An in-situ gas supply and precise temperature measurement tubular furnace

Abstract

The present invention belongs to the field of in-situ temperature measurement, and specifically discloses an in-situ gas supply and precise temperature measurement tube furnace, which includes a quartz tube, a first flange, a second flange, a gas transmission pipe, a temperature measurement thermocouple, a raw material push rod, a quartz boat, a gas transmission pipe driving mechanism, a temperature measurement thermocouple driving mechanism, and a raw material push rod driving mechanism. The in-situ gas supply and precise temperature measurement tube furnace of the present invention can measure the temperature of the raw materials in the quartz tube by installing the temperature measurement thermocouple into the quartz tube. Compared with the existing embedded thermocouples, it has the advantages of precise temperature measurement, convenient disassembly and installation, and easy implementation; by combining the thermocouple with a vacuum welded bellows, the temperature at any position in the quartz tube can be measured. Compared with the existing fixed-point temperature measurement tube furnace, it has the advantages of a wide temperature measurement range and real-time adjustment of the temperature measurement point; by installing two raw material push rods at both ends of the quartz tube respectively, it is suitable for the application scenario where two raw materials need to be heated simultaneously, and has the advantage of high flexibility.

Description

Technical Field

[0001] The present invention relates to the field of in-situ temperature measurement, and particularly to an in-situ gas-supplying and precisely temperature-measuring tube furnace. Background Art

[0002] The tube furnace is a widely used heating device. According to different heating methods, it can be divided into various types such as single-temperature zone, double-temperature zone, horizontal, and vertical tube furnaces. It has the characteristics of simple structure, easy operation, and convenient control, and is widely used in fields such as material preparation, ceramic sintering, and workpiece annealing. Currently, most tube furnaces use the method of wrapping a thermal resistance wire around a quartz tube and utilize the principle of thermal radiation to heat the raw materials inside the quartz tube. This heating method is relatively easy to implement. However, due to the temperature difference between the inside and outside of the quartz tube, it is difficult to measure and control the temperature of the raw materials. At the same time, the existing tube furnaces generally install thermocouples outside the quartz tube, and the temperature measured during the heating process is the temperature of the quartz tube surface, which has a certain difference from the actual temperature of the raw materials inside the quartz tube. Especially when the set temperature is relatively low, through experimental verification, the temperature difference between the inside and outside can reach more than 100 degrees Celsius. In addition, since the traditional tube furnace uses an embedded thermocouple, when aging problems occur and need to be updated, it must be disassembled and reinstalled, which is a cumbersome process and takes a long time. At the same time, the embedded thermocouple can only measure the temperature at a fixed position and cannot measure the temperature at other positions inside the quartz tube. Especially for the case where the raw materials and the substrate need to be heated separately, it cannot meet the requirement of measuring the temperatures of both separately. Moreover, the existing tube furnaces do not have a supporting raw material feeding device, and it is necessary to use a metal rod to repeatedly push the position of the quartz boat on both sides of the quartz tube, which is a cumbersome process. Its gas supply device is single, cannot supply gas to a fixed point, has a large gas consumption, and a low utilization rate.

[0003] Chinese Patent Application No. CN202011294395.2 discloses a tube furnace temperature measurement device, including an armored thermocouple, a transmission component, and a mounting seat. Among them, the armored thermocouple is provided with multiple temperature measurement points. The transmission component includes a rotating rod and a shaft cylinder. One end of the armored thermocouple is a temperature measurement probe, and the other end is connected to the rotating rod. The transmission component is configured to drive the rotating rod to rotate, drive the armored thermocouple to rotate around the hinge point, and enable the temperature measurement probe to perform radial temperature measurement; by driving the shaft cylinder to move axially, the armored thermocouple is driven to move axially, so that the temperature measurement probe performs axial temperature measurement.

[0004] This tube furnace is mainly used to realize full-region temperature field measurement inside tube furnaces of various pipe diameters, and is suitable for the heat treatment of some materials. However, for the situations that require precise temperature control, real-time temperature measurement, fixed-point gas supply, rapid feeding of raw materials, or the need to measure the temperatures of multiple different positions inside the quartz tube, the existing tube furnaces are already difficult to handle. Summary of the Invention

[0005] In order to solve the problems existing in the existing tube furnace, such as difficult to accurately control the temperature, unable to measure the temperature accurately in real time, unable to supply gas at a fixed point, not having a convenient raw material feeding and pushing device, unable to meet the requirement of measuring the temperature at different positions of multiple targets in the quartz tube, and difficult to load and unload when replacing the thermocouple, the present invention provides an in-situ gas supply and accurate temperature measurement tube furnace.

[0006] To achieve the above object, the present invention is implemented according to the following technical solution:

[0007] An in-situ gas supply and accurate temperature measurement tube furnace, comprising a quartz tube, one end of the quartz tube is detachably connected with a first flange, and the other end is fixedly connected with a second flange;

[0008] A gas delivery pipe or a temperature measuring thermocouple with its front end extending into the quartz tube penetrates through a through hole opened on the first flange, and a raw material push rod with its front end extending into the quartz tube penetrates through another through hole opened on the first flange; a temperature measuring thermocouple with its front end extending into the quartz tube penetrates through a through hole opened on the second flange, and a raw material push rod with its front end extending into the quartz tube penetrates through another through hole opened on the second flange; the front end of the raw material push rod is detachably connected with a quartz boat for holding raw materials;

[0009] The rear ends of the gas delivery pipe, the temperature measuring thermocouple, and the raw material push rod are respectively connected with a gas delivery pipe driving mechanism, a temperature measuring thermocouple driving mechanism, and a raw material push rod driving mechanism for driving the front ends of the gas delivery pipe / temperature measuring thermocouple / raw material push rod to reciprocate horizontally in the quartz tube. The raw material push rod driving mechanism is used to push and pull the quartz boat containing raw materials to a specific position in the quartz tube. The gas delivery pipe driving mechanism is used to drive the gas delivery pipe to supply gas to a specific position of the raw materials in the quartz tube during the heating process of the quartz tube. The temperature measuring thermocouple driving mechanism is used to drive the temperature measuring thermocouple to measure the temperature at a specific position in the quartz tube in real time during the heating process of the quartz tube.

[0010] Further, the gas delivery pipe driving mechanism, the temperature measuring thermocouple driving mechanism, and the raw material push rod driving mechanism all include a metal rod and a linear guide rail mechanism. The rear end of the gas delivery pipe is fixedly connected with a welded gas delivery pipe Poland disk, and the end of the gas delivery pipe is used to connect to a gas source; the rear end of the temperature measuring thermocouple is fixedly connected with a welded temperature measuring thermocouple Poland disk, and the end of the temperature measuring thermocouple is used to connect to a temperature measuring thermocouple control end; the rear end of the raw material push rod is fixedly connected with a welded raw material push rod Poland disk; a metal rod is vertically connected to each of the welded gas delivery pipe Poland disk, the welded temperature measuring thermocouple Poland disk, and the welded raw material push rod Poland disk, and the end of the metal rod is vertically fixed on the slider of the linear guide rail mechanism.

[0011] Further, a vacuum welded bellows is sleeved outside the quartz tube, outside the gas delivery pipe, the temperature measuring thermocouple, and the rear end of the raw material push rod respectively. The front end of the vacuum welded bellows is connected to the outer wall of each through hole opened on the first flange / second flange, and the rear end of the vacuum welded bellows is connected to the Polish disc of the welded gas delivery pipe, the Polish disc of the welded temperature measuring thermocouple, and the Polish disc of the welded raw material push rod.

[0012] Further, the front end of the vacuum welded bellows is connected to the first small flange, and the rear end is connected to the second small flange. The second small flange is snap-connected to the outer wall of each through hole opened on the first flange / second flange, and the first small flange is snap-connected to the Polish disc of the welded gas delivery pipe, the Polish disc of the welded temperature measuring thermocouple, and the Polish disc of the welded raw material push rod.

[0013] Further, an air inlet can be blocked at the center of the first flange; an air outlet is provided at the center of the second flange.

[0014] Further, the telescopic length range of the welded bellows is 30% to 130% of its free length.

[0015] Compared with the prior art, the in-situ gas supply and precise temperature measurement tube furnace of the present invention can measure the temperature of the raw materials in the quartz tube by installing the temperature measuring thermocouple into the quartz tube. Compared with the existing embedded thermocouple, it has the advantages of precise temperature measurement, convenient disassembly and installation, and easy implementation; by combining the thermocouple with the vacuum welded bellows, the temperature can be measured at any position in the quartz tube. Compared with the existing fixed-point temperature measurement tube furnace, it has the advantages of a wide temperature measurement range and real-time adjustment of the temperature measurement point; by connecting the vacuum welded bellows to the stepping motor, the position of the temperature measuring thermocouple can be mechanically controlled, avoiding the jitter caused by manual adjustment of the vacuum welded bellows, and realizing precise adjustment of the position of the temperature measuring thermocouple; by installing the gas delivery pipe into the quartz tube, the raw materials in the quartz tube can be supplied with gas at a fixed point, having the advantages of less gas consumption and high utilization rate; by connecting the quartz boat to the raw material push rod and using the connection between the raw material push rod and the metal rod of the stepping motor for pushing and pulling, the synchronous and precise advancement of the temperature measuring thermocouple and the raw material position can be realized, and the position of the raw material can be precisely adjusted according to the measured temperature; by installing the two raw material push rods at both ends of the quartz tube respectively, it is suitable for the application scenario where two raw materials need to be heated simultaneously, having the advantage of high flexibility. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic structural diagram of the in-situ gas supply and precise temperature measurement tube furnace provided in the embodiment of the present invention.

[0017] Figure 2 It is a front view of the first flange provided in the embodiment of the present invention.

[0018] Figure 3Structural diagram of an in-situ gas supply and precise temperature measurement tube furnace for heating a single raw material provided in an embodiment of the present invention.

[0019] Figure 4 Structural diagram of an in-situ precise temperature measurement tube furnace for heating two raw materials provided in an embodiment of the present invention.

[0020] Reference numerals in the figure: quartz tube 1, gas transmission pipe 2, first flange 3, second small flange 4, first small flange 5, welded gas transmission pipe Poland disc 6, metal rod 7, linear guide mechanism 9, welded raw material push rod Poland disc 10, sealable air inlet 11, raw material push rod 12, quartz boat 13, temperature measurement thermocouple 14, temperature measurement thermocouple control end 15, welded temperature measurement thermocouple Poland disc 16, air outlet 17, second flange 18, vacuum welded bellows 19, gas transmission pipe through hole 20, temperature measurement thermocouple through hole 21, raw material push rod through hole port 22, screw fixing hole 23. Detailed implementation manners

[0021] To make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below with reference to embodiments. The specific embodiments described herein are only used to explain the present invention and are not used to limit the invention.

[0022] Embodiment 1

[0023] As Figure 1 , Figure 2 shown, this embodiment provides an in-situ gas supply and precise temperature measurement tube furnace for heating a single raw material, including a quartz tube 1, one end of the quartz tube 1 is detachably connected (such as bolt and nut connection, as Figure 2 shown, screw fixing holes 23 are provided on the first flange 3) with a first flange 3, and the other end is fixedly connected with a second flange 18; as Figure 2As shown, two pipe holes are provided on the first end flange 3: the upper pipe hole is the gas transmission pipe through hole 20, and the position of the gas transmission pipe through hole 20 can be adjusted through this pipe hole. The lower pipe hole is the raw material push-pull rod through hole 22, and the position of the raw material push-pull rod 12 can be adjusted through this pipe hole. The pipe holes on the second flange 18 are the same as those on the first flange 3, and will not be elaborated in this embodiment. The gas transmission pipe 2 with its front end extending into the quartz tube 1 penetrates through the gas transmission pipe through hole 20 opened on the first flange 3, and the raw material push-pull rod 12 with its front end extending into the quartz tube 1 penetrates through the raw material push-pull rod through hole 22 opened on the first flange 3. The temperature measuring thermocouple 14 with its front end extending into the quartz tube 1 penetrates through the temperature measuring thermocouple through hole 21 opened on the second flange 18, and the raw material push-pull rod 12 with its front end extending into the quartz tube 1 penetrates through the raw material push-pull rod through hole 22 opened on the second flange 18. A quartz boat 13 for holding raw materials is detachably connected to the front end of the raw material push-pull rod 12. The quartz boat 13 is used to hold the raw materials to be heated. When adding the raw materials to be heated, the first flange 3 or the second flange 18 can be removed, the raw materials to be heated can be put into the quartz boat 13, then connected to the front end of the raw material push-pull rod 12, and finally the first flange 3 or the second flange 18 is installed on the quartz tube 1.

[0024] The rear ends of the gas transmission pipe 2, the temperature measuring thermocouple 14, and the raw material push-pull rod 12 are respectively connected with a gas transmission pipe driving mechanism, a temperature measuring thermocouple driving mechanism, and a raw material push-pull rod driving mechanism for driving the front ends of the gas transmission pipe 2 / temperature measuring thermocouple 14 / raw material push-pull rod 12 to reciprocate horizontally in the quartz tube 1. The raw material push-pull rod driving mechanism is used to push and pull the quartz boat 13 containing raw materials to a specific position in the quartz tube. The gas transmission pipe driving mechanism is used to drive the gas transmission pipe to supply gas to a specific position of the raw materials in the quartz tube 1 during the heating process of the quartz tube. The temperature measuring thermocouple driving mechanism is used to drive the temperature measuring thermocouple to measure the temperature at a specific position in the quartz tube in real time during the heating process of the quartz tube.

[0025] As an example, the gas transmission pipe driving mechanism, the temperature measuring thermocouple driving mechanism, and the raw material push-pull rod driving mechanism all include a metal rod 7 and a linear guide rail mechanism 9. The rear end of the gas transmission pipe 2 is fixedly connected with a welded gas transmission pipe Poland disk 6, and the end of the gas transmission pipe 2 is used to connect to the gas source. The rear end of the temperature measuring thermocouple 14 is fixedly connected with a welded temperature measuring thermocouple Poland disk 16, and the end of the temperature measuring thermocouple 14 is used to connect to the temperature measuring thermocouple control end 15. The front end of the temperature measuring thermocouple 14 can measure the temperature at its front end point in real time. The rear end of the raw material push-pull rod 12 is fixedly connected with a welded raw material push-pull rod Poland disk 10. A metal rod 7 is vertically connected to each of the welded gas transmission pipe Poland disk 6, the welded temperature measuring thermocouple Poland disk 16, and the welded raw material push-pull rod Poland disk 10, and the end of the metal rod 7 is vertically fixed on the slider of the linear guide rail mechanism 9.

[0026] In some embodiments, vacuum welded bellows 19 are sleeved outside the quartz tube 1 on the gas delivery pipe 2, the temperature measuring thermocouple 14, and the rear end of the raw material push rod 12 respectively. The vacuum welded bellows 19 can better ensure the airtightness between the through holes on the quartz tube 1 and the gas delivery pipe 2 / temperature measuring thermocouple 14 / raw material push rod 12, so as to ensure the accuracy of temperature measurement. As an example, the front end of the vacuum welded bellows 19 is connected to the outer wall of each through hole opened on the first flange 3 / second flange 18, and the rear end of the vacuum welded bellows 19 is connected to the welded gas delivery pipe Polish disc 6, the welded temperature measuring thermocouple Polish disc 16, and the welded raw material push rod Polish disc 10. The telescopic length range of the welded bellows is 30% to 130% of its free length. By controlling the movement of the metal rod 7 on the linear guide mechanism 9, the vacuum welded bellows 19 can be accurately pushed and pulled, and a continuous change of 30% to 130% of the free length of the vacuum welded bellows 19 can be achieved at most.

[0027] It should be noted that, in some embodiments, the front end of the vacuum welded bellows 19 is connected to the first small flange 5, and the rear end is connected to the second small flange 4. The second small flange 4 is snap-connected to the outer wall of each through hole opened on the first flange 3 / second flange 18, and the first small flange 5 is snap-connected to the welded gas delivery pipe Polish disc 6, the welded temperature measuring thermocouple Polish disc 16, and the welded raw material push rod Polish disc 10 (a conventional mechanical connection method in the art, which will not be elaborated in this embodiment). In this way, the vacuum welded bellows 19 can be quickly connected, and when the vacuum welded bellows 19 needs to be replaced, the vacuum welded bellows 19 can also be quickly replaced and installed.

[0028] In some embodiments, a sealable air inlet 11 is provided at the center of the first flange 3. In this embodiment, the sealable air inlet 11 needs to be sealed; an air outlet 17 is provided at the center of the second flange 18.

[0029] Its working principle is as follows:

[0030] When a raw material needs to be heated, as Figure 3 shown, the raw material can be placed in the quartz boat 13 in the tubular furnace quartz tube 1, and then the second end of the raw material push rod 12 is connected to the quartz boat 13. By controlling the linear guide mechanism 9 to push and pull the metal rod 7, the synchronous and accurate pushing and pulling of the vacuum welded bellows 19 and the raw material push rod 12 can be achieved, and the raw material can be fed; through the control of other linear guide mechanisms 9, the corresponding positions of the gas delivery pipe 2 and the temperature measuring thermocouple 14 can be accurately controlled respectively. At this time, the front end of the gas delivery pipe 2 and the front end of the temperature measuring thermocouple 14, that is, the temperature measuring end, are both located above the quartz boat 13, and the gas can be supplied in real time at a fixed point and the actual temperature of the raw material can be accurately measured.

[0031] Embodiment 2

[0032] As Figure 4As shown in the figure, this embodiment provides an in-situ gas supply and precise temperature measurement tubular furnace for heating two raw materials, including a quartz tube 1. One end of the quartz tube 1 is detachably connected (such as bolt and nut connection) to a first flange 3, and the other end is fixedly connected to a second flange 18; as Figure 2 As shown, there are two tube holes on the first end flange 3: the upper tube hole is the through hole 21 for the temperature measurement thermocouple, through which the temperature measurement thermocouple 14 can be adjusted in position, and the lower tube hole is the through hole 22 for the raw material push rod, through which the raw material push rod 12 can be adjusted in position. The tube holes on the second flange 18 are the same as those on the first flange 3, which will not be elaborated in this embodiment; a temperature measurement thermocouple 14 with its front end extending into the quartz tube 1 is provided through the temperature measurement thermocouple through hole 21 opened on the first flange 3, and a raw material push rod 12 with its front end extending into the quartz tube 1 is provided through the raw material push rod through hole 22 opened on the first flange 3; a temperature measurement thermocouple 14 with its front end extending into the quartz tube 1 is provided through the temperature measurement thermocouple through hole 21 opened on the second flange 18, and a raw material push rod 12 with its front end extending into the quartz tube 1 is provided through the raw material push rod through hole 22 opened on the second flange 18; the front end of the raw material push rod 12 is detachably connected to a quartz boat 13 for holding raw materials. The quartz boat 13 is used to hold the raw materials to be heated. When adding the raw materials to be heated, the first flange 3 or the second flange 18 can be removed, then the raw materials to be heated are put into the quartz boat 13 and connected to the front end of the raw material push rod 12, and finally the first flange 3 or the second flange 18 is installed on the quartz tube 1;

[0033] The gas delivery pipe 2, the temperature measurement thermocouple 14, and the rear ends of the raw material push rod 12 are respectively connected to a temperature measurement thermocouple driving mechanism and a raw material push rod driving mechanism for driving the front ends of the temperature measurement thermocouple 14 / raw material push rod 12 to reciprocate horizontally in the quartz tube 1. The raw material push rod driving mechanism is used to push and pull the quartz boat 13 containing raw materials to a specific position in the quartz tube, and the temperature measurement thermocouple driving mechanism is used to drive the temperature measurement thermocouple to perform real-time temperature measurement on a specific position in the quartz tube during the heating process of the quartz tube.

[0034] In this embodiment, the air inlet 11 that can be blocked at the center of the first flange 3 is in an unblocked state for connecting to a gas source.

[0035] Its working principle is:

[0036] When two raw materials need to be heated, as Figure 4As shown, it is different from that of Embodiment 1 in that the gas supply pipe 2 at the first end of the quartz tube 1 is replaced with another temperature-measuring thermocouple 14, and the air supply is completed through the air inlet 11 that can be blocked on the first flange 3 of the quartz tube 1. First, the two raw materials are respectively placed in two quartz boats 13, and the raw materials are pushed and pulled to the corresponding positions by controlling the vacuum-welded bellows 19 through the linear guide mechanism 9 of the two raw material push-pull rods 12. Then, the front ends of the temperature-measuring thermocouples 14 are respectively pushed and pulled above the quartz boats 13 by controlling the vacuum-welded bellows 19 through the linear guide mechanism 9 of the two temperature-measuring thermocouples 14 to perform accurate temperature measurement of the two raw materials simultaneously.

[0037] Through experimental verification, when the in-situ gas supply and accurate temperature-measuring tube furnace of the present invention is used to heat selenium grains (melting point is 221 °C), the results show that when the temperature measured by the temperature-measuring thermocouple is in the range of 221 ± 10 °C, the selenium grains melt, while at this time, the temperature measured by the built-in thermocouple of the tube furnace is above 350 °C. Therefore, the in-situ gas supply and accurate temperature-measuring tube furnace of the present invention has high accuracy and great application prospects.

[0038] In summary, the in-situ gas supply and accurate temperature-measuring tube furnace of the present invention has the following beneficial effects: The in-situ gas supply and accurate temperature-measuring tube furnace of the present invention can measure the temperature of the raw materials in the quartz tube by installing the temperature-measuring thermocouple into the quartz tube. Compared with the existing built-in thermocouple, it has the advantages of accurate temperature measurement, convenient disassembly and installation, and easy implementation; by combining the thermocouple with the vacuum-welded bellows, the maximum continuous change of the free length of the welded bellows can reach 30% to 130%, and the temperature at any position in the quartz tube can be measured. Compared with the existing fixed-point temperature-measuring tube furnace, it has the advantages of a wide temperature measurement range and real-time adjustment of the temperature measurement point; by connecting the vacuum-welded bellows with the stepping motor, the position of the temperature-measuring thermocouple can be mechanically controlled, avoiding the jitter caused by manual adjustment of the vacuum-welded bellows and realizing accurate adjustment of the position of the temperature-measuring thermocouple; by installing the gas supply pipe into the quartz tube, fixed-point gas supply can be carried out for the raw materials in the quartz tube, with the advantages of less gas consumption and high utilization rate; by connecting the quartz boat with the raw material push-pull rod, when the raw material push-pull rod is connected with the metal rod of the stepping motor for pushing and pulling, the synchronous and accurate advancement of the temperature-measuring thermocouple and the raw material position can be realized, and the raw material position can be accurately adjusted according to the measured temperature; by installing the two raw material push-pull rods at both ends of the quartz tube respectively, it is suitable for the application scenario where two raw materials need to be heated simultaneously, with the advantage of high flexibility.

[0039] The technical solution of the present invention is not limited to the limitations of the above specific embodiments. Any technical deformation made according to the technical solution of the present invention falls within the protection scope of the present invention.

Claims

1. An in-situ gas supply and precise temperature measurement tube furnace, comprising a quartz tube, one end of the quartz tube is detachably connected with a first flange, and the other end is fixedly connected with a second flange; characterized in that: A gas delivery pipe or a temperature measurement thermocouple with its front end extending into the quartz tube is provided through a through hole opened on the first flange, and a raw material push rod with its front end extending into the quartz tube is provided through another through hole opened on the first flange; a temperature measurement thermocouple with its front end extending into the quartz tube is provided through a through hole opened on the second flange, and a raw material push rod with its front end extending into the quartz tube is provided through another through hole opened on the second flange; the front end of the raw material push rod is detachably connected with a quartz boat for holding raw materials; The rear ends of the gas delivery pipe, the temperature measurement thermocouple, and the raw material push rod are respectively connected with a gas delivery pipe driving mechanism, a temperature measurement thermocouple driving mechanism, and a raw material push rod driving mechanism for driving the front ends of the gas delivery pipe / temperature measurement thermocouple / raw material push rod to reciprocate horizontally in the quartz tube. The raw material push rod driving mechanism is used to push and pull the quartz boat containing raw materials to a specific position in the quartz tube. The gas delivery pipe driving mechanism is used to drive the gas delivery pipe to supply gas to a specific position of the raw materials in the quartz tube during the heating of the quartz tube. The temperature measurement thermocouple driving mechanism is used to drive the temperature measurement thermocouple to measure the temperature of a specific position in the quartz tube in real time during the heating of the quartz tube; The gas delivery pipe driving mechanism, the temperature measurement thermocouple driving mechanism, and the raw material push rod driving mechanism all include a metal rod and a linear guide rail mechanism. The rear end of the gas delivery pipe is fixedly connected with a welded gas delivery pipe Poland disk, and the end of the gas delivery pipe is used to connect to a gas source; the rear end of the temperature measurement thermocouple is fixedly connected with a welded temperature measurement thermocouple Poland disk, and the end of the temperature measurement thermocouple is used to connect to the temperature measurement thermocouple control end; the rear end of the raw material push rod is fixedly connected with a welded raw material push rod Poland disk; a metal rod is vertically connected to each of the welded gas delivery pipe Poland disk, the welded temperature measurement thermocouple Poland disk, and the welded raw material push rod Poland disk, and the end of the metal rod is vertically fixed on the slider of the linear guide rail mechanism; Outside the quartz tube, vacuum welded bellows are sleeved on the rear ends of the gas delivery pipe, the temperature measurement thermocouple, and the raw material push rod respectively. The front end of the vacuum welded bellows is connected to the outer wall of each through hole opened on the first flange / second flange, and the rear end of the vacuum welded bellows is connected to the welded gas delivery pipe Poland disk, the welded temperature measurement thermocouple Poland disk, and the welded raw material push rod Poland disk.

2. The in-situ gas supply and precise temperature measurement tube furnace according to claim 1, characterized in that: The front end of the vacuum welded bellows is connected to a first small flange, and the rear end is connected to a second small flange. The second small flange is snap-connected to the outer wall of each through hole opened on the first flange / second flange, and the first small flange is snap-connected to the welded gas delivery pipe Poland disk, the welded temperature measurement thermocouple Poland disk, and the welded raw material push rod Poland disk.

3. The in-situ gas supply and precise temperature measurement tube furnace according to claim 1, wherein: The center of the first flange is provided with an air inlet that can be blocked; the center of the second flange is provided with an air outlet.

4. The in-situ gas supply and precise temperature measurement tube furnace according to claim 1, characterized in that: The telescopic length range of the welded bellows is 30% to 130% of its free length.

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