High-end ceramic material complex component based on laser 3D printing and manufacturing method thereof

Abstract

The application provides a manufacturing method of high-end ceramic material complex components based on laser 3D printing, which comprises the following steps: first, decomposing a gaseous precursor into ceramic monomers by using a high-energy laser; then, controlling the distance between a flat-field focusing lens and a substrate and the laser scanning speed; controlling the laser orientation by using a scanning galvanometer system to realize layer-by-layer scanning, so as to obtain a ceramic sheet with a required shape; finally, stacking each ceramic sheet on the substrate in sequence to obtain a high-end ceramic component with a complex structure. The method can realize in-situ preparation and rapid directional growth of ceramic materials, and the axial displacement of the substrate can fix the laser focusing distance to realize layer-by-layer stacking of the ceramic materials. Compared with conventional manufacturing methods, the manufacturing method provided by the application can greatly shorten the manufacturing period of ceramic parts, and is helpful to realize the manufacturing of high-end ceramic components with a complex structure, high purity and high performance, and has a wide popularization and application prospect.

Description

Technical Field

[0001] This invention belongs to the field of ceramic additive manufacturing technology, specifically relating to a complex component of high-end ceramic materials based on laser 3D printing, and also to a manufacturing method of a complex component of high-end ceramic materials based on laser 3D printing. Background Technology

[0002] Advanced ceramic materials possess characteristics such as oxidation resistance, wear resistance, high strength, high hardness, good thermal stability, and corrosion resistance, and have been widely used in fields such as national defense, petroleum, chemical industry, machinery, aerospace, and nuclear energy. However, their inherent brittleness, low ductility, and poor machinability make it difficult to manufacture components with complex shapes. They can only be used to prepare relatively simple components with traditional processes such as molding and gel casting, which greatly limits the engineering applications of advanced ceramic materials.

[0003] Advances in equipment and raw material preparation technologies have enabled additive manufacturing to produce complex-shaped ceramic components with high mechanical properties. However, existing additive manufacturing technologies all employ an indirect method of "printing and molding + sintering post-processing" to obtain ceramic materials, which suffers from problems such as long molding cycles, numerous processes, and susceptibility to deformation.

[0004] Based on this, a novel manufacturing method for complex components made of high-end ceramic materials is provided, which enables in-situ, rapid, and directional growth of ceramic materials and obtains high-purity, high-performance complex-structured high-end ceramic components. This method significantly shortens the manufacturing cycle of ceramic parts while improving their quality, which is not only of great engineering significance but also a technical problem that researchers urgently need to solve. Summary of the Invention

[0005] One of the objectives of this invention is to provide a method for manufacturing complex components made of high-end ceramic materials based on laser 3D printing.

[0006] The second objective of this invention is to provide a complex component made of high-end ceramic materials based on laser 3D printing.

[0007] One of the technical solutions adopted to achieve the objective of this invention is: to provide a method for manufacturing complex components of high-end ceramic materials based on laser 3D printing, comprising the following steps:

[0008] S1. Obtain a 3D model of the complex component to be formed and plan the laser scanning path;

[0009] S2. Place the substrate in the gas phase reactor chamber and then evacuate the vacuum; introduce a vapor mixture of gas phase precursor and carrier gas into the gas phase reactor chamber.

[0010] S3. Preheat the substrate to a specified temperature, turn on the laser and thermal imager. The thermal imager controls the laser power by generating a two-dimensional temperature map of the laser spot, thereby achieving temperature control of the printing process.

[0011] S4. Set the distance between the flat-field focusing lens and the substrate and the laser scanning speed, adjust the deflection angle of the galvanometer, and control the laser spot to deflect sequentially to each scanning point of the laser scanning path, so as to thermally decompose the gas phase precursor and generate ceramic sheets on the substrate.

[0012] S5. After each layer of ceramic sheet is stacked, the substrate is lowered to a height corresponding to the thickness of that layer of ceramic sheet, and then the next layer of ceramic sheet is stacked. This process is repeated layer by layer until the manufacturing of complex components made of high-end ceramic materials is completed.

[0013] The overall concept of the manufacturing method for complex components made of high-end ceramic materials based on laser 3D printing provided by this invention is as follows:

[0014] This invention addresses the problems of long forming cycles, numerous processes, and susceptibility to deformation associated with the indirect method of obtaining ceramic materials through "printing and post-sintering" in existing additive manufacturing. It provides a method for directly manufacturing high-end complex ceramic components using laser 3D printing. This method utilizes a high-energy laser to decompose a vapor-phase precursor into ceramic monomers. A scanning galvanometer system controls the laser's directional, layer-by-layer scanning. By controlling the distance between the flat-field focusing lens and the substrate, as well as the laser scanning speed, ceramic sheets of the desired shape are obtained. Each layer of ceramic sheets is then stacked sequentially on the substrate, ultimately yielding a high-end ceramic component with a complex structure. This method enables in-situ preparation and rapid directional growth of ceramic materials. The axial displacement of the substrate, which fixes the laser focusing distance, allows for layer-by-layer stacking of ceramic materials. Compared to conventional manufacturing methods, this invention's method for manufacturing complex high-end ceramic components based on laser 3D printing not only significantly shortens the manufacturing cycle of ceramic parts but also facilitates the manufacture of high-purity, high-performance complex ceramic components.

[0015] Preferably, the three-dimensional model is a CAD model, which is saved in STL format after being processed by slicing software.

[0016] Furthermore, in step S2, the pressure after vacuuming is less than 10 Pa; the pressure in the vacuum reactor chamber after introducing the steam mixture is 0.4–10 kPa.

[0017] Further, in step S2, the volume ratio of the gaseous precursor to the carrier gas in the vapor mixture is 1:(1-100). Preferably, the volume ratio of the gaseous precursor to the carrier gas is 1:(1-25). Specifically, in step S2, the gas cylinder containing the gaseous precursor and the carrier gas is opened, and the measured carrier gas flow rate is introduced into the evaporator through the pipeline via a mass flow meter. The vapor mixture of the gaseous precursor and the carrier gas flows out of the evaporator through the outlet pipe. After reaching a stable state, the mixed gas of the gaseous precursor and the carrier gas continues to flow from the evaporator to the gas phase reactor chamber at a constant flow rate. The flow rate of the carrier gas gradually changes according to the required volume ratio of the carrier gas to the gaseous precursor.

[0018] Furthermore, in step S2, the gaseous precursor is selected from one or more combinations of methyltrichlorosilane (MTS), tetramethylsilane (TMS), silicon tetrachloride (SiCl4), ammonia (NH3), hexamethyldisilane (HMDS), and trimethylamineborane (TMAB).

[0019] Furthermore, in step S2, the carrier gas is selected from hydrogen or argon.

[0020] Furthermore, in step S3, the preheating temperature of the substrate is 200–400°C lower than the reaction temperature of the gaseous precursor. Specifically, a resistance heating element is disposed below the substrate for preheating. Preferably, the preheating temperature is 900–1250°C; the temperature of the formed ceramic sheet is 1300–1600°C.

[0021] Furthermore, in step S3, by turning on the thermal imager during the formation of the laser spot, a two-dimensional temperature map of the laser spot is generated using the thermal imager to adjust the laser power during the processing, so that the laser spot reaches a constant average temperature, thereby achieving temperature control of the printing process.

[0022] Furthermore, in step S4, the laser scanning speed is 80–150 μm / s, and the distance between the flat-field focusing lens and the substrate is 30–45 cm. In this invention, the laser scanning speed is a key factor in ensuring the shape and purity of complex ceramic components. When the scanning speed is too fast, the vapor precursor may not have enough time to decompose, resulting in structural defects in the ceramic sheet; while when the scanning speed is too slow, the ceramic sheet may become excessively thick in some areas, leading to weak interlayer bonding and affecting the performance of the ceramic component. Furthermore, the vertical distance between the flat-field focusing lens and the substrate also affects the size of the generated laser spot. When the laser spot is too large, the dimensional accuracy of the printed ceramic component will be poor; while when the laser spot is small, although the accuracy of the printed component will be higher, the printing time will be longer for slightly larger components. A suitable spot size allows for the rapid manufacture of ceramic parts at the millimeter scale. Preferably, the diameter of the laser spot is 100–200 μm. By controlling the diameter of the laser spot, the characteristic dimensions of the ceramic component can be determined, thereby enabling the precise and rapid manufacture of ceramic structures.

[0023] Specifically, in step S4, the galvanometer is turned on and processing begins. The high-energy laser beam from the laser is magnified and collimated by a beam expander. The X-axis scanning galvanometer and Y-axis scanning galvanometer are deflected by a fixed angle by a control board. Then, the laser spot is deflected to each scanning point by a flat-field focusing (F-theta) lens. Precise scanning is completed according to the scanning path. As the laser spot moves, the laser applies a constant laser power to the first layer of the forming component. The gas in the chamber is thermally decomposed at the reaction temperature, generating ceramic sheets that accumulate on the substrate surface. The layers are stacked one by one. For each layer, the Z-axis moving platform below the substrate descends to the corresponding thickness.

[0024] Preferably, in steps S4 and S5, a customized short-focal-length telescope and a CCD camera are used to observe the printed sample in real time. Once the last layer is deposited, the carrier gas containing the gaseous precursor is stopped, the laser is turned off, and the sample is evacuated using a tail gas treatment device and allowed to cool naturally to room temperature, thus obtaining the desired complex-shaped high-purity ceramic component.

[0025] Furthermore, the manufacturing method for complex high-end ceramic material components based on laser 3D printing provided by this invention has the advantage of high printing accuracy, and is particularly suitable for molding small-sized components. Preferably, in step S5, the planar dimension of the ceramic component does not exceed 100×100mm. 2 .

[0026] The second objective of this invention is to provide a complex high-end ceramic material component based on laser 3D printing, wherein the complex high-end ceramic material component is manufactured by the manufacturing method described in one of the objectives of this invention.

[0027] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0028] (1) The present invention provides a method for manufacturing complex components of high-end ceramic materials based on laser 3D printing, which can realize in-situ preparation and rapid directional growth of ceramic materials. By fixing the laser focusing distance through the axial displacement of the substrate, the ceramic materials can be stacked layer by layer. Compared with conventional manufacturing methods, the manufacturing method provided by the present invention can not only significantly shorten the manufacturing cycle of ceramic parts, but also help to realize the manufacturing of high-end ceramic components with complex structures of higher purity and higher performance.

[0029] (2) The high-end ceramic material complex components prepared by the present invention have the advantages of short molding cycle, few processes, light weight, high purity, high density and good mechanical properties. It can overcome the limitation of the traditional 3D printing method to achieve densification of ceramic complex components through the indirect method of "printing and molding + sintering post-processing", and has broad prospects for promotion and application. Attached Figure Description

[0030] Figure 1 A schematic diagram of the main apparatus involved in a method for manufacturing complex components of high-end ceramic materials based on laser 3D printing, provided in an embodiment of the present invention;

[0031] Figure 2 A schematic flowchart illustrating a method for manufacturing complex components of high-end ceramic materials based on laser 3D printing, provided in an embodiment of the present invention.

[0032] Figure 3 The images show a comparison of the XRD patterns of the SiC complex components prepared in Example 1 and the comparative example of the present invention; wherein, (a) is the XRD pattern of the SiC complex component obtained by the comparative example using "laser selective sintering + reaction sintering"; and (b) is the XRD pattern of the SiC complex component prepared in the example of the present invention.

[0033] Among them, 1-substrate; 2-z-axis moving platform; 3-vacuum system; 4-exhaust gas treatment system; 5-precursor inlet; 6-laser; 7-galvanometer scanning system; 8-beam expander; 9-thermal imager; 10-flat field focusing lens. Detailed Implementation

[0034] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0035] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other.

[0036] The present invention will be further described below with reference to specific embodiments, but these are not intended to limit the scope of the invention.

[0037] The structural schematic diagram of the main apparatus involved in the manufacturing method of complex components made of high-end ceramic materials based on laser 3D printing provided in this embodiment of the invention is shown below. Figure 1 As shown;

[0038] Please see Figure 1 In this embodiment of the invention, a substrate 1 with a diameter of 10 cm is installed inside the reactor chamber, and a resistance heating element is installed below the substrate 1. A vacuum system 3 and a tail gas treatment system 4 are installed outside the reactor chamber. A precursor inlet 5 is opened at the top of the reactor chamber. The vapor mixture of gaseous precursor and carrier gas enters the reactor chamber through the precursor inlet 5 and forms a certain pressure. A laser 6 is installed above the reaction chamber. The high-energy laser beam is collimated and amplified by a beam expander 8. The x-axis scanning galvanometer and y-axis scanning galvanometer of the galvanometer scanning system 7 are deflected by a fixed angle, and then the laser spot is deflected to each scanning point on the substrate 1 by a flat field focusing lens (F-theta) 10, so that a precise scan is completed according to the scanning path. During the movement of the laser spot, the laser applies a constant laser power to the first layer of the forming component. The gas in the chamber thermally decomposes at the reaction temperature, causing the gaseous precursor in the reaction chamber to be deposited on the surface of the substrate under the action of the laser to form ceramic sheets. Furthermore, a z-axis moving platform 2 is provided below the substrate 1. By adjusting the z-axis moving platform to move vertically, the distance between the substrate 1 and the thickness of each layer of stacked ceramic sheets is controlled to move the substrate 1 downward, thereby ensuring that the distance between the flat field focusing lens 10 and the substrate remains unchanged.

[0039] Example 1

[0040] like Figure 2 As shown, a method for manufacturing complex components of high-end ceramic materials based on laser 3D printing includes the following steps:

[0041] 1) Draw the model of the honeycomb structure mirror in Creo Parametric software, slice it using slicing software, and save it as an STL file;

[0042] 2) Place the graphite substrate on the substrate holder in the chamber of the gas phase precursor reactor, and evacuate the vacuum to reduce the pressure to below 10 Pa.

[0043] 3) Import the three-dimensional model of the silicon carbide (SiC) component of the honeycomb structure to be formed into the control software, set the preheating temperature to 1100℃, the laser scanning rate to 125μm / s, adjust the spot size to 200μm, adjust the distance from the flat field focusing lens to the substrate to 45cm through the Z-axis moving platform, and the control software plans a reasonable laser scanning path according to the silicon carbide component to be formed.

[0044] 4) Open the gas cylinder containing Ar and introduce Ar at a measured flow rate of 100 sccm into the evaporator containing hexamethyldisilane (HMDS) using a mass flow controller. The volume ratio of HMDS to Ar is 1:25. The vapor mixture of HMDS and Ar flows out of the evaporator through the outlet pipe. After reaching a steady state, the mixture of HMDS vapor and Ar continues to flow from the evaporator to the gas phase reactor chamber at a constant flow rate. The pressure in the reactor chamber is maintained at 600 Pa.

[0045] 5) Turn on the resistance heating element on the shaft directly below the substrate to heat the entire substrate to 1100℃;

[0046] 6) Turn on the CO2 laser and thermal imager, locally heat a small spot on the graphite substrate to 1300℃ and keep it stable. Use the thermal imager to generate a two-dimensional temperature map of the laser spot to control the laser power during the processing and make the laser spot reach a constant average temperature.

[0047] 7) Open the galvanometer and start processing. The high-energy laser beam of the CO2 laser is magnified and collimated by the beam expander. The X-axis scanning galvanometer and Y-axis scanning galvanometer are deflected by a fixed angle, and then the laser spot is deflected to each scanning point by the F-theta lens. The scanning is completed accurately according to the scanning path. As the laser spot moves, the CO2 laser applies a constant laser power to the first layer of the forming component. The gas in the chamber is thermally decomposed at the reaction temperature to generate silicon carbide ceramic sheets that are deposited on the substrate surface. The layers are stacked one by one. The Z-axis moving platform under the substrate decreases according to the thickness of each layer.

[0048] 8) Real-time observation of printed samples using a custom-designed short-focal-length telescope and CCD camera;

[0049] 9) Once the last layer is deposited, stop introducing the HMDS-containing carrier gas, turn off the CO2 laser, use the exhaust gas treatment device to evacuate and allow it to cool naturally to room temperature to obtain the silicon carbide ceramic component of the desired honeycomb structure mirror.

[0050] Example 2

[0051] A method for manufacturing complex components made of high-end ceramic materials based on laser 3D printing includes the following steps:

[0052] 1) Draw the model of the honeycomb structure mirror in Creo Parametric software, slice it using slicing software, and save it as an STL file;

[0053] 2) Place the graphite substrate on the substrate holder in the gas phase reactor chamber, and evacuate the vacuum to reduce the pressure to below 10 Pa.

[0054] 3) Import the three-dimensional model of the silicon boron carbon nitride component of the honeycomb structure mirror body to be formed into the control software, set the preheating temperature to 1210℃, the laser scanning rate to 105μm / s, adjust the spot size to 100μm, adjust the distance between the flat field focusing lens and the substrate to 30cm through the Z-axis lifting device, and the control software plans a reasonable laser scanning path according to the silicon boron carbon nitride ceramic component to be formed.

[0055] 4) Open the gas cylinder containing Ar, and introduce the measured flow rate of Ar at 80 sccm into the evaporators containing hexamethyldisilane (HMDS) and trimethylamine borane (TMAB) respectively through the mass flow controller. The volume ratio of HMDS, TMAB and Ar is 2:1:5. The vapor mixture of HMDS and TMAB flows out of the evaporator through the outlet pipe. After reaching a steady state, the mixture of HMDS and TMAB vapor and Ar continues to flow from the evaporator to the gas phase reactor chamber at a constant flow rate. The pressure in the reactor chamber is maintained at 800 Pa.

[0056] 5) Turn on the resistance heating element on the shaft directly below the substrate to heat the entire substrate to 1210℃;

[0057] 6) Turn on the Nd:YAG laser and thermal imager, locally heat a small spot on the graphite substrate to 1510℃ and keep it stable, use the thermal imager to generate a two-dimensional temperature map of the laser spot, so as to control the laser power during the processing and make the laser spot reach a constant average temperature.

[0058] 7) Open the galvanometer and begin processing. The high-energy laser beam of the Nd:YAG laser is magnified and collimated by the beam expander. The X-axis scanning galvanometer and Y-axis scanning galvanometer are deflected by a fixed angle, and then the laser spot is deflected to each scanning point by the F-theta lens. The scanning is completed accurately according to the scanning path. As the laser spot moves, the Nd:YAG laser applies a constant laser power to the first layer of the forming component. The gas in the chamber is thermally decomposed at the reaction temperature to generate silicon boron carbon nitride ceramic sheets that are deposited on the substrate surface. The layers are stacked one by one. The Z-axis moving platform under the substrate decreases according to the thickness of each layer.

[0059] 8) Real-time observation of printed samples using a custom-designed short-focal-length telescope and CCD camera;

[0060] 9) Once the last layer is deposited, stop the flow of carrier gas containing HMDS and TMAB, turn off the Nd:YAG laser, use the exhaust gas treatment device to evacuate and allow it to cool naturally to room temperature to obtain the silicon boron carbon nitride ceramic component of the desired honeycomb structure mirror.

[0061] Example 3

[0062] A method for manufacturing complex components made of high-end ceramic materials based on laser 3D printing includes the following steps:

[0063] 1) Draw the model of the honeycomb structure mirror in Creo Parametric software, slice it using slicing software, and save it as an STL file;

[0064] 2) Place the graphite substrate on the substrate holder in the gas phase reactor chamber, and evacuate the vacuum to reduce the pressure to below 10 Pa.

[0065] 3) Import the 3D model of the silicon nitride component of the honeycomb structure mirror body to be formed into the control software, set the preheating temperature to 1000℃, the laser scanning rate to 85μm / s, adjust the spot size to 100μm, adjust the distance between the flat field focusing lens and the substrate to 30cm through the Z-axis lifting device, and the control software plans a reasonable laser scanning path according to the silicon nitride component to be formed.

[0066] 4) Open the gas cylinder containing NH3 and H2, and introduce the measured flow rate of H2 (1000 sccm) into the SiCl4 evaporator through the mass flow controller. The volume ratio of SiCl4, NH3 and H2 is 1:5:10. The vapor mixture of SiCl4 and H2 flows out of the evaporator through the outlet pipe. After reaching a steady state, the mixture of SiCl4 and H2 vapor and NH3 continues to flow from the evaporator to the gas phase reactor chamber at a constant flow rate. The pressure in the reactor chamber is maintained at 10 kPa.

[0067] 5) Turn on the resistance heating element on the shaft directly below the substrate to heat the entire substrate to 1000℃;

[0068] 6) Turn on the Nd:YAG laser and thermal imager, locally heat a small spot on the graphite substrate to 1300℃ and keep it stable, use the thermal imager to generate a two-dimensional temperature map of the laser spot, so as to control the laser power during the processing and make the laser spot reach a constant average temperature.

[0069] 7) Open the galvanometer and begin processing. The high-energy laser beam of the Nd:YAG laser is magnified and collimated by the beam expander. The X-axis scanning galvanometer and Y-axis scanning galvanometer are deflected by a fixed angle, and then the laser spot is deflected to each scanning point by the F-theta lens. The scanning is completed with precision according to the scanning path. As the laser spot moves, the Nd:YAG laser applies a constant laser power to the first layer of the forming component. The gas in the chamber is thermally decomposed at the reaction temperature to generate silicon nitride ceramic sheets that are deposited on the substrate surface. The layers are stacked one by one. The Z-axis moving platform under the substrate decreases according to the thickness of each layer.

[0070] 8) Real-time observation of printed samples using a custom-designed short-focal-length telescope and CCD camera;

[0071] 9) Once the last layer is deposited, stop the flow of carrier gas containing SiCl4 and NH3, turn off the Nd:YAG laser, use the exhaust gas treatment device to evacuate and allow it to cool naturally to room temperature to obtain the silicon nitride ceramic component of the desired honeycomb structure mirror.

[0072] Comparative Example

[0073] This comparative example uses a method of "laser selective sintering + phenolic resin impregnation pyrolysis + reaction sintering" to prepare silicon carbide components. The specific preparation method is as follows:

[0074] A honeycomb structure mirror body was printed using a laser selective sintering (SSC) system, with SiC powder as the main raw material and phenolic resin (PF) as the binder. The printing parameters were as follows: laser scanning speed 2000 mm / s, sample layer thickness 0.1 mm, and processing temperature 60℃. A SiC / PF green body was obtained, and organic matter was removed by carbonization to obtain a SiC / C preform. The preform was then subjected to phenolic resin impregnation and pyrolysis pre-strengthening treatment to obtain a SiC / C impregnated pyrolysis preform. The SiC / C impregnated pyrolysis preform was placed in a vacuum sintering furnace with excess silicon particles. After evacuating the furnace, the temperature was increased to 1400℃ at a rate of 2℃ / min, and then slowly increased to the reaction sintering temperature of 1670℃ at a rate of 2℃ / min, and held for 2 hours. After the furnace cooled to room temperature, the sample was removed to obtain the silicon carbide ceramic component of the honeycomb structure mirror body.

[0075] Performance testing and characterization

[0076] Figure 3 The images show a comparison of the XRD patterns of the SiC complex components prepared in Example 1 and the comparative example of the present invention; wherein, (a) is the XRD pattern of the SiC complex component obtained in the comparative example by “laser selective sintering + phenolic resin impregnation pyrolysis + reaction sintering”; and (b) is the XRD pattern of the SiC complex component prepared in the example of the present invention.

[0077] Depend on Figure 3It can be seen that the SiC complex component prepared by the comparative example using "laser selective sintering + phenolic resin impregnation pyrolysis + reaction sintering" contains both SiC and Si phases, with a strong Si peak and a large amount of silicon residue; in contrast, the SiC component prepared by the manufacturing method provided by the present invention only has SiC peaks, which indicates that the complex component prepared by the present invention has higher purity compared with conventional manufacturing methods.

[0078] Furthermore, Vickers hardness tests were performed on the SiC components prepared in Example 1 and the comparative example. The comparative example, prepared using a method of "laser selective sintering + phenolic resin impregnation pyrolysis + reaction sintering," showed a Vickers hardness of 2000–2300 Hv, while the SiC component prepared in Example 1 of this invention showed a Vickers hardness of 2850–3000 Hv. This indicates that the high-end ceramic material complex components manufactured using the method provided by this invention exhibit a significant improvement in hardness compared to conventional manufacturing methods.

[0079] The above are merely preferred embodiments of the present invention and are not intended to limit the implementation methods and protection scope of the present invention. Those skilled in the art should recognize that any equivalent substitutions and obvious changes made based on the content of this specification should be included within the protection scope of the present invention.

Claims

1. A method for manufacturing complex components of high-end ceramic materials based on laser 3D printing, characterized in that, Includes the following steps: S1. Obtain a 3D model of the complex component to be formed and plan the laser scanning path; S2. Place a substrate in the gas phase reactor chamber and then evacuate; introduce a vapor mixture of gas phase precursor and carrier gas in a volume ratio of 1:(1~100) into the gas phase reactor chamber; the gas phase precursor is selected from one or more combinations of methyltrichlorosilane, tetramethylsilane, silicon tetrachloride, ammonia, hexamethyldisilane, and trimethylamineborane. S3. Preheat the substrate to the specified temperature, turn on the laser and thermal imager. The thermal imager controls the laser power in real time by generating a two-dimensional temperature map of the laser spot, thereby achieving temperature control of the printing process. S4. Set the distance between the flat-field focusing lens and the substrate to 30~45cm, the laser scanning speed to 80~150μm / s, adjust the deflection angle of the galvanometer, and control the laser spot to deflect sequentially to each scanning point of the laser scanning path, so as to thermally decompose the gas phase precursor and generate ceramic sheets on the substrate. S5. After each layer of ceramic sheet is stacked, the substrate is lowered to a height corresponding to the thickness of that layer of ceramic sheet, and then the next layer of ceramic sheet is stacked. This process is repeated layer by layer until the manufacturing of complex components made of high-end ceramic materials is completed.

2. The manufacturing method according to claim 1, characterized in that, In step S1, the three-dimensional model is processed using slicing software and then saved as an STL format.

3. The manufacturing method according to claim 1, characterized in that, In step S2, the pressure after vacuuming is less than 10 Pa; the pressure in the vacuum reactor chamber after the steam mixture is introduced is 0.4~10 kPa.

4. The manufacturing method according to claim 1, characterized in that, In step S2, the carrier gas is selected from hydrogen or argon.

5. The manufacturing method according to claim 1, characterized in that, In step S3, the specified temperature for substrate preheating is 200~400°C lower than the reaction temperature of the gas phase precursor.

6. The manufacturing method according to claim 1, characterized in that, In step S4, the diameter of the laser spot is 100~200μm.

7. A complex component made of high-end ceramic material based on laser 3D printing, characterized in that, The complex high-end ceramic material component is manufactured by the manufacturing method according to any one of claims 1-6.

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