Membrane switch valve and assembly method thereof

Abstract

The present invention relates to a membrane switch valve and an assembly method thereof. The membrane switch valve includes a valve seat with two transverse flow channels, a valve body with a valve diaphragm to cut off the connection between the two flow channels and an elastic drive structure to provide an axially collapsible elastic force to the valve diaphragm. The first flow channel forms a valve core flow channel opening in the valve seat that is bent upward toward the valve axis, toward the membrane core lifting body corresponding to the valve diaphragm; the second flow channel forms a valve annular flow channel opening surrounding the valve core flow channel opening in the valve seat, toward the membrane bending portion corresponding to the valve diaphragm; the valve seat or the membrane core lifting body has a knife-edge ring edge corresponding to the valve core flow channel opening and the valve annular flow channel opening to reduce the contact area between the valve diaphragm and the valve seat when the valve is closed. The present invention has the ability to withstand extremely high numbers of switching operations without leakage, particle or / and ion precipitation problems, and is particularly suitable for pharmaceutical fluid switches in the semiconductor / pharmaceutical fields.

Description

Technical Field

[0001] The present invention relates to the technical field of membrane valves, and in particular to a membrane switch valve used in semiconductor process processing agents or medical agents and an assembly method thereof. Background Art

[0002] Existing diaphragm valves are mainly divided into diaphragm pressure reducing valves and diaphragm switch valves. The function of the diaphragm pressure reducing valve is to reduce the fluid pressure, and the function of the diaphragm switch valve is to open and close the flow of the fluid. The technical development requirements of the diaphragm switch valve are not only to achieve complete closure with zero leakage in the early stage of use, but also to achieve complete closure with zero leakage under long-term and multiple switching operations. This is different from the purpose of the diaphragm pressure reducing valve to slightly open and reduce pressure. The driving modes of the diaphragm switch valve can be roughly divided into pneumatic drive and manual drive. A manual diaphragm regulating valve realizes flow regulation by adjusting the opening degree. Its design opening linearity is better and the adjustment is more precise.

[0003] With the continuous development of technology, it is hoped that there will be a membrane switch valve that can be used for multiple operations of switching adjustment, especially in the supply of pharmaceutical liquids and semiconductor process processing liquids. The current industry demand is that the membrane switch valve used to adjust the multiple operations of fluid switching should be able to withstand millions of switching times without fluid leakage.

[0004] Invention patent publication number CN108884945A discloses a membrane valve that can be completely closed, which belongs to a type of membrane switch valve. The membrane valve incorporates a plunger with a fluid channel in the axis. The plunger is connected to a hub coupled to the membrane, and the hub also includes a fluid channel and the plunger forms a fluid connection with the hub fluid channel, that is, a switch of the air pressure / hydraulic driven membrane. The hub fluid channel runs through the back side of the membrane in the valve cavity and allows the volume behind the membrane in the valve to be substantially fully pressurized or evacuated. Substantially fully pressurizing the volume behind the membrane achieves complete closure of the membrane and improves the contact between the membrane and the valve seat. However, for the valve diaphragm, the water inlet channel will provide fluid thrust, and the water outlet channel will provide fluid suction. When the total force of the water inlet channel or the water outlet channel acting on the valve diaphragm is eccentric, more valve diaphragm closing force needs to be applied, resulting in damage to the durability of the valve diaphragm. The existing patent is to design the water outlet channel at the center of the valve shaft, and the water inlet channel at the relatively eccentric side of the valve. The water outlet channel is parallel to the water inlet channel and in the same direction as the valve opening and closing direction. In the relevant prior art, the technical inspiration for the film valve to be completely closed is to use the large area of ​​the valve diaphragm to be tightly attached.

[0005] Invention patent publication number CN103502708A discloses a membrane valve, especially for fluid media, having a valve body, a membrane, and a connector that can be operated by a drive device and is used to load the membrane, wherein the valve body and the membrane are made of plastic, and two independent mechanical sealing devices and welding are provided to seal the fluid medium relative to the outside, wherein the valve body and the membrane are not only welded to each other, but also the membrane is mechanically sealed between one of the drive devices or middle pieces on one side and the valve body on the other side. The valve body and the membrane are not only welded to each other, but also the membrane is mechanically sealed between one of the drive devices or middle pieces on one side and the valve body on the other side, and the membrane valve is a disposable device, wherein a groove and a spring seal are provided on the radial inner side of the welded sealing device. However, in the related art, the water inlet flow channel and the water outlet flow channel are still designed on two opposite sides of the valve eccentricity. Under the force analysis of the valve diaphragm, under the pressure of the water inlet channel and the pressure of the water outlet channel, the total force on the valve diaphragm is still eccentric. In order to achieve the effect of valve closing, the one-time structure formed by strong welding and strong fixing of the valve diaphragm is inevitable. In the relevant prior art, the technical inspiration for the closure of the membrane valve is to use the middle of the valve diaphragm to be close to the valve seat to isolate and close the two eccentric flow channels.

[0006] In the semiconductor and medical fields, there are stricter requirements for the use of membrane switch valves in opening and closing medicines. It is not only hoped that the fluid switch operation can withstand long-term opening and closing, but also hoped to reduce the precipitation of microparticles or ions in medicines in the semiconductor / medical fields. However, according to common knowledge in this field, in order to achieve better closing tightness of the membrane valve, the closing contact area between the valve diaphragm and the valve seat of the membrane valve needs to be large, which makes it easier for insoluble or crystalline microparticles or ions in the semiconductor / medical medicine to be clamped between the closing contact interface of the valve diaphragm and the valve seat, and the problem of microparticle / ion precipitation in medicines used in the semiconductor / medical fields cannot be avoided. Summary of the invention

[0007] The main purpose of the present invention is to provide a membrane switch valve, which is a major improvement over the traditional membrane switch valve, which has the problem of easy precipitation of microparticles / ions in the medicine due to the expansion of the valve membrane close contact area in order to completely seal, and also improves the long-term operation times of the regulating fluid switch. In the example, the switch can be durable for more than one million times, with zero leakage, no particle and ion precipitation.

[0008] The second main purpose of the present invention is to provide an assembly method of a membrane switch valve, so as to realize the manufacture of a membrane switch valve having the above-mentioned effects.

[0009] The main purpose of the present invention is achieved through the following technical solutions:

[0010] A membrane switch valve is provided, comprising:

[0011] A valve seat having a first flow channel and a second flow channel with lateral liquid inlet and outlet ports;

[0012] a valve body, arranged on the valve seat, comprising a valve diaphragm, an elastic driving structure for driving the valve diaphragm to move up and down in a valve axis direction, and a valve housing providing a space for accommodating the valve diaphragm and for connecting the elastic driving structure, wherein the valve diaphragm is used to cut off the communication between the first flow channel and the second flow channel;

[0013] Wherein, the valve membrane has a membrane core lifting body aligned with the valve axial center direction, a limited membrane ring fixing part, and a membrane flexure part flexibly connecting the membrane core lifting body and the membrane ring fixing part;

[0014] Wherein, the first flow channel forms a valve core flow channel opening in the valve seat that is bent upward toward the valve axis, and the direction of the valve core flow channel opening corresponds to the membrane core lifting body; the second flow channel forms a valve annular flow channel opening surrounding the valve core flow channel opening in the valve seat, and the direction of the valve annular flow channel opening corresponds to the membrane flexure;

[0015] The valve seat is provided with a knife-edge ring edge on the inner pipe edge between the valve core flow channel opening and the valve annular flow channel opening, so as to contact the membrane core lifting body of the valve diaphragm when the valve body is closed; or the membrane core lifting body is provided with a knife-edge ring edge, so as to contact the inner pipe edge of the valve seat between the valve core flow channel opening and the valve annular flow channel opening when the valve body is closed;

[0016] When the valve body is closed, the pressure center point of the fluid of the membrane core lifting body is located in the direction of the valve axis.

[0017] In this embodiment, the fluid coaxial and concentric switch structure of the valve seat is combined with the elastic closing force provided by the valve body. When the valve body is closed, the center point of the pressure on the fluid of the membrane core lifting body is located in the direction of the valve axis; the closed contact area between the valve diaphragm and the valve seat is only in the area corresponding to the knife edge of the membrane core lifting body. The fluid switch pressure difference of the membrane switch valve is coaxially applied to the membrane core lifting body with one positive and one negative force at the same time. The valve diaphragm is not easy to deform eccentrically, and the effect of labor-saving switch of the membrane valve is achieved. The contact area of ​​the valve closing is roughly reduced to a circular ring. Compared with the traditional large-area isolation center contact and eccentric isolation contact, microparticles / ions will not be squeezed at the membrane closing interface, and the precipitation of microparticles / ions in the medicine used in the semiconductor / medical field is not easy to occur. Moreover, the fluid closing pressure difference is coaxial and concentric corresponding to the valve axis direction, and is also coaxial with the elastic closing force of the elastic drive structure. The durable operation times of the fluid switch of the membrane switch valve can be significantly increased. Compared with traditional technology, the annular (or central) low-pressure suction force of the fluid flowing out of the valve seat is aligned with the axial direction of the valve, which can help the valve diaphragm to close the valve, and the central (or annular) high-pressure thrust of the fluid flowing into the valve seat is aligned with the axial direction of the valve. The valve diaphragm will not be affected by eccentric force; the qualified elastic closing force can be adjusted to a smaller value, and the membrane core lifting body of the valve diaphragm can better lift the switch. In specific examples, in the application of semiconductor / medicine fields, the durable operation times of fluid switches can reach more than one million times, which has industrial utilization value.

[0018] In a preferred example, the present invention can be further configured as follows: the first flow channel is a liquid inlet flow channel, so as to apply an upward thrust in the same direction as the axial direction of the valve to the membrane core lifting body; the second flow channel is a liquid outlet flow channel, so as to apply a downward suction in the same direction as the axial direction of the valve to the membrane core lifting body; when the valve body is closed, the elastic closing force provided by the elastic drive structure is greater than the sum of the upward thrust minus the downward suction.

[0019] By adopting the above preferred technical features, the first flow channel is used as the inlet flow channel, and the second flow channel is used as the outlet flow channel, the valve core flow channel port generates a central upward thrust, and the valve ring flow channel port generates an annular downward suction. When the valve is closed, the second flow channel is at a lower fluid pressure than the first flow channel, so that the membrane flexure of the valve diaphragm is also at a lower fluid pressure. Under the lifting and switching of the membrane core lifting body, the membrane flexure will not be continuously flexed under the high-pressure fluid pressure of the inlet flow channel, and the number of durable operations of the fluid switch can be more significantly improved.

[0020] In a preferred example, the present invention can be further configured as follows: the blade surface of the knife edge ring edge faces the valve circulation channel opening; preferably, when the knife edge ring edge is protruding from the local inner pipe edge of the valve seat, the membrane core lifting body has an indentation corresponding to the knife edge ring edge.

[0021] By adopting the above-mentioned preferred technical features and utilizing the blade direction of the knife edge, insoluble or crystalline microparticles or ions in the medicine can be more easily discharged from the blade surface to the second flow channel with lower fluid pressure, and will not be clamped at the contact interface between the film and the valve seat when the valve is switched. In a preferred example, the knife edge is convexly arranged on the local inner pipe edge of the valve seat, and the membrane core lifting body is formed with an indentation corresponding to the knife edge. Under the action of the elastic closing force, the valve closing interface is non-planar and thin-ring-shaped, and the valve closing effect is better. The inner pipe edge of the valve seat does not have the remaining part of the knife edge, which can prevent the knife edge from cutting too deeply into the membrane core lifting body.

[0022] In a preferred example, the present invention can be further configured as follows: the membrane core lifting body of the valve membrane has a diffuser cone aligned with the valve axial center direction, and the diameter of the diffuser cone is smaller than the diameter of the valve core flow channel opening.

[0023] By adopting the above-mentioned preferred technical features and utilizing the dispersed flow cone, the medicine flowing in the valve core flow passage can be better dispersed and flowed to the valve annular flow passage; or, the medicine flowing in the valve annular flow passage can be better concentrated and flowed to the valve core annular flow passage, so as to reduce turbulence and eliminate stagnant dead zones without flow.

[0024] In a preferred example, the present invention may be further configured as follows: the valve housing is provided with mutually connected liquid leakage detection holes, which are connected to a chamber in the valve housing that provides a rising accommodation space for the valve diaphragm.

[0025] By adopting the above-mentioned preferred technical features and utilizing the leakage detection hole, when the membrane flexure is damaged, the leaked agent will preferentially flow out from the leakage detection hole and will not seep into the working chamber of the elastic member in the valve body.

[0026] In a preferred example, the present invention can be further configured as follows: the valve housing includes a valve inner housing and a valve outer housing, the valve inner housing has a space for accommodating the valve diaphragm, and the valve outer housing is fixedly combined with the valve seat; the valve seat is also provided with a fixing groove for limiting the diaphragm ring fixing part; when the valve outer housing is fixedly combined with the valve seat, the annular edge of the valve inner housing limits the diaphragm ring fixing part from falling out of the fixing groove.

[0027] By adopting the above-mentioned preferred technical features and utilizing the specific structure of the valve housing, when the valve body and the valve seat are combined, the diaphragm ring fixing part of the valve diaphragm is naturally and synchronously fixed, achieving the effect of quick assembly, easy disassembly and leakage prevention.

[0028] In a preferred example, the present invention can be further configured as follows: the liquid leakage detection hole penetrates one side of the valve inner shell and the valve outer shell, so that when liquid leaks, it will preferentially seep through the liquid leakage detection hole to the side away from the elastic driving structure.

[0029] By adopting the above-mentioned preferred technical features and utilizing the position of the leakage detection hole, the leakage is relatively far away from the elastic driving structure and can be easily observed and detected without affecting the normal operation of the elastic driving structure, thereby avoiding the performance deterioration of the elastic drive under leakage.

[0030] In a preferred example, the present invention can be further configured as follows:

[0031] The elastic drive structure comprises:

[0032] A screw cap is adjustably disposed on the outer side wall of the valve housing and is located on the valve housing;

[0033] A valve stem is telescopically disposed under the screw cap and is aligned with the valve axis and is located in the valve housing;

[0034] An elastic member, sleeved on the stem of the valve stem, to provide an elastic force for pushing the valve stem relative to the screw cap;

[0035] The valve head is fixedly arranged at one end of the valve stem relatively far from the screw cap; the valve diaphragm is fixed to the valve head; when the screw cap is adjusted to rise or fall relative to the valve housing by rotating the screw cap, the valve stem, the elastic member and the valve head are relatively non-rotatable, and the elastic member with limited length provides elastic closing force to the valve diaphragm;

[0036] Preferably, the stem of the valve stem is provided with a stem ring portion pushed by one end of the elastic member, the stem of the valve stem is sleeved with a retaining ring limited in the screw cap, and the retaining ring is pushed by the other end of the elastic member and moves up and down with the screw cap;

[0037] Preferably, the screw cap is configured to adjust the height position of the screw cap relative to the valve housing in a rotational manner, and the screw cap is aligned with the axial direction of the valve and is provided with a rod collapse hole; when the height of the screw cap relative to the valve housing is lowered until the membrane core lifting body can elastically close the valve core flow channel opening, one end of the valve stem is retracted to the rod collapse hole with a greater length; when the height of the screw cap relative to the valve housing is increased until the membrane core lifting body cannot elastically close the valve core flow channel opening, the rod ring is in a relatively high position, and the opening of the membrane core lifting body depends on the balance between the rising thrust of the fluid inflow and the descending suction of the fluid outflow plus the sum of the elastic force at the compressed length of the elastic member and the weight of the valve switch moving member, and the valve switch moving member includes the valve stem, the valve head, and the membrane core lifting body of the valve diaphragm.

[0038] By adopting the above-mentioned preferred technical features and utilizing the specific structure of the elastic drive structure, the elastic drive function of the rod end can be realized. The rotation of the screw cap does not drive the rotation of the valve stem, and the lifting and lowering of the screw cap does not quantitatively change the lifting and lowering position of the valve stem. The rotation and lifting of the screw cap only changes the position of the upper push point of the elastic member. On the contrary, the lifting and lowering switch of the membrane core lifting body of the valve diaphragm synchronously drives the lifting and lowering movement of the valve stem and is not limited by the limit of the screw cap. The valve stem has the characteristic of collapsible elastic force. In the extreme case where the pulse high-pressure fluid pressure overcomes the elastic force, the valve stem will lift and lower elastically, and the screw cap can remain motionless. The pulse high-pressure fluid pressure will not destroy the structure of the elastic drive structure. Specifically, the pulse fluid pressure change of the inlet valve will become the arc-shaped waveform fluid pressure change of the outlet valve, that is, the effect of fluid pressure damping. When the valve is opened, the fluid pressure change presents a gradual and gentle effect.

[0039] The second main purpose of the present invention is achieved through the following technical solutions:

[0040] A method for assembling a membrane switch valve is provided, which is used to manufacture a membrane switch valve. The method comprises:

[0041] Providing an elastic driving structure for the valve body;

[0042] connecting the elastic drive structure and the valve housing;

[0043] Installing a valve diaphragm and an elastic driving structure connected to a valve housing to form a valve body;

[0044] The valve housing is arranged on the valve seat, and the membrane ring fixing part of the valve diaphragm can be fixed while the valve housing is arranged on the valve seat; the valve diaphragm can close the valve core flow channel opening due to the position and elastic force of the elastic driving structure relative to the valve housing.

[0045] In this embodiment, the elastic drive structure and the valve housing are assembled and connected first, and then the valve diaphragm is installed. When the valve housing is set on the valve seat, the diaphragm ring fixing part of the valve diaphragm can be fixed. The valve diaphragm does not need to be welded to the valve seat or valve body, and has the effects of easy assembly and quick disassembly and good leak-proof sealing.

[0046] In a preferred example, the present invention can be further configured as follows:

[0047] In the step of providing the elastic drive structure of the valve body, the elastic drive structure comprises: the elastic drive structure comprises: a screw cap, a valve stem, an elastic member, and a valve head, the screw cap is screwed to the outer side wall of the valve housing and is located on the valve housing; the valve stem is telescopically arranged under the screw cap and is aligned with the valve axis direction and is located in the valve housing; the elastic member is sleeved on the stem of the valve stem to provide the valve stem with a push-out elastic force relative to the screw cap; the valve head is fixedly arranged at one end of the valve stem relatively away from the screw cap;

[0048] The step of connecting the elastic drive structure with the valve housing comprises: screwing the external thread of the valve housing with the internal thread of the screw cap of the elastic drive structure;

[0049] The step of installing the valve diaphragm and the elastic drive structure comprises: engaging the central membrane coupling hole of the valve diaphragm with the central membrane coupling portion of the valve head included in the elastic drive structure;

[0050] The step of arranging the valve housing on the valve seat comprises: erecting a plurality of mounting rods to penetrate the corners of the valve housing, pass through the valve seat and be fixed to the valve bottom plate below the valve seat; in the step of arranging the valve housing on the valve seat, the membrane ring fixing part of the valve membrane can be fixed at the same time;

[0051] The screw cap and the valve stem are axially collapsible elastically connected so as to keep the membrane core lifting body of the valve diaphragm elastically pressing the inner pipe edge of the valve seat between the valve core flow channel opening and the valve annular flow channel opening when the valve body is closed.

[0052] By adopting the above-mentioned preferred technical features, a specific assembly method of the membrane switch valve is provided.

[0053] In summary, the present invention includes at least one of the following technical effects that contribute to the prior art:

[0054] 1. It provides a blade seal structure with zero leakage in the flow channel of the valve seat and a collapsible spring compression design;

[0055] 2. A reciprocating valve diaphragm with a semicircular diaphragm flexure is provided. The stretching stroke of the valve diaphragm can be digitized based on the relative height of the screw cap minus the retracted length of one end of the valve stem in the stem collapse hole;

[0056] 3. Based on the three-way or multi-way sealing structure of the valve body to prevent leakage, O-rings are provided at the upper and lower positions of the elastic seal between the inner shell of the valve and the membrane ring fixing part, and the corresponding leakage detection hole between the inner shell of the valve and the outer shell of the valve, so that the medicine will not leak into the working chamber of the elastic part in the valve shell;

[0057] 4. The leakage detection hole provides a drainage port structure for the medicine medium when the membrane flexure portion of the valve diaphragm is ruptured, and is relatively far away from the elastic driving structure;

[0058] 5. The diffuser cone of the valve diaphragm and the valve annular flow port provide a fluid design that can reduce turbulence when the valve is opened;

[0059] 6. The rising liquid of the membrane core lifting body connects the valve core flow channel and the valve annular flow channel, and the blade surface of the knife edge faces the valve annular flow channel, so as to achieve a dead zone-free design of the inner flow channel;

[0060] 7. Pre-leakage of liquid from the leakage detection hole prevents the sealing structure from corroding the working chamber of the elastic part in the valve body. BRIEF DESCRIPTION OF THE DRAWINGS

[0061] Figure 1 A schematic three-dimensional diagram of a membrane switch valve according to some preferred embodiments of the present invention is shown;

[0062] Figure 2 Schematic diagrams of explosion and decomposition of membrane switch valves according to some preferred embodiments of the present invention are shown;

[0063] Figure 3 A schematic diagram showing a cross-sectional view of a flow channel of a lower half of a membrane switch valve with respect to a coaxial flow channel opening in some preferred embodiments of the present invention is shown;

[0064] Figure 4 A schematic cross-sectional view of the upper half of a membrane switch valve according to some preferred embodiments of the present invention is shown with respect to a collapsible elastic drive;

[0065] Figure 5 Schematic cross-sectional views and partial enlarged views of membrane switch valves in some preferred embodiments of the present invention when the valve is closed;

[0066] Figure 6 Schematic cross-sectional views and partial enlarged views of membrane switch valves in some preferred embodiments of the present invention when the valve is open;

[0067] Figure 7 Schematic diagrams showing elastic members in the assembly method of the membrane switch valve according to some preferred embodiments of the present invention;

[0068] Figure 8 A schematic diagram illustrating the combination of an elastic member and a valve head in an assembly method of a membrane switch valve according to some preferred embodiments of the present invention;

[0069] Fig. 9 A schematic diagram illustrating a valve housing in an assembly method of a membrane switch valve according to some preferred embodiments of the present invention;

[0070] Fig.10 A schematic diagram illustrating a method for assembling a membrane switch valve according to some preferred embodiments of the present invention in which an elastic member is combined with a valve head and then sleeved on a valve housing;

[0071] Fig.11 A schematic diagram illustrating the installation of a screw cap on a valve housing in an assembly method of a membrane switch valve according to some preferred embodiments of the present invention;

[0072] Fig.12 Schematic diagrams showing valve diaphragms in the assembling methods of membrane switch valves according to some preferred embodiments of the present invention;

[0073] Fig.13 A schematic diagram illustrating the combination of a valve diaphragm and a valve head in an assembly method of a membrane switch valve according to some preferred embodiments of the present invention;

[0074] Fig.14 Schematic diagrams showing the arrangement of the valve housing on the valve seat in the assembly method of the membrane switch valve according to some preferred embodiments of the present invention.

[0075] Reference numerals: 10, valve seat; 11, first flow channel; 11A, valve core flow channel opening; 12, second flow channel; 12A, valve ring flow channel opening; 13, knife edge; 14, first pipe joint; 15, second pipe joint; 16, fixing groove; 20, valve body; 21, valve axial direction; 30, valve diaphragm; 31, membrane core lifting body; 31A, diffuser cone; 31B, membrane joint hole; 32, membrane ring fixing part; 33, membrane flexure; 40, elastic drive structure; 41, screw cap; 41A, Internal thread; 41B, rod collapse hole; 42, valve stem; 42A, rod ring; 42B, rod coupling part; 42C, rod adjustment hole; 43, elastic member; 44, valve head; 44A, rod coupling hole; 44B, membrane coupling part; 45, retaining ring; 46, leak-proof ring; 47, gasket; 50, valve housing; 51, valve inner housing; 52, valve outer housing; 52A, external thread; 53, leakage detection hole; 55, air hole; 61, mounting rod; 62, valve bottom plate; 63, first pipe sleeve; 64, second pipe sleeve. DETAILED DESCRIPTION

[0076] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments for understanding the inventive concept of the present invention, and cannot represent all the embodiments, nor are they interpreted as the only embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field on the premise of understanding the inventive concept of the present invention are within the scope of protection of the present invention.

[0077] It should be noted that if there are directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention, the directional indications are only used to explain the relative position relationship and movement of the components in a certain posture. If the specific posture changes, the directional indications will also change accordingly. In order to facilitate the understanding of the technical solution of the present invention, the membrane switch valve and the assembly method of the present invention are further described and explained below, but they are not limited to the protection scope of the present invention.

[0078] Figures 1 to 5The membrane switch valve in some preferred embodiments of the present application is illustrated. The parts shown in the accompanying drawings can represent the common parts of multiple embodiments, and can also represent the unique parts of individual embodiments. The parts with differences or distinctions between different embodiments are described in text or presented in contrast to the drawings, for example: the formation position of the knife edge ring edge, or the parts that are not recorded in the claims and are non-essential features. Therefore, based on the characteristics of the industry and the essence of the technology, technical personnel familiar with the field should correctly and reasonably understand and judge whether the individual technical features described below or any combination of them can be characterized in the same embodiment, or whether multiple technical features that are mutually exclusive in essence can only be characterized in different variant embodiments respectively. In addition to being a reaction solution or a pharmaceutical agent used in a semiconductor manufacturing process, the "agent" recorded in the present invention can also be ultrapure water used in a semiconductor process.

[0079] Figure 1 A schematic three-dimensional diagram of a membrane switch valve according to some preferred embodiments of the present invention is shown; Figure 2 A schematic diagram of the explosion of the valve is shown; Figure 3 A schematic diagram of a cross section of the flow channel of the lower half of the valve about the coaxial flow channel opening is shown; Figure 4 A schematic cross-sectional view of the upper portion of the valve with respect to the collapsible elastic drive is shown; Figure 5 A schematic cross-sectional view and a partial enlarged view of the valve when the valve is closed are shown; Figure 6 The cross-sectional diagram and partial enlarged diagram of the valve when the valve is open are shown. The membrane switch valve can be particularly used for fluid control in ultrapure chemical etching equipment and electronic ultrapure water cleaning equipment. It has the effects of corrosion resistance, high temperature resistance, clean valve cavity without dead zone, zero leakage, and no particle and ion precipitation.

[0080] like Figures 1 to 4 As shown, a membrane switch valve disclosed in an embodiment of the present invention comprises: a valve seat 10 for providing a switchable two flow channels (or multiple flow channels), and a valve body 20 disposed on the valve seat 10 for closing the communication between the flow channels. Figure 3 and Figure 4 The valve body 20 defines a valve axis direction 21 corresponding to the lifting direction of the valve switch. Figure 3 The valve seat 10 has a first flow channel 11 and a second flow channel 12 with a lateral inlet and outlet. In this example, the first flow channel 11 can be a liquid inlet flow channel, and the second flow channel 12 can be a liquid outlet flow channel. In a variation example, the first flow channel 11 can be a liquid outlet flow channel, and the second flow channel 12 can be a liquid inlet flow channel. Among them, it is a better choice to use the first flow channel 11 as the liquid inlet flow channel, which will be described in detail later. Figure 1 , Figure 2 , Figure 3 The first flow channel 11 has a first pipe joint 14 at its outer diameter at the outlet pipe to be sleeved with the first pipe sleeve 63 to achieve pipe connection on one side of the valve seat 10 in a sleeve clamping manner (such as Figure 5, Figure 6 As shown); a second pipe joint 15 is provided at the outer diameter of the outlet pipe of the second flow channel 12 to sleeve the second pipe sleeve 64, so as to realize the pipe connection on the other side of the valve seat 10 in the sleeve clamping mode (as shown); Figure 5 , Figure 6 As shown). The pipe clamping effect can be increased by using the beveled cuts of the outlet pipe edges of the first flow channel 11 and the second flow channel 12 and the corresponding angled shrinkage of the first pipe sleeve 63 and the second pipe sleeve 64.

[0081] See also Figure 2 , Figure 3 and Figure 4 The valve body 20 includes a valve diaphragm 30 for realizing valve switching, an elastic driving structure 40 for driving the valve diaphragm 30 to rise and fall in a valve axial direction 21, and a valve housing 50 that provides a rising accommodation space for the valve diaphragm 30 and is connected to the elastic driving structure 40. The valve diaphragm 30 is used to cut off the connection between the first flow channel 11 and the second flow channel 12.

[0082] See also Figure 3 and Figure 4The valve diaphragm 30 has a membrane core lifting body 31 aligned with the valve axial center direction 21, a limited membrane ring fixing part 32, and a membrane flexure part 33 flexibly connecting the membrane core lifting body 31 and the membrane ring fixing part 32. In the example, the outer edge of the membrane core lifting body 31 is equivalent to a smaller circle, the outer edge of the membrane ring fixing part 32 is equivalent to a larger circle, and the two circles are concentric circles. The membrane flexure part 33 is located between the membrane core lifting body 31 and the membrane ring fixing part 32. When the valve is switched, the membrane ring fixing part 32 is relatively fixed, the membrane core lifting body 31 is driven to move up and down, and the membrane flexure part 33 produces corresponding bending changes based on the lifting and lowering of the membrane core lifting body 31. The membrane flexure 33 is curved toward the elastic drive structure 40, and the radial length of the membrane flexure 33 is greater than the radial distance between the membrane core lifting body 31 and the membrane ring fixing part 32. The radial length of the membrane flexure 33 on one side is positively correlated to the diameter of the valve core flow channel 11A, which is about 60-80% of the diameter of the valve core flow channel 11A. That is, when the diameter of the valve core flow channel 11A is larger, the lifting height of the membrane core lifting body 31 of the valve diaphragm 30 needs to be higher, and the membrane flexure 33 used to connect the fixing part and the lifting part needs to become Longer; the individual thickness of the membrane core lifting body 31 and the membrane ring fixing part 32 can be greater than the thickness of the membrane flexing part 33, and the thickness of the membrane flexing part 33 is about 0.4-0.5mm; the thickness of the membrane flexing part 33 is preferably as thin as possible to facilitate the flexure of the valve lifting switch, and the thickness of the membrane flexing part 33 is preferably thick enough to avoid diaphragm rupture; the present invention utilizes that when the valve is driven to lift, the force center point of the valve diaphragm 30 is concentrated at a point in the valve axial direction 21, so that the membrane flexing part 33 can be evenly stressed and will not rupture due to local stress. In this example, the membrane core lifting body 31, the membrane ring fixing part 32 and the membrane flexing part 33 are an integrated part, and the material of the valve diaphragm 30 can be selected from PTFE (polytetrafluoroethylene). In a preferred example, such as Figure 3 and Figure 4 As shown, the cross section of the membrane ring fixing portion 32 is an inverted L-shape or rectangle with an angle, so as to be clamped and fixed between the valve housing 50 (specifically including the valve inner housing 51 and the valve outer housing 52) and the valve seat 10, so that the membrane ring fixing portion 32 can be well fixed during assembly and is not easy to fall out. The membrane flexing portion 33 preferably extends from the lower side of the membrane ring fixing portion 32 close to the valve seat 10 to provide a better upward flexing space and prevent the membrane flexing portion 33 from being clamped.

[0083] See also Figure 3 The first flow channel 11 forms a valve core flow channel opening 11A in the valve seat 10 that bends inward and upward toward the valve axial direction 21, and the direction of the valve core flow channel opening 11A corresponds to the membrane core lifting body 31; the second flow channel 12 forms a valve ring flow channel opening 12A surrounding the valve core flow channel opening 11A in the valve seat 10, and the direction of the valve ring flow channel opening 12A corresponds to the membrane flexure 33.

[0084] More specifically, in this preferred example, the valve seat 10 is provided with a knife edge ring edge 13 on the inner pipe edge between the valve core flow passage opening 11A and the valve annular flow passage opening 12A, so as to contact the membrane core lifting body 31 of the valve diaphragm 30 when the valve body 20 is closed; or, in a variation example, the membrane core lifting body 31 is provided with a knife edge ring edge 13 (not shown) so as to contact the inner pipe edge of the valve seat 10 between the valve core flow passage opening 11A and the valve annular flow passage opening 12A when the valve body 20 is closed. When the valve body 20 is closed, the fluid pressure center point of the membrane core lifting body 31 is located in the valve axis direction 21.

[0085] The implementation principle of this embodiment is as follows: Figure 5 The valve is closed and Figure 6 The valve is opened by utilizing the fluid coaxial and cocentric switch structure of the valve seat 10 combined with the elastic closing force provided by the valve body 20. When the valve body 20 is closed, the center point of the fluid pressure on the membrane core lifting body 31 is located in the valve axis direction 21; the closed contact area between the valve diaphragm 30 and the valve seat 10 is only in the area of ​​the membrane core lifting body 31 corresponding to the knife edge ring edge 13. The fluid switch pressure difference of the membrane switch valve is coaxially applied to the membrane core lifting body 31 with one positive and one negative force at the same time. The valve diaphragm 30 is not easy to eccentrically deform, and the force points of the membrane core lifting body 31 are concentrated on the center line along the valve axis direction 21, achieving the effect of labor-saving switch of the membrane valve. The contact area of ​​the valve closing is roughly reduced to a circular ring (corresponding to the knife edge ring edge 13). Compared with the traditional large-area isolation center contact and eccentric isolation contact, microparticles / ions will not be squeezed at the membrane closing interface, and microparticles / ions in the medicine used in the semiconductor / pharmaceutical field are not easy to precipitate. Moreover, the fluid closing pressure difference is coaxial and concentric with the valve axis direction 21, and is also coaxial with the elastic closing force of the elastic drive structure 40, so the durable operation times of the fluid switch of the membrane switch valve can be significantly increased. Compared with the traditional technology, the annular (or central) low-pressure suction force of the fluid flowing out of the valve seat 10 is aligned with the descent of the valve axis direction 21, which can help the valve diaphragm 30 to close the valve, and the central (or annular) high-pressure thrust of the fluid flowing into the valve seat 10 is aligned with the rise of the valve axis direction 21, and the valve diaphragm 30 will not be affected by the eccentric force; the qualified elastic closing force can be adjusted to a smaller value, and the membrane core lifting body 31 of the valve diaphragm 30 can better lift and switch. In the specific example, in the application of semiconductor / medicine field, the durable operation times of the fluid switch can reach more than one million times, which has industrial utilization value.

[0086] For better examples of specific flow channel configurations, see Figure 3, the first flow channel 11 is a liquid inlet flow channel, which applies an upward thrust in the same direction as the valve axis direction 21 to the membrane core lifting body 31; the second flow channel 12 is a liquid outlet flow channel, which applies a downward suction in the same direction as the valve axis direction 21 to the membrane core lifting body 31; when the valve body 20 is closed, the elastic closing force provided by the elastic drive structure 40 is greater than the sum of the upward thrust and the downward suction. Figure 5 As shown, when the valve is closed, the membrane core lifting body 31 closes the valve core flow channel 11A, and the corresponding membrane flexure 33 above the valve annular flow channel 12A is at a lower fluid pressure outlet pressure. The membrane flexure 33 has better durability, and the valve diaphragm 30 can withstand multiple valve switches. The durable service life is naturally higher. Using the first flow channel 11 as the liquid inlet flow channel and the second flow channel 12 as the liquid outlet flow channel, the valve core flow channel 11A generates a central upward thrust, and the valve annular flow channel 12A generates an annular downward suction. Figure 5 As shown, when the valve is closed, the second flow channel 12 is at a lower fluid pressure than the first flow channel 11, so that the membrane flexure 33 of the valve diaphragm 30 is also at a lower fluid pressure. Under the lifting switch of the membrane core lifting body 31, the membrane flexure 33 will not continue to bend under the high-pressure fluid pressure of the liquid inlet channel, and the durable operation times of the fluid switch can be significantly improved.

[0087] Regarding the preferred example of the knife edge 13 of the valve seat 10, see Figure 3 , the blade surface of the knife edge 13 faces the valve circulation channel opening 12A; preferably, when the knife edge 13 is convexly arranged on the local inner pipe edge of the valve seat 10, the membrane core lifting body 31 has an indentation corresponding to the knife edge 13. With the blade surface orientation of the knife edge 13, insoluble or crystalline microparticles or ions in the medicine are more easily discharged from the blade surface to the second flow channel 12 with lower fluid pressure, and will not be clamped at the contact interface between the film and the valve seat 10 when the valve is switched. In a preferred example, with the knife edge 13 convexly arranged on the local inner pipe edge of the valve seat 10, the membrane core lifting body 31 is formed with an indentation corresponding to the knife edge 13. Under the action of the collapsible elastic closing force, the valve closing interface is non-planar and thin ring-shaped, and the valve closing effect is better. The inner pipe edge of the valve seat 10 does not have the remaining part of the knife edge 13, which can prevent the knife edge 13 from cutting too deeply into the membrane core lifting body 31. The inclination angle of the knife edge 13 should be between 20 and 45 degrees, specifically about 30 degrees, wherein 0 degrees means no inclination and the inner pipe edge is horizontal.

[0088] For a preferred example of the specific structure of the valve diaphragm 30, see Figure 3 and Figure 4The membrane core lifting body 31 of the valve membrane 30 has a diffuser cone 31A aligned with the valve axial direction 21, and the diameter of the diffuser cone 31A is smaller than the diameter of the valve core flow passage 11A. By using the diffuser cone 31A, the medicine flowing in the valve core flow passage 11A can be better dispersed to flow to the valve annular flow passage 12A; or, the medicine flowing in the valve annular flow passage 12A can be better concentrated to flow to the valve core annular flow passage, so as to reduce disturbance and eliminate the stagnant dead zone without flow.

[0089] For a preferred example of the elastic drive structure 40, see Figure 2 and Figure 4 , the elastic driving structure 40 specifically includes:

[0090] The screw cap 41 is adjustably arranged on the outer wall of the valve housing 50 and is located on the valve housing 50; the screw cap 41 can be specifically a hand wheel, and the screw cap 41 is rotated by hand to adjust the elastic force of the elastic member 43 being compressed; when the screw cap 41 is rotated downward, the elastic force provided by the elastic member 43 is greater; in a variation example, the screw cap 41 can also be an electric drive wheel or an electric transmission wheel;

[0091] The valve stem 42 is telescopically disposed under the screw cap 41 and is aligned with the valve axis direction 21 and is located in the valve housing 50; the valve stem 42 is used to synchronously drive the membrane core lifting body 31 of the valve membrane 30 to rise and fall.

[0092] The elastic member 43 is sleeved on the stem of the valve stem 42 to provide an elastic force for pushing the valve stem 42 relative to the screw cap 41; the elastic member 43 may be a compression spring to provide an elastic force for pushing the valve stem 42 out;

[0093] The valve head 44 is fixedly mounted on one end of the valve stem 42 which is relatively far away from the screw cap 41; the valve diaphragm 30 is fixed to the valve head 44; when the position of the screw cap 41 relative to the valve housing 50 is adjusted by rotating the screw cap 41, the valve stem 42, the elastic member 43 and the valve head 44 are relatively non-rotatable, and the elastic member 43 provides an elastic closing force for the valve diaphragm 30 with a limited length.

[0094] The specific structure of the elastic drive structure 40 is used to realize the elastic drive function of the rod end being collapsible. The rotation of the screw cap 41 does not drive the rotation of the valve stem 42, and the lifting and lowering of the screw cap 41 does not quantitatively change the lifting and lowering position of the valve stem 42. The rotation and lifting of the screw cap 41 only changes the position of the upper end push point of the elastic member 43. On the contrary, the lifting and lowering switch of the membrane core lifting body 31 of the valve diaphragm 30 synchronously drives the lifting and lowering movement of the valve stem 42 and is not limited by the limit of the screw cap 41. The valve stem 42 has the characteristic of collapsible elastic force. In the extreme case where the pulse high-pressure fluid pressure overcomes the elastic force, the valve stem 42 will lift and lower by elastic force, and the screw cap 41 can remain motionless. The pulse high-pressure fluid pressure will not destroy the structure of the elastic drive structure 40. Specifically, the pulse fluid pressure change of the inlet valve will become the arc-shaped waveform fluid pressure change of the outlet valve, that is, the effect of fluid pressure damping. When the valve is opened, the fluid pressure change presents a gradual and gentle effect.

[0095] Specifically, Figure 2 , Figure 4 , Figure 5 and Figure 6 As shown, the inner wall of the screw cap 41 is provided with an internal thread 41A, which is screwed to the external thread 52A of the valve housing 52 of the valve housing 50. The rotation of the screw cap 41 can change the height position of the screw cap 41 relative to the valve housing 50, and the height position of the retaining ring 45 is also changed synchronously, thereby changing the position where the upper end of the elastic member 43 is pushed to a lower space state. Figure 5 When the screw cap 41 rotates and sinks, the retaining ring 45 also sinks, and the elastic member 43 has a greater elastic force, elastically pushing the valve stem 42 to move downward until the membrane core lifting body 31 of the valve diaphragm 30 closes the valve core flow channel opening 11A of the first flow channel 11; at this time, the screw cap 41 is at a relatively low position of the valve housing 51, and the upper end of the valve stem 42 is at a relatively high position of the stem collapse hole 41B of the screw cap 41, that is, the valve is closed and the stem is elastically collapsed. Figure 6 When the screw cap 41 rotates in the opposite direction and rises, the retaining ring 45 also rises, thereby changing the position where the upper end of the elastic member 43 is pushed to a higher spatial state, and the elastic force of the elastic member 43 that was originally compressed is reduced. The elastic force of the elastic member 43 is insufficient to close the valve, so that the first flow channel 11 and the second flow channel 12 are in fluid communication with each other; at this time, the screw cap 41 is at a relatively high position of the valve housing 51, but the upper end of the valve stem 42 is at a relatively low position of the stem collapse hole 41B of the screw cap 41, that is, the valve is opened and the stem is elastically extended.

[0096] Specifically, Figure 2 , Figure 4 , Figure 5 and Figure 6As shown, the upper end of the valve stem 42 is also provided with a rod adjustment hole 42C, specifically a hexagonal screw hole, for changing the working length of the valve stem 42 for the elastic member 43. More specifically, a rod head is screwed to the upper end of the valve stem 42, and the rod adjustment hole 42C is provided above the rod head. By rotating the rod head through the rod adjustment hole 42C with a tool, the depth of the rod head screwed into the valve stem 42 is changed, and the total length of the valve stem 42 can be changed.

[0097] Specifically, Figure 2 , Figure 5 and Figure 6 As shown, the function of the valve head 44 is to allow the valve stem 42 to connect and drive the membrane core lifting body 31 of the valve diaphragm 30, and to prevent the leakage of the membrane core lifting body 31 from directly flowing into the working chamber of the elastic member 43 during the lifting and switching process. Figure 2 , Figure 3 As shown, the upper portion of the valve head 44 is provided with a rod coupling hole 44A for connecting the rod coupling portion 42B of the valve stem 42. Figure 2 , Figure 5 , Figure 6 As shown, the lower part of the valve head 44 is provided with a membrane coupling portion 44B to connect with the membrane coupling hole 31B of the membrane core lifting body 31 of the valve membrane 30. The above connection method can be screw connection or other fixing methods. The outer diameter of the valve head 44 can be provided with an O-ring.

[0098] Regarding a more preferred example of the valve stem 42 of the elastic drive structure 40, see Figure 2 , Figure 5 and Figure 6 The stem of the valve stem 42 is provided with a stem ring portion 42A which is pushed by one end of the elastic member 43, and the stem of the valve stem 42 is sleeved with a retaining ring 45 which is limited in the screw cap 41. The retaining ring 45 is pushed by the other end of the elastic member 43 and moves up and down with the screw cap 41. More specifically, a gasket 47 is also placed in the valve housing 52 of the valve body 50. The gasket 47 is sleeved on the stem of the valve stem 42 and is located between the retaining ring 45 and the screw cap 41. When the length of the gasket 47 is longer, the maximum rising distance of the retaining ring 45 relative to the screw cap 41 will be reduced. When the screw cap 41 is in a fixed position, the longer retaining ring 45 can make the elastic member 43 have a greater elastic force. For details, refer to Figure 2 , Figure 5 , Figure 6 The elastic drive structure 40 further includes a leak-proof ring 46, which is sleeved on the valve housing 52 of the valve housing 50, and is used to prevent the medicine from leaking from the working chamber of the elastic member 43 through the air hole 55 of the valve housing 52 to the screw cap 41 when the medicine leaks seriously. The air hole 55 of the valve housing 52 is used to maintain the pressure balance between the working chamber of the elastic member 43 and the external air pressure during assembly and when the elastic member 43 is working.

[0099] In a more preferred example of the screw cap 41 of the elastic drive structure 40, the screw cap 41 is configured to rotationally adjust the height position of the screw cap 41 relative to the valve housing 50, and the screw cap 41 is aligned with the valve axial direction 21 to provide a rod receiving hole 41B. When the height of the screw cap 41 relative to the valve housing 50 is lowered until the membrane core lifting body 31 can elastically close the valve core flow channel 11A, one end of the valve stem 42 retracts to the stem collapse hole 41B with a greater length; when the height of the screw cap 41 is raised relative to the valve housing 50 until the membrane core lifting body 31 cannot elastically close the valve core flow channel 11A, the stem ring portion 42A is in a relatively high position, and the opening of the membrane core lifting body 31 depends on the balance between the rising thrust of the fluid flowing in and the descending suction of the fluid flowing out plus the sum of the elastic force of the elastic member 43 at the compressed length and the weight of the valve switch moving member, the valve switch moving member includes the valve stem 42, the valve head 44, and the membrane core lifting body 31 of the valve diaphragm 30.

[0100] For a preferred example of the valve housing 50, see Figure 3 and Figure 4 The valve housing 50 is provided with mutually connected leakage detection holes 53, which are connected to the chamber of the valve housing 50 that provides the rising accommodation space for the valve diaphragm 30. By using the leakage detection holes 53, when the membrane flexure 33 is damaged, the leaked agent will flow out from the leakage detection holes 53 first, and will not seep into the working chamber of the elastic member 43 in the valve body 20.

[0101] Regarding a more preferred example of the valve housing 50, see Figure 2 , Figure 3 and Figure 4 The valve housing 50 includes a valve inner housing 51 and a valve outer housing 52. The valve inner housing 51 has a space for accommodating the valve diaphragm 30. The valve outer housing 52 is fixedly coupled to the valve seat 10. The valve seat 10 is also provided with a fixing groove 16 for limiting the diaphragm ring fixing portion 32. When the valve outer housing 52 is fixedly coupled to the valve seat 10, the ring edge of the valve inner housing 51 limits the diaphragm ring fixing portion 32 from coming out of the fixing groove 16. With the specific structure of the valve housing 50, when the valve body 20 is coupled to the valve seat 10, the diaphragm ring fixing portion 32 of the valve diaphragm 30 is naturally and synchronously fixed, achieving the effect of quick assembly, easy disassembly and anti-leakage.

[0102] Regarding a more preferred example of the valve housing 50, see Figure 3 and Figure 4, the leakage detection hole 53 penetrates one side of the valve inner shell 51 and the valve outer shell 52, so that when leakage occurs, the leakage will be preferentially leaked from the leakage detection hole 53 to the side away from the elastic drive structure 40. By utilizing the position of the leakage detection hole 53, the leakage is relatively far away from the elastic drive structure 40 and is easy to be observed and detected, and does not affect the normal operation of the elastic drive structure 40, so as to avoid the performance deterioration of the elastic drive when leakage occurs. The valve inner shell 51 is provided with O-rings at higher and lower positions above and below the leakage detection hole 53 to reduce the unrestricted and arbitrary diffusion of the leakage. The valve inner shell 51 can also be provided with an O-ring at a relatively inner position below the periphery roughly corresponding to the fixing groove 16 of the valve seat 10 to elastically compress the membrane ring fixing portion 32 of the valve diaphragm 30.

[0103] See also Figure 2 The stem ring 42A of the valve stem 42 preferably has a cutout, and the corresponding position of the valve inner shell 51 has a limit stopper. After assembly, the valve inner shell 51 limits the rotational friction of the valve stem 42, so the rotation of the screw cap 41 will not drive the rotation of the valve stem 42. In addition, through the rotation of the stem adjustment hole 42C under tightening, the rotation of the valve stem 42 can drive the rotation of the valve inner shell 51 to adjust the alignment of the leakage detection hole 53 in the valve inner shell 51 and the valve outer shell 52.

[0104] See also Figure 5 and Figure 6 In the enlarged view, in the preferred example of preventing the leakage from infiltrating and spreading arbitrarily, corresponding to the position of the fixing groove 16, annular anti-leakage indentations can be designed on both sides of the fixing groove 16 on the surfaces in contact with the membrane ring fixing part 32 (one opening is facing close to the valve axis, and the other opening is facing away from the valve axis). The anti-leakage indentation provided on the valve seat 10 and the inserted membrane ring fixing part 32 are intentionally mismatched in shape to prevent continuous seepage of leakage in a certain direction; and the lower surface of the membrane ring fixing part 32 outside the fixing groove 16 and in tight contact with the valve seat 10 can also be designed with an annular anti-leakage indentation (the opening is parallel to the valve axis). The anti-leakage indentation provided on the valve diaphragm 30 and the contact upper surface of the valve seat 10 are also intentionally mismatched in shape to prevent continuous seepage of leakage in a certain direction.

[0105] In addition, some other embodiments of the present invention disclose an assembly method corresponding to the aforementioned membrane switch valve. Figure 7 A schematic diagram illustrating the elastic member in the assembly method; Figure 8 A schematic diagram showing the combination of the elastic member and the valve head in the assembly method; Fig. 9 A schematic diagram showing the valve housing in the assembly method; Fig.10 A schematic diagram showing the assembly method in which the elastic member is combined with the valve head and then sleeved on the valve housing; Fig.11 A schematic diagram showing the installation of a screw cap on a valve housing in an assembly method; Fig.12 A schematic diagram showing the valve diaphragm in the assembly method; Fig.13 A schematic diagram showing the combination of the valve diaphragm and the valve head in the assembly method; Fig.14 A schematic diagram showing the valve housing being arranged on the valve seat in the assembly method is shown.

[0106] A method for assembling a membrane switch valve is provided, which is used to manufacture a membrane switch valve. The method comprises:

[0107] Step S1: provide an elastic drive structure 40 of a valve body 20, such as Figure 2 Cooperate Figure 7 , Figure 8 As shown;

[0108] Step S2: Connect the elastic drive structure 40 and the valve housing 50, as shown in FIG. Figure 2 Cooperate Fig. 9 , Fig.10 As shown;

[0109] Step S3: Install the valve diaphragm 30 and the elastic drive structure 40 connected to the valve housing 50 to form the valve body 20. Figure 2 Cooperate Fig.12 , Fig.13 As shown;

[0110] Step S4, setting the valve housing 50 on the valve seat 10, and fixing the membrane ring fixing portion 32 of the valve diaphragm 30 while setting the valve housing 50 on the valve seat 10; the valve diaphragm 30 is able to close the valve core flow channel 11A due to the position and elastic force of the elastic driving structure 40 relative to the valve housing 50, as shown in FIG. Figure 2 Cooperate Fig.14 shown.

[0111] The implementation principle of this embodiment is to first assemble and connect the elastic drive structure 40 and the valve housing 50, and then install the valve diaphragm 30. When the valve housing 50 is set on the valve seat 10, the diaphragm ring fixing portion 32 of the valve diaphragm 30 can be fixed. The valve diaphragm 30 does not need to be welded to the valve seat 10 or the valve body 20, and has the effects of easy assembly and quick disassembly and good leak-proof sealing.

[0112] See also Fig.11 and Fig.14 The installation of the rotary cap 41 of the elastic driving structure 40 has freedom and can be implemented in any step from step S1 to step S4.

[0113] See also Fig.11 and Figure 8 , Figure 2In a preferred example of step S1 of providing the elastic drive structure 40 of the valve body 20, the elastic drive structure 40 includes: a screw cap 41, a valve stem 42, an elastic member 43, and a valve head 44. The screw cap 41 is screwed to the outer wall of the valve housing 50 and is located on the valve housing 50; the valve stem 42 is telescopically arranged under the screw cap 41 and is aligned with the valve axis direction 21 and is located in the valve housing 50; the elastic member 43 is sleeved on the stem of the valve stem 42 to provide the valve stem 42 with a push-out elastic force relative to the screw cap 41; the valve head 44 is fixed to one end of the valve stem 42 that is relatively far away from the screw cap 41. The screw cap 41 may not be provided in step S1. Figure 7 As shown in FIG. 1 , the valve stem 42 having the stem ring portion 42A is first inserted into the elastic member 43 and the retaining ring 45; then, a clamping ring is installed on the retaining ring 45 to preliminarily form an elastic valve stem assembly capable of fixing the elastic member 43. Figure 8 As shown, the rod coupling portion 42B of the valve stem 42 is coupled to the valve head 44 provided with an O-ring by screwing or other known fixing methods. The valve head 44 is provided with an upwardly facing rod coupling hole 44A for screwing with the rod coupling portion 42B ( Figure 3 The setting of the valve head 44 may be implemented in step S1 or after step S2.

[0114] In a preferred example of step S2 of connecting the elastic drive structure 40 and the valve housing 50, as shown in FIG. Fig. 9 As shown in FIG. 1 , the valve housing 50 is first assembled by assembling the valve inner housing 51 and the valve outer housing 52. The valve housing 50 provides an elastic working chamber for the elastic member 43 and also provides a membrane actuation space for the valve diaphragm 30. At this time, the elastic working chamber at the top is connected to the membrane actuation space at the bottom. The valve inner housing 51 can be pre-arranged with two O-rings at the upper and lower parts corresponding to the leakage detection hole 53, and then inserted into the valve outer housing 52. Fig.10 As shown, the valve stem 42 pre-sheathed with the elastic member 43 is installed in the valve housing 50; Figure 2 The stem ring portion 42A of the valve stem 42 has flat cut edges on both sides, corresponding to the protruding baffle plate of the valve inner shell 51. When the valve inner shell 51 does not rotate, the valve stem 42 cannot rotate either, which is convenient for subsequent assembly. Fig.11 As shown, step S2 further includes: screwing the external thread of the valve housing 50 with the internal thread of the screw cap 41 of the elastic drive structure 40; but not limited to, the combination operation of the screw cap 41 can be implemented in any step from step S1 to step S4.

[0115] In a preferred example of step S3 of installing the valve diaphragm 30 and the elastic drive structure 40, as shown in FIG. Fig.12 and Fig.13As shown, step S3 includes: engaging the central membrane coupling hole 31B of the valve diaphragm 30 with the central membrane coupling portion 44B of the valve head 44 included in the elastic drive structure 40. In a preferred example, step S3 is implemented in step S4, the valve diaphragm 30 is pre-placed on the valve seat 10, and the membrane ring fixing portion 32 of the valve diaphragm 30 is pre-engaged in the fixing groove 16 of the valve seat 10. After the valve body 50 is aligned and placed on the valve seat 10, the valve stem 42 is rotated to screw the membrane coupling portion 44B of the valve head 44 into the membrane coupling hole 31B of the valve diaphragm 30. Fig.13 As shown, the membrane core lifting body 31 can be better combined with the valve head 44 under the support of the knife edge ring edge 13 (or the upward inner pipe edge of the first flow channel 11).

[0116] In a preferred example of step S4 of setting the valve housing 50 on the valve seat 10, as Fig.14 As shown, step S4 includes: erecting a plurality of mounting rods 61 to penetrate the corners of the valve housing 50, pass through the valve seat 10 and fix to the valve bottom plate 62 below the valve seat 10; in the step of setting the valve housing 50 on the valve seat 10, the membrane ring fixing portion 32 of the valve membrane 30 can be fixed at the same time. The upper mounting holes of the mounting rods 61 and the lower mounting holes of the valve bottom plate 62 can be filled with anti-corrosion plugs.

[0117] In a preferred example of the present invention, the screw cap 41 and the valve stem 42 are connected by an axially collapsible elastic force, so that when the valve body 20 is closed, the membrane core lifting body 31 of the valve diaphragm 30 is kept to elastically compress the inner pipe edge (specifically the knife edge ring edge 13) of the valve seat 10 between the valve core flow channel opening 11A and the valve annular flow channel opening 12A, which is different from the principle of traditional valve closing by tightening. The membrane switch valve of the embodiment of the present invention has the appearance of a traditional tightening valve closure, but actually achieves axial elastic closure of the valve. On the other hand, when the valve body 20 is opened, the membrane core lifting body 31 of the valve diaphragm 30 maintains an upward collapsible elastic force. Driven by the collapsible elastic force of the elastic member 43, the opening of the membrane switch valve is not fixed, but is affected by the pressure difference between the higher liquid pressure of the inflow channel and the lower liquid pressure of the outflow channel. See also Figure 6 When the pressure difference between the two is greater, the opening of the membrane switch valve of the elastic member 43 is greater, so the inflow of high-pressure fluid has a higher fluid outflow speed when the valve is opened, which meets the characteristics of the switch valve.

[0118] Therefore, it can be proved that the membrane switch valve of the embodiment of the present invention has one or more of the following effects:

[0119] 1. The special features of the knife edge 13 and the elastic member 43 are combined to achieve sealing of two or more inner flow channels and zero leakage of reagents, thereby ensuring the application requirements of semiconductor corrosive chemicals;

[0120] 2. The anti-stretching design of the valve diaphragm 30 and the force acting on the membrane core lifting body 31 under fluid switching are aligned in the valve axis direction 21, which ensures or extends the operating life of the membrane switch valve product;

[0121] 3. The overall structure is easy to assemble and disassemble to prevent leakage. The valve diaphragm 30 does not require welding or non-detachable combination, and the components are easy to replace and repair;

[0122] 4. Based on the characteristic combination of the valve circulation channel 12A of the second flow channel 12 and the diffuser cone 31A of the membrane core lifting body 31, no eddy current will be generated when the fluid passes through the valve diaphragm 30, making the flow rate and flow velocity more stable, effectively meeting the semiconductor industry's requirements for high fluid stability;

[0123] 5. The reagent flows through the first flow channel 11 and the second flow channel 12 without stagnant dead zones, effectively ensuring the requirements for electronic ultrapure water transportation in the semiconductor industry. Without dead zones, stagnant dead water that can breed bacteria and cause pollution will not be generated.

[0124] The embodiments of this specific implementation method are all preferred embodiments for facilitating the understanding or implementation of the technical solutions of the present invention, and are not intended to limit the protection scope of the present invention. All equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A membrane switch valve, characterized in that: include: A valve seat having a first flow channel and a second flow channel with lateral liquid inlet and outlet ports; a valve body, arranged on the valve seat, comprising a valve diaphragm, an elastic driving structure for driving the valve diaphragm to move up and down in a valve axis direction, and a valve housing providing a space for accommodating the valve diaphragm and for connecting the elastic driving structure, wherein the valve diaphragm is used to cut off the communication between the first flow channel and the second flow channel; Wherein, the valve membrane has a membrane core lifting body aligned with the valve axial center direction, a limited membrane ring fixing part, and a membrane flexure part flexibly connecting the membrane core lifting body and the membrane ring fixing part; Wherein, the first flow channel forms a valve core flow channel opening in the valve seat that is bent upward toward the valve axis, and the direction of the valve core flow channel opening corresponds to the membrane core lifting body; the second flow channel forms a valve annular flow channel opening surrounding the valve core flow channel opening in the valve seat, and the direction of the valve annular flow channel opening corresponds to the membrane flexure; The valve seat is provided with a knife-edge ring edge on the inner pipe edge between the valve core flow channel opening and the valve annular flow channel opening, so as to contact the membrane core lifting body of the valve diaphragm when the valve body is closed; or the membrane core lifting body is provided with a knife-edge ring edge, so as to contact the inner pipe edge of the valve seat between the valve core flow channel opening and the valve annular flow channel opening when the valve body is closed; When the valve body is closed, the pressure center point of the fluid in the membrane core lifting body is located in the direction of the valve axis; The valve housing comprises a valve inner housing and a valve outer housing, wherein the valve inner housing has a space for accommodating the valve diaphragm, and the valve outer housing is fixedly coupled to the valve seat; the valve seat is also provided with a fixing groove for limiting the diaphragm ring fixing portion; when the valve outer housing is fixedly coupled to the valve seat, the annular edge of the valve inner housing limits the diaphragm ring fixing portion from falling out of the fixing groove; The elastic drive structure comprises: A screw cap is adjustably arranged on the outer side wall of the valve shell of the valve shell and is located on the valve shell, and an inner wall of the screw cap is provided with an internal thread which is screwed to the external thread of the valve shell of the valve shell; A valve stem is telescopically disposed under the screw cap and aligned with the valve axis and located in the valve housing; An elastic member, sleeved on the stem of the valve stem, to provide an elastic force for pushing the valve stem relative to the screw cap; The valve head is fixedly arranged at one end of the valve stem relatively far from the screw cap; the valve diaphragm is fixed to the valve head; when the screw cap is adjusted to rise or fall relative to the valve housing by rotating the screw cap, the valve stem, the elastic member and the valve head are relatively non-rotatable, and the elastic member with limited length provides elastic closing force to the valve diaphragm; The stem of the valve stem is provided with a stem ring portion which is pushed by one end of the elastic member, and the stem of the valve stem is sleeved with a retaining ring which is limited in the screw cap, and the retaining ring is pushed by the other end of the elastic member and moves up and down with the screw cap; A gasket is also placed in the valve housing of the valve body. The gasket is sleeved on the stem of the valve stem and is located between the retaining ring and the screw cap. When the length of the gasket is longer, the maximum lifting distance of the retaining ring relative to the screw cap will be reduced. The upper end of the valve stem is also provided with a rod adjustment hole for changing the working length of the valve stem that can be provided to the elastic member; a rod head is screwed to the upper end of the valve stem, and the rod adjustment hole is provided above the rod head. The rod head is rotated through the rod adjustment hole by a tool to change the depth of the rod head screwed into the valve stem, and the total length of the valve stem can be changed; The screw cap is configured to adjust the height position of the screw cap relative to the valve housing in a rotational manner to open and close the valve; the screw cap is aligned with the axial direction of the valve and is provided with a rod collapse hole; when the height of the screw cap relative to the valve housing is lowered until the membrane core lifting body can elastically close the valve core flow channel opening, one end of the valve stem is retracted to the rod collapse hole with a greater length; when the height of the screw cap relative to the valve housing is increased until the membrane core lifting body cannot elastically close the valve core flow channel opening, the rod ring is in a relatively high position, and the opening of the membrane core lifting body depends on the balance between the rising thrust of the fluid inflow and the descending suction of the fluid outflow plus the sum of the elastic force at the compressed length of the elastic member and the weight of the valve switch moving member, and the valve switch moving member includes the valve stem, the valve head, and the membrane core lifting body of the valve diaphragm.

2. The membrane switch valve according to claim 1, characterized in that: The first flow channel is a liquid inlet flow channel, which applies an upward thrust in the same direction as the valve axis to the membrane core lifting body; the second flow channel is a liquid outlet flow channel, which applies a downward suction in the same direction as the valve axis to the membrane core lifting body; when the valve body is closed, the elastic closing force provided by the elastic drive structure is greater than the sum of the upward thrust and the downward suction.

3. The membrane switch valve according to claim 2, characterized in that: The blade surface of the knife edge ring edge faces the valve circulation channel opening; when the knife edge ring edge is protruding on the local inner pipe edge of the valve seat, the membrane core lifting body has an indentation corresponding to the knife edge ring edge.

4. The membrane switch valve according to claim 1, characterized in that: The membrane core lifting body of the valve membrane has a diffuser cone aligned with the valve axial center direction, and the diameter of the diffuser cone is smaller than the diameter of the valve core flow channel opening.

5. The membrane switch valve according to claim 1, characterized in that: The valve housing is provided with mutually connected liquid leakage detection holes, which are connected to the chamber of the valve housing providing the rising accommodation space of the valve diaphragm.

6. The membrane switch valve according to claim 5, characterized in that: The liquid leakage detection hole penetrates through one side of the valve inner shell and the valve outer shell, so that when liquid leaks, it will first seep through the liquid leakage detection hole to the side away from the elastic driving structure.

7. A method for assembling a membrane switch valve, characterized in that: For manufacturing a membrane switch valve as claimed in claim 1, the assembly method comprises: Providing an elastic driving structure of the valve body; connecting the elastic drive structure and the valve housing; Installing the valve diaphragm and the elastic driving structure to form the valve body; The valve housing is arranged on the valve seat, and the membrane ring fixing part of the valve diaphragm can be fixed when the valve housing is arranged on the valve seat; the valve diaphragm can close the valve core flow channel opening due to the position and elastic force of the elastic driving structure relative to the valve housing; In the step of providing the elastic drive structure of the valve body, the elastic drive structure includes: a screw cap, a valve stem, an elastic member, and a valve head, wherein the screw cap is screwed to the outer side wall of the valve housing and is located on the valve housing; the valve stem is telescopically arranged under the screw cap and is aligned with the valve axis direction and is located in the valve housing; the elastic member is sleeved on the stem of the valve stem to provide the valve stem with a push-out elastic force relative to the screw cap; the valve head is fixed to one end of the valve stem relatively away from the screw cap; The step of connecting the elastic drive structure with the valve housing comprises: screwing the external thread of the valve housing with the internal thread of the screw cap of the elastic drive structure; The step of installing the valve diaphragm and the elastic drive structure comprises: engaging the central membrane coupling hole of the valve diaphragm with the central membrane coupling portion of the valve head included in the elastic drive structure; The step of arranging the valve housing on the valve seat comprises: erecting a plurality of mounting rods to pass through the corners of the valve housing, through the valve seat and fixed to the valve bottom plate below the valve seat; The screw cap and the valve stem are axially collapsible elastically connected so as to keep the membrane core lifting body of the valve diaphragm elastically pressing the inner pipe edge of the valve seat between the valve core flow channel opening and the valve annular flow channel opening when the valve body is closed.

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