Magnetic fixture, substrate support assembly, and method for securing an edge support frame to a table frame

Abstract

A magnetic fixture for securing an edge support frame (ESF) to a table frame of a deposition apparatus is described. The magnetic fixture includes a first member having a magnet and a second member having a magnetic element. The first member and the second member are each coupled to at least one of the table frame and the ESF, wherein a magnetic force between the first member and the second member is configured to secure the ESF to the table frame.

Description

Technical Field

[0001] Embodiments of this disclosure relate to a magnetic fastener, particularly a magnetic fastener for securing an edge support frame (ESF) to a stage frame of a deposition apparatus. Embodiments of this disclosure also relate to a substrate support assembly including a stage frame, an ESF, and a plurality of magnetic fasteners. Embodiments of this disclosure further relate to a method for securing an ESF to a stage frame, particularly by providing a plurality of first and a plurality of second components of the magnetic fasteners. Background Technology

[0002] Several methods are known for depositing materials onto a substrate. For example, the substrate can be coated using vapor deposition, physical vapor deposition (PVD) processes (such as sputtering, spraying, etc.), or chemical vapor deposition (CVD). The substrate on which the material is deposited, i.e., the substrate to be coated, is introduced into the vacuum chamber of a vacuum processing system and positioned relative to the processing area of ​​the vacuum chamber. For example, the coating process can be performed within the vacuum chamber.

[0003] For example, in display manufacturing technology, large-area substrates can be treated with coating processes, i.e., material deposition processes. The coated substrates can then be used in applications across several technological fields, such as in microelectronic devices, in the production of semiconductor devices, as substrates with thin-film transistors, and as insulating panels. The trend towards larger displays (e.g., in the manufacture of larger displays) necessitates larger vacuum processing systems.

[0004] In the coating process, the substrate can be held in a substrate support. The coupling between the substrate and the substrate support may involve a mechanical fastener that performs a clamping function. In view of the above, it is advantageous to provide an improved fastener for coupling the ESF to the stage frame of the deposition equipment. Summary of the Invention

[0005] According to one aspect, a magnetic fastener for securing an edge support frame to a stage frame of a deposition apparatus is described. The magnetic fastener includes: a first member having a magnet; and a second member having a magnetic element. The first member and the second member are each coupled to at least one of the stage frame and the edge support frame, wherein a magnetic force between the first member and the second member is configured to secure the edge support frame to the stage frame.

[0006] According to one aspect, a substrate support assembly is described. The assembly includes: a worktable body; a worktable frame coupled to the worktable body; and an edge support frame supported to be movable relative to the worktable frame and having a plurality of recesses. The substrate support assembly has a plurality of magnetic fasteners, each comprising: a plurality of first members including magnets; and a plurality of second members including magnetic elements. At least one of the first members and the second members is disposed in the plurality of recesses.

[0007] According to one aspect, a method for securing an edge support frame to a stage frame of a deposition apparatus is described. The method includes providing a plurality of first members coupled to the stage frame as magnetic fasteners. Each of the first members includes a magnet. The method further includes providing a plurality of second members coupled to the edge support frame as magnetic fasteners. Each of the second members has a magnetic element. The plurality of first members and the plurality of second members are arranged such that when the edge support frame is applied to the stage frame, each first member faces a second member. The method further includes applying the edge support frame to the stage frame. A plurality of magnetic forces between the first members and the second members secure the edge support frame to the stage frame. Attached Figure Description

[0008] To gain a more detailed understanding of the features and structures described above in this disclosure, reference can be made to embodiments to obtain a more specific description of the disclosure briefly outlined above. The accompanying drawings illustrate embodiments of this disclosure and are described below.

[0009] Figure 1 A schematic cross-sectional side view of a fastener according to an embodiment of the present disclosure is shown;

[0010] Figure 2 A schematic cross-sectional side view of a fastener according to an embodiment of the present disclosure is shown;

[0011] Figure 3 A schematic top view of the first component of the fastener according to an embodiment of the present disclosure is shown;

[0012] Figure 4 A schematic top view of the second component of the fastener according to an embodiment of the present disclosure is shown;

[0013] Figure 5 A schematic top view of a partial substrate support assembly according to an embodiment of the present disclosure is shown;

[0014] Figure 6A schematic side view of a substrate support assembly having multiple fasteners according to an embodiment of the present disclosure is shown.

[0015] Figure 7 A flowchart illustrating one or more methods for securing an ESF to the stage frame of a deposition apparatus, according to an embodiment of this disclosure, is shown. Detailed Implementation

[0016] The deposition system may include a substrate support assembly, which typically includes a substrate support stage (such as a stage body) and a stage frame coupled to the stage body. The stage frame can be reversibly coupled to an edge support frame (ESF). The ESF may support a mask, such as a mask for edge exclusion. The substrate may be positioned between the stage body and the edge support frame or mask.

[0017] For processing, the substrate is typically positioned between the stage frame and the ESF, with the ESF subsequently coupled to the stage frame. This holds the mask and substrate in place for processing. The process may involve tilting the substrate support assembly for coating. After processing, the ESF is separated from the stage frame, and the coated substrate is replaced. Therefore, the coupling between the stage frame and the ESF should be stable and easily detachable during processing for substrate replacement.

[0018] Reference will now be made in detail to various embodiments, each illustrated in one or more examples of these embodiments. Each example is provided for explanation and is not intended to be limiting. For example, a characteristic structure that is illustrated or described as a part of one embodiment may be used in any other embodiment or in combination with other embodiments to produce yet another embodiment. This disclosure is intended to include such modifications and variations. In the following description of the figures, the same reference numerals refer to the same or similar parts. Generally, only differences with respect to individual embodiments are described. Unless otherwise indicated, the description of a part or aspect of one embodiment may be applied to a corresponding part or aspect of another embodiment.

[0019] The embodiments described herein particularly relate to components of a deposition system for depositing materials, such as those used in the manufacture of displays on large-area substrates. According to some embodiments, the large-area substrate or the carrier supporting one or more substrates may have a diameter of at least 0.5 m. 2 The size. For example, the deposition system is suitable for processing large-area substrates, such as 5th generation substrates (corresponding to approximately 1.4m²). 2 Substrate (1.1m × 1.3m), Generation 7.5 substrate (corresponding to approximately 4.29m) 2 Substrate (1.95m × 2.2m), Generation 8.5 (corresponding to approximately 5.7m) 2Substrate (2.2m × 2.5m) or even 10th generation substrate (corresponding to approximately 8.7m) 2 The substrate (2.85m × 3.05m) can be similarly implemented, even higher generations (such as 11th and 12th generations) and corresponding substrate areas. According to a further embodiment, half the size of the aforementioned substrate generations can be processed. Alternatively or additionally, the semiconductor wafer can be processed and coated in a deposition system according to this disclosure.

[0020] The embodiments described herein particularly relate to components of a deposition system in which a substrate (which may be a substrate as described above) is loaded and unloaded in a horizontal configuration and processed, for example, coated, in a vertical configuration. In particular, components of the deposition system according to the embodiments described herein are suitable for deposition apparatuses that support substrates in different configurations, especially deposition apparatuses including tilt actuators for moving the substrate between horizontal and vertical configurations.

[0021] The embodiments described herein specifically relate to fasteners that can be reversibly coupled and disengaged. Disengagement typically involves a movement that separates the ESF from the table frame. The ESF and the table frame may be arranged horizontally, and the movement of the ESF may be performed in a substantially vertical direction. This direction should be referred to herein as the axial direction relative to embodiments of magnetic fasteners, such as those described herein.

[0022] refer to Figure 1 The magnetic fastener 100 according to the embodiment described herein is schematically shown in cross-sectional view. Figure 1 In the diagram, the magnetic fastener 100 is shown in a possible configuration in which the ESF 130 is fixed to the workbench frame 140. This configuration will be referred to herein as the coupled state, fixed state, or closed state.

[0023] According to embodiments that may be combined with other embodiments described herein, the coupling state is a result of applying the ESF to the workbench frame. According to embodiments that may be combined with other embodiments described herein, the ESF and the workbench frame should not be construed as part of the fastener.

[0024] like Figure 1As shown, according to an embodiment, the magnetic fastener 100 includes a first member 110 and a second member 120. The first member is coupled to the workbench frame 140, and the second member 120 is coupled to the ESF 130. Any coupling can be provided by fasteners, adhesives, welding, screwing, or other elements. The coupling of the first member 110 to the workbench frame 140 and / or the coupling of the second member 120 to the ESF can be a permanent coupling, particularly a coupling that is detached only during maintenance or similar operations.

[0025] like Figure 1 As shown, according to an embodiment, the first component 110 includes a magnet 112. The magnet 112 generates a magnetic field, particularly when the magnetic fixing member 100 is in a coupled state. The magnet 112 can be a permanent magnet, such as a neodymium magnet, particularly an N38NdFeB magnet. Other permanent magnets may be suitable, such as samarium cobalt magnets or alnico magnets.

[0026] According to embodiments that can be combined with other embodiments described herein, the magnet can be an electromagnet, particularly a switchable electromagnet. The electromagnet can have a coil. The coil can be adapted to interact with a magnetic element, such as a ferromagnetic element, particularly a ferromagnetic rod. The coil can be a toroidal or hollow cylinder, such that the coil has an internal hollow portion. The coil can be adapted to allow the ferromagnetic rod to be at least partially inserted into the central hollow portion of the coil, such that the ferromagnetic rod interacts with the magnetic field generated by the electromagnet, particularly causing the ferromagnetic rod to be attracted by the electromagnet. The electromagnet can be driven by a drive circuit. The drive circuit can be adapted to drive the electromagnet such that the strength of the magnetic field generated by the electromagnet is adjustable and / or variable. The adjustable and / or variable magnetic field can be advantageously used to tune the attractive force between the electromagnet and the ferromagnetic element, particularly at a specific point in time.

[0027] like Figure 1 As shown, according to an embodiment, the first component 110 may include one or more parts that are not the magnet 112. Such parts may be used for various purposes, such as housing, cooling, shielding and / or aligning the magnet 112, providing a contact surface for the ESF 130 when coupled, serving as a spacer between the ESF 130 and the workbench frame 140, allowing adjustment of the distance between the magnet 112 and the second component 120, or similar purposes.

[0028] According to embodiments that can be combined with other embodiments described herein, the second member 120 includes a magnetic element 122. The magnetic element 122 can be the second member 120. The magnetic element 122 can be a ferromagnetic element, such as a magnetic component, like a steel component, particularly a stainless steel component, such as a component comprising DIN 1.2083 steel. The magnetic element 122 can comprise a ferromagnetic material. The second member 120 can comprise additional materials or combinations of materials, such as ferrite materials, provided that when the magnetic fastener 100 is in a coupled state, the second member 120 interacts with the magnetic field generated by the magnet 112, such that an attractive force (e.g., magnetic force) is applied between the first member 110 and the second member 120. According to one embodiment, the magnetic element 122 can be a magnet configured to interact with the magnet 112, such that the magnetic element 122 and the magnet 112 attract each other, particularly in the coupled state of the magnetic fastener 100.

[0029] like Figure 1 As shown, according to an embodiment, when the magnetic fastener 100 is in a coupled state, the magnet 112 and the magnetic element 122 are in close contact, such that the magnetic force between the first member 110 and the second member 120 is at its highest. According to another embodiment, the magnetic force obtained in the closed state can be tuned by arranging the magnet 112 and the magnetic element 122 such that a defined gap exists between them. The magnetic force can be further tuned by providing magnets 112 and / or magnetic elements 122 of different sizes; or by selecting magnets 112 with different magnetization levels.

[0030] like Figure 1 As shown, according to the embodiment, magnet 112 and magnetic element 122 may have similar dimensions and may be arranged such that they interact with each other on most or all of the surfaces facing the other component. This can have the beneficial effect of applying only axial magnetic force, i.e., the force that secures the workbench frame 140 to the ESF 130, without generating radial or lateral forces.

[0031] According to embodiments that can be combined with other embodiments described herein, the magnet and / or magnetic element may be substantially disk-shaped and / or toroidal (e.g., ring-shaped and / or cylindrical) and / or include a hole / bore / indentation or similar features. Such features can be advantageous for mounting and / or aligning the magnet and / or magnetic element. Furthermore, these features can advantageously influence the magnetic field.

[0032] According to some embodiments, combinations of different forms may be advantageous, such as cylindrical magnets with disc-shaped magnetic elements or toroidal magnets with cylindrical magnetic elements, or similar combinations. According to advantageous embodiments, if the magnet and / or magnetic element is substantially circular in the axial direction, such as disc-shaped and / or toroidal, the magnet and magnetic element can be arranged coaxially. Additional advantageous shapes, such as cubes, circular cross-sections (such as hemispheres or domes), flat bands, rods, and other shapes, can be provided for the magnet and magnetic element. According to embodiments that can be combined with other embodiments described herein, the shape of the magnet and / or magnetic element can be adapted to the corresponding portion of the workbench frame and / or ESF where the fastener is located; for example, if the fastener is located within a corner portion, an L-shaped magnet and / or magnetic element may be advantageous.

[0033] like Figure 1 As shown, according to an embodiment, the second member 120 may be disposed in a recess within the ESF 130 such that the second member is flush with or slightly recessed relative to the surface of the ESF 130 opposite the worktable frame 140. This may be advantageous because the ESF 130 will not contact the worktable frame 140 at the engagement area between the magnet 112 and the magnetic element 122, thus the magnet 112 and / or the magnetic element 122 do not need to be particularly flat.

[0034] According to embodiments that can be combined with other embodiments described herein, the first component may be partially or wholly disposed in a recess within the workbench frame, which may have the same beneficial effect as disposing the second component within the recess.

[0035] According to an embodiment that can be combined with other embodiments described herein, the first component 110 may be coupled to the workbench frame 140, and the second component 120 may be coupled to the ESF 130. For clarity and simplicity, the embodiment shown in the figures illustrates this arrangement. Alternatively, according to another embodiment that can be combined with other embodiments described herein, the first component 110 may be coupled to the ESF 130, and the second component 120 may be coupled to the workbench frame 140.

[0036] According to embodiments that can be combined with other embodiments described herein, the workbench frame and / or ESF can be made of a non-magnetic material, such as aluminum, particularly ACP5080 aluminum, or high-chromium stainless steel. This limits or prevents any unwanted interaction between the magnetic field generated by the magnet and the workbench frame and / or ESF.

[0037] refer to Figure 2 The magnetic fastener 200 according to the embodiments described herein is schematically shown in cross-sectional view. The magnetic fastener 200 includes... Figure 1Several feature structures are shown in the characteristic structure of the magnetic fastener 100; only new or different feature structures should be discussed in detail. Figure 2 In the illustrated embodiment, the magnetic fastener 200 includes a contact block 210. The contact block 210 may be configured to provide a contact surface that contacts the workbench frame 140 and, when the magnetic fastener 200 is in the coupled state, contacts the ESF 130. This can be achieved by providing additional components of the first member 110 in a cavity or recess within the contact block 210 such that the edge of the contact block 210 protrudes axially toward the ESF 130 relative to the additional components of the first member 110. The contact block 210 may accommodate the magnet 112 and / or other components of the first member 110, such as the magnet housing 230 and / or the retainer 220. The contact block 210 may be adapted to couple the first member 110 to the workbench frame, for example, by providing one or more openings for the fastener 240. By providing the contact block 210, mechanical forces within the coupled magnetic fastener 200, particularly the magnetic force pressing the ESF 130 against the workbench frame 140, are guided through the contact block. Therefore, other components of the first member 110 are not subjected to these mechanical forces and therefore do not need to be constructed to withstand such mechanical stress. Furthermore, the contact block 210 may include a material at the contact surface that reduces wear at the contact surface caused by repeated coupling and disengagement of the magnetic fastener 200, particularly at the contact surface of the ESF 130. For this purpose, the contact block 210 may comprise a non-magnetic material, such as a non-magnetic sliding material, such as a polymer (e.g., a polymer coating), or be made of a polymer. The polymer may be PEEK and / or PI. The contact block may be made of bronze. The contact block may be made of particulate materials (e.g., sintered materials). The contact block 210 may be configured to dampen impacts, for example, when the ESF 130 is coupled to the table frame 140.

[0038] like Figure 2 As shown, according to an embodiment, the magnet 112 can be disposed within the first member 110 by arranging the magnet within and / or between the magnet housing 230 and the holder 220. Both the magnet housing 230 and the holder 220 can be disposed within the contact block 210 (such as the contact block described above).

[0039] like Figure 2As shown, according to an embodiment, the retainer 220 may have an opening, such as a drilled hole, particularly a counterbored hole, for providing a fastening element, such as a fastener 240, in the opening. The retainer may be configured to provide a fastening element, such as the fastener 240, for coupling the first member 110 to the workbench frame 140. The fastener 240 may project in the axial direction, for example, through the retainer 220 and the contact block 210, toward the workbench frame 140, and be secured to the workbench frame 140 within a drilled hole 274 within the workbench frame 140, thereby coupling the first member 110 to the workbench frame.

[0040] like Figure 2 As shown, according to an embodiment, the holder 220 may have an opening, such as a recess 222 for accommodating the magnet 112 and / or the magnet housing 230. The shape of the recess 222 may be adapted to the shape of the magnet 112 and / or the magnet housing 230. The recess 222 may be substantially cylindrical. The recess 222 may be a blind hole, such as a blind hole extending in an axial direction. The recess 222 may be configured to receive the magnet 112 and the magnet housing 230 from the side of the holder opposite to the second member 120. The recess 222 may be configured such that, when assembled, the magnet 112 and / or the magnet housing 230 are completely shielded from the outside of the first member 110 by the holder 220. The recess may include at least one protrusion 224, such as a protrusion extending in an axial direction toward the workbench frame. At least one protrusion may engage with magnet 112, particularly magnet 112, to secure magnet 112 and / or magnet housing 230 within the retainer against lateral movement, such as movement in the radial direction. Figure 2 As shown, the protrusion 224 may be a rod configured to be at least partially inserted into the central hole of the annular magnet.

[0041] like Figure 2 As shown, according to an embodiment, the magnet 112 may be disposed within the recess 222 together with the magnet housing 230. The magnet housing 230 may be configured to occupy at least some of the spaces within the recess 222 not filled by the magnet. The magnet housing 230 may serve as an adapter to allow magnets 112 of different sizes to be disposed within holders 220 of different sizes, recesses 222 of different sizes, and / or first members 110 of different sizes. The magnet housing 230 may secure the magnet alone or in conjunction with the protrusion 224 to prevent movement in the radial direction. Furthermore, as... Figure 2As shown, the magnet housing 230 can secure the magnet 112 against the holder 220 in the axial direction, for example, to prevent axial movement. The magnet housing 230 can restrict the axial and radial movement of the magnet 112 within the first member 110. The magnet housing 230 can be configured such that the magnet housing 230 does not directly contact the ESF side surface of the recess 222, such as... Figure 2 The resulting gap 260 is shown. Therefore, the axial force that pushes the retainer 220 toward the contact block 210 passes through the magnet 112 and can be used to fix, in particular, the force-fitting magnet 112 to prevent movement in the axial direction.

[0042] like Figure 2 As shown, according to an embodiment, the first component 110 may have an elastic element disposed within a recess 222 between the contact block 210 and the magnet housing 230. The elastic element may be a compressible component, particularly a spring or elastomer. The elastic element may be an O-ring 250. The O-ring 250 may be disposed within an annular groove in the surface of the magnet housing 230, adjacent to the inner surface of the contact block 210. The O-ring 250 may be a rubber-type O-ring, such as an O-ring made of FKM 70. The O-ring may be a spring-type O-ring, such as a Garter spring O-ring. Other types of elastic elements, such as rubber discs, helical springs, or similar types, may be suitable.

[0043] According to embodiments that can be combined with other embodiments herein, the first component 110, particularly the contact block 210, the retainer 220, the magnet housing 230, the magnet 112, and the elastic element (which may be an O-ring 250), is configured to elastically compress the elastic element in the axial direction by the action of the fastener 240. This compression results in a preload on the elastic element. The magnet housing 230, for example, uses this preload to persistently press the magnet 112 against the retainer 220. Thus, the magnet 112 is press-fitted between the magnet housing 230 and the retainer 220 in the axial direction. Typically, the preload force is chosen to securely seat the magnet within the first component 110 without causing excessive mechanical stress within the magnet 112 that could lead to breakage of the magnet 112.

[0044] According to embodiments that can be combined with other embodiments described herein, advantageous materials for the retainer 220 include stainless steel, particularly DIN 1.4301 steel. According to embodiments that can be combined with other embodiments described herein, advantageous materials for the magnet housing 230 include stainless steel, particularly DIN 1.2083 steel. If the magnet housing 230 contains a magnetizable material, such as DIN 1.2083 steel, the magnet housing 230 can advantageously influence the magnetic field of the magnet 112.

[0045] According to the embodiments described herein, by placing the magnet and / or the magnet housing within a recess in the retainer, it is ensured that the magnet does not undergo undesirable movement during operation. By press-fitting the magnet in the axial direction, some mechanical tolerances between components are possible, and differential expansion or contraction of the fastener components can be compensated for. Simultaneously, the magnet shields against unwanted influences such as temperature variations, mechanical stress due to thermal expansion or mechanical impact, chemical contamination, etc., which may negatively affect the magnet's performance over time, for example, through magnetization loss or material degradation. Furthermore, even if the magnet degrades, it can be easily accessed and replaced, thereby allowing for quick and economical maintenance of the fastener.

[0046] like Figure 2 As shown, according to an embodiment, the second component 120 may include a fastener and a magnetic element 122. The magnetic element 122 may be the second component 120, such that the fastener portion is also a magnetic element portion. Figure 2 As shown, the magnetic element may be at least partially disc-shaped. The magnetic element may have a disc-shaped portion disposed within a recess 270 within the ESF. The second member 120 may have a fastener portion and a magnetic element portion. The fastener portion may be configured to secure the second member 120 within a drilled hole 272 in the ESF. The second member may have a recess 276 disposed in a surface portion facing the first member for attaching a tool for driving the second member into the drilled hole 272. The second member 120 may be a low-cost part, such as a large-diameter flathead screw.

[0047] refer to Figure 3 The first component 300 of the magnetic fastener according to the embodiments described herein is schematically shown in a top view. The surface of the first component 300 including the contact surface for contacting the ESF in the coupled state is shown in an uncoupled configuration. The first component 300 may be a reference. Figure 1 or Figure 2 The first component 110 of the magnetic fastener 100 or magnetic fastener 200 under discussion.

[0048] like Figure 3 As shown, the first component 300 has a rectangular profile that is symmetrical both longitudinally and laterally. The first component 300 includes a retainer 220 disposed within the contact block 210. The retainer 220 has two countersunk holes provided to receive fasteners 240 to couple the first component to the workbench frame (not shown). Figure 3 The dashed lines indicating the magnet 112 and the magnet housing 230 indicate that these features are located inside the first member, behind the surface of the holder 220, and... Figure 3 The structure shown is inaccessible.

[0049] According to an embodiment that can be combined with other embodiments described herein, the contact surface of the first member 300 that contacts the ESF in a fixed state will be the contact block 210. Figure 3 The visible portion. This can be achieved by providing other components, particularly retainer 220 and fastener 240, that are slightly recessed within the contact block of the first member 300. Retainer 220 may be recessed by 0.05 mm to 1 mm. The contact surface may directly contact the ESF. In another embodiment, retainer 220 may be configured to include a contact surface, in which case retainer 220 may be configured to be flush with or even protrude from the contact block 210 within the contact block 210.

[0050] refer to Figure 4 The second component 400 of the magnetic fastener according to the embodiment described herein is schematically shown in a top view. The second component 400 is shown in a configuration where the second component 400 is coupled to the ESF 130. The ESF 130 is not part of the second component 400. The second component 400 may be a reference. Figure 1 or Figure 2 The second component 120 of the magnetic fastener 100 or magnetic fastener 200 under discussion.

[0051] like Figure 4 As shown, according to an embodiment, the second component 400 may be a single part, such that the magnetic element 122 is composed of the second component 400. Alternatively, according to an embodiment, the second component may include the magnetic element 122 and, for example, fasteners, coatings, or similar feature structures. Figure 4 As shown, the second component 400 may include a socket 276 for easy mounting of the second component 400 to the ESF 130.

[0052] refer to Figure 3 and Figure 4 According to the embodiment, the magnet 112 of the first component 300, combined with the magnet housing 230 and the magnetic element 122 of the second component 400, can interact magnetically on the disk-shaped surface portion of the respective components when the fixing members are in a coupled state. Figure 3 and Figure 4 As shown, these surface portions may have similar or equal sizes; however, according to an embodiment, the size of the first or second member may be set such that the corresponding surface portions have different sizes, for example, the second surface portion may have a larger or smaller diameter than the first surface portion.

[0053] refer to Figure 5 A partial substrate support assembly 500 according to an embodiment of the present disclosure is schematically shown in a top view. The substrate support assembly 500 includes a worktable body 510 and a worktable frame 540. The worktable body 510 may be configured to support a substrate (not shown).

[0054] like Figure 5 As shown, according to an embodiment, the workbench frame 540 may be a workbench frame according to the embodiments described herein, such as workbench frame 140. The workbench frame 540 may include a plurality of first members 110 of magnetic fasteners (such as magnetic fastener 100 or magnetic fastener 200) according to the embodiments described herein. According to an embodiment that can be combined with the embodiments described herein, the plurality of first members 110 are evenly spaced around the workbench frame 540 such that forces are evenly distributed around the substrate support assembly 500, said forces being obtained by means of the interaction of the plurality of first members 110 with a plurality of second members (not shown) to form a plurality of magnetic fasteners to secure the ESF (not shown) to the workbench frame 540. According to the embodiments, the possible configurations of the magnetic fasteners are not limited to... Figure 5 The configuration shown may include any number of magnetic fasteners in any configuration.

[0055] refer to Figure 6 A substrate support assembly 600 having multiple fasteners according to an embodiment described herein is schematically shown in a side view. The substrate support assembly 600 may include some or all of the elements of the substrate support assembly 500. The substrate support assembly 600 includes a worktable body having a worktable frame 540. The worktable frame 540 may be, according to reference... Figure 5 The workbench frame 540 is under discussion. Figure 6 In the illustrated embodiment, the first member 110 of the plurality of magnetic fasteners is disposed within a recess within the table frame. According to another embodiment that may be combined with other embodiments described herein, the first member may be disposed outside any recess, for example, coupled to a flat table frame, such that the first member protrudes axially toward the ESF 630.

[0056] like Figure 6 As shown, according to an embodiment, the substrate support assembly includes an ESF 630. The ESF 630 is drawn in solid lines as being in a coupled configuration. According to an embodiment that can be combined with other embodiments described herein, the ESF 630 includes a plurality of second members, such as second member 120, of a magnetic fastener according to an embodiment described herein. According to one embodiment, the second members may be arranged such that when the substrate support assembly is in a coupled configuration, the second members are opposite to the first member 110, such that the second members, together with the adjacent first member 110, form a magnetic fastener in a coupled state according to an embodiment of this disclosure. The plurality of second members may be disposed within a plurality of recesses within the ESF 630.

[0057] According to an embodiment that can be combined with other embodiments described herein, the substrate support assembly 600 may have a substrate (not shown) disposed between the table frame 540 and the ESF 630. The substrate may be secured between the table frame 540 and the ESF 630 by force (e.g., clamping) provided by a plurality of magnetic fasteners.

[0058] like Figure 6 As shown, according to an embodiment, the substrate support assembly 600 may include a tilting actuator 620 for tilting a portion of the substrate support assembly 600, particularly the portion including the substrate, such as a stage body having a stage frame 540 and an ESF 630 in a coupled configuration. Tilting the portion of the substrate support assembly may involve a tilting movement 624. The tilting movement may involve rotating the portion of the substrate support assembly about a common axis within a defined angular range. Tilting the substrate support assembly can move the portion of the substrate support assembly from a substantially horizontal position to a substantially vertical position, such as... Figure 6 The vertical position 626 is shown. The vertical position 626 can be advantageously used for specific stages of substrate processing operations, such as material deposition operations. The horizontal position can be advantageously used for other specific stages of substrate processing operations, such as substrate loading and / or unloading.

[0059] like Figure 6 As shown, according to an embodiment, the substrate support assembly 600 may include a lifting rod assembly, which includes a lifting rod 610 and a lifting rod driver 612. The lifting rod assembly may be configured to specifically lift portions of the substrate support assembly 600, particularly for lifting the ESF 630 along the direction of ESF movement 614. According to the embodiment described herein, the direction of ESF movement 614 may be an axial direction.

[0060] like Figure 6 As shown, according to an embodiment, the lifting rod assembly can move the base plate support assembly 600 from a coupled state to a disengaged state 616 by raising and lowering the ESF relative to the worktable frame 540 in the axial direction. This can separate the first member 110 of the plurality of magnetic fasteners from the second member 120 of the plurality of magnetic fasteners. Separating the plurality of first members from the plurality of second members allows each of the plurality of magnetic fasteners to move from a coupled state to a disengaged state.

[0061] Depending on the implementation that may be combined with other embodiments described herein, the disengagement state 616 may be used in specific stages of the substrate processing method, such as the loading and / or unloading of the substrate.

[0062] According to embodiments that can be combined with other embodiments described herein, the lifting rod assembly, particularly the lifting rod actuator, is configured to overcome the magnetic force exerted by a plurality of magnetic fasteners between the worktable frame 540 and the ESF 630. The magnetic force is typically highest when the fasteners are in the coupled state and will decrease according to the local field strength of the magnetic field presented by the magnets within the plurality of first members 110. For this purpose, the lifting rod actuator 612 may be configured to provide controlled low-speed movement, particularly during the initial phase of the separation process, to avoid a “bounce” of the ESF 630 once the initial magnetic force has been overcome. Similarly, when the ESF descends from the disengaged state 616, the lifting rod actuator 612 may be configured not to be affected by the increased attractive force and thus prevent the ESF 630 from “impacting” the worktable frame 540.

[0063] According to embodiments that can be combined with the embodiments described herein, such as the substrate support assembly described herein, particularly substrate support assembly 500 or substrate support assembly 600, can be configured to operate within a vacuum chamber, particularly a vacuum chamber of a deposition apparatus. The vacuum can be a constant vacuum or a cyclic vacuum, i.e., a vacuum state that varies between a vacuum state and a pressurized state.

[0064] refer to Figure 7 The diagram illustrates one or more methods 700 for securing an ESF to a stage frame of a deposition apparatus. In operation 710, a plurality of first components of a magnetic fastener are provided. These first components may be first components according to embodiments described herein, such as first component 110. The first components are coupled to the stage frame. Each first component includes a magnet.

[0065] like Figure 7 As shown, according to an embodiment that may be combined with other embodiments described herein, method 700 may include operation 720. In operation 720, a plurality of second components of the magnetic fastener are provided. The second components may be second components according to embodiments described herein, such as second component 120. The second components are coupled to the ESF. The second components include magnetic elements.

[0066] According to an embodiment of method 700 that can be combined with other embodiments described herein, a plurality of first members and a plurality of second members are arranged such that each first member faces a second member when ESF is applied to the table frame. This can be achieved by arranging the plurality of first members and a plurality of second members according to an embodiment of a magnetic fastener or substrate support assembly as described herein.

[0067] like Figure 7As shown, according to an embodiment that may be combined with other embodiments described herein, method 700 may include operation 730. In operation 730, an ESF is applied to a table frame. Applying the ESF to the table frame generates multiple magnetic forces between a first member and a second member. The multiple magnetic forces secure the ESF to the table frame. Applying the ESF to the table frame can cause the ESF to be coupled to the table frame.

[0068] According to an embodiment of method 700 that may be combined with other embodiments described herein, operation 730 may involve the operation of the lifting rod driver, particularly the lifting rod assembly of the base plate support assembly 600, according to the embodiments described herein.

[0069] According to an embodiment that may be combined with other embodiments described herein, method 700 may include operations for detaching the ESF from the workbench frame, such as by lifting the ESF away from the workbench frame.

[0070] According to embodiments that may be combined with other embodiments described herein, method 700 may include operations for processing a substrate. Specifically, when an ESF is applied to a stage frame, the substrate may be secured between the ESF and the stage frame. Operations for processing the substrate may include tilting the ESF applied to the stage frame and securing the substrate. Operations for processing the substrate may include depositing material onto the substrate.

[0071] According to one aspect, this disclosure relates to the use of magnetic fasteners according to one or more embodiments described herein in a method for securing an ESF to a workbench frame according to one or more embodiments described herein.

[0072] The embodiments described herein, particularly the magnetic fasteners, substrate support assemblies, and / or methods for securing ESF to the stage frame of a deposition apparatus according to the embodiments described herein, can improve upon known fasteners, such as mechanical fasteners, by providing several advantageous effects. In particular, the embodiments described herein can operate without additional mechanisms for interlocking the fasteners, and any actuators for driving such interlocking mechanisms can be omitted. Because, according to the embodiments, applying ESF to or disengaging ESF from the stage frame already includes coupling or disengaging the magnetic fastener, additional operations for coupling or disengaging (such as locking or unlocking the fastener) are not required. Furthermore, sensors for sensing proper locking or unlocking are not required. Therefore, the embodiments of this disclosure provide a simpler and more stable solution for the described objectives, which can reduce costs and system complexity and / or increase maintenance intervals and the processing speed of the associated system.

[0073] While the foregoing describes specific implementations of this disclosure, other and further implementations of this disclosure may be conceived without departing from its basic scope, and the scope of this disclosure is defined by the appended claims.

Claims

1. A magnetic fastener for securing an edge support frame to a stage frame of a deposition apparatus, the magnetic fastener comprising: A first component, comprising a magnet and a contact block for receiving the magnet. The second component includes a magnetic element, wherein The first component and the second component are each coupled to at least one of the workbench frame and the edge support frame, wherein the magnetic force between the first component and the second component is configured to secure the edge support frame to the workbench frame. When the edge support frame is applied to the workbench frame, the contact block contacts the edge support frame, and the edge of the contact block protrudes axially toward the edge support frame relative to another part of the first member.

2. The magnetic fastener according to claim 1, wherein the magnet comprises a permanent magnet.

3. The magnetic fastener according to claim 1 or 2, wherein the magnetic element comprises a ferromagnetic material.

4. The magnetic fastener according to claim 1 or 2, wherein the first component includes a magnet housing, wherein the magnet housing secures the magnet within the first component, and wherein the magnet housing restricts axial and radial movement of the magnet within the first component.

5. The magnetic retainer of claim 1, wherein the first member comprises a magnet housing, wherein the magnet housing is disposed within the retainer, and wherein the retainer is constructed according to at least one of the group consisting of: -The retainer is disposed within the contact block; - The holder has an opening for housing the magnet housing in the opening, the opening being open in an axial direction facing the workbench frame and closed in an axial direction facing the edge support frame; - The retainer is configured to provide one or more fastening elements for coupling the first member to the workbench frame; and - The retainer is configured to press the magnet housing against the contact block in the axial direction.

6. The magnetic fastener according to claim 5, wherein the magnetic fastener includes an elastic element between the magnet housing and the contact block, wherein... The elastic element is configured to be compressed between the magnet housing and the contact block, and wherein The elastic element is configured to provide force between the magnet housing and the retainer in the axial direction when the elastic element is compressed.

7. The magnetic fixing member according to claim 6, wherein the elastic element is an O-ring disposed in a groove within the magnet housing, wherein... The groove is disposed on the surface of the magnet housing adjacent to the contact block.

8. The magnetic fastener according to claim 1 or 2, wherein the magnetic element is at least partially disc-shaped.

9. The magnetic fastener according to claim 1 or 2, wherein the second member is disposed within a recess in the edge support frame.

10. The magnetic fastener according to claim 1 or 2, wherein the magnet housing is disposed within the retainer, and wherein the retainer is disposed within the contact block.

11. A substrate support assembly, comprising: Main body of the workbench; A workbench frame, which is coupled to the workbench body; An edge support frame, which is supported and movable relative to the workbench frame and has a plurality of recesses; and Multiple magnetic fasteners, the multiple magnetic fasteners including: A plurality of first components, the plurality of first components including a magnet and a contact block for receiving the magnet, wherein when the edge support frame is applied to the table frame, the contact block contacts the edge support frame, and wherein the edge of the contact block protrudes axially toward the edge support frame relative to other parts of the plurality of first components. A plurality of second components, the plurality of second components including magnetic elements, wherein at least one of the first component and the second component is disposed in the plurality of recesses.

12. The substrate support assembly of claim 11, wherein the substrate support assembly includes a plurality of lifting rods for reversibly raising or lowering the edge support frame relative to the worktable frame, wherein The edge support frame is raised to separate the plurality of magnetic fasteners between the workbench frame and the edge support frame, and wherein... Lowering the edge support frame applies the edge support frame to the worktable frame, thereby forming the plurality of magnetic fasteners.

13. The substrate support assembly according to claim 11 or 12, wherein the stage frame and the edge support frame are disposed within the vacuum chamber of the deposition apparatus.

14. The substrate support assembly of claim 11 or 12, wherein the substrate support assembly includes a tilt driver, wherein the tilt driver is configured to tilt the stage body between a horizontal position and a vertical position.

15. A method for securing an edge support frame to a stage frame of a deposition apparatus, comprising: - Provides a plurality of first components coupled to the workbench frame, each of the first components including a magnet and a contact block for receiving the magnet. - Provides a plurality of second members coupled to the edge support frame, each of the second members including a magnetic element, wherein The plurality of first members and the plurality of second members are arranged such that when the edge support frame is applied to the workbench frame, each first member faces a second member. - Apply the edge support frame to the workbench frame, wherein Multiple magnetic forces between the plurality of first components and the plurality of second components secure the edge support frame to the workbench frame. When the edge support frame is fixed to the workbench frame, the contact block contacts the edge support frame, and the edge of the contact block protrudes axially toward the edge support frame relative to another part of the first member.

16. The method of claim 15, further comprising: The substrate is fixed between the edge support frame and the worktable frame; and An inclined force is applied to the edge support frame of the workbench frame and the substrate.

17. A substrate support assembly, comprising: Main body of the workbench; A workbench frame, which is coupled to the workbench body; An edge support frame, the edge support frame being supported and movable relative to the worktable frame and having a plurality of recesses; and According to claim 1, the plurality of magnetic fasteners are disposed in the plurality of recesses; wherein the substrate support assembly includes a tilt driver, wherein the tilt driver is configured to tilt the worktable body between a horizontal position and a vertical position.

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