A two-degree-of-freedom decoupled flexible nanopositioning platform with macro-micro parallel dual drive

Abstract

The present invention relates to a macro-micro parallel dual-drive, two-degree-of-freedom decoupled flexible nanopositioning platform, comprising: a platform base, two piezoelectric ceramic actuators, two voice coil motors, two voice coil motor connecting plates, two sets of macro-micro parallel composite mechanisms embedded in the micro-platform, eight sets of dual parallelogram guide mechanisms, four sets of single straight beam reeds, and an end effector. The bottom rigid rods of the first set of macro-micro parallel composite mechanisms embedded in the micro-platform and the bottom rigid rods of the second set of macro-micro parallel composite mechanisms are connected to the first and second voice coil motor connecting plates, respectively. Both sets of macro-micro parallel composite mechanisms embedded in the micro-platform transmit the displacements of the voice coil motors and the piezoelectric ceramic actuators to the end effector. Compared with the prior art, the present invention achieves rapid nanopositioning within a large range of two-degree-of-freedom in a planar manner through a parallel configuration, and can quickly compensate for motion errors and cross-axis coupling errors of the voice coil motor-driven macro-platform end effector.

Description

Technical Field

[0001] The present invention relates to a device in the technical field of precision micro-displacement drive systems, and in particular to a two-degree-of-freedom decoupled flexible nanopositioning platform based on parallel dual drive of a voice coil motor and a piezoelectric ceramic driver. Background Art

[0002] Large-stroke, high-dynamic, and nanometer-precision displacement drive mechanisms and their control technologies are widely used in a variety of fields, including photolithography workpiece stages, scanning probe microscopes, and micro-nano manipulation. As a typical example of nanometer-precision drive, piezoelectric ceramic actuators offer advantages such as small size, high output force, high frequency response, and high stiffness. However, their output displacement is only 0.1% of their length, making them difficult to use in large-stroke applications. Therefore, a large-stroke macro-actuator is often combined to form a macro-micro dual-drive platform to achieve fast nanopositioning over a large stroke range. Common macro-micro platforms are categorized as serial / parallel dual-drive and dual-platform. Traditional macro-micro platforms mostly mount the micro-motion stage and drive mechanism directly on the macro platform, forming a serial-drive macro-micro dual-drive platform. In this case, the micro-stage effectively becomes the workload of the macro platform, increasing the overall platform size, moving mass, and energy consumption of the macro-actuator. Furthermore, during motion, the high-speed piezoelectric ceramic actuator generates a significant reaction force on the macro platform, leading to complex control and severe interference between the macro and micro motions. This reduces precision and prevents compensation for coupled displacement.

[0003] Therefore, the development of a macro-micro dual-drive two-degree-of-freedom decoupled nanopositioning platform with large-stroke nanometer precision and low-interference behavior is of great significance for practical applications.

[0004] Chinese patent CN103318839A discloses a high-speed, high-precision macro-micro stage based on piezoelectric ceramics. The stage uses a voice coil motor to drive the stage for large-stroke, high-speed feeding. The piezoelectric ceramic is directly connected to the output shaft of the voice coil motor, but this series structure increases the energy consumption of the macro driver.

[0005] Chinese patent CN104269191A discloses a parallel mechanism driven by a hydraulic servo system and a piezoelectric ceramic driver. This mechanism combines the advantages of hydraulic servo technology and piezoelectric technology and applies them to the parallel mechanism. Although it improves the motion accuracy, it does not compensate for the cross-axis coupling error. Summary of the Invention

[0006] The purpose of the present invention is to overcome the defects of the above-mentioned prior art and to provide a two-degree-of-freedom decoupled flexible nanopositioning platform based on parallel dual drive of a voice coil motor and a piezoelectric ceramic driver. Specifically, it adopts a combination of a high-speed, small-stroke piezoelectric ceramic-driven micro-platform and a large-stroke voice coil motor-driven macro-platform. Through parallel configuration, fast nanopositioning within a large stroke range of planar two-degree-of-freedom can be achieved. The use of a piezoelectric ceramic driver to drive the micro-platform can also quickly compensate for the motion error and cross-axis coupling error of the end effector of the voice coil motor-driven macro-platform.

[0007] The purpose of the present invention can be achieved by the following technical solutions:

[0008] The present invention provides a macro-micro parallel dual-drive two-degree-of-freedom decoupling flexible nanopositioning platform, which comprises: a platform base plate, two piezoelectric ceramic drivers, two voice coil motors, two voice coil motor connecting plates, two sets of macro-micro parallel composite mechanisms embedded in the micro-platform, eight sets of dual parallelogram guide mechanisms, four sets of single straight beam reeds, and an end effector;

[0009] Two sets of macro-micro parallel composite mechanisms embedded in the micro-platform, eight sets of double parallelogram guide mechanisms and four sets of single straight beam springs are all arranged on the platform bottom plate;

[0010] The bottom rigid rods of the first group of macro-micro parallel composite mechanisms embedded in the micro-platform and the bottom rigid rods of the second group of macro-micro parallel composite mechanisms are respectively connected to the first voice coil motor connection plate and the second voice coil motor connection plate;

[0011] Two sets of macro-micro parallel composite mechanisms embedded in the micro-platform both transmit the displacement of the voice coil motor and the displacement of the piezoelectric ceramic actuator to the end effector;

[0012] Two sets of macro-micro parallel composite mechanisms embedded in the micro-platform are placed horizontally and orthogonally, and eight sets of double parallelogram guide mechanisms and four sets of single straight beam springs are arranged in an oblique mirror-image symmetrical structure;

[0013] The sixth set of double parallelogram guide mechanisms and the eighth set of double parallelogram guide mechanisms are connected between the output ends of the two sets of macro-micro parallel composite mechanisms embedded in the micro-platform.

[0014] Further, the first group of macro-micro parallel composite mechanisms embedded in the micro-platform includes: a first rigid rod, a first flexible hinge, a second flexible hinge, a second rigid rod, a third rigid rod, a first flexible rod, a second flexible rod, a fourth rigid rod, a fifth rigid rod, a third flexible hinge, a fourth flexible hinge, a fifth flexible hinge, a sixth flexible hinge, a third flexible rod, a fourth flexible rod, a fifth flexible rod, a sixth flexible rod, a sixth rigid rod, a seventh rigid rod, a first rack, a second rack, a third rack, a fourth rack, a seventh flexible hinge, an eighth flexible hinge, a ninth flexible hinge, a tenth flexible hinge, an eleventh flexible hinge, a twelfth flexible hinge, an eighth rigid rod, a ninth rigid rod, a tenth rigid rod, a thirteenth flexible hinge, a fourteenth flexible hinge, an eleventh rigid rod, a twelfth rigid rod, and a thirteenth rigid rod;

[0015] in:

[0016] The first rigid rod is connected to the second rigid rod and the third rigid rod through a first flexible hinge and a second flexible hinge respectively.

[0017] The second rigid rod and the fourth rigid rod, as well as the third rigid rod and the fifth rigid rod are connected via a first flexible rod and a second flexible rod, respectively.

[0018] The fourth rigid rod is connected to the first frame and the second frame, and the fifth rigid rod is connected to the third frame and the fourth frame respectively through the third flexible hinge, the fourth flexible hinge, the fifth flexible hinge and the sixth flexible hinge.

[0019] The fourth rigid rod is connected to the sixth rigid rod and the seventh rigid rod, and the fifth rigid rod is connected to the sixth rigid rod and the seventh rigid rod respectively through the third flexible hinge, the fourth flexible hinge, the fifth flexible hinge and the sixth flexible hinge.

[0020] The eleventh rigid rod is connected to the second rigid rod and the eighth rigid rod, and the tenth rigid rod is connected to the ninth rigid rod and the thirteenth rigid rod respectively through the seventh flexible hinge, the eighth flexible hinge, the tenth flexible hinge and the eleventh flexible hinge.

[0021] The ninth rigid rod is connected to the eighth rigid rod and the tenth rigid rod through a ninth flexible hinge and a tenth flexible hinge respectively.

[0022] The twelfth rigid rod is connected to the eleventh rigid rod and the thirteenth rigid rod respectively through a thirteenth flexible hinge and a fourteenth flexible hinge.

[0023] Further, the second group of macro-micro parallel composite mechanisms embedded in the micro-platform includes: a fourteenth rigid rod, a fifteenth flexible hinge, a sixteenth flexible hinge, a fifteenth rigid rod, a sixteenth rigid rod, a seventh flexible rod, an eighth flexible rod, a seventeenth rigid rod, an eighteenth flexible hinge, a nineteenth flexible hinge, a twentieth flexible hinge, a ninth flexible beam, a tenth flexible beam, an eleventh flexible beam, a twelfth flexible beam, a nineteenth rigid rod, a twentieth rigid rod, a fifth rack, a sixth rack, a seventh rack, an eighth rack, a twenty-first flexible hinge, a twenty-second flexible hinge, a twenty-third flexible hinge, a twenty-fourth flexible hinge, a twenty-fifth flexible hinge, a twenty-sixth flexible hinge, a twenty-first rigid rod, a twenty-second rigid rod, a twenty-third rigid rod, a twenty-fourth rigid rod, a twenty-fifth rigid rod, a twenty-seventh flexible hinge, a twenty-eighth flexible hinge, and a twenty-sixth rigid rod;

[0024] in:

[0025] The fourteenth rigid rod is connected to the fifteenth rigid rod and the sixteenth rigid rod through the fifteenth flexible hinge and the sixteenth flexible hinge respectively.

[0026] The sixteenth rigid rod and the eighteenth rigid rod, the fifteenth rigid rod and the seventeenth rigid rod are connected respectively through the eighth flexible rod and the seventh flexible rod.

[0027] The seventeenth rigid rod is connected to the fifth frame and the sixth frame, and the eighteenth rigid rod is connected to the seventh frame and the eighth frame respectively through the seventeenth flexible hinge, the eighteenth flexible hinge, the nineteenth flexible hinge, and the twentieth flexible hinge.

[0028] The seventeenth rigid rod is connected to the nineteenth rigid rod and the twentieth rigid rod, and the eighteenth rigid rod is connected to the nineteenth rigid rod and the twentieth rigid rod respectively through the ninth flexible rod, the tenth flexible rod, the eleventh flexible rod and the twelfth flexible rod.

[0029] The twenty-first rigid rod is connected to the fifteenth rigid rod and the twenty-second rigid rod, and the twenty-fifth rigid rod is connected to the sixteenth rigid rod and the twenty-fourth rigid rod respectively through the twenty-first flexible hinge, the twenty-second flexible hinge, the twenty-sixth flexible hinge, and the twenty-fifth flexible hinge.

[0030] The twenty-third rigid rod is connected to the twenty-second rigid rod and the twenty-fourth rigid rod through a twenty-third flexible hinge and a twenty-fourth flexible hinge respectively.

[0031] The twenty-sixth rigid rod is connected to the twenty-first rigid rod and the twenty-fifth rigid rod through a twenty-seventh flexible hinge and a twenty-eighth flexible hinge respectively.

[0032] Furthermore, the first set of double parallelogram guide mechanisms includes an eleventh flexible rod, a twelfth flexible rod, a ninth frame, and a twenty-eighth rigid rod, wherein the twenty-eighth rigid rod is connected to the ninth frame via the eleventh flexible rod and the twelfth flexible rod;

[0033] The second double parallelogram guide mechanism includes a thirteenth flexible rod, a fourteenth flexible rod, a twenty-eighth rigid rod, and a tenth frame, wherein the twenty-eighth rigid rod is connected to the tenth frame through the thirteenth flexible rod and the fourteenth flexible rod.

[0034] Furthermore, the third set of double parallelogram guide mechanisms includes a fifteenth flexible rod, a sixteenth flexible rod, a twenty-seventh rigid rod, and a ninth frame, wherein the twenty-seventh rigid rod is connected to the ninth frame via the fifteenth flexible rod and the sixteenth flexible rod;

[0035] The fourth double parallel four-bar mechanism includes a seventeenth flexible rod, an eighteenth flexible rod, a twenty-eighth rigid rod, and an end effector, wherein the twenty-eighth rigid rod is connected to the end effector through the seventeenth flexible rod and the eighteenth flexible rod.

[0036] Furthermore, the fifth set of double parallel four-bar mechanisms includes a nineteenth flexible rod, a twentieth flexible rod, a twenty-seventh rigid rod, and an end effector, wherein the twenty-seventh rigid rod is connected to the end effector via the nineteenth flexible rod and the twentieth flexible rod;

[0037] The sixth double parallel four-bar mechanism includes a twenty-first flexible rod, a twenty-second flexible rod, a twenty-sixth rigid rod, and an end effector, wherein the twenty-sixth rigid rod and the end effector are connected through the twenty-first flexible rod and the twenty-second flexible rod.

[0038] Furthermore, the seventh double parallel four-bar mechanism includes a twenty-third flexible rod, a twenty-fourth flexible rod, a twenty-seventh rigid rod, and a twelfth frame, wherein the twenty-seventh rigid rod is connected to the twelfth frame via the twenty-third flexible rod and the twenty-fourth flexible rod;

[0039] The eighth double parallel four-bar mechanism includes a twenty-fifth flexible rod, a twenty-sixth flexible rod, a twelfth rigid rod, and an end effector, wherein the twelfth rigid rod and the end effector are connected through the twenty-fifth flexible rod and the twenty-sixth flexible rod.

[0040] Furthermore, the voice coil motor applies thrust to the first rigid rod, driving the first rigid rod to perform translational movement in the vertical direction, so that the first flexible hinge, the second flexible hinge, the second rigid rod, the third rigid rod, the seventh flexible hinge, the eighth flexible hinge, the ninth flexible hinge, the tenth flexible hinge, the eleventh flexible hinge, the eleventh rigid rod, the eighth rigid rod, the ninth rigid rod, the tenth rigid rod, the thirteenth rigid rod, and the twelfth rigid rod also perform translational movement in the vertical direction at the same time.

[0041] Furthermore, the piezoelectric ceramic driver applies thrust to the sixth rigid rod and the seventh rigid rod, driving the sixth rigid rod and the seventh rigid rod to move in the vertical direction, causing the fourth rigid rod and the fifth rigid rod to move in the horizontal direction, and at the same time, amplifying the input displacements of the sixth rigid rod and the seventh rigid rod at the fourth rigid rod and the fifth rigid rod, causing the second rigid rod and the third rigid rod to rotate around the first flexible hinge and the second flexible hinge respectively, causing the second rigid rod to amplify the output displacement of the first flexible rod at the seventh flexible hinge, causing the third rigid rod to amplify the output displacement of the second flexible rod at the twelfth flexible hinge, and generating horizontal movement at the seventh flexible hinge and the twelfth flexible hinge, causing the eleventh rigid rod and the thirteenth rigid rod to rotate around the eighth flexible hinge and the eleventh flexible hinge respectively, causing the input displacements of the seventh flexible hinge and the twelfth flexible hinge to be amplified at the thirteenth flexible hinge and the fourteenth flexible hinge respectively, causing the twelfth rigid rod to generate vertical translational movement.

[0042] Furthermore, in the horizontal direction, the voice coil motor drives the coordinated deformation of four sets of double parallelogram guide mechanisms, two sets of single straight beam reeds, the first flexible rod, and the second flexible rod, outputting vertical motion at the end effector. The piezoelectric ceramic drives the micro-platform to output vertical motion at the end effector through the coordinated deformation of the four sets of double parallelogram guide mechanisms and the two sets of single straight beam reeds, and finally outputs a combined vertical motion at the end effector.

[0043] In the horizontal direction, the voice coil motor can apply thrust to drive the fourteenth rigid rod, and the piezoelectric ceramic driver can drive the nineteenth rigid rod and the twentieth rigid rod, performing a series of deformations, and finally outputting a combined motion in the horizontal direction at the end effector.

[0044] Furthermore, all flexible hinges are right-angle flexible hinges.

[0045] Furthermore, the working platform is connected to the output ends of the two sets of macro-micro parallel composite mechanisms embedded in the micro-platform through the sixth set of double parallelogram guide mechanisms and the eighth set of double parallelogram guide mechanisms.

[0046] Compared with the prior art, the present invention has the following technical advantages:

[0047] 1) The patent of this invention combines a high-speed, small-stroke piezoelectric ceramic-driven micro-stage with a large-stroke voice coil motor-driven macro-stage. Through parallel configuration, it can achieve fast nano-positioning within a large stroke range of planar two-degree-of-freedom.

[0048] 2) The patent of this invention uses a piezoelectric ceramic driver to drive the micro-platform and can quickly compensate for the motion error and cross-axis coupling error of the end effector of the macro-platform driven by the voice coil motor.

[0049] 3) The patent of this invention uses the deformation of the flexible beam decoupling mechanism to offset the interaction force between the piezoelectric ceramic driven micro-platform and the large-stroke voice coil motor driven macro-platform, which can achieve minimal interference behavior between the macro and micro actuators.

[0050] 4) The patent of this invention places two new macro-micro composite mechanisms embedded in the micro-platform orthogonally, and adds 8 sets of double parallelogram guide mechanisms and four sets of single straight beam reed structures at the output ends of the two, so that the mechanism has higher lateral stiffness, reduces the parasitic displacement of the entire motion chain, and improves the decoupling ability and stability of the mechanism.

[0051] 5) The micro-platform of the present invention further cascades a lever mechanism and a Scott-Russell mechanism to further amplify the input displacement of the piezoelectric ceramic to improve its error compensation capability.

[0052] 6) The right-angle flexible hinge used in the present invention has a larger range of motion than straight circular and elliptical hinges and a simple structure and shape, which is easy to process and has low processing costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] Figure 1 This is a schematic diagram of the structure of the macro-micro parallel dual-drive platform system of the present invention;

[0054] Figure 2 for Figure 1 Schematic diagram of the two-DOF macro-micro parallel flexible mechanism;

[0055] Figure 3 It is a partial block diagram of the mechanism of the present invention I;

[0056] Figure 4 It is the partial block diagram II of the mechanism of the present invention;

[0057] Figure 5 It is a schematic diagram of the deformation principle of the mechanism of the present invention.

[0058] In the figure, 1 is the platform base plate, 2 is the voice coil motor, which serves as the first macro-platform input mechanism, 3 is the voice coil motor, which serves as the second macro-platform input mechanism, 4 is the housing of the voice coil motor 2, 5 is the housing of the voice coil motor 3, 6 is the back plate of the voice coil motor 2, 7 is the back plate of the voice coil motor 3, 8 is the base plate of the voice coil motor 2, 9 is the base plate of the voice coil motor 3, 10 is the connecting plate of the voice coil motor 2, 11 is the connecting plate of the voice coil motor 3, 12 is the piezoelectric ceramic driver, which serves as the first micro-platform input mechanism, 13 is the piezoelectric ceramic driver, which serves as the second micro-platform input mechanism, 14 is the first rigid rod, 15 is the first flexible hinge, 16 is the second flexible hinge, 17 is the second rigid rod, 18 is the third rigid rod, 19 is the first flexible rod, and 20 is the second flexible hinge. 2 is the fourth rigid rod, 22 is the fifth rigid rod, 23 is the third flexible hinge, 24 is the fourth flexible hinge, 25 is the fifth flexible hinge, 26 is the sixth flexible hinge, 27 is the third flexible rod, 28 is the fourth flexible rod, 29 is the fifth flexible rod, 30 is the sixth flexible rod, 31 is the sixth rigid rod, 32 is the seventh rigid rod, 33 is the first frame, 34 is the second frame, 35 is the third frame, 36 is the fourth frame, 37 is the seventh flexible hinge, 38 is the eighth flexible hinge, 39 is the ninth flexible hinge, 40 is the tenth flexible hinge, 41 is the eleventh flexible hinge, 42 is the twelfth flexible hinge, 43 is the eighth rigid rod, 44 is the ninth rigid rod, 45 is the tenth rigid rod, 46 is the thirteenth flexible hinge, 47 is the ninth flexible hinge, 48 is the tenth flexible hinge, 49 is the tenth flexible hinge, 50 is the tenth flexible hinge, 51 is the tenth flexible hinge, 52 is the tenth flexible hinge, 53 is the tenth flexible hinge, 54 is the tenth flexible hinge, 55 is the tenth rigid rod, 56 is the tenth flexible hinge, 57 is the tenth flexible hinge, 58 is the tenth flexible hinge, 59 is the tenth flexible hinge, 60 is the tenth flexible hinge, 61 is the tenth flexible hinge, 62 is the tenth flexible hinge, 63 is the tenth flexible hinge, 64 is the tenth rigid rod, 65 is the tenth rigid rod, 66 is the tenth flexible hinge, 67 is the tenth flexible hinge, 68 is the tenth flexible hinge, 69 is the tenth flexible hinge, 70 is the tenth flexible hinge 7 is the fourteenth flexible hinge, 48 is the eleventh rigid rod, 49 is the twelfth rigid rod, 50 is the thirteenth rigid rod, 51 is the fourteenth rigid rod, 52 is the fifteenth flexible hinge, 53 is the sixteenth flexible hinge, 54 is the fifteenth rigid rod, 55 is the sixteenth rigid rod, 56 is the seventh flexible rod, 57 is the eighth flexible rod, 58 is the seventeenth rigid rod, 59 is the eighteenth rigid rod, 60 is the seventeenth flexible hinge, 61 is the eighteenth flexible hinge, 62 is the nineteenth flexible hinge, 63 is the twentieth flexible hinge, 64 is the ninth flexible rod, 65 is the tenth flexible rod, 66 is the eleventh flexible rod, 67 is the twelfth flexible rod, 68 is the nineteenth rigid rod, 69 is the twentieth rigid rod, 70 is the fifth rack, 71 is the sixth rack, 72 is the seventh frame, 73 is the eighth frame, 74 is the 21st flexible hinge, 75 is the 22nd flexible hinge, 76 is the 23rd flexible hinge, 77 is the 24th flexible hinge, 78 is the 25th flexible hinge, 79 is the 26th flexible hinge, 80 is the 21st rigid rod, 81 is the 22nd rigid rod, 82 is the 23rd rigid rod, 83 is the 24th rigid rod, 84 is the 25th rigid rod, 85 is the 27th flexible hinge, 86 is the 28th flexible hinge, 87 is the 26th rigid rod, 88 is the end effector (working platform), 89 is the ninth frame, 90 is the tenth frame, 91 is the 11th frame, 92 is the 12th frame, 93 is the 27th rigid rod, 94 is the 28th rigid rod,95 is the eleventh flexible rod, 96 is the twelfth flexible rod, 97 is the thirteenth flexible rod, 98 is the fourteenth flexible rod, 99 is the fifteenth flexible rod, 100 is the sixteenth flexible rod, 101 is the seventeenth flexible rod, 102 is the eighteenth flexible rod, 103 is the nineteenth flexible rod, 104 is the twentieth flexible rod, 105 is the twenty-first flexible rod, 106 is the twenty-second flexible rod, 107 is the twenty-third flexible rod, 108 is the twenty-fourth flexible rod, 109 is the twenty-fifth flexible rod, 110 is the twenty-sixth flexible rod, 111 is the twenty-seventh flexible rod, 112 is the twenty-eighth flexible rod, 113 is the twenty-ninth flexible rod, and 114 is the thirtieth flexible rod. DETAILED DESCRIPTION

[0059] Overall, this design utilizes a two-degree-of-freedom decoupled flexible nanopositioning platform with parallel macro-micro actuators. A high-speed, short-stroke piezoelectric ceramic-driven microstage is combined with a long-stroke voice coil motor-driven macrostage in a parallel configuration to achieve rapid nanopositioning over a wide range. The mechanism offsets the interaction forces between the macro and microactuators through the deformation of a flexible beam decoupling mechanism, minimizing interference between them. The piezoelectric ceramic actuator drives the microstage while simultaneously compensating for the kinematic errors and cross-axis coupling errors of the voice coil motor-driven macrostage end effector, achieving nanometer-precision motion over a wide range. The microstage also incorporates a cascaded lever mechanism and Scott-Russell mechanism to further amplify the piezoelectric ceramic actuator's input displacement and enhance its error compensation capability. By combining eight dual parallelogram mechanisms and four single straight beam reeds for output displacement guidance, the structure achieves high lateral stiffness, reduces parasitic displacement throughout the kinematic chain, and improves the mechanism's decoupling capability and stability.

[0060] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. Component models, material names, connection structures, control methods, algorithms, and other features not explicitly described in this technical solution are considered common technical features disclosed in the prior art.

[0061] Example 1

[0062] In this scheme, the macro-micro parallel dual-drive two-degree-of-freedom decoupled flexible nanopositioning platform, such as Figures 1 to 4As shown, it includes a platform base plate 1, a fixed frame (composed of fixed frames 1 to 12), a displacement input platform (composed of a first rigid rod, a fourteenth rigid rod, a sixth rigid rod, a seventh rigid rod, a nineteenth rigid rod, and a twentieth rigid rod), motion input mechanisms 2, 3, 11, and 12 (this embodiment 1 uses two voice coil motors and two piezoelectric ceramic drivers), two voice coil motor driver housings 4 and 5, two voice coil motor backplates 6 and 7, two voice coil motor baseplates 8 and 9, two voice coil motor connecting plates 10 and 11, two sets of macro-micro composite mechanisms embedded in the micro-platform, eight sets of double parallelogram guide mechanisms, four sets of single straight beam reeds, and an end effector, wherein: the two sets of macro-micro composite mechanisms embedded in the micro-platform are horizontally orthogonally arranged, and the eight sets of double parallelogram guide mechanisms and the four sets of straight beam reeds form an oblique mirror-symmetrical structure. The voice coil motor 2 is connected to the first rigid rod through the motor connecting plate 10, the voice coil motor 3 is connected to the fourteenth rigid rod through the motor connecting plate 11, the piezoelectric ceramic driver 12 is connected to the sixth rigid rod and the seventh rigid rod respectively, and the piezoelectric ceramic driver 13 is connected to the nineteenth rigid rod and the twentieth rigid rod respectively. The first group of macro-micro composite mechanisms embedded in the micro-platform transmits the vertical displacement output of the voice coil motor and the piezoelectric ceramic driver to the end effector 88, and the second group of macro-micro composite mechanisms embedded in the micro-platform transmits the horizontal displacement output of the voice coil motor and the piezoelectric ceramic driver to the end effector 88. The end effector 88 is connected between the output ends of the two groups of macro-micro composite mechanisms embedded in the micro-platform through the sixth group of double parallelogram guide mechanisms and the eighth group of double parallelogram guide mechanisms.

[0063] Specifically, in this embodiment:

[0064] The first group of macro-micro parallel composite mechanisms embedded in the micro-platform includes: a first rigid rod 1, a first flexible hinge 15, a second flexible hinge 16, a second rigid rod 2, a third rigid rod 3, a first flexible rod 19, a second flexible rod 20, a fourth rigid rod 21, a fifth rigid rod 22, a third flexible hinge 23, a fourth flexible hinge 24, a fifth flexible hinge 25, a sixth flexible hinge 26, a third flexible rod 27, a fourth flexible rod 28, a fifth flexible rod 29, a sixth flexible rod 30, and a sixth rigid rod 31. 1. seventh rigid rod 32, first frame 33, second frame 34, third frame 35, fourth frame 36, seventh flexible hinge 37, eighth flexible hinge 38, ninth flexible hinge 39, tenth flexible hinge 40, eleventh flexible hinge 41, twelfth flexible hinge 42, eighth rigid rod 43, ninth rigid rod 44, tenth rigid rod 45, thirteenth flexible hinge 46, fourteenth flexible hinge 47, eleventh rigid rod 48, twelfth rigid rod 49, thirteenth rigid rod 50.

[0065] The second group of macro-micro parallel composite mechanisms embedded in the micro-platform includes: a fourteenth rigid rod 51, a fifteenth flexible hinge 52, a sixteenth flexible hinge 53, a fifteenth rigid rod 54, a sixteenth rigid rod 55, a seventh flexible rod 56, an eighth flexible rod 57, a seventeenth rigid rod 58, an eighteenth rigid rod 59, a seventeenth flexible hinge 60, an eighteenth flexible hinge 61, a nineteenth flexible hinge 62, a twentieth flexible hinge 63, a ninth flexible beam 64, a tenth flexible beam 65, an eleventh flexible beam 66, a twelfth flexible beam 67, a nineteenth rigid rod 68, and a twentieth rigid rod 69. 9, fifth frame 70, sixth frame 71, seventh frame 72, eighth frame 73, twenty-first flexible hinge 74, twenty-second flexible hinge 75, twenty-third flexible hinge 76, twenty-fourth flexible hinge 77, twenty-fifth flexible hinge 78, twenty-sixth flexible hinge 79, twenty-first rigid rod 80, twenty-second rigid rod 81, twenty-third rigid rod 82, twenty-fourth rigid rod 83, twenty-fifth rigid rod 84, twenty-seventh flexible hinge 85, twenty-eighth flexible hinge 86, twenty-sixth rigid rod; the first set of double parallel four-bar mechanisms includes the eleventh The flexible rod 95, the twelfth flexible rod 96, the ninth frame 89, the twenty-eighth rigid rod 94; the second group of double parallel four-bar mechanisms includes the thirteenth flexible rod 97, the fourteenth flexible rod 98, the twenty-eighth rigid rod 94, and the tenth frame 90; the third group of double parallel four-bar mechanisms includes the fifteenth flexible rod 99, the sixteenth flexible rod 100, the twenty-seventh rigid rod 93, and the ninth frame 89; the fourth group of double parallel four-bar mechanisms includes the seventeenth flexible rod 101, the eighteenth flexible rod 102, the twenty-eighth rigid rod 94, and the end effector 88; the fifth group of double parallel four-bar mechanisms includes the tenth The ninth flexible rod 103, the twentieth flexible rod 104, the twenty-seventh rigid rod 93, and the end effector 88; the sixth double parallel four-bar mechanism comprises the twenty-first flexible rod 105, the twenty-second flexible rod 106, the twenty-sixth rigid rod 87, and the end effector 88; the seventh double parallel four-bar mechanism comprises the twenty-third flexible rod 107, the twenty-fourth flexible rod 108, the twenty-seventh rigid rod 93, and the twelfth frame 92; and the eighth double parallel four-bar mechanism comprises the twenty-fifth flexible rod 109, the twenty-sixth flexible rod 110, the twelfth rigid rod 49, and the end effector 88. The end effector 88 is connected to the output ends of the two sets of macro-micro parallel composite mechanisms embedded in the micro-platform via the sixth and eighth double parallelogram guide mechanisms, with each flexible hinge being a right-angle flexible hinge.

[0066] Two sets of macro-micro parallel composite mechanisms embedded in the micro-platform are placed horizontally and orthogonally, and eight sets of double parallelogram guide mechanisms and four sets of single straight beam springs form an oblique mirror-symmetrical structure.

[0067] The fixed racks 1 to 4 and the fixed racks 5 to 8 are respectively located in the middle of two groups of macro-micro parallel composite mechanisms embedded in the micro-platform and are used to fix the piezoelectric ceramic drivers 11 and 12 .

[0068] The voice coil motor connecting plate 10 is connected to the first rigid rod 14 in a transmission connection, the first rigid rod 14 is connected to the second rigid rod 17 and the third rigid rod 18 respectively through the first flexible hinge 15 and the second flexible hinge 16, the second rigid rod 17 is connected to the fourth rigid rod 21 and the third rigid rod 18 is connected to the fifth rigid rod 22 respectively through the first flexible rod 19 and the second flexible rod 20, the fourth rigid rod 21 is connected to the first frame 1 and the second frame 2 and the fifth rigid rod 22 is connected to the third frame 3 and the fourth frame 4 respectively through the third flexible hinge 23, the fourth flexible hinge 24, the fifth flexible hinge 25 and the sixth flexible hinge 26, the fourth rigid rod 21 is connected to the sixth rigid rod 31 and the seventh rigid rod 32 and the fifth rigid rod 22 is connected to the sixth rigid rod 3 1. The seventh rigid rod 32 is respectively connected by the third flexible hinge 27, the fourth flexible hinge 28, the fifth flexible hinge 29, and the sixth flexible hinge 30. The eleventh rigid rod 48 is connected to the second rigid rod 17 and the eighth rigid rod 43, and the tenth rigid rod 45 is connected to the ninth rigid rod 44 and the thirteenth rigid rod 50 by the seventh flexible hinge 37, the eighth flexible hinge 38, the tenth flexible hinge 40, and the eleventh flexible hinge 41 respectively. The ninth rigid rod 44 is connected to the eighth rigid rod 43 and the tenth rigid rod 45 by the ninth flexible hinge 39 and the tenth flexible hinge 40 respectively. The twelfth rigid rod 49 is connected to the eleventh rigid rod 48 and the thirteenth rigid rod 50 by the thirteenth flexible hinge 46 and the fourteenth flexible hinge 47 respectively.

[0069] The voice coil motor connecting plate 11 is connected to the fourteenth rigid rod 51 through transmission connection, the fourteenth rigid rod 51 is connected to the fifteenth rigid rod 54 and the sixteenth rigid rod 55 through the fifteenth flexible hinge 52 and the sixteenth flexible hinge 53 respectively, the sixteenth rigid rod 55 is connected to the eighteenth rigid rod 59 and the fifteenth rigid rod 54 is connected to the seventeenth rigid rod 58 through the eighth flexible rod 57 and the seventh flexible rod 56 respectively, the seventeenth rigid rod 58 is connected to the fifth frame 70 and the sixth frame 71 and the eighteenth rigid rod 59 is connected to the seventh frame 72 and the eighth frame 73 through the seventeenth flexible hinge 60, the eighteenth flexible hinge 61, the nineteenth flexible hinge 62 and the twentieth flexible hinge 63 respectively, the seventeenth rigid rod 58 is connected to the nineteenth rigid rod 68, the twentieth rigid rod 69 and the eighteenth rigid rod 59 is connected to the nineteenth rigid rod 68, The twentieth rigid rod 69 is connected by transmission through the ninth flexible rod 64, the tenth flexible rod 65, the eleventh flexible rod 66 and the twelfth flexible rod 67 respectively; the twenty-first rigid rod 80 is connected to the fifteenth rigid rod 54 and the twenty-second rigid rod 81, and the twenty-fifth rigid rod 84 is connected to the sixteenth rigid rod 55 and the twenty-fourth rigid rod 83 by transmission through the twenty-first flexible hinge 74, the twenty-second flexible hinge 75, the twenty-sixth flexible hinge 79 and the twenty-fifth flexible hinge 78 respectively; the twenty-third rigid rod 82 is connected to the twenty-second rigid rod 81 and the twenty-fourth rigid rod 83 by transmission through the twenty-third flexible hinge 76 and the twenty-fourth flexible hinge 77 respectively; the twenty-sixth rigid rod 87 is connected to the twenty-first rigid rod 80 and the twenty-fifth rigid rod 84 by transmission through the twenty-seventh flexible hinge 85 and the twenty-eighth flexible hinge 86 respectively.

[0070] The twenty-eighth rigid rod 94 is transmission-connected to the ninth frame 89 via the eleventh flexible rod 95 and the twelfth flexible rod 96 .

[0071] The twenty-eighth rigid rod 94 is transmission-connected to the tenth frame 90 via the thirteenth flexible rod 97 and the fourteenth flexible rod 98 .

[0072] The twenty-seventh rigid rod 93 is transmission-connected to the ninth frame 89 via the fifteenth flexible rod 99 and the sixteenth flexible rod 100 .

[0073] The twenty-seventh rigid rod 93 is transmission-connected to the end effector 88 via the nineteenth flexible rod 103 and the twentieth flexible rod 104 .

[0074] The twenty-sixth rigid rod 87 is transmission-connected to the end effector 88 via the twenty-first flexible rod 105 and the twenty-second flexible rod 106 .

[0075] The twenty-seventh rigid rod 93 is transmission-connected to the twelfth frame 92 via the twenty-third flexible rod 108 and the twenty-fourth flexible rod 107 .

[0076] The twelfth rigid rod 49 is transmission-connected to the end effector 88 via the twenty-fifth flexible rod 109 and the twenty-sixth flexible rod 110 .

[0077] The working principle of the present invention is:

[0078] 1) Voice coil motor drives the macro platform: The voice coil motor 2 applies thrust to the first rigid rod 14, driving the first rigid rod 14 to perform translational movement in the vertical direction, so that the first flexible hinge 15, the second flexible hinge 16, the second rigid rod 17, the third rigid rod 18, the seventh flexible hinge 37, the eighth flexible hinge 38, the ninth flexible hinge 39, the tenth flexible hinge 40, the eleventh flexible hinge 41, the eleventh rigid rod 48, the eighth rigid rod 43, the ninth rigid rod 44, the tenth rigid rod 45, the thirteenth rigid rod 50, and the twelfth rigid rod 49 also perform translational movement in the vertical direction at the same time.

[0079] 2) Piezoelectric ceramic driven micro-platform: The piezoelectric ceramic driver 12 applies thrust to the sixth rigid rod 31 and the seventh rigid rod 32, driving the sixth rigid rod 31 and the seventh rigid rod 32 to move in the vertical direction, so that the fourth rigid rod 21 and the fifth rigid rod 22 produce horizontal movement, and at the same time, the input displacement of the sixth rigid rod 31 and the seventh rigid rod 32 is amplified at the fourth rigid rod 21 and the fifth rigid rod 22, so that the second rigid rod 17 and the third rigid rod 18 rotate around the first flexible hinge 15 and the second flexible hinge 16 respectively, so that the second rigid rod 17 converts the output of the first flexible rod 19 into the output of the first flexible hinge 19. The displacement is amplified at the seventh flexible hinge 37, so that the third rigid rod 18 amplifies the output displacement of the second flexible rod 20 at the twelfth flexible hinge 42, and generates horizontal movement at the seventh flexible hinge 37 and the twelfth flexible hinge 42, so that the eleventh rigid rod 48 and the thirteenth rigid rod 50 rotate around the eighth flexible hinge 38 and the eleventh flexible hinge 41 respectively, so that the input displacements of the seventh flexible hinge 37 and the twelfth flexible hinge 42 are amplified at the thirteenth flexible hinge 46 and the fourteenth flexible hinge 47 respectively, so that the twelfth rigid rod 49 generates vertical translational movement.

[0080] After the above deformation, the voice coil motor 2 drives the macro-platform to perform vertical translational motion. Through the coordinated deformation of the four sets of dual parallelogram guide mechanisms (95-98, 103-106), the two sets of single straight beam reeds (113-114), the first flexible rod 19 and the second flexible rod 20, vertical motion is output at the end effector 88. The piezoelectric ceramic 12 drives the micro-platform through the coordinated deformation of the four sets of dual parallelogram guide mechanisms (95-98, 103-106) and the two sets of single straight beam reeds (113-114), vertical motion is output at the end effector 88, and the resulting vertical motion is output at the end effector 88. Similarly, in the horizontal direction, the voice coil motor 3 applies thrust to drive the fourteenth rigid rod 51, and the piezoelectric ceramic driver 13 drives the nineteenth rigid rod 68 and the twentieth rigid rod 69, undergoing a series of deformations, ultimately outputting the resulting horizontal motion at the end effector 88. Figure 5 It is a schematic diagram of the deformation principle of the mechanism of the present invention.

[0081] The above description of the embodiments is intended to facilitate understanding and use of the invention by those skilled in the art. It will be apparent that those skilled in the art can readily make various modifications to these embodiments and apply the general principles described herein to other embodiments without requiring inventive effort. Therefore, the present invention is not limited to the above-described embodiments. Improvements and modifications made by those skilled in the art based on the disclosure of the present invention, without departing from the scope of the present invention, should be within the scope of protection of the present invention.

Claims

1. A two-degree-of-freedom decoupled flexible nanopositioning platform with macro-micro parallel dual drive, characterized by: The two-degree-of-freedom decoupled flexible nanopositioning platform includes: a platform base plate, two piezoelectric ceramic drivers, two voice coil motors, two voice coil motor connection plates, two sets of macro-micro parallel composite mechanisms embedded in the micro-platform, eight sets of double parallelogram guide mechanisms, four sets of single straight beam reeds, and an end effector; Two sets of macro-micro parallel composite mechanisms embedded in the micro-platform, eight sets of double parallelogram guide mechanisms and four sets of single straight beam springs are all arranged on the platform bottom plate; The bottom rigid rods of the first group of macro-micro parallel composite mechanisms embedded in the micro-platform and the bottom rigid rods of the second group of macro-micro parallel composite mechanisms are respectively connected to the first voice coil motor connection plate and the second voice coil motor connection plate; Two sets of macro-micro parallel composite mechanisms embedded in the micro-platform both transmit the displacement of the voice coil motor and the displacement of the piezoelectric ceramic actuator to the end effector; Two sets of macro-micro parallel composite mechanisms embedded in the micro-platform are placed horizontally and orthogonally, and eight sets of double parallelogram guide mechanisms and four sets of single straight beam springs are arranged in an oblique mirror-image symmetrical structure; Two sets of double parallelogram guide mechanisms are connected between the output ends of two sets of macro-micro parallel composite mechanisms embedded in the micro-platform; The first group of macro-micro parallel composite mechanisms embedded in the micro-platform includes: a first rigid rod, a first flexible hinge, a second flexible hinge, a second rigid rod, a third rigid rod, a first flexible rod, a second flexible rod, a fourth rigid rod, a fifth rigid rod, a third flexible hinge, a fourth flexible hinge, a fifth flexible hinge, a sixth flexible hinge, a third flexible rod, a fourth flexible rod, a fifth flexible rod, a sixth flexible rod, a sixth rigid rod, a seventh rigid rod, a first rack, a second rack, a third rack, a fourth rack, a seventh flexible hinge, an eighth flexible hinge, a ninth flexible hinge, a tenth flexible hinge, an eleventh flexible hinge, a twelfth flexible hinge, an eighth rigid rod, a ninth rigid rod, a tenth rigid rod, a thirteenth flexible hinge, a fourteenth flexible hinge, an eleventh rigid rod, a twelfth rigid rod, and a thirteenth rigid rod; in: The first rigid rod is connected to the second rigid rod and the third rigid rod through a first flexible hinge and a second flexible hinge respectively. The second rigid rod and the fourth rigid rod, as well as the third rigid rod and the fifth rigid rod are connected via a first flexible rod and a second flexible rod, respectively. The fourth rigid rod is connected to the first frame and the second frame, and the fifth rigid rod is connected to the third frame and the fourth frame respectively through the third flexible hinge, the fourth flexible hinge, the fifth flexible hinge and the sixth flexible hinge. The fourth rigid rod is connected to the sixth rigid rod and the seventh rigid rod, and the fifth rigid rod is connected to the sixth rigid rod and the seventh rigid rod respectively through the third flexible hinge, the fourth flexible hinge, the fifth flexible hinge and the sixth flexible hinge. The eleventh rigid rod is connected to the second rigid rod and the eighth rigid rod, and the tenth rigid rod is connected to the ninth rigid rod and the thirteenth rigid rod respectively through the seventh flexible hinge, the eighth flexible hinge, the tenth flexible hinge and the eleventh flexible hinge. The ninth rigid rod is connected to the eighth rigid rod and the tenth rigid rod through a ninth flexible hinge and a tenth flexible hinge respectively. The twelfth rigid rod is connected to the eleventh rigid rod and the thirteenth rigid rod respectively through a thirteenth flexible hinge and a fourteenth flexible hinge.

2. The macro-micro parallel dual-drive two-degree-of-freedom decoupled flexible nanopositioning platform according to claim 1, characterized in that: The second group of macro-micro parallel composite mechanisms embedded in the micro-platform includes: a fourteenth rigid rod, a fifteenth flexible hinge, a sixteenth flexible hinge, a fifteenth rigid rod, a sixteenth rigid rod, a seventh flexible rod, an eighth flexible rod, a seventeenth rigid rod, an eighteenth rigid rod, a seventeenth flexible hinge, an eighteenth flexible hinge, a nineteenth flexible hinge, a twentieth flexible hinge, a ninth flexible beam, a tenth flexible beam, an eleventh flexible beam, a twelfth flexible beam, a nineteenth rigid rod, a twentieth rigid rod, a fifth rack, a sixth rack, a seventh rack, an eighth rack, a twenty-first flexible hinge, a twenty-second flexible hinge, a twenty-third flexible hinge, a twenty-fourth flexible hinge, a twenty-fifth flexible hinge, a twenty-sixth flexible hinge, a twenty-first rigid rod, a twenty-second rigid rod, a twenty-third rigid rod, a twenty-fourth rigid rod, a twenty-fifth rigid rod, a twenty-seventh flexible hinge, a twenty-eighth flexible hinge, and a twenty-sixth rigid rod; in: The fourteenth rigid rod is connected to the fifteenth rigid rod and the sixteenth rigid rod through the fifteenth flexible hinge and the sixteenth flexible hinge respectively. The sixteenth rigid rod and the eighteenth rigid rod, the fifteenth rigid rod and the seventeenth rigid rod are connected respectively through the eighth flexible rod and the seventh flexible rod. The seventeenth rigid rod is connected to the fifth frame and the sixth frame, and the eighteenth rigid rod is connected to the seventh frame and the eighth frame respectively through the seventeenth flexible hinge, the eighteenth flexible hinge, the nineteenth flexible hinge, and the twentieth flexible hinge. The seventeenth rigid rod is connected to the nineteenth rigid rod and the twentieth rigid rod, and the eighteenth rigid rod is connected to the nineteenth rigid rod and the twentieth rigid rod respectively through the ninth flexible rod, the tenth flexible rod, the eleventh flexible rod and the twelfth flexible rod. The twenty-first rigid rod is connected to the fifteenth rigid rod and the twenty-second rigid rod, and the twenty-fifth rigid rod is connected to the sixteenth rigid rod and the twenty-fourth rigid rod respectively through the twenty-first flexible hinge, the twenty-second flexible hinge, the twenty-sixth flexible hinge, and the twenty-fifth flexible hinge. The twenty-third rigid rod is connected to the twenty-second rigid rod and the twenty-fourth rigid rod through a twenty-third flexible hinge and a twenty-fourth flexible hinge respectively. The twenty-sixth rigid rod is connected to the twenty-first rigid rod and the twenty-fifth rigid rod through a twenty-seventh flexible hinge and a twenty-eighth flexible hinge respectively.

3. The macro-micro parallel dual-drive two-degree-of-freedom decoupled flexible nanopositioning platform according to claim 2, characterized in that: The first double parallelogram guide mechanism includes an eleventh flexible rod, a twelfth flexible rod, a ninth frame, and a twenty-eighth rigid rod, wherein the twenty-eighth rigid rod is connected to the ninth frame via the eleventh flexible rod and the twelfth flexible rod; The second double parallelogram guide mechanism includes a thirteenth flexible rod, a fourteenth flexible rod, a twenty-eighth rigid rod, and a tenth frame, wherein the twenty-eighth rigid rod is connected to the tenth frame through the thirteenth flexible rod and the fourteenth flexible rod.

4. The macro-micro parallel dual-drive two-degree-of-freedom decoupled flexible nanopositioning platform according to claim 3, characterized in that: The third double parallelogram guide mechanism includes a fifteenth flexible rod, a sixteenth flexible rod, a twenty-seventh rigid rod, and a ninth frame, wherein the twenty-seventh rigid rod is connected to the ninth frame via the fifteenth flexible rod and the sixteenth flexible rod; The fourth double parallel four-bar mechanism includes a seventeenth flexible rod, an eighteenth flexible rod, a twenty-eighth rigid rod, and an end effector, wherein the twenty-eighth rigid rod is connected to the end effector through the seventeenth flexible rod and the eighteenth flexible rod.

5. The macro-micro parallel dual-drive two-degree-of-freedom decoupled flexible nanopositioning platform according to claim 4, characterized in that: The fifth double parallel four-bar mechanism includes a nineteenth flexible rod, a twentieth flexible rod, a twenty-seventh rigid rod, and an end effector, wherein the twenty-seventh rigid rod is connected to the end effector via the nineteenth flexible rod and the twentieth flexible rod; The sixth double parallel four-bar mechanism includes a twenty-first flexible rod, a twenty-second flexible rod, a twenty-sixth rigid rod, and an end effector, wherein the twenty-sixth rigid rod and the end effector are connected through the twenty-first flexible rod and the twenty-second flexible rod.

6. The macro-micro parallel dual-drive two-degree-of-freedom decoupled flexible nanopositioning platform according to claim 5, characterized in that: The seventh double parallel four-bar mechanism includes a twenty-third flexible rod, a twenty-fourth flexible rod, a twenty-seventh rigid rod, and a twelfth frame, wherein the twenty-seventh rigid rod is connected to the twelfth frame via the twenty-third flexible rod and the twenty-fourth flexible rod; The eighth double parallel four-bar mechanism includes a twenty-fifth flexible rod, a twenty-sixth flexible rod, a twelfth rigid rod, and an end effector, wherein the twelfth rigid rod and the end effector are connected through the twenty-fifth flexible rod and the twenty-sixth flexible rod.

7. The macro-micro parallel dual-drive two-degree-of-freedom decoupled flexible nanopositioning platform according to claim 6, characterized in that: The voice coil motor applies thrust to the first rigid rod, driving the first rigid rod to perform translational movement in the vertical direction, so that the first flexible hinge, the second flexible hinge, the second rigid rod, the third rigid rod, the seventh flexible hinge, the eighth flexible hinge, the ninth flexible hinge, the tenth flexible hinge, the eleventh flexible hinge, the eleventh rigid rod, the eighth rigid rod, the ninth rigid rod, the tenth rigid rod, the thirteenth rigid rod, and the twelfth rigid rod also perform translational movement in the vertical direction at the same time.

8. The macro-micro parallel dual-drive two-degree-of-freedom decoupled flexible nanopositioning platform according to claim 7, characterized in that: The piezoelectric ceramic driver applies thrust to the sixth rigid rod and the seventh rigid rod, driving the sixth rigid rod and the seventh rigid rod to move in the vertical direction, causing the fourth rigid rod and the fifth rigid rod to move in the horizontal direction, and at the same time, amplifying the input displacements of the sixth rigid rod and the seventh rigid rod at the fourth rigid rod and the fifth rigid rod, causing the second rigid rod and the third rigid rod to rotate around the first flexible hinge and the second flexible hinge respectively, causing the second rigid rod to amplify the output displacement of the first flexible rod at the seventh flexible hinge, causing the third rigid rod to amplify the output displacement of the second flexible rod at the twelfth flexible hinge, and generating horizontal movement at the seventh flexible hinge and the twelfth flexible hinge, causing the eleventh rigid rod and the thirteenth rigid rod to rotate around the eighth flexible hinge and the eleventh flexible hinge respectively, causing the input displacements of the seventh flexible hinge and the twelfth flexible hinge to be amplified at the thirteenth flexible hinge and the fourteenth flexible hinge respectively, causing the twelfth rigid rod to generate vertical translational movement.

9. The macro-micro parallel dual-drive two-degree-of-freedom decoupled flexible nanopositioning platform according to claim 8, characterized in that: In the horizontal direction, the voice coil motor drives the coordinated deformation of four sets of double parallelogram guide mechanisms, two sets of single straight beam reeds, the first flexible rod and the second flexible rod, outputting vertical motion at the end effector. The piezoelectric ceramic drives the micro-platform to output vertical motion at the end effector through the coordinated deformation of the four sets of double parallelogram guide mechanisms and the two sets of single straight beam reeds, and finally outputs a combined vertical motion at the end effector. In the horizontal direction, the voice coil motor can apply thrust to drive the fourteenth rigid rod, and the piezoelectric ceramic driver can drive the nineteenth rigid rod and the twentieth rigid rod, performing a series of deformations, and finally outputting a combined motion in the horizontal direction at the end effector.

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