top plate 2 horizontally against the substrate. After horizontal alignment, the clamping handle 521 is rotated to calibrate the mounting head.

[0131] like Figure 4As shown, the top plate moving mechanism 3 also includes an adjusting plate 34, which is vertically mounted on the base plate 1. Several guide rods 31 have their bottom ends fixed to the adjusting plate 34, and the bottom of the adjusting screw 32 is mounted on the adjusting plate 34. By setting the adjusting plate 34 in this manner, it is easier to install the guide rods 31 and the adjusting screw 32, avoiding excessive length. In this configuration, the guide rods 31 and the adjusting screw 32 are no longer mounted on the base plate 1.

[0132] like Figure 4 As shown, the top plate moving mechanism 3 also includes a linear bearing 35 and a linear bearing adjusting block 36. The linear bearing adjusting block 36 is mounted on the top plate 2, and the linear bearing 35 is mounted on the linear bearing adjusting block 36. The guide rod 31 passes vertically through the linear bearing 35. By setting the linear bearing 35 and the linear bearing adjusting block 36 in the above manner, the vertical movement of the top plate 2 on the guide rod 3 is facilitated.

[0133] 3. Placement head installation mechanism

[0134] like Figure 4 As shown, the mounting head mounting mechanism 4 includes a mounting base 401, on which a vertical mounting head shaft fixing cavity 402 is provided to mount the shaft of the tilting mounting head and fix the tilting mounting head in the mounting head shaft fixing cavity 402.

[0135] like Figure 4 As shown, the mounting base 401 includes an extrusion base plate 403 and an extrusion movable plate 404. Both the extrusion base plate 403 and the extrusion movable plate 404 have vertical shaft-engaging arc-shaped cavities inside. The extrusion movable plate 404 is movably mounted on the extrusion base plate 403, and the shaft-engaging arc-shaped cavities of both cooperate to form a mounting head shaft fixing cavity 402. When installing the tilted mounting head, first remove the extrusion movable plate 404, then install the shaft of the tilted mounting head into the shaft-engaging arc-shaped cavity of the extrusion base plate 403. Then, use bolts to install the extrusion movable plate 404 onto the extrusion base plate 403, and adjust the bolts to fix the shaft of the tilted mounting head within the mounting head shaft fixing cavity 402.

[0136] like Figure 4 As shown, the placement head mounting mechanism 4 also includes a hand-cranked turntable 405, which is rotatably mounted on the base plate 1, and the mounting base 401 is mounted on the hand-cranked turntable 405. By setting the hand-cranked turntable 405, it can be rotated during the tilting of the placement head for correction, so that its top end contacts the correction mechanism 5 for correction.

[0137] like Figure 4 As shown, a second thrust bearing 406 is provided between the hand-cranked turntable 405 and the base plate 1 to allow the hand-cranked turntable 405 to rotate smoothly and prevent the base plate 1 from restricting its rotation.

[0138] 4. Anti-rotation component

[0139] As a preferred embodiment of this example, the mounting head mounting mechanism 4 further includes an anti-rotation component for limiting the rotation of the mounting base 401, so as to fix the mounting base 401 when the calibration mechanism 5 is correcting, and prevent its rotation from affecting the calibration of the calibration mechanism 5.

[0140] like Figure 4 As shown, the anti-rotation assembly includes a clamping member 421 and a locking member 422. The clamping member 421 is fixed on the base plate 1, and the locking member 422 is movably mounted on the clamping member 421 via an adjusting rod. Both the clamping member 421 and the locking member 422 are provided with a seat engagement arc-shaped cavity. The two seat engagement arc-shaped cavities cooperate with each other to form a seat engagement cavity. The mounting seat 401 is located in the seat engagement cavity. The adjusting rod adjusts the size of the seat engagement cavity to fix the mounting seat 401.

[0141] In this embodiment, when it is necessary to rotate the mounting base 401, the adjusting rod is used to loosen the seat engagement cavity to allow the mounting base 401 inside the seat engagement cavity to rotate; when it is necessary to fix the mounting base 401, the adjusting rod is used to tighten the seat engagement cavity to restrict the rotation of the mounting base 401 inside the seat engagement cavity. The adjusting rod in this embodiment can be a bolt structure.

[0142] like Figure 4 and 6 As shown, the area of ​​the correction mechanism 5 on the top plate 2 is provided with a scale for indicating the moving distance of the correction mechanism 5, that is, indicating the downward movement distance of the pressure handle 521 corresponding to the rotation angle of the pressure handle 521.

[0143] Based on the above-mentioned placement head tilt correction device, this embodiment also provides a placement head tilt correction method, including the following steps:

[0144] S1. After tilting the placement head, remove the front shaft disc of the placement head assembly.

[0145] In the above steps, when the placement head is tilted, the front end of the placement head assembly (with a tilting placement head on the end of ...

[0146] S2. Remove the top plate 2 from the top plate moving mechanism 3, fix the shaft of the front end shaft of the mounting head assembly to the mounting head mounting mechanism 3, and then reinstall the top plate 2 onto the top plate moving mechanism 3.

[0147] In the above steps, such as Figure 4 and 6As shown, before calibration, the top plate 2 on the top plate moving mechanism 3 is first removed, and then the tilting mounting head is installed. When installing the tilting mounting head, the extrusion movable plate 404 is first removed, and then the shaft of the tilting mounting head is installed in the shaft engagement arc-shaped cavity of the extrusion base plate 403. Then, the extrusion movable plate 404 is installed on the extrusion base plate 403 using bolts, and the bolts are adjusted so that the shaft of the tilting mounting head is fixed in the mounting head shaft fixing cavity 402.

[0148] like Figure 4 and 6 As shown, after installing the tilting mounting head, the top plate 2 is then installed on the top plate moving mechanism 3.

[0149] After reinstalling the top plate 2, rotate the mounting base 401 by turning the hand-crank turntable 405 until the highest point of the tilting mounting head is aligned with the bottom end of the clamping handle 521. After alignment, use the anti-rotation component to fix the mounting base 401 to prevent it from rotating.

[0150] S3. The top plate moving mechanism 3 causes the correction end of the correction mechanism 5 to move downward and abut against the tilted mounting head on the mounting head mounting mechanism 3.

[0151] S4. Drive the correction end downward to correct the tilted mounting head to a horizontal position.

[0152] In the above steps, such as Figure 4 and 6 As shown, when using the calibration mechanism 5 for calibration, rotate the clamping handle 521. The clamping handle 521 rotates in the internal thread of the T-flange nut 522, causing the bottom end of the clamping handle 521 to rotate and move downward. The bottom end of the clamping handle 521 drives the tilted mounting head in contact with it to rotate in the opposite direction of its tilt, so that the mounting head returns to a horizontal state.

[0153] The correction end in Example 2 has a downward rotation function, which reduces its reliance on the top plate moving mechanism 3 and enables precise quantitative adjustment of the highest point's position (based on tilt measurement results). For specific application scenarios, some placement heads have individual markers whose precise height has been measured by other tilt measuring devices. The positions of these markers can be directly adjusted to efficiently and completely correct the tilt of the placement head.

[0154] The embodiments of the present invention have been described in detail above, but the present invention is not limited to the described embodiments. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and these equivalents or substitutions are all included within the scope defined by the claims of the present invention.

Claims

1. A device for correcting the tilt of a placement head, characterized in that, include: Base plate (1); Top plate (2), which is located above the bottom plate (1) and can move up and down relative to the bottom plate (1); Top plate moving mechanism (3), the top plate moving mechanism (3) is located between the bottom plate (1) and the top plate (2), and is used to drive the top plate (2) to move up and down and limit the top plate (2) to any horizontal height; Placement head mounting mechanism (4), which is mounted on the base plate (1) and is used to fix the tilted placement head to be corrected; A correction mechanism (5) is mounted on the top plate (2) and includes a correction end that abuts against the tilted mounting head. The correction mechanism (5) is configured such that its correction end moves downward to correct the tilted mounting head to a horizontal position.

2. The placement head tilt correction device as described in claim 1, characterized in that, The correction mechanism (5) is rotatably mounted on the top plate (2). The correction mechanism (5) is configured to rotate while its correction end moves downward to correct the tilted mounting head to a horizontal position.

3. The mounting head tilt correction device as described in claim 2, characterized in that, The calibration mechanism (5) includes a calibration handle (511) and a calibration part (512); The calibration handle (511) is rotatably mounted on the top plate (2), with its upper part extending upward and its lower part passing through the top plate (2) downward, and its bottom end connected to the calibration part (512); The calibration unit (512) rotates in response to the rotation of the calibration handle (511) to calibrate the mounting head that is in contact with it to a horizontal state.

4. The placement head tilt correction device as described in claim 3, characterized in that, The correction part (512) is cylindrical, and a number of rolling elements (513) are installed on its bottom surface along the circumferential direction. The rolling elements (513) abut against the inclined mounting head and roll on it during correction.

5. The placement head tilt correction device as described in claim 3, characterized in that, A first thrust bearing (514) is provided between the correction part (512) and the top plate (2).

6. The mounting head tilt correction device as described in claim 2, characterized in that, The correction mechanism (5) includes a clamping handle (521), which is threaded onto the top plate (2); The upper part of the clamping handle (521) extends upward and the lower part passes through the top plate (2) downward. The bottom end abuts against the tilting mounting head. The clamping handle (521) moves downward in response to its own rotation to correct the high point of the tilting mounting head to the horizontal.

7. The placement head tilt correction device as described in claim 6, characterized in that, The correction mechanism (5) also includes a T-flange nut (522), which is mounted on the top plate (2), and the clamping handle (521) passes downward through the T-flange nut (522) and is threadedly engaged with it.

8. The placement head tilt correction device as described in claim 1, characterized in that, The top plate moving mechanism (3) includes several guide rods (31), the bottom ends of which are fixed on the bottom plate (1), and the upper parts pass through the top plate (2) upwards.

9. The placement head tilt correction device as described in claim 8, characterized in that, The top plate moving mechanism (3) also includes an adjusting screw (32), which passes through the top plate (2) from top to bottom and is inserted into the bottom plate (1). The adjusting screw (32) drives the top plate (2) to move up and down and has an adjusting knob (33) at its top.

10. The placement head tilt correction device as described in claim 9, characterized in that, The top plate moving mechanism (3) also includes an adjusting plate (34), which is vertically installed on the bottom plate (1). The bottom ends of the plurality of guide rods (31) are fixed on the adjusting plate (34), and the bottom of the adjusting screw (32) is mounted on the adjusting plate (34).

11. The placement head tilt correction device as described in claim 8, characterized in that, The top plate moving mechanism (3) further includes a linear bearing (35) and a linear bearing adjusting block (36). The linear bearing adjusting block (36) is mounted on the top plate (2), and the linear bearing (35) is mounted on the linear bearing adjusting block (36). The guide rod (31) passes vertically through the linear bearing (35).

12. The placement head tilt correction device as described in claim 1, characterized in that, The mounting head mounting mechanism (4) includes a mounting base (401), on which a vertical mounting head shaft fixing cavity (402) is provided; The mounting base (401) includes an extrusion base plate (403) and an extrusion movable plate (404). Both the extrusion base plate (403) and the extrusion movable plate (404) are provided with vertical shaft engaging arc-shaped cavities. The extrusion movable plate (404) is movably mounted on the extrusion base plate (403), and the shaft engaging arc-shaped cavities of the two cooperate with each other to form the mounting head shaft fixing cavity (402).

13. The placement head tilt correction device as described in claim 12, characterized in that, The mounting head installation mechanism (4) also includes a hand-twisting turntable (405), which is rotatably mounted on the base plate (1), and the mounting seat (401) is mounted on the hand-twisting turntable (405).

14. The placement head tilt correction device as described in claim 13, characterized in that, A second thrust bearing (406) is provided between the hand-cranked turntable (405) and the base plate (1).

15. The placement head tilt correction device as described in claim 13, characterized in that, The mounting head mechanism (4) also includes an anti-rotation component for limiting the rotation of the mounting base (401).

16. The placement head tilt correction device as described in claim 1, characterized in that, The base plate (1) is also equipped with a tilt measuring mechanism (6) for detecting the tilt of the tilted mounting head on the mounting head mounting mechanism (4).

17. The placement head tilt correction device as described in claim 16, characterized in that, The tilt measuring mechanism (6) includes a measuring meter guide rod (61), a measuring meter guide block (62), and a measuring meter (63); the measuring meter guide rod (61) is vertically mounted on the base plate (1), the measuring meter guide block (62) is slidably mounted on the measuring meter guide rod (61), and the measuring meter (63) is fixedly mounted on the measuring meter guide block (62), with its measuring head facing the tilting mounting head on the mounting head mounting mechanism (4).

18. The placement head tilt correction device as described in claim 2, characterized in that, The area of ​​the correction mechanism (5) on the top plate (2) is provided with a scale for indicating the rotation angle and / or movement distance of the correction mechanism (5).

19. A correction method using the mounting head tilt correction device according to any one of claims 1-18, characterized in that, include: Take the top plate (2) out from above the top plate moving mechanism (3), fix the shaft of the front end shaft of the mounting head assembly to the mounting head mounting mechanism (4), and then reinstall the top plate (2) back into the top plate moving mechanism (3). The top plate moving mechanism (3) causes the correction end of the correction mechanism (5) to move downward and abut against the tilted mounting head on the mounting head mounting mechanism (4); Drive the correction end to rotate downwards or move downwards, so that the tilted mounting head is corrected to a horizontal position.

20. The correction method as described in claim 19, characterized in that, Before, during, or after correction, the correction mechanism (5) uses the tilt measuring mechanism (6) to measure the real-time tilt of the mounting head and adjusts the downward rotation or downward movement of the correction end according to the real-time tilt.

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