A heating device for crystal bonding and a method of crystal bonding

Abstract

The application discloses a heating device for crystal bonding and a crystal bonding method, relates to the field of bonding technology, and comprises a barrel body, further comprises two electrode supports which are arranged at intervals, the barrel body is fixed on the two electrode supports, and a plurality of barrel bodies are arranged at intervals on the electrode supports along the barrel body axis, and the axes of the barrel bodies are collinear. The application has the effect of reducing the occurrence of bending of the barrel body with high height.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of bonding technology, and in particular to a heating device for crystal bonding and a crystal bonding method. BACKGROUND

[0002] Bonding is a technology of combining two pieces of surface-cleaning, atomically flat, homogenous or heterogeneous crystal materials under certain conditions through surface cleaning and activation treatment, van der Waals force, molecular force, or even atomic force to make the crystal bonding into one.

[0003] In related technology, a graphite heating body includes a cylinder, the cylinder is made of graphite material, the cylinder is vertical, a plurality of interval grooves are uniformly and interval set around the cylinder axis on the side wall of the cylinder. Any two adjacent interval grooves, one of which penetrates to the upper side of the cylinder, and the other penetrates to the lower side of the cylinder. The opposite sides of the cylinder are integrally formed with electrodes. In actual application, the workpiece can be erected in the cylinder, and the two electrodes are connected to the positive and negative electrodes of the power supply respectively. The resistance of graphite is large, and the cylinder will generate high heat and heat the workpiece.

[0004] In the above related technology, the height of the graphite heating body cylinder can be designed to be about 400 mm without changing the thickness. When the height of the cylinder exceeds 400 mm, the cylinder itself is easy to bend at high temperature, and there is room for improvement. SUMMARY

[0005] In order to improve the situation that the height of the graphite heating body cylinder is high and easy to bend in the related technology, the present application provides a heating device for crystal bonding and a crystal bonding method.

[0006] In a first aspect, the present application provides a heating device for crystal bonding, which adopts the following technical solution:

[0007] A heating device for crystal bonding includes a cylinder and an electrode support. The electrode support is interval set with two, the cylinder is fixed and erected on the two electrode supports, and the cylinder is interval set along the cylinder axis on the electrode support, and the axis of each cylinder is collinear.

[0008] By adopting the technical scheme, the plurality of barrels are connected in parallel through the two electrode supports and independently dissipate heat. In actual application, the crystal can be placed in the barrels, and the two electrode supports are respectively connected to the positive electrode and the negative electrode of the power supply, and all the barrels jointly heat the crystal, which helps to reduce the bending of the barrels with high height.

[0009] Preferably, the barrel comprises two half-barrels, and the two half-barrels are symmetrically arranged along the barrel axis. The two sides of each half-barrel in the arc direction are respectively fixed to the two electrode supports.

[0010] By adopting the technical scheme, in actual application, all the half-barrels on one side can be first installed on the two electrode supports, then the structure for fixing the crystal and the crystal are installed, and finally all the half-barrels on the other side are installed on the two electrode supports, thereby helping to ensure the convenience of installing the crystal.

[0011] Moreover, when any half-barrel is damaged, it can be replaced individually, which helps to reduce the maintenance cost.

[0012] Preferably, the edge of the half-barrel in the arc direction is fixed with a connecting lug, the electrode support is provided with a graphite bolt, the graphite bolt penetrates through the connecting lug, and the end of the graphite bolt is screwed into the electrode support.

[0013] By adopting the technical scheme, the connecting lug is locked to the electrode support by the graphite bolt, and the graphite bolt can withstand high temperature, thereby helping to ensure the stability of the half-barrel.

[0014] Preferably, the connecting lug and the graphite bolt are both arranged corresponding to the half-barrel. The positioning hole is formed in each connecting lug, and the end of each graphite bolt penetrates through the electrode support and penetrates into the positioning hole of the other connecting lug.

[0015] By adopting the technical scheme, the consistency of the height of the two half-barrels after installation can be ensured, and the stability of the installation of the two half-barrels on the electrode support can be improved.

[0016] Preferably, the electrode support is provided with a stepped groove, and the connecting lug is embedded in the stepped groove.

[0017] By adopting the technical scheme, the stability of the half-barrel on the electrode support can be improved.

[0018] Preferably, the barrel is vertical, and the side wall of the half-barrel is provided with a spacing groove penetrating therethrough. The spacing grooves are uniformly and spacedly arranged on the half-barrel along the barrel axis. In any two adjacent spacing grooves, one of the spacing grooves penetrates to the upper side of the barrel, and the other spacing groove penetrates to the lower side of the barrel.

[0019] By adopting the technical scheme, the resistance formed by the half cylinder has a longer length, so that good heating efficiency is ensured.

[0020] Preferably, the lower side of each electrode support is fixed with a mounting seat.

[0021] By adopting the technical scheme, the stability of the crystal bonding heating device installed on the corresponding equipment is ensured.

[0022] Preferably, a waist-shaped hole is formed in the mounting seat, and the length direction of the waist-shaped hole is perpendicular to the axis of the cylinder.

[0023] By adopting the technical scheme, when the crystal bonding heating device is installed on the corresponding equipment, the mounting seat can be locked and fixed on the corresponding equipment by screwing the bolt through the waist-shaped hole, and the position of the crystal bonding heating device can be adjusted through the waist-shaped hole when the bolt is tightened, which helps to ensure the correctness of the installation position of the crystal bonding heating device on the corresponding equipment.

[0024] Preferably, the cylinder is vertical, and the two sides of the half-cylinder in the arc direction are fixed with connecting ears, and the two connecting ears are located on the lower side of the half-cylinder. Two connecting grooves are formed in each electrode support from top to bottom, and the two connecting ears are embedded in the corresponding connecting grooves from top to bottom.

[0025] By adopting the technical scheme, the two connecting ears are respectively embedded and matched in the corresponding connecting grooves, which helps to improve the convenience of installing the half-cylinder on the two electrode supports.

[0026] Preferably, a V-shaped groove is formed in the lower side wall of each connecting groove, and the groove opening of the V-shaped groove is upward. A V-shaped connecting body is fixed to the lower side of each connecting ear, and the small end of the V-shaped connecting body is downward and embedded in the V-shaped groove.

[0027] By adopting the technical scheme, under the self-gravity of the half-cylinder, the V-shaped connecting body will be closely attached to the side wall of the V-shaped groove, which helps to ensure the stability of the electrical conduction between the electrode support and the half-cylinder.

[0028] Preferably, a seat body is arranged on the lower side of each electrode support, a rotating frame is rotatably arranged on the seat body, the rotating axis of the rotating frame is vertical, and the two electrode supports are fixed on the rotating frame. The rotating axis of the rotating frame is collinear with the axis of the cylinder.

[0029] A relay electrode is arranged on the seat body, the relay electrode is arranged in an arc structure horizontally, the center of curvature of the relay electrode is on the axis of the cylinder, and two relay electrodes are symmetrically arranged with the axis of the cylinder as the symmetric axis. The two relay electrodes are arranged at intervals.

[0030] The lower sides of the two electrode supports respectively contact the two relay electrodes, and the seat body is further provided with a driving component for driving the rotating frame to rotate.

[0031] By using the above technical solution, the rotating frame is driven to rotate by the driving component, and the two electrode supports and the cylinder body will rotate synchronously, which helps to ensure the uniformity of heating the crystal and the quality of bonding the crystal.

[0032] Preferably, an insulating support block is arranged between the two relay electrodes, and the upper side of the insulating support block is flush with the upper side of the relay electrode.

[0033] The lower side of the rotating frame is provided with a support ring frame, the support ring frame is located at the lower side of the rotating frame, the axis of the support ring frame is collinear with the rotating axis of the rotating frame, and the rotating frame abuts against the upper side of the support ring frame; a sliding column is vertically fixed downward on the lower side of the support ring frame, the sliding column penetrates downward into the seat body and is in sliding fit with the seat body, and an elastic member is arranged in abutting contact between the support ring frame and the seat body.

[0034] By using the above technical solution, on the one hand, the insulating support block is filled between the two relay electrodes, reducing the situation that the electrode support is stuck between the two relay electrodes. On the other hand, when the two relay electrodes and the electrode support are worn, the support ring frame will compress the elastic member, and the two electrode supports will descend and continuously and stably abut against the relay electrode, thereby helping to stabilize the conduction of the relay electrode and the electrode support and helping to ensure the normal heating operation of the cylinder body on the crystal.

[0035] Preferably, the rotating frame is annular, an annular groove is formed around the outer wall of the rotating frame, the driving component includes a driving motor, a driving wheel and a transmission wire, the driving motor is fixed on the seat body, the driving wheel is coaxially fixed on the output shaft of the driving motor, the transmission wire is in closed annular shape, and the transmission wire is wound around the annular groove and the driving wheel and is in transmission connection with the driving wheel and the rotating frame.

[0036] By using the above technical solution, on the one hand, the driving wheel is driven to rotate by the driving motor, and the rotating frame is driven to rotate by the transmission wire, thereby specifically realizing the driving operation of the rotating frame and the cylinder body. On the other hand, the transmission wire is in transmission connection with the driving wheel and the rotating frame, reducing the situation that a large amount of heat is conducted to the driving motor and causes damage to the driving motor.

[0037] On the other hand, the application provides a crystal bonding method, which uses the following technical solution:

[0038] A crystal bonding method, comprising the following steps:

[0039] Two electrode supports are installed in the furnace chamber of a vacuum furnace, and the two electrode supports are respectively connected to the positive and negative poles of a power supply.

[0040] mounting all the half cylinders on one side on the two electrode supports;

[0041] mounting the crystal to be bonded on the mold, supporting the crystal to be bonded by the mold, and placing the mold and the crystal to be bonded between the two electrode supports;

[0042] mounting each half cylinder on the other side on the two electrode supports, and placing the mold and the crystal to be bonded in all the cylinder bodies;

[0043] starting the vacuum furnace, and vacuumizing the furnace chamber of the vacuum furnace;

[0044] powering the two electrode supports, and synchronously heating all the half cylinders to heat the crystal to be bonded until the required bonding temperature is reached and a constant temperature maintaining stage is entered;

[0045] after the constant temperature maintaining stage, cooling the cylinder bodies, the mold and the crystal, and finally opening the vacuum furnace to take out the bonded crystal, and completing the bonding operation.

[0046] By adopting the technical scheme, on one hand, the bonding operation of the crystal is realized; on the other hand, all the half cylinders on one side are mounted first, and then the mold and the crystal to be bonded are mounted, at this time, the mold and the crystal to be bonded can be conveniently mounted and adjusted, thereby improving the convenience of mounting and adjusting the mold and the crystal to be bonded.

[0047] It should be noted that in the related art, the cylinder body of the graphite heating body is integral, in the crystal bonding operation, the cylinder body is generally mounted first, and the mold and the crystal to be bonded are hoisted into the cylinder, at this time, the positions of the mold and the crystal to be bonded are difficult to adjust, thereby causing the mounting of the mold and the crystal to be bonded to be complicated. BRIEF DESCRIPTION OF DRAWINGS

[0048] Figure 1 the axial measurement schematic view mainly embodying the overall structure of the heating device for crystal bonding of the embodiment one;

[0049] Figure 2 the exploded schematic view mainly embodying the structure of the heating device for crystal bonding of the embodiment one;

[0050] Figure 3 the schematic view mainly embodying the structure of the molybdenum heat preservation barrel of the embodiment one;

[0051] Figure 4 the exploded schematic view mainly embodying the structure of the molybdenum heat preservation barrel and the graphite crucible of the embodiment one;

[0052] Figure 5 the schematic view mainly embodying the structure of the mold of the embodiment one;

[0053] Figure 6This is a schematic diagram illustrating the structure of the heating device for crystal bonding, as shown in Example 2.

[0054] Figure 7 This is an exploded view of Example 2, mainly illustrating the V-shaped connector and V-groove structure;

[0055] Figure 8 This is a schematic diagram illustrating the structure of the heating device for crystal bonding, as shown in Example 3.

[0056] Figure 9 This is an exploded view of the supporting ring frame structure, which is the main feature of Example 3.

[0057] Reference numerals: 1. Electrode support; 11. Mounting base; 12. Waist-shaped hole; 13. Stepped groove; 14. Connecting groove; 141. V-groove; 2. Cylinder; 21. Half cylinder; 22. Connecting lug; 221. V-shaped connector; 23. Positioning hole; 24. Spacer groove; 3. Graphite bolt; 4. Graphite crucible; 41. Graphite cover; 5. Mold; 51. Placement groove; 6. Molybdenum insulation barrel; 61. Molybdenum cover; 7. Base; 71. Rotating frame; 711. Circular groove; 72. Relay electrode; 721. Insulating support block; 73. Support ring frame; 731. Sliding column; 732. Compression spring; 733. Rotating ring groove; 8. Drive component; 81. Drive motor; 82. Drive wheel; 83. Transmission line; 9. Graphite electrode; 100. Crystal to be bonded. Detailed Implementation

[0058] The following is in conjunction with the appendix Figures 1-9 This application will be described in further detail.

[0059] In related technologies, the formula for calculating the resistance of a graphite heating element is: R = k * (L / S), where R is the resistance of the graphite heating element, k is the resistivity of graphite, L is the total length of the unidirectional current flow path in the graphite heating element, and S is the cross-sectional area of ​​the heating element. Increasing the thickness of the sidewall of the cylinder will reduce the resistance of the graphite heating element.

[0060] This application discloses a heating device for crystal bonding and a crystal bonding method.

[0061] Example 1:

[0062] Reference Figure 1 and Figure 2The utility model provides a crystal bonding heating device, including electrode support 1 and cylinder 2, and electrode support 1 and cylinder 2 are all graphite material.Electrode support 1 is vertical, and two are arranged in the horizontal direction between electrode support 1.Cylinder 2 is located between two electrode support 1, and the axis of cylinder 2 is vertical, and the both sides of cylinder 2 in the horizontal direction are fixed with two electrode support 1.Cylinder 2 is arranged in the vertical direction between two electrode support 1, and a plurality of are arranged in the vertical direction between two electrode support 1.In practical application, the crystal to be bonded is placed in cylinder 2, and the positive pole and the negative pole of power supply are connected with two electrode support 1 respectively, and the crystal is heated by a plurality of parallel cylinder 2.

[0063] Specifically, the lower side of the two electrode support 1 is integrally formed with a mounting seat 11, and the two mounting seats 11 extend in directions away from each other. A waist-shaped hole 12 is vertically formed in each of the two mounting seats 11, and a plurality of waist-shaped holes 12 are formed in each mounting seat 11. In this embodiment, there are four waist-shaped holes 12 in each mounting seat 11 arranged in a 2*2 array, and the length direction of each waist-shaped hole 12 is arranged in a direction away from the other mounting seat 11. In practical application, a bolt can be inserted through the waist-shaped holes 12 in the two mounting seats 11, and the two electrode support 1 can be fixed to the corresponding equipment.

[0064] In this embodiment, two cylinders 2 are arranged in the vertical direction, the structures of the two cylinders 2 are consistent, and the mounting methods and structures of the two cylinders 2 on the two electrode support 1 are consistent. One of the two cylinders 2 will be described as an example.

[0065] The cylinder 2 includes two half cylinders 21, which are arranged symmetrically about the axis of the cylinder 2 and are spaced apart. The two half cylinders 21 are connected to the two electrode support 1 respectively on both sides of the arc-shaped direction of each half cylinder 21. The edge of the half cylinder 21 in the arc-shaped direction is integrally formed with a connecting lug 22, which is located on the lower side of the half cylinder 21. The connecting lug 22 is vertical, and a stepped groove 13 is formed in the electrode support 1. The connecting lug 22 is embedded in the stepped groove 13. A graphite bolt 3 is arranged on the electrode support 1, and the axis of the graphite bolt 3 is horizontal. The graphite bolt 3 penetrates the connecting lug 22, and the end of the graphite bolt 3 is screwed into the electrode support 1. There is one connecting lug 22 on the edge of each half cylinder 21 in the arc-shaped direction, and the connecting lug 22 is arranged correspondingly to the half cylinder 21. The stepped groove 13 corresponds to the connecting lug 22 one by one, and the graphite bolt 3 corresponds to the connecting lug 22. In addition, a positioning hole 23 is formed in each connecting lug 22, and the end of each graphite bolt 3 penetrates the electrode support 1 and enters the positioning hole 23 of the other connecting lug 22.

[0066] In order to improve the heating efficiency of the half cylinder 21, a plurality of interval grooves 24 are arranged on the side wall of each half cylinder 21, and each interval groove 24 is arranged uniformly around the axis of the cylinder body 2. In any two adjacent interval grooves 24 on each half cylinder 21, one interval groove 24 penetrates to the upper side of the cylinder body 2, and the other interval groove 24 penetrates to the lower side of the cylinder body 2.

[0067] The implementation principle of the heating device for crystal bonding in the embodiment of the application is as follows: in the bonding operation, the two electrode supports 1 can be installed on the corresponding equipment by penetrating the corresponding waist-shaped holes 12 with bolts, and the two electrode supports 1 are connected to the positive and negative poles of the power supply respectively; then, all the half cylinders 21 on one side can be installed first, so that the connecting ears 22 of the corresponding half cylinders 21 are embedded into the stepped grooves 13, and the connecting ears 22 are locked on the electrode supports 1 by the graphite bolts 3, and the mold 5 and the to-be-bonded crystal 100 on the mold 5 are installed between the two electrode supports 1; subsequently, all the half cylinders 21 on the other side are installed, so that the mold 5 and the to-be-bonded crystal 100 are located in the cylinder body 2. After the two electrode supports 1 are powered on, all the half cylinders 21 are connected in parallel through the two electrode supports 1, and synchronous heating is performed to heat the to-be-bonded crystal 100.

[0068] The embodiment also discloses a crystal bonding method, which comprises the following steps.

[0069] S1, cleaning the inside of the vacuum furnace, and installing graphite electrodes 9 (see Figure 3 and Figure 4 ) in the furnace chamber of the vacuum furnace, the graphite electrodes 9 are oppositely arranged, and the two graphite electrodes 9 are connected to the positive and negative poles of the power supply respectively;

[0070] S2, penetrating the waist-shaped holes 12 (see Figure 4 ) on the two mounting seats 11 with graphite screws, and screwing the graphite screws into the corresponding graphite electrodes 9, so that the two electrode supports 1 are fixed on the two graphite electrodes 9 respectively. During the installation of the electrode supports 1, the graphite screws are loosened, the distance between the two electrode supports 1 can be adjusted through the two waist-shaped holes 12, and then the graphite screws are tightened to fix the two electrode supports 1.

[0071] S3, installing a graphite crucible 4 (see Figure 4 ) between the two electrode supports 1.

[0072] It should be pointed out that, in the embodiment, after the two cylinder bodies 2 are installed on the two electrode supports 1, the cavity part of the graphite crucible 4 is located in the two cylinder bodies 2, that is, the bottom wall of the cavity of the graphite crucible 4 is not lower than the lower edge of the lower cylinder body 2, the upper side of the cavity of the graphite crucible 4 is not higher than the upper edge of the upper cylinder body 2, and the graphite crucible 4 is located at the middle position in the cylinder body 2.

[0073] S4, install two half cylinders 21 on the same side on the two electrode supports 1. In this embodiment, the connecting ears 22 of each half cylinder 21 are respectively embedded in the corresponding stepped grooves 13, and the connecting ears 22 of the two half cylinders 21 are locked on the corresponding electrode supports 1 by two groups of graphite bolts 3.

[0074] S5, install the crystal to be bonded 100 on the mold 5, Figure 4 and Figure 5 , support the crystal to be bonded 100 by the mold 5, and vertically place the mold 5 in the cavity of the graphite crucible 4, so that the mold 5 and the crystal to be bonded 100 are located at the middle position of the cavity of the graphite crucible 4; then, place the graphite cover 41 on the upper side of the graphite crucible 4, and close the upper side of the cavity of the graphite crucible 4 by the graphite cover 41. In this embodiment, the mold 5 is a graphite column, and the mold 5 can have a quadrangular prism structure. The placing groove 51 is formed on the mold 5 along the height thereof, and the placing groove 51 is adapted to the crystal to be bonded 100, and the crystal to be bonded 100 is embedded in the placing groove 51.

[0075] S6, install two half cylinders 21 on the other side on the two electrode supports 1.

[0076] S7, cover the molybdenum heat preservation barrel 6 outside the heating device for crystal bonding (see Figure 3 and Figure 4 ), and cover the molybdenum cover 61 on the upper side of the molybdenum heat preservation barrel 6.

[0077] S8, measure the heat preservation barrel and the heating device for crystal bonding by a multimeter, and determine that there is no short circuit before closing the door of the vacuum furnace.

[0078] S9, start the vacuum furnace, and vacuumize the hearth of the vacuum furnace; in this embodiment, the hearth of the vacuum furnace is vacuumized to 0.0005-0.0015 Pa, and preferably, the hearth of the vacuum furnace is vacuumized to 0.0001 Pa.

[0079] At the same time, the two electrode supports 1 are electrified, all the half cylinders 21 will heat synchronously, and the crystal to be bonded 100 is gradually heated until the required bonding temperature is reached, and enters the constant temperature maintenance stage. In this embodiment, all the half cylinders 21 synchronously and gradually heat the crystal to be bonded 100, and the crystal to be bonded 100 is gradually heated to 950-1050 degrees Celsius by 75-85 hours, and preferably, the crystal to be bonded 100 is gradually heated to 1000 degrees Celsius by 80 hours; in the constant temperature maintenance stage, 950-1050 degrees Celsius is maintained for 38-42 hours, and preferably, 1000 degrees Celsius is maintained for 40 hours. In the heating and constant temperature stages, the vacuum degree of the vacuum furnace is maintained at 0.0005-0.0015 Pa, and preferably, the vacuum degree of the vacuum furnace is maintained at 0.0001 Pa.

[0080] After the constant temperature maintaining stage, the cylinder 2, the mold 5 and the crystal are cooled, and finally the vacuum furnace is opened, the bonded crystal is taken out, and the bonding operation is completed. In this embodiment, during the crystal cooling stage, the vacuum degree of the vacuum furnace is maintained at 0.0005-0.0015 Pa, and the cooling time is 18-22 hours, so that the temperature of the bonded crystal tends to be at room temperature. Preferably, the vacuum degree of the vacuum furnace during the cooling stage is maintained at 0.0001 Pa, and the cooling time is 20 hours.

[0081] Example two:

[0082] Referring to Figure 6 and Figure 7 , the difference between the two is that the two electrode supports 1 are provided with connecting grooves 14 from top to bottom, and the connecting grooves 14 correspond to the connecting lugs 22 one by one. The two connecting lugs 22 of each half cylinder 21 are embedded into the corresponding connecting grooves 14 from top to bottom. The lower side wall of each connecting groove 14 is provided with a V-shaped groove 141, and the notch of the V-shaped groove 141 is upward. The lower side of each connecting lug 22 is fixed with a V-shaped connecting body 221, and the small end of the V-shaped connecting body 221 is downward and embedded into the V-shaped groove 141.

[0083] When the half cylinder 21 is installed on the two electrode supports 1, the two connecting lugs 22 of the half cylinder 21 can be inserted into the corresponding connecting grooves 14, and the V-shaped connecting body 221 is embedded into the V-shaped groove 141, so that the half cylinder 21 can be quickly installed.

[0084] Example three:

[0085] Referring to Figure 8 and Figure 9 , the difference between the two is that the lower side of the two electrode supports 1 is provided with a seat body 7. The seat body 7 is rotatably provided with a rotating frame 71, and the rotating axis of the rotating frame 71 is vertical. The two electrode supports 1 are fixed on the rotating frame 71, and the rotating axis of the rotating frame 71 is collinear with the axis of the cylinder 2. The seat body 7 is provided with a relay electrode 72, which is horizontally arranged in an arc shape. The center of curvature of the relay electrode 72 is on the axis of the cylinder 2, and the relay electrode 72 is symmetrically arranged with two as the axis of the cylinder 2. The two relay electrodes 72 are spaced apart, and an insulating support block 721 is fixed between the two relay electrodes 72. In this embodiment, the two relay electrodes 72 are preferably made of graphite. The two relay electrodes 72 are located on the lower side of the two electrode supports 1, and the lower side of the two electrode supports 1 respectively contacts the upper side of the two relay electrodes 72. Furthermore, the seat body 7 is also provided with a driving component 8 for driving the rotating frame 71 to rotate.

[0086] In actual application, the two relay electrodes 72 are connected to the positive and negative poles of the power supply respectively, and the rotating frame 71 is driven to rotate slowly by the driving component 8, the two electrode supports 1 are sequentially contacted with the two relay electrodes 72 respectively, and all the half cylinders 21 will generate heat and can uniformly heat the crystal.

[0087] The support ring frame 73 is arranged on the seat body 7, is located at the lower side of the rotating frame 71, and the axis of the support ring frame 73 is collinear with the rotating axis of the rotating frame 71. The lower side of the support ring frame 73 is fixed vertically downward with a slide column 731, the slide column 731 penetrates downward into the seat body 7 and is in sliding fit with the seat body 7, and the slide column 731 is uniformly and spacedly arranged around the axis of the support ring frame 73. The support ring frame 73 is in abutting fit with the seat body 7 with an elastic piece, in this embodiment, the elastic piece is a compression spring 732, the compression spring 732 is sleeved with the slide column 731, and the compression spring 732 corresponds to the slide column 731 one by one. The support ring frame 73 is provided with a rotating ring groove 733, the rotating frame 71 is annular, the lower side of the rotating frame 71 is embedded into the rotating ring groove 733 and is in rotating connection with the rotating ring groove 733. In other embodiments, a plane bearing can also be arranged in the rotating ring groove 733, so as to facilitate the smoothness of the rotating of the rotating frame 71. When the relay electrode 72 and the upper side of the insulating support block 721 are worn, the support ring frame 73 can compress the compression spring 732, the electrode support 1 will be lowered and continuously contact the relay electrode 72.

[0088] The driving component 8 comprises a driving motor 81, a driving wheel 82 and a transmission wire 83, the driving motor 81 is fixed on the seat body 7, the driving wheel 82 is coaxially fixed on the output shaft of the driving motor 81, the transmission wire 83 is in closed loop, the outer wall of the rotating frame 71 is provided with a ring groove 711, and the transmission wire 83 is arranged around the ring groove 711 and the driving wheel 82 and is in transmission connection with the driving wheel 82 and the rotating frame 71. In this embodiment, the transmission wire 83 adopts a steel wire or a steel wire rope, etc., when the temperature of the cylinder body heating the crystal is high, the transmission wire 83 can also adopt a molybdenum-zirconium alloy wire, etc., wherein, the steel wire and the molybdenum-zirconium alloy wire have good flexibility when the diameter is small, and can perform good transmission operation; in addition, the transmission wire can also be coated with a high-temperature resistant coating. In actual application, the driving motor 81 drives the driving wheel 82 to rotate, and drives the rotating frame 71, the electrode support 1 and the cylinder body 2 to rotate through the transmission wire 83.

[0089] The above are the preferred embodiments of the present application, which do not limit the protection scope of the present application, therefore: all equivalent changes made on the structure, shape and principle of the present application should be covered within the protection scope of the present application.

Claims

1. A heating device for crystal bonding, comprising a cylindrical body (2), characterized in that: It also includes electrode supports (1), two of which are spaced apart. The cylinder (2) is fixedly mounted on the two electrode supports (1), and multiple cylinders (2) are spaced apart on the electrode supports (1) along the axis of the cylinder (2), and the axes of each cylinder (2) are collinear. The cylinder (2) includes two half cylinders (21), which are symmetrically arranged about the axis of the cylinder (2). Each half cylinder (21) is fixed to two electrode supports (1) on both sides of its arc-shaped direction. A connecting lug (22) is fixed on the edge of the arc-shaped direction of the half cylinder (21). A graphite bolt (3) is provided on the electrode support (1). The graphite bolt (3) passes through the connecting lug (22), and the end of the graphite bolt (3) is screwed into the electrode support (1).

2. The heating device for crystal bonding according to claim 1, characterized in that: Both the connecting lug (22) and the graphite bolt (3) are provided corresponding to the half cylinder (21). Each connecting lug (22) has a positioning hole (23). The end of each graphite bolt (3) passes through the electrode bracket (1) and enters the positioning hole (23) of another connecting lug (22).

3. The heating device for crystal bonding according to claim 1, characterized in that: The electrode support (1) has a stepped groove (13), and the connecting ear (22) is embedded in the stepped groove (13).

4. The heating device for crystal bonding according to claim 1, characterized in that: The cylinder (2) is vertical, and the two sides of the arc-shaped cylinder (21) are fixed with connecting ears (22). The two electrode supports (1) are provided with connecting grooves (14) from top to bottom, and the two connecting ears (22) are embedded into the corresponding connecting grooves (14) from top to bottom. V-shaped grooves (141) are provided on the lower sidewalls of both connecting grooves (14). The opening of the V-shaped grooves (141) faces upward. A V-shaped connector (221) is fixed on the lower side of each connecting ear (22). The small end of the V-shaped connector (221) faces downward and is embedded in the V-shaped groove (141).

5. The heating device for crystal bonding according to claim 1, characterized in that: A base (7) is provided on the lower side of the two electrode supports (1), and a rotating frame (71) is rotatably provided on the base (7). The rotation axis of the rotating frame (71) is vertical. The two electrode supports (1) are fixed on the rotating frame (71). The rotation axis of the rotating frame (71) is collinear with the axis of the cylinder (2). The base (7) is provided with a relay electrode (72). The relay electrode (72) has a horizontally arranged arc-shaped structure. The center of curvature of the relay electrode (72) is on the axis of the cylinder (2). There are two relay electrodes (72) symmetrically arranged with the axis of the cylinder (2) as the axis of symmetry. The two relay electrodes (72) are spaced apart. The lower sides of the two electrode supports (1) respectively contact the two relay electrodes (72), and the base (7) is also provided with a drive component (8) for driving the rotating frame (71) to rotate.

6. A heating device for crystal bonding according to claim 5, characterized in that: An insulating support block (721) is provided between the two relay electrodes (72), and the upper side of the insulating support block (721) is flush with the upper side of the relay electrode (72). A support ring frame (73) is provided on the seat (7). The axis of the support ring frame (73) is collinear with the axis of rotation of the rotating frame (71). The rotating frame (71) is rotatably connected to the support ring frame (73). A sliding column (731) is vertically fixed on the lower side of the support ring frame (73). The sliding column (731) passes downward into the seat (7) and slides with the seat (7). An elastic element is provided between the support ring frame (73) and the seat (7).

7. A heating device for crystal bonding according to claim 5, characterized in that: The rotating frame (71) is ring-shaped, and the outer wall of the rotating frame (71) is surrounded by an annular groove (711). The driving component (8) includes a driving motor (81), a drive wheel (82), and a transmission line (83). The driving motor (81) is fixed on the base (7), and the drive wheel (82) is coaxially fixed on the output shaft of the driving motor (81). The transmission line (83) is a closed loop, and the transmission line (83) winds around the annular groove (711) and the drive wheel (82) and drives the drive wheel (82) and the rotating frame (71).

8. A crystal bonding method, characterized in that: The heating device for crystal bonding as described in any one of claims 1-7 is employed; Includes the following steps: Two electrode supports (1) are installed inside the vacuum furnace chamber, and the two electrode supports (1) are connected to the positive and negative terminals of the power supply respectively; Install all the half cylinders (21) on one side of the two electrode supports (1); The crystal to be bonded (100) is mounted on the mold (5), the mold (5) supports the crystal to be bonded (100), and the mold (5) and the crystal to be bonded (100) are placed between two electrode supports (1); Install each half-cylinder (21) on the other side onto the two electrode supports (1), and place the mold (5) and the crystal to be bonded (100) inside all the cylinders (2); Start the vacuum furnace and evacuate the furnace chamber; When the two electrode supports (1) are energized, all the half cylinders (21) will heat up synchronously and heat the crystal (100) to be bonded until the bonding temperature is reached and the temperature maintenance stage is entered. After the constant temperature maintenance stage, the cylinder (2), mold (5) and crystal are cooled down. Finally, the vacuum furnace is opened, the bonded crystal is taken out, and the bonding operation is completed.

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