Automatic tube vacuum degree adjustment device and adjustment method
Through the automatic tube vacuum adjustment device, the combination of the solenoid valve and the diaphragm gauge is used to achieve rapid and accurate adjustment of the pipeline vacuum, solving the problem of the inability to change the vacuum in the existing technology and improving the process efficiency.
Patent Information
- Application Number
- CN202311173721.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-09-12
- Publication Date
- 2025-09-12
- Estimated Expiration
- 2043-09-12
AI Technical Summary
Existing technologies are unable to quickly change the vacuum level in the pipeline according to demand, resulting in low process efficiency.
An automatic tube vacuum adjustment device is used, including a frame, a valve mounting plate, a pressure sensor, a solenoid valve, a vacuum pump, a diaphragm gauge and an electronic control component. The solenoid valve controls the switch of the pneumatic bellows valve. Combined with the diaphragm gauge with a measurement accuracy of 0.2%, automatic adjustment of the vacuum degree is achieved.
It realizes precise control of pipeline vacuum degree according to operational requirements, and improves the working efficiency and convenience of operators.
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Figure CN117146200B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of gas process treatment, and in particular to a tube vacuum degree automatic adjustment device and an adjustment method. Background Art
[0002] Modern gas processing processes place high demands on pipeline vacuum levels. Rapidly changing pipeline vacuum levels based on different gas processes determines process efficiency. This system enables rapid changes in pipeline vacuum. For typical pipeline vacuum levels, the vacuum level is determined by the vacuum pump's limits and is typically equal to the pump's ultimate vacuum level, making it impossible to adjust the pipeline vacuum level. Summary of the Invention
[0003] The object of the present invention is to provide a device and method for automatically adjusting the vacuum degree of a pipe, so as to solve the technical problem in the prior art that the vacuum degree of the pipe cannot be changed according to demand.
[0004] To achieve the above-mentioned objectives, the present invention provides an automatic adjustment device for tube vacuum degree, comprising a frame, a valve mounting plate, a pressure sensor, a solenoid valve, a vacuum pump, a first diaphragm gauge and a second diaphragm gauge, wherein the valve mounting plate, the solenoid valve and the vacuum pump are vertically mounted on the frame, and the pressure sensor, the first diaphragm gauge and the second diaphragm gauge are mounted on the valve mounting plate through the valve mounting frame; a manual bellows valve and a plurality of pneumatic bellows valves are mounted on the pressure sensor, and a plurality of pneumatic valves are mounted on the first diaphragm gauge and the second diaphragm gauge; the plurality of pneumatic bellows valves are connected to the solenoid valve through an air pipe, and the vacuum pump is connected to the first diaphragm gauge through an exhaust bellows.
[0005] Furthermore, an electric control component is provided on the frame, the electric control component is electrically connected to the solenoid valve, the electric control component realizes the on-off control of the pneumatic bellows valve by controlling the on-off of the battery valve, and the electric control component is electrically connected to the control panel.
[0006] Furthermore, the pressure sensor, the first diaphragm gauge and the second diaphragm gauge are connected by a four-way joint. The second diaphragm gauge is arranged between the first diaphragm gauge and the pressure sensor. The four-way joint is divided into a first four-way joint, a second four-way joint and a third four-way joint. The first diaphragm gauge is connected to the first four-way joint, the second diaphragm gauge is connected to the second four-way joint, and the pressure sensor is connected to the third four-way joint.
[0007] Furthermore, manual bellows valves or pneumatic bellows valves are respectively provided on the four ports of the four-way connector, a manual bellows valve and three pneumatic bellows valves are provided on the third four-way connector, and four pneumatic bellows valves are provided on the four ports of the first four-way connector and the second four-way connector. The pneumatic bellows valves are divided into a first pneumatic valve, a second pneumatic valve, a third pneumatic valve, a fourth pneumatic valve, a fifth pneumatic valve, a sixth pneumatic valve, a seventh pneumatic valve, an eighth pneumatic valve and a ninth pneumatic valve.
[0008] Furthermore, the first four-way joint is connected to the vacuum pump through the sixth pneumatic valve, a first pneumatic valve is arranged between the third four-way joint and the pressure sensor, a second pneumatic valve is arranged between the second four-way joint and the second diaphragm gauge, and a third pneumatic valve is arranged between the first four-way joint and the first diaphragm gauge; a fourth pneumatic valve is arranged between the third four-way joint and the second four-way joint, and a fifth pneumatic valve is arranged between the second four-way joint and the first four-way joint; the third four-way joint is connected to the test gas system through the seventh pneumatic valve, and the test gas system is introduced with test gas or atmosphere, a ninth pneumatic valve and an eighth pneumatic valve are respectively arranged on the first four-way joint and the second four-way joint to be connected to the external piping system, and the external piping system is used to control the vacuum degree.
[0009] Furthermore, the measurement accuracy of the first diaphragm gauge and the second diaphragm gauge is 0.2%, the measurement range of the atmospheric pressure value of the first diaphragm gauge is 13.3Pa-133322Pa, and the measurement range of the atmospheric pressure value of the second diaphragm gauge is 0.133Pa-1333.22Pa.
[0010] Furthermore, a plurality of air quick-connect connectors are provided on the solenoid valve, and the plurality of pneumatic quick-connect connectors are respectively connected to air pipes, and the air pipes are respectively connected to a plurality of pneumatic bellows valves.
[0011] A method for automatically adjusting the vacuum degree of a tube comprises the following steps:
[0012] S1. The operator inputs the pipeline vacuum required by the process on the operation panel. Thin-film gauges with different measuring ranges are used according to the value input by the operator. If the value input by the operator is greater than 1000Pa, the third pneumatic valve opens and the first thin-film gauge starts working. If the value input by the operator is less than 1000Pa, the second pneumatic valve opens and the second thin-film gauge starts working.
[0013] S2. The operator manually connects the external piping system to the interfaces of the eighth and ninth pneumatic valves, and connects the test gas system to the interface of the seventh pneumatic valve. The eighth and ninth pneumatic valves are manually opened and closed according to the vacuum value manually input by the operator. The fourth and fifth pneumatic valves are opened after the value input by the operator. The other pneumatic bellows valves are all closed, and the vacuum pump is in operation.
[0014] S3. The system compares the input value with the regulated value through the intermediate processor. If the input value is larger than the regulated value, the system triggers the seventh pneumatic valve through the solenoid valve, causing the seventh pneumatic valve to open and close once in a very short time, allowing air to enter the system to increase the vacuum level. If the input value is smaller than the regulated value, the system triggers the sixth pneumatic valve through the solenoid valve to extract gas from the pipeline to reduce the vacuum level.
[0015] S4: Because the system's air intake and exhaust volumes cannot be controlled, after the seventh pneumatic valve completes a single opening and closing, the input value is compared with the regulated value again. If the input value is still greater than the regulated value, the system continues to activate the seventh pneumatic valve to increase the vacuum level. After the sixth pneumatic valve completes a single opening and closing, the input value is compared with the regulated value again. If the input value is still less than the regulated value, the system continues to activate the sixth pneumatic valve to increase the vacuum level.
[0016] S5. The system adjusts the vacuum degree of the pipeline by continuously inhaling and exhaling air until the input value is approximately equal to the regulated value. Subject to the influence of other factors, the system is allowed to have a 2% error. That is, when the input value is 1000Pa, the system regulated vacuum value reading is reasonable in the range of 980Pa to 1020Pa.
[0017] Based on the above technical solution, the present invention can produce the following beneficial effects:
[0018] The present invention provides an automatic pipe vacuum degree adjustment device and adjustment method, which can control the pipe vacuum degree according to the needs of the operator, provide good convenience and operability to the operator, and greatly improve the operator's work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is a structural diagram of an embodiment of the present invention;
[0020] Figure 2 It is a structural front view of an embodiment of the present invention;
[0021] Figure 3 is a structural diagram of a regulating system according to an embodiment of the present invention;
[0022] Figure 4 is an operational flow chart of an embodiment of the present invention;
[0023] In the figure: 1. Rack; 2. Valve mounting plate; 3. Pressure sensor; 4. Valve mounting frame; 5. Manual bellows valve; 6. Four-way connector; 7. Pneumatic bellows valve; 701. First pneumatic valve; 702. Second pneumatic valve; 703. Third pneumatic valve; 704. Fourth pneumatic valve; 705. Fifth pneumatic valve; 706. Sixth pneumatic valve; 707. Seventh pneumatic valve; 708. Eighth pneumatic valve; 709. Ninth pneumatic valve; 8. Plastic air pipe; 9. Control panel; 10. Solenoid valve; 11. Vacuum pump; 12. Exhaust bellows; 13. First diaphragm gauge; 14. Second diaphragm gauge; 15-Electronic control component. DETAILED DESCRIPTION
[0024] In order to better understand the purpose, structure and function of the present invention, the following is a further detailed description of a tube vacuum automatic adjustment device and adjustment method of the present invention in conjunction with the accompanying drawings.
[0025] In the description of the present invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "back," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of the present invention and simplify the description. They are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0026] like Figure 1-Figure 2 As shown, the present invention provides an automatic adjustment device for tube vacuum degree, comprising a frame 1, a valve mounting plate 2, a pressure sensor 3, a solenoid valve 10, a vacuum pump 11, a first diaphragm gauge 13 and a second diaphragm gauge 14, wherein the valve mounting plate 2, the solenoid valve 10 and the vacuum pump 11 are vertically mounted on the frame 1, and the pressure sensor 3, the first diaphragm gauge 13 and the second diaphragm gauge 14 are mounted on the valve mounting plate 2 through the valve mounting frame 4; a manual bellows valve 5 and a plurality of pneumatic bellows valves 7 are mounted on the pressure sensor 3, and a plurality of pneumatic valves 7 are mounted on the first diaphragm gauge 13 and the second diaphragm gauge 14; the plurality of pneumatic bellows valves 7 are connected to the solenoid valve 10 through the air pipe 8, and the vacuum pump 11 is connected to the first diaphragm gauge 13 through the exhaust bellows 12.
[0027] An electric control component 15 is provided on the frame 1 , and the electric control component 15 is electrically connected to the solenoid valve 10 . The electric control component 15 controls the on / off of the pneumatic bellows valve 7 by controlling the on / off of the battery valve 10 . The electric control component 15 is electrically connected to the control panel 9 .
[0028] The pressure sensor 3, the first diaphragm gauge 13 and the second diaphragm gauge 14 are connected by a four-way joint 6. The second diaphragm gauge 14 is arranged between the first diaphragm gauge 13 and the pressure sensor 3. The four-way joint 6 is divided into a first four-way joint, a second four-way joint and a third four-way joint. The first diaphragm gauge 13 is connected to the first four-way joint, the second diaphragm gauge 14 is connected to the second four-way joint, and the pressure sensor 3 is connected to the third four-way joint.
[0029] like Figure 3As shown, manual bellows valves 5 or pneumatic bellows valves 7 are respectively provided on the four ports of the four-way connector 6, one manual bellows valve 5 and three pneumatic bellows valves 7 are provided on the third four-way connector, and four pneumatic bellows valves 7 are provided on the four ports of the first four-way connector and the second four-way connector. The pneumatic bellows valves 7 are divided into a first pneumatic valve 701, a second pneumatic valve 702, a third pneumatic valve 703, a fourth pneumatic valve 704, a fifth pneumatic valve 705, a sixth pneumatic valve 706, a seventh pneumatic valve 707, an eighth pneumatic valve 708 and a ninth pneumatic valve 709.
[0030] The first four-way connector is connected to the vacuum pump 11 through the sixth pneumatic valve 706, a first pneumatic valve 701 is arranged between the third four-way connector and the pressure sensor 3, a second pneumatic valve 702 is arranged between the second four-way connector and the second diaphragm gauge 14, and a third pneumatic valve 703 is arranged between the first four-way connector and the first diaphragm gauge 13; a fourth pneumatic valve 704 is arranged between the third four-way connector and the second four-way connector, and a fifth pneumatic valve 705 is arranged between the second four-way connector and the first four-way connector; the third four-way connector is connected to the test gas system through the seventh pneumatic valve 707, and the test gas system is introduced with test gas or atmosphere, a ninth pneumatic valve 709 and an eighth pneumatic valve 708 are respectively arranged on the first four-way connector and the second four-way connector to be connected to the external pipeline system, and the external pipeline system is used to control the vacuum degree.
[0031] The measurement accuracy of the first film gauge 13 and the second film gauge 14 is 0.2%. The measurement range of the atmospheric pressure value of the first film gauge 13 is 13.3Pa-133322Pa, and the measurement range of the atmospheric pressure value of the second film gauge 14 is 0.133Pa-1333.22Pa.
[0032] The solenoid valve 10 is provided with a plurality of air quick-connect connectors, and the plurality of pneumatic quick-connect connectors are respectively connected to air pipes 8 , and the air pipes 8 are respectively connected to a plurality of pneumatic bellows valves 7 .
[0033] A method for automatically adjusting the vacuum degree of a tube, such as Figure 4 As shown, it includes the following steps:
[0034] S1. The operator inputs the pipeline vacuum required by the process on the operation panel 9. Thin-film gauges with different measuring ranges are used according to the value input by the operator. When the input value is greater than 1000 Pa, the third pneumatic valve 703 opens and the first thin-film gauge 13 starts to work. When the input value is less than 1000 Pa, the second pneumatic valve 702 opens and the second thin-film gauge 14 starts to work.
[0035] S2. The operator manually connects the external piping system to the interfaces of the eighth pneumatic valve 708 and the ninth pneumatic valve 709, and connects the test gas system to the interface of the seventh pneumatic valve 707. The eighth pneumatic valve 708 and the ninth pneumatic valve 709 are manually opened and closed according to the vacuum value manually input by the operator. The fourth pneumatic valve 704 and the fifth pneumatic valve 705 are opened after the operator inputs the value. The other pneumatic bellows valves 7 are all in the closed state, and the vacuum pump 11 is in the working state.
[0036] S3. The system compares the input value with the regulated value through the intermediate processor. If the input value is larger than the regulated value, the system activates the seventh pneumatic valve 707 through the solenoid valve 10, causing the seventh pneumatic valve 707 to open and close once in a very short time, allowing air to enter the system to increase the vacuum level. If the input value is smaller than the regulated value, the system activates the sixth pneumatic valve 706 through the solenoid valve 10, extracting gas from the pipeline to reduce the vacuum level.
[0037] S4. Because the system's air intake and exhaust volumes cannot be controlled, after the seventh pneumatic valve 707 completes a single opening and closing, the input value is compared with the regulated value again. If the input value is still greater than the regulated value, the system continues to actuate the seventh pneumatic valve 707 to admit air to increase the vacuum level. After the sixth pneumatic valve 706 completes a single opening and closing, the input value is compared with the regulated value again. If the input value is still less than the regulated value, the system continues to actuate the sixth pneumatic valve 706 to exhaust air to increase the vacuum level.
[0038] S5. The system adjusts the vacuum degree of the pipeline by continuously inhaling and exhaling air until the input value is approximately equal to the regulated value. Subject to the influence of other factors, the system is allowed to have a 2% error. That is, when the input value is 1000Pa, the system regulated vacuum value reading is reasonable in the range of 980Pa to 1020Pa.
[0039] It will be understood that the present invention is described by way of certain embodiments, and it will be appreciated by those skilled in the art that various changes or equivalent substitutions may be made to these features and embodiments without departing from the spirit and scope of the present invention. In addition, under the teachings of the present invention, these features and embodiments may be modified to suit specific circumstances and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are intended to be protected by the present invention.
Claims
1. A device for automatically adjusting the vacuum degree of a tube, characterized in that: The invention comprises a frame (1), a valve mounting plate (2), a pressure sensor (3), a solenoid valve (10), a vacuum pump (11), a first diaphragm gauge (13) and a second diaphragm gauge (14); the valve mounting plate (2), the solenoid valve (10) and the vacuum pump (11) are vertically mounted on the frame (1); the valve mounting plate (2) is mounted with the pressure sensor (3), the first diaphragm gauge (13) and the second diaphragm gauge (14) via the valve mounting frame (4); the pressure sensor (3) is connected to the manual bellows valve (5) and a plurality of pneumatic bellows valves (7); the first diaphragm gauge (13) and the second diaphragm gauge (14) are connected to the plurality of pneumatic bellows valves (7); the pneumatic bellows valves (7) connected to the pressure sensor (3), the first diaphragm gauge (13) and the second diaphragm gauge (14) are all connected to the solenoid valve (10) via an air pipe (8); the vacuum pump (11) is connected to the first diaphragm gauge (13) via an exhaust bellows (12); The pressure sensor (3), the first diaphragm gauge (13) and the second diaphragm gauge (14) are connected by a four-way joint (6); the second diaphragm gauge (14) is arranged between the first diaphragm gauge (13) and the pressure sensor (3); the four-way joint (6) is divided into a first four-way joint, a second four-way joint and a third four-way joint; the first diaphragm gauge (13) is connected to the first four-way joint, the second diaphragm gauge (14) is connected to the second four-way joint, and the pressure sensor (3) is connected to the third four-way joint; A manual bellows valve (5) and three pneumatic bellows valves (7) are respectively provided on the four ports of the third four-way connector, and four pneumatic bellows valves (7) are respectively provided on the four ports of the first four-way connector and the second four-way connector, wherein the pneumatic bellows valves (7) include a first pneumatic valve (701), a second pneumatic valve (702), a third pneumatic valve (703), a fourth pneumatic valve (704), a fifth pneumatic valve (705), a sixth pneumatic valve (706), a seventh pneumatic valve (707), an eighth pneumatic valve (708) and a ninth pneumatic valve (709); The first four-way connector is connected to the vacuum pump (11) via the sixth pneumatic valve (706); a first pneumatic valve (701) is provided between the third four-way connector and the pressure sensor (3); a second pneumatic valve (702) is provided between the second four-way connector and the second diaphragm gauge (14); and a third pneumatic valve (703) is provided between the first four-way connector and the first diaphragm gauge (13); a fourth pneumatic valve (704) is provided between the third four-way connector and the second four-way connector, and a fifth pneumatic valve (705) is provided between the second four-way connector and the first four-way connector; the third four-way connector is connected to the test gas system via the seventh pneumatic valve (707), and the test gas system is fed with the test gas; the first four-way connector is connected to the external pipe system via the ninth pneumatic valve (709), and the second four-way connector is connected to the external pipe system via the eighth pneumatic valve (708), and the external pipe system is used to control the vacuum degree; The vacuum degree is adjusted by touching the seventh pneumatic valve (707) or the sixth pneumatic valve (706).
2. The automatic tube vacuum adjustment device according to claim 1, characterized in that: An electric control component (15) is provided on the frame (1), and the electric control component (15) is electrically connected to the solenoid valve (10). The electric control component (15) controls the on / off state of the pneumatic bellows valve (7) by controlling the on / off state of the solenoid valve (10). The electric control component (15) is electrically connected to the control panel (9).
3. The automatic tube vacuum adjustment device according to claim 2, characterized in that: The measurement accuracy of the first film gauge (13) and the second film gauge (14) is 0.2%. The measurement range of the atmospheric pressure value of the first film gauge (13) is 13.3Pa-133322Pa, and the measurement range of the atmospheric pressure value of the second film gauge (14) is 0.133Pa-1333.22Pa.
4. The automatic tube vacuum adjustment device according to claim 3, characterized in that: The solenoid valve (10) is provided with a plurality of air path quick plug connectors, the plurality of air path quick plug connectors are respectively connected to air pipes (8), and the air pipes (8) are respectively connected to a plurality of pneumatic bellows valves (7).
Citation Information
Patent Citations
Vacuum measuring device control system and semiconductor processing device
CN101819438A
Calibration apparatus of on-site wide-range vacuum gauge and method thereof
CN102393275A