Laser manipulation system for two-dimensional contact surfaces and three-dimensional suspension spaces in liquid environments

Abstract

The present application relates to a kind of laser control system for liquid environment two-dimensional contact surface and three-dimensional suspension space, that is, on the basis of existing traditional optical tweezers equipment, only continuous laser signal modulation is pulse laser signal, it can be simultaneously realized in liquid environment to the driving, capture and control of micro-nano object in two-dimensional contact surface and three-dimensional suspension space.The present application is applicable in liquid environment, using the transient photothermal impact generated by micro-nano object absorption pulse laser, to overcome the frictional resistance directly generated by two-dimensional substrate contact surface and the viscous resistance generated by three-dimensional suspension space.Compared with the existing traditional optical tweezers technology only applicable to liquid three-dimensional suspension space or indirectly contact with substrate conditions, the present application increases the object control on two-dimensional contact surface, expands the object control dimension and application scene of traditional optical tweezers, has stronger flexibility, universality and development potential;Relies on microprocessor and programmable logic device, and then guarantee control efficient and accurate.

Description

Technical Field

[0001] The present invention relates to a technology for controlling micro-nano objects with pulsed laser, and in particular to a laser control system for a two-dimensional contact surface and a three-dimensional suspended space in a liquid environment. Background Art

[0002] Optical manipulation technology is one of the main technical means to study the movement of objects and their interactions at the micro-nano scale. Due to its advantages of non-contact, non-destructive, and high sensitivity, it is widely used in microfluidic sensors, microfluidic control, on-chip integration, and biomedicine.

[0003] Most existing fluidic nanodevices and micromechanical structures are integrated or assembled on a two-dimensional contact surface in a liquid environment, such as microfluidic chips and wafers. Therefore, direct and precise micro-nano manipulation is required on the contact surface. However, the existing traditional optical tweezers technology can only produce femtonewtons to piconewtons (10 -15 -10 - 12 The optical gradient force of the order of magnitude is much smaller than the micro-Nu (10 -6 N) in resistance. Consequently, even in liquid environments, related technologies can only manipulate a small number of suspended target objects. Alternatively, they require other methods, such as surface lubrication, where a thick layer of phase-change material is applied to the contact surface to reduce surface friction, in order to manipulate micro-nano objects that are indirectly in contact with the substrate. Therefore, related traditional technologies are unable to simultaneously manipulate micro-nano objects on the substrate contact surface and in suspended space, and suffer from shortcomings such as low output force, strong limitations, and a narrow application range. Summary of the Invention

[0004] To address the problems that traditional optical tweezers technology cannot simultaneously manipulate micro-nano objects on the substrate contact surface and in the suspended space even in a liquid environment, and has low output force and manipulation accuracy, a laser manipulation system for two-dimensional contact surfaces and three-dimensional suspended space in a liquid environment is proposed.

[0005] The technical solution of the present invention is: a laser manipulation system for a two-dimensional contact surface and a three-dimensional suspended space in a liquid environment, comprising a host computer, an automatic control module, a laser driving module, a sample box and an image acquisition module;

[0006] The host computer is used to set the control parameters of each component of the laser driving module or the movement path parameters of the micro-nano object in the sample box;

[0007] The automatic control module is configured to generate a control signal, modulate laser parameters in a laser driving module according to control parameters set by the host computer, and realize output of a pulse control laser; and control voltages of a two-dimensional scanning galvanometer and a three-dimensional motorized displacement stage in the laser driving module, and realize movement control of a micro-nano object in a sample box.

[0008] The laser driving module is configured to generate a control light path, receive the control signal from the automatic control module, change continuous laser into pulse laser output, and then be incident into the sample box to control the micro-nano object.

[0009] The image acquisition module is configured to realize real-time imaging of the micro-nano object in the sample box, observe the control process of the micro-nano object, and feed back the image to the host computer.

[0010] Preferably, the automatic control module comprises an embedded processor, a digital-to-analog conversion module, and a power management module.

[0011] The embedded processor is configured to calculate and process the input control parameters and obtain digital signals required for controlling each component; the digital-to-analog conversion module is configured to generate analog driving signals corresponding to the digital signals output by the embedded processor; and the power management module is configured to meet different power supply requirements of the embedded processor and the digital-to-analog conversion module.

[0012] Preferably, the automatic control module further comprises an LCD touch display module, which is configured to communicate with the embedded processor, input, and display the control parameters.

[0013] Preferably, the automatic control module comprises two working modes: a host mode and a slave mode; in the host mode, the embedded processor is connected with the LCD touch display module, and the control parameters of each component required for controlling the micro-nano object are obtained through the LCD touch display module; in the slave mode, the embedded processor is connected with the host computer, and the control parameters of each component required for controlling the micro-nano object are obtained through the host computer.

[0014] Preferably, the laser driving module comprises a laser, an optical path unit, a two-dimensional scanning galvanometer, and a three-dimensional motorized displacement stage; the laser is configured to generate a continuous laser signal; the optical path unit is configured to guide the control light path to be incident on the micro-nano object; and the two-dimensional scanning galvanometer and the three-dimensional motorized displacement stage are respectively configured to adjust the relative positions of the optical trap and the micro-nano object, and realize control of the micro-nano object.

[0015] Preferably, the wavelength of the laser is adjustable in a range of 300 nm to 2 μm, the pulse width is adjustable in a range of 1 ns to 100 μs, and the repetition frequency is adjustable in a range of ≤100 kHz.

[0016] Preferably, the repetition frequency and average power parameters of the laser are adjusted to achieve control of the micro-nano object movement speed and precision.

[0017] A micro-nano object manipulation method, which utilizes a laser manipulation system for two-dimensional contact surface and three-dimensional suspension space of liquid environment to manipulate micro-nano objects, specifically comprising the following steps:

[0018] First step: according to the material properties of the manipulated object, the output wavelength of the laser is selected;

[0019] Second step: the on and off states of the transistor in the laser are adjusted by the automatic control module, so that the output continuous light signal becomes a short pulse laser manipulation signal with the required frequency and pulse width;

[0020] Third step: the pulsed laser is focused on the substrate contact surface or suspension space of the nanometer object in the sample box, forming a light-trap-like light field gradient distribution, and realizing the capture of the micro-nano object;

[0021] Fourth step: the image acquisition module is used to observe the manipulated micro-nano object in real time, and the start and end points, path, and step length of the micro-nano object movement are set through the upper computer or LCD touch display module;

[0022] Fifth step: the output voltage of the servo driver in the two-dimensional scanning galvanometer is adjusted by the automatic control module to change the rotation angle of the galvanometer and thus change the position of the light-trap-like light field, so that the micro-nano object moves according to the settings in the fourth step, realizing the manipulation of the micro-nano object in a small range; or the power supply voltage of the three-dimensional electric displacement table is adjusted by the automatic control module to rotate the micrometer screw, so as to change the position of the sample box and thus change the relative position between the micro-nano object and the light-trap-like light field, so that the micro-nano object moves according to the settings in the fourth step, realizing the manipulation of the micro-nano object in a large range.

[0023] Further, the micro-nano object is a nanowire on the substrate contact surface or a nanowire or nanosheet suspended in the sample solution.

[0024] The beneficial effects of the present invention are as follows: the laser manipulation system for a two-dimensional contact surface and a three-dimensional suspended space in a liquid environment has a simple structure, is easy to build, and is highly compatible with existing optical tweezers equipment. On this basis, by simply modulating the original continuous laser signal into a pulsed laser signal, the drive, capture, and manipulation of micro-nano objects in a two-dimensional contact surface and a three-dimensional suspended space can be simultaneously achieved in a liquid environment. The present invention utilizes the photothermal shock effect to overcome the frictional resistance generated by the two-dimensional substrate contact surface and the viscous resistance generated by the three-dimensional suspended space. On the basis that the existing traditional optical tweezers technology is only applicable to the three-dimensional suspended space of liquid or indirect contact with the substrate, the object manipulation on the two-dimensional contact surface is added, and the object manipulation latitude and application scenarios of traditional optical tweezers are expanded, with greater flexibility, universality, and development potential; relying on a microprocessor (ARM) and a programmable logic device (FPGA), the present invention can achieve automation and computer control through programming language, thereby ensuring efficient and precise manipulation. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a structural block diagram of the laser manipulation system for a two-dimensional contact surface in a liquid environment and a three-dimensional suspended space according to the present invention;

[0026] Figure 2 This is a schematic diagram of the structure of the automatic control module and the embedded processor therein in the system of the present invention;

[0027] Figure 3 This is a schematic diagram of the structure of the digital-to-analog conversion module in the system of the present invention;

[0028] Figure 4 This is a schematic diagram of the structure of the laser driving module in the system of the present invention;

[0029] Figure 5 An optical sequence diagram for manipulating the nanowires located on the substrate contact surface according to the present invention;

[0030] Figure 6 Diagram of the optical sequence used to manipulate nanowires suspended in liquid. DETAILED DESCRIPTION

[0031] The present invention is described in detail below with reference to the accompanying drawings and specific embodiments. This embodiment is implemented based on the technical solution of the present invention, and provides a detailed implementation method and specific operation process, but the protection scope of the present invention is not limited to the following embodiments.

[0032] like Figure 1 The structure block diagram of the laser manipulation system for two-dimensional contact surface and three-dimensional suspension space in liquid environment is shown. The system includes: host computer 1, automatic control module 2, laser driving module 3, sample box 4, image acquisition module 5;

[0033] The host computer 1 is used to set the control parameters of each component of the laser driving module 3, or the shape, start and end points, and step length of the moving path of the micro-nano object in the sample box 4, etc.

[0034] The automatic control module 2 is used to generate control signals, modulate the laser parameters (including wavelength, frequency, pulse width and power) in the laser driving module 3 according to the control parameters set by the host computer 1, realize the output of pulse control laser, and modulate the control voltage of the two-dimensional scanning galvanometer and the moving signal of the three-dimensional motorized displacement stage in the laser driving module 3, realize the movement of the micro-nano object in the sample box 4.

[0035] The laser driving module 3 is used to generate a control light path, receive the control signals of the automatic control module 2, change the continuous laser into pulse laser output, and then be incident into the sample box 4 to control the micro-nano object.

[0036] The image acquisition module 5 is used to image the micro-nano object in the sample box 4 in real time, observe the control process of the micro-nano object, and feed back the image to the host computer 1.

[0037] As shown in Figure 2 The core unit of the automatic control module 2 is an embedded processor 7, and the automatic control module 2 includes an LCD touch display module 6, an embedded processor 7, a digital-to-analog conversion module 8, and a power management module 9. The LCD touch display module 6 is used to communicate with the embedded processor 7 and input and display the control parameters. The embedded processor 7 is used to calculate and process the input control parameters and obtain the digital signals required for controlling each component. The digital-to-analog conversion module 8 is used to generate analog driving signals corresponding to the digital signals output by the embedded processor 7. The power management module 9 is used to meet the different power supply requirements of the LCD touch display module 6, the embedded processor 7 and the digital-to-analog conversion module 8, and provide power support.

[0038] The automatic control module 2 includes two working modes: host mode and slave mode. In the host mode, the embedded processor 7 is connected with the LCD touch display module 6, and obtains the control parameters of each component required for controlling the micro-nano object through the LCD touch display module 6. In the slave mode, the embedded processor 7 is connected with the host computer 1, and obtains the control parameters of each component required for controlling the micro-nano object through the host computer 1.

[0039] The embedded processor 7 is further divided into an ARM core and an FPGA, and the ARM core is used to calculate and process the control parameters, and the FPGA is used to generate digital control signals corresponding to the control signals.

[0040] The structure of the digital-to-analog conversion module 8 is as shown in Figure 3As shown, including digital-to-analog conversion chip U1, U4, U7, U11, fixed resistor R1, R2, R3, R5, R6, R7, R8, R10, R11, R12, R13, R14, adjustable resistor R4, R9, capacitor C1, C2, C3, C4, C5, C6, C7, C8, operational amplifier U2, U3, U5, U6, U8, U9, U12, U13 and variable gain operational amplifier U10, U14.

[0041] The composition and connection relationship of each component of the digital-to-analog conversion module 8 are described as follows:

[0042] For the first circuit, the digital-to-analog conversion chip U1 and the operational amplifier U2 constitute a DAC converter, the resistors R1, R2 and the capacitors C1, C2 constitute two sets of low-pass filter circuits, the resistors R3, R5 and the adjustable resistor R4 constitute an adjustable attenuation circuit, and the operational amplifier U3 constitutes a voltage follower circuit; the DAC converter, the low-pass filter circuit and the adjustable attenuation circuit are connected in series, and the first output signal is connected to one of the two-dimensional scanning galvanometer mirrors.

[0043] For the second circuit, the digital-to-analog conversion chip U4 and the operational amplifier U5 constitute a DAC converter, the resistors R6, R7 and the capacitors C3, C4 constitute two sets of low-pass filter circuits, the resistors R8, R10 and the adjustable resistor R9 constitute an adjustable attenuation circuit, and the operational amplifier U6 constitutes a voltage follower circuit; the DAC converter, the low-pass filter circuit and the adjustable attenuation circuit are connected in series, and the second output signal is connected to the other of the two-dimensional scanning galvanometer mirrors.

[0044] For the third circuit, the digital-to-analog conversion chip U7 and the operational amplifier U8 constitute a DAC converter, the resistors R11, R12, the capacitors C5, C6 and the operational amplifier U9 constitute a low-pass filter circuit, and the variable gain operational amplifier U11 constitutes an adjustable gain circuit; the DAC converter, the low-pass filter circuit and the adjustable gain circuit are connected in series, and the third output signal is connected to the laser.

[0045] For the fourth circuit, the digital-to-analog conversion chip U11 and the operational amplifier U12 constitute a DAC converter, the resistors R13, R14, the capacitors C7, C8 and the operational amplifier U13 constitute a low-pass filter circuit, and the variable gain operational amplifier U14 constitutes an adjustable gain circuit; the DAC converter, the low-pass filter circuit and the adjustable gain circuit are connected in series, and the fourth output signal is connected to the three-dimensional electric displacement platform.

[0046] Specifically, the DAC converter is used to convert the digital control signal output by the embedded processor into an analog control signal; the low-pass filter circuit in the first and second circuits is a second-order passive low-pass filter circuit, and the low-pass filter circuit in the third and fourth circuits is a second-order active low-pass filter circuit, which is used to eliminate the short pulse waveform interference of the DAC converter output signal; the adjustable attenuation circuit in the first and second circuits is an adjustable voltage division attenuator, and the adjustable gain circuit in the third and fourth circuits is a variable gain operational amplifier, which are both used to provide a certain attenuation or gain according to the requirements of the control parameters; the voltage follower circuit is used to improve the load capacity of the output signal.

[0047] The laser driving module 3 is part of the system for the purpose of manipulating micro-nano objects, and its structure is shown in Figure 4 The laser driving module 3 is part of the system for the purpose of manipulating micro-nano objects, and its structure is shown in

[0048] In some embodiments, the speed and precision control of the micro-nano object can be achieved by adjusting the repetition frequency and average power of the laser 10.

[0049] In some embodiments, the control of the micro-nano object in the direction of laser propagation can be achieved by adjusting the average power of the laser 10.

[0050] In some embodiments, the material of the manipulated micro-nano object is gold, but it is not limited thereto, and most of the light-thermal absorption materials can meet the manipulation conditions.

[0051] In some embodiments, the manipulated micro-nano object is a nanowire, but it is not limited thereto, and the combination of nanosheets and multiple nanomaterials can also meet the manipulation conditions.

[0052] The control parameters of each component include the parameters of the laser 10, the two-dimensional scanning galvanometer 12, and the three-dimensional motorized displacement table 13.

[0053] The control parameters of the laser include wavelength, frequency, and pulse width, which can be modulated by the TTL level signal of the external pump source of the laser 10 to control the on-off of the laser signal. In some embodiments, the wavelength of the laser 10 is 532 nm, the repetition frequency is 12 kHz, and the pulse width is 15 ns, but it is not limited thereto. The laser wavelength is the absorption wavelength of the manipulated micro-nano object, i.e., 300 nm-2 mu m, the modulation repetition frequency is ≤100 kHz, and the pulse width is 1 ns-100 mu s, which can meet the manipulation conditions.

[0054] The control parameter of the two-dimensional scanning galvanometer 12 is the mapping relationship between the electric control signal amplitude and the galvanometer deflection angle, including the control signal voltage range corresponding to the deflection range of the galvanometer, and the voltage range is ±100mV.

[0055] The control parameter of the three-dimensional electric displacement table 13 is the mapping relationship between the electric control signal amplitude and the micrometer screw rotation angle, including the control signal voltage range corresponding to the micrometer screw rotation angle range, and the voltage range is 85V-125V.

[0056] Method for using the laser control system for two-dimensional contact surface and three-dimensional suspension space in liquid environment:

[0057] First step: according to the material properties of the controlled object, the output wavelength of the laser 10 is selected;

[0058] Second step: use the automatic control module 2 to adjust the on and off state of the transistor in the laser 10, so that the output continuous light signal becomes a short pulse laser control signal with a certain frequency and pulse width;

[0059] Third step: focus the pulsed laser on the substrate contact surface or suspension space where the nanometer object is located in the sample box 4, form a light trap-like light field gradient distribution, and realize the capture of the micro-nano object;

[0060] Fourth step: use the image acquisition module 5 to observe the controlled micro-nano object in real time, and set the start and end points, path, and step length of the micro-nano object movement through the host computer 1 or the LCD touch display module 6.

[0061] Fifth step: adjust the output voltage of the servo driver in the two-dimensional scanning galvanometer 12 through the automatic control module 2 to change the rotation angle of the galvanometer and change the light trap-like light field gradient distribution, so that the micro-nano object moves according to the setting of the fourth step, and realizes the control of the micro-nano object in a small range; or adjust the power supply voltage of the three-dimensional electric displacement table 13 through the automatic control module 2, rotate the micrometer screw, change the position of the sample box 4, and then change the relative position between the micro-nano object and the light trap-like light field gradient distribution, so that the micro-nano object moves according to the setting of the fourth step, and realizes the control of the micro-nano object in a large range. Specific embodiment 1:

[0063] Method for controlling nanowires located on the substrate contact surface by the laser control system for two-dimensional contact surface and three-dimensional suspension space in liquid environment:

[0064] The gold nanowires are randomly dispersed on the contact surface of the sample box substrate, and then pure water is injected into the sample box. Due to the gravity and the adsorption between the substrate and the nanowires, the gold nanowires are still stationary on the contact surface of the substrate. By means of the automatic control module, the continuous laser is modulated to output a pulsed laser signal with a wavelength of 532 nm, a repetition frequency of 12 kHz, a pulse width of 15 ns, and an average power of 300 μW. Then the laser beam is focused into a spot with a diameter of 9.3 μm through the objective lens. When the spot acts on a position above the center of a 20 μm flat gold nanowire, the nanowire gradually moves towards the spot until the center of the nanowire and the center of the spot roughly coincide. Under the continuous action of the laser, the gold nanowire is captured by the optical trap formed by the center of the spot. By changing the position of the spot through the automatic control module, it can be observed that the gold nanowire moves accordingly, and the nanowire on the contact surface of the substrate can be manipulated by this method. The effect is shown in the optical sequence diagram of the manipulation of the nanowire on the contact surface of the substrate. Figure 5 The optical sequence diagram of the manipulation of the nanowire on the contact surface of the substrate. Specific embodiment 2:

[0066] Method for laser manipulation system for two-dimensional contact surface and three-dimensional suspended space in liquid environment to manipulate nanowires suspended in sample solution:

[0067] The sample box in embodiment 1 is placed in an ultrasonic oscillator for oscillation, so that part of the gold nanowires are separated from the substrate and suspended in a pure water environment. The position of the target micro-nano object is adjusted to the focal plane again by adjusting the z-axis position of the three-dimensional electric displacement table through the automatic control module. When the modulated laser signal with a repetition frequency of 12 kHz, a pulse width of 15 ns, and an average power of 230 μW is focused on one end of the suspended gold nanowire with a length of 31 μm, the nanowire gradually moves away from the spot. Due to the existence of Brownian motion, the nanowire rotates along its central axis while moving. Under the continuous action of the laser, the gold nanowire is constantly pushed away from the spot by changing the position of the spot, and the two-dimensional manipulation of the nanowire suspended in the solution on the focal plane can be realized by this method.

[0068] The average power of the laser is further increased to 450 μW, thereby enhancing the force of the optical trap in the direction of light propagation, causing the nanowire to move upward along the direction of laser propagation until the force of gravity and the force of action are balanced. At this time, the nanowire leaves the focal plane. By adjusting the position of the sample box through the three-dimensional electric displacement table, the nanowire is brought back to the focal plane again, and is pushed away from the focal plane by the force of the optical trap in the direction of laser propagation. The three-dimensional manipulation of the nanowire suspended in the sample solution in the direction of laser propagation can be realized by this method; the effect is shown in the optical sequence diagram of the manipulation of the nanowire suspended in the liquid. Figure 6 The optical sequence diagram of the manipulation of the nanowire suspended in the liquid.

[0069] In combination with the above two-dimensional manipulation, three-dimensional manipulation of the nanowire suspended in the sample solution can also be realized.

[0070] The above embodiments only express several implementation manners of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the scope of the patent. It should be noted that for ordinary skilled persons in the art, without departing from the concept of the present application, several modifications and improvements can be made, which are within the scope of protection of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A method for manipulating micro-nano objects, characterized in that: A laser manipulation system for two-dimensional contact surfaces and three-dimensional suspended spaces in a liquid environment is used to manipulate micro-nano objects. The laser manipulation system includes a host computer, an automatic control module, a laser drive module, a sample box, and an image acquisition module. The specific steps include: Step 1: Select the laser output wavelength based on the material properties of the object being manipulated; Step 2: Use the automatic control module to adjust the on and off states of the transistors in the laser, so that the output continuous light signal is converted into a short-pulse laser control signal with the required frequency and pulse width; Step 3: Focus the pulsed laser onto the substrate contact surface or suspended space where the nano-object is located in the sample box, forming a light trap with a light field gradient distribution to capture the micro-nano object; Step 4: Use the image acquisition module to observe the manipulated micro-nano object in real time, and set the starting and ending points, path, and step length of the micro-nano object's movement through the host computer or LCD touch display module; Step 5: Adjust the output voltage of the servo driver in the two-dimensional scanning galvanometer through the automatic control module to change the rotation angle of the galvanometer and thus change the position of the quasi-light trap, so that the micro-nano object moves according to the settings of the fourth step, and the manipulation of the micro-nano object is achieved in a small range; or adjust the power supply voltage of the three-dimensional electric translation stage through the automatic control module, rotate the micrometer screw to change the position of the sample box, and then change the relative position between the micro-nano object and the quasi-light trap, so that the micro-nano object moves according to the settings of the fourth step, and the manipulation of the micro-nano object is achieved in a large range.

2. The method for manipulating micro-nano objects according to claim 1, characterized in that: The automatic control module is used to generate control signals, modulate the laser parameters in the laser driving module according to the control parameters set by the host computer, and realize the output of pulsed laser control; and the two-dimensional scanning galvanometer control voltage and the three-dimensional electric translation stage movement signal in the laser driving module to realize the movement of the micro-nano objects in the sample box; the automatic control module includes an embedded processor, a digital-to-analog conversion module and a power management module. The embedded processor is used to calculate and process the input control parameters and obtain the digital signals required to control each component; The digital-to-analog conversion module is used to generate an analog driving signal corresponding to the digital signal output by the embedded processor; The power management module is used to meet the different power supply requirements of the embedded processor and the digital-to-analog conversion module.

3. The method for manipulating micro-nano objects according to claim 2, characterized in that: The automatic control module further includes an LCD touch display module, which is used to communicate with the embedded processor and input and display control parameters.

4. The method for manipulating micro-nano objects according to claim 1, characterized in that: The laser driving module is used to generate a manipulation light path, receive control signals from the automatic control module, convert continuous laser into pulsed laser output and inject it into the sample box to manipulate the micro-nano object; the laser driving module includes a laser, an optical path unit, a two-dimensional scanning galvanometer, and a three-dimensional electric translation stage; the laser is used to generate a continuous laser signal; the optical path unit is used to guide the manipulation light path to be incident on the micro-nano object; the two-dimensional scanning galvanometer and the three-dimensional electric translation stage are respectively used to adjust the relative position of the light trap and the micro-nano object to realize the manipulation of the micro-nano object.

5. The method for manipulating micro-nano objects according to claim 2, characterized in that: The adjustment range of the laser wavelength is 300nm-2μm, the adjustment range of the pulse width is 1ns-100μs, and the adjustment range of the repetition frequency is ≤100kHz.

6. The method for manipulating micro-nano objects according to claim 2, characterized in that: The repetition frequency and average power parameters of the laser are adjusted to achieve control of the moving speed and precision of the micro-nano object.

7. The method for manipulating micro-nano objects according to claim 1, characterized in that: The micro-nano object is a nanowire or nanosheet located on the substrate contact surface or suspended in the sample solution.

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