Material fixing device for slicer

Abstract

The present application discloses a material fixing device of a slicer, including a fixing plate, a position adjustment mechanism and an adsorption mechanism, wherein the adsorption mechanism is used to adsorb and fix the material to be cut, and the adsorption mechanism is connected to the fixing plate through the position adjustment mechanism, and the position adjustment mechanism is used to adjust the relative position of the adsorption mechanism and the fixing plate. The adsorption mechanism generates negative pressure to adsorb the strip-shaped single crystal silicon ingot, thereby fixing the single crystal silicon ingot to the material fixing device of the slicer. The position adjustment mechanism adjusts the relative position of the adsorption mechanism and the fixing plate, so that the material to be cut is close to the wire saw, and then cut. The material to be cut is fixed by the adsorption mechanism, which is easy to operate. At the same time, after the cutting of the material to be cut is completed, the adsorption mechanism separates the cut single crystal silicon wafer from the material fixing device by turning off the negative pressure, which will not damage the single crystal silicon wafer, thereby achieving complete material removal and easy operation.

Description

Technical Field

[0001] The present application relates to the field of material processing technology, and in particular to a material fixing device for a slicer. Background Technology

[0002] The slicer uses a unidirectional or reciprocating motion of diamond wire or steel wire to form a relative grinding motion between the diamond wire or steel wire and the material to be cut, thereby achieving the purpose of cutting the material.

[0003] In actual use, the material to be cut is fixed by gluing the material to be cut to the glass, and then gluing the glass to the fixing device to achieve the fixed assembly of the material to be cut and the slicer. The above fixing method is cumbersome to operate, and it is inconvenient to remove the material after cutting, which affects the cutting quality of the material. SUMMARY OF THE INVENTION

[0004] The present application provides a material fixing device for a slicer, which solves the problem of inconvenient operation of fixing the material to be cut with the slicer and inconvenient material removal after cutting.

[0005] The embodiment of the present application provides a material fixing device for a slicer, comprising a fixing plate, a position adjustment mechanism and an adsorption mechanism, wherein the adsorption mechanism is used to adsorb and fix the material to be cut, the adsorption mechanism is connected to the fixing plate through the position adjustment mechanism, and the position adjustment mechanism is used to adjust the relative position of the adsorption mechanism and the fixing plate.

[0006] In the above embodiment, the material to be cut can be a single crystal silicon ingot. The single crystal silicon ingot is in the shape of a strip. The adsorption mechanism generates negative pressure to adsorb the strip-shaped single crystal silicon ingot, thereby fixing the single crystal silicon ingot to the material fixing device of the slicer. The wire saw is located below the material fixing device of the slicer, and the position adjustment mechanism adjusts the relative position of the adsorption mechanism and the fixing plate, so that the single crystal silicon ingot is close to the wire saw, and then the single crystal silicon ingot is cut. The material to be cut is fixed by the adsorption mechanism, which is convenient to operate. At the same time, after the cutting of the material to be cut is completed, the adsorption mechanism separates the cut single crystal silicon wafer from the material fixing device by turning off the negative pressure, which will not damage the single crystal silicon wafer, and achieves complete material removal and convenient operation.

[0007] In an optional technical solution, the adsorption mechanism includes an adsorption plate and an airbag, the bottom of the adsorption plate has a plurality of vents, the airbag is mounted on the adsorption plate and communicates with the vents, the material to be cut is located on the side of the adsorption plate away from the airbag, and the airbag contracts to form a negative pressure to adsorb the material to be cut to the adsorption plate.

[0008] In an alternative technical solution, the adsorption mechanism further includes a mounting plate and a first cylinder. One end of the first cylinder is fixedly connected to the mounting plate, and the other end is connected to the airbag. The first cylinder stretches the airbag to bring the top of the airbag closer to the mounting plate, so as to enhance the negative pressure formed in the airbag.

[0009] In an alternative technical solution, the adsorption mechanism further includes a connection assembly. The connection assembly includes a first connecting piece and a second connecting piece. The first connecting piece is disposed on the side of the adsorption plate facing the mounting plate, and the second connecting piece is fixedly installed on the side of the mounting plate facing the adsorption plate. The first connecting piece is detachably connected to the second connecting piece, and the adsorption plate is connected to the mounting plate through the connection assembly.

[0010] In an alternative technical solution, the first connecting piece is an iron bar, and the second connecting piece is an electromagnetic bar.

[0011] In an alternative technical solution, the position adjustment mechanism includes a translation assembly. The translation assembly includes a second cylinder and a moving plate. The moving plate is slidably connected to the fixed plate. The second cylinder is installed on the fixed plate and connected to the moving plate. The second cylinder is used to drive the moving plate to slide along a first direction. The first direction is parallel to the fixed plate and perpendicular to the extension direction of the material to be cut.

[0012] In an alternative technical solution, the position adjustment mechanism further includes a third cylinder. One end of the third cylinder is connected to the moving plate, and the other end is connected to the mounting plate. The third cylinder drives the mounting plate to approach or move away from the moving plate.

[0013] In an alternative technical solution, the material fixing device of the slicer further includes a clamping mechanism. The clamping mechanism includes a clamping assembly. The clamping assembly is disposed on the fixed plate and on both sides of the material to be cut, and is used to fix the material to be cut in the horizontal direction.

[0014] In an alternative technical solution, the clamping assembly includes a linkage plate and a bracket. One end of the linkage plate is connected to the fixed plate, and the other end is rotatably connected to the bracket. The bracket includes a fixed rod, a pressure roller, and a connecting rod. The fixed rod is rotatably connected to the linkage plate, and the pressure roller is connected to the fixed rod through the connecting rod. When the material to be cut is fixed to the adsorption mechanism, the pressure roller abuts against the material to be cut.

[0015] In an alternative technical solution, a reset member is provided between the fixed rod and the linkage plate, and the reset member drives the bracket to approach the material to be cut.

[0016] In an alternative technical solution, the clamping mechanism further includes a driving component, which is arranged on the fixing plate and is in transmission connection with the clamping component; the driving component includes a motor, a driving rod and a transmission member, the clamping component is fixedly installed on the driving rod, the motor is connected to the driving rod through the transmission member, and the motor drives the clamping component to rotate around the driving rod; the clamping component includes a first clamping component and a second clamping component, the first clamping component and the second clamping component are respectively installed on both sides of the fixing plate, and the rotation directions of the first clamping component and the second clamping component are opposite.

[0017] In an alternative technical solution, the driving component further includes a driving gear, which is installed on the output shaft of the motor, and a transmission gear is arranged at the end of the driving rod; the transmission member is slidably installed on the fixing plate; the transmission member includes a first transmission member, the first transmission member is Z-shaped, the first transmission member has a first transmission plate, a first rack and a second rack, the first rack and the second rack are respectively located at both ends of the first transmission plate, the first rack meshes with the driving gear, and the second rack meshes with the transmission gear.

[0018] In an alternative technical solution, the transmission member further includes a second transmission member, the second transmission member is T-shaped, the second transmission member has a second transmission plate, a third rack and a fourth rack, the third rack and the fourth rack are respectively located at both ends of the second transmission plate, the third rack meshes with the driving gear, and the fourth rack meshes with the transmission gear; the third rack and the first rack are respectively located on opposite sides of the driving gear.

[0019] In an alternative technical solution, the material fixing device of the slicing machine further includes a cooling mechanism, which is used to cool the wire saw of the slicing machine. The wire saw is located below the material fixing device of the slicing machine, and the moving direction of the wire saw is perpendicular to the extending direction of the material to be cut; the cooling mechanism includes a water curtain bracket, the water curtain bracket is installed on the bracket, is connected to the water pump through a water delivery pipe, and the water curtain bracket is provided with nozzles, and the nozzles face the wire saw. Description of the Drawings

[0020] Figure 1 Schematic structural diagram of the material fixing device of the slicing machine in an embodiment of the present application;

[0021] Figure 2 Schematic structural diagram of the adsorption mechanism and the position adjustment mechanism in an embodiment of the present application;

[0022] Figure 3 Schematic structural diagram of the adsorption plate in an embodiment of the present application;

[0023] Figure 4 Side view of the material fixing device of the slicing machine in an embodiment of the present application;

[0024] Figure 5 Schematic structural diagram of the fixing plate and the motor in an embodiment of the present application;

[0025] Figure 6 Schematic structural diagram of the clamping assembly in an embodiment of the present application;

[0026] Figure 7 Schematic structural diagram of the fixing plate and the driving mechanism in an embodiment of the present application.

[0027] Reference numerals:

[0028] 1 - Fixing plate; 2 - Position adjusting mechanism; 3 - Adsorption mechanism; 100 - Material to be cut; 31 - Adsorption plate; 32 - Airbag; 311 - Vent hole; 321 - Exhaust pipe; 33 - Mounting plate; 34 - First cylinder; 322 - Side wall of the airbag; 35 - Guide post; 36 - Connecting plate; 37 - First connecting piece; 38 - Second connecting piece; 39 - Connecting block; 312 - Accommodating groove; 21 - Second cylinder; 22 - Moving plate; M - First direction; 221 - T-shaped slide rail; 222 - Chute; 23 - Third cylinder; 200 - Wire saw; 4 - Clamping mechanism; 41 - Clamping assembly; 411 - Linking plate; 412 - Bracket; 4121 - Fixed rod; 4122 - Pressing roller; 4123 - Connecting rod; 413 - Return spring; 414 - Connecting disk; 51 - Motor; 52 - Driving rod; 521 - First driving rod; 522 - Second driving rod; 53 - Driving gear; 55 - Transmission gear; 54 - First transmission member; 541 - First transmission plate; 542 - First rack; 543 - Second rack; 551 - First transmission gear; 552 - Second transmission gear; 56 - Second transmission member; 561 - Second transmission plate; 562 - Third rack; 563 - Fourth rack; 57 - C-shaped frame; 6 - Cooling mechanism; 61 - Water curtain bracket; 62 - Water pipe; 63 - Nozzle; 64 - First temperature sensor; 65 - Second temperature sensor; A - Upstream; B - Downstream. Detailed implementation manners

[0029] In order to solve the problems of inconvenient fixing operation of the material to be cut and the slicing machine and inconvenient material taking after cutting, the embodiment of the present application provides a material fixing device for a slicing machine. To make the purpose, technical solution and advantages of the present application clearer, the following further describes the present application in detail with reference to the drawings and embodiments.

[0030] Figure 1 Schematic structural diagram of the material fixing device of the slicing machine in an embodiment of the present application. As Figure 1As shown, a material fixing device of a slicer provided in an embodiment of the present application includes a fixing plate 1, a position adjustment mechanism 2 and an adsorption mechanism 3. The adsorption mechanism 3 is used to adsorb and fix the material 100 to be cut, and the position adjustment mechanism 2 is arranged between the adsorption mechanism 3 and the fixing plate 1, and is used to adjust the relative position of the adsorption mechanism 3 and the fixing plate 1. The adsorption mechanism 3 is connected to the fixing plate 1 through the position adjustment mechanism 2.

[0031] In the above embodiment, the material 100 to be cut can be a single crystal silicon ingot. The single crystal silicon ingot is in the shape of a bar. The adsorption mechanism generates negative pressure to adsorb the strip-shaped single crystal silicon ingot, thereby fixing the single crystal silicon ingot to the material fixing device of the slicer. The wire saw (not shown in the figure) is located below the material fixing device of the slicer, and the position adjustment mechanism 2 adjusts the relative position of the adsorption mechanism 3 and the fixing plate 1, so that the single crystal silicon ingot is close to the wire saw, and then the single crystal silicon ingot is cut. The material 100 to be cut is fixed by the adsorption mechanism 3, which is convenient to operate. At the same time, after the cutting of the material 100 to be cut is completed, the adsorption mechanism 3 separates the cut single crystal silicon wafer from the material fixing device by turning off the negative pressure, which will not damage the single crystal silicon wafer, and realizes complete material removal and convenient operation.

[0032] Figure 2 is a schematic diagram of the structure of the adsorption mechanism and the position adjustment mechanism in one embodiment of the present application, Figure 3 is a schematic diagram of the structure of an adsorption plate in an embodiment of the present application. Please refer to Figures 1 to 3 , in a specific embodiment, the adsorption mechanism 3 may include an adsorption plate 31 and an airbag 32. The bottom of the adsorption plate 31 has a plurality of vents 311, and the airbag 32 is fixedly mounted on the adsorption plate 31 and communicated with the vents 311. The material 100 to be cut is located on the side of the adsorption plate 31 away from the airbag 32. The airbag 32 is connected to an external air pump through an exhaust pipe 321, and the air pump exhausts air to shrink the airbag 32. Negative pressure is formed in the airbag 32 to adsorb the material 100 to be cut to the adsorption plate 31. During operation, water can be sprayed on the contact surface between the single crystal silicon ingot and the adsorption plate 31 to form a water film to improve the adsorption effect.

[0033] Figure 4 is a side view of a material fixing device of a slicer in one embodiment of the present application. Please refer to Figure 1 、 Figure 2 and Figure 4。In an alternative embodiment, the above-mentioned adsorption mechanism 3 may further include a mounting plate 33 and a first cylinder 34. One end of the first cylinder 34 is fixedly connected to the mounting plate 33, and the other end is connected to the airbag 32. Specifically, the bottom of the airbag 32 is fixedly connected to the adsorption plate 31, and the mounting plate 33 is located above the adsorption plate 31. The cylinder barrel of the first cylinder 34 is fixedly installed on the mounting plate 33, and the end of the piston rod is connected to the top surface of the airbag 32. The reciprocating movement of the piston rod in the vertical direction stretches or compresses the airbag 32, thereby adjusting the negative pressure in the airbag 32. When the piston rod moves upward, the top of the airbag 32 approaches the mounting plate 33, and the airbag 32 elongates in the vertical direction, thereby enhancing the negative pressure formed in the airbag 32. Furthermore, the adsorption force of the adsorption device 3 on the single-crystal ingot is increased, and the reliability of the connection between the single-crystal ingot and the material fixing device of the slicing machine is improved. The first cylinder 34 can assist the air pump in adjusting the negative pressure in the airbag 32, and can also reduce the situation where the airbag 32 is deformed due to excessive air extraction by the air pump and excessive negative pressure in the airbag.

[0034] Please continue to refer to Figure 2 , in an alternative embodiment, the side wall 322 of the above-mentioned airbag may be wavy. Specifically, the wavy side wall makes the airbag 32 similar to a bellows, and the form of the bellows enables the airbag 32 to be more easily telescoped in the vertical direction.

[0035] In a specific embodiment, the airbag 32 may be a strip-shaped airbag. The strip-shaped airbag is placed horizontally, and the first cylinder 34 is arranged in the middle of the strip-shaped airbag 32. The above-mentioned adsorption mechanism 3 may further include guide posts 35. The number of guide posts 35 may be two. The two guide posts 35 are vertically arranged at both ends of the adsorption plate 31, on both sides of the first cylinder 34, and penetrate through the airbag 32. When the first cylinder 34 stretches the airbag 32 upward, the airbag 32 can telescope along the guide posts 35. The situation where the airbag 32 is deformed or tilted during the up and down telescoping is reduced.

[0036] In an alternative embodiment, a connecting plate 36 may be provided at the top of the above-mentioned airbag 32, and the piston rod of the first cylinder 34 may be fixedly connected to the connecting plate 36. The connecting plate 36 is relatively rigid. When the first cylinder 34 stretches the airbag 32 upward, the connecting plate 36 can lift the entire top surface of the airbag 32. The situation where the airbag 32 is stretched and deformed is reduced.

[0037] Please continue to refer to Figure 2 and Figure 4 , when specifically setting the airbag 32, two airbags 32 may be arranged in parallel on the adsorption plate 31. Each airbag 32 is connected to an air extraction pipe 321, and the two air extraction pipes 321 converge and are connected to the air pump. Two first cylinders 34 may also be provided, and each first cylinder 34 is connected to an airbag 32.

[0038] Please refer to Figures 2 to 4, in an alternative embodiment, the above-mentioned adsorption mechanism 3 may further include a connection component, which includes a first connection member 37 and a second connection member 38. The first connection member 37 is disposed on the side of the adsorption plate 31 facing the mounting plate 33, and the second connection member 38 is fixedly installed on the side of the mounting plate 33 facing the adsorption plate 31. The first connection member 37 is detachably connected to the second connection member 38, and the adsorption plate 31 is connected to the mounting plate 33 through the connection component. The first connection member 37 may be disposed in the middle of the adsorption plate, and the second connection member 38 is disposed between the two air bags 32. The positions of the first connection member 37 and the second connection member 38 correspond to each other.

[0039] When specifically selecting the above-mentioned first connection member 37 and second connection member 38, the first connection member 37 may be an iron bar, and the second connection member 38 is an electromagnetic bar. When the electromagnetic bar is energized, the electromagnetic bar is magnetically attracted to the iron bar, fixing the adsorption plate 31 to the mounting plate 33.

[0040] To reduce the volume of the electromagnetic bar, a plurality of connection blocks 39 may be provided between the electromagnetic bar and the mounting plate 33. The electromagnetic bar is fixedly connected to the mounting plate 33 through the plurality of connection blocks 39.

[0041] Please refer to Figure 3 , in an alternative embodiment, the above-mentioned adsorption plate 31 may have a receiving groove 312, and the above-mentioned air bag 32 and the first connection member 37 may be disposed in the receiving groove 312. A plurality of ventilation holes 311 are provided at the bottom of the receiving groove 312.

[0042] Please refer to Figure 4 , in an alternative embodiment, the above-mentioned position adjustment mechanism 2 may include a translation component, which includes a second cylinder 21 and a moving plate 22. The moving plate 22 is slidably connected to the fixed plate 1. The above-mentioned second cylinder 21 is installed on the fixed plate 1 and connected to the moving plate 22. The second cylinder 21 is used to drive the moving plate 22 to slide along a first direction M, and the first direction M is parallel to the fixed plate 1 and perpendicular to the extension direction of the material 100 to be cut. Specifically, the cylinder barrel of the above-mentioned second cylinder 21 is fixedly installed on the fixed plate 1, and the piston rod of the second cylinder 21 is connected to the moving plate 22. When the piston rod extends in a direction away from the cylinder barrel, it pushes the moving plate 22 to slide along the first direction M and moves the moving plate 22 to one side of the fixed plate 1.

[0043] Figure 5 It is a schematic structural diagram of the fixed plate and the motor in an embodiment of the present application. Please refer to Figure 2 and Figure 5, in a specific embodiment, a T-shaped slide rail 221 is provided on one side of the moving plate 22 facing the fixed plate 1, and a chute 222 adapted to the T-shaped slide rail 221 is provided on one side of the fixed plate 1 facing the moving plate 22. The extending directions of the chute 222 and the T-shaped slide rail 221 are the same as the first direction M. The T-shaped slide rail 221 is arranged in the chute 222 and slides along the chute 222, realizing the sliding connection between the moving plate 22 and the fixed plate 1. Of course, the T-shaped slide rail can also be arranged on the fixed plate and the chute on the moving plate, which can also realize the sliding connection between the moving plate and the fixed plate.

[0044] Please refer to Figure 2 and Figure 4 , in an alternative embodiment, the above-mentioned position adjusting mechanism 2 may further include a third cylinder 23. One end of the third cylinder 23 is connected to the moving plate 22, and the other end is connected to the mounting plate 33. The third cylinder 23 drives the mounting plate 33 to approach or move away from the moving plate 22. Specifically, the third cylinder 23 is vertically arranged on the above-mentioned moving plate 22. The cylinder barrel of the third cylinder 23 is fixedly connected to the moving plate 22, and the end of the piston rod of the third cylinder 23 is fixedly connected to the mounting plate 33. The piston rod adjusts the distance between the mounting plate 33 and the moving plate 22 by reciprocating along the cylinder barrel. When the piston rod of the third cylinder 23 extends, it drives the adsorption mechanism 3 to approach the wire saw 200, so that the single crystal ingot contacts the wire saw 200 for cutting. After cutting, the piston rod moves upward to drive the adsorption mechanism 3 away from the wire saw, so that the single crystal ingot is separated from the wire saw 200.

[0045] The working process of the above-mentioned position adjusting mechanism 2 is as follows: at the initial position, the moving plate 22 is located directly below the fixed plate 1. When preparing for feeding, the second cylinder 21 drives the moving plate 22 to move to one side of the fixed plate 1, so that the moving plate 22 drives the adsorption mechanism 3 to move to the outside of the fixed plate. After adsorbing the single crystal ingot on the adsorption plate 31, the second cylinder 21 drives the moving plate 22 back to the initial position. Then, the third cylinder 23 drives the adsorption mechanism 3 to move downward, so that the single crystal ingot approaches the wire saw 200, realizing the feeding to the wire saw 200 and cutting the single crystal ingot.

[0046] Please continue to refer to Figure 1 , in an alternative embodiment, the material fixing device of the above-mentioned slicing machine may further include a clamping mechanism 4. The clamping mechanism includes a clamping assembly 41. The clamping assembly 41 is arranged on the fixed plate 1 and is used to fix the material to be cut 100 in the horizontal direction, reducing the deviation of the material to be cut 100 being pulled by the wire saw in the horizontal direction during the cutting process. Specifically, the number of the clamping assemblies 41 is two, and they are symmetrically arranged on both sides of the fixed plate 1. A clamping space is formed between the two clamping assemblies 41, and the material to be cut 100 is limited in the clamping space.

[0047] Figure 6This is a schematic diagram of the structure of a supporting component in one embodiment of the present application. Figure 6 As shown, in a specific embodiment, the clamping assembly 41 may include a linkage plate 411 and a bracket 412. One end of the linkage plate 411 is rotatably connected to the fixed plate 1, and the other end is rotatably connected to the bracket 412. The linkage plate 411 and the bracket 412 form an obtuse angle. The bracket 412 includes a fixed rod 4121, a pressure roller 4122 and a connecting rod 4123. The fixed rod 4121 is rotatably connected to the linkage plate 411. The pressure roller 4122 is connected to the fixed rod 4121 through the connecting rod 4123. When the material to be cut is fixed to the adsorption mechanism, the pressure roller 4122 abuts against the material to be cut.

[0048] Please combine Figure 1 and Figure 6 , in a further embodiment, a reset member may be provided between the fixed rod 4121 and the linkage plate 411, and the reset member drives the bracket to approach the material to be cut. Specifically, the clamping assembly 41 includes a first clamping assembly and a second clamping assembly, and the first clamping assembly and the second clamping assembly are respectively installed on both sides of the fixed plate. The first clamping assembly and the second clamping assembly fix the single crystal silicon ingot. Under the action of the reset member, the bracket 412 tends to rotate upward. When the position adjustment mechanism 2 adjusts the position of the single crystal silicon ingot in the vertical direction. The pressure rollers 4122 of the first clamping assembly and the second clamping assembly are always in contact with the two opposite side walls of the single crystal silicon ingot.

[0049] In a specific embodiment, the reset member includes a reset spring 413 and a connecting plate 414. The connecting plate 414 and the reset spring 413 are both sleeved on the outer circumference of the fixed rod 4121. The connecting plate 414 is fixedly connected to the fixed rod 4121, and one end of the reset spring 413 is connected to the linkage plate 411, and the other end is connected to the connecting plate 414.

[0050] Please combine Figure 1 and Figure 6 . In an optional embodiment, the clamping mechanism further includes a driving assembly, which is disposed on the fixed plate 1 and is transmission-connected to the clamping assembly 41. The driving assembly includes a motor 51, a driving rod 52 and a transmission member. The clamping assembly 41 is fixedly mounted on the driving rod 52. The motor is connected to the driving rod 52 via a transmission member 53. The motor 51 drives the clamping assembly 41 to rotate around the driving rod 52. Specifically, there are two driving rods 52, which are respectively disposed on both sides of the fixed plate 1 and are rotationally connected to the fixed plate 1. The clamping assembly 41 includes a first clamping assembly and a second clamping assembly, which are respectively located on both sides of the fixed plate 1. The linkage plate of the first clamping assembly and the linkage plate of the second clamping assembly are respectively fixedly connected to the driving rods on both sides of the fixed plate. The rotation directions of the first clamping assembly and the second clamping assembly are opposite.

[0051] ​In an alternative embodiment, the transmission member has a sliding groove, and the fixing plate has a sliding block; alternatively, the transmission member has a sliding block, and the fixing plate has a sliding groove. The sliding block slides in the sliding groove to prevent the transmission member from falling off.

[0052] Figure 7 The following is a schematic structural diagram of the fixing plate and the driving mechanism in an embodiment of the present application. Please refer to Figure 1 and Figure 7 In a specific embodiment, the driving assembly further includes a driving gear 53, the driving gear 53 is installed on the output shaft of the motor 51, a transmission gear 55 is provided at the end of the driving rod 52, and the transmission member is slidably installed on the fixing plate 1. The transmission member slides along the first direction M. Specifically, the transmission member includes a first transmission member 54, the first transmission member 54 is Z-shaped, the first transmission member 54 has a first transmission plate 541, a first rack 542 and a second rack 543, the first rack 542 and the second rack 543 are respectively located at both ends of the first transmission plate 541 and extend away from the first transmission plate 541. The straight lines where the first rack 542 and the second rack 543 are located are parallel to each other. The first rack 542 meshes with the driving gear 53, and the second rack 543 meshes with the transmission gear 55.

[0053] The driving rod 52 includes a first driving rod 521 and a second driving rod 522. The first clamping assembly is installed on the first driving rod 521, and the second clamping assembly is installed on the second driving rod 522. The transmission gear 55 includes a first transmission gear 551 and a second transmission gear 552. The first transmission gear 551 is provided at the end of the first driving rod 521, and the second transmission gear 552 is provided at the end of the second driving rod 522. In this embodiment, the first rack 542 can mesh with the lower end of the driving gear 53, and the second rack 543 meshes with the upper end of the first transmission gear 551.

[0054] In another specific embodiment, the above transmission member may further include a second transmission member 56. The second transmission member 56 is T-shaped and has a second transmission plate 561, a third rack 562, and a fourth rack 563. The third rack 562 and the fourth rack 563 are respectively located at both ends of the second transmission plate 561 and extend away from the second transmission plate 561. The third rack 562 and the fourth rack 563 are on the same horizontal line. The third rack 562 meshes with the driving gear 53, and the fourth rack 563 meshes with the transmission gear 55. The third rack 562 and the first rack 542 are respectively located on opposite sides of the driving gear 53. In this embodiment, the third rack 562 meshes with the upper end of the driving gear 53, opposite to the first rack 542. The fourth rack 563 meshes with the upper end of the second transmission gear 552. When the motor 51 rotates, the first transmission member 54 and the second transmission member 56 cause the first transmission gear 551 and the second transmission gear 552 to rotate in opposite directions, so that the first clamping assembly and the second clamping assembly rotate in opposite directions, realizing the opening and closing of the clamping mechanism 4.

[0055] It should be noted that the positions of the above first transmission member and the second transmission member can be swapped left and right. The first transmission member is connected to the second clamping assembly, and the second transmission member is connected to the first clamping assembly. Alternatively, the installation positions of the above first transmission member and the second transmission member are respectively flipped up and down, so that the first rack meshes with the upper end of the driving gear, and the third rack meshes with the lower end of the driving gear. The second rack meshes with the lower end of the first transmission gear, and the fourth rack meshes with the lower end of the second transmission gear. By using the above two installation methods, the effect that the first clamping assembly and the second clamping assembly rotate in opposite directions can also be achieved, so that the clamping mechanism realizes opening and closing.

[0056] After the clamping mechanism 4 is opened, the second cylinder 21 drives the moving plate 22 to move the adsorption mechanism 3 towards the fixing plate 1 side, facilitating the feeding or picking operation.

[0057] In an alternative embodiment, the above motor 51 can be installed on the side of the fixing plate 1 through a C-shaped frame 57. One end of the C-shaped frame 57 is fixed to the upper surface of the fixing plate 1, and the other end is fixed to the lower surface of the fixing plate 1. The motor 51 is located in the hollow area of the C-shaped frame 57 and is connected to the middle section of the C-shaped frame 57. The C-shaped frame 57 makes the installation position of the motor 51 occupy less space, and the fixing plate 1 can be made thinner, reducing the overall volume of the equipment.

[0058] Please continue to refer to Figure 4, in an alternative embodiment, the material fixing device of the slicing machine may further include a cooling mechanism 6 for cooling the wire saw 200 of the slicing machine to reduce the occurrence of wire saw breakage. The wire saw 200 is located below the material fixing device of the slicing machine and moves along a first direction M. The first direction M is perpendicular to the extension direction of the material to be cut 100. The cooling mechanism 6 includes a water curtain support 61 mounted on the support. The water curtain support 61 is connected to a water pump through a water delivery pipe 62. The water curtain support 61 may be a hollow structure, and the water delivery pipe 62 communicates with the water curtain support 61. The water curtain support 61 is provided with nozzles 63 facing the wire saw 200. Specifically, the water curtain support 61 may be mounted on the first clamping assembly or the second clamping assembly. The water curtain support 61 is a hollow structure, and the nozzles 63 may be strip-shaped. The extension direction of the strip-shaped nozzles 63 is the same as the extension direction of the water curtain support 61. The water curtain support 61 is provided with one strip-shaped nozzle. Water enters the water curtain support from the water delivery pipe 62 and flows out from the nozzles 63, forming a planar water curtain that flows onto the wire saw 200 to cool the wire saw 200. Alternatively, the nozzles are circular (not shown in the figure), and the water curtain support is provided with a plurality of circular nozzles arranged along the extension direction of the water curtain support. Water enters the water curtain support from the water delivery pipe and flows out from the nozzles, forming a plurality of water columns that flow onto the wire saw to cool the wire saw.

[0059] In an alternative embodiment, the cooling mechanism 6 may further include a first temperature sensor 64 and a second temperature sensor 65. The first temperature sensor 64 and the second temperature sensor 65 are mounted on the water curtain support 61 and are respectively disposed on both sides of the nozzles 63. The first temperature sensor 64 is used to detect the temperature of the wire saw 200 at the upstream A, and the second temperature sensor 65 is used to detect the temperature of the wire saw 200 at the downstream B. Specifically, when maintaining the wire saw 200, the wire saw 200 can be moved unidirectionally along the first direction M and operate at a low speed. The first direction M is perpendicular to the extension direction of the single crystal ingot. The cooling mechanism 6 may be disposed on the clamping assembly at the downstream B end of the wire saw 200. The first temperature sensor 64 and the second temperature sensor 65 measure the temperature of the wire saw 200 twice before and after cooling, and determine whether the steel wire or diamond wire of the wire saw 200 is broken based on the measured temperature. If the temperatures measured by the first temperature sensor 64 and the second temperature sensor 65 are the same, it indicates that the steel wire or diamond wire has broken. If there is a temperature difference between the temperatures measured by the first temperature sensor 64 and the second temperature sensor 65, it indicates that the steel wire or diamond wire has not broken. The first temperature sensor 64 and the second temperature sensor 65 achieve online monitoring of the wire saw state. When it is detected that the wire saw is broken, the staff can replace the diamond wire or steel wire in time, reducing the situation where the material cutting quality is poor due to wire saw breakage. At the same time, online monitoring enables personnel to understand the working state of the wire saw in time without going to the site, improving the efficiency of wire saw maintenance work.

[0060] When specifically selecting the above-mentioned first temperature sensor 64 and second temperature sensor 65, an infrared induction strip can be used as the first temperature sensor 64 and the second temperature sensor 65.

[0061] In an alternative embodiment, the material fixing device of the above slicer may further include a PLC controller (not shown in the figure). The PLC controller is electrically connected to the adsorption mechanism, the position adjustment mechanism, and the cooling mechanism respectively, and is used to control the operation of each mechanism and monitor the temperature.

[0062] In the description of the present application, it should be noted that the orientation or positional relationship indicated by terms such as "upper", "lower", "top", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0063] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalent technologies, the present application is also intended to include these changes and modifications.

Claims

1. A material fixing device for a slicer, characterized in that: It includes a fixed plate, a position adjustment mechanism and an adsorption mechanism, wherein the adsorption mechanism is used to adsorb and fix the material to be cut, the adsorption mechanism is connected to the fixed plate through the position adjustment mechanism, and the position adjustment mechanism is used to adjust the relative position of the adsorption mechanism and the fixed plate; The adsorption mechanism includes an adsorption plate and an air bag. The bottom of the adsorption plate has a plurality of vents. The air bag is mounted on the adsorption plate and communicates with the vents. The material to be cut is located on a side of the adsorption plate away from the air bag. The air bag contracts to form a negative pressure to adsorb the material to be cut to the adsorption plate. The air bag is connected to an external air pump. The adsorption mechanism also includes a mounting plate and a first cylinder, one end of the first cylinder is fixedly connected to the mounting plate, and the other end is connected to the airbag; the first cylinder stretches the airbag so that the top of the airbag is close to the mounting plate to enhance the negative pressure formed in the airbag.

2. The material fixing device of the slicer according to claim 1, characterized in that: The adsorption mechanism also includes a connecting component, which includes a first connecting member and a second connecting member. The first connecting member is arranged on the side of the adsorption plate facing the mounting plate, and the second connecting member is fixedly installed on the side of the mounting plate facing the adsorption plate. The first connecting member and the second connecting member are detachably connected, and the adsorption plate is connected to the mounting plate through the connecting component.

3. The material fixing device of the slicer according to claim 2, characterized in that: The first connecting member is an iron bar, and the second connecting member is an electromagnetic bar.

4. The material fixing device of a slicer according to claim 1, characterized in that: The position adjustment mechanism includes a translation assembly, which includes a second cylinder and a movable plate, wherein the movable plate is slidably connected to the fixed plate, the second cylinder is installed on the fixed plate and connected to the movable plate, and the second cylinder is used to drive the movable plate to slide along a first direction, wherein the first direction is parallel to the fixed plate and perpendicular to the extension direction of the material to be cut.

5. The material fixing device of the slicer according to claim 4, characterized in that: The position adjustment mechanism also includes a third cylinder, and the adsorption mechanism also includes a mounting plate. One end of the third cylinder is connected to the movable plate, and the other end is connected to the mounting plate. The third cylinder drives the mounting plate to move closer to or away from the movable plate.

6. The material fixing device of a slicer according to claim 1, characterized in that: It also includes a clamping mechanism, which includes a clamping assembly. The clamping assembly is arranged on the fixing plate and located on both sides of the material to be cut, and is used to fix the material to be cut in a horizontal direction.

7. The material fixing device of a slicer according to claim 6, characterized in that: The clamping assembly comprises a linkage plate and a bracket, one end of the linkage plate is connected to the fixed plate, and the other end is rotatably connected to the bracket; The bracket includes a fixed rod, a pressure roller and a connecting rod. The fixed rod is rotatably connected to the linkage plate. The pressure roller is connected to the fixed rod through the connecting rod. When the material to be cut is fixed to the adsorption mechanism, the pressure roller abuts against the material to be cut.

8. The material fixing device of a slicer according to claim 7, characterized in that: A reset member is provided between the fixing rod and the linkage plate, and the reset member drives the bracket to approach the material to be cut.

9. The material fixing device of a slicer according to claim 7, characterized in that: The clamping mechanism further comprises a driving assembly, which is disposed on the fixing plate and is transmission-connected to the clamping assembly; The driving assembly includes a motor, a driving rod and a transmission member, the clamping assembly is fixedly mounted on the driving rod, the motor is connected to the driving rod through the transmission member, and the motor drives the clamping assembly to rotate around the driving rod; The clamping assembly includes a first clamping assembly and a second clamping assembly. The first clamping assembly and the second clamping assembly are respectively installed on two sides of the fixing plate. The first clamping assembly and the second clamping assembly rotate in opposite directions.

10. The material fixing device of a slicer according to claim 9, characterized in that: The driving assembly further comprises a driving gear, the driving gear is mounted on the output shaft of the motor, a transmission gear is provided at the end of the driving rod, and the transmission member is slidably mounted on the fixing plate; The transmission member includes a first transmission member, which is Z-shaped and has a first transmission plate, a first rack and a second rack, the first rack and the second rack are respectively located at two ends of the first transmission plate, the first rack is meshed with the driving gear, and the second rack is meshed with the transmission gear.

11. The material fixing device of a slicer according to claim 10, characterized in that: The transmission member also includes a second transmission member, which is T-shaped and has a second transmission plate, a third rack and a fourth rack, the third rack and the fourth rack are respectively located at two ends of the second transmission plate, the third rack is meshed with the driving gear, and the fourth rack is meshed with the transmission gear; the third rack and the first rack are respectively located on opposite sides of the driving gear.

12. The material fixing device of a slicer according to claim 7, characterized in that: It also includes a cooling mechanism, which is used to cool the wire saw of the slicer, the wire saw is located below the material fixing device of the slicer, and the moving direction of the wire saw is perpendicular to the extending direction of the material to be cut; The cooling mechanism comprises a water curtain bracket, which is installed on the bracket, connected to a water pump via a water pipe, and provided with a nozzle, which faces the wire saw.

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